A metal wire heating coil processing tool and a processing method

Abstract

The application discloses a metal wire heating coil processing tool and a processing method, and relates to the technical field of metal wire heating coil processing tools, and aims to improve the drawing quality and use performance of the heating coil.

Description

Technical Field

[0001] This invention relates to the field of heating coil processing technology, and in particular to a tooling and processing method for processing metal wire heating coils. Background Technology

[0002] Various types of heaters are frequently used in evaporation sources, with the mainstream being wire-wound heaters. These heaters consist of a metal heating wire passing through two or more insulating sheets. The heating wire must be free of defects at the bends, with uniform thickness and good straightness. The insulating rings must be able to slide freely without obstruction. These heaters are generally made by hand-drawing, and their quality depends heavily on the skill level of the maker.

[0003] like Figure 6 The heating coil shown is the heating unit of the evaporation source in OLED vapor deposition, and it is its core heating device. Its structure generally consists of a metal wire (such as tantalum wire) wound within an insulating ring (such as a PBN ring or alumina ring) to form a cylindrical cage-like structure. Currently, there are some problems with the manufacturing and use of heating wires: 1) Heating coils are generally made by hand drawing. When the heating wire is thick and dense, the existing winding tooling is prone to problems such as the heating wire being difficult to straighten and the shape being asymmetrical at the turning position.

[0004] 2) After the coil is completed, it is directly used for heating the evaporation source. Due to the unevenness of the hand-drawn coil and the stress in the drawing process, its shape is easily deformed again during later use. It will be squeezed against the structural components inside the source furnace, causing stress concentration. In severe cases, the insulation ring will break, affecting the service life. 3) The existing tooling uses metal rods as the bending and forming part. When making heating wires with small intervals or relatively thick wires, it is very easy for them to bend and deform due to insufficient strength, or even detach and cause the insulation ring to be scrapped. 4) In practice, it was found that when the heating coil is used for the first time, the tantalum wire is prone to releasing gas and surface oxides volatilizing at high temperatures. Because it is wrapped by structural components such as the reflector, the pollutants are difficult to expel and are easily deposited on the surface of the insulating ring, affecting the insulation effect.

[0005] Therefore, based on the above problems, this application designs a manufacturing process for a metal wire heating coil and a fixture for coil winding. Summary of the Invention

[0006] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a metal wire heating coil processing fixture and processing method that can be straightened after drawing, resulting in good straightness, good consistency of turning positions, clean surface, and stress release, which greatly improves the drawing quality and performance of the heating coil.

[0007] This invention provides a tooling for processing metal wire heating coils, comprising: Fixed shaft; The support disk has two support disks that are movably mounted on the fixed shaft along its axial direction. Several support blocks are evenly distributed on the outer periphery of the support disk. The support blocks on one support disk and the support blocks on the other support disk are staggered and the opposite ends of the two are arc-shaped. A limiting component is disposed on the fixed shaft and located between the two support plates, for limiting and adjusting the distance between the two support plates; A positioning guide component is disposed between the two support plates to position the two support plates angularly and to guide the movement of one support plate away from the other support plate. A fixing component, detachably mounted on the fixing shaft, is located on the outside of the two support plates and is used to lock and fix the two support plates. The straightening component is detachably disposed at one end of the fixed shaft and is used to increase the distance between the two support plates when at least one of the support plates is in a released state, straighten the straight section of the heating coil and make its bent part fit with the arc end of the support block; The positioning guide component includes positioning posts. At least two positioning posts are provided on the outer periphery of the limiting component between the two support plates. Positioning holes are provided on the support plates corresponding to the positioning posts. Positioning guide pins are coaxially provided at both ends of the positioning posts. The positioning guide pins pass through the corresponding positioning holes with clearance fit. The fixing component includes a fixing nut, and the fixing nut is threaded onto the side of each of the supporting discs away from the limiting component; The corrective assembly includes a pressure ring sleeved on the outer periphery of any of the fixed nuts, and corresponding positioning guide pins passing through the positioning holes and abutting against the pressure ring. A pressure block is slidably sleeved on the fixed shaft on the side of the pressure ring away from the support plate. The pressure block has an clearance groove corresponding to the fixed nut. The pressure block abuts against the pressure ring. A corrective nut is threadedly sleeved on the fixed shaft on the side of the pressure block away from the pressure ring.

[0008] Furthermore, the limiting component includes limiting sleeves, and two limiting sleeves are slidably sleeved on the fixed shaft between the two supporting discs, with set screws threaded onto the limiting sleeves.

[0009] Furthermore, clamping shafts are coaxially fixed at both ends of the fixed shaft, and the outer diameter of the clamping shafts is smaller than the outer diameter of the fixed shaft.

[0010] Furthermore, the present invention also provides a processing method using the above-mentioned metal wire heating coil processing fixture, characterized by comprising the following steps: 1) Winding; 11) Cut the heating wire to the required length according to the length of the heating coil for later use; 12) Adjust the distance between the two support plates according to the length of the heating coil using the limiting component, and provide limiting support for them; 13) Place the insulating sheet between the two support plates and position the two support plates angularly using the positioning component so that the support blocks on one support plate are staggered with the support blocks on the other support plate; 14) Secure the two support plates by using the fixing components; 15) The heating wire is alternately wound between the support block on one support plate and the support block on another support plate, and passes through each through hole on the insulating sheet one by one. 2) Correction; 21) Release the locking mechanism of at least one support plate and fix both ends of the heating wire; 22) By increasing the distance between the two support plates through the correction component, the straight section of the heating coil is straightened and its bend is made to fit with the arc end of the support block to form a regular bend; 3) Cleaning: Cleaning removes grease and oxides from the surface of the heating coil; 4) Vacuum annealing.

[0011] Furthermore, in step 15), one end of the heating wire is fixed, and the other end is connected to a tension gauge for winding.

[0012] Furthermore, in step 3), the cleaning includes the following steps: 31) Place the heating coil and the processing fixture together in an alkaline solution with a pH of 10±1 and immerse for 30-60 seconds to remove grease contaminants from the surface of the heating coil; 32) Rinse the heating coil with deionized water with a conductivity of 18 megohms or higher for 30-60 seconds to remove the alkaline solution from the surface of the heating coil. 33) Place the heating coil and the machining tool together in an acidic solution with a pH of 4±1 and immerse for 30-60 seconds to remove the oxides on the surface of the heating coil; 34) Rinse the heating coil with deionized water with a conductivity of 18 megohms or higher for 30-60 seconds to remove the acidic solution from the surface of the heating coil. 35) Immerse the heating coil and processing fixture together in analytical grade alcohol, sonicate for 8-10 minutes, and then remove them; 36) Dry the heating coil with dry nitrogen gas.

[0013] Furthermore, in step 4), the heating coil and the processing fixture are placed together in a vacuum of 1×10⁻⁶. -2 Vacuum annealing for 1-10 hours at a temperature of 600-1500℃ and below Pa.

[0014] Compared with the prior art, the beneficial effects of the present invention are: (1) The present invention uses an optimized processing fixture to draw the heating coil. The heating fixture has a simple structure, high strength, convenient drawing operation, and high processing efficiency. Through the correction treatment, the straightness of the straight section of the heating coil and the consistency of the bending arc of each bending part are ensured, which greatly improves the processing quality of the heating coil. (2) The present invention removes grease and oxides from the surface of the heating coil by cleaning, effectively solving the problem of impurities evaporating and contaminating the evaporation source when the heating coil is used; and eliminates residual stress after the heating coil is formed by vacuum annealing, effectively reducing the risk of breakage of the heating coil and greatly improving the performance of the heating coil.

[0015] It should be understood that the description in the Summary of the Invention is not intended to limit the key or essential features of the embodiments of the present invention, nor is it intended to restrict the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0016] Other features, objects, and advantages of the invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings: Figure 1 A schematic diagram of the tooling used for machining metal wire heating coils; Figure 2 A cross-sectional schematic diagram of the tooling used for machining metal wire heating coils; Figure 3 This is a schematic diagram of the support plate structure; Figure 4 This is a structural diagram of the positioning guide component; Figure 5 A schematic diagram of the structure for winding a heating coil; Figure 6 This is a schematic diagram of the structure for correcting the heating coil.

[0017] The following components are labeled in the diagram: 1. Fixed shaft; 2. Support plate; 3. Limiting assembly; 4. Positioning guide assembly; 5. Fixing assembly; 6. Correction assembly; 7. Heating coil; 8. Insulating sheet. 11. Clamping shaft; 21. Support block; 22. Positioning hole; 31. Limiting sleeve; 32. Set screw; 41. Positioning post; 42. Positioning guide pin; 51. Secure the nuts; 61. Pressure ring; 62. Pressure block; 63. Clearance groove; 64. Straightening nut. Detailed Implementation

[0018] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0019] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0020] Please refer to Figures 1-6 An embodiment of the present invention provides a tooling for processing metal wire heating coils, comprising: Fixed shaft 1; Support disk 2, two support disks 2 are movably sleeved on the fixed shaft 1 along its axial direction. Several support blocks 21 are evenly distributed on the outer periphery of the support disk 2. The support blocks 21 on one support disk 2 and the support blocks 21 on the other support disk 2 are staggered and the ends of the two opposite to each other are arc-shaped. The limiting component 3 is set on the fixed shaft 1 and located between the two support plates 2, and is used to limit and adjust the distance between the two support plates 2; The positioning guide component 4 is disposed between the two support plates 2 and is used to position the two support plates 2 in the angular direction and guide the movement of one support plate 2 away from the other support plate 2. The fixing component 5 is detachably mounted on the fixing shaft 1 and located on the outside of the two support plates 2, and is used to lock and fix the two support plates 2. The straightening component 6 is detachably mounted on one end of the fixed shaft 1. It is used to increase the distance between the two support plates 2 when at least one support plate 2 is in a released state, straighten the straight section of the heating coil 7 and make its bent part fit with the arc end of the support block 21.

[0021] In this embodiment, before pulling the heating coil 7, the distance between the two support plates 2 is first adjusted according to the length of the heating coil 7 by the limiting component 3, and the insulating sheet 8 is placed between the two support plates 2. Then, the angular positioning of the two support plates 2 is performed by the positioning component 4. Then, the two support plates 2 are locked and fixed by the fixing component 5. At this time, the heating coil 7 can be pulled. The heating wire is alternately wound between the support block 21 on one support plate 2 and the support block 21 on the other support plate 2, and passes through the through holes on the insulating sheet 8 one by one. After the heating coil 7 is drawn, it is straightened. First, the fixing component 5 is removed to release the locking of at least one support plate 2, and then the two ends of the heating wire are fixed. Then, under the guidance of the positioning guide component 4, the distance between the two support plates 2 is increased by the correction component 6, the straight section of the heating coil 7 is straightened, and its bend is made to fit with the arc end of the support block 21 to form a regular bend.

[0022] The heating coil 7 drawn using the processing fixture of this application has excellent straightness and good consistency in each bending part, which greatly improves the processing quality of the heating coil 7.

[0023] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, the limiting component 3 includes a limiting sleeve 31. Two limiting sleeves 31 are slidably sleeved on the fixed shaft 1 between the two support plates 2. The limiting sleeves 31 are threaded with set screws 32.

[0024] In this embodiment, when adjusting the distance between the two support plates 2, firstly, one limiting sleeve 31 is moved to the approximate position and locked in place by the set screw 32; then, with the assistance of a measuring tool, the other limiting sleeve 31 is moved to the required size position and locked in place by the set screw 32; the two limiting sleeves 31 are supported between the two support plates 2, ensuring that the size of the heating coil 7 meets the design requirements.

[0025] In a preferred embodiment, such as Figures 2-4 As shown, the positioning guide component 4 includes positioning posts 41. At least two positioning posts 41 are provided between the two support plates 2 on the outer periphery of the limiting component 3. Positioning holes 22 are provided on the support plates 2 corresponding to the positioning posts 41. Positioning guide pins 42 are coaxially provided at both ends of the positioning posts 41. The positioning guide pins 42 pass through the corresponding positioning holes 22 with clearance fit.

[0026] In this embodiment, at least two positioning pins 41 are used to position the two support plates 2, so that the support blocks 21 on one support plate 2 are staggered with the support blocks 21 on the other support plate 2. When the heating coil 7 is corrected to increase the distance between the two support plates 2, the support plates 2 move along the positioning guide pins 42, so that the angular orientation of the two support plates 2 remains unchanged, thus ensuring the processing quality of the heating coil 7.

[0027] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, the fixing component 5 includes a fixing nut 51, and the fixing shaft 1 is threaded with a fixing nut 51 on the side of each support plate 2 away from the limiting component 3.

[0028] In this embodiment, after the insulating sheet 8 is placed between the two support plates 2, the two fixing nuts 51 are tightened respectively. The fixing nuts 51 lock and fix the support plate 2, which is convenient to install and stable.

[0029] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, the correction component 6 includes a pressure ring 61 sleeved on the outer periphery of any fixed nut 51. Corresponding positioning guide pins 42 pass through positioning holes 22 and abut against the pressure ring 61. A pressure block 62 is slidably sleeved on the side of the fixed shaft 1 away from the support plate 2. The pressure block 62 has a relief groove 63 corresponding to the fixed nut 51. The pressure block 62 abuts against the pressure ring 61. A correction nut 64 is threadedly sleeved on the side of the fixed shaft 1 away from the pressure block 62.

[0030] In this embodiment, when straightening the heating coil 7, the straightening component 6 is first installed on the fixed shaft 1, and then a fixing nut 51 away from the straightening component 6 is removed. Then, the straightening nut 64 is rotated by a wrench, the straightening nut 64 presses the pressure block 62, the pressure block 62 presses the pressure ring 61, and the pressure ring 61 pushes the unlocked support plate 2 to move through the positioning guide pin 42 and the positioning post 41. By expanding the two support plates 2, the straight section of the heating coil 7 is straightened, and its bends are made to fit with the arc-shaped ends of the support blocks 21 to form regular bends, ensuring the processing quality of the heating coil 7.

[0031] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, clamping shafts 11 are coaxially fixed at both ends of the fixed shaft 1, and the outer diameter of the clamping shafts 11 is smaller than the outer diameter of the fixed shaft 1.

[0032] In this embodiment, when the heating coil 7 is corrected, the two ends of the fixed shaft 1 need to be clamped and fixed by a clamp. The clamp is held on the clamping shaft 11, which is stable and avoids damage to the thread structure on the fixed shaft 1, thus affecting the installation and disassembly of the fixing nut 51 and ensuring the reliability of the structure.

[0033] Also, see reference Figure 5 and Figure 6 The present invention also provides a processing method using the above-described metal wire heating coil processing fixture, comprising the following steps: 1) Winding (see Figure 5 ); 11) Cut the heating wire to the required length according to the length of heating coil 7 for later use; 12) Adjust the distance between the two support plates 2 according to the length of the heating coil 7 using the limiting component 3, and provide limiting support for them; 13) Place the insulating sheet 8 between the two support plates 2, and position the two support plates 2 angularly using the positioning component 4, so that the support blocks 21 on one support plate 2 and the support blocks 21 on the other support plate 2 are staggered. 14) Secure the two support plates 2 by fixing the fixing components 5 respectively; 15) One end of the heating wire is fixed, and the other end is connected to a tension gauge. The wire is alternately wound between the support block 21 on one support plate 2 and the support block 21 on another support plate 2, and passes through each through hole on the insulating sheet 8 one by one. The tension is monitored by the tension gauge to ensure that the tension does not exceed the limit. 2) Correction (see Figure 6 ); 21) Release the locking mechanism of at least one support plate 2 and fix both ends of the heating wire; 22) By increasing the distance between the two support plates through the correction component 6, the straight section of the heating coil 7 is straightened, and its bend is made to fit with the arc end of the support block 21 to form a regular bend. 3) Cleaning; 31) Place the heating coil 7 and the processing fixture together in an alkaline solution with a pH of 10±1 and immerse for 30-60 seconds to remove grease contaminants from the surface of the heating coil 7; 32) Rinse the heating coil 7 with deionized water with a conductivity of 18 megohms or higher for 30-60 seconds to remove the alkaline solution from the surface of the heating coil 7. 33) Place the heating coil 7 and the machining fixture together in an acidic solution with a pH of 4±1 and immerse for 30-60 seconds to remove the oxides on the surface of the heating coil 7; 34) Rinse the heating coil 7 with deionized water with a conductivity of 18 megohms or higher for 30-60 seconds to remove the acidic solution from the surface of the heating coil 7. 35) Immerse the heating coil 7 and the processing fixture together in analytical grade alcohol, and remove them after sonication for 8-10 minutes; 36) Dry the heating coil 7 with dry nitrogen gas; 4) Vacuum annealing; The heating coil 7 and the machining fixture were placed together in a vacuum of 1×10⁻⁶. -2 Vacuum annealing for 1-10 hours at a temperature of 600-1500℃ and below Pa.

[0034] In this embodiment, after the heating coil 7 is drawn and straightened, it is first cleaned to remove grease contaminants and oxides from its surface, effectively solving the problem of impurities evaporating and contaminating the evaporation source during use. Then, vacuum annealing is used to eliminate residual stress after the heating coil 7 is formed, effectively reducing the risk of breakage, extending its service life, and greatly improving its performance.

[0035] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0037] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A tooling for processing metal wire heating coils, characterized in that, include: Fixed shaft (1); Support disk (2), two support disks (2) are movably sleeved on the fixed shaft (1) along its axial direction. Several support blocks (21) are evenly distributed on the outer periphery of the support disk (2). The support blocks (21) on one support disk (2) and the support blocks (21) on the other support disk (2) are staggered, and the ends of the two opposite to each other are arc-shaped. The limiting component (3) is disposed on the fixed shaft (1) and located between the two support plates (2), and is used to limit and adjust the distance between the two support plates (2); A positioning guide component (4) is disposed between the two support plates (2) for positioning the two support plates (2) at an angle and for guiding one support plate (2) to move away from the other support plate (2). The fixing component (5) is detachably mounted on the fixing shaft (1) and located on the outside of the two support plates (2) for locking and fixing the two support plates (2); The correction component (6) is detachably disposed at one end of the fixed shaft (1) and is used to increase the distance between the two support plates (2) when at least one of the support plates (2) is in a state of being unfixed, straighten the straight section of the heating coil (7) and make its bend fit with the arc end of the support block (21); The positioning guide component (4) includes positioning posts (41). At least two positioning posts (41) are provided between the two support plates (2) on the outer periphery of the limiting component (3). Positioning holes (22) are provided on the support plates (2) corresponding to the positioning posts (41). Positioning guide pins (42) are coaxially provided at both ends of the positioning posts (41). The positioning guide pins (42) pass through the corresponding positioning holes (22) with clearance fit. The fixing component (5) includes a fixing nut (51), and the fixing nut (51) is threaded onto the side of each of the support discs (2) away from the limiting component (3). The corrective assembly (6) includes a pressure ring (61) sleeved on the outer periphery of any of the fixed nuts (51), and each of the corresponding positioning guide pins (42) passes through the positioning hole (22) and abuts against the pressure ring (61). A pressure block (62) is slidably sleeved on the side of the fixed shaft (1) away from the support plate (2) of the pressure ring (61). The pressure block (62) has an clearance groove (63) corresponding to the fixed nut (51). The pressure block (62) abuts against the pressure ring (61). A corrective nut (64) is threadedly sleeved on the side of the fixed shaft (1) away from the pressure ring (61) of the pressure block (62).

2. The metal wire heating coil processing fixture according to claim 1, characterized in that, The limiting component (3) includes a limiting sleeve (31), and two limiting sleeves (31) are slidably sleeved on the fixed shaft (1) between the two support plates (2). The limiting sleeves (31) are threaded with a set screw (32).

3. The metal wire heating coil processing fixture according to claim 1, characterized in that, The two ends of the fixed shaft (1) are respectively fixedly provided with clamping shafts (11) on the same axis, and the outer diameter of the clamping shaft (11) is smaller than the outer diameter of the fixed shaft (1).

4. A processing method using the metal wire heating coil processing fixture according to any one of claims 1-3, characterized in that, Includes the following steps: 1) Winding; 11) Cut the heating wire to the required length according to the length of the heating coil (7) for later use; 12) Adjust the distance between the two support plates (2) according to the length of the heating coil (7) through the limiting component (3) and limit and support it; 13) Place the insulating sheet (8) between the two support plates (2) and position the two support plates (2) at an angle using the positioning component (4) so ​​that the support block (21) on one support plate (2) and the support block (21) on the other support plate (2) are staggered. 14) Secure the two support plates (2) by fixing the fixing components (5) respectively; 15) The heating wire is alternately wound between the support block (21) on one support plate (2) and the support block (21) on another support plate (2), and passes through the through holes on the insulating sheet (8) one by one; 2) Correction; 21) Release the locking and fixing of at least one support plate (2) and fix both ends of the heating wire; 22) By increasing the distance between the two support plates (2) through the correction component (6), the straight section of the heating coil (7) is straightened and its bend is made to fit with the arc end of the support block (21) to form a regular bend; 3) Cleaning: Cleaning removes grease and oxides from the surface of the heating coil (7); 4) Vacuum annealing.

5. The processing method according to claim 4, characterized in that, In step 15), one end of the heating wire is fixed, and the other end is connected to a tension gauge and then wound.

6. The processing method according to claim 4, characterized in that, In step 3), the cleaning process includes the following steps: 31) Place the heating coil (7) and the processing fixture together in an alkaline solution with a pH of 10±1 and soak for 30-60 seconds to remove grease contaminants from the surface of the heating coil (7); 32) Rinse the heating coil (7) with deionized water with a conductivity of more than 18 megohms for 30-60 seconds to remove the alkaline solution from the surface of the heating coil (7); 33) Place the heating coil (7) and the processing fixture together in an acidic solution with a pH of 4±1 and soak for 30-60 seconds to remove the oxides on the surface of the heating coil (7); 34) Rinse the heating coil (7) with deionized water with a conductivity of more than 18 megohms for 30-60 seconds to remove the acidic solution from the surface of the heating coil (7); 35) Immerse the heating coil (7) and the processing fixture together in analytical grade alcohol, and remove them after sonication for 8-10 minutes; 36) Dry the heating coil (7) with dry nitrogen gas.

7. The processing method according to claim 4, characterized in that, In step 4), the heating coil (7) and the processing fixture are placed together in a vacuum of 1×10⁻⁶. -2 Vacuum annealing for 1-10 hours at a temperature of 600-1500℃ and below Pa.

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