An edge exposure device and exposure method

Abstract

This invention discloses an edge exposure device and method, belonging to the field of edge exposure technology. It includes a feeding assembly with a feeding mechanism on its inner side and a turnover frame on its side. Exposure frames are connected to both sides of the top of the turnover frame. Two first linear modules are connected between the two exposure frames, and the top of the two slides of the two first linear modules is connected to the same second linear module. In this invention, during the entire clamping, adsorption, and pulling process, the system integrates a torque sensor, a first pressure sensor, and a tension sensor. This multi-sensor module collaborative monitoring mechanism can accurately control the clamping force, pushing force, and pulling force acting on the glass substrate in real time, fundamentally avoiding problems such as upward arching, downward concavity, or unstable positioning of the glass substrate due to improper force application. This greatly ensures the safety and shape integrity of the thin and brittle substrate during processing.

Description

Technical Field

[0001] This invention belongs to the field of edge exposure technology, and particularly relates to an edge exposure device and exposure method. Background Technology

[0002] The core function of the edge exposure device is to remove the photoresist in the edge area of ​​the glass substrate through precise local exposure and subsequent development, thereby eliminating the risk of contamination caused by edge adhesive layer peeling off from the source. It is one of the key auxiliary equipment to ensure high yield production.

[0003] Existing technologies disclose several invention patents in the field of edge exposure technology. Among them, patent CN104678710B discloses an edge exposure device, including an adsorption rotary table for adsorbing and rotating a silicon wafer, a motor for powering the adsorption rotary table, and an edge exposure lens assembly including an edge exposure lens and an exposure spot monitoring lens. The edge exposure lens, along the light propagation direction, sequentially includes: an exposure light source, first and second compound eye lenses, orthogonally placed first and second cylindrical zoom lens groups, a beam splitter, and a controller for controlling the motor, the edge exposure lens, and the exposure spot monitoring lens. The method involves separately adjusting the combined focal length of the first and second cylindrical zoom lens groups to control the length and width of the edge exposure field. The exposure field is obtained by cooperating with the first and second compound eye lenses and the first and second cylindrical zoom lens groups. Automatic focusing, exposure dose, and exposure size monitoring are achieved through coaxial imaging or energy detection optical paths of the exposure field spot. However, this technical solution still has some shortcomings in its application. Traditional clamping methods are prone to stress concentration inside the glass substrate, which can cause substrate deformation. This deformation not only directly poses a risk of breakage but also affects the pattern accuracy and process yield of the edge exposure due to excessive positioning flatness.

[0004] Based on this, the present invention designs an edge exposure device and exposure method to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to address the problem that traditional clamping methods easily cause stress concentration inside the glass substrate, leading to substrate deformation. This deformation not only directly poses a risk of breakage but also affects the pattern accuracy and process yield of edge exposure due to excessive positioning flatness. Therefore, this invention proposes an edge exposure device and exposure method.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An edge exposure device includes a feeding assembly, an inner feeding mechanism, a turnover frame on the side of the feeding assembly, exposure frames connected to both sides of the top of the turnover frame, two first linear modules connected between the two exposure frames, and the top of the two slides of the two first linear modules connected to the same second linear module, with a CCD and an LED lamp head respectively mounted on the two slides of the second linear module.

[0008] The inner side of the turnover rack is connected to a fixed plate. The top of the fixed plate has a transmission port, and a transmission shaft is rotatably connected to the transmission port. A second motor is installed at the bottom of the fixed plate. The output end of the second motor is connected to the bottom end of the transmission shaft. A wheel is fitted onto the other end of the transmission shaft. Multiple fixed shafts arranged in a circular array are connected to the top of the wheel. A top plate is connected to the top of the multiple fixed shafts. A glass substrate is placed on the top plate. Multiple electric cylinders are connected and installed around the top of the top plate corresponding to the four sides of the glass substrate. The telescopic ends of the electric cylinders are connected to a support plate. A first cylinder is installed on the support plate. The telescopic end of the first cylinder is connected to a positioning block for clamping the glass substrate.

[0009] A material unloading rack is provided at the front of the turnover rack, and a second carrying rack is connected to the top of the material unloading rack;

[0010] The feeding assembly includes a feeding rack located on the side of the turnover rack. A first carrying rack is connected to the top of the feeding rack, and a gantry frame is connected to the top of the first carrying rack. First slide rails are connected to the front and rear walls of the gantry frame. First sliding blocks are slidably connected to the two first slide rails. Lifting seats are connected to the opposite faces of the two first sliding blocks. Lifting openings are provided on both the front and rear ends of the gantry frame corresponding to the lifting seats. A lifting block connected to the gantry frame is slidably connected to one of the lifting openings. A first threaded cylinder is engaged with the top of the lifting block. A single threaded rod is threadedly connected to the first threaded cylinder. A machine base is connected to the front end of the gantry frame, and the end of the single threaded rod rotates with the machine base. The machine base is connected in a dynamic manner. A first motor is mounted on the top of the base, and the output end of the first motor is connected to the top of the single threaded rod. A second slide rail is connected to the bottom of the lifting seat, and two second slide blocks are slidably connected on the second slide rail. A transverse sliding seat is connected to the bottom of each of the two second slide blocks. A second threaded cylinder is connected to the inner side wall of each transverse sliding seat. The internal threads of the two second threaded cylinders are opposite to each other. The internal threads of the two second threaded cylinders are connected to the same double threaded rod. The end of the double threaded rod passes through another lifting port and is connected to a steering wheel. A carrying plate is connected to the side of each of the two transverse sliding seats that is far apart from each other. Multiple layered shafts for supporting glass substrates are connected to the opposite side of each of the two carrying plates.

[0011] As a further description of the above technical solution:

[0012] Multiple electric push rods are installed on the top of the top plate. A combined cylinder is provided above the telescopic end of the electric push rods. A suction cup is provided on the top of the combined cylinder, and the suction cup is attached to the bottom of the glass substrate.

[0013] As a further description of the above technical solution:

[0014] A second pressure sensor is provided above the telescopic end of the electric push rod, and a tension sensor is installed on top of the second pressure sensor. The bottom of the combined cylinder is located on top of the tension sensor.

[0015] As a further description of the above technical solution:

[0016] The telescopic end of the electric push rod is provided with a pressure relief groove, and a pressure relief shaft is sleeved in the pressure relief groove. A first spring is connected to the bottom of the pressure relief shaft. The pressure relief shaft is elastically supported and connected to the bottom of the pressure relief groove through the first spring. An iron plate is embedded on the shaft surface of the pressure relief shaft. An electromagnet is snapped into the telescopic end of the electric push rod corresponding to the iron plate.

[0017] As a further description of the above technical solution:

[0018] The inner wall of the combined cylinder is fitted with a collar, and the inner ring surface of the collar is fitted with a first inclined shaft. The top of the first inclined shaft is connected to a second top support plate, and the top of the second top support plate is provided with anti-slip texture. A second spring is fitted on the first inclined shaft, and the opposite surfaces of the second top support plate and the collar are elastically supported and connected by the second spring.

[0019] The outer wall of the combined cylinder is provided with a transition hole, and a second inclined shaft is fitted inside the transition hole. The shaft surface of the second inclined shaft is provided with an external thread. The second inclined shaft is threadedly connected to a threaded sleeve through the external thread. The threaded sleeve is rotatably connected to the outer wall of the combined cylinder. The inclined surface of the second inclined shaft is slidably connected to the inclined surface of the first inclined shaft.

[0020] As a further description of the above technical solution:

[0021] Multiple top-holding shafts are arranged above the top plate along the periphery of the electric push rod, and the top of the top-holding shafts is connected to a first top-holding plate that supports the glass substrate.

[0022] As a further description of the above technical solution:

[0023] The top of the top plate is equipped with multiple first pressure sensors corresponding to multiple top holding shafts, and the bottom of the multiple top holding shafts is respectively set on the top of the multiple first pressure sensors.

[0024] As a further description of the above technical solution:

[0025] The top of the feeding mechanism is connected to the bottom of the glass substrate. Two side frames are arranged below the feeding mechanism. Multiple second cylinders are connected to the top of the top plate. The telescopic ends of the multiple second cylinders are respectively connected to the bottom of the two side frames. Multiple feeding rollers are rotatably connected between the two side frames. A pair of toothed wheels and a toothed belt are connected between two adjacent feeding rollers. The two toothed wheels are respectively fitted between the two feeding rollers. The two toothed wheels are connected by a toothed belt. A third motor is installed on one of the side frames. The output end of the third motor is connected to the end of one of the feeding rollers.

[0026] As a further description of the above technical solution:

[0027] A torque sensor is installed on the clamping surface of the positioning block.

[0028] An edge exposure method includes the following steps:

[0029] Based on the size of the glass substrate to be processed, the spacing between the two carrier plates is first adjusted. By rotating the steering wheel, the double threaded rod is driven to rotate inside the second threaded cylinder, so that the two transverse seats move synchronously on the second slide rail, achieving precise adjustment of the spacing between the carrier plates. After the adjustment is completed, multiple glass substrates to be processed are stacked on the layering shaft in sequence. Then, the first motor is started, and its output shaft drives the single threaded rod to rotate inside the first threaded cylinder, pushing the lifting block to move down along the lifting port. At the same time, the lifting seat connected to the carrier plate is driven to descend smoothly along the first slide rail until the bottom glass substrate falls onto the first carrier. The loading mechanism then moves the substrate to the top plate. At this time, multiple top holding shafts support the bottom of the substrate together through the first top holding plate. The loading mechanism resets, completing the loading process of a single substrate.

[0030] First, control the first cylinder to align the clamping surface of the positioning block with the glass substrate. Then, start the electric cylinder to pull the support plate, which will bring the positioning block closer to the glass substrate. During this process, multiple torque sensors monitor the clamping force in real time and dynamically adjust the stretching amount of the corresponding electric cylinder to quickly and accurately complete the clamping and positioning of the glass substrate.

[0031] During the clamping process of the positioning block, the torque sensor monitors the clamping force in real time, which prevents the substrate from deforming due to excessive clamping force and avoids the positioning stability from being affected by insufficient clamping force.

[0032] The electric push rod is extended to push the suction cup to contact the bottom of the substrate and apply a moderate suction force. During this process, the first pressure sensor monitors the pushing force of the suction cup on the substrate in real time to prevent the substrate from arching upward due to excessive pushing force, while ensuring that the suction cup is firmly attached. Then the electric push rod retracts and pulls the substrate downward through the suction cup to keep it horizontal and close to the surface of the first top holding plate. During this process, the tension sensor continuously monitors the downward tension to avoid excessive tension causing the substrate to dent and deform.

[0033] When the electric push rod pushes the suction cup, the first spring provides buffer support for the pressure relief shaft. After the suction cup contacts the substrate, the pressure relief shaft retracts into the pressure relief groove and compresses the first spring. After the adsorption is stable, the electromagnet is energized to make it magnetically adsorbed with the iron plate, thereby changing the connection between the electric push rod and the pressure relief shaft from elastic to rigid, ensuring that the push and pull force applied to the substrate is stable and reliable.

[0034] By rotating the threaded sleeve, the second inclined plane shaft is driven to move up or down along the inclined plane of the first inclined plane shaft. When the second inclined plane moves up, it pushes the first inclined plane to rise, compresses the second spring and lifts the second top holding plate. Conversely, the second top holding plate falls down under the spring's reset action. The top surface of the second top holding plate is provided with anti-slip texture, which can provide support and enhance overall stability after the suction cup adsorbs the substrate.

[0035] Finally, the two first linear modules and the second linear module are controlled to work together: the second linear module drives the CCD and LED lamp head to scan the longitudinal two sides of the substrate, while the first linear module drives it to move longitudinally to complete the edge exposure. The second motor is started and drives the wheel to rotate 90° through the transmission shaft to change the orientation of the substrate. The linear module is controlled to act again to expose the other two sides of the substrate, thus completing the exposure process of the substrate edges.

[0036] After the glass substrate completes the edge exposure process, the second cylinder is controlled to extend. Under the push of the second cylinder, the two side frames drive multiple feeding rollers to rise, thereby lifting the glass substrate. The third motor is controlled to run, and the output of the motor drives the feeding roller connected to it to rotate. Since there are two toothed wheels and a toothed belt connected to the transmission between two adjacent feeding rollers, multiple feeding rollers can be driven to rotate at the same time, sending the glass substrate to the second carrier.

[0037] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0038] 1. In this invention, the system integrates a torque sensor, a first pressure sensor, and a tension sensor throughout the entire clamping, adsorption, and pull-down process. This multi-sensor module collaborative monitoring mechanism can accurately control the clamping force, pushing force, and pulling force acting on the glass substrate in real time, fundamentally avoiding the problems of the glass substrate arching upward, sinking downward, or unstable positioning caused by improper force, and greatly ensuring the safety and shape integrity of the thin and brittle substrate during the processing.

[0039] 2. In this invention, the spacing between the carrier plates is adjusted by the double threaded rod and the transverse sliding seat, and the coordinated action of the layering shaft, the lifting seat and the top holding plate is combined to realize automatic, efficient and non-destructive feeding of glass substrates of different sizes. With the horizontal and vertical positioning block clamping system and the real-time feedback of the torque sensor, the positioning of the glass substrate before processing is accurate and stable, effectively preventing displacement or deformation caused by over-positioning or under-positioning.

[0040] 3. In this invention, the suction cup mechanism adopts a design of buffering followed by rigid locking. During the contact stage, the spring and the pressure relief shaft provide buffering to avoid rigid impact. After the adsorption is stable, the electromagnet and the iron plate generate magnetic adsorption, which transforms the elastic connection into a rigid connection. This design not only protects the substrate from damage by instantaneous impact force, but also provides stable and reliable tension and support in subsequent processes, which significantly improves the stability and safety of operation.

[0041] 4. In this invention, the height of the second top holding plate can be adjusted by cooperating with the first and second inclined shafts and the threaded sleeve, so that it works in conjunction with the suction cup to provide multi-point, adjustable auxiliary support for the glass substrate, thereby enhancing the system's adaptability to different working conditions. Combined with the linear module, CCD, LED lamp head and a 90° rotatable wheel, it realizes fully automatic, high-efficiency, and high-precision exposure processing of the four edges of the glass substrate, with a high degree of automation and a continuous processing flow.

[0042] 5. In this invention, the glass substrate is lifted smoothly by the second cylinder driving the side frame through the linkage mechanism of the lifting and conveying of the unloading roller. The third motor drives all the unloading rollers to rotate synchronously through the toothed wheel and toothed belt, realizing the smooth, efficient and non-destructive unloading and transfer of the glass substrate from the processing station to the carrier, forming a complete automated processing closed loop. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the overall structure of an edge exposure device and exposure method proposed in this invention;

[0044] Figure 2 This is a three-dimensional structural diagram from the right perspective of an edge exposure device and exposure method proposed in this invention;

[0045] Figure 3 This is a schematic diagram of the loading rack from another perspective in the edge exposure device and exposure method proposed in this invention;

[0046] Figure 4 This is a schematic diagram of the CCD and LED lamp head of an edge exposure device and exposure method proposed in this invention;

[0047] Figure 5This is a schematic diagram of the disk and fixed shaft of the edge exposure device and exposure method proposed in this invention;

[0048] Figure 6 This is a schematic diagram of the structure of the edge exposure device and exposure method proposed in this invention, with the feed roller disassembled.

[0049] Figure 7 This invention provides an edge exposure device and exposure method. Figure 6 Enlarged structural diagram at point A;

[0050] Figure 8 This is a top-view structural diagram of the edge exposure device and exposure method proposed in this invention;

[0051] Figure 9 This is a schematic diagram of the structure of the second motor in the edge exposure device and exposure method proposed in this invention;

[0052] Figure 10 This is a schematic diagram of the positioning block of an edge exposure device and exposure method proposed in this invention;

[0053] Figure 11 This is a cross-sectional schematic diagram of the electric push rod of the edge exposure device and exposure method proposed in this invention;

[0054] Figure 12 This is a schematic diagram of the structure of the edge exposure device and exposure method proposed in this invention, with the electric push rod and suction cup separated.

[0055] Legend:

[0056] 1. Feeding assembly; 101. Feeding rack; 102. Gantry frame; 103. First slide rail; 104. First slide block; 105. Lifting seat; 106. Lifting block; 107. First threaded cylinder; 108. Single threaded rod; 109. Machine base; 1010. First motor; 1011. Lifting port; 1012. Second slide rail; 1013. Second slide block; 1014. Transverse seat; 1015. Second threaded cylinder; 1016. Double threaded rod; 1017. Steering wheel; 1018. Carrying plate; 1019. Layered shaft; 1020. First carrying rack; 2. Turnover rack; 3. Exposure rack; 4. First linear module; 5. Second linear module; 6. CCD; 7. LED lamp head; 8. Fixing plate; 9. Transmission port; 10. Transmission shaft; 11. Second motor; 12. Fixing shaft; 13. Top plate; 14. 15. First pressure sensor; 16. Top holding shaft; 17. First top holding plate; 18. Glass substrate; 19. Support plate; 20. Electric cylinder; 21. Positioning block; 22. First cylinder; 23. Electric push rod; 24. Pressure relief groove; 25. Pressure relief shaft; 26. First spring; 27. Electromagnet; 28. Iron plate; 29. ​​Tension sensor; 20. Second pressure sensor; 30. Suction cup; 31. Second top holding plate; 32. Combined cylinder; 33. Adapter hole; 34. Collar; 35. First inclined shaft; 36. Second spring; 37. Second inclined shaft; 38. Threaded sleeve; 39. Side frame; 40. Second cylinder; 41. Feeding roller; 42. Toothed wheel; 43. Toothed belt; 44. Third motor; 45. Wheel; 46. Feeding rack; 47. Feeding mechanism; 48. Second carrier rack; 49. Torque sensor. Detailed Implementation

[0057] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0058] Please see the appendix Figure 1 -Appendix Figure 12 The present invention provides a technical solution: an edge exposure device, including a feeding component 1, a feeding mechanism 47 is provided on the inner side of the feeding component 1, a turnover frame 2 is provided on the side of the feeding component 1, an exposure frame 3 is connected to both sides of the top of the turnover frame 2, two first linear modules 4 are connected between the two exposure frames 3, the top of the two slides of the two first linear modules 4 are connected to the same second linear module 5, and a CCD 6 and an LED lamp head 7 are respectively installed on the two slides of the second linear module 5;

[0059] A fixed plate 8 is connected to the inner side of the turnover rack 2. A transmission port 9 is opened on the top of the fixed plate 8. A transmission shaft 10 is rotatably connected in the transmission port 9. A second motor 11 is installed at the bottom of the fixed plate 8. The output end of the second motor 11 is connected to the bottom end of the transmission shaft 10. A wheel 45 is fitted on the other end of the transmission shaft 10. A plurality of fixed shafts 12 arranged in a ring array are connected to the top of the wheel 45. A top plate 13 is connected to the top of the plurality of fixed shafts 12. A glass substrate 17 is arranged above the top plate 13. A plurality of electric cylinders 19 are connected to the top of the top plate 13 around the glass substrate 17. A support plate 18 is connected to the telescopic end of the electric cylinder 19. A first cylinder 21 is installed on the support plate 18. A positioning block 20 for clamping the glass substrate 17 is connected to the telescopic end of the first cylinder 21.

[0060] Specifically, this embodiment involves adjusting the distance between the two carrier plates 1018 according to the size of the glass substrate 17 to be processed. The steering wheel 1017 is turned to drive the double threaded rod 1016 to rotate within the two second threaded cylinders 1015. The two transverse sliding seats 1014, driven by the two second threaded cylinders 1015, slide on the second slide rail 1012 via the two second sliding blocks 1013. After adjusting the distance between the two carrier plates 1018, multiple glass substrates 17 to be processed are placed layer by layer on the layering shaft 1019. Then, the first motor 1010 is controlled to run, and the output of the first motor 1010 drives the single threaded rod 108 to rotate within the first... The screw cylinder 107 rotates inside, and the lifting block 106 slides down in the lifting port 1011 under the drive of the screw cylinder 107. At the same time, it drives the lifting seat 105 associated with the two carrier plates 1018 to slide down on the first slide rail 103 through the first slide block 104 until the glass substrate 17 at the bottom descends to the first carrier 1020. Then, the loading mechanism 47 sends the glass substrate 17 to the top plate 13. At this time, multiple top holding shafts 15 support the bottom of the glass substrate 17 through multiple first top holding plates 16. Then, the loading mechanism 47 is controlled to perform a return motion to complete the loading of a single glass substrate 17.

[0061] First, control the first cylinder 21 to align the clamping surface of the positioning block 20 with the glass substrate 17. Then, start the electric cylinder 19 to pull the support plate 18, which will bring the positioning block 20 closer to the glass substrate 17. During this process, multiple torque sensors 49 monitor the clamping force in real time and dynamically adjust the stretching amount of the corresponding electric cylinder 19 to quickly and accurately complete the clamping and positioning of the glass substrate 17.

[0062] A material unloading rack 46 is provided at the front of the turnover rack 2, and a second carrying rack 48 is connected to the top of the material unloading rack 46;

[0063] The feeding assembly 1 includes a feeding rack 101 located to the side of the turnover rack 2. A first carrying rack 1020 is connected to the top of the feeding rack 101, and a gantry frame 102 is connected to the top of the first carrying rack 1020. First slide rails 103 are connected to the front and rear walls inside the gantry frame 102. First slide blocks 104 are slidably connected to each of the two first slide rails 103. Lifting seats 105 are connected to the opposite faces of the two first slide blocks 104. Lifting ports 1011 are opened at both ends of the gantry frame 102 corresponding to the lifting seats 105. A lifting block 106 connected to the gantry frame 102 is slidably connected within one of the lifting ports 1011. A first threaded cylinder 107 is engaged at the top of the lifting block 106. A single threaded rod 108 is threadedly connected to the first threaded cylinder 107. A machine base 109 is connected to the front end of the gantry frame 102. The end of the single threaded rod 108 is rotatably connected to the machine base 109. A first motor 1010 is installed on the top of 109. The output end of the first motor 1010 is connected to the top of the single threaded rod 108. The bottom of the lifting seat 105 is connected to a second slide rail 1012. Two second slide blocks 1013 are slidably connected on the second slide rail 1012. The bottom of each of the two second slide blocks 1013 is connected to a transverse sliding seat 1014. The inner sidewall of each transverse sliding seat 1014 is connected to a second threaded cylinder 1015. The internal threads of the two second threaded cylinders 1015 are opposite to each other. The internal threads of the two second threaded cylinders 1015 are connected to the same double threaded rod 1016. The end of the double threaded rod 1016 passes through another lifting port 1011 and is connected to a steering wheel 1017. The sides of the two transverse sliding seats 1014 that are far apart from each other are connected to a carrying plate 1018. The opposite sides of the two carrying plates 1018 are connected to multiple layered shafts 1019 for supporting the glass substrate 17.

[0064] Specifically, in this embodiment, the system then activates the first linear module 4 and the second linear module 5, driving the CCD 6 and LED lamp head 7 to move to the two longitudinal edges of the glass substrate 17 for exposure. After completion, the second motor 11 is activated, driving the top plate 13 and the glass substrate 17 to rotate by ° through the transmission shaft 10 and the wheel 45. Then, the first linear module 4 and the second linear module 5 operate again, driving the CCD 6 and LED lamp head 7 to complete the exposure of the other two edges of the glass substrate 17. The integrated linkage of the CCD 6 and LED lamp head 7 achieves precise positioning and exposure of the edges. Through the process of one clamping and two exposures, repeated loading and unloading and positioning are avoided, significantly improving processing efficiency.

[0065] Specifically, multiple electric push rods 22 are installed on the top of the top plate 13. A combination cylinder 32 is provided above the telescopic end of the electric push rod 22. A suction cup 30 is provided on the top of the combination cylinder 32. The suction cup 30 is attached to the bottom of the glass substrate 17.

[0066] The specific implementation method is as follows: control the electric push rod 22 to extend, drive the suction cup 30 to adhere upward to the bottom of the glass substrate 17, and apply a controllable downward pull force to make the glass substrate 17 fit tightly with the first top holding plate 16 below. This ensures that it is always on a flat and stable reference plane during subsequent exposure or processing. The vacuum circuit connected to the suction cup 30 is equipped with an electromagnetic reversing valve to control the on and off of the entire vacuum circuit.

[0067] Specifically, a second pressure sensor 29 is provided above the telescopic end of the electric push rod 22, a tension sensor 28 is installed on the top of the second pressure sensor 29, and the bottom of the combined cylinder 32 is located on the top of the tension sensor 28.

[0068] The specific implementation method is as follows: A first pressure sensor 14 and a tension sensor 28 are arranged between the suction cup 30 and the electric push rod 22. During adsorption, the pressure sensor monitors the pushing force in real time to prevent the glass substrate 17 from arching upward. During pull-down, the tension sensor 28 monitors the tension in real time to prevent it from deforming downward. Through the real-time feedback closed-loop control of the first pressure sensor 14 and the tension sensor 28, the bidirectional deformation of the glass substrate 17 caused by improper force is fundamentally avoided.

[0069] Specifically, the telescopic end of the electric push rod 22 is provided with a pressure relief groove 23, and a pressure relief shaft 24 is sleeved inside the pressure relief groove 23. A first spring 25 is connected to the bottom of the pressure relief shaft 24. The pressure relief shaft 24 is elastically supported and connected to the bottom of the pressure relief groove 23 through the first spring 25. An iron plate 27 is embedded on the shaft surface of the pressure relief shaft 24, and an electromagnet 26 is snapped into the telescopic end of the electric push rod 22 corresponding to the iron plate 27.

[0070] The specific implementation method is as follows: When the electric push rod 22 is pushed up, the first spring 25 supports the pressure relief shaft 24, so that the suction cup 30 contacts the bottom of the glass substrate 17 in a flexible manner. After contact, the pressure relief shaft 24 retracts into the pressure relief groove 23 and compresses the first spring 25, effectively buffering the impact force. The suction cup 30 establishes a stable connection with the glass substrate 17. After the adsorption is stable, the electromagnet 26 is energized, so that it magnetically adsorbs with the iron plate 27. This change changes the connection between the electric push rod 22 and the pressure relief shaft 24 from elastic to rigid, providing a stable support for subsequent operations. The first spring 25 absorbs the impact energy, so that the suction cup 30 contacts the bottom of the glass substrate 17 in a compliant manner, effectively preventing micro-stress that may be caused by hard contact. The rigid connection established by the electromagnet 26 eliminates the elastic variable of the first spring 25 when transmitting force, ensuring that the force transmission is direct, accurate and reliable in subsequent pushing, pulling and lifting actions, thereby providing a stable pulling or pushing force to the bottom of the glass substrate 17.

[0071] Specifically, a collar 34 is snapped into the inner wall of the combined cylinder 32, a first inclined shaft 35 is sleeved on the inner ring surface of the collar 34, a second top support plate 31 is connected to the top of the first inclined shaft 35, the top of the second top support plate 31 is provided with anti-slip texture, a second spring 36 is sleeved on the first inclined shaft 35, and the opposite surfaces of the second top support plate 31 and the collar 34 are elastically supported and connected by the second spring 36.

[0072] The outer wall of the combined cylinder 32 is provided with a transition hole 33, and a second inclined shaft 37 is fitted inside the transition hole 33. The shaft surface of the second inclined shaft 37 is provided with an external thread. The second inclined shaft 37 is threaded to a threaded sleeve 38 through the external thread. The threaded sleeve 38 is rotatably connected to the outer wall of the combined cylinder 32. The inclined surface of the second inclined shaft 37 is slidably connected to the inclined surface of the first inclined shaft 35.

[0073] The specific implementation method is as follows: Twisting the threaded sleeve 38 can drive the inclined surface of the second inclined shaft 37 to slide on the inclined surface of the first inclined shaft 35. When the second inclined shaft 37 moves towards the first inclined shaft 35, the second inclined shaft 37 generates an upward thrust on the first inclined shaft 35. Under the push of the thrust, the first inclined shaft 35 slides upward on the inner ring surface of the collar 34, and at the same time pulls the second spring 36 to cause elastic deformation and raise the height of the second top holding plate 31. The second inclined shaft 37 moves away from the first inclined shaft 35. Under the drive of the reset elastic force of the second support spring, the second inclined shaft 37 slides down stably, thereby lowering the height of the second top holding plate 31. The top of the second top holding plate 31 is provided with anti-slip texture. After the suction cup 30 is adsorbed on the bottom of the glass substrate 17, the top of the second top holding plate 31 also plays a supporting role on the bottom of the glass substrate 17, which helps to improve the support stability of the suction cup 30.

[0074] Specifically, a plurality of top holding shafts 15 are arranged around the electric push rod 22 above the top plate 13. The top of the top holding shaft 15 is connected to a first top holding plate 16 that supports the glass substrate 17. A plurality of first pressure sensors 14 are installed on the top of the top plate 13 corresponding to the plurality of top holding shafts 15. The bottom of the plurality of top holding shafts 15 is respectively located on the top of the plurality of first pressure sensors 14.

[0075] The specific implementation method is as follows: The first pressure sensor 14 is used to monitor in real time the pressure on the top holding shaft 15 when the electric push rod 22 pulls down the glass substrate 17 through the suction cup 30. The data of the first pressure sensor 14 and the tension sensor 28 are combined to control the working state of the electric push rod 22 and prevent the glass substrate 17 from deforming downward due to excessive downward pulling force. The tension sensor 28 directly monitors the active downward pulling force applied by the electric push rod 22, and the first pressure sensor 14 monitors the support pressure on the top holding shaft 15. The pressure change directly reflects whether the glass substrate 17 is flattened and whether it has started to deform. By combining the data of the two, the service system can more accurately judge the actual stress state of the glass substrate 17, rather than relying solely on the data of a single actuator, so as to adjust or stop the electric push rod 22 in time before deformation occurs, providing double insurance.

[0076] Specifically, the top of the feeding mechanism 47 is connected to the bottom of the glass substrate 17. Two side frames 39 are arranged below the feeding mechanism 47. Multiple second cylinders 40 are connected to the top of the top plate 13. The telescopic ends of the multiple second cylinders 40 are respectively connected to the bottom of the two side frames 39. Multiple unloading rollers 41 are rotatably connected between the two side frames 39. A pair of toothed wheels 42 and a toothed belt 43 are connected between two adjacent unloading rollers 41. The two toothed wheels 42 are respectively fitted between the two unloading rollers 41. The two toothed wheels 42 are connected by the toothed belt 43. A third motor 44 is installed on one of the side frames 39. The output end of the third motor 44 is connected to the end of one of the unloading rollers 41.

[0077] The specific implementation method is as follows: After the glass substrate 17 completes the edge exposure process, the second cylinder 40 is controlled to extend. Under the push of the second cylinder 40, the two side frames 39 drive multiple feeding rollers 41 to rise, thereby lifting the glass substrate 17. The third motor 44 is controlled to run. The output end of the motor drives the feeding rollers 41 connected to it to rotate. Since there are two toothed wheels 42 and a toothed belt 43 connected between two adjacent feeding rollers 41, multiple feeding rollers 41 can be driven to rotate at the same time, so as to send the glass substrate 17 to the second carrier 48.

[0078] Specifically, a torque sensor 49 is installed on the clamping surface of the positioning block 20.

[0079] The specific implementation method is as follows: during the process of the positioning block 20 clamping the glass substrate 17, the torque sensor 49 monitors the intensity of the clamping force acting on the glass substrate 17 in real time, so as to avoid the glass substrate 17 being deformed due to excessive force, and also to avoid the glass substrate 17 being affected by insufficient force, which would affect its basic stability.

[0080] An edge exposure method includes the following steps:

[0081] Based on the size of the glass substrate 17 to be processed, the distance between the two carrier plates 1018 is first adjusted. By rotating the steering wheel 1017, the double threaded rod 1016 is driven to rotate inside the second threaded cylinder 1015, so that the two transverse seats 1014 move synchronously on the second slide rail 1012, thereby achieving precise adjustment of the distance between the carrier plates 1018. After the adjustment is completed, multiple glass substrates 17 to be processed are stacked on the layering shaft 1019 in sequence. Then, the first motor 1010 is started, and its output shaft drives the single threaded rod 108 to rotate inside the first threaded cylinder 107, pushing the lifting block 106 to move down along the lifting port 1011. At the same time, the lifting seat 105 connected to the carrier plate 1018 is driven to descend smoothly along the first slide rail 103 until the bottom glass substrate 17 falls to the first carrier rack 1020. The loading mechanism 47 then moves the substrate to the top plate 13. At this time, multiple top holding shafts 15 support the bottom of the substrate together through the first top holding plate 16. The loading mechanism 47 is reset, completing the loading process of a single substrate.

[0082] First, control the first cylinder 21 to align the clamping surface of the positioning block 20 with the glass substrate 17. Then, start the electric cylinder 19 to pull the support plate 18, which will bring the positioning block 20 closer to the glass substrate 17. During this process, multiple torque sensors 49 monitor the clamping force in real time and dynamically adjust the stretching amount of the corresponding electric cylinder 19 to quickly and accurately complete the clamping and positioning of the glass substrate 17.

[0083] During the clamping process of the positioning block 20, the torque sensor 49 monitors the clamping force in real time, which prevents the substrate from deforming due to excessive clamping force and avoids the positioning stability from being affected by insufficient clamping force.

[0084] The electric push rod 22 is extended to push the suction cup 30 to contact the bottom of the substrate and apply a moderate suction force. During this process, the first pressure sensor 14 monitors the pushing force of the suction cup 30 on the substrate in real time to prevent the substrate from arching upward due to excessive pushing force, while ensuring that the suction cup 30 is firmly attached. Then the electric push rod 22 retracts and pulls the substrate downward through the suction cup 30 to keep it horizontal and close to the surface of the first top holding plate 16. During this process, the tension sensor 28 continuously monitors the downward tension to avoid excessive tension causing the substrate to dent and deform.

[0085] When the electric push rod 22 pushes the suction cup 30, the first spring 25 provides buffer support for the pressure relief shaft 24. After the suction cup 30 contacts the substrate, the pressure relief shaft 24 retracts into the pressure relief groove 23 and compresses the first spring 25. After the adsorption is stable, the electromagnet 26 is energized to form a magnetic adsorption with the iron plate 27, thereby changing the connection between the electric push rod 22 and the pressure relief shaft 24 from elastic to rigid, ensuring that the push and pull force applied to the substrate is stable and reliable.

[0086] By rotating the threaded sleeve 38, the second inclined plane shaft 37 is driven to move up or down along the inclined plane of the first inclined plane shaft 35. When the second inclined plane moves up, it pushes the first inclined plane to rise, compresses the second spring 36 and lifts the second top holding plate 31. Conversely, the second top holding plate 31 falls under the action of the spring reset. The top surface of the second top holding plate 31 is provided with anti-slip texture. After the suction cup 30 adsorbs the substrate, it can provide support and enhance the overall stability.

[0087] Finally, the two first linear modules 4 and the second linear module 5 are controlled to work together: the second linear module 5 drives the CCD 6 and the LED lamp head 7 to scan the longitudinal edges of the substrate, while the first linear module 4 drives it to move longitudinally to complete the edge exposure. The second motor 11 is started, and the drive shaft 10 drives the wheel 45° to rotate, so that the substrate orientation is changed. The linear modules are controlled to move again to expose the other two edges of the substrate, thus completing the exposure process of the substrate edges.

[0088] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An edge exposure apparatus, comprising a feeding assembly (1), wherein a feeding mechanism (47) is provided on the inner side of the feeding assembly (1), characterized in that, The feeding assembly (1) is provided with a turnover frame (2) on its side. Both sides of the top of the turnover frame (2) are connected to exposure frames (3). Two first linear modules (4) are connected between the two exposure frames (3). The top of the two slides of the two first linear modules (4) are connected to the same second linear module (5). CCD (6) and LED lamp head (7) are respectively installed on the two slides of the second linear module (5). The inner side of the turnover rack (2) is connected to a fixed plate (8). The top of the fixed plate (8) is provided with a transmission port (9). A transmission shaft (10) is rotatably connected in the transmission port (9). A second motor (11) is installed at the bottom of the fixed plate (8). The output end of the second motor (11) is connected to the bottom end of the transmission shaft (10). A wheel (45) is fitted on the other end of the transmission shaft (10). A plurality of fixed shafts (12) arranged in a ring array are connected to the top of the wheel (45). A top plate (13) is connected to the top of the plurality of fixed shafts (12). A glass substrate (17) is provided above the top plate (13). A plurality of electric cylinders (19) are connected to the top of the top plate (13) around the glass substrate (17). A support plate (18) is connected to the telescopic end of the electric cylinder (19). A first cylinder (21) is installed on the support plate (18). A positioning block (20) for clamping the glass substrate (17) is connected to the telescopic end of the first cylinder (21). A material unloading rack (46) is provided at the front of the turnover rack (2), and a second carrying rack (48) is connected to the top of the material unloading rack (46). The loading assembly (1) includes a loading rack (101) located on the side of the turnover rack (2). A first carrying rack (1020) is connected to the top of the loading rack (101). A gantry frame (102) is connected to the top of the first carrying rack (1020). A first slide rail (103) is connected to both the front and rear walls inside the gantry frame (102). A first slide block (104) is slidably connected to each of the two first slide rails (103). A lifting seat (105) is connected to the opposite face of the two first slide blocks (104). The gantry frame ( 102) Lifting ports (1011) are provided on both the front and rear ends of the corresponding lifting seats (105). A lifting block (106) connected to the gantry frame (102) is slidably connected in one of the lifting ports (1011). A first threaded cylinder (107) is snapped into the top of the lifting block (106). A single threaded rod (108) is threadedly connected in the first threaded cylinder (107). A machine base (109) is connected to the front end of the gantry frame (102). The end of the single threaded rod (108) is rotatably connected to the machine base (109). The first motor (1010) is mounted on the top of the base (109). The output end of the first motor (1010) is connected to the top of the single threaded rod (108). The bottom of the lifting seat (105) is connected to the second slide rail (1012). Two second slide blocks (1013) are slidably connected on the second slide rail (1012). The bottom of each of the two second slide blocks (1013) is connected to a transverse sliding seat (1014). The inner sidewall of each transverse sliding seat (1014) is connected to a second threaded cylinder (1015). The internal threads of the two second threaded cylinders (1015) are opposite to each other. The two second threaded cylinders (1015) are connected to the same double threaded rod (1016) through their internal threads. The end of the double threaded rod (1016) passes through another lifting port (1011) and is connected to a steering wheel (1017). The two transverse sliding seats (1014) are connected to a carrying plate (1018) on their opposite sides. The opposite sides of the two carrying plates (1018) are connected to multiple layered shafts (1019) for supporting the glass substrate (17). The top of the top plate (13) is equipped with multiple electric push rods (22), and a combination cylinder (32) is provided above the telescopic end of the electric push rods (22). A suction cup (30) is provided on the top of the combination cylinder (32); the suction cup (30) is attached to the bottom of the glass substrate (17). Two side frames (39) are provided below the feeding mechanism (47). Multiple second cylinders (40) are connected to the top of the top plate (13). The telescopic ends of the multiple second cylinders (40) are respectively connected to the bottom of the two side frames (39). Multiple feeding rollers (41) are rotatably connected between the two side frames (39). A pair of toothed wheels (42) and a toothed belt (43) are connected between two adjacent feeding rollers (41). The two toothed wheels (42) are respectively fitted between the two feeding rollers (41). The two toothed wheels (42) are connected by the toothed belt (43). A third motor (44) is installed on one of the side frames (39). The output end of the third motor (44) is connected to the end of one of the feeding rollers (41).

2. The edge exposure apparatus according to claim 1, characterized in that, A second pressure sensor (29) is provided above the telescopic end of the electric push rod (22), and a tension sensor (28) is installed on the top of the second pressure sensor (29). The bottom of the combined cylinder (32) is located on the top of the tension sensor (28).

3. The edge exposure apparatus according to claim 2, characterized in that, The telescopic end of the electric push rod (22) is provided with a pressure relief groove (23), and a pressure relief shaft (24) is sleeved inside the pressure relief groove (23). A first spring (25) is connected to the bottom of the pressure relief shaft (24). The pressure relief shaft (24) is elastically supported and connected to the bottom of the pressure relief groove (23) through the first spring (25). An iron plate (27) is inlaid on the shaft surface of the pressure relief shaft (24). An electromagnet (26) is snapped into the telescopic end of the electric push rod (22) corresponding to the iron plate (27).

4. The edge exposure apparatus according to claim 1, characterized in that, The inner wall of the combined cylinder (32) is fitted with a collar (34), and the inner ring surface of the collar (34) is fitted with a first inclined shaft (35). The top of the first inclined shaft (35) is connected to a second top plate (31), and the top of the second top plate (31) is provided with anti-slip texture. A second spring (36) is fitted on the first inclined shaft (35), and the opposite surfaces of the second top plate (31) and the collar (34) are elastically supported and connected by the second spring (36). The outer wall of the combined cylinder (32) is provided with a transition hole (33), and a second inclined shaft (37) is sleeved inside the transition hole (33). The shaft surface of the second inclined shaft (37) is provided with an external thread. The second inclined shaft (37) is connected to a threaded sleeve (38) through the external thread. The threaded sleeve (38) is rotatably connected to the outer wall of the combined cylinder (32). The inclined surface of the second inclined shaft (37) is slidably connected to the inclined surface of the first inclined shaft (35).

5. The edge exposure apparatus according to claim 1, characterized in that, Multiple top-holding shafts (15) are provided above the top plate (13) along the periphery of the electric push rod (22), and the top of the top-holding shaft (15) is connected to the first top-holding plate (16).

6. The edge exposure apparatus according to claim 5, characterized in that, The top plate (13) is equipped with multiple first pressure sensors (14) corresponding to multiple top holding shafts (15), and the bottom of the multiple top holding shafts (15) is respectively set on the top of the multiple first pressure sensors (14).

7. The edge exposure apparatus according to claim 1, characterized in that, A torque sensor (49) is installed on the clamping surface of the positioning block (20).

8. An edge exposure method, comprising the edge exposure apparatus according to any one of claims 1-7, characterized in that, Includes the following steps: S1: Adjustment and loading. First, adjust the distance between the two carrier plates (1018) by turning the steering wheel (1017) according to the size of the glass substrate (17). Then, place a stack of glass substrates (17) on the layering shaft (1019). Then, start the first motor (1010) to lower the bottom glass substrate (17) to the conveying position. Finally, control the loading mechanism (47) to move a single glass substrate (17) to the top plate (13). S2: Positioning and fixing, the electric cylinder (19) drives the positioning block (20) to clamp the glass substrate (17) from both sides to perform lateral positioning. Repeat the lateral positioning process to complete the longitudinal positioning. The electric push rod (22) pushes the suction cup (30) to adsorb the bottom of the glass substrate (17) and then pulls it down to make the glass substrate (17) flat against the first top holding plate (16). S3: Edge exposure, the first linear module (4) and the second linear module (5) work together to drive the CCD (6) and the LED lamp head (7) to scan and expose the adjacent two sides of the glass. The second motor (11) drives the wheel (45) to rotate the glass substrate (17) 90 degrees and scan and expose the other two sides again to complete the exposure of all edges. S4: Unloading. Control the cylinder to lift the unloading roller (41) and lift the glass substrate (17) from the first top plate (16). The third motor (44) drives the unloading roller (41) to rotate and transfer the glass substrate (17) to the unloading rack (46) to complete the unloading.

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