Grating displacement sensor index testing platform and tolerance testing method thereof

Abstract

The present application relates to the technical field of optical measurement, and particularly relates to a grating displacement sensor index test platform and a tolerance test method thereof. The grating displacement sensor index test platform comprises a first test platform and a second test platform, and the first test platform comprises a first sensor tolerance adjusting assembly and a first grating ruler displacement assembly. The grating displacement sensor index test platform provided by the present application solves the problem of insufficient research on the performance index test platform of the grating displacement sensor in the related research field. Compared with the prior art, the test platform can be applied to the test of high-precision grating displacement sensors with different working distances, can realize the needs of multi-index synchronous test, synchronous test of multiple grating displacement sensors and comprehensive test of multiple performance indexes under multiple large-stroke tolerance postures, and can more comprehensively evaluate the performance of the grating displacement sensor.

Description

Technical Field

[0001] This invention relates to the field of optical measurement technology, and in particular to a test platform for the performance of a grating displacement sensor and a method for testing its tolerance. Background Technology

[0002] A grating displacement sensor is a non-contact measurement device based on the optical principle of a grating. It can convert minute mechanical displacements into detectable changes in the optical field and ultimately into electrical signals, achieving displacement detection at the micrometer or even nanometer level. Besides requiring high resolution, grating displacement sensors also feature high accuracy and small size. Therefore, the accuracy requirements for grating displacement sensor performance testing platforms and the related performance index testing methods are quite stringent. Current research on performance testing platforms for grating displacement sensors is scattered, mainly focusing on single-indicator testing devices, lacking research on multi-indicator comprehensive performance testing platforms. Furthermore, domestic research on grating displacement sensors is relatively slow, resulting in a weaker foundation for research on performance testing platforms and methods. Therefore, the development of a multi-indicator comprehensive performance testing platform for grating displacement sensors is of great significance, not only promoting the rapid development of advanced manufacturing industries but also possessing significant market value for both grating displacement sensor manufacturers and users.

[0003] The shortcomings of existing technologies mainly lie in the following two aspects: Firstly, current research on displacement sensor testing platforms and methods primarily focuses on capacitive displacement sensors, which have lower resolution and larger volume, while research on grating-type displacement sensors, which offer higher resolution, higher accuracy, and smaller size, is relatively limited. However, high-resolution, high-precision, and small-volume grating-type displacement sensors are more in line with current practical application needs and the development of advanced manufacturing industries. Secondly, current research focuses more on grating displacement sensors and the testing of single displacement sensor performance indicators. At this stage, higher priority should be given to research on testing platforms for evaluating the performance of grating displacement sensors, as well as performance evaluation of grating displacement sensors with multiple tolerance attitudes and multiple indicators. This will not only ensure the high resolution and high accuracy of grating displacement sensors during the design phase but also simulate application scenarios with multiple tolerance attitudes. Summary of the Invention

[0004] This invention provides a grating displacement sensor performance testing platform to address the problem of limited detection capabilities in existing testing platforms.

[0005] This invention provides a testing platform for the performance indicators of a grating displacement sensor, comprising: The first test platform includes a first sensor tolerance adjustment component and a first grating ruler displacement component. The first sensor tolerance adjustment component is used to fix the PCB-type grating displacement sensor and perform tolerance attitude adjustment of the six degrees of freedom of the PCB-type grating displacement sensor. The first grating ruler displacement component is used to fix the first grating ruler and drive the first grating ruler to move. The second test platform is set on the optical test plate opposite to the first test platform along the Z-axis. The second test platform includes a second sensor tolerance adjustment component and a second grating ruler displacement component. The second sensor tolerance adjustment component is used to fix the integrated grating displacement sensor and to adjust the tolerance attitude of the integrated grating displacement sensor in six degrees of freedom. The second grating ruler displacement component is used to fix the second grating ruler and drive the second grating ruler to move. The first grating ruler displacement component is located on the side of the first sensor tolerance adjustment component facing the second sensor tolerance adjustment component, and the second grating ruler displacement component is located on the side of the second sensor tolerance adjustment component away from the first sensor tolerance adjustment component.

[0006] According to the present invention, a grating displacement sensor index testing platform is provided, wherein the first sensor tolerance adjustment component includes: First test controller; The first corner tolerance test bench is electrically connected to the first test controller. The first corner tolerance test bench has six first corner tolerance test stepper motors. The host computer configures the corresponding displacement or corner target position, displacement or corner speed and acceleration and other motion parameters. The first test controller is used to generate pulse signals according to the configured motion parameters to form motion commands, drive the six first corner tolerance test stepper motors to move synchronously, and thus realize the tolerance position adjustment of six degrees of freedom. The first micro-motion stage adapter is disposed on the test platform of the first corner tolerance test bench; The first grating displacement sensor adapter board is connected to the first micro-motion stage adapter. A first grating displacement sensor mounting plate is connected to a first grating displacement sensor adapter plate, and the PCB-type grating displacement sensor is fixed on the first grating displacement sensor mounting plate.

[0007] According to the present invention, a grating displacement sensor index testing platform is provided, wherein the PCB-type grating displacement sensor is detachably connected to the first grating displacement sensor mounting plate, and the first grating displacement sensor mounting plate is detachably connected to the first grating displacement sensor adapter plate.

[0008] According to the present invention, a grating displacement sensor index testing platform is provided, wherein the first grating ruler displacement component includes: The first displacement motion stage is located on the side of the first corner tolerance test stage facing the second sensor tolerance adjustment component; The first slide transition plate is disposed on the upper part of the first displacement motion stage, and the first displacement motion stage is used to drive the first slide transition plate to move along the X-axis direction. The first single-degree-of-freedom displacement slide is disposed on the upper part of the first slide transition plate; The first grating ruler mounting base is disposed on the upper part of the first single-degree-of-freedom displacement slide. A first grating ruler mounting plate is connected to a first grating ruler mounting base, and the first grating ruler mounting plate is used to fix the first grating ruler; a first single-degree-of-freedom displacement slide is used to drive the first grating ruler mounting base to move along the Z-axis direction, so as to drive the first grating ruler mounting plate and the first grating ruler to move along the Z-axis direction.

[0009] According to the present invention, a grating displacement sensor index testing platform is provided, wherein the first grating ruler mounting base includes: The connecting part is connected to the first single-degree-of-freedom displacement slide; Two fixing parts are respectively disposed on both sides of the connecting part, and the first grating ruler mounting plate is connected to the fixing parts.

[0010] According to the present invention, a grating displacement sensor index testing platform is provided, characterized in that the second sensor tolerance adjustment component includes: Second test controller; The second corner tolerance test bench is electrically connected to the second test controller. The second corner tolerance test bench has six second corner tolerance test stepper motors. The host computer configures the corresponding displacement or corner target position, displacement or corner speed and acceleration and other motion parameters. The second test controller is used to generate pulse signals according to the configured motion parameters to form motion commands, drive the six second corner tolerance test stepper motors to move synchronously, and thus realize the tolerance position adjustment of six degrees of freedom. The second micro-stage adapter is disposed on the test platform of the second corner tolerance test bench; The second grating displacement sensor mounting plate is connected to the second micro-motion stage adapter, and the integrated grating displacement sensor is fixed to the second grating displacement sensor mounting plate.

[0011] According to the present invention, a grating displacement sensor index testing platform is provided, wherein the integrated grating displacement sensor is detachably connected to the second grating displacement sensor mounting plate, and the second grating displacement sensor mounting plate is detachably connected to the second micro-motion stage adapter.

[0012] According to the grating displacement sensor index testing platform provided by the present invention, the second grating ruler displacement component includes: The second displacement stage is located on the side of the second sensor tolerance adjustment component that is away from the first sensor tolerance adjustment component. The second slide transition plate is disposed on the upper part of the second displacement motion stage, and the second displacement motion stage is used to drive the second slide transition plate to move along the X-axis direction. The second single-degree-of-freedom displacement slide is disposed on the upper part of the second slide transition plate; The second grating ruler mounting base is disposed on the upper part of the second single-degree-of-freedom displacement slide; The second grating ruler mounting plate is connected to the second grating ruler mounting base and is used to fix the second grating ruler. The second single-degree-of-freedom displacement slide is used to drive the second grating ruler mounting base to move along the Z-axis direction, so as to drive the second grating ruler mounting plate and the second grating ruler to move along the Z-axis direction.

[0013] According to the grating displacement sensor index testing platform provided by the present invention, the maximum speed of the second displacement stage is 500 mm / s, and the minimum displacement of the second displacement stage is 0.2 nm.

[0014] The present invention also provides a tolerance testing method for a grating displacement sensor performance testing platform, the tolerance testing method being based on the grating displacement sensor performance testing platform described in any one of the above claims, comprising: Turn on the first test controller, the first corner tolerance test bench, the first corner tolerance test stepper motor, and the first displacement motion stage, and perform initial parameter configuration to ensure that the X-axis, Y-axis, Z-axis, X-axis swing, Y-axis pitch, and Z-axis deviation of the first corner tolerance test bench are all at the reference center position, and that the first corner tolerance test bench and the first displacement motion stage can perform corner tolerance and displacement motion normally. A PCB-type grating displacement sensor is mounted on a first grating displacement sensor mounting plate, and a first grating ruler is mounted on a first grating ruler mounting plate, ensuring that the PCB-type grating displacement sensor and the first grating ruler are parallel and directly opposite each other; After adjusting the relative position of the PCB-type grating displacement sensor and the first grating, the first single-degree-of-freedom displacement slide is adjusted to ensure that the straight-line distance between the PCB-type grating displacement sensor and the first grating ruler is the working distance of the PCB-type grating displacement sensor. The first rotation tolerance test platform is calibrated so that its six degrees of freedom are at the reference center position. Motion control commands are written to control the first displacement motion platform to perform range performance index test and accuracy performance index test, and the test results are recorded. At the reference center position, and within the effective travel range of 4mm on the X-axis, the X-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the X-axis positive direction limit position with normal test results is recorded. Similarly, at the reference center position, the X-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the X-axis negative direction limit position with normal test results is recorded. At the reference center position, and within the effective travel range of 4mm on the Y-axis, the Y-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive Y-axis limit position with normal test results is recorded. Similarly, at the reference center position, the Y-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative Y-axis limit position with normal test results is recorded. At the reference center position, and within the effective travel range of 4mm on the Z-axis, the Z-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive direction limit position of the Z-axis with normal test results is recorded. Similarly, at the reference center position, the Z-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative direction limit position of the Z-axis with normal test results is recorded. At the reference center position, and within the effective stroke range of 6° for X-axis swing, the X-axis swing degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement motion stage needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of X-axis swing with normal test results is recorded. Similarly, at the reference center position, the X-axis swing degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement motion stage needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of X-axis swing with normal test results is recorded. At the reference center position, and within the effective travel range of 6° for Y-axis pitch, gradually increase the Y-axis pitch freedom position. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive Y-axis pitch limit position with normal test results should be recorded. Similarly, at the reference center position, gradually decrease the Y-axis pitch freedom position. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative Y-axis pitch limit position with normal test results should be recorded. At the reference center position, and within the effective travel range of 6° Z-axis deviation, gradually increase the Z-axis deviation degree of freedom position. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of Z-axis deviation with normal test results should be recorded. Similarly, at the reference center position, gradually decrease the Z-axis deviation degree of freedom position. Each time the position is adjusted, the first displacement stage needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of Z-axis deviation with normal test results should be recorded.

[0015] The grating displacement sensor performance testing platform provided by this invention solves the problem of insufficient research on grating displacement sensor performance testing platforms in related research fields. Compared with the prior art, this testing platform is applicable to the testing of high-precision grating displacement sensors with different working distances. It can realize the needs of multi-index synchronous testing, multi-grating displacement sensor synchronous testing, and multi-performance index comprehensive testing under various large-stroke tolerance postures, and can more comprehensively evaluate the performance of grating displacement sensors. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the grating displacement sensor performance testing platform provided by the present invention.

[0018] Figure 2 This is one of the structural schematic diagrams of the first test platform provided by the present invention.

[0019] Figure 3 This is the second structural schematic diagram of the first testing platform provided by the present invention.

[0020] Figure 4 This is the third structural schematic diagram of the first test platform provided by the present invention.

[0021] Figure 5 This is one of the structural schematic diagrams of the second test platform provided by the present invention.

[0022] Figure 6 This is the second structural schematic diagram of the second test platform provided by the present invention.

[0023] Figure 7 This is the third structural schematic diagram of the second test platform provided by the present invention.

[0024] Figure label: 1. First test platform; 101. First sensor tolerance adjustment assembly; 401. Oscilloscope; 402. Driver; 1011. First angle tolerance test bench; 1012. First test controller; 1013. First angle tolerance test stepper motor; 1014. First micro-motion stage adapter; 1015. First grating displacement sensor adapter plate; 1016. First grating displacement sensor mounting plate; 102. First grating ruler displacement assembly; 1021. First displacement stage; 1022. First slide stage adapter plate; 1023. First single-degree-of-freedom displacement slide stage; 1024. First grating ruler mounting plate; 1025. First... 1. Grating ruler mounting plate; 2. Second test platform; 201. Second sensor tolerance adjustment component; 2011. Second angle tolerance test bench; 2012. Second test controller; 2013. Second angle tolerance test stepper motor; 2014. Second micro-motion stage adapter; 2015. Second grating displacement sensor mounting plate; 202. Second grating ruler displacement component; 2021. Second displacement motion stage; 2022. Second slide table adapter plate; 2023. Second single-degree-of-freedom displacement slide table; 2024. Second grating ruler mounting base; 2025. Second grating ruler mounting plate; 3. Optical test plate; 4. Signal detection and acquisition module. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0026] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0027] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention based on the specific circumstances.

[0028] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0029] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0030] like Figure 1 , Figure 2 and Figure 5 As shown, the grating displacement sensor index testing platform includes a first testing platform 1 and a second testing platform 2. The first testing platform 1 includes a first sensor tolerance adjustment component 101 and a first grating ruler displacement component 102. The first sensor tolerance adjustment component 101 is used to fix the PCB-type grating displacement sensor and perform tolerance attitude adjustment of the six degrees of freedom of the PCB-type grating displacement sensor. The first grating ruler displacement component 102 is used to fix the first grating ruler and drive the first grating ruler to move.

[0031] The second test platform 2 is disposed opposite to the first test platform 1 along the Z-axis on the optical test plate 3. The second test platform 2 includes a second sensor tolerance adjustment component 201 and a second grating ruler displacement component 202. The second sensor tolerance adjustment component 201 is used to fix the integrated grating displacement sensor and to adjust the tolerance attitude of the integrated grating displacement sensor in six degrees of freedom. The second grating ruler displacement component 202 is used to fix the second grating ruler and drive the second grating ruler to move.

[0032] The first grating ruler displacement component 102 is located on the side of the first sensor tolerance adjustment component 101 facing the second sensor tolerance adjustment component 201, and the second grating ruler displacement component 202 is located on the side of the second sensor tolerance adjustment component 201 away from the first sensor tolerance adjustment component 101.

[0033] The grating displacement sensor performance testing platform provided by this invention solves the problem of insufficient research on grating displacement sensor performance testing platforms in related research fields. Compared with the prior art, this testing platform is applicable to the testing of high-precision grating displacement sensors with different working distances. It can realize the needs of multi-index synchronous testing, multi-grating displacement sensor synchronous testing, and multi-performance index comprehensive testing under various large-stroke tolerance postures, and can more comprehensively evaluate the performance of grating displacement sensors.

[0034] like Figure 3 As shown, the first sensor tolerance adjustment assembly 101 includes a first test controller 1012, a first angular tolerance test stage 1011, a first micro-motion stage adapter 1014, a first grating displacement sensor adapter plate 1015, and a first grating displacement sensor mounting plate 1016. The first micro-motion stage adapter 1014, the first grating displacement sensor adapter plate 1015, and the first grating displacement sensor mounting plate 1016 are all used for connection to ensure that the angular tolerance change of the first angular tolerance test stage 1011 drives the PCB-type grating displacement sensor to move together, thereby realizing the angular tolerance movement of the PCB-type grating displacement sensor around the angular center of the displacement sensor. The first test controller 1012 is electrically connected to the first angle tolerance test bench 1011. The first angle tolerance test bench 1011 has six first angle tolerance test stepper motors 1013. After the host computer configures the motion parameters, the first test controller 1012 generates pulse signals to drive the six motors to move synchronously, realizing the tolerance attitude precision adjustment of the six degrees of freedom of the PCB grating displacement sensor. This enables precise simulation of various installation errors that may occur in actual application scenarios, providing diverse attitude conditions for comprehensive performance testing.

[0035] The host computer configures the corresponding displacement or rotation target position, displacement or rotation velocity and acceleration, and other motion parameters. The first test controller 1012 generates pulse signals based on the configured motion parameters to form motion commands, which drive the six first rotation tolerance test stepper motors 1013 to move synchronously, thereby realizing the tolerance position adjustment of the six degrees of freedom. At the same time, the first test controller 1012 performs closed-loop feedback control, monitors the position and attitude of the corresponding six degrees of freedom in real time, and dynamically adjusts the pulse frequency and current through algorithms to eliminate errors when the rotation tolerance changes. The cooperation of the first test controller 1012, the first rotation tolerance test platform 1011, and the first rotation tolerance test stepper motors 1013 can realize rotation tolerance testing within a travel range of 4mm for the X-axis, Y-axis, and Z-axis, and a travel range of 6° for the X-axis swing, Y-axis pitch, and Z-axis deviation.

[0036] The first micro-motion stage adapter 1014 is set on the test platform of the first corner tolerance test stage 1011; the first grating displacement sensor adapter plate 1015 is connected to the first micro-motion stage adapter 1014, the first grating displacement sensor mounting plate 1016 is connected to the first grating displacement sensor adapter plate 1015, and the PCB-type grating displacement sensor is fixed on the first grating displacement sensor mounting plate 1016.

[0037] In one embodiment of the present invention, the grating displacement sensor performance testing platform further includes a signal detection and acquisition module 4. The signal detection and acquisition module 4 consists of an oscilloscope 401 and a driver 402, both of which are connected to the signal output port of the displacement sensor. The oscilloscope 401 is connected to the signal output port of the displacement sensor via a probe, and receives and displays the measurement signal and zero-position signal output by the displacement sensor, allowing for the assessment of the real-time signal quality. The driver 402's input terminal is connected to the signal output terminal of the displacement sensor, enabling the calculation of the actual displacement based on the sensor's output signal. This calculation can serve as the basis for subsequent range and accuracy tests.

[0038] In one embodiment of the present invention, the PCB-type grating displacement sensor is detachably connected to the first grating displacement sensor mounting plate 1016, and the first grating displacement sensor mounting plate 1016 is detachably connected to the first grating displacement sensor adapter plate 1015. The combination of the first micro-stage adapter 1014, the first grating displacement sensor adapter plate 1015, and the first grating displacement sensor mounting plate 1016 provides a stable mounting base for the sensor. Furthermore, the detachable connection allows for quick replacement of PCB-type grating displacement sensors of different specifications, enhancing the platform's versatility and the convenience of testing. Ultimately, through the synergistic effect of each component, the tolerance adjustment testing function of the PCB-type grating displacement sensor is efficiently achieved. Preferably, the PCB-type grating displacement sensor is connected to the first grating displacement sensor mounting plate 1016 by screws, and the first grating displacement sensor mounting plate 1016 is connected to the first grating displacement sensor adapter plate 1015 by screws.

[0039] In one embodiment of the present invention, such as Figure 4As shown, the first grating ruler displacement assembly 102 includes a first displacement motion stage 1021, a first slide transition plate 1022, a first single-degree-of-freedom displacement slide 1023, a first grating ruler mounting base 1024, and a first grating ruler mounting plate 1025. The first displacement motion stage 1021 is located on the side of the first angle tolerance test stage 1011 facing the second sensor tolerance adjustment assembly 201. The controller of the first displacement motion stage 1021 is electrically connected to the first displacement motion stage 1021. The first displacement motion stage 1021 is a precision linear platform directly driven by electromagnetic force. The corresponding motion parameters such as displacement, velocity, and acceleration are configured by the host computer. The displacement motion stage controller receives the configured motion parameters and displacement feedback, and adjusts the current of the corresponding electromagnetic coil to drive the first displacement motion stage 1021 to move. Simultaneously, the controller of the first displacement stage 1021 performs closed-loop feedback control, tracks the target trajectory, and feeds back the actual position information. It also dynamically adjusts the pulse frequency and current through algorithms to eliminate displacement errors, achieving displacement and driving the first grating ruler and the PCB-type grating displacement sensor to perform relative displacement, thus enabling performance testing of the PCB-type grating displacement sensor. Furthermore, the first displacement stage 1021 features direct electromagnetic force drive and a closed-loop feedback system, allowing direct transmission of driving force to the first slide transition plate 1022 without friction. This enables a high speed of 500 mm / s and a minimum displacement of 0.2 nm, ensuring the accuracy and repeatability of the PCB-type grating displacement sensor performance testing.

[0040] The first slide transition plate 1022 is disposed on the upper part of the first displacement stage 1021. The first displacement stage 1021 is used to drive the first slide transition plate 1022 to move along the X-axis, thereby adjusting the relative distance between the PCB-type grating displacement sensor and the first grating ruler along the X-axis. This allows for performance testing of PCB-type grating displacement sensors at different working distances. The first single-degree-of-freedom displacement slide 1023 is disposed on the upper part of the first slide transition plate 1022. The first slide transition plate 1022 is used to connect the first displacement stage 1021 and the first single-degree-of-freedom displacement slide 1023 together, ensuring that the displacement of the first displacement stage 1021 drives the first single-degree-of-freedom displacement slide 1023 to move together, thereby achieving relative displacement between the first grating ruler and the PCB-type grating displacement sensor during performance testing.

[0041] The first grating ruler mounting base 1024 is disposed on the upper part of the first single-degree-of-freedom displacement slide 1023. The first grating ruler mounting base 1024 is used to connect the first single-degree-of-freedom displacement slide 1023 to the first grating ruler mounting plate 1025. The first grating ruler mounting plate 1025 is connected to the first grating ruler mounting base 1024 and is used to fix the first grating ruler. The first single-degree-of-freedom displacement slide 1023 is used to drive the first grating ruler mounting base 1024 to move along the Z-axis, so as to drive the first grating ruler mounting plate 1025 and the first grating ruler to move along the Z-axis. The first grating ruler mounting plate 1025 serves as a fixing structure for the first grating ruler and can simultaneously fix multiple grating rulers for testing, enabling multiple PCB-type grating ruler displacement sensors to be tested synchronously.

[0042] In one embodiment of the present invention, such as Figure 4 As shown, the grating ruler mounting base includes a connecting part and two fixing parts. The connecting part is connected to the first single-degree-of-freedom displacement slide 1023 by screws. This screw connection method ensures that the connection between the mounting base and the slide is firm and reliable, preventing relative displacement during movement, and facilitating installation, disassembly and maintenance. The cross-section of the connecting part is U-shaped. The two fixing parts are respectively arranged on both sides of the connecting part. The two fixing parts are horizontally arranged and integrally formed with the connecting part. The grating ruler mounting plate is vertically set on the side of the connecting part near the first corner tolerance test stage 1011. This vertical setting method ensures that the grating ruler can be correctly aligned with the sensor. The grating ruler mounting plate is connected to the fixing parts by screws. This detachable screw connection method not only ensures the stable installation of the grating ruler mounting plate, but also facilitates the fine adjustment or replacement of the mounting plate position, improving the maintainability of the equipment and the compatibility with grating rulers of different specifications.

[0043] In one embodiment of the present invention, such as Figure 6As shown, the second sensor tolerance adjustment assembly 201 includes a second test controller 2012, a second corner tolerance test stage 2011, a second micro-motion stage adapter 2014, and a second grating displacement sensor mounting plate 2015. The second micro-motion stage adapter 2014 and the second grating displacement sensor mounting plate 2015 are both used for connection to ensure that the corner tolerance change of the second corner tolerance test stage 2011 drives the integrated grating displacement sensor to move together, so as to realize the corner tolerance movement of the integrated grating displacement sensor around the corner center of the displacement sensor. The second test controller 2012 is electrically connected to the second corner tolerance test bench 2011. The second corner tolerance test bench 2011 has six second corner tolerance test stepper motors 2013. After the host computer configures the motion parameters, the second test controller 2012 generates pulse signals to drive the six motors to move synchronously, realizing the tolerance attitude precision adjustment of the six degrees of freedom of the integrated grating displacement sensor. This enables precise simulation of various installation errors that may occur in the actual application scenario of the sensor, providing diverse attitude conditions for comprehensive performance testing.

[0044] The host computer configures the corresponding displacement or rotation target position, displacement or rotation velocity and acceleration, and other motion parameters. The second test controller 2012 generates pulse signals based on the configured motion parameters to form motion commands, driving the six second rotation tolerance test stepper motors 2013 to move synchronously, thereby realizing the tolerance position adjustment of the six degrees of freedom. At the same time, the second test controller 2012 synchronously performs closed-loop feedback control, monitors the position and attitude of the corresponding six degrees of freedom in real time, and dynamically adjusts the pulse frequency and current through algorithms to eliminate errors when the rotation tolerance changes. The combined action of the second test controller 2012, the second rotation tolerance test platform 2011, and the second rotation tolerance test stepper motors 2013 can realize rotation tolerance testing within a travel range of 4mm for the X, Y, and Z axes and a travel range of 6° for the X-axis swing, Y-axis pitch, and Z-axis deviation.

[0045] The second micro-motion stage adapter 2014 is set on the test platform of the second corner tolerance test stage 2011; the second grating displacement sensor mounting plate 2015 is connected to the second micro-motion stage adapter 2014, and the integrated grating displacement sensor is fixed on the second grating displacement sensor mounting plate 2015.

[0046] In one embodiment of the present invention, the integrated grating displacement sensor is detachably connected to the second grating displacement sensor mounting plate 2015, and the second grating displacement sensor mounting plate 2015 is detachably connected to the second micro-stage adapter 2014. The second grating displacement sensor mounting plate 2015 and the second micro-stage adapter 2014 cooperate to provide a stable mounting base for the integrated grating displacement sensor. Furthermore, the detachable connection allows for quick replacement of integrated grating displacement sensors of different specifications, enhancing the platform's versatility and the convenience of testing. Ultimately, through the synergistic effect of the components, the tolerance adjustment testing function of the integrated grating displacement sensor is efficiently achieved. Preferably, the integrated grating displacement sensor and the second grating displacement sensor mounting plate 2015 are connected by screws, and the second grating displacement sensor mounting plate 2015 and the second micro-stage adapter 2014 are connected by screws.

[0047] In one embodiment of the present invention, such as Figure 7 As shown, the second grating ruler displacement assembly 202 includes a second displacement stage 2021, a second slide transition plate 2022, a second single-degree-of-freedom displacement slide 2023, a second grating ruler mounting base 2024, and a second grating ruler mounting plate 2025. The second displacement stage 2021 is located on the side of the second sensor tolerance adjustment assembly 201 opposite to the first sensor tolerance adjustment assembly 101. The controller of the second displacement stage 2021 is electrically connected to the second displacement stage 2021. The second displacement stage 2021 is a precision linear platform directly driven by electromagnetic force. The corresponding motion parameters such as displacement, velocity, and acceleration are configured by the host computer. The displacement stage controller receives the configured motion parameters and displacement feedback, and adjusts the current of the corresponding electromagnetic coil to drive the second displacement stage 2021 to move. Simultaneously, the controller of the second displacement stage 2021 performs closed-loop feedback control, tracks the target trajectory, and feeds back the actual position information. It dynamically adjusts the pulse frequency and current through algorithms to eliminate displacement errors, enabling displacement movement and driving relative displacement between the second grating ruler and the integrated grating displacement sensor. This achieves performance testing of the integrated grating displacement sensor. Furthermore, the second displacement stage 2021 features direct electromagnetic force drive and a closed-loop feedback system, allowing direct transmission of driving force to the second slide transition plate 2022 without friction. The maximum speed of the second displacement stage 2021 is 500 mm / s, and the minimum displacement of the second stage is 0.2 nm, ensuring the accuracy and repeatability of the integrated grating displacement sensor performance testing.

[0048] The second slide transition plate 2022 is disposed above the second displacement stage 2021. The second displacement stage 2021 drives the second slide transition plate 2022 to move along the X-axis, thereby adjusting the relative distance between the integrated grating displacement sensor and the second grating ruler along the X-axis. This allows for performance testing of the integrated grating displacement sensor at different working distances. The second single-degree-of-freedom displacement slide 2023 is disposed above the second slide transition plate 2022. The second slide transition plate 2022 connects the second displacement stage 2021 and the second single-degree-of-freedom displacement slide 2023, ensuring that the displacement of the second displacement stage 2021 drives the second single-degree-of-freedom displacement slide 2023 to move together, achieving relative displacement movement between the second grating ruler and the integrated grating displacement sensor during performance testing.

[0049] The second grating ruler mounting base 2024 is disposed on the upper part of the second single-degree-of-freedom displacement slide 2023. The second grating ruler mounting base 2024 connects the second single-degree-of-freedom displacement slide 2023 to the second grating ruler mounting plate 2025. The second grating ruler mounting plate 2025 is connected to the second grating ruler mounting base 2024 and is used to fix the second grating ruler. The second single-degree-of-freedom displacement slide 2023 drives the second grating ruler mounting base 2024 to move along the Z-axis, thereby driving the second grating ruler mounting plate 2025 and the second grating ruler to move along the Z-axis. The second grating ruler mounting plate 2025 serves as a fixing structure for the second grating ruler, allowing multiple grating rulers to be fixed simultaneously for testing, enabling simultaneous performance testing of multiple integrated grating displacement sensors.

[0050] The present invention also provides a tolerance testing method for a grating displacement sensor performance testing platform, wherein the tolerance testing method comprises the grating displacement sensor performance testing platform described in any of the above embodiments, including: Step S100: Turn on the first test controller 1012, the first angle tolerance test bench 1011, the first angle tolerance test stepper motor 1013, and the first displacement motion stage 1021, and perform initial parameter configuration to ensure that the X-axis, Y-axis, Z-axis, X-axis swing, Y-axis pitch, and Z-axis deviation of the first angle tolerance test bench 1011 are all at the reference center position, and that the first angle tolerance test bench 1011 and the first displacement motion stage 1021 can perform angle tolerance and displacement motion normally. Step S110: Install the PCB-type grating displacement sensor on the first grating displacement sensor mounting plate 1016 and the first grating ruler on the first grating ruler mounting plate 1025, ensuring that the PCB-type grating displacement sensor and the first grating ruler are parallel and facing each other. Step S120: After adjusting the relative position of the PCB grating displacement sensor and the first grating, the first single-degree-of-freedom displacement slide 1023 is adjusted to ensure that the straight-line distance between the PCB grating displacement sensor and the first grating ruler is the working distance of the PCB grating displacement sensor. Step S130: The first rotation tolerance test stage 1011 is calibrated so that its six degrees of freedom are at the reference center position. Motion control commands are written to control the first displacement motion stage 1021 to perform range performance index test and accuracy performance index test, and the test results are recorded. In step S140, at the reference center position and within the effective travel range of 4mm on the X-axis, the X-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive X-axis limit position with normal test results is recorded. Similarly, at the reference center position, the X-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative X-axis limit position with normal test results is recorded. In step S150, at the reference center position and within the effective travel range of 4mm on the Y-axis, the Y-degree-of-freedom position is gradually increased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive Y-axis limit position with normal test results is recorded. Similarly, at the reference center position, the Y-degree-of-freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative Y-axis limit position with normal test results is recorded. In step S160, at the reference center position and within the effective travel range of 4mm on the Z-axis, the Z-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive direction limit position of the Z-axis with normal test results is recorded. Similarly, at the reference center position, the Z-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative direction limit position of the Z-axis with normal test results is recorded. In step S170, at the reference center position and within the effective stroke range of 6° for X-axis swing, gradually increase the position of the X-axis swing degree of freedom. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of the X-axis swing with normal test results should be recorded. Similarly, at the reference center position, gradually decrease the position of the X-axis swing degree of freedom. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of the X-axis swing with normal test results should be recorded. In step S180, at the reference center position and within the effective travel range of 6° for Y-axis pitch, gradually increase the Y-axis pitch freedom position. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the positive pitch direction limit position with normal test results should be recorded. Similarly, at the reference center position, gradually decrease the Y-axis pitch freedom position. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index testing and accuracy performance index testing, and the negative pitch direction limit position with normal test results should be recorded. In step S190, at the reference center position and within the effective stroke range of 6° Z-axis deviation, the Z-axis deviation degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of the Z-axis deviation with normal test results is recorded. Similarly, at the reference center position, the Z-axis deviation degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage 1021 needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of the Z-axis deviation with normal test results is recorded.

[0051] The above steps are the tolerance test method for the first test platform 1. The tolerance test method for the second test platform 2 is the same as that for the first test platform 1.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A testing platform for the performance indicators of a grating displacement sensor, characterized in that, include: The first test platform (1) includes a first sensor tolerance adjustment component (101) and a first grating ruler displacement component (102). The first sensor tolerance adjustment component (101) is used to fix the PCB grating displacement sensor and perform tolerance attitude adjustment of the six degrees of freedom of the PCB grating displacement sensor. The first grating ruler displacement component (102) is used to fix the first grating ruler and drive the first grating ruler to move. The second test platform (2) is set on the optical test plate (3) opposite to the first test platform (1) along the Z-axis. The second test platform (2) includes a second sensor tolerance adjustment component (201) and a second grating ruler displacement component (202). The second sensor tolerance adjustment component (201) is used to fix the integrated grating displacement sensor and to adjust the tolerance attitude of the integrated grating displacement sensor in six degrees of freedom. The second grating ruler displacement component (202) is used to fix the second grating ruler and drive the second grating ruler to move. The first grating ruler displacement component (102) is located on the side of the first sensor tolerance adjustment component (101) facing the second sensor tolerance adjustment component (201), and the second grating ruler displacement component (202) is located on the side of the second sensor tolerance adjustment component (201) away from the first sensor tolerance adjustment component (101). The first sensor tolerance adjustment component (101) includes: First test controller (1012); The first corner tolerance test bench (1011) is electrically connected to the first corner tolerance test bench (1011). The first corner tolerance test bench (1011) has six first corner tolerance test stepper motors (1013). The host computer configures the corresponding displacement or corner target position, displacement or corner speed and acceleration motion parameters. The first test controller (1012) is used to generate pulse signals according to the configured motion parameters to form motion commands, drive the six first corner tolerance test stepper motors (1013) to move synchronously, and thus realize the tolerance position adjustment of six degrees of freedom. The first micro-motion stage adapter (1014) is disposed on the test platform of the first corner tolerance test bench (1011); The first grating displacement sensor adapter board (1015) is connected to the first micro-motion stage adapter (1014); The first grating displacement sensor mounting plate (1016) is connected to the first grating displacement sensor adapter plate (1015), and the PCB-type grating displacement sensor is fixed on the first grating displacement sensor mounting plate (1016).

2. The grating displacement sensor performance testing platform according to claim 1, characterized in that, The PCB-type grating displacement sensor is detachably connected to the first grating displacement sensor mounting plate (1016), and the first grating displacement sensor mounting plate (1016) is detachably connected to the first grating displacement sensor adapter plate (1015).

3. The grating displacement sensor performance testing platform according to claim 2, characterized in that, The first grating ruler displacement component (102) includes: The first displacement stage (1021) is located on the side of the first corner tolerance test stage (1011) facing the second sensor tolerance adjustment assembly (201); The first slide transition plate (1022) is disposed on the upper part of the first displacement motion stage (1021), and the first displacement motion stage (1021) is used to drive the first slide transition plate (1022) to move along the X-axis direction. The first single-degree-of-freedom displacement slide (1023) is disposed on the upper part of the first slide transition plate (1022); The first grating ruler mounting base (1024) is disposed on the upper part of the first single-degree-of-freedom displacement slide (1023); The first grating ruler mounting plate (1025) is connected to the first grating ruler mounting base (1024). The first grating ruler mounting plate (1025) is used to fix the first grating ruler. The first single-degree-of-freedom displacement slide (1023) is used to drive the first grating ruler mounting base (1024) to move along the Z-axis direction, so as to drive the first grating ruler mounting plate (1025) and the first grating ruler to move along the Z-axis direction.

4. The grating displacement sensor performance testing platform according to claim 3, characterized in that, The first grating ruler mounting base (1024) includes: A connecting part is provided, which is connected to the first single-degree-of-freedom displacement slide (1023); Two fixing parts are respectively disposed on both sides of the connecting part, and the first grating ruler mounting plate (1025) is connected to the fixing parts.

5. The grating displacement sensor performance testing platform according to any one of claims 1 to 4, characterized in that, The second sensor tolerance adjustment assembly (201) includes: Second test controller (2012); The second corner tolerance test bench (2011) is electrically connected to the second corner tolerance test bench (2011). The second corner tolerance test bench (2011) has six second corner tolerance test stepper motors (2013). The host computer configures the corresponding displacement or corner target position, displacement or corner velocity and acceleration motion parameters. The second test controller (2012) is used to generate pulse signals according to the configured motion parameters to form motion commands, drive the six second corner tolerance test stepper motors (2013) to move synchronously, thereby realizing the tolerance position adjustment of six degrees of freedom. The second micro-motion stage adapter (2014) is installed on the test platform of the second corner tolerance test bench (2011); The second grating displacement sensor mounting plate (2015) is connected to the second micro-motion stage adapter (2014), and the integrated grating displacement sensor is fixed to the second grating displacement sensor mounting plate (2015).

6. The grating displacement sensor performance testing platform according to claim 5, characterized in that, The integrated grating displacement sensor is detachably connected to the second grating displacement sensor mounting plate (2015), and the second grating displacement sensor mounting plate (2015) is detachably connected to the second micro-motion stage adapter (2014).

7. The grating displacement sensor performance testing platform according to claim 5, characterized in that, The second grating ruler displacement assembly (202) includes: The second displacement stage (2021) is located on the side of the second sensor tolerance adjustment assembly (201) away from the first sensor tolerance adjustment assembly (101); The second slide transition plate (2022) is disposed on the upper part of the second displacement motion stage (2021), and the second displacement motion stage (2021) is used to drive the second slide transition plate (2022) to move along the X-axis direction; The second single-degree-of-freedom displacement slide (2023) is disposed on the upper part of the second slide transition plate (2022); The second grating ruler mounting base (2024) is disposed on the upper part of the second single-degree-of-freedom displacement slide (2023); The second grating ruler mounting plate (2025) is connected to the second grating ruler mounting base (2024). The second grating ruler mounting plate (2025) is used to fix the second grating ruler. The second single-degree-of-freedom displacement slide (2023) is used to drive the second grating ruler mounting base (2024) to move along the Z-axis direction, so as to drive the second grating ruler mounting plate (2025) and the second grating ruler to move along the Z-axis direction.

8. The grating displacement sensor performance testing platform according to claim 7, characterized in that, The maximum speed of the second displacement stage (2021) is 500 mm / s, and the minimum displacement of the second displacement stage (2021) is 0.2 mm.

9. A tolerance testing method for a grating displacement sensor performance testing platform, wherein the tolerance testing method is based on the grating displacement sensor performance testing platform according to any one of claims 1 to 8, characterized in that, include: Turn on the first test controller (1012), the first angle tolerance test bench (1011), the first angle tolerance test stepper motor (1013), and the first displacement motion stage (1021), and perform initial parameter configuration to ensure that the X-axis, Y-axis, Z-axis, X-axis swing, Y-axis pitch, and Z-axis deviation of the first angle tolerance test bench (1011) are all at the reference center position, and that the first angle tolerance test bench (1011) and the first displacement motion stage (1021) can perform angle tolerance and displacement motion normally; The PCB-type grating displacement sensor is installed on the first grating displacement sensor mounting plate (1016), and the first grating ruler is installed on the first grating ruler mounting plate (1025), ensuring that the PCB-type grating displacement sensor and the first grating ruler are parallel and facing each other. After adjusting the relative position of the PCB-type grating displacement sensor and the first grating, the first single-degree-of-freedom displacement slide (1023) is adjusted to ensure that the straight-line distance between the PCB-type grating displacement sensor and the first grating ruler is the working distance of the PCB-type grating displacement sensor. The first rotation tolerance test stage (1011) is calibrated so that its six degrees of freedom are at the reference center position. Motion control commands are written to control the first displacement motion stage (1021) to perform range performance index test and accuracy performance index test, and the test results are recorded. At the reference center position, and within the effective travel range of 4mm on the X-axis, the X-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the X-axis positive direction limit position with normal test results is recorded. Similarly, at the reference center position, the X-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the X-axis negative direction limit position with normal test results is recorded. At the reference center position, and within the effective travel range of 4mm on the Y-axis, the Y-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the positive Y-axis limit position with normal test results is recorded. Similarly, at the reference center position, the Y-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the negative Y-axis limit position with normal test results is recorded. At the reference center position, and within the effective travel range of 4mm on the Z-axis, the Z-degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the Z-axis positive direction limit position with normal test results is recorded. Similarly, at the reference center position, the Z-degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the Z-axis negative direction limit position with normal test results is recorded. At the reference center position, and within the effective stroke range of 6° for X-axis swing, the X-axis swing degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of X-axis swing with normal test results is recorded. Similarly, at the reference center position, the X-axis swing degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of X-axis swing with normal test results is recorded. At the reference center position, and within the effective travel range of 6° for Y-axis pitch, the Y-axis pitch freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the Y-axis pitch positive direction limit position with normal test results is recorded. Similarly, at the reference center position, the Y-axis pitch freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the Y-axis pitch negative direction limit position with normal test results is recorded. At the reference center position, and within the effective stroke range of 6° Z-axis deviation, the Z-axis deviation degree of freedom position is gradually increased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the positive direction limit position of the Z-axis deviation with normal test results is recorded. Similarly, at the reference center position, the Z-axis deviation degree of freedom position is gradually decreased. Each time the position is adjusted, the first displacement stage (1021) needs to be controlled to perform range performance index test and accuracy performance index test, and the negative direction limit position of the Z-axis deviation with normal test results is recorded.

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