Air uniformization filtering device and semiconductor coating and developing equipment

Abstract

The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering device and semiconductor gluing developing equipment, it is related to semiconductor manufacturing technical field.The application provides a kind of wind filtering

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a uniform air filtration device and a semiconductor coating and developing equipment. Background Technology

[0002] In the semiconductor manufacturing field, the process stability of the photoresist coating and developing unit is highly dependent on the consistency of the ambient airflow. It is usually equipped with a wind box and filter at the top to continuously provide downward laminar airflow, so as to quickly remove solvent volatiles, maintain positive pressure in the cavity, and ensure uniform photoresist film thickness.

[0003] Existing coating and developing equipment generally adopts a separate assembly structure for the air box and filter screen. It is installed by a pressure plate, which presses the sealing strip to achieve four-sided fixation and end face sealing. Because there is a sealing strip on the contact surface between the filter screen and the air box, the sealing strip needs a large clamping force to ensure the compression and seal. However, in reality, the sealing strip often leaks from the air box due to insufficient compression, which further reduces the product yield. Summary of the Invention

[0004] The technical problem to be solved by this application is to provide a uniform air filtration device and a semiconductor coating and developing equipment that can prevent leakage of the air box due to insufficient compression of the sealing strip.

[0005] The technical solution adopted by this application to solve the above-mentioned technical problems is as follows: This application provides a uniform airflow filtration device for installation on a coating and developing unit, comprising: an air box with an air inlet on one side, the bottom surface of the air box being an air outlet panel with multiple air outlet holes; a support frame including a connecting part, a support part, and a windbreak part, the support part being fitted to the inner wall of the air box via the connecting part, the support part extending horizontally from the inner wall of the air box into the air box for supporting other components, the windbreak part being located at the end of the support part facing the air inlet and extending towards the bottom surface of the air box to the air outlet panel; and a particle filter element including a frame and a filter screen connected within the frame, the frame being connected to the side of the support part facing the air outlet panel by sealant.

[0006] Optionally, a baffle is provided at one end of the support portion away from the inner wall of the air box, and the baffle protrudes toward the air outlet panel.

[0007] Optionally, the uniform air filtration device further includes an air inlet guide, located at the air inlet and connected to the wind baffle and the side wall of the air box. The air inlet guide has an air guide opening, and an air guide plate is provided at one end of the air guide opening near the air outlet panel. The air guide plate extends obliquely toward the end of the wind baffle away from the air outlet panel.

[0008] Optionally, the periphery of the air vent is provided with a receiving groove that is recessed into the air box, and the receiving groove is used to inject sealant to connect external instruments.

[0009] Optionally, the air distribution filter device further includes an air distribution plate, which is installed at an angle inside the air box. One end of the air distribution plate is connected to the end of the support near the air inlet, and the other end of the air distribution plate is connected to the top inner wall of the air box. The air distribution plate is provided with a plurality of air distribution through holes.

[0010] Optionally, the air distribution plate and the top inner wall of the air box are inclined at an angle of 3°–15°.

[0011] Optionally, the spacing between adjacent air-uniforming holes is 2 mm or more, and the distribution density of the air-uniforming holes increases from the end closest to the air inlet to the end furthest from the air inlet.

[0012] Optionally, the diameter of the air distribution hole is 1mm-5mm.

[0013] Optionally, the uniform air filtration device further includes a uniform air distribution element, which is located between the support portion and the particle filter element, and covers the frame and the filter screen.

[0014] This application also provides a semiconductor coating and developing apparatus, including at least one uniform air filtration device as described above.

[0015] This application provides a uniform air filtration device and a semiconductor coating and developing equipment. By setting a support member on the inner side wall of the air box and connecting the particle filter to the support member with sealant to seal the edge of the particle filter and the side wall of the air box, leakage between the edge of the particle filter and the side wall of the air box is prevented, thereby further improving the product yield. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the uniform air filtration device of this application; Figure 2 This is an exploded view of the structure of the uniform air filtration device of this application; Figure 3 This is a schematic diagram showing the fit between the air box and the support frame in this application; Figure 4 This is a schematic diagram of the support frame of this application; Figure 5 This is a schematic diagram of the structure of the particulate filter element of this application; Figure 6 This is a structural schematic diagram of the air inlet guide component of this application.

[0018] Icons: 100-Easy air filter device; 10-Air box; 11-Air inlet; 12-Air outlet panel; 13-Air outlet hole; 14-Easy air plate; 15-Easy air passage; 20-Support frame; 21-Connecting part; 22-Supporting part; 23-Wind baffle; 30-Particle filter element; 31-Frame; 32-Filter screen; 33-Easy air element; 40-Air inlet guide element; 41-Air guide port; 42-Air guide plate; 43-Containing slot.

[0019] The realization of the purpose, functional features and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0021] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of this invention are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0022] In this application, unless otherwise expressly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0023] Furthermore, if the embodiments of this application involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed in this application.

[0024] Existing coating and developing equipment generally adopts a separate assembly structure for the air box and filter screen, installed via a pressure plate that presses a sealing strip to achieve four-sided fixation and end-face sealing. Because the filter screen and air box contact surfaces have a sealing strip, a large clamping force is required to ensure compression and a seal. However, in practice, insufficient compression of the sealing strip often leads to air box leakage, further reducing the product yield. To address the above problems, the embodiments of this application refer to... Figures 1 to 6 The following technical solutions are provided to overcome the above problems.

[0025] Please refer to Figures 1 to 6 This application provides an air distribution and filtration device 100 for installation on a coating and developing unit, comprising: an air box 10 with an air inlet 11 on one side, the bottom surface of the air box 10 being an air outlet panel 12 with multiple air outlet holes 13; a support frame 20 including a connecting part 21, a support part 22, and a windbreak part 23, the support part 22 being attached to the inner wall of the air box 10 via the connecting part 21, the support part 22 extending horizontally from the inner wall of the air box 10 into the air box 10 for supporting other components, the windbreak part 23 being located at the end of the support part 22 facing the air inlet 11 and extending towards the bottom surface of the air box 10 to the air outlet panel 12; and a particle filter 30 including a frame 31 and a filter screen 32 connected within the frame 31, the frame 31 being connected to the side of the support part 22 facing the air outlet panel 12 by sealant.

[0026] Specifically, the uniform air filtration device 100 is installed on top of the coating and developing unit. One side of the air box 10 has an air inlet 11, and the bottom surface directly serves as the air outlet panel 12, covered with air outlet holes 13. The support frame 20 is tightly attached to the inner wall of the air box 10 via the connecting part 21. The horizontally extending support part 22 becomes a bearing platform. The wind baffle 23 folds downwards from the front end of the support part 22 to the air outlet panel 12, blocking the lower part of the air inlet 11 and preventing the incoming airflow from directly impacting the frame 31 of the particle filter element 30. The frame 31 of the particle filter element 30 is glued to the bottom of the support part 22 with sealant. The filter screen 32 faces the air outlet holes 13. The sealant simultaneously fixes, seals, and dampens vibrations, eliminating the need for traditional pressure plates and sealing strips, and completely eliminating leakage channels caused by insufficient clamping force.

[0027] Understandably, the airflow enters from the air inlet 11 and is partially intercepted by the wind baffle 23, so that the incoming airflow diffuses towards the top of the air box 10, first passes through the particle filter 30 fixed by the sealant to complete the clean filtration, and finally is sent out vertically downward through the air outlet 13 in a uniform laminar flow.

[0028] It should be noted that the windbreak 23 prevents airflow from leaking from the side of the particulate filter 30. The soft layer of sealant forms a continuous elastic sealing surface between the frame 31 and the support frame 20, which can absorb the micro-displacement caused by thermal expansion and contraction and equipment vibration, and maintain zero leakage. The filter screen 32 is located above the air outlet panel 12, forming a two-stage flow equalization of surface resistance and pore resistance, so that the air outlet side obtains spatially consistent laminar flow. At the same time, the adhesive bonding avoids the problem of local stress concentration and uneven compression of the sealing strip caused by rigid compression. Furthermore, the support 22 and the frame 31 occupy a small air outlet area, which further increases the air outlet surface.

[0029] In this embodiment, the air box 10 is preferably formed by bending and welding aluminum plate, with an air inlet 11 on one side wall and an air outlet panel 12 on the bottom plate, on which several air outlet holes 13 are distributed. The support frame 20 is preferably made of aluminum plate by cutting and bending, including a connecting part 21, a supporting part 22 and a windproof part 23: the connecting part 21 fits against the inner side wall of the air box 10, the supporting part 22 extends horizontally inward, and the windproof part 23 is bent downward from the front end of the supporting part 22 to the air outlet panel 12. The filter screen 32 is preferably a U17 grade PTFE membrane (polytetrafluoroethylene membrane), and the frame 31 can be made of aluminum profile or sheet metal. In this embodiment, the frame 31 is preferably made of aluminum sheet metal to reduce the width of the frame 31 and reduce the area occupied by the frame 31 in the air outlet. The frame 31 is fixed to the bottom of the supporting part 22 with sealant. Airflow enters through air inlet 11, passes through U17 grade filter 32 to remove particulate pollutants, and then clean air flows out downward through bottom plate air outlet 13, forming a clean laminar flow.

[0030] This application provides a uniform air filtration device 100. By providing a support member on the inner side wall of the air box 10 and connecting the particle filter element 30 to the support member with sealant to seal the edge of the particle filter element 30 with the side wall of the air box 10, leakage between the edge of the particle filter element 30 and the side wall of the air box 10 is prevented, thereby further improving the product yield.

[0031] In one embodiment, a baffle (not shown in the figure) is provided at one end of the support 22 away from the inner wall of the air box 10, and the baffle protrudes toward the air outlet panel 12.

[0032] Specifically, the support part 22 extends horizontally inward, and its end is folded out into a baffle that protrudes towards the air outlet panel 12. The baffle is perpendicular to the support part 22. The frame 31 of the particulate filter element 30 is located below the support part 22. The surface of the frame 31 is attached to the baffle. The top surface of the frame 31 is coated with sealant between the bottom surface of the frame 31 and the bottom surface of the support part 22. A groove is formed between the frame 31, the baffle and the support part 22. The sealant is contained in the groove and the frame 31 is glued to the support part 22.

[0033] Understandably, during the application of the sealant, the sealant is continuously applied to the top surface of the frame 31 or the lower surface of the support 22. The frame 31 is pushed towards the support 22, and the sealant is squeezed to fill the cavity. After curing, it forms a full-circumference seal.

[0034] It should be noted that the groove provides a storage space for the amount of adhesive, so that the sealant can be spread evenly after being pressed, avoiding insufficient adhesive; the inner wall of the baffle forms a lateral constraint on the adhesive, and after curing, the adhesive layer is simultaneously bonded to the baffle, the support 22, and the frame 31, improving the bonding reliability and extending the sealing life.

[0035] In one embodiment, please refer to Figure 1 , Figure 2 and Figure 6 The uniform air filtration device 100 also includes an air inlet guide 40, located at the air inlet 11 and connected to the wind baffle 23 and the side wall of the air box 10. The air inlet guide 40 is provided with an air guide port 41. An air guide plate 42 is provided at one end of the air guide port 41 near the air outlet panel 12. The air guide plate 42 extends obliquely toward the end of the wind baffle 23 away from the air outlet panel 12.

[0036] Specifically, the air inlet guide 40 is installed at the air inlet 11 on one side of the air box 10, and its edge is connected to both the wind baffle 23 and the side wall of the air box 10 to form a closed air inlet ring. An air guide 41 is opened in the center of the guide, and the internal surface of the air guide 41 is a smooth expansion channel, which can transition the incoming airflow from a cross section with a low aspect ratio to a slender cross section with a high aspect ratio. A guide plate 42 extends from the lower edge of the air guide 41 near the air outlet panel 12. The guide plate 42 is inclined upward towards the upper end of the wind baffle 23, so that the incoming airflow is guided to the top of the air box 10, preventing the airflow from directly impacting the wind baffle 23.

[0037] Understandably, the airflow first passes through the smooth expansion section inside the guide to complete the cross-sectional shape transformation, and then diffuses and descends along the top wall along the air guide plate 42; there is no sudden contraction or expansion on the inner wall throughout the process, and the airflow will not directly impact the windbreak part 23, but only uses the top space to complete deceleration and pressure equalization.

[0038] It should be noted that the expansion channel of the air guide 41 gradually transitions the inlet cross section to a slender slit cross section. The gradual expansion of the area reduces the dynamic pressure and increases the static pressure. The inner wall of the air box 10 maintains the stability of the boundary layer and avoids separation vortices. This enables air to enter from the outside with a low aspect ratio and exit from the inside of the air box 10 with a high aspect ratio, without any additional wind resistance conversion. Subsequently, the airflow diffuses freely at the top and sinks evenly through the particulate filter 30, ensuring laminar flow quality.

[0039] In one embodiment, the periphery of the air vent 41 is provided with a receiving groove 43 that is recessed into the air box 10, and the receiving groove 43 is used to inject sealant to connect external instruments.

[0040] Specifically, the outer periphery of the air guide 41 is recessed inward to form an open receiving groove 43. The groove is located inside the air box 10, with its opening facing outward and coaxial with the air inlet 11. This recessed receiving groove 43 is used to fill semi-solidified sealant. After the interface end face of the external instrument is inserted, it can form a sealing interface with the wall of the receiving groove 43 and the sealant, without the need for additional pressure plates or threaded locking.

[0041] Before assembly, semiconductor-grade semi-solid sealant is poured into the tank. The sealant is jelly-like and retains its shape without collapsing due to its viscosity, allowing it to remain stably without flowing. Then, the end face of the external air duct or transition flange, or the connection end of the adhesive coating and developing unit, is pushed in axially along the air guide 41. The end face compresses the sealant and makes it rise evenly, filling the microscopic gaps between the end face and the tank wall. After the sealant cures, it forms an elastic bond with the metal surface, completing the vacuum-level seal.

[0042] It should be noted that the receiving groove 43 acts as a glue quantity limiter to prevent glue from overflowing and contaminating the inner wall of the air box 10; the recessed structure of the receiving groove 43 allows the glue layer to withstand shear and compression simultaneously, which can absorb vibration and thermal expansion and contraction displacement during equipment operation, maintain zero leakage for a long time, and allow repeated insertion and removal to meet the high-frequency maintenance needs of the production line.

[0043] In one embodiment, the air distribution filter device 100 further includes an air distribution plate 14, which is installed obliquely inside the air box 10. One end of the air distribution plate 14 is connected to the end of the support 22 near the air inlet 11, and the other end of the air distribution plate 14 is connected to the top inner wall of the air box 10. The air distribution plate 14 is provided with a plurality of air distribution through holes 15.

[0044] Specifically, the air distribution plate 14 is placed at an angle inside the air box 10, with its front end overlapping the edge of the support part 22 near the air inlet 11, and its rear end obliquely upward connected to the inner side of the top wall. The surface of the air distribution plate 14 is covered with air distribution holes 15, so that the airflow must pass through the air distribution plate 14 before passing through the filter element, so as to distribute and rectify the airflow.

[0045] After entering through the air inlet 11, the airflow is guided to the top space by the air guide plate 42, and then turns back downwards along the top wall, facing the inclined air distribution plate 14. The high-speed airflow is obstructed in front of the plate and forced to pass through the through holes, where local dynamic pressure is converted into static pressure; the low-speed airflow is drawn in by the holes and exchanges momentum with the high-speed airflow within the holes. The array of through holes breaks the concentrated large vortex into uniform small vortices, forming a laminar flow with a uniform velocity on the outlet side, reducing the local impact on the particle filter element 30.

[0046] The inclined air distribution plate extends the airflow path on 14 sides, increasing mixing time; the resistance of the pore area is adjustable, and different air volumes can be adapted by changing the pore size and density, without the need for additional components. After rectification, the airflow sinks evenly, the filter element has a consistent load across its entire surface, and the pressure drop distribution is flat, which not only extends the filter life but also ensures the uniformity of the air velocity at the outlet surface, meeting the stringent requirements of the coating and developing process for clean laminar flow.

[0047] In one embodiment, the air distribution plate 14 and the top inner wall of the air box 10 are inclined at an angle of 3°–15°.

[0048] Specifically, one end of the air distribution plate 14 is fixed to the front edge of the support part 22, and the other end is diagonally attached to the top wall of the air box 10. The angle between the air distribution plate 14 and the inner side of the top wall can be fixed between three and fifteen degrees according to actual needs.

[0049] Understandably, the air distribution plate 14 is inclined inside the air box. Its function is to increase the resistance at the air inlet 11 of the air box 10, preventing the airflow from passing directly through the front half of the air box 10 due to insufficient resistance at the air inlet 11 and accumulating at the end of the air box 11, causing excessive internal pressure at the end of the air box 11 and resulting in excessive air velocity at the outlet. While increasing resistance, it also plays a rectifying role, making the originally turbulent or uneven airflow stable and uniform. The air distribution holes 15 distributed on the air distribution plate 14 will divide the concentrated large airflow into countless small airflow bundles. Each air distribution hole 15 corresponds to an independent airflow, avoiding local airflow that is too strong or too weak. The angle of the air distribution plate 14 also forces the airflow in the air box 10 perpendicular to the air inlet 11 to turn, changing the direction of the airflow from the air inlet 11 so that the airflow passes through the lower filter screen 32 below the air distribution plate 14, increasing the air velocity on the air outlet side of the air box 10 near the air inlet 11, improving uniformity. At the same time, the turning will consume some kinetic energy, weaken the impact force of the high-speed airflow, and reduce the velocity difference between different areas.

[0050] It should be noted that the angle of the air distribution plate 14 is usually 3°-15°. The angle is related to the length of the air box 10 parallel to the airflow direction and the uniformity of the airflow velocity of the air outlet panel 12. When the length of the air box 10 is longer, the pressure difference between the front and the end of the interior is required to be higher. The internal pressure needs to be more uniform and stable to maintain balance. Therefore, the angle of the air distribution plate 14 should be smaller to ensure that the air distribution plate can cover a longer air outlet surface and improve the uniformity of the air outlet surface.

[0051] In one embodiment, the spacing between adjacent air-uniforming holes 15 is more than 2 mm, and the distribution density of the air-uniforming holes 15 increases from the end closest to the air inlet 11 to the end furthest from the air inlet 11.

[0052] Specifically, the air distribution holes 15 on the air distribution plate 14 are arranged with varying density: the center distance between adjacent air distribution holes 15 is more than 2mm, and the hole size gradually decreases from the air inlet 11 end to the far end, with the number of holes increasing and the density increasing, forming a gradient array with sparser holes in the front and denser holes in the back, in order to obtain uniform outflow over the entire length of the plate.

[0053] After the airflow enters through the air inlet 11, it first encounters the sparsely perforated area at the front end. The number of perforations per unit area is small, the flow area is small, the local resistance is large, and the flow rate is suppressed. As it continues to flow to the far end, the perforation spacing decreases and the density increases, the total flow area increases, the resistance decreases, and the airflow preferentially passes through the dense area. The flow is restricted at the front end and released at the rear end, realizing the redistribution of the flow rate across the entire plate surface. This makes the air velocity received by the downstream filter components tend to be consistent, and finally forms a spatially uniform laminar flow, which meets the strict requirements of consistent air velocity for coating and developing.

[0054] It should be noted that, in the embodiments of this application, the air distribution holes 15 on the air distribution plate 14 can also be evenly distributed on the air distribution plate 14. Here, there is no specific limitation on the distribution density of the air distribution holes 15, as long as the air distribution effect is satisfied.

[0055] In one embodiment, the diameter of the air distribution hole 15 is 1mm-5mm.

[0056] Specifically, the diameter of the air distribution holes 15 on the air distribution plate 14 can be selected between 1 mm and 5 mm.

[0057] Understandably, while increasing the resistance at the air inlet 11 and changing the airflow direction, the air distribution plate 14 also needs to adjust the air velocity at the outlet surface of the filter screen 32 below it through the air distribution holes 15 distributed on it. The size of the air distribution holes 15 on the air distribution plate 14 and the opening ratio on the air distribution plate 14 will affect the air velocity at the outlet surface of the filter screen below the air distribution plate 14. When the small hole diameter is combined with the high opening ratio, the airflow will form a high-speed jet after passing through the air distribution holes 15. When the low opening ratio is combined with the large hole diameter air distribution holes 15, the air velocity after passing through the air distribution holes 15 is relatively low. When it is necessary to increase the air velocity below the air distribution plate 14, a small hole diameter combined with a high opening ratio is used, and vice versa.

[0058] In one embodiment, the air-uniform filtration device 100 further includes an air-uniform element 33, which is located between the support portion 22 and the particle filter element 30, and covers the frame 31 and the filter screen 32.

[0059] Specifically, in this embodiment, the air-regulating component 33 is preferably made of non-woven fabric. The air-regulating component 33 is sandwiched between the support part 22 and the particle filter 30, fully covering the frame 31 and the filter screen 32 on its inner side, forming a continuous breathable buffer layer, which uses its loose microporous structure to perform secondary airflow equalization.

[0060] After passing through the air distribution plate 14, the airflow first falls onto the upper surface of the air distribution component 33, where it is cut, dispersed, and recombined by numerous micropores, weakening the peak velocity. It then evenly passes through the nonwoven fabric into the filter screen, avoiding direct impact of localized high-speed jets on the filter fibers, achieving a graded treatment of first uniform velocity and then cleanliness. Understandably, the high porosity of the nonwoven fabric provides low-resistance channels, and its three-dimensional fiber network randomly refracts the airflow, macroscopically smoothing out velocity gradients and microscopically suppressing turbulent vortices, resulting in a more uniform airflow velocity distribution reaching the filter screen surface, extending the filter's lifespan and maintaining laminar flow quality.

[0061] This application also provides a semiconductor coating and developing apparatus, including at least one uniform air filtration device 100 as described above.

[0062] Specifically, the semiconductor coating and developing equipment has at least one set of the aforementioned uniform air filtration device 100 arranged on the top of the machine or above the process chamber. The air inlet 11 of the air box 10 is connected to the fresh air duct of the plant, and the air outlet panel 12 faces the wafer stage, forming a vertical laminar flow field from top to bottom. The equipment retains the original transfer, spin coating and developing modules, and only the air supply unit is replaced with the integrated structure of this application, without changing the cavity size.

[0063] After primary filtration, the fresh air from the factory is sent into the air box 10. Under the action of the air guide plate 42 and the air distribution plate 14, the cross-section is expanded and the velocity is homogenized. Then, through the optional non-woven fabric and U17 grade filter 32, it finally enters the cavity vertically downward at a uniform speed. The laminar flow quickly carries away the solvent volatiles and maintains a slight positive pressure to prevent the backflow of external particles. The wind speed distribution on the wafer surface is consistent, and the uniformity of the film thickness is improved accordingly.

[0064] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A uniform air filtration device, used for installation on a coating and developing unit, characterized in that, include: The air box has an air inlet on one side and an air outlet panel on the bottom, with multiple air outlet holes on the air outlet panel. The support frame includes a connecting part, a supporting part, and a windproof part. The supporting part is attached to the inner wall of the air box through the connecting part. The supporting part extends horizontally from the inner wall of the air box into the air box and is used to support other components. The windproof part is located at the end of the supporting part facing the air inlet and extends towards the bottom surface of the air box to the air outlet panel. A particulate filter element, the particulate filter element including a frame and a filter screen connected within the frame, the frame being connected to the side of the support facing the air outlet panel by a sealant; A baffle is provided at one end of the support part away from the inner wall of the air box, and the baffle protrudes towards the air outlet panel; the frame of the particulate filter element is located below the support part, the surface of the frame is attached to the baffle, and sealant is applied between the top surface of the frame and the lower surface of the support part. A groove is formed between the frame, the baffle and the support part, and the sealant is contained in the groove and glues the frame to the support part. It also includes an air inlet guide, located at the air inlet and connected to the wind baffle and the side wall of the air box to form a closed air inlet ring. The air inlet guide has an air guide opening with a smooth expansion channel inside, which can transition the incoming airflow from a cross-section with a low aspect ratio to a slender cross-section with a high aspect ratio. An air guide plate is provided at the end of the air guide opening near the air outlet panel, and the air guide plate extends obliquely toward the end of the wind baffle away from the air outlet panel. The periphery of the air duct is provided with a receiving groove that is recessed into the air box. The receiving groove is used to inject sealant to connect external instruments. It also includes an air distribution plate, which is installed at an angle inside the air box. One end of the air distribution plate is connected to the end of the support near the air inlet, and the other end of the air distribution plate is connected to the top inner wall of the air box. The air distribution plate has multiple air distribution through holes. It also includes an air distribution element, which is located between the support and the particle filter element, and covers the frame and the filter screen.

2. The uniform air filtration device according to claim 1, characterized in that, The air distribution plate and the top inner wall of the air box form an inclination angle of 3°–15°.

3. The uniform air filtration device according to claim 1, characterized in that, The spacing between adjacent air-uniforming holes is 2 mm or more, and the distribution density of the air-uniforming holes increases from the end closest to the air inlet to the end furthest from the air inlet.

4. The uniform air filtration device according to claim 1, characterized in that, The diameter of the air distribution hole is 1mm-5mm.

5. A semiconductor coating and developing equipment, characterized in that, It includes at least one air-conditioning filtration device as described in any one of claims 1-4.

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