Chemical dispensing apparatus and control method with detectable contamination residue

Abstract

The application relates to a chemical dispensing device capable of detecting residual contamination and a control method. The device comprises a liquid supply pipeline, a contamination detection module and a cleaning pipeline. One end of the liquid supply pipeline is provided with a chemical inlet valve, and the other end of the liquid supply pipeline is provided with a chemical supply outlet valve. The contamination detection module is arranged on the liquid supply pipeline and comprises an electric conductivity sensor and an optical turbidity sensor. The electric conductivity sensor and the optical turbidity sensor cooperate to detect the contamination of the chemicals in the liquid supply pipeline. The cleaning pipeline is connected with the liquid supply pipeline and is used for flushing and cleaning the liquid supply pipeline. A cleaning valve is arranged on the cleaning pipeline. By introducing the electric conductivity sensor and the optical turbidity sensor into the chemical dispensing device, the problem that the residual contamination detection is not accurate, real-time monitoring and processing cannot be realized in the prior art is solved. By detecting the electric conductivity and the optical turbidity of the chemicals in real time, the residual contamination level can be accurately determined, so that the flushing process is optimized, and thorough cleaning is ensured.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a chemical dispensing device and control method for detecting residual contaminants. Background Technology

[0002] In industries such as semiconductors, display panels, and fine chemicals, the purity requirements for chemicals are extremely stringent. Existing chemical dispensing systems suffer from cross-contamination during the switching of multiple chemicals, as residues of the previous chemical may remain in the pipelines. Traditional cleaning methods typically rely on time control and lack real-time monitoring, making it difficult to accurately determine rinsing effectiveness. This can lead to incomplete removal of contaminants, affecting the stability of subsequent processes and product quality. Furthermore, existing systems lack effective automated monitoring and alarm mechanisms. Once contamination occurs, it is often difficult to detect and address it promptly, potentially causing significant production losses and safety hazards. Summary of the Invention

[0003] The purpose of this invention is to provide a chemical dispensing device and control method capable of detecting residual contaminants. By introducing a combination of conductivity sensor and optical turbidity sensor into the chemical dispensing device, the invention solves the problems of inaccurate detection of residual contaminants and the inability to monitor and process them in real time in the prior art.

[0004] To achieve the above objectives, according to a first aspect of the present invention, a chemical dispensing device capable of detecting contaminant residues is provided, comprising:

[0005] A liquid supply pipeline, wherein a chemical inlet valve is provided at one end of the liquid supply pipeline and a chemical supply outlet valve is provided at the other end of the liquid supply pipeline;

[0006] A contamination detection module is installed on the liquid supply pipeline, including a conductivity sensor and an optical turbidity sensor. The conductivity sensor and the optical turbidity sensor work together to detect contamination of chemicals in the liquid supply pipeline.

[0007] A cleaning pipe, connected to the liquid supply pipe, is used to flush and clean the liquid supply pipe, and a cleaning valve is provided on the cleaning pipe.

[0008] Optionally, the cleaning pipeline and the liquid supply pipeline are connected between the chemical inlet valve and the contamination detection module.

[0009] Optionally, the distance between the conductivity sensor and the chemical supply outlet valve is 3-5 times the diameter of the supply pipeline.

[0010] Optionally, the optical turbidity sensor is side-mounted on the liquid supply pipeline and located between the conductivity sensor and the chemical supply outlet valve.

[0011] Optionally, the angle between the optical turbidity sensor and the tangent of the liquid supply pipeline is 85°-95°.

[0012] Optionally, the probe window of the optical turbidity sensor is provided with a micro-nozzle rinsing mechanism to periodically rinse the probe window.

[0013] Optionally, the optical turbidity sensor employs a pulsed light source mode, and the sampling of the conductivity sensor avoids the light pulse period.

[0014] Optionally, the chemical dispensing device capable of detecting residual contaminants further includes:

[0015] Audible and visual alarm;

[0016] The PLC controller is connected to the chemical inlet valve, the chemical supply outlet valve, the conductivity sensor, the optical turbidity sensor, and the cleaning valve.

[0017] The control system is connected to the audible and visual alarm and the PLC controller.

[0018] According to a second aspect of the present invention, a control method for a chemical dispensing device capable of detecting contaminant residues is provided, comprising the following steps:

[0019] Before switching chemicals in the liquid supply pipeline, the chemical inlet valve is closed and the cleaning valve is opened to flush the liquid supply pipeline;

[0020] After rinsing is completed, the conductivity sensor is controlled to detect the conductivity of the liquid in the supply pipe, and the optical turbidity sensor is controlled to detect the optical turbidity of the liquid in the supply pipe.

[0021] When the conductivity and optical turbidity test values ​​meet the standards, the rinsing is deemed qualified. At this time, the cleaning valve is closed and the chemical inlet valve is opened to supply the switched chemicals to the liquid supply pipeline.

[0022] Optionally, the control method for the chemical dispensing device capable of detecting residual contaminants further includes the following steps:

[0023] If the conductivity and optical turbidity test values ​​do not meet the standards, the rinsing is deemed unqualified. In this case, the cleaning valve is opened to extend the rinsing time and the test is performed again.

[0024] If the preset number of consecutive tests fails to meet the standard, the audible and visual alarm will be activated.

[0025] The beneficial effects of this invention are as follows: by introducing a combination of conductivity sensor and optical turbidity sensor into the chemical dispensing device, the problems of inaccurate detection of contamination residues and inability to monitor and process them in real time in the prior art are solved; by detecting the conductivity and optical turbidity of chemicals in real time, the level of contamination residues can be accurately determined, thereby optimizing the rinsing process and ensuring thorough cleaning.

[0026] In addition, the linkage between the PLC control system and the alarm mechanism can promptly trigger an alarm and automatically extend the rinsing time when the pollution exceeds the standard, preventing contaminated liquid from entering the process end and significantly improving the system's automation level and cleanliness management level.

[0027] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0028] Figure 1 This is a schematic structural diagram of a chemical dispensing device capable of detecting residual contaminants, according to an embodiment of the present invention.

[0029] Figure 2 This is a schematic flowchart illustrating a control method for a chemical dispensing device capable of detecting residual contaminants, according to an embodiment of the present invention.

[0030] In the diagram: 1. Liquid supply pipeline; 11. Chemical inlet valve; 12. Chemical supply outlet valve; 2. Pollution detection module; 21. Conductivity sensor; 22. Optical turbidity sensor; 3. Cleaning pipeline; 31. Cleaning valve. Detailed Implementation

[0031] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0034] Please see Figure 1 A preferred embodiment of this application shows a chemical dispensing device capable of detecting residual contamination, comprising a supply pipe 1, a contamination detection module 2, and a cleaning pipe 3. The supply pipe 1 has a chemical inlet valve 11 at one end and a chemical supply outlet valve 12 at the other end. The contamination detection module 2, mounted on the supply pipe 1, includes a conductivity sensor 21 and an optical turbidity sensor 22. The conductivity sensor 21 and the optical turbidity sensor 22 cooperate to detect contamination of the chemicals within the supply pipe 1. The cleaning pipe 3, connected to the supply pipe 1, is used for flushing and cleaning the supply pipe 1, and is equipped with a cleaning valve 31.

[0035] According to the present invention, by introducing a combination detection method of conductivity sensor 21 and optical turbidity sensor 22 into the chemical dispensing device, the problems of inaccurate detection of contaminant residues and inability to monitor and process them in real time in the prior art are solved; by detecting the conductivity and optical turbidity of chemicals in real time, the level of contaminant residues can be accurately determined, thereby optimizing the rinsing process and ensuring thorough cleaning.

[0036] The following detailed description uses specific examples:

[0037] Please see Figure 1 The cleaning pipe 3 and the liquid supply pipe 1 are connected between the chemical inlet valve 11 and the contamination detection module 2. The connection between the cleaning pipe 3 and the liquid supply pipe 1 between the chemical inlet valve 11 and the contamination detection module 2 ensures that the flushing liquid cleans the pipes from the inlet, thereby improving the cleaning effect and avoiding contamination residue in uncleaned areas.

[0038] The distance between the conductivity sensor 21 and the chemical supply outlet valve 12 is 3-5 times the diameter of the supply pipeline 1. This design ensures that the conductivity sensor 21 can accurately detect the degree of contamination in the initial fluid stage, avoiding detection errors caused by unstable fluid conditions.

[0039] Please see Figure 1 The optical turbidity sensor 22 is side-mounted on the liquid supply line 1, located between the conductivity sensor 21 and the chemical supply outlet valve 12. This mounting position optimizes the collaborative operation of the two sensors, enabling them to jointly improve the accuracy of contamination detection.

[0040] Please see Figure 1 The angle between the optical turbidity sensor 22 and the tangent of the liquid supply pipe 1 is 85°-95°. This design ensures that the optical sensor can receive light scattering signals at the optimal angle, reducing errors and improving the accuracy of turbidity detection.

[0041] The optical turbidity sensor 22 has a micro-nozzle rinsing mechanism at its probe window for periodic rinsing. Periodic rinsing prevents the probe window from being affected by deposits or thin films, thus maintaining the stability and accuracy of the sensor.

[0042] The optical turbidity sensor 22 uses a pulsed light source mode, and the sampling of the conductivity sensor 21 avoids the light pulse cycle, thus avoiding interference between the signals of the two sensors and ensuring the independence and accuracy of data acquisition.

[0043] The chemical dispensing unit also includes an audible and visual alarm, a PLC controller, and a control system. The PLC controller is connected to the chemical inlet valve 11, the chemical supply outlet valve 12, the conductivity sensor 21, the optical turbidity sensor 22, and the cleaning valve 31. The control system is connected to the audible and visual alarm and the PLC controller. When the contamination concentration exceeds the standard, the system can promptly issue an alarm to remind operators to take timely action and ensure that the contamination does not affect subsequent processes. The PLC controller centrally schedules the valves, pumps, and sensors, ensuring efficient coordination between the automated control and monitoring systems.

[0044] Please see Figure 2 The present invention also provides a control method for a chemical dispensing device capable of detecting residual contaminants, comprising the following steps:

[0045] Step S10: Before switching chemicals in the liquid supply pipeline 1, control the chemical inlet valve 11 to close and control the cleaning valve 31 to open to flush the liquid supply pipeline 1;

[0046] Step S20: After rinsing is completed, control the conductivity sensor 21 to detect the conductivity of the liquid in the liquid supply pipe 1, and at the same time control the optical turbidity sensor 22 to detect the optical turbidity of the liquid in the liquid supply pipe 1.

[0047] Step S30: When the conductivity and optical turbidity detection values ​​meet the standards, the rinsing is deemed qualified. At this time, the cleaning valve 31 is closed and the chemical inlet valve 11 is opened to supply the switched chemicals to the liquid supply pipeline 1.

[0048] Step S40: If the conductivity and optical turbidity test values ​​do not meet the standards, the rinsing is deemed unqualified. At this time, the cleaning valve 31 is opened to extend the rinsing time and the test is performed again.

[0049] Step S50: If the preset number of consecutive tests fails to meet the standard, control the audible and visual alarm to sound an alarm.

[0050] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0051] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A chemical dispensing device capable of detecting residual contaminants, characterized in that, include: A liquid supply pipeline, wherein a chemical inlet valve is provided at one end of the liquid supply pipeline and a chemical supply outlet valve is provided at the other end of the liquid supply pipeline; A contamination detection module is installed on the liquid supply pipeline, including a conductivity sensor and an optical turbidity sensor. The conductivity sensor and the optical turbidity sensor work together to detect contamination of chemicals in the liquid supply pipeline. A cleaning pipe, connected to the liquid supply pipe, is used to flush and clean the liquid supply pipe, and a cleaning valve is provided on the cleaning pipe; The optical turbidity sensor is side-mounted on the liquid supply pipeline and located between the conductivity sensor and the chemical supply outlet valve; The optical turbidity sensor is equipped with a micro-nozzle rinsing mechanism at the probe window to periodically rinse the probe window. The optical turbidity sensor uses a pulsed light source mode, and the sampling of the conductivity sensor avoids the light pulse period; The cleaning pipeline and the liquid supply pipeline are connected between the chemical inlet valve and the pollution detection module; The distance between the conductivity sensor and the chemical supply outlet valve is 3-5 times the diameter of the liquid supply pipeline; The angle between the optical turbidity sensor and the tangent of the liquid supply pipeline is 85°-95°.

2. The chemical dispensing device for detecting residual contaminants according to claim 1, characterized in that, Also includes: Audible and visual alarm; The PLC controller is connected to the chemical inlet valve, the chemical supply outlet valve, the conductivity sensor, the optical turbidity sensor, and the cleaning valve. The control system is connected to the audible and visual alarm and the PLC controller.

3. A control method for a chemical dispensing device capable of detecting residual contaminants as described in any one of claims 1-2, characterized in that, Includes the following steps: Before switching chemicals in the liquid supply pipeline, the chemical inlet valve is closed and the cleaning valve is opened to flush the liquid supply pipeline; After rinsing is completed, the conductivity sensor is controlled to detect the conductivity of the liquid in the supply pipe, and the optical turbidity sensor is controlled to detect the optical turbidity of the liquid in the supply pipe. When the conductivity and optical turbidity test values ​​meet the standards, the rinsing is deemed qualified. At this time, the cleaning valve is closed and the chemical inlet valve is opened to supply the switched chemicals to the liquid supply pipeline.

4. The control method for the chemical dispensing device capable of detecting residual contaminants according to claim 3, characterized in that, It also includes the following steps: If the conductivity and optical turbidity test values ​​do not meet the standards, the rinsing is deemed unqualified. In this case, the cleaning valve is opened to extend the rinsing time and the test is performed again. If the preset number of consecutive tests fails to meet the standard, the audible and visual alarm will be activated.

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