A mounting structure of a vacuum probe station for CNC machining precision detection

Abstract

The present application belongs to the technical field of vacuum probe station, and discloses a mounting structure of a vacuum probe station for CNC machining precision detection, which comprises a detection platform, a three-coordinate gantry, a three-coordinate horizontal arm and a three-coordinate vertical arm, the bottom of the three-coordinate vertical arm is provided with an extension plate, the bottom of the extension plate is provided with a mounting seat, the inside of the mounting seat is provided with a docking assembly, a plurality of clamping devices are arranged in the inner wall of the mounting seat, the inside of the extension plate is provided with a feedback assembly, and the bottom of the mounting seat is provided with a probe station. The probe station can be firmly installed in the inside of the mounting seat with the assistance of the docking assembly and the clamping devices in the inside of the mounting seat, and when mechanical interference occurs in the subsequent probe detection process, the feedback assembly will be triggered to cut off the air circuit of the equipment, so that the equipment can be stopped in time to avoid causing excessive damage.

Description

Technical Field

[0001] This invention relates to the field of vacuum probe holder technology, and in particular to a mounting structure for a vacuum probe holder used for CNC machining accuracy testing. Background Technology

[0002] Probe mounts are mainly used in equipment for measuring the machining accuracy of PAD backplanes. In order to detect the surface accuracy of the machined PAD backplane, probes are mounted on probe mounts to detect the outer surface of the PAD backplane. In order to facilitate installation, existing probe mounts are usually mounted on a magnetic metal worktable by magnetic attraction.

[0003] While magnetic mounting of probe holders is convenient, during testing, mechanical interference occurs at the point where the probe contacts the PAD backplate. The mechanical components cannot immediately pause the device, which can lead to probe bending or even damage to the probe holder. Summary of the Invention

[0004] In order to solve the problems existing in the prior art, the present invention provides a mounting structure for a vacuum probe holder for CNC machining accuracy detection.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a mounting structure for a vacuum probe holder for CNC machining accuracy detection, comprising a detection platform, a three-coordinate gantry, a three-coordinate horizontal arm and a three-coordinate vertical arm, an extension plate being provided at the bottom of the three-coordinate vertical arm, a mounting base being installed at the bottom of the extension plate, a docking assembly being provided inside the mounting base, multiple clamping devices being provided in the inner wall of the mounting base, a feedback assembly being provided inside the extension plate, and a probe holder being provided at the bottom of the mounting base; The coordinate measuring machine (CMM) gantry is set on top of the inspection platform. The CMM horizontal arm is set on the top of the CMM gantry near the front edge. The CMM vertical arm is set on the front side of the CMM horizontal arm. The probe holder has a threaded sleeve inside, with the top and bottom of the threaded sleeve extending to the top and bottom of the probe holder respectively.

[0006] Preferably, the top of the detection platform is provided with a placement plate, the top of the placement plate is provided with a cylinder, the top of the cylinder is provided with a PAD backplate, the outer surface of the probe holder is provided with an anti-slip sleeve near the top edge, the inner wall of the threaded sleeve is provided with a damping sleeve near the bottom edge, the probe is provided inside the threaded sleeve, the outer surface of the probe is damped and fitted with the inner wall of the damping sleeve, and the top of the probe extends to the top of the threaded sleeve.

[0007] Preferably, the docking assembly includes an I-beam, and the top and bottom surfaces of the mounting base have recessed cavities. A hexagonal hole extending through to the upper and lower ends is provided in the middle of the interior of the mounting base. The I-beam is slidably connected between the inner walls of the hexagonal hole. The top of the I-beam slides to the upper interior of the mounting base, and the bottom of the I-beam slides to the lower interior of the mounting base.

[0008] Preferably, the inner wall of the I-beam is provided with multiple bent air passages at equal intervals along the circumferential direction. The bottom openings of the multiple bent air passages extend to the outer surface of the I-beam near the bottom edge, and the top openings of the multiple bent air passages extend to the outer surface of the I-beam near the top edge. The top openings of the multiple bent air passages are respectively fitted to the inner wall of the hexagonal hole. An adjusting spring is fixed to the top of the I-beam, and the bottom of the adjusting spring is fixed inside the mounting base.

[0009] Preferably, the inner bottom surface of the mounting base has two constraint grooves, and the bottom of the I-beam is fixed with two constraint plates that slide into the constraint grooves. A sealing ring is fixed on the outer surface of the I-beam near the bottom edge, and the outer surface of the sealing ring slides and seals against the inner wall of the mounting base. A first sealing gasket is fixed on the inner bottom surface of the mounting base near the outer edge, and a second sealing gasket is fixed on the bottom of the I-beam. The bottom of the first sealing gasket and the top of the second sealing gasket seal against each other.

[0010] Preferably, the clamping device includes multiple bending plates, and multiple adjusting slides are equidistantly provided inside the mounting base along the circumferential direction. The top of each adjusting slide extends through to the upper part of the mounting base, and the bottom of each adjusting slide extends through to the lower part of the mounting base. Wedge blocks are rotatably provided between the inner walls of the adjusting slides near the bottom edge.

[0011] Preferably, the bending plate is slidably connected between the inner walls of the adjusting slide, the bottom of the bending plate extends in an inclined shape to the lower side of one side of the wedge block, and the inclined surface of the bottom of the bending plate is in contact with the inclined slide of the wedge block, and the top of the bending plate extends to the top of the adjusting slide and is bent and fixed at the top edge of the I-beam.

[0012] Preferably, the feedback component includes a countersunk column, an extension plate with a reciprocating cavity inside, a cylindrical groove at the bottom of the reciprocating cavity, a countersunk column slide connecting the inner walls of the cylindrical groove, and the top of the countersunk column located at the bottom of the reciprocating cavity. A first pipe is fixed to one side of the extension plate, and a second pipe is fixed to the other side of the extension plate. One end of the first pipe and one end of the second pipe are opposite to each other and both penetrate into the interior of the cylindrical groove.

[0013] Preferably, a limit ring is fixed at the middle between the inner walls of the reciprocating cavity, a groove is provided on the top of the countersunk column, a circular plate is slidably arranged between the inner walls of the groove, a pressure spring is fixed on the top of the circular plate, and the top pipe of the pressure spring is on the inner top surface of the reciprocating cavity.

[0014] Preferably, a hollow guide rod is fixed to the bottom of the countersunk column. The bottom of the hollow guide rod slides through the inner wall of the I-beam and extends to the bottom of the I-beam. A push rod is slidably arranged between the inner walls of the hollow guide rod. The top of the push rod slides through the groove and is fixed to the bottom of the circular plate. A through hole is opened on one side of the countersunk column, and a bridging hole is opened on one side of the push rod, which is connected to the other side. A drainage air passage is opened on the bottom surface of the through hole near one edge. The bottom of the drainage air passage extends downward inside the side wall of the hollow guide rod and penetrates to the outer surface of the hollow guide rod.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. In this invention, during the detection process, the probe is installed inside the probe holder, and then the probe holder is installed inside the mounting base. During the installation process, with the assistance of the docking component and clamping device inside the mounting base, the probe holder can be firmly installed inside the mounting base. Furthermore, when mechanical interference occurs during subsequent probe detection, the feedback component will be triggered to cut off the air path of the equipment, so that the equipment can be stopped in time to avoid excessive damage. 2. When the docking assembly is working in this invention, when the probe seat is pushed upward into the mounting base, the top of the threaded sleeve contacts the bottom of the hollow guide rod, pushing the hollow guide rod upward. During the pushing process, the push rod is pushed upward synchronously until the top of the countersunk column is pushed to fit against the bottom of the limiting ring. At this time, the through hole slides to the position opposite to the first pipe and the second pipe, so that the first pipe and the second pipe are connected, and then negative pressure gas can be supplied to the coordinate measuring machine. At the same time, the negative pressure gas will also act on the bottom of the I-beam through the drainage channel to draw the I-beam upward. During the upward movement of the I-beam, the clamping device will be triggered to work. 3. When the clamping device in this invention is working, the bending plate will slide upward as the I-beam moves upward. When the bending plate slides upward, it will push the wedge block into the mounting base through the inclined surface at its bottom, so that it clamps with the anti-slip sleeve on the outer surface of the probe base, thereby clamping and fixing the probe base. 4. When the feedback component of this invention is working, when mechanical interference occurs during probe detection, the top of the probe slides upward and pushes the push rod upward. During the upward lifting process, the through hole and the bridging hole are misaligned and cut off the bridging hole. At this time, the first pipe and the second pipe are cut off, and the external negative pressure cannot be supplied to the equipment. At this time, the equipment can stop working immediately. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of one side of the mounting structure of a vacuum probe holder for CNC machining accuracy detection proposed in this invention. Figure 2This is a three-dimensional structural diagram of another side of the mounting structure of a vacuum probe holder for CNC machining accuracy detection proposed in this invention. Figure 3 This invention provides a cross-sectional perspective view of the bottom connection of the extension plate in the mounting structure of a vacuum probe holder for CNC machining accuracy testing. Figure 4 This invention provides a cross-sectional perspective view of the connection between the mounting base and the probe base in a mounting structure for CNC machining accuracy testing. Figure 5 This invention presents a cross-sectional three-dimensional structural diagram of the feedback component in the mounting structure of a vacuum probe holder for CNC machining accuracy detection. Figure 6 This invention provides a cross-sectional three-dimensional structural diagram of a vacuum probe holder for CNC machining accuracy testing. Figure 7 For the present invention Figure 3 A magnified view of a portion of point A in the middle; Figure 8 For the present invention Figure 4 A magnified view of a portion of point B in the middle.

[0017] In the diagram: 1. Detection platform; 2. Placement plate; 3. Cylinder; 4. PAD backplate; 5. Three-coordinate gantry; 6. Three-coordinate horizontal arm; 7. Three-coordinate vertical arm; 8. Extension plate; 9. Mounting base; 10. Probe holder; 11. First pipe; 12. Second pipe; 13. Reciprocating cavity; 14. Limiting ring; 15. Compression spring; 16. Cylindrical groove; 17. Countersunk column; 18. Groove; 19. Circular plate; 20. Hollow guide rod ; 21. Through hole; 22. Bridging hole; 23. Drainage air passage; 24. Push rod; 25. I-beam; 26. Adjusting slide; 27. Bending plate; 28. Wedge block; 29. ​​Adjusting spring; 30. Bending air passage; 31. Constraint groove; 32. Constraint plate; 33. First sealing gasket; 34. Sealing ring; 35. Second sealing gasket; 36. Threaded sleeve; 37. Damping sleeve; 38. Probe; 39. Anti-slip sleeve; 40. Hexagonal hole. Detailed Implementation

[0018] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] Please see Figure 1-8The present invention provides a technical solution: an installation structure for a vacuum probe holder for CNC machining accuracy detection, including a detection platform 1, a three-coordinate gantry 5, a three-coordinate horizontal arm 6 and a three-coordinate vertical arm 7, an extension plate 8 is provided at the bottom of the three-coordinate vertical arm 7, a mounting base 9 is installed at the bottom of the extension plate 8, a docking component is provided inside the mounting base 9, a plurality of clamping devices are provided in the inner wall of the mounting base 9, a feedback component is provided inside the extension plate 8, and a probe holder 10 is provided at the bottom of the mounting base 9; The coordinate measuring machine (CMM) gantry 5 is mounted on top of the inspection platform 1. The CMM horizontal arm 6 is mounted on the top of the CMM gantry 5 near the front edge. The CMM vertical arm 7 is mounted on the front side of the CMM horizontal arm 6. The probe holder 10 has a threaded sleeve 36 inside, with the top and bottom of the threaded sleeve 36 extending to the top and bottom of the probe holder 10 respectively. The top of the inspection platform 1 has a placement plate 2, the top of the placement plate 2 has a cylinder 3, and the top of the cylinder 3 has a PAD backplate 4. The outer surface of the probe holder 10 has an anti-slip sleeve 39 near the top edge. The inner wall of the threaded sleeve 36 has a damping sleeve 37 near the bottom edge. The threaded sleeve 36 has a probe 38 inside, with the outer surface of the probe 38 damped and fitted against the inner wall of the damping sleeve 37. The top of the probe 38 extends above the top of the threaded sleeve 36.

[0020] The effect achieved is as follows: the first pipe 11 is connected to the external negative pressure pipe, and the second pipe 12 is connected to the coordinate measuring machine (CMM) to provide pneumatic driving force for the CMM. The PAD backplate 4 is placed on the cylinder 3. The CMM gantry 5, the CMM horizontal arm 6, and the CMM vertical arm 7 can drive the extension plate 8 to achieve CMM displacement adjustment, so that it can drive the probe 38 to detect the PAD backplate 4. Before detection, the mounting base 9 needs to be installed below the extension plate 8. At this time, the bottom of the hollow guide rod 20 extends to the bottom of the I-beam 25. During the detection process, the probe 38 is installed inside the probe seat 10, and then the probe seat 10 is installed inside the mounting base 9. During the installation process, with the assistance of the docking component and clamping device inside the mounting base 9, the probe seat 10 can be firmly installed inside the mounting base 9. When mechanical interference occurs during the subsequent detection process of the probe 38, the feedback component will be triggered to cut off the air path of the equipment, so that the equipment stops in time and avoids excessive damage.

[0021] like Figure 3 , Figure 4 and Figure 7As shown, the docking assembly includes an I-beam 25. The top and bottom surfaces of the mounting base 9 both have recessed chambers. A hexagonal hole 40 extending through to both the upper and lower ends is formed in the center of the mounting base 9. The I-beam 25 is slidably connected between the inner walls of the hexagonal hole 40. The top of the I-beam 25 extends slidably to the upper interior of the mounting base 9, and the bottom of the I-beam 25 extends slidably to the lower interior of the mounting base 9. Multiple bent air passages 30 are equidistantly formed along the circumferential direction on the inner wall of the I-beam 25. The bottom openings of the multiple bent air passages 30 extend to the outer surface of the I-beam 25 near the bottom edge, and the top openings of the multiple bent air passages 30 extend to the outer surface of the I-beam 25 near the top edge. All openings correspond to and fit against the inner wall of the hexagonal hole 40. An adjusting spring 29 is fixed to the top of the I-beam 25, and the bottom of the adjusting spring 29 is fixed inside the mounting base 9. Two constraint grooves 31 are opened on the inner bottom surface of the mounting base 9. Two constraint plates 32 that slide and extend into the constraint grooves 31 are fixed to the bottom of the I-beam 25. A sealing ring 34 is fixed to the outer surface of the I-beam 25 near the bottom edge. The outer surface of the sealing ring 34 slides and seals against the inner wall of the mounting base 9. A first sealing gasket 33 is fixed to the inner bottom surface of the mounting base 9 near the outer edge. A second sealing gasket 35 is fixed to the bottom of the I-beam 25. The bottom of the first sealing gasket 33 and the top of the second sealing gasket 35 seal against each other.

[0022] The effect achieved is as follows: First, the probe 38 is inserted into the threaded sleeve 36 inside the probe holder 10, and the top of the probe 38 extends above the top of the threaded sleeve 36. When the probe holder 10 is not aligned with the mounting base 9, the I-beam 25 inside the mounting base 9 is pressed downwards under the elastic tension of the adjusting spring 29, causing the top bend of the bent plate 27 to align with the bottom of the top bend of the adjusting slide 26. At this time, the top opening of the bent air passage 30 is located inside the hexagonal hole 40, and is closed off by the inner wall of the hexagonal hole 40. Simultaneously, the through hole 21 on the countersunk column 17 is located below the first pipe 11 and the second pipe 12. At this time, the first pipe 11 and the second pipe 12 are not connected. When the probe holder 10 is inserted into the mounting base 9... The probe 38 needs to be inserted into the hollow guide rod 20 and made to fit against the bottom of the push rod 24. Then, when the probe seat 10 is pushed upward into the mounting base 9, the top of the threaded sleeve 36 contacts the bottom of the hollow guide rod 20, pushing the hollow guide rod 20 upward. During the pushing process, the push rod 24 is pushed upward in sync until the top of the countersunk column 17 is pushed to fit against the bottom of the limiting ring 14. At this time, the through hole 21 slides to the position opposite to the first pipe 11 and the second pipe 12, making the first pipe 11 and the second pipe 12 connected, so that negative pressure gas can be supplied to the coordinate measuring machine. At the same time, the negative pressure gas will also act on the bottom of the I-beam 25 through the drainage channel 23, sucking the I-beam 25 upward. During the upward process of the I-beam 25, the clamping device will be triggered to work.

[0023] like Figure 4 , Figure 6 and Figure 8 As shown, the clamping device includes multiple bending plates 27. Multiple adjusting slides 26 are equidistantly arranged in the circumferential direction inside the mounting base 9. The top of each adjusting slide 26 extends through to the upper part of the interior of the mounting base 9, and the bottom of each adjusting slide 26 extends through to the lower part of the interior of the mounting base 9. Wedge blocks 28 are rotatably arranged between the inner walls of the adjusting slides 26 near the bottom edge. The bending plates 27 are slidably connected between the inner walls of the adjusting slides 26. The bottom of the bending plates 27 extends in an inclined shape to the lower side of one side of the wedge block 28, and the inclined surface of the bottom of the bending plates 27 is in contact with the inclined slide of the wedge block 28. The top of the bending plates 27 extends to the top of the adjusting slides 26 and is bent and fixed at the top edge of the I-beam 25.

[0024] The effect is that as the I-beam 25 moves upward, it will cause the bending plate 27 to slide upward. When the bending plate 27 slides upward, it will push the wedge block 28 into the mounting base 9 through the inclined surface at its bottom, so that it clamps together with the anti-slip sleeve 39 on the outer surface of the probe base 10, thereby clamping and fixing the probe base 10.

[0025] like Figure 3 , Figure 4 , Figure 5 , Figure 7 and Figure 8As shown, the feedback assembly includes a countersunk column 17, a reciprocating cavity 13 inside the extension plate 8, a cylindrical groove 16 at the bottom of the reciprocating cavity 13, a slide of the countersunk column 17 connecting the inner walls of the cylindrical groove 16, and the top of the countersunk column 17 located at the bottom of the reciprocating cavity 13. A first pipe 11 is fixed to one side of the extension plate 8, and a second pipe 12 is fixed to the other side of the extension plate 8. One end of the first pipe 11 and one end of the second pipe 12 are opposite to each other and both penetrate into the interior of the cylindrical groove 16. A limit ring 14 is fixed at the middle between the inner walls of the reciprocating cavity 13. A groove 18 is formed at the top of the countersunk column 17, and a circular plate 19 is slidably arranged between the inner walls of the groove 18. A compression spring 15 is fixed to the top of the circular plate 19, and the top of the compression spring 15 is connected to the reciprocating... On the inner top surface of cavity 13, a hollow guide rod 20 is fixed to the bottom of countersunk column 17. The bottom of hollow guide rod 20 slides through the inner wall of I-beam 25 and extends below I-beam 25. A push rod 24 is slidably arranged between the inner walls of hollow guide rod 20. The top of push rod 24 slides through the inside of groove 18 and is fixed to the bottom of circular plate 19. A through hole 21 is opened on one side of countersunk column 17 and a bridging hole 22 is opened on one side of push rod 24 and extends through the other side. Through hole 21 and bridging hole 22 are interconnected. A drainage air passage 23 is opened on the inner bottom surface of through hole 21 near one edge. The bottom of drainage air passage 23 extends downward inside the side wall of hollow guide rod 20 and penetrates to the outer surface of hollow guide rod 20.

[0026] The effect achieved is that during normal detection, the damping force between the damping sleeve 37 and the outer surface of the probe 38 can constrain and fix the probe 38 to prevent it from sliding. However, this damping constraint force has a certain upper limit. When the probe 38 causes mechanical interference during detection, it cannot be mechanically constrained and fixed (for example, when the vertical arm 7 of the three-coordinate measuring machine travels too far downward, it will press the probe 38 upward). At this time, the top of the probe 38 slides upward and pushes the push rod 24 upward. During the upward lifting process, the through hole 21 and the bridging hole 22 are misaligned and cut off the bridging hole 22. At this time, the first pipe 11 and the second pipe 12 are cut off, and the external negative pressure cannot be supplied to the equipment. At this time, the equipment can stop working immediately to prevent the probe seat 10 from colliding with the workpiece below, and play a feedback protection role for the entire equipment.

[0027] Working principle: When using this device, the first pipe 11 is connected to the external negative pressure pipe, and the second pipe 12 is connected to the coordinate measuring machine (CMM) to provide pneumatic driving force. The PAD backplate 4 is placed on the cylinder 3. The CMM gantry 5, the horizontal arm 6, and the vertical arm 7 can drive the extension plate 8 to achieve CMM displacement adjustment, allowing the probe 38 to perform detection on the PAD backplate 4. Before detection, the mounting base 9 needs to be installed below the extension plate 8. At this time, the bottom of the hollow guide rod 20 extends to the bottom of the I-beam 25. During the detection process, the probe 38 is installed inside the probe holder 10, and then the probe holder 10 is installed inside the mounting base 9. During installation, the probe 38 is first inserted into the probe holder. Inside the threaded sleeve 36 of the probe seat 10, the top of the probe 38 extends above the top of the threaded sleeve 36. When the probe seat 10 is not connected to the mounting base 9, the I-beam 25 inside the mounting base 9 is pressed downwards by the elastic tension of the adjusting spring 29, so that the top bend of the bent plate 27 is in contact with the bottom of the top bend of the adjusting slide 26. At this time, the top opening of the bent air passage 30 is located inside the hexagonal hole 40 and is closed off by the inner wall of the hexagonal hole 40. Meanwhile, the through hole 21 on the countersunk column 17 is located below the first pipe 11 and the second pipe 12. At this time, the first pipe 11 and the second pipe 12 are not connected. When inserting the probe seat 10 into the mounting base 9, the top of the probe 38 needs to be inserted into the hollow guide rod 2. When the probe seat 10 is pushed upward into the mounting base 9, the top of the threaded sleeve 36 contacts the bottom of the hollow guide rod 20, pushing the hollow guide rod 20 upward. During this pushing process, the push rod 24 is pushed upward simultaneously until the top of the countersunk column 17 is pushed to be in contact with the bottom of the limiting ring 14. At this time, the through hole 21 slides to the position opposite to the first pipe 11 and the second pipe 12, making the first pipe 11 and the second pipe 12 connected, so that negative pressure gas can be supplied to the coordinate measuring machine. At the same time, the negative pressure gas will also act on the bottom of the I-beam 25 through the drainage channel 23, sucking the I-beam 25 upward. During the upward movement of the I-beam 25, the bending plate 27 will slide upward. The inclined surface at the bottom of the probe 38 pushes the wedge block 28 into the mounting base 9, clamping it against the anti-slip sleeve 39 on the outer surface of the probe base 10, thus clamping and fixing the probe base 10. During normal detection, the damping force between the damping sleeve 37 and the outer surface of the probe 38 can constrain and fix the probe 38, preventing it from sliding. However, this damping constraint force has a certain upper limit. When the probe 38 experiences mechanical interference during detection, it cannot be mechanically constrained and fixed (for example, when the downward stroke of the vertical arm 7 of the coordinate measuring machine is too large, it will press the probe 38 upward). At this time, the top of the probe 38 slides upward, which will push the push rod 24 upward. During the upward lifting process, the through hole 21 and the bridging hole 22 are misaligned and cut off the bridging hole 22.At this time, the first pipe 11 and the second pipe 12 are cut off, and the external negative pressure cannot be supplied to the equipment. The equipment can then immediately stop working to prevent the probe holder 10 from colliding with the workpiece below, thus providing feedback protection for the entire equipment.

[0028] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A mounting structure for a vacuum probe holder used for CNC machining accuracy inspection, characterized in that, The system includes a detection platform (1), a three-coordinate gantry (5), a three-coordinate horizontal arm (6), and a three-coordinate vertical arm (7). The bottom of the three-coordinate vertical arm (7) is provided with an extension plate (8), and the bottom of the extension plate (8) is provided with a mounting base (9). The mounting base (9) is provided with a docking component inside, and multiple clamping devices are provided in the inner wall of the mounting base (9). The extension plate (8) is provided with a feedback component inside, and the bottom of the mounting base (9) is provided with a probe base (10). The coordinate measuring machine (CMM) gantry (5) is set on top of the detection platform (1). The CMM horizontal arm (6) is set on the top of the CMM gantry (5) near the front edge. The CMM vertical arm (7) is set on the front side of the CMM horizontal arm (6). The probe holder (10) is provided with a threaded sleeve (36). The top and bottom of the threaded sleeve (36) extend to the top and bottom of the probe holder (10). The top of the detection platform (1) is provided with a placement plate (2). The top of the placement plate (2) is... The part is provided with a cylinder (3), and a PAD back plate (4) is provided on the top of the cylinder (3). An anti-slip sleeve (39) is provided on the outer surface of the probe seat (10) near the top edge. A damping sleeve (37) is provided between the inner walls of the threaded sleeve (36) near the bottom edge. A probe (38) is provided inside the threaded sleeve (36). The outer surface of the probe (38) is damped and fitted with the inner wall of the damping sleeve (37). The top of the probe (38) extends to the top of the threaded sleeve (36). The feedback component includes a countersunk column (17), and the inside of the extension plate (8) is provided with a reciprocating cavity (13). The bottom of the reciprocating cavity (13) is provided with a cylindrical groove (16). The countersunk column (17) slides between the inner walls of the cylindrical groove (16), and the top of the countersunk column (17) is located at the bottom of the reciprocating cavity (13). A first pipe (11) is fixed on one side of the extension plate (8), and a second pipe (12) is fixed on the other side of the extension plate (8). One end of the first pipe (11) and one end of the second pipe (12) are opposite to each other and both penetrate into the inside of the cylindrical groove (16). A limit ring (14) is fixed between the inner walls of the reciprocating cavity (13) at the middle. A groove (18) is provided on the top of the countersunk column (17), and a circular plate (19) is slidably arranged between the inner walls of the groove (18). A pressure spring (15) is fixed on the top of the circular plate (19), and the top of the pressure spring (15) is connected to the pipe. On the inner top surface of the reciprocating cavity (13), a hollow guide rod (20) is fixed at the bottom of the countersunk column (17). The bottom of the hollow guide rod (20) slides through the inner wall of the I-beam (25), and the bottom of the hollow guide rod (20) extends below the I-beam (25). A push rod (24) is slidably arranged between the inner walls of the hollow guide rod (20). The top of the push rod (24) slides through the groove (18) and is fixed at the bottom of the circular plate (19). The countersunk post (17) has a through hole (21) on one side that extends to the other side, and the push rod (24) has a bridging hole (22) on one side that extends to the other side. The through hole (21) and the bridging hole (22) are interconnected. The bottom surface of the through hole (21) is provided with a drainage air passage (23) near one edge. The bottom of the drainage air passage (23) extends downward inside the side wall of the hollow guide rod (20) and extends to the outer surface of the hollow guide rod (20).

2. The mounting structure of a vacuum probe holder for CNC machining accuracy detection according to claim 1, characterized in that: The docking assembly includes an I-beam (25). The top and bottom surfaces of the mounting base (9) have recessed cavities. A hexagonal hole (40) extending through to the upper and lower ends is provided in the middle of the interior of the mounting base (9). The I-beam (25) is slidably connected between the inner walls of the hexagonal hole (40). The top of the I-beam (25) extends slidably to the upper interior of the mounting base (9), and the bottom of the I-beam (25) extends slidably to the lower interior of the mounting base (9).

3. The mounting structure of a vacuum probe holder for CNC machining accuracy inspection according to claim 2, characterized in that: The inner wall of the I-beam (25) is provided with a plurality of bent air passages (30) at equal intervals along the circumferential direction. The bottom openings of the plurality of bent air passages (30) extend to the outer surface of the I-beam (25) near the bottom edge. The top openings of the plurality of bent air passages (30) extend to the outer surface of the I-beam (25) near the top edge. The top openings of the plurality of bent air passages (30) are respectively fitted to the inner wall of the hexagonal hole (40). An adjusting spring (29) is fixed to the top of the I-beam (25). The bottom of the adjusting spring (29) is fixed inside the mounting base (9).

4. The mounting structure of a vacuum probe holder for CNC machining accuracy inspection according to claim 3, characterized in that: The mounting base (9) has two constraint grooves (31) on its inner bottom surface. The bottom of the I-beam (25) has two constraint plates (32) that slide and extend into the constraint grooves (31). The outer surface of the I-beam (25) is fixed with a sealing ring (34) near the bottom edge. The outer surface of the sealing ring (34) slides and seals against the inner wall of the mounting base (9). The inner bottom surface of the mounting base (9) is fixed with a first sealing gasket (33) near the outer edge. The bottom of the I-beam (25) is fixed with a second sealing gasket (35). The bottom of the first sealing gasket (33) and the top of the second sealing gasket (35) are sealed together.

5. The mounting structure of a vacuum probe holder for CNC machining accuracy detection according to claim 4, characterized in that: The clamping device includes multiple bending plates (27). Multiple adjusting slides (26) are equidistantly arranged in the circumferential direction inside the mounting base (9). The top of each adjusting slide (26) extends through to the upper part of the mounting base (9), and the bottom of each adjusting slide (26) extends through to the lower part of the mounting base (9). Wedge blocks (28) are rotatably arranged between the inner walls of the adjusting slides (26) near the bottom edge.

6. The mounting structure of a vacuum probe holder for CNC machining accuracy detection according to claim 5, characterized in that: The bending plate (27) is slidably connected between the inner walls of the adjusting slide (26). The bottom of the bending plate (27) extends in an inclined shape to the lower side of the wedge block (28), and the inclined surface of the bottom of the bending plate (27) is in contact with the inclined slide of the wedge block (28). The top of the bending plate (27) extends to the top of the adjusting slide (26) and is bent and fixed at the top edge of the I-beam (25).

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