Gas discharge lamp light path adjusting device and light path adjusting method

Abstract

The application discloses a gas discharge lamp light path adjusting device and a light path adjusting method, and belongs to the technical field of gas discharge lamps. The device comprises a charge coupled image sensor, a point light source and a light splitting cube. The point light source and the charge coupled image sensor are respectively located in two perpendicular directions of the light splitting cube. The optical axis of the light emitted by the point light source intersects with the vertical line of the center of the target surface of the charge coupled image sensor and the inclined surface of the light splitting cube. The distance from the center of the target surface of the charge coupled image sensor to the inclined surface of the light splitting cube is equal to the distance from the light outlet of the point light source to the inclined surface of the light splitting cube. The application can quickly and efficiently align the light path, effectively meet the high requirements of laser-driven gas discharge lamps on light path precision, and can be used for the assembly, debugging and maintenance of the optical system of a gas discharge lamp light box.

Description

Technical Field

[0001] This application relates to the field of gas discharge lamp technology, and in particular to a gas discharge lamp lamp path adjustment device and method. Background Technology

[0002] Laser-driven gas discharge lamps are high-energy-density continuous-spectrum light sources with wide applications in semiconductor defect detection. They utilize high-power lasers to maintain the emission of gas plasma, offering advantages such as high optical power, a high proportion of ultraviolet light, and long lifespan. However, operating a laser-driven gas discharge lamp requires focusing a kilowatt-level high-power laser onto the lamp's optical center, demanding extremely high precision in the optical path.

[0003] The optical system of the laser-driven gas discharge lamp includes an infrared laser, a concave lens, a reflector, a dichroic mirror, and a reflector bowl, all installed within the lamp's housing. The infrared laser, concave lens, and reflector are aligned horizontally, with the reflector tilted. The dichroic mirror and reflector bowl are positioned below the reflector, aligned vertically with it, but tilted in opposite directions. The inner surface of the reflector bowl is ellipsoidal. The center of the laser-driven gas discharge lamp, its light-emitting center, coincides with the theoretical first focal point of the ellipsoidal surface of the reflector bowl. During operation, the high-power laser emitted by the infrared laser strikes the ellipsoidal surface of the bottom reflector bowl at a specific divergence angle. After reflection, the light is focused at the first focal point of the reflector bowl. The light emitted by the laser-driven gas discharge lamp is collected by the reflector bowl, reflected by the dichroic mirror, and then focused at the second focal point of the reflector bowl.

[0004] In this optical path, the position and angular relationship of each optical element significantly affects the accuracy of the optical path. In particular, the accurate alignment of the actual first focal point of the reflector bowl with the light-emitting center of the laser-driven gas discharge lamp, and the alignment of the optical path of the light emitted by the infrared laser with the first focal point, all require extremely precise adjustments. However, existing laser-driven gas discharge lamp optical systems suffer from difficulties in position adjustment and high-precision focusing and optical path calibration during assembly, directly affecting the final optical performance and output effect. Summary of the Invention

[0005] This application aims to provide a gas discharge lamp path adjustment device and method for quickly and efficiently aligning the optical path of a laser-driven gas discharge lamp, and to precisely adjust the installation position of the infrared laser and various optical components.

[0006] To achieve the above objectives, the technical solution of this application is as follows: A gas discharge lamp path adjustment device includes a charge-coupled image sensor, a point light source, and a beam splitter cube; The point light source and the charge-coupled image sensor are located in two perpendicular directions of the beam splitter cube. The optical axis of the light emitted by the point light source and the perpendicular line from the center of the target surface of the charge-coupled image sensor intersect the inclined surface of the beam splitter cube. The distance from the center of the target surface of the charge-coupled image sensor to the inclined surface of the beam splitter cube is equal to the distance from the light outlet of the point light source to the inclined surface of the beam splitter cube.

[0007] Optionally, the gas discharge lamp path adjustment device further includes: a light stopper; the light inlet of the light stopper is located on the light path of the light emitted by the point light source passing through the beam splitter cube.

[0008] Optionally, the point light source includes: an optical fiber head and a first laser, with the optical fiber head connected to the first laser.

[0009] Optionally, the optical fiber output port of the fiber optic connector has a built-in divergence angle.

[0010] A method for adjusting the lamp path of a gas discharge lamp, applied to the gas discharge lamp path adjusting device as described in any one of the above descriptions, comprising: The gas discharge lamp path adjustment device is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface of the charge-coupled image sensor faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface of the charge-coupled image sensor is located at the theoretical second focal point of the reflector. The first laser of the gas discharge lamp path adjustment device is turned on. The indicator light emitted by the first laser is reflected by the beam splitter cube and enters the lamp box optical system of the laser-driven gas discharge lamp. After reflection, it returns to the gas discharge lamp path adjustment device and illuminates the charge-coupled image sensor to form a light spot. Adjust the position of the reflector bowl in the xz plane until the spot size measured by the charge-coupled image sensor is minimized and symmetrically distributed. The first laser of the gas discharge lamp path adjustment device is turned off, and the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp is turned on. The indicator light emitted by the infrared laser is reflected and enters the gas discharge lamp path adjustment device to illuminate the charge-coupled image sensor and form a light spot. The position of the light spot on the charge-coupled image sensor is adjusted to be the same as the position of the light spot obtained after turning on the first laser, and the size of the light spot on the charge-coupled image sensor is minimized.

[0011] Optionally, adjusting the position of the light spot on the charge-coupled image sensor to be the same as the position of the light spot obtained after turning on the first laser includes: adjusting the position of the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp in the yz plane so that the position of the light spot on the charge-coupled image sensor is the same as the position of the light spot obtained after turning on the first laser.

[0012] Optionally, adjusting the position of the light spot on the charge-coupled image sensor to be the same as the position of the light spot obtained after turning on the first laser also includes: adjusting the position of the concave lens of the lamp box optical system of the laser-driven gas discharge lamp in the yz plane so that the position of the light spot on the charge-coupled image sensor is the same as the position of the light spot obtained after turning on the first laser.

[0013] Optionally, adjusting the spot size on the charge-coupled image sensor to a minimum includes: adjusting the position of the infrared laser of the lamp box optics system of the laser-driven gas discharge lamp along the x-axis direction to minimize the spot size on the charge-coupled image sensor.

[0014] Optionally, adjusting the spot size on the charge-coupled image sensor to the minimum also includes: adjusting the position of the concave lens of the lamp box optical system of the laser-driven gas discharge lamp along the x-axis direction to minimize the spot size on the charge-coupled image sensor.

[0015] Optionally, adjusting the spot size on the charge-coupled image sensor to the minimum also includes: adjusting the position of the reflector of the lamp box optical system of the laser-driven gas discharge lamp along the x-axis direction to minimize the spot size on the charge-coupled image sensor.

[0016] The gas discharge lamp optical path adjustment device and method proposed in this application can quickly and efficiently align the optical path, effectively meeting the high requirements of laser-driven gas discharge lamps for optical path accuracy. It is not only suitable for optical path setup during equipment assembly but also for subsequent debugging and maintenance, making it applicable to a wide range of scenarios and significantly improving the optical path adjustment efficiency and stability of laser-driven gas discharge lamps in application.

[0017] To make the above-mentioned features and advantages of the application more apparent and understandable, specific embodiments are provided below, and detailed descriptions are given in conjunction with the accompanying drawings. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a gas discharge lamp path adjustment device 1 proposed in this application.

[0019] Figure 2 This is a flowchart of the gas discharge lamp path adjustment method proposed in this application.

[0020] Figure 3 This is a schematic diagram of the optical path for the indicator light emitted by the first laser 122 to return to the gas discharge lamp path adjustment device 1.

[0021] Figure 4 Figure (a) is a schematic diagram showing the smallest and symmetrically distributed spot size formed by the indicator light emitted by the first laser 122 on the charge-coupled image sensor 11.

[0022] Figure 4Figure (b) is a schematic diagram of the indicator light emitted by the first laser 122 shifting up and down as the light spot formed by the charge-coupled image sensor 11 shifts.

[0023] Figure 4 Figure (c) is a schematic diagram of the indicator light emitted by the first laser 122 shifting left and right as the light spot formed by the charge-coupled image sensor 11 shifts.

[0024] Figure 5 This is a schematic diagram of the optical path for the indicator light emitted by the infrared laser 21 to enter the gas discharge lamp path adjustment device 1.

[0025] In the accompanying drawings, similar reference numerals refer to the same elements. Detailed Implementation

[0026] To make the objectives and technical solutions of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the described embodiments of this application without creative effort are within the scope of protection of this application.

[0027] In this application, for clarity, the following explanations are provided: To facilitate the description, a three-dimensional coordinate system is defined. When an observer is looking at the accompanying drawings, the xy-plane in the specification refers to the plane of the paper when the observer is looking at the drawings, and the z-axis in the specification is perpendicular to the paper and points outwards. The up-down and left-right directions in the specification correspond to the up-down and left-right directions when the observer is looking at the accompanying drawings, respectively. The above explanations are merely for the purpose of clearly describing this application and do not indicate or imply that the structures or components referred to must have a specific orientation or be constructed in a specific orientation; therefore, they should not be construed as limitations on this application.

[0028] In one embodiment of this application, please refer to Figure 1 ,like Figure 1 The diagram shown is a schematic representation of a gas discharge lamp path adjustment device 1 proposed in this application. The gas discharge lamp path adjustment device 1 proposed in this application includes: a charge-coupled image sensor (CCD) 11, a point light source 12, and a beam splitter cube 13.

[0029] Point light source 12 and charge-coupled image sensor 11 are located in two perpendicular directions of beam splitting cube 13. The optical axis of the light emitted by point light source 12 and the perpendicular line from the center of the target surface 111 of charge-coupled image sensor 11 intersect the inclined surface of beam splitting cube 13. The distance L1 from the center of the target surface 111 of charge-coupled image sensor 11 to the inclined surface of beam splitting cube is strictly equal to the distance L2 from the light outlet of point light source 12 to the inclined surface of beam splitting cube.

[0030] As an example, the gas discharge lamp path adjustment device 1 further includes: a light stopper 14; the light inlet of the light stopper 14 is located on the light path of the light emitted by the point light source 12 through the beam splitter cube 13.

[0031] As an example, the beam splitter 13 splits the light emitted by the point light source 12 into two parts to form transmitted light and reflected light. The intensity ratio of the transmitted light to the reflected light is 5:5, and neither the transmitted light nor the reflected light is polarization dependent.

[0032] Specifically, the light stopper 14 is used to collect transmitted light.

[0033] As an example, the point light source 12 includes: an optical fiber head 121 and a first laser 122, wherein the optical fiber head 121 is connected to the first laser 122.

[0034] As an example, the fiber optic output port of fiber optic connector 121 is a high-quality point light source, and the light output from the fiber optic output port of fiber optic connector 121 has a certain divergence angle.

[0035] As an example, the first laser 122 is a radiation indicator light source with a power of 1~5mW and a wavelength of 400~450nm. The optical system of the lamp box of the laser-driven gas discharge lamp has high reflectivity in this wavelength band.

[0036] As an example, the charge-coupled image sensor 11, point light source 12, beam splitter 13 and beam terminator 14 are fixed together by metal components to form a whole.

[0037] As an example, the gas discharge lamp path adjustment device 1 provided in this application is connected to the lamp box optical system of the laser-driven gas discharge lamp, and is used to assist in the precise adjustment of the installation position of each optical element of the lamp box optical system of the laser-driven gas discharge lamp.

[0038] Specifically, the gas discharge lamp path adjustment device 1 is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge-coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp. The second focal point of the reflector bowl of the lamp box optical system of the laser-driven gas discharge lamp is located at the center of the target surface of the charge-coupled image sensor.

[0039] In another embodiment of this application, a method for adjusting the optical path of a gas discharge lamp is also proposed, applied to the aforementioned gas discharge lamp optical path adjustment device, for adjusting the optical path of a laser-driven gas discharge lamp. Please refer to... Figure 2 , Figure 2 This is a flowchart of the gas discharge lamp path adjustment method proposed in this application. The gas discharge lamp path adjustment method includes steps S1 to S5.

[0040] Step S1: Install the gas discharge lamp path adjustment device 1 at the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface 111 of the charge-coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge-coupled image sensor 11 is located at the theoretical second focal point of the reflector.

[0041] Step S2: Turn on the first laser 122 of the gas discharge lamp path adjustment device 1. The indicator light emitted by the first laser 122 is reflected by the beam splitter 13 and enters the lamp box optical system of the laser-driven gas discharge lamp. After reflection, it returns to the gas discharge lamp path adjustment device 1 and illuminates the charge-coupled image sensor 11 to form a light spot.

[0042] Step S3: Adjust the position of the reflector bowl in the xz plane until the spot size measured by the charge-coupled image sensor 11 is minimized and symmetrically distributed.

[0043] Step S4: Turn off the first laser 122 of the gas discharge lamp path adjustment device 1, turn on the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp, and the indicator light emitted by the infrared laser enters the gas discharge lamp path adjustment device 1 after reflection and illuminates the charge-coupled image sensor 11 to form a light spot.

[0044] Step S5: Adjust the position of the light spot on the charge-coupled image sensor 11 to be the same as the position of the light spot obtained after turning on the first laser 122, and adjust the size of the light spot on the charge-coupled image sensor 11 to be the smallest.

[0045] The gas discharge lamp path adjustment device 1 proposed in this application can quickly and efficiently align the optical path, effectively meeting the high requirements of laser-driven gas discharge lamps for optical path accuracy. It is not only suitable for optical path setup during equipment assembly but also for subsequent debugging and maintenance, making it applicable to a wide range of scenarios and significantly improving the optical path adjustment efficiency and stability of laser-driven gas discharge lamps during application.

[0046] In step S1, please refer to Figure 2 In step S1, the gas discharge lamp path adjustment device 1 is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface 111 of the charge-coupled image sensor 11 faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface 111 of the charge-coupled image sensor 11 is located at the theoretical second focal point of the reflector.

[0047] Specifically, based on the working principle of the ellipsoidal reflector bowl: light emitted from any one focal point of the ellipsoid will inevitably focus on the other focal point of the ellipsoid after reflection by the inner surface of the ellipsoid. That is, knowing the position of one focal point allows us to obtain the position of the other focal point. In the optical system of the laser-driven gas discharge lamp, knowing the ellipsoidal structure of the ellipsoidal reflector bowl allows us to obtain the relative positions of the first and second focal points of the reflector bowl. Therefore, in this application, the target surface 111 of the charge-coupled image sensor 11 of the gas discharge lamp path adjustment device 1 is installed at the known position of the theoretical second focal point of the reflector bowl. By adjusting the position of the reflector bowl, the actual positions of the first and second focal points of the reflector bowl are aligned with the theoretical positions of the first and second focal points.

[0048] In step S2, please refer to Figure 2 In step S2, the first laser 122 of the gas discharge lamp path adjustment device 1 is turned on. The indicator light emitted by the first laser 122 is reflected by the beam splitter 13 and enters the lamp box optical system of the laser-driven gas discharge lamp. After reflection, it returns to the gas discharge lamp path adjustment device 1 and illuminates the charge-coupled image sensor 11 to form a light spot.

[0049] For example, please refer to Figure 3 , Figure 3 This is a schematic diagram of the optical path of the indicator light emitted by the first laser 122 returning to the lamp path adjustment device 1 of the gas discharge lamp. The indicator light emitted by the first laser 122 passes through the beam splitter 13, and part of it is reflected and enters the lamp box optical system 2 of the laser-driven gas discharge lamp, while the other part passes through the beam splitter 13 and enters the light terminator 14. The indicator light entering the lamp box optical system 2 of the laser-driven gas discharge lamp is reflected twice by the dichroic mirror 24 and the reflector bowl 25, and part of the indicator light returns to the lamp path adjustment device 1 of the gas discharge lamp to illuminate the charge-coupled image sensor 11 to form a light spot. At this time, an image of a light spot can be seen on the software of the charge-coupled image sensor 11.

[0050] In step S3, please refer to Figure 2 In step S3, the position of the reflector bowl 25 is adjusted in the xz plane until the spot size measured by the charge-coupled image sensor 11 is minimized and symmetrically distributed.

[0051] For example, please refer to Figure 4 , Figure 4 Figure (a) shows a schematic diagram of the smallest and symmetrically distributed spot size formed by the indicator light emitted by the first laser 122 on the charge-coupled image sensor 11. Figure 4 Figure (b) is a schematic diagram showing the vertical shift of the indicator light emitted by the first laser 122 as it moves along the light spot formed by the charge-coupled image sensor 11. Figure 4Figure (c) shows a schematic diagram of the indicator light emitted by the first laser 122 shifting left and right in the light spot formed by the charge-coupled image sensor 11. When the reflector bowl 25 deviates in the x-axis direction, the light spot measured by the charge-coupled image sensor 11 is as follows. Figure 4 As shown in Figure (b), the light spot is distributed in a ring shape and the center of the light spot shifts vertically; when the reflector bowl 25 deviates in the z-axis direction, the light spot measured by the charge-coupled image sensor 11 is as follows. Figure 4 As shown in Figure (c), the light spot is distributed in a ring shape and the center of the light spot shifts to the left and right.

[0052] Specifically, the offset direction of the halo generated by the light spot is consistent with the offset direction of the reflector bowl 25.

[0053] Specifically, when the spot size measured by the charge-coupled image sensor 11 is the smallest and symmetrically distributed, the second focal point of the reflector bowl 25 is located on the target surface 111 of the charge-coupled image sensor 11.

[0054] Specifically, the position of the reflector bowl 25 is adjusted by the indicator light emitted by the first laser 122 so that the actual second focal position of the reflector bowl 25 is aligned with the theoretical second focal position, and the actual first focal position of the reflector bowl 25 is aligned with the theoretical first focal position. Furthermore, the actual first focal position of the reflector bowl 25 coincides with the light-emitting center of the laser-driven gas discharge lamp.

[0055] In step S4, please refer to Figure 2 In step S4, the first laser 122 of the gas discharge lamp path adjustment device 1 is turned off, and the infrared laser 21 of the lamp box optical system 2 of the laser-driven gas discharge lamp is turned on. The indicator light emitted by the infrared laser 21 is reflected and enters the gas discharge lamp path adjustment device 1 to illuminate the charge-coupled image sensor 11 to form a light spot.

[0056] For example, please refer to Figure 5 , Figure 5 This is a schematic diagram of the optical path of the indicator light emitted by the infrared laser 21 entering the gas discharge lamp path adjustment device 1. After being diverged by the concave lens 22 and reflected by the reflector 23, the indicator light emitted by the infrared laser 21 passes through the dichroic mirror 24 and illuminates the ellipsoidal surface of the bottom reflector bowl 25 at a certain divergence angle. After being reflected again by the reflector bowl 25 and the dichroic mirror 24, it enters the gas discharge lamp path adjustment device 1 and illuminates the charge-coupled image sensor 11 to form a light spot. At this time, an image of a light spot can be seen on the software of the charge-coupled image sensor 11.

[0057] In step S5, please refer to Figure 2In step S5, the position of the light spot on the charge-coupled image sensor 11 is adjusted to be the same as the position of the light spot obtained after turning on the first laser 122, and the size of the light spot on the charge-coupled image sensor 11 is adjusted to be the smallest.

[0058] Specifically, after adjusting the position of the reflector bowl 25, only the optical position of the focal point is aligned. The optical path of the light emitted by the infrared laser 21 may not match the focusing optical path of the first focal point of the reflector bowl 25. It is also necessary to ensure that the optical path of the light emitted by the infrared laser 21 can be accurately focused on the first focal point of the reflector bowl 25. That is, the optical path of the light emitted by the infrared laser 21 is verified by the indicator light emitted by the infrared laser 21 to be equivalent to the reverse incident path from the first focal point. If it is equivalent, according to the working principle of the ellipsoidal reflector bowl, the indicator light emitted by the infrared laser 21 is reflected by the reflector bowl 25 and first focused on the first focal point, and then propagated along the optical path pointing to the second focal point and focused on the second focal point of the reflector bowl 25.

[0059] As an example, adjusting the position of the light spot on the charge-coupled image sensor 11 to be the same as the position of the light spot obtained after turning on the first laser 122 includes: adjusting the position of the infrared laser 21 in the yz plane so that the position of the light spot on the charge-coupled image sensor 11 is the same as the position of the light spot obtained after turning on the first laser 122.

[0060] As an example, adjusting the position of the light spot on the charge-coupled image sensor 11 to be the same as the position of the light spot obtained after turning on the first laser 122 also includes: adjusting the position of the concave lens 22 in the yz plane so that the position of the light spot on the charge-coupled image sensor 11 is the same as the position of the light spot obtained after turning on the first laser 122.

[0061] As an example, minimizing the spot size on the charge-coupled image sensor 11 includes adjusting the position of the infrared laser 21 along the x-axis to minimize the spot size on the charge-coupled image sensor 11.

[0062] As an example, adjusting the spot size on the charge-coupled image sensor 11 to the minimum also includes: adjusting the position of the concave lens 22 along the x-axis to minimize the spot size on the charge-coupled image sensor 11.

[0063] As an example, adjusting the spot size on the charge-coupled image sensor 11 to the minimum also includes: adjusting the position of the reflector 23 along the x-axis to minimize the spot size on the charge-coupled image sensor 11.

[0064] Specifically, when the position of the light spot obtained by the indicator light emitted by the infrared laser 21 is the same as the position obtained after the first laser 122 is turned on and the light spot size on the charge-coupled image sensor 11 is the smallest, the second focus of the reflector bowl 25 obtained by the indicator light emitted by the infrared laser 21 is located on the target surface 111 of the charge-coupled image sensor 11, and is the same as the position of the second focus of the reflector bowl 25 obtained after the first laser 122 is turned on. The optical path of the light emitted by the infrared laser 21 is matched with the focusing optical path of the first focus of the reflector bowl 25, thus completing the alignment of the optical path of the laser-driven gas discharge lamp.

[0065] The gas discharge lamp optical path adjustment device and method proposed in this application can quickly and efficiently align the optical path, effectively meeting the high requirements of laser-driven gas discharge lamps for optical path accuracy. It is not only suitable for optical path setup during equipment assembly but also for subsequent debugging and maintenance, making it applicable to a wide range of scenarios and significantly improving the optical path adjustment efficiency and stability of laser-driven gas discharge lamps in application.

[0066] Although this application has been disclosed above with reference to embodiments, it is not intended to limit this application. Anyone skilled in the art may make some modifications and refinements without departing from the spirit and scope of this application. Therefore, the scope of protection of this application shall be determined by the appended claims.

Claims

1. A method for adjusting the lamp path of a gas discharge lamp, characterized in that, A gas discharge lamp optical path adjustment device is used to adjust the optical path of the lamp box optical system of the laser-driven gas discharge lamp; The optical system of the light box includes an infrared laser, a concave lens, a reflector, a dichroic mirror, and a reflector bowl; The gas discharge lamp path adjustment device includes a charge-coupled image sensor, a point light source, and a beam splitter cube. The point light source includes an optical fiber head and a first laser, and the optical fiber head is connected to the first laser. The point light source and the charge-coupled image sensor are located in two perpendicular directions of the beam splitter cube. The optical axis of the light emitted by the point light source and the perpendicular line from the center of the target surface of the charge-coupled image sensor intersect the inclined surface of the beam splitter cube. The distance from the center of the target surface of the charge-coupled image sensor to the inclined surface of the beam splitter cube is equal to the distance from the light outlet of the point light source to the inclined surface of the beam splitter cube. The gas discharge lamp path adjustment device is installed at the light outlet of the lamp box of the laser-driven gas discharge lamp, so that the target surface of the charge-coupled image sensor faces the light path of the light outlet of the lamp box of the laser-driven gas discharge lamp, and the target surface of the charge-coupled image sensor is located at the theoretical second focal point of the reflector. The first laser of the gas discharge lamp path adjustment device is turned on. The indicator light emitted by the first laser is reflected by the beam splitter cube and enters the lamp box optical system of the laser-driven gas discharge lamp. After reflection, it returns to the gas discharge lamp path adjustment device and illuminates the charge-coupled image sensor to form a light spot. Adjust the position of the reflector bowl in the xz plane until the spot size measured by the charge-coupled image sensor is minimized and symmetrically distributed. The first laser of the gas discharge lamp path adjustment device is turned off, and the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp is turned on. The indicator light emitted by the infrared laser is reflected and enters the gas discharge lamp path adjustment device to illuminate the charge-coupled image sensor and form a light spot. The position of the light spot on the charge-coupled image sensor is adjusted to be the same as the position of the light spot obtained after turning on the first laser, and the size of the light spot on the charge-coupled image sensor is minimized.

2. The method for adjusting the lamp path of a gas discharge lamp as described in claim 1, characterized in that, The gas discharge lamp path adjustment device also includes: a light stopper; the light inlet of the light stopper is located on the light path of the light emitted by the point light source through the beam splitter cube.

3. The method for adjusting the lamp path of a gas discharge lamp as described in claim 1, characterized in that, The light output from the fiber optic connector has a built-in divergence angle.

4. The method for adjusting the lamp path of a gas discharge lamp as described in claim 1, characterized in that, Adjusting the position of the light spot on the charge-coupled image sensor to be the same as the position of the light spot obtained after turning on the first laser includes: adjusting the position of the infrared laser of the lamp box optical system of the laser-driven gas discharge lamp in the yz plane so that the position of the light spot on the charge-coupled image sensor is the same as the position of the light spot obtained after turning on the first laser.

5. The method for adjusting the lamp path of gas discharge lamp as described in claim 1, characterized in that, Adjusting the position of the light spot on the charge-coupled image sensor to be the same as the position of the light spot obtained after turning on the first laser also includes: adjusting the position of the concave lens of the lamp box optical system of the laser-driven gas discharge lamp in the yz plane so that the position of the light spot on the charge-coupled image sensor is the same as the position of the light spot obtained after turning on the first laser.

6. The method for adjusting the lamp path of gas discharge lamp as described in claim 1, characterized in that, To minimize the spot size on the charge-coupled image sensor, the position of the infrared laser in the lamp box optics of the laser-driven gas discharge lamp is adjusted along the x-axis to minimize the spot size on the charge-coupled image sensor.

7. The method for adjusting the lamp path of a gas discharge lamp as described in claim 1, characterized in that, Minimizing the spot size on the charge-coupled image sensor also includes adjusting the position of the concave lens of the lamp box optical system of the laser-driven gas discharge lamp along the x-axis to minimize the spot size on the charge-coupled image sensor.

8. The method for adjusting the lamp path of a gas discharge lamp as described in claim 1, characterized in that, Minimizing the spot size on the charge-coupled image sensor also includes adjusting the position of the reflector of the lamp box optical system of the laser-driven gas discharge lamp along the x-axis to minimize the spot size on the charge-coupled image sensor.

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