Optical resonator mirror body assembly method and optical resonator mirror body assembly apparatus

Abstract

The application provides an optical resonant cavity mirror body assembling method and an optical resonant cavity mirror body assembling device, and relates to the technical field of lasers. The optical resonant cavity mirror body assembling method first calibrates the loading reference position by means of a standard resonant product and an auxiliary jig and through a dispensing device, calibrates the laser collimator mechanism by means of a laser collimator mechanism and a detection camera device, adjusts the position of the resonant product to be assembled according to the loading reference position by means of a transplanting device until the position of the resonant product to be assembled is consistent with the loading reference position, and then applies solidified glue to the resonant product to be assembled; the position and the posture of the mirror body to be assembled are adjusted according to the judgment result of the detection camera device by means of a carrying device until the optical path is consistent with the preset optical path, and then a UV lamp is turned on until the glue is solidified. The optical resonant cavity mirror body assembling method and the optical resonant cavity mirror body assembling device can improve the installation efficiency, improve the installation precision and reduce the installation cost.

Description

Technical Field

[0001] This invention relates to the field of laser technology, and in particular to an optical resonator mirror assembly method and an optical resonator mirror assembly device. Background Technology

[0002] As the core component of a laser, the optical resonant cavity provides optical energy feedback through round-trip reflection of light waves. It selectively amplifies light with fixed frequencies and consistent directions, while suppressing light of other frequencies and directions, ultimately forming a powerful laser beam. The resonant cavity typically consists of multiple planar or concave spherical mirrors perpendicular to the axis of the working medium. After population inversion is achieved in the working medium, photons moving along the cavity axis oscillate back and forth through the mirrors, achieving photon multiplication through stimulated emission, thereby generating laser light.

[0003] The resonant cavity requires a high degree of parallelism in the mirror installation, as this directly affects the laser output quality. Current installation methods typically involve a mirror clamp plate with an adjustment mechanism, requiring manual adjustment of the mirror position and visual calibration using auxiliary tools. This assembly method is not only time-consuming and labor-intensive, but also susceptible to human error, making it difficult to guarantee the mirror's parallelism accuracy and thus failing to meet the requirements of high-precision lasers. Summary of the Invention

[0004] The purpose of this invention is to provide an optical resonator mirror assembly method and an optical resonator mirror assembly device, which can improve installation efficiency, improve installation accuracy, and reduce installation costs.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A method for assembling a resonant cavity mirror, comprising:

[0007] S1, Pre-processing: The standard resonant product is set in the side-push positioning mechanism of the transplanting device, and the auxiliary fixture with a through channel is set in the standard resonant product;

[0008] S2, the dispensing device measures the height and position of the standard resonant product, records the current position, and records this position as the loading reference position of the resonant product;

[0009] S3, the transplanting device moves along the Y direction to the test position, the laser collimator mechanism emits collimating light to the standard resonant product, the detection camera device captures the reflected light path of the collimating light, and according to the capture situation of the detection camera device, the relative position of the laser collimator mechanism is adjusted until the reflected light path passes through the preset light path on the standard resonant product, so as to calibrate the reference position of the laser collimator mechanism.

[0010] S4, the transplanting device moves to the loading reference position, removes the standard resonant product, places the resonant product to be assembled in the side-push positioning mechanism in the transplanting device, and places the auxiliary fixture on the resonant product to be assembled;

[0011] S5, the dispensing device measures the height and position of the resonant product to be assembled, and the side-push positioning mechanism adjusts its relative position according to the measurement results until the position of the resonant product to be assembled is consistent with the loading reference position. The dispensing valve in the dispensing device applies curing adhesive into the resonant product to be assembled.

[0012] S6, the transplanting device moves to the test position, the conveying device grabs the mirror body to be assembled and hovers it above the glue dispensing position inside the resonant product to be assembled, and the laser collimator mechanism is activated so that the collimated light passes through the mirror body to be assembled;

[0013] S7, the detection camera device captures and determines whether the optical path is consistent with the preset optical path. If not, the transport device adjusts the position and orientation of the lens body to be assembled until the optical path is consistent with the preset optical path. If yes, the UV lamp in the transport device is turned on until the glue cures.

[0014] S8, repeat S5 to S7 until multiple mirrors to be assembled are mounted on the resonant product to be assembled.

[0015] As a further technical solution, calibrating the reference position of the laser collimator mechanism includes:

[0016] The collimated light passes through the hole on the side wall of the standard resonant product and hits the standard reflector inside the standard resonant product. The reflected light path passes through the through channel on the auxiliary fixture. The detection camera device captures the concentricity of the light spot of the reflected light path and the through channel. The relative position of the laser collimator mechanism is adjusted until the concentricity of the light spot of the reflected light path and the through channel reaches the reference value.

[0017] As a further technical solution, before the conveying device picks up the mirror body to be assembled and hovers it above the dispensing position, it also includes:

[0018] The transport device picks up the lens body to be assembled and places it above the lower camera device. The lower camera device captures the relative position of the lens body to be assembled and the transport device, and then transfers it to the transport device.

[0019] As a further technical solution, the detection camera device capturing and determining whether the optical path is consistent with the preset optical path includes:

[0020] Collimated light passes through the hole on the side wall of the resonant product to be assembled and hits the lens body to be assembled above the dispensing position. After reflection, the light path passes through the through-channel on the auxiliary fixture. The detection camera device captures the concentricity of the light spot of the reflected light path with the through-channel and determines whether the concentricity is consistent with the reference value.

[0021] As a further technical solution, in front of the UV lamp in the conveying device, the pressure sensor in the conveying device senses and monitors the contact pressure between the mirror body to be assembled and the resonant product to be assembled in real time until the contact pressure between the two reaches a set value.

[0022] As a further technical solution, the assembly method also includes calibrating the dispensing valve; after multiple operations, the calibration mechanism captures the relative position of the dispensing valve, and the dispensing valve adaptively adjusts its relative position until the dispensing valve is at a reference position.

[0023] An optical resonator mirror assembly device, employing the aforementioned optical resonator mirror assembly method, wherein the optical resonator mirror assembly device comprises:

[0024] frame;

[0025] A transplanting device is movably disposed on the upper end face of the frame along the Y direction for installing resonant products, and an auxiliary fixture in the transplanting device is configured to be disposed on the resonant products;

[0026] A dispensing device is disposed on the frame corresponding to the transplanting device. The dispensing device includes an adjustable dispensing valve and a calibration mechanism.

[0027] The device includes a laser collimator mechanism, a detection camera device, a transport device, and a lower camera device. The laser collimator mechanism is mounted on the frame and located in front of the dispensing device along the Y direction. The detection camera device and the transport device are both mounted on the frame corresponding to the laser collimator mechanism. The transport device includes an adjustable transport mechanism, and the lower camera device is mounted corresponding to the transport device.

[0028] A calibration mechanism is disposed on the frame corresponding to the dispensing device;

[0029] The transplanting device, the dispensing device, the laser collimator mechanism, the detection camera device, the transport device, the lower camera device, and the calibration mechanism are all communicatively connected to the control terminal.

[0030] As a further technical solution, the resonant cavity mirror assembly equipment also includes a feeding device. Along the Y direction, the feeding device is located at the front end of the dispensing device, and the feeding device is configured to accommodate multiple mirrors to be assembled.

[0031] As a further technical solution, the laser collimator mechanism is provided on both sides of the transplanting device along the X direction;

[0032] The laser collimator mechanism includes a launch mounting column, a three-way moving platform, a rotating slide, a capture assembly, and a laser. The launch mounting column is mounted on the frame and extends along the Z direction. The rotating slide is mounted on the upper end of the launch mounting column via the three-way moving platform. The capture assembly and the laser are both mounted on the rotating slide and are coaxially arranged.

[0033] As a further technical solution, the detection camera device is provided on both sides of the transplanting device along the X direction;

[0034] The detection camera device includes a mounting frame, a detection connector, a detection connecting arm, and a detection camera body. The detection connector is movably disposed on the mounting frame along the X direction, the detection connecting arm is rotatably connected to the detection connector, and the detection camera body is rotatably connected to the detection connecting arm.

[0035] Compared with the prior art, the optical resonator mirror assembly method and optical resonator mirror assembly equipment provided in this embodiment of the invention have the following technical advantages:

[0036] 1. Before formal assembly, a standard resonant product and auxiliary fixture are used, and the loading reference position is calibrated using a dispensing device. After the transfer device is moved to the test position along the Y direction, the laser collimator mechanism and detection camera device, in conjunction with the standard resonant product and auxiliary fixture, are calibrated. The laser collimator mechanism and loading reference position are locked before assembly to eliminate initial errors, providing a precision foundation for the subsequent assembly of the resonant product to be assembled. This avoids situations where the assembly accuracy of the resonant product is affected by optical path deviations or loading position deviations. Furthermore, locking the laser collimator mechanism and loading reference position before formal assembly eliminates the need for frequent adjustments during subsequent formal assembly, thereby improving assembly efficiency.

[0037] 2. During the formal assembly process, the transfer device first adjusts the position of the resonant product to be assembled according to the loading reference position until the position of the resonant product to be assembled is consistent with the loading reference position. Then, curing adhesive is applied to the resonant product to be assembled. Next, the transport device picks up the lens to be assembled and hovers it above the adhesive application position inside the resonant product. The detection camera device determines whether the optical path is consistent with the preset optical path. If not, the transport device adjusts the position and orientation of the lens to be assembled according to the detection camera device's judgment until the optical path is consistent with the preset optical path. Then, the UV lamp is turned on until the adhesive cures. Throughout the process, the transfer device automatically adjusts the position of the resonant product to be assembled to eliminate positioning errors between the resonant product and the transfer device; the transport device automatically adjusts the position of the lens to be assembled to eliminate picking errors. The combination of position adjustments on both sides reduces the impact of individual component deviations on the overall optical path, further improving the installation accuracy of the lens to be assembled. Furthermore, during the adhesive curing process, the handling device remains in a gripping state while holding the mirror body to be assembled, thereby avoiding minor displacements of the mirror body that may occur during the adhesive curing stage and further improving installation accuracy.

[0038] 3. Before and during formal assembly, no manual labor is required. This not only reduces subjective errors caused by manual operation, but also ensures consistency of processes across different batches and with different operators, avoiding fluctuations in product yield due to differences in human operation, thereby reducing production costs. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0040] Figure 1 This is a schematic diagram of the optical resonator mirror assembly equipment provided in an embodiment of the present invention;

[0041] Figure 2 This is a disassembled diagram of the optical resonator mirror assembly equipment provided in an embodiment of the present invention;

[0042] Figure 3 This is a disassembled diagram of the transfer device provided in an embodiment of the present invention;

[0043] Figure 4 This is a schematic diagram of the dispensing device provided in an embodiment of the present invention;

[0044] Figure 5This is an anatomical diagram of the laser collimator mechanism provided in an embodiment of the present invention;

[0045] Figure 6 This is a schematic diagram of the detection camera device provided in an embodiment of the present invention;

[0046] Figure 7 This is a schematic diagram of the structure of the conveying device provided in an embodiment of the present invention;

[0047] Figure 8 This is a structural diagram of the resonant product to be assembled when it is a water-cooled product;

[0048] Figure 9 This is a structural diagram of the resonant product to be assembled when it is an air-cooled product.

[0049] In the picture:

[0050] 10. Resonant product to be assembled; 20. Lens to be assembled; 30. Reflector to be assembled;

[0051] 100. Transplanting device; 101. Auxiliary jig; 110. Side-push positioning mechanism; 120. Multi-axis transfer mechanism;

[0052] 200. Dispensing device; 210. Dispensing valve; 220. Calibration mechanism; 221. Height sensor; 222. Position camera; 230. First three-axis transfer mechanism;

[0053] 300. Laser collimator mechanism; 310. Launching mounting post; 320. Three-way moving platform; 330. Rotary slide; 340. Capture assembly; 341. Capture camera; 342. Prism; 350. Laser; 360. Protective lens;

[0054] 400. Inspection camera device; 410. Mounting bracket; 420. Inspection connector; 430. Inspection connecting arm; 440. Inspection camera body;

[0055] 500. Handling device; 510. Handling mechanism; 511. UV lamp; 512. Pressure sensor; 513. Handling claw; 514. Precision two-axis displacement stage; 520. Second and third-axis transfer mechanism;

[0056] 600. Lower camera device;

[0057] 700. Calibration agency;

[0058] 800, rack;

[0059] 900. Feeding device. Detailed Implementation

[0060] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0061] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0062] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0063] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0064] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​that do not use relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0065] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0066] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0067] Combination Figures 1 to 9 As shown, the optical resonator mirror assembly method provided in this embodiment can improve installation efficiency, increase installation accuracy, and reduce installation costs. Specifically, the optical resonator mirror assembly method includes: First, preprocessing, setting a standard resonator product in the side-push positioning mechanism 110 in the transfer device 100, and setting an auxiliary fixture 101 with a through channel inside the standard resonator product.

[0068] The second step involves the dispensing device 200 measuring the height and determining the position of the standard resonant product, recording the current position, and using this position as the reference position for loading the resonant product.

[0069] Third, the transplanting device 100 moves along the Y direction to the test position, the laser collimator mechanism 300 emits collimated light to the standard resonant product, the detection camera device 400 captures the reflected light path of the collimated light, and the relative position of the laser collimator mechanism 300 is adjusted according to the capture situation of the detection camera device 400 until the reflected light path passes through the preset light path on the standard resonant product to calibrate the reference position of the laser collimator mechanism 300.

[0070] Fourth step: the transplanting device 100 moves to the loading reference position, removes the standard resonant product, places the resonant product 10 to be assembled in the side-push positioning mechanism 110 in the transplanting device 100, and places the auxiliary fixture 101 on the resonant product 10 to be assembled.

[0071] In the fifth step, the dispensing device 200 measures the height and position of the resonant product 10 to be assembled. The side-push positioning mechanism 110 adjusts its relative position according to the measurement results until the position of the resonant product 10 to be assembled is consistent with the loading reference position. The dispensing valve 210 in the dispensing device 200 applies curing adhesive to the resonant product 10 to be assembled.

[0072] Step 6: The transplanting device 100 moves to the test position, the transport device 500 grabs the mirror body to be assembled and places it above the dispensing position inside the resonant product 10 to be assembled and hovers it, and the laser collimator mechanism 300 is activated so that the collimated light passes through the mirror body to be assembled.

[0073] Step 7: The camera device 400 detects and determines whether the light path is consistent with the preset light path. If not, the transport device 500 adjusts the position and orientation of the lens body to be assembled until the light path is consistent with the preset light path. If so, the UV lamp 511 in the transport device 500 is turned on until the glue cures.

[0074] Step 8: Repeat steps 5 through 7 until multiple mirrors to be assembled are mounted on the resonant product 10 to be assembled.

[0075] Before formal assembly, the loading reference position is calibrated using a standard resonant product and auxiliary fixture 101, and via dispensing device 200. After the transfer device 100 is moved to the test position along the Y direction, the laser collimator mechanism 300 and the detection camera device 400, in conjunction with the standard resonant product and auxiliary fixture 101, are calibrated. Locking the laser collimator mechanism 300 and the loading reference position before assembly eliminates initial errors, providing a precision foundation for the subsequent assembly of the resonant product 10. This avoids situations where the assembly accuracy of the resonant product 10 is affected by optical path deviations or loading position deviations. Furthermore, locking the laser collimator mechanism 300 and the loading reference position before formal assembly eliminates the need for frequent adjustments during subsequent formal assembly, thereby improving assembly efficiency.

[0076] During the formal assembly process, the transfer device 100 first adjusts the position of the resonant product 10 to be assembled according to the loading reference position until the position of the resonant product 10 to be assembled is consistent with the loading reference position. Then, curing adhesive is applied into the resonant product 10 to be assembled. Afterwards, the transport device 500 picks up the lens body to be assembled and hovers it above the adhesive application position inside the resonant product 10. The detection camera device 400 determines whether the optical path is consistent with the preset optical path. If they are inconsistent, the transport device 500 adjusts the position and orientation of the lens body to be assembled according to the determination result of the detection camera device 400 until the optical path is consistent with the preset optical path. Then, the UV lamp 511 is turned on until the adhesive cures. Throughout the process, the transfer device 100 can automatically adjust the position of the resonant product 10 to be assembled to eliminate the positioning error between the resonant product 10 to be assembled and the transfer device 100. The transport device 500 can automatically adjust the position of the lens body to be assembled to eliminate the picking error of the lens body to be assembled. The combination of position adjustments on both sides can reduce the impact of the deviation of a single component on the overall optical path, thereby further improving the installation accuracy of the lens body to be assembled. Furthermore, during the adhesive curing process, the handling device 500 remains in a gripping state on the lens to be assembled, thereby avoiding minor displacement of the lens that may occur during the adhesive curing stage and further improving installation accuracy.

[0077] Before and during formal assembly, no manual labor is required. This not only reduces subjective errors caused by manual operation, but also ensures consistency of processes across different batches and with different operators, avoiding fluctuations in product yield due to differences in human operation, thereby reducing production costs.

[0078] Preferably, calibrating the reference position of the laser collimator mechanism 300 includes: the collimated light passes through a hole on the side wall of the standard resonant product and strikes the standard reflector inside the standard resonant product; the reflected light path passes through a through-channel on the auxiliary fixture 101; the detection camera device 400 captures the concentricity of the light spot of the reflected light path and the through-channel; and the relative position of the laser collimator mechanism 300 is adjusted until the concentricity of the light spot of the reflected light path and the through-channel reaches a reference value. Using the center of the through-channel as a reference, the concentricity tolerance between the light spot of the reflected light path and the through-channel is 0.01 mm. In other embodiments, the reference position calibration of the optical collimator mechanism can be performed multiple times. That is, the reference position calibration of the optical collimator mechanism is used to verify the previous reference position calibration, thereby further reducing the risk of decreased assembly accuracy due to accidental positional deviations of the optical collimator mechanism.

[0079] The optical resonator mirror assembly method provided in this embodiment can be used to assemble different resonant products 10 to be assembled, such as water-cooled resonant products 10, etc. Figure 8 As shown, or air-cooled resonant product 10 awaiting assembly, such as Figure 9As shown. When locking the laser collimator mechanism 300 and the loading reference position of the water-cooled resonant product 10 to be assembled, the optical path sequence is as follows: the collimated light reaches the first mirror 30 to be assembled, is reflected, and then reaches the second mirror 30 to be assembled. After the two mirrors 30 to be assembled are completely locked, the lens 20 to be assembled is placed between the two mirrors 30. In the actual assembly process of the water-cooled resonant product 10, the optical path sequence is as follows: the collimated light reaches the first mirror 30 to be assembled, is reflected, passes through the lens 20 to be assembled, and then reaches the second mirror 30. When locking the laser collimator mechanism 300 and the loading reference position of the air-cooled resonant product 10 to be assembled, the optical path sequence is as follows: the collimated light reaches the mirror 30 to be assembled, and after the mirror 30 to be assembled is completely locked, the lens 20 to be assembled is placed on the air-cooled resonant product 10. In the actual assembly process of the air-cooled resonant product 10, the collimated light passes through the lens 20 to be assembled and then reaches the mirror 30 to be assembled.

[0080] Preferably, before the transport device 500 grasps the lens body to be assembled above the dispensing position and hovers it, the process further includes: the transport device 500 grasps the lens body to be assembled above the lower camera device 600, and the lower camera device 600 captures the relative position between the lens body to be assembled and the transport device 500 and transmits this information to the transport device 500. When the transport device 500 picks up the lens body to be assembled, the grasping posture or position may vary each time. Therefore, when the transport device 500 subsequently adjusts the position of the lens body automatically, the adjustment can be made based on the relative position between the lens body to be assembled and the transport device 500, thereby eliminating the possibility of deviations in the installation position of the lens body due to different grasping postures or positions each time.

[0081] Preferably, the detection camera device 400 capturing and determining whether the optical path is consistent with the preset optical path includes: collimating light passing through a hole on the side wall of the resonant product 10 to be assembled, hitting the mirror body to be assembled above the dispensing position, and after reflection, the light path passes through a through-channel on the auxiliary fixture 101. The detection camera device 400 captures the concentricity of the light spot of the reflected light path with the through-channel and determines whether the concentricity is consistent with a reference value. The mirror body to be assembled includes a mirror 30 to be assembled and a lens 20 to be assembled. When determining the position of the mirror 30 to be assembled, collimating light passes through a hole on the side wall of the resonant product 10 to be assembled, hitting the mirror 30 to be assembled above the dispensing position. After reflection, the light path passes through a through-channel on the auxiliary fixture 101. The detection camera device 400 captures the concentricity of the light spot of the reflected light path with the through-channel and determines whether the concentricity is consistent with a reference value. When determining the position of the lens 20 to be assembled, the collimated light passes through the hole on the side wall of the resonant product 10 to be assembled and hits the lens 20 to be assembled above the glue dispensing position. Part of the light path will return to the laser collimator mechanism 300. The laser collimator mechanism 300 compares the returned light path with the collimated light path to determine whether the position of the lens 20 to be assembled is appropriate.

[0082] Preferably, before the UV lamp 511 in the conveying device 500, the pressure sensor 512 in the conveying device 500 continuously senses and monitors the contact pressure between the lens to be assembled and the resonant product 10 to be assembled until the contact pressure between the two reaches a set value. By sensing and monitoring the contact pressure between the lens to be assembled and the resonant product 10 to be assembled in real time by the pressure sensor 512, it is ensured that the conveying device 500 can apply appropriate pressure to the lens to be assembled, avoiding displacement of the lens to be assembled due to insufficient force during the adhesive curing process; on the other hand, it is also ensured that the external force applied by the conveying device 500 to the lens to be assembled is too large, which could lead to damage to the lens to be assembled or the resonant product 10 to be assembled, thereby further improving the assembly yield.

[0083] Preferably, the assembly method further includes calibrating the dispensing valve 210. After multiple operations, the calibration mechanism 700 captures the relative position of the dispensing valve 210, and the dispensing valve 210 adaptively adjusts its relative position until it is at a reference position. After multiple operations, there may be a shift in the relative position of the dispensing valve 210. The calibration mechanism 700 can capture the relative position of the dispensing valve 210 after a specific number of dispensing operations. If a shift in the relative position of the dispensing valve 210 is detected, an adjustment signal is sent to the dispensing valve 210, and the dispensing valve 210 adaptively adjusts its relative position until the calibration mechanism 700 detects that the dispensing valve 210 is back at the reference position. The capture interval of the calibration mechanism 700 can be set according to the actual situation. It can be set to capture the relative position of the dispensing valve 210 after 20 dispensing operations, or it can be set to capture the relative position of the dispensing valve 210 after 150 dispensing operations. This embodiment does not impose a specific limitation.

[0084] This embodiment also provides an optical resonator mirror assembly device. Applying the above-described optical resonator mirror assembly method, the optical resonator mirror assembly device includes a frame 800, a transfer device 100, a dispensing device 200, a laser collimator mechanism 300, a detection camera device 400, a transport device 500, a lower camera device 600, and a calibration mechanism 700. The transfer device 100 is movably disposed along the Y-direction on the upper end face of the frame 800 for mounting the resonator product. The auxiliary fixture 101 in the transfer device 100 is configured to be disposed on the resonator product. The dispensing device 200 is correspondingly disposed on the frame 800 to the transfer device 100. The dispensing device 200 includes an adjustable dispensing valve 210 and a calibration device. Mechanism 220; Laser collimator mechanism 300 is mounted on frame 800 and located in front of dispensing device 200 along the Y direction. Detection camera device 400 and conveying device 500 are both mounted on frame 800 corresponding to laser collimator mechanism 300. Conveying device 500 includes adjustable conveying mechanism 510. Lower camera device 600 is correspondingly mounted on conveying device 500. Calibration mechanism 700 is mounted on frame 800 corresponding to dispensing device 200. The transfer device 100, dispensing device 200, laser collimator mechanism 300, detection camera device 400, conveying device 500, lower camera device 600, and calibration mechanism 700 are all communicatively connected to a control terminal.

[0085] Before formal assembly, a standard resonant product and auxiliary fixture 101 are used, and the loading reference position is calibrated by calibration mechanism 220. After the transfer device 100 is moved to the test position along the Y direction, the laser collimator mechanism 300 and the detection camera device 400, in conjunction with the standard resonant product and auxiliary fixture 101, are calibrated. Before assembly, the laser collimator mechanism 300 and the loading reference position are locked to eliminate initial errors and provide a precision basis for the subsequent assembly of the resonant product 10. This avoids the assembly accuracy of the resonant product 10 being affected by optical path deviations or loading position deviations. Furthermore, after locking the laser collimator mechanism 300 and the loading reference position before formal assembly, frequent adjustments to the laser collimator mechanism 300 and the loading reference position are unnecessary during subsequent formal assembly, thereby improving assembly efficiency. During the formal assembly process, the transfer device 100 first adjusts the position of the resonant product 10 to be assembled according to the loading reference position until the position of the resonant product 10 to be assembled is consistent with the loading reference position. Then, curing adhesive is applied into the resonant product 10 to be assembled. After that, the transport device 500 picks up the lens body to be assembled and hovers it above the adhesive application position in the resonant product 10 to be assembled. The detection camera device 400 determines whether the optical path is consistent with the preset optical path. If they are inconsistent, the transport device 500 adjusts the position and orientation of the lens body to be assembled according to the determination result of the detection camera device 400 until the optical path is consistent with the preset optical path. Then, the UV lamp 511 in the transport device 500 is turned on until the adhesive cures. Throughout the process, the transplanting device 100 automatically adjusts the position of the resonant product 10 to be assembled, eliminating positioning errors between the resonant product 10 and the transplanting device 100. The transport device 500 automatically adjusts the position of the lens to be assembled, eliminating gripping errors. The combination of position adjustments on both sides reduces the impact of individual component deviations on the overall optical path, further improving the installation accuracy of the lens. Furthermore, during adhesive curing, the transport device 500 maintains a gripping state on the lens to be assembled, avoiding minor displacements that may occur during adhesive curing, further improving installation accuracy. During assembly, the calibration mechanism 700 can capture the relative position of the dispensing valve 210 after a specific number of dispensing cycles. If a relative position shift of the dispensing valve 210 is detected, an adjustment signal is sent to the dispensing valve 210, which adaptively adjusts its relative position until the calibration mechanism 700 detects that the dispensing valve 210 is back in the reference position.

[0086] The specific structures of the lower camera device 600, calibration mechanism 700, and frame 800 are not the focus of this solution's technology; they are set up with reference to existing technologies and will not be described in detail here.

[0087] Combination Figure 3As shown, the transplanting device 100 also includes a multi-axis transfer mechanism 120. A lateral thrust positioning mechanism 110 is connected to the multi-axis transfer mechanism 120. The multi-axis transfer mechanism 120 drives the lateral thrust positioning mechanism 110 to reciprocate along the Y direction and finely adjusts the relative position of the lateral thrust positioning mechanism 110 in the X and Z directions. The specific structure and working principle of the lateral thrust positioning mechanism 110 and the multi-axis transfer mechanism 120 are described in accordance with existing technology and will not be repeated here.

[0088] Combination Figure 4 As shown, the calibration mechanism 220 includes a height sensor 221 and a position camera 222. The height sensor 221 is used to sense the height of the standard resonant product and the resonant product 10 to be assembled, and the position camera 222 is used to capture the position of the standard resonant product and the resonant product 10 to be assembled, so as to complete the calibration of the loading reference position with the help of the standard resonant product. In subsequent operations, it is convenient to adjust the relative position of the resonant product 10 to be assembled with reference to the loading reference position. The dispensing valve 210 and the calibration mechanism 220 are both set in the first three-axis transfer mechanism 230. The first three-axis transfer mechanism 230 can drive the dispensing valve and the calibration mechanism 220 to adjust their relative position with the side-push positioning mechanism 110 along the X, Y and Z directions. The specific structure and working principle of the first three-axis transfer mechanism 230 refer to the prior art and will not be described in detail here.

[0089] Preferably, the resonant cavity mirror assembly equipment further includes a loading device 900, which is located at the front end of the dispensing device 200 along the Y direction. The loading device 900 is configured to accommodate multiple mirrors to be assembled. This configuration facilitates the handling device 500 in grasping the mirrors to be assembled, ensuring the continuity of the assembly operation and further improving assembly efficiency. The loading device 900 is configured according to existing technology and will not be described in detail here.

[0090] Preferably, along the X direction, laser collimator mechanisms 300 are provided on both sides of the transplanting device 100; the laser collimator mechanism 300 includes a transmitting mounting column 310, a three-way moving platform 320, a rotating slide 330, a capturing component 340, and a laser 350. The transmitting mounting column 310 is provided on the frame 800 and extends along the Z direction. The rotating slide 330 is provided on the upper end of the transmitting mounting column 310 through the three-way moving platform 320. The capturing component 340 and the laser 350 are both provided on the rotating slide 330, and the capturing component 340 and the laser 350 are coaxially arranged.

[0091] Combination Figure 5As shown, the capture assembly 340 includes a capture camera 341 and a prism 342. The capture camera 341 is mounted on a rotating slide 330, and the prism 342 is mounted on the capture camera 341 via a first bracket. The laser 350 is connected to the first bracket via a second bracket. A protective lens 360 is connected to the side of the first bracket away from the capture camera 341 via a third bracket, and a positioning ring is provided on the side of the protective lens 360 away from the third bracket. When determining the position of the lens 20 to be assembled, the collimated light passes through the hole on the side wall of the resonant product 10 to be assembled and hits the lens 20 to be assembled above the dispensing position. Part of the light path will return to the laser collimator mechanism 300. The returned light path passes through the protective lens 360 and the prism 342 in sequence and hits the capture camera 341. The capture camera 341 captures the position of the returned light path and compares the returned light path with the collimated light path to determine whether the position of the lens 20 to be assembled is appropriate. In addition, the protective lens 360 also protects the prism 342, laser 350, and capture camera 341, reducing interference from external debris. The positioning ring ensures the installation stability of the protective lens 360. The three-way moving platform 320 can adjust the relative position of the capture assembly 340 and laser 350 with respect to the emission mounting post 310 in the X, Y, and Z directions. The rotating slide 330 can adjust the relative position of the capture assembly 340 and laser 350 with respect to the emission mounting post 310 in the circumferential direction. The specific structure and working principle of the three-way moving platform 320 and the rotating slide 330 are described in the prior art and will not be repeated here.

[0092] Combination Figure 2 and Figure 6As shown, along the X direction, detection camera devices 400 are provided on both sides of the transplanting device 100; the detection camera device 400 includes a mounting frame 410, a detection connector 420, a detection connecting arm 430, and a detection camera body 440. The detection connector 420 is movably disposed on the mounting frame 410 along the X direction, the detection connecting arm 430 is rotatably connected to the detection connector 420, and the detection camera body 440 is rotatably connected to the detection connecting arm 430. The upper end of the mounting bracket 410 is provided with an adjusting convex rail extending in the X direction. The lower end face of the detection connector 420 is provided with an adjusting groove that slides with the adjusting convex rail. The detection connector 420 is slidably connected to the adjusting convex rail. A drive motor is provided on the mounting bracket 410. After driving, the output shaft of the motor is connected to the detection connector 420 for transmission. The drive motor can drive the detection connector 420 to reciprocate in the X direction, and at the same time, it can limit the relative position of the detection connector 420 on the adjusting convex rail. The detection connector 420 cooperates with the mounting bracket 410 to change the relative position of the detection camera body 440 with respect to the mounting bracket 410 in the X direction. The detection connecting arm 430 includes a first arm and a second arm that are connected to each other and are set at an angle. The end of the first arm away from the second arm is rotatably connected to the detection connector 420. With this configuration, rotating the first arm can change the relative position of the detection camera body 440 with respect to the mounting bracket 410 in the circumferential direction of the first arm. The detection camera body 440 is rotatably connected to the second arm. Rotating the detection camera body 440 along the Z direction changes the pitch angle of the detection camera body 440, facilitating the capture of the optical path by the detection camera body 440.

[0093] Combination Figure 7As shown, the transport device 500 includes a second three-axis transfer mechanism 520 and a transport mechanism 510. The second three-axis transfer mechanism is mounted on the frame 800. The transport mechanism 510 includes a UV lamp 511, a pressure sensor 512, a transport claw 513, and a precision two-axis displacement stage 514. The precision two-axis displacement stage 514 is driven and mounted on the second three-axis transfer mechanism 520. The transport claw 513 is connected to the precision two-axis displacement stage 514. The pressure sensor 512 is located between the transport claw 513 and the precision two-axis displacement stage 514. The UV lamp 511 is located on one side of the transport claw 513. The transport claw 513 is used to grip and hold the lens body to be assembled. When the transport claw 513 grips the lens body to be assembled above the dispensing position, and the optical path is consistent with the preset optical path, the UV lamp 511 is turned on until the adhesive is completely cured. During the curing process, the transport claw 513 continuously holds the lens body to be assembled to prevent the lens body from shifting during the curing process. Pressure sensor 512 continuously monitors the contact pressure between the lens to be assembled and the resonant product 10 until the contact pressure reaches a set value. By monitoring the contact pressure between the lens to be assembled and the resonant product 10 in real time, pressure sensor 512 ensures that the transport device 500 applies appropriate pressure to the lens to be assembled, preventing displacement due to insufficient force during adhesive curing. Simultaneously, it prevents excessive force applied by the transport device 500 to the lens to be assembled, thus avoiding damage to the lens or resonant product 10, further improving assembly yield. Precision two-axis displacement stage 514 can adjust the relative positions of UV lamp 511, pressure sensor 512, and transport claw 513 in the X and Y directions with respect to the second three-axis transfer mechanism 520, ensuring adjustment accuracy and thus guaranteeing the assembly accuracy of the lens to be assembled. The second three-axis transfer mechanism 520 can drive the conveying mechanism 510 to adjust its relative position with the frame 800 in the X, Y, and Z directions to facilitate the assembly of the mirror body to be assembled. The specific structure and working principle of the conveying claw 513, the precision two-axis displacement stage 514, and the second three-axis transfer mechanism 520 are as described in the prior art and will not be repeated here.

[0094] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A method for assembling a resonant cavity mirror, characterized in that, include; S1, Pre-processing: The standard resonant product is placed in the side-push positioning mechanism (110) of the transplanting device (100), and the auxiliary fixture (101) with a through channel is placed inside the standard resonant product; S2, the dispensing device (200) measures the height and position of the standard resonant product, records the current position, and records the position as the loading reference position of the resonant product; S3, the transplanting device (100) moves along the Y direction to the test position, the laser collimator mechanism (300) emits collimating light to the standard resonant product, the detection camera device (400) captures the reflected light path of the collimating light, and the relative position of the laser collimator mechanism (300) is adjusted according to the capture situation of the detection camera device (400) until the reflected light path passes through the preset light path on the standard resonant product to calibrate the reference position of the laser collimator mechanism (300); S4, the transplanting device (100) moves to the loading reference position, removes the standard resonant product, places the resonant product (10) to be assembled in the side-push positioning mechanism (110) in the transplanting device (100), and places the auxiliary fixture (101) on the resonant product (10) to be assembled. S5, the dispensing device (200) measures the height and position of the resonant product (10) to be assembled, and the side-push positioning mechanism (110) adjusts its relative position according to the measurement results until the position of the resonant product (10) to be assembled is consistent with the loading reference position. The dispensing valve (210) in the dispensing device (200) applies curing adhesive into the resonant product (10) to be assembled. S6, the transplanting device (100) moves to the test position, the conveying device (500) grabs the mirror body to be assembled and hovers it above the glue dispensing position inside the resonant product (10) to be assembled, and the laser collimator mechanism (300) is activated so that the collimated light passes through the mirror body to be assembled; S7, the detection camera device (400) captures and determines whether the optical path is consistent with the preset optical path. If not, the transport device (500) adjusts the position and orientation of the lens body to be assembled until the optical path is consistent with the preset optical path. If so, the UV lamp (511) in the conveying device (500) is turned on until the adhesive cures; S8, repeat S5 to S7 until multiple mirrors to be assembled are mounted on the resonant product to be assembled (10).

2. The method for assembling a resonant cavity mirror body according to claim 1, characterized in that, The reference position for calibrating the laser collimator mechanism (300) includes: The collimated light passes through the hole on the side wall of the standard resonant product and hits the standard reflector inside the standard resonant product. The reflected light path passes through the through channel on the auxiliary fixture (101). The detection camera device (400) captures the concentricity of the light spot of the reflected light path and the through channel. The relative position of the laser collimator mechanism (300) is adjusted until the concentricity of the light spot of the reflected light path and the through channel reaches the reference value.

3. The method for assembling a resonant cavity mirror body according to claim 1, characterized in that, Before the conveying device (500) grasps the lens body to be assembled and hovers it above the dispensing position, it also includes: The transport device (500) picks up the lens body to be assembled and places it above the lower camera device (600). The lower camera device (600) captures the relative position of the lens body to be assembled and the transport device (500) and transfers it to the transport device (500).

4. The method for assembling a resonant cavity mirror body according to claim 1, characterized in that, The detection camera device (400) captures and determines whether the optical path is consistent with the preset optical path, including: Collimated light passes through the hole on the side wall of the resonant product to be assembled and hits the mirror body to be assembled above the dispensing position. After reflection, the light path passes through the through channel on the auxiliary fixture (101). The detection camera device (400) captures the concentricity of the light spot of the reflected light path and the through channel, and determines whether the concentricity is consistent with the reference value.

5. The method for assembling a resonant cavity mirror body according to claim 1, characterized in that, In front of the UV lamp (511) in the conveying device (500), the pressure sensor (512) in the conveying device (500) senses and monitors the contact pressure between the mirror body to be assembled and the resonant product to be assembled in real time until the contact pressure between the two reaches the set value.

6. The method for assembling a resonant cavity mirror body according to claim 1, characterized in that, The assembly method further includes calibrating the dispensing valve (210); after multiple operations, the calibration mechanism (700) captures the relative position of the dispensing valve (210), and the dispensing valve (210) adaptively adjusts the relative position until the dispensing valve (210) is at the reference position.

7. An optical resonator mirror assembly device, characterized in that, The method for assembling a learning resonator mirror according to any one of claims 1-6, wherein the learning resonator mirror assembly equipment comprises: Rack (800); A transplanting device (100) is movably disposed on the upper end face of the frame (800) along the Y direction for installing the resonant product. An auxiliary fixture (101) in the transplanting device (100) is configured to be disposed on the resonant product. A dispensing device (200) is disposed on the frame (800) corresponding to the transplanting device (100). The dispensing device (200) includes an adjustable dispensing valve (210) and a calibration mechanism (220). The device comprises a laser collimator mechanism (300), a detection camera device (400), a transport device (500), and a lower camera device (600). The laser collimator mechanism (300) is mounted on the frame (800) and located in front of the dispensing device (200) along the Y direction. The detection camera device (400) and the transport device (500) are both mounted on the frame (800) corresponding to the laser collimator mechanism (300). The transport device (500) includes an adjustable transport mechanism (510). The lower camera device (600) is mounted corresponding to the transport device (500). A calibration mechanism (700) is disposed on the frame (800) in correspondence with the dispensing device (200). The transplanting device (100), the dispensing device (200), the laser collimator mechanism (300), the detection camera device (400), the transport device (500), the lower camera device (600), and the calibration mechanism (700) are all connected to the control terminal.

8. The optical resonator mirror assembly equipment according to claim 7, characterized in that, The resonant cavity mirror assembly equipment also includes a feeding device (900) along the Y direction. The feeding device (900) is located at the front end of the dispensing device (200). The feeding device (900) is configured to accommodate multiple mirrors to be assembled.

9. The optical resonator mirror assembly equipment according to claim 7, characterized in that, Along the X direction, the laser collimator mechanism (300) is provided on both sides of the transplanting device (100). The laser collimator mechanism (300) includes a transmitter mounting column (310), a three-way moving platform (320), a rotary slide (330), a capture assembly (340), and a laser (350). The transmitter mounting column (310) is mounted on the frame (800) and extends in the Z direction. The rotary slide (330) is mounted on the upper end of the transmitter mounting column (310) via the three-way moving platform (320). The capture assembly (340) and the laser (350) are both mounted on the rotary slide (330), and the capture assembly (340) and the laser (350) are coaxially arranged.

10. The optical resonator mirror assembly equipment according to claim 7, characterized in that, Along the X direction, the detection camera device (400) is provided on both sides of the transplanting device (100). The detection camera device (400) includes a mounting frame (410), a detection connector (420), a detection connecting arm (430), and a detection camera body (440). The detection connector (420) is movably disposed on the mounting frame (410) in the X direction. The detection connecting arm (430) is rotatably connected to the detection connector (420), and the detection camera body (440) is rotatably connected to the detection connecting arm (430).

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