A chip package leak detection device

Abstract

The application discloses a chip packaging leak detection device and belongs to the technical field of chip packaging. The device comprises a leak detector body, a screening component is arranged on the upper side of the leak detector body, the screening component comprises a conduit which is arranged through the inside of a fixing frame, the telescopic end of a gas cylinder is fixedly connected with a moving plate, the lower side of the moving plate is horizontally linearly arranged with a first groove, the upper side of the leak detector body is horizontally linearly arranged with a positioning groove, and the inside lower side of the positioning groove is arranged with a second groove. The display lamp is arranged to light up when defects are detected in the material, so that the defective products can be quickly identified. When the material is subjected to leak detection, the material with obvious leakage or large leakage holes can be quickly identified, and then the material with small leakage or leakage holes is identified, so that the quality of the material can be judged by the number of corresponding position display lamps lighting up, and the leak detection efficiency of the material is improved.

Description

Technical Field

[0001] This invention relates to the field of chip packaging, and more specifically, to a chip packaging leak detection device. Background Technology

[0002] Chip packaging is the process of mounting a casing around a semiconductor integrated circuit chip. It serves to house, fix, seal, and protect the chip, enhance its electrical and thermal performance, and act as a bridge between the chip's internal world and external circuitry—the contacts on the chip are connected to the pins of the package casing via wires, and these pins, in turn, connect to other devices via wires on the printed circuit board. Therefore, packaging plays a crucial role in CPUs and other LSI integrated circuits.

[0003] Chip packaging leak detection is a crucial process for ensuring package hermeticity and preventing external factors from affecting chip performance. It is primarily used in the packaging of LED chips and semiconductor chips. Leak detection technologies include: electromagnetic induction detection: measuring the photocurrent generated by the photovoltaic effect of the LED chip's pn junction to detect the impact of packaging defects on the photocurrent, thereby determining packaging quality. This method is suitable for leaded packaging processes and can detect defects in the soldering system; and vacuum leak detection devices: employing electromagnetic venting valves, leak detectors, and other equipment, these devices enable rapid replacement of chip samples and efficient leak detection through a vacuum channel, shortening the detection time.

[0004] In the existing technology, since leak detection is required after mass packaging of chips, and fine inspection takes a lot of time, if packaged chips with obvious defects (such as package cracks or large leaks) enter the fine inspection stage, it will not only increase costs, but also significantly increase the leak detection time. Summary of the Invention

[0005] To address the problems existing in the prior art, the purpose of this invention is to provide a chip packaging leak detection device.

[0006] To solve the above problems, the present invention adopts the following technical solution, which can quickly identify materials with obvious leaks or large leaks during leak detection, and then identify materials with smaller leaks or leaks.

[0007] A chip packaging leak detection device includes a leak detector body and a fixed frame disposed on the upper side of the leak detector body. A control panel is disposed on the upper right end of the leak detector body. A cylinder is disposed through the center of the upper side of the fixed frame. A screening component is disposed on the upper side of the leak detector body. The screening component includes a conduit disposed through the fixed frame.

[0008] The cylinder's telescopic end is fixedly connected to a movable plate. The lower side of the movable plate has a first groove arranged in a horizontal linear array. The upper side of the leak detector body has a positioning groove arranged in a horizontal linear array. The lower side of the positioning groove has a second groove. The lower side of the movable plate has a sealing ring fixedly connected in a horizontal linear array. The sealing ring is located outside the first groove. After the lower protrusion of the movable plate moves downward, it is inserted into the positioning groove. After the sealing ring moves downward, it is pressed and contacts the lower side of the positioning groove. The front side of the leak detector body has an indicator light arranged in a horizontal linear array.

[0009] Furthermore, the conduit is connected to the first groove, the shape of the protrusion on the lower side of the moving plate is adapted to the shape of the positioning groove, the first groove is connected to the second groove through the positioning groove, and the other end of the conduit is connected to the external air supply device.

[0010] Furthermore, the leak detector body is provided with a positioning component on both its inner and outer sides. The positioning component includes a fixed base that is fixedly connected to the lower side of the second groove in a rectangular array.

[0011] Furthermore, a rotating seat is hinged between two adjacent fixed seats at the front and rear, and a tension spring is fixedly connected to the side of the rotating seats on the left and right sides that are far apart from each other. The other end of the tension spring is fixedly connected to the lower side inside the second groove.

[0012] Furthermore, the rotating seat is hook-shaped, and after the horizontal part of the rotating seat on the lower side rotates, it presses against the lower side of the inner side of the second groove. A rubber block is fixedly connected to the upper side of the inner surface of the rotating seat.

[0013] Furthermore, the leak detector body is provided with a transfer component on both the inner and outer sides, and the transfer component includes slots on the front and rear sides of the lower end inside the second groove.

[0014] Furthermore, positioning frames are fixedly connected to both the front and rear sides inside the first groove, and movable grooves are opened on the opposite surfaces of the positioning frames on both the front and rear sides. Electric push rods are fixedly connected to the opposite sides of the movable grooves on both the front and rear sides. A support plate is fixedly connected to the telescopic end of the electric push rod, and the support plate is slidably connected inside the movable groove.

[0015] Furthermore, the support plate is L-shaped, and the shape of the support plate is adapted to the shape of the movable groove. After the positioning frame moves downward, it is inserted into the inside of the slot, and the slot is located between the left and right rotating seats.

[0016] Furthermore, the leak detector body is provided with a soot blowing component on both the inner and outer sides, and the soot blowing component includes a limiting rod that is fixedly connected to the lower side of the moving plate in a rectangular array.

[0017] Furthermore, a magnetic block is fixedly connected to the bottom end of the limiting rod, and a counterweight sleeve is slidably sleeved on the outer side of the limiting rod in the same row. The upper inner side of the leak detector body has moving grooves arranged in a horizontal linear array. Two adjacent moving grooves are located on the left and right sides of the second groove. The counterweight sleeve is slidably connected inside the moving groove. The lower side of the counterweight sleeve has a limiting groove arranged in a vertical linear array. The magnetic block is inserted into the limiting groove. The magnetic block and the counterweight sleeve are magnetically attracted. The left and right ends of the lower inner side of the second groove are both arranged in a vertical linear array with guide grooves. The guide grooves in the same row are connected to the moving groove.

[0018] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0019] (1) The present invention uses an indicator light that lights up after a defect is detected in the material to quickly identify defective products. When the material is being leak-tested, materials with obvious leaks or large holes can be quickly identified, and then materials with smaller leaks or holes can be identified. This allows workers to judge the quality of the material by the number of indicator lights that light up in the corresponding positions, thereby improving the leak detection efficiency of the material.

[0020] (2) The present invention supports the material by setting a rotating seat, so that there is a gap between the material and the inner wall of the second groove. Since the material is sent into the second groove by the moving plate, the rotating seat will support the material, so that there is a gap between the material and the inner wall of the second groove, so that the gas can fully contact the material, thereby ensuring the leak detection efficiency of the material.

[0021] (3) The present invention supports the material by setting a support plate, and after the inspection is completed, the qualified material is taken out from the second groove. Since the support plate pushed out of the movable groove can transport the material, the unqualified material that is detected cannot be taken out from the second groove by the support plate, so as to facilitate the timely transfer of qualified products and achieve the purpose of rapid differentiation. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the present invention;

[0023] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0024] Figure 3 This is a schematic diagram of the structure of the movable plate of the present invention;

[0025] Figure 4 This is a cross-sectional view of the movable plate of the present invention;

[0026] Figure 5 This is a cross-sectional structural diagram of the leak detector body of the present invention;

[0027] Figure 6 For the present invention Figure 5 Enlarged view of point A;

[0028] Figure 7 For the present invention Figure 5 Enlarged view of point B;

[0029] Figure 8 This is a schematic diagram of the rotating base of the present invention.

[0030] Explanation of the labels in the diagram:

[0031] 1. Leak detector body; 11. Fixing frame; 12. Control panel; 13. Cylinder; 2. Screening component; 21. Guide tube; 22. Moving plate; 23. First groove; 24. Positioning groove; 25. Sealing ring; 26. Second groove; 27. Indicator light; 28. Positioning component; 281. Fixing seat; 282. Rotating seat; 283. Tension spring; 284. Rubber block; 29. ​​Transfer component; 291. Slot; 292. Positioning frame; 293. Movable groove; 294. Electric push rod; 295. Support plate; 3. Soot blowing component; 31. Limiting rod; 32. Magnetic block; 33. Counterweight sleeve; 34. Moving groove; 35. Limiting groove; 36. Guide groove. Detailed Implementation

[0032] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0033] Please see Figures 1 to 8 A chip packaging leak detection device includes a leak detector body 1 and a fixing frame 11 disposed on the upper side of the leak detector body 1. A control screen 12 is disposed on the upper right end of the leak detector body 1. A cylinder 13 is disposed through the center of the upper side of the fixing frame 11. A screening component 2 is disposed on the upper side of the leak detector body 1. The screening component 2 includes a conduit 21 disposed through the inside of the fixing frame 11.

[0034] A movable plate 22 is fixedly connected to the telescopic end of the cylinder 13. A first groove 23 is arranged in a horizontal linear array on the lower side of the movable plate 22. A positioning groove 24 is arranged in a horizontal linear array on the upper side of the leak detector body 1. A second groove 26 is arranged in the lower side inside the positioning groove 24. A sealing ring 25 is fixedly connected in a horizontal linear array on the lower side of the movable plate 22. The sealing ring 25 is located outside the first groove 23. After the lower protrusion of the movable plate 22 moves downward, it is inserted into the interior of the positioning groove 24. After the sealing ring 25 moves downward, it is pressed and contacted with the lower interior of the positioning groove 24. An indicator light 27 is arranged in a horizontal linear array on the front side of the leak detector body 1.

[0035] The conduit 21 is connected to the first groove 23. The shape of the protrusion on the lower side of the moving plate 22 is adapted to the shape of the positioning groove 24. The first groove 23 is connected to the second groove 26 through the positioning groove 24. The other end of the conduit 21 is connected to the external air supply device.

[0036] The leak detector body 1 has a transfer component 29 on both its inner and outer sides.

[0037] By adopting the above technical solution, after the material transfer component 29 is placed below the moving plate 22, the cylinder 13 above the fixing frame 11 is activated by the control panel 12, causing the cylinder 13 to push the moving plate 22 downward through the connecting pipe 21. As the protrusion of the moving plate 22 enters the positioning groove 24 above the leak detector body 1, the sealing ring 25 will be between the moving plate 22 and the leak detector body 1, so that the first groove 23 on the lower side of the moving plate 22 is connected to the second groove 26 inside the leak detector body 1, and the material will also be between the first groove 23 and the second groove 26. Subsequently, the external gas supply device injects gas into the space between the first groove 23 and the second groove 26 through the pipe 21. After the gas is injected for 5 to 10 seconds, the leak is judged by comparing the pressure difference between the tested part and the standard part. When the pressure difference exceeds the preset value of the control panel 12, the leak is detected. When the control panel 12 controls one of the indicator lights 27 at the corresponding position on the front of the leak detector body 1 to light up, the cylinder 13 pulls the moving plate 22 upward and removes the defective products with obvious leaks or large leaks from the bottom of the moving plate 22, thus completing the rough inspection. The materials that pass the rough inspection will then undergo a fine inspection. At this time, the gas is continuously supplied for 30 seconds to several minutes. If there is a difference in pressure between the tested part and the standard part, another indicator light 27 at the corresponding position will light up to indicate the material with smaller leaks or leaks. Since the material with obvious leaks or large leaks can be quickly identified during the leak detection, and then the material with smaller leaks or leaks is identified, the staff can judge the quality of the material by the number of indicator lights 27 lit up at the corresponding position, thereby improving the leak detection efficiency of the material.

[0038] like Figure 5 , Figure 7 and Figure 8 As shown, the leak detector body 1 is provided with a positioning component 28 on both the inner and outer sides. The positioning component 28 includes a fixed seat 281 that is fixedly connected to the lower side of the second groove 26 in a rectangular array.

[0039] A rotating seat 282 is hinged between two adjacent fixed seats 281. A tension spring 283 is fixedly connected to the side of the rotating seats 282 that is far apart on both sides. The other end of the tension spring 283 is fixedly connected to the lower side inside the second groove 26.

[0040] The rotating seat 282 is hook-shaped. After the horizontal part of the rotating seat 282 on the lower side rotates, it presses against the lower side of the interior of the second groove 26. A rubber block 284 is fixedly connected to the upper side of the inner surface of the rotating seat 282.

[0041] By adopting the above technical solution, during the process of the moving plate 22 and the transfer component 29 feeding the material into the second groove 26, the rotating seat 282 is hinged to the inside of the second groove 26 through the fixed seat 281. At the same time, the tension spring 283 always pulls the rotating seat 282. When the lower side of the material contacts the rotating seat 282, the lower side of the material presses the rotating seat 282 downward. After the rotating seat 282 rotates, it surrounds the edge of the material. At the same time, the material is locked by the rubber block 284. During this process, because the rotating seat 282 supports the material, the material does not directly contact the inner wall of the second groove 26. After the gas enters the second groove 26, the gas will also flow downward to the material. Since the rotating seat 282 supports the material after it is fed into the second groove 26 by the moving plate 22, there is a gap between the material and the inner wall of the second groove 26 so that the gas can fully contact the material, thereby ensuring the leak detection efficiency of the material.

[0042] like Figures 2 to 5 As shown, the transfer component 29 includes slots 291 formed on the front and rear sides of the lower end inside the second groove 26.

[0043] Positioning frames 292 are fixedly connected to both the front and rear sides inside the first groove 23. Movable grooves 293 are opened on the opposite sides of the positioning frames 292 on both the front and rear sides. Electric push rods 294 are fixedly connected to the opposite sides inside the movable grooves 293 on both the front and rear sides. Support plates 295 are fixedly connected to the telescopic end of the electric push rods 294. Support plates 295 are slidably connected inside the movable grooves 293.

[0044] The support plate 295 is L-shaped, and its shape is compatible with the shape of the movable groove 293. After the positioning frame 292 moves downward, it is inserted into the inside of the slot 291, which is located between the left and right rotating seats 282.

[0045] By adopting the above technical solution, the support plate 295, which is pushed out of the movable slot 293 by the electric push rod 294, will support the material. As the cylinder 13 pushes the moving plate 22 downward, if the protruding part on the lower side of the moving plate 22 matches the positioning slot 24, the positioning frame 292 will be embedded in the slot 291 inside the second groove 26. At this time, the support plate 295 will also enter the slot 291. Then the electric push rod 294 will pull the support plate 295 into the movable slot 293. At the same time, the material is supported by the rotating seat 282. When the indicator light 27 lights up... The electric push rod 294 pushes the support plate 295 out of the movable groove 293 again. After all the materials have been leak-tested, the qualified materials will be taken out of the second groove 26 by the moving plate 22 in conjunction with the support plate 295, while the unqualified materials will remain in the second groove 26. Since the support plate 295 pushed out of the movable groove 293 can transport the materials, while the unqualified materials that have been leak-tested cannot be taken out of the second groove 26 by the support plate 295, it is convenient to transfer the qualified products in time, thus achieving the purpose of rapid differentiation.

[0046] like Figures 2 to 7 As shown, the leak detector body 1 is provided with a soot blowing component 3 on both the inner and outer sides. The soot blowing component 3 includes a limiting rod 31 arranged in a rectangular array and fixedly connected to the lower side of the moving plate 22.

[0047] A magnetic block 32 is fixedly connected to the bottom end of the limiting rod 31. A counterweight sleeve 33 is slidably sleeved on the outer side of the limiting rod 31 in the same row. A moving groove 34 is arranged in a horizontal linear array on the upper side of the inside of the leak detector body 1. Two adjacent moving grooves 34 are located on the left and right sides of the second groove 26. The counterweight sleeve 33 is slidably connected inside the moving groove 34. A limiting groove 35 is opened through the lower side of the counterweight sleeve 33 in a vertical linear array. The magnetic block 32 is inserted into the inside of the limiting groove 35. The magnetic block 32 and the counterweight sleeve 33 are magnetically attracted. Guide grooves 36 are arranged in a vertical linear array on both the left and right ends of the lower side of the second groove 26. The guide grooves 36 in the same row are connected to the moving groove 34.

[0048] By adopting the above technical solution, when the cylinder 13 pushes the moving plate 22 downward, the limiting rod 31 fixed below the moving plate 22 will move downward inside the moving groove 34. Because the magnetic block 32 at the lower end of the limiting rod 31 limits the counterweight sleeve 33 sleeved on the outside of the limiting rod 31, the counterweight sleeve 33 cannot be separated from the limiting rod 31. At the same time, the magnetic block 32 is located inside the limiting groove 35 opened on the lower side of the counterweight sleeve 33 and is magnetically attracted to the counterweight sleeve 33, so that the limiting rod 31 can drive the counterweight sleeve 33 within the moving groove 34. As the first groove 23 slides downwards, the counterweight sleeve 33 compresses the air inside the moving groove 34, causing the compressed air to gradually blow from the guide groove 36 into the second groove 26, and to blow away the dust remaining inside the second groove 26. Since the counterweight sleeve 33 compresses the air inside the moving groove 34 before the first groove 23 and the second groove 26 merge, the air is blown into the second groove 26 through the guide groove 36, so as to promptly blow away the dust remaining inside the second groove 26 and avoid the dust causing deviations in the leak detection data of the material.

[0049] Working principle: After the cylinder 13 pushes the moving plate 22 downward, the limiting rod 31 fixed below the moving plate 22 will move downward inside the moving groove 34. At the same time, the magnetic block 32, in conjunction with the limiting rod 31, drives the counterweight sleeve 33 to slide downward inside the moving groove 34, compressing the air inside the moving groove 34. The compressed air is gradually blown from the guide groove 36 into the second groove 26, and blows away the dust remaining inside the second groove 26. The electric push rod 294 pushes out the support plate 295 of the movable groove 293 to support the material. If the protruding part on the lower side of the moving plate 22 fits with the positioning groove 24, the positioning frame 292 will be embedded in the slot 291 inside the second groove 26. Then the electric push rod 294 pulls the support plate 295 into the movable groove 293. At the same time, the material is supported by the rotating seat 282. When the lower side of the material contacts the rotating seat 282, the lower side of the material presses down on the rotating seat 282. After the rotating seat 282 rotates, it surrounds the material. At the edge of the material, the material is simultaneously locked by the rubber block 284. As the protrusion of the moving plate 22 enters the positioning groove 24 above the leak detector body 1, the sealing ring 25 will be between the moving plate 22 and the leak detector body 1, so that the first groove 23 on the lower side of the moving plate 22 is connected to the second groove 26 inside the leak detector body 1. Then, the external gas supply device injects gas into the space between the first groove 23 and the second groove 26 through the conduit 21. After the gas is injected for 5 to 10 seconds, the leak is judged by comparing the pressure difference between the tested part and the standard part. When the pressure difference exceeds the preset value of the control panel 12, the control panel 12 controls one of the indicator lights 27 at the corresponding position on the front of the leak detector body 1 to light up. The material that passes the coarse inspection will be inspected again. At this time, the gas is continuously supplied for 30 seconds to several minutes. If there is a difference in the pressure difference between the tested part and the standard part, the other indicator light 27 at the corresponding position will light up to indicate the material with a small leak or hole.

[0050] The above description is merely a preferred embodiment of the present invention; however, the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and its improved concepts, should be covered within the scope of protection of the present invention.

Claims

1. A chip packaging leak detection device, comprising a leak detector body (1) and a fixing frame (11) disposed on the upper side of the leak detector body (1), wherein a control screen (12) is disposed on the upper right end of the leak detector body (1), and a cylinder (13) is disposed through the center of the upper side of the fixing frame (11), characterized in that: The upper side of the leak detector body (1) is provided with a screening component (2), and the screening component (2) includes a conduit (21) that passes through the inside of the fixing frame (11). The cylinder (13) is fixedly connected to a movable plate (22) at its telescopic end. The lower side of the movable plate (22) is provided with a first groove (23) arranged in a horizontal linear array. The upper side of the leak detector body (1) is provided with a positioning groove (24) arranged in a horizontal linear array. The lower side of the positioning groove (24) is provided with a second groove (26). The lower side of the movable plate (22) is fixedly connected with a sealing ring (25) arranged in a horizontal linear array. The sealing ring (25) is located outside the first groove (23). The lower protrusion of the movable plate (22) moves downward and inserts into the interior of the positioning groove (24). The front side of the leak detector body (1) is provided with an indicator light (27) arranged in a horizontal linear array. After the sealing ring (25) moves downward, it presses against the lower side of the positioning groove (24). The conduit (21) is connected to the first groove (23). The shape of the protrusion on the lower side of the moving plate (22) is adapted to the shape of the positioning groove (24). The first groove (23) is connected to the second groove (26) through the positioning groove (24). The other end of the conduit (21) is connected to the external air supply device. The leak detector body (1) is provided with a positioning component (28) on both the inner and outer sides. The positioning component (28) includes a fixed seat (281) fixedly connected to the lower side of the second groove (26) in a rectangular array. A rotating seat (282) is hinged between two adjacent fixed seats (281) at the front and back. A tension spring (283) is fixedly connected to the side of the rotating seats (282) on the left and right sides that are far apart. The other end of the tension spring (283) is fixedly connected to the lower side inside the second groove (26). The rotating seat (282) is hook-shaped. After the horizontal part of the rotating seat (282) on the lower side rotates, it presses against the lower side of the inner side of the second groove (26). A rubber block (284) is fixedly connected to the upper side of the inner surface of the rotating seat (282).

2. The chip packaging leak detection device according to claim 1, characterized in that: The leak detector body (1) is provided with a transfer component (29) on both the inner and outer sides. The transfer component (29) includes a slot (291) on the front and rear sides of the lower end of the second groove (26).

3. The chip packaging leak detection device according to claim 2, characterized in that: Positioning frames (292) are fixedly connected to both the front and rear sides inside the first groove (23). Movable grooves (293) are opened on the opposite sides of the positioning frames (292) on both the front and rear sides. Electric push rods (294) are fixedly connected to the opposite sides inside the movable grooves (293) on both the front and rear sides. A support plate (295) is fixedly connected to the telescopic end of the electric push rod (294). The support plate (295) is slidably connected inside the movable groove (293).

4. The chip packaging leak detection device according to claim 3, characterized in that: The support plate (295) is L-shaped and its shape is adapted to the shape of the movable groove (293). After the positioning frame (292) moves downward, it is inserted into the inside of the slot (291). The slot (291) is located between the left and right rotating seats (282).

5. A chip packaging leak detection device according to claim 1, characterized in that: The leak detector body (1) is provided with a soot blowing component (3) on both the inner and outer sides. The soot blowing component (3) includes a limiting rod (31) arranged in a rectangular array and fixedly connected to the lower side of the moving plate (22).

6. The chip packaging leak detection device according to claim 5, characterized in that: A magnetic block (32) is fixedly connected to the bottom end of the limiting rod (31). A counterweight sleeve (33) is slidably sleeved on the outer side of the limiting rod (31) in the same row. A moving groove (34) is arranged in a horizontal linear array on the upper side of the inside of the leak detector body (1). Two adjacent moving grooves (34) are located on the left and right sides of the second groove (26). The counterweight sleeve (33) is slidably connected inside the moving groove (34). A limiting groove (35) is opened through the lower side of the counterweight sleeve (33) in a vertical linear array. The magnetic block (32) is inserted into the inside of the limiting groove (35). The magnetic block (32) and the counterweight sleeve (33) are magnetically attracted. Guide grooves (36) are arranged in a vertical linear array on the left and right ends of the lower side of the second groove (26). The guide grooves (36) in the same row are connected to the moving groove (34).

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