Monitoring and control methods for bubbling devices, semiconductor process equipment and storage media

Abstract

This application discloses a monitoring and control method for a bubbler, semiconductor process equipment, and a storage medium. The method includes: before the current furnace process is executed, acquiring a low liquid level feedback signal output by the bubbler's liquid level sensor; if the low liquid level feedback signal is a normal liquid level signal, determining the remaining amount of liquid in the bubbler based on the consumption of liquid in the bubbler; if the remaining amount of liquid is lower than a preset low liquid level remaining liquid level threshold, terminating the current furnace process and outputting an alarm message to prompt the user to check the bubbler. This application can timely and accurately monitor and capture situations where the liquid level is too low, avoiding the problem of multiple furnaces of products being scrapped due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, resulting in an actual low liquid level but a normal liquid level feedback signal.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and in particular relates to a monitoring and control method for a bubbler, semiconductor process equipment, and storage medium. Background Technology

[0002] Bubblers with high and low liquid levels, such as... Figure 1 As shown, the bubbler has two action signals: replenishment (DO) and growth (DO), and two feedback signals: low level (DI) and high level (DI). These are the low level feedback signal and the high level feedback signal, respectively. The two feedback signals are detected by two electrodes inside the tank. When the liquid level is normal, electrodes H+ and H- are not conducting, and the high level (DI) feedback signal is a normal (Normal) signal. Electrodes L+ and L- are conducting, and the low level (DI) feedback signal is a normal (Normal) signal. When the liquid level is too high, electrodes H+ and H- are conducting, and the high level (DI) feedback signal is a high (High) signal. When the liquid level is too low, electrodes L+ and L- are not conducting, and the low level (DI) feedback signal is a low (Low) signal.

[0003] In related technologies, the monitoring and control scheme for the bubbler in the entire process is as follows: (1) Before the process is executed, the low liquid level DI feedback signal is judged. When the low liquid level DI feedback signal is a low liquid level signal, the replenishment DO signal is set to Open for replenishment until the low liquid level DI feedback signal returns to the normal liquid level signal, and then the replenishment DO signal is set to Close. (2) During the process, the growth DO signal is set to Open to continuously supply gas to the process chamber. (3) After the process is completed, the growth DO signal is set to Close, and the same as in (1), the low liquid level DI feedback signal is used to determine whether replenishment is needed. (4) Other monitoring: In the entire process, the high liquid level DI feedback signal is monitored in real time. If it is a high liquid level signal, the process is terminated and an alarm message is output. However, when the liquid level is too low, due to the presence of air bubbles above the liquid source or damage to the liquid level sensor hardware, the electrodes L+ and L- may still show a conductive state. The DI feedback signal may still show a normal liquid level signal even when the liquid level is low, which may result in the failure to detect the low liquid level in time during the process, potentially causing multiple batches of products to be scrapped. Summary of the Invention

[0004] The purpose of this application is to provide a monitoring and control method for a bubbler, a semiconductor process equipment, and a storage medium to solve the problem in the related art where the presence of bubbles above the liquid source or damage to the liquid level sensor hardware leads to the liquid level sensor being unable to detect the liquid level being too low in a timely manner, which can easily cause multiple batches of products to be scrapped.

[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:

[0006] In a first aspect, embodiments of this application provide a monitoring and control method for a bubbler, comprising: before the current furnace process is executed, acquiring a low liquid level feedback signal output by the liquid level sensor of the bubbler; if the low liquid level feedback signal is a normal liquid level signal, determining the remaining amount of the liquid source in the bubbler based on the consumption of the liquid source in the bubbler; if the remaining amount of the liquid source is lower than a preset low liquid level liquid source remaining amount threshold, terminating the current furnace process flow and outputting alarm information to prompt the user to check the bubbler.

[0007] In a second aspect, embodiments of this application provide a semiconductor process apparatus, including: a bubbler and a monitoring and control device connected to the bubbler. The monitoring and control device includes at least one processor and at least one memory. The memory stores a computer program, and when the computer program is executed by the processor, it implements the steps of the monitoring and control method for the bubbler as described in the first aspect of this application.

[0008] Thirdly, embodiments of this application provide a readable storage medium storing a program or instructions that, when executed by a processor, implement the steps of the monitoring and control method for a bubbler as described in the first aspect of this application.

[0009] The above-described technical solutions adopted in the embodiments of this application can achieve the following beneficial effects:

[0010] In this embodiment of the application, when monitoring the bubbler, before the current furnace process is executed, a low liquid level feedback signal output by the liquid level sensor of the bubbler is obtained. If the low liquid level feedback signal is a normal liquid level signal, the remaining amount of the liquid source in the bubbler is determined according to the consumption of the liquid source in the bubbler. If the remaining amount of the liquid source is lower than a preset low liquid level liquid source remaining amount threshold, the current furnace process is terminated, and an alarm message is output to prompt the user to check the bubbler. In this embodiment, if a low liquid level feedback signal is detected as a normal liquid level signal before the process is executed, the remaining amount of liquid source is determined based on the consumption of liquid source in the bubbler. Then, by comparing whether the remaining amount of liquid source is lower than the preset low liquid level remaining amount threshold, it is determined whether the actual liquid level is too low. This can timely and accurately monitor and capture situations where the liquid level is too low, avoiding the problem of multiple batches of products being scrapped due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, even if the actual liquid level is too low but the low liquid level feedback signal is still a normal liquid level signal. Attached Figure Description

[0011] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0012] Figure 1 A schematic diagram of a bubbler with high and low liquid levels;

[0013] Figure 2 A flowchart illustrating a monitoring and control method for a bubbler, provided as an embodiment of this application;

[0014] Figure 3 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0015] Figure 4 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0016] Figure 5 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0017] Figure 6 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0018] Figure 7 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0019] Figure 8 A flowchart illustrating a monitoring and control method for a bubbler, provided for another embodiment of this application;

[0020] Figure 9 This is a schematic diagram of a semiconductor process apparatus provided in one embodiment of this application. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] The terms "first," "second," etc., used in this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein. Furthermore, "and / or" in this application indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship. It should be noted that all data involved in this application was obtained with the user's authorization.

[0023] Figure 1 The bubbler shown, with its high and low liquid level type, has two action signals: replenishment DO and growth DO. It also has two feedback signals: low liquid level DI and high liquid level DI, i.e., low liquid level feedback signal and high liquid level feedback signal. These four signals are shown in Table 1 below:

[0024] Table 1 Definitions of Action Signals and Feedback Signals

[0025] DO (Doxorubicin) Close: 0, Open: 1 Growth DO Close: 0, Open: 1 Low liquid level DI Normal: 0, Low: 1 DI level too high High:0, Normal:1

[0026] The bubbler's two feedback signals, Low Level (DI) and High Level (DI), are detected by two electrodes inside the tank. When the liquid level is normal, the high level electrodes H+ and H- are not conducting, and the High Level (DI) feedback signal is a Normal signal (Feedback 1). When the liquid level is too high, the high level electrodes H+ and H- are conducting, and the High Level (DI) feedback signal is a High signal (Feedback 0). Similarly, when the liquid level is normal, the low level electrodes L+ and L- are conducting, and the Low Level (DI) feedback signal is a Normal signal (Feedback 0). When the liquid level is too low, the low level electrodes L+ and L- are not conducting, and the Low Level (DI) feedback signal is a Low signal (Feedback 1).

[0027] In related technologies, the monitoring and control scheme for the bubbler throughout the entire process is as follows:

[0028] (1) Before the process is executed, determine the low liquid level DI feedback signal. When the low liquid level DI feedback signal is a low liquid level signal, set the replenishment DO signal to Open to replenish the liquid until the low liquid level DI feedback signal returns to the normal liquid level signal, and then set the replenishment DO signal to Close.

[0029] (2) During the process execution, the growth DO signal is set to Open to continuously supply gas to the process chamber.

[0030] (3) After the process is completed, set the growth DO signal to Close, the same as (1), and determine whether liquid needs to be replenished by the DI feedback signal when the liquid level is low.

[0031] (4) Other monitoring: Throughout the entire process, the DI feedback signal for excessive liquid level is monitored in real time. If the signal is excessive liquid level, the process is terminated and an alarm message is output.

[0032] However, in the above-mentioned solutions, when the liquid level is too low, due to the presence of air bubbles above the liquid source or damage to the liquid level sensor hardware, the low liquid level electrodes L+ and L- may still show a conductive state. The low liquid level DI feedback signal may still indicate a normal liquid level, causing the liquid level sensor to fail to detect the low liquid level in time during the process, potentially leading to the scrapping of multiple batches of products. Therefore, this application proposes a bubbler monitoring and control method, semiconductor process equipment, and storage medium that can timely and accurately monitor and capture low liquid levels. This avoids the problem of the liquid level sensor failing to detect low liquid levels in time due to the presence of air bubbles above the liquid source or damage to the liquid level sensor hardware, resulting in the actual liquid level being too low, but the low liquid level feedback signal still indicating a normal liquid level, thus preventing the scrapping of multiple batches of products.

[0033] The technical solutions provided by the various embodiments of this application are described in detail below with reference to the accompanying drawings.

[0034] Figure 2 This is a flowchart illustrating a monitoring and control method for a bubbler, provided as an embodiment of this application. Figure 2 As shown, the monitoring and control method for the bubbling device in this application embodiment may specifically include the following steps:

[0035] S201, before the current furnace process is executed, acquire the low liquid level feedback signal output by the liquid level sensor of the bubbler.

[0036] In this embodiment of the application, the main body executing the monitoring and control method of the bubbler is the monitoring and control device of the bubbler. The monitoring and control device can be installed in semiconductor process equipment with a bubbler, such as vertical furnace equipment used to produce semiconductor devices such as silicon wafers.

[0037] In this embodiment, the entire process flow is divided into three stages: before process execution, during process execution, and after process execution. For multi-furnace processes, each furnace process flow is divided into the above three stages. Taking the current furnace process flow as an example, the current furnace process flow is divided into three stages: before current furnace process execution, during current furnace process execution, and after current furnace process execution.

[0038] Before the current furnace process is executed, the low liquid level feedback signal output by the bubbler's liquid level sensor (i.e., the low liquid level DI feedback signal) is obtained.

[0039] It should be noted that since the bubbler contains a liquid source but produces a gas-liquid mixture, the consumption rate cannot be accurately predicted. Therefore, a liquid level sensor is needed to measure the liquid level.

[0040] S202, if the low liquid level feedback signal is a normal liquid level signal, then determine the remaining amount of liquid in the bubbler based on the amount of liquid consumed in the bubbler.

[0041] In this embodiment, the low liquid level feedback signal can be determined as either a normal liquid level signal or an excessively low liquid level signal based on its value or content. For example, if the low liquid level feedback signal has a value of 0 or a content of "Normal," it is determined to be a normal liquid level signal. If the low liquid level feedback signal has a value of 1 or a content of "Low," it is determined to be an excessively low liquid level signal.

[0042] When it is determined that the low liquid level feedback signal is a normal liquid level signal, considering the presence of air bubbles above the liquid source or damage to the liquid level sensor hardware, the actual liquid level may be too low, but the low liquid level feedback signal may still be a normal liquid level signal. In order to accurately determine whether the actual liquid level is normal or too low, the remaining amount of liquid source in the bubbler can be determined based on the amount of liquid consumed in the bubbler.

[0043] Taking a trichlorosilane (TCS) bubbler as an example, the liquid source TCS inside the bubbler is in a liquid state at room temperature. During process execution, carrier gas is introduced into the bubbler, TCS vaporizes, the growth DO signal is activated, and gaseous TCS flows into the process chamber. According to theoretical calculations, X mass of TCS mixed with carrier gas can produce Y volume of gas (Y = αX, where α is determined by the type of liquid source and carrier gas). Therefore, the amount of liquid consumed in the bubbler can be evaluated by the amount of gaseous TCS consumed, and then the remaining amount of liquid source in the bubbler can be evaluated.

[0044] S203, if the remaining liquid level is lower than the preset low liquid level remaining liquid level threshold, the current furnace process is terminated, and an alarm message is output to prompt the user to check the bubbler. The low liquid level remaining liquid level threshold is the remaining liquid level corresponding to the low liquid level threshold of the liquid level sensor.

[0045] In this embodiment of the application, the preset low liquid level remaining liquid source threshold is the remaining liquid source corresponding to the low liquid level threshold of the bubbler's liquid level sensor, and the low liquid level threshold is the liquid level corresponding to the low liquid level electrodes L+ and L- of the liquid level sensor.

[0046] If the remaining liquid level in the bubbler is lower than the preset low liquid level threshold, that is, the actual liquid level in the bubbler is lower than the low liquid level threshold, it means that although the low liquid level feedback signal is a normal liquid level signal, the actual liquid level is too low. At this time, there may be a problem with the liquid level sensor hardware. Therefore, the current furnace process should be terminated and an alarm message should be output to prompt the user to check the bubbler.

[0047] In summary, the bubbler monitoring and control method of this application embodiment, when monitoring the bubbler, obtains the low liquid level feedback signal output by the liquid level sensor of the bubbler before the current furnace process is executed. If the low liquid level feedback signal is a normal liquid level signal, the remaining amount of liquid in the bubbler is determined according to the consumption of liquid in the bubbler. If the remaining amount of liquid is lower than the preset low liquid level liquid remaining amount threshold, the current furnace process is terminated, and an alarm message is output to prompt the user to check the bubbler. In this embodiment, if a low liquid level feedback signal is detected as a normal liquid level signal before the process is executed, the remaining amount of liquid source is determined based on the consumption of liquid source in the bubbler. Then, by comparing whether the remaining amount of liquid source is lower than the preset low liquid level remaining amount threshold, it is determined whether the actual liquid level is too low. This can timely and accurately monitor and capture situations where the liquid level is too low, avoiding the problem of multiple batches of products being scrapped due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, even if the actual liquid level is too low but the low liquid level feedback signal is still a normal liquid level signal.

[0048] Figure 3 This is a flowchart illustrating a monitoring and control method for a bubbler, provided as another embodiment of this application. Figure 3 As shown, in Figure 2 Based on the illustrated embodiment, the monitoring and control method for the bubbling device in this application may specifically include the following steps:

[0049] S301, before the current furnace process is executed, acquire the low liquid level feedback signal output by the liquid level sensor of the bubbler.

[0050] In this embodiment of the application, step S301 is the same as step S101 in the above embodiment, and will not be described again here.

[0051] The step S102 in the above embodiment, "If the low liquid level feedback signal is a normal liquid level signal, then determine the remaining amount of liquid in the bubbler based on the amount of liquid consumed in the bubbler", may specifically include the following steps S302-S304.

[0052] S302, if the low liquid level feedback signal is a normal liquid level signal, then obtain the current low liquid level consumption threshold A of the liquid source. max and the maximum consumption of a single furnace process maxDetermine whether the sum of the first consumption M and the second consumption a of the liquid source is greater than the consumption alarm threshold, which is the low liquid level consumption threshold A of the liquid source. max and the maximum consumption of a single furnace process max The sum of the values, the first consumption M is the cumulative consumption of the liquid source after the bubbler has been injected most recently, and the second consumption a is the consumption of the liquid source required to execute the current furnace process.

[0053] In this application embodiment, the following parameters are defined:

[0054] The first consumption, M, is the cumulative consumption of the process liquid source TCS after the bubbler's most recent liquid injection, denoted as M. It is automatically updated after each furnace process is completed or when liquid injection is finished.

[0055] The second consumption amount 'a' is the amount of liquid source consumed to execute the current furnace process. In this embodiment, it is assumed to be consistent with the actual consumption of liquid source during the operation of the current furnace process. It can be obtained by calculating the product of the flow rate of liquid source TCS and the opening time of growth valve, and is denoted as 'a'.

[0056] Maximum consumption of single furnace process a max Let be the maximum TCS consumption of the liquid source among all the furnace processes that are currently in operation, which is the maximum value among the multiple 'a' values ​​corresponding to the multiple furnace processes that are currently in operation, denoted as 'a'. max Its initial value, which is the value before the first furnace process is executed, is preset by the user based on experience, and is updated after each furnace process is completed.

[0057] Low liquid level consumption threshold A max This is the threshold value for the liquid source TCS consumption from the completion of the most recent liquid injection by the bubbler until the next low liquid level feedback signal (i.e., a low liquid level DI feedback signal) is obtained, which is a low liquid level signal. Its initial value, i.e., the value before the first batch of process execution, is preset by the user based on experience. Subsequently, during the execution of each batch of process flow, if a low liquid level feedback signal (i.e., a low liquid level DI feedback signal) is detected, this low liquid level consumption threshold A is updated. max If no low liquid level feedback signal is detected (i.e., the liquid level is lower than the DI feedback signal), it remains unchanged.

[0058] It should be noted here that, since the low liquid level DI feedback signal is an early warning from the bubbler itself, the process results for the next heat can meet the requirements when the initial alarm is triggered. However, if the actual liquid level remains below the level of one heat and liquid has not been injected, the subsequent process results will gradually deteriorate. This means the bubbler has a one-heat threshold tolerance. Therefore, under the condition that the process conditions are met, the maximum consumption of the liquid source TCS after the bubbler completes liquid injection is A. max +a max This will be used as the consumption alarm threshold.

[0059] When the software in the monitoring and control device is used for the first time, it initializes the first consumption quantity M to 0 and sets the low liquid level consumption threshold A to 0. max Initialize to an empirical value, such as A. max ', the maximum consumption of a single furnace process max Initialize to an empirical value, such as a max '.

[0060] If the low liquid level feedback signal is a normal liquid level signal, then determine whether M+a is greater than A at this time. max +a max .

[0061] S303, if the amount of liquid consumed exceeds the consumption alarm threshold, then it is determined that the remaining amount of liquid source is lower than the low liquid level liquid source remaining amount threshold.

[0062] In this embodiment of the application, if M+a>A max +a max If the remaining amount of liquid in the bubbler is lower than the threshold for the remaining amount of liquid in the low-level liquid source, then it is determined that the remaining amount of liquid in the bubbler is lower than the threshold for the remaining amount of liquid in the low-level liquid source.

[0063] S304, if the remaining amount of liquid source is equal to or less than the consumption alarm threshold, then the remaining amount of liquid source is determined to be equal to or higher than the low liquid level liquid source remaining amount threshold.

[0064] In this embodiment of the application, if M+a≤A max +a max If so, the remaining amount of liquid source in the bubbler is determined to be equal to or higher than the threshold of the remaining amount of liquid source at the low liquid level.

[0065] S305, if the remaining liquid level is lower than the preset low liquid level remaining liquid level threshold, the current furnace process is terminated, and an alarm message is output to prompt the user to check the bubbler. The low liquid level remaining liquid level threshold is the remaining liquid level corresponding to the low liquid level threshold of the liquid level sensor.

[0066] In this embodiment of the application, step S305 is the same as step S103 in the above embodiment, and will not be described again here.

[0067] Furthermore, the monitoring and control method for the bubbling device in this application embodiment may further include the following steps:

[0068] S306 If the remaining amount of liquid source is equal to or higher than the low liquid level liquid source remaining amount threshold, then execute the current furnace process.

[0069] In this embodiment of the application, if the remaining amount of liquid source in the bubbler is equal to or higher than the preset low liquid level liquid source remaining amount threshold, that is, the actual liquid level of the liquid source in the bubbler is equal to or higher than the low liquid level threshold, it means that the low liquid level feedback signal is a normal liquid level signal and the actual liquid level is also normal. Therefore, the current furnace process can continue to be executed, that is, the current furnace process is entered during the current furnace process execution period.

[0070] Furthermore, the monitoring and control method for the bubbling device in this application embodiment may further include the following steps:

[0071] S307 If the low liquid level feedback signal is a low liquid level signal, set the first consumption M to 0, replenish the bubbler with liquid until the low liquid level feedback signal is a normal liquid level signal, stop replenishing liquid, and execute the current furnace process.

[0072] In this embodiment of the application, if the low liquid level feedback signal obtained in step S301 is a low liquid level signal, then the first consumption M is cleared to zero, that is, M=0 is set, the replenishment DO signal is set to Open, and replenishment of liquid to the bubbler begins until the low liquid level feedback signal recovers to a normal liquid level signal. Then, the replenishment DO signal is set to Close, and replenishment of liquid to the bubbler is stopped. At this time, the low liquid level feedback signal is a normal liquid level signal, and the actual liquid level is also normal. Therefore, the current furnace process can continue to be executed, that is, the current furnace process execution period is entered, and the current furnace process is executed.

[0073] It should be noted that during the replenishment of the bubbler, if the replenishment time exceeds the preset replenishment time threshold, the low liquid level feedback signal will still be a low liquid level signal. In this case, replenishment will be stopped, the current furnace process will be terminated, and an alarm message will be output to prompt the user to check the bubbler.

[0074] To clearly illustrate the specific process of the bubbler monitoring and control method of this application embodiment before the current furnace process is executed, the following is combined with... Figure 4 Provide a detailed description. For example... Figure 4 As shown, the monitoring and control method for a bubbler according to an embodiment of this application includes:

[0075] S401, before the current furnace process is executed, acquire the low liquid level DI feedback signal output by the liquid level sensor of the bubbler.

[0076] S402, determine whether the low liquid level DI feedback signal is Normal. If yes, proceed to step S403. If no, proceed to step S406.

[0077] S403, Determine whether M+a>A max +a maxIf yes, proceed to step S404. If no, proceed to step S405.

[0078] S404, terminate the current furnace process and output an alarm message.

[0079] S405, execute the current furnace process.

[0080] S406, set M=0, set the DO signal for replenishment to Open, and start replenishing the bubbler.

[0081] S407, determine whether the low liquid level DI feedback signal is Normal. If not, proceed to step S408. If yes, proceed to step S410.

[0082] S408, determine whether the fluid resuscitation time exceeds the preset fluid resuscitation time threshold. If not, return to step S407. If yes, proceed to step S409.

[0083] S409, set the liquid replenishment DO signal to Close, stop liquid replenishment, terminate the current furnace process, and output alarm information.

[0084] S410, set the liquid replenishment DO signal to Close, stop liquid replenishment, and execute the current furnace process.

[0085] Furthermore, the monitoring and control method for the bubbler in this application embodiment may also include: setting the growth DO signal to Open during the current furnace process execution, and continuously supplying gas to the process chamber.

[0086] Furthermore, such as Figure 5 As shown, after the current furnace process is completed, the monitoring and control method for the bubbler in this embodiment of the application may further include the following steps:

[0087] S501, after the current furnace process is completed, the maximum consumption a for a single furnace process is re-determined. max And the first consumption amount M.

[0088] In this embodiment of the application, the maximum consumption a of a single furnace process is redefined. max The first consumption amount M may specifically include the following steps: if the second consumption amount a is greater than the maximum consumption amount a of a single furnace process max Then the maximum consumption of a single furnace process will be a max Update to the second consumption amount 'a'; if the second consumption amount 'a' is equal to or less than the maximum consumption amount 'a' of a single furnace process. max Then maintain the maximum consumption a of the single furnace process max Unchanged; update the first consumption M to the sum of the first consumption M and the second consumption a.

[0089] Specifically, after the current furnace process is completed, the maximum consumption 'a' of the single furnace process is re-determined. max That is, to determine the values ​​of a and a at this time. max , if a>a max Then a will be the new a. max That is, setting a max =a; if a≤a max Then keep a max No change. Redetermine the first consumption amount M, that is, accumulate the 'a' corresponding to the current furnace process into M as the new M, that is, set M = M + a.

[0090] S502, acquires low liquid level feedback signal.

[0091] S503, if the low liquid level feedback signal is a normal liquid level signal, then the current furnace process will end.

[0092] In this embodiment of the application, as described in the above embodiment, since the bubbler has a one-furnace threshold tolerance, if the low liquid level feedback signal is a normal liquid level signal, it will no longer proceed as before the current furnace process is executed (it will no longer continue to determine whether M+a is greater than A). max +a max Instead of directly ending the current furnace process flow, it will terminate normally.

[0093] S504 If the low liquid level feedback signal is a low liquid level signal, then set the first consumption M to 0, replenish the bubbler with liquid until the low liquid level feedback signal is a normal liquid level signal, then stop replenishing liquid and end the current furnace process.

[0094] In this embodiment of the application, step S504 is similar to step S307 before the current furnace process is executed, except that after the liquid replenishment is stopped, the current furnace process is no longer executed, but the current furnace process flow is terminated.

[0095] Similarly, during the replenishment of the bubbler, if the replenishment time exceeds the preset replenishment time threshold, the low liquid level feedback signal will still be a low liquid level signal. In this case, replenishment will be stopped, the current furnace process will be terminated, and an alarm message will be output to prompt the user to check the bubbler.

[0096] To clearly illustrate the specific process of the bubbler monitoring and control method of this application embodiment after the current furnace process is completed, the following is combined with... Figure 6 Provide a detailed description. For example... Figure 6 As shown, the monitoring and control method for a bubbler according to an embodiment of this application includes:

[0097] S601, after the current furnace process is completed, set M = M + a.

[0098] S602, Determine whether a > amax If yes, proceed to step S603. If no, proceed to step S604.

[0099] S603, set a max =a. Continue to step S605.

[0100] S604, keep a max No change. Proceed to step S605.

[0101] S605, acquire the low liquid level DI feedback signal output by the liquid level sensor of the bubbler.

[0102] S606, determine whether the low liquid level DI feedback signal is Normal. If yes, proceed to step S607. If no, proceed to step S608.

[0103] S607, the current furnace process flow is terminated normally.

[0104] S608, set M=0, set the DO signal for replenishment to Open, and start replenishing the bubbler.

[0105] S609, determine whether the low liquid level DI feedback signal is Normal. If not, proceed to step S610. If yes, proceed to step S612.

[0106] S610, determine whether the fluid resuscitation time exceeds the preset fluid resuscitation time threshold. If not, return to step S609. If yes, proceed to step S611.

[0107] S611, set the liquid replenishment DO signal to Close, stop liquid replenishment, terminate the current furnace process, and output alarm information.

[0108] S612, set the liquid replenishment DO signal to Close to stop liquid replenishment and end the current furnace process.

[0109] Furthermore, such as Figure 7 As shown, the monitoring and control method for the bubbling device in this application embodiment further includes the following update A. max Steps:

[0110] S701, before and after the current furnace process is executed, after stopping the replenishment, increment the number of times the liquid has been added by one.

[0111] In this embodiment of the application, a parameter can also be defined: the number of times the liquid has been injected n, which is the number of times the liquid has been injected after the software in the monitoring and control device is started, and the number of times the liquid has been injected n is initialized to 0 when the software is started.

[0112] If there is a liquid replenishment process before the current furnace process is executed, then after the liquid replenishment is stopped, the number of liquid replenishment n is incremented by one, that is, n = n + 1 is set.

[0113] Similarly, after the current furnace process is completed, if there is a liquid replenishment process, the number of liquid replenishments n is incremented by one after the liquid replenishment is stopped, that is, n = n + 1 is set.

[0114] S702 acquires low liquid level feedback signals in real time during the current furnace process.

[0115] In the embodiments of this application, low liquid level feedback signals are acquired in real time during three stages: before the current furnace process is executed, during the current furnace process, and after the current furnace process is executed.

[0116] S703, if the low liquid level feedback signal is a low liquid level signal, then obtain the fourth consumption amount a' of the liquid source. The fourth consumption amount a' is the liquid source consumption amount up to the current moment when the current furnace process is executed.

[0117] In this embodiment of the application, as long as the low liquid level feedback signal is detected as an excessively low liquid level signal, A is updated. max Specifically, obtain the amount of liquid source TCS consumed from the start of the current furnace process to the current moment, denoted as a'.

[0118] S704, based on the number of injections n, the first consumption M, and the fourth consumption a', set the low liquid level consumption threshold A. max Update.

[0119] In this embodiment of the application, the low liquid level consumption threshold A can be determined using the following formula. max Update:

[0120] A max '=(nA) max +M+a') / (n+1);

[0121] Among them, A max ' represents the updated low liquid level consumption threshold, A max The previous low liquid level consumption threshold.

[0122] That is, setting A max =(nA max +M+a') / (n+1).

[0123] It should be noted here that, because the bubbler has a process tolerance of 1 furnace when it detects a low liquid level feedback signal as an excessively low liquid level signal, the process of the current furnace will continue to be executed until the end after the low liquid level feedback signal is detected during the current furnace process.

[0124] To clearly illustrate the specific process of the bubbler monitoring and control method of this application embodiment in a multi-furnace process, the following is combined with... Figure 8 An exemplary description is provided. For example... Figure 8 As shown, the monitoring and control method for a bubbler according to an embodiment of this application includes:

[0125] Initialize the first consumption M and the number of injections n to 0, and set the low liquid level consumption threshold A. max Initialize to an empirical value A max ', the maximum consumption of a single furnace process max Initialize to an empirical value a max '.

[0126] S801, before the first furnace process is executed, the liquid level is low and the DI feedback signal is Normal. It is determined that M+a (at this time, a is denoted as a1) (at this time, M+a=0+a1=a1) is less than A. max +a max (At this time A) max +a max =A max '+a max Therefore, the first furnace process was started.

[0127] S802, During the execution of the first furnace process, the first furnace process is executed.

[0128] S803, after the first furnace process is completed, set M = M + a = M + a1 (at this time, a is denoted as a1) = a1, and determine whether a (at this time, a is denoted as a1) is greater than a. max (at this time it is a) max '), then a max =a1, at this time the liquid level is low and the DI feedback signal is Normal.

[0129] S804, before the second furnace process is executed, the liquid level is low and the DI feedback signal is Normal. It is determined that M+a (at this time, a is denoted as a2) (at this time, M+a=a1+a2=a1+a2) is less than A. max +a max (At this time A) max +a max =A max '+a1), therefore the second furnace process is started.

[0130] S805, During the second furnace process execution, the second furnace process is executed.

[0131] S806, after the second furnace process is completed, set M = M + a = M + a2 (at this time, a is denoted as a2) = a1 + a2, and determine whether a (at this time, a is denoted as a2) is greater than a. max (At this point, it is a1), then amax =a2, at this time the liquid level is low and the DI feedback signal is Normal.

[0132] S807, before the third furnace process is executed, the liquid level is low and the DI feedback signal is Normal. It is determined that M+a (at this time, a is denoted as a3) (at this time, M+a=a1+a2+a3=a1+a2+a3) is less than A. max +a max (At this time A) max +a max =A max '+a2), therefore the third furnace process is started.

[0133] S808, During the execution of the third furnace process, the third furnace process is executed, and an alarm occurs during the process. From the start of the third furnace process to the alarm time, the cumulative TCS consumption is recorded as a', the number of injections n is 0, and A is updated. max =(0*A max +M+a') / (0+1)=a1+a2+a'. Because the bubbler detects a low liquid level feedback signal as an excessively low liquid level signal, it has the tolerance of one furnace process, so the third furnace process continues until the end.

[0134] S809, after the third furnace process is completed, set M = M + a = M + a3 (at this time, a is denoted as a3) = a1 + a2 + a3, and determine whether a (at this time, a is denoted as a3) is less than a. max (At this point, it is a2), then a max =a2; At this point, the liquid level is low, and the DI feedback signal is Low. Set M=0, set the DO signal for liquid replenishment to Open to begin liquid replenishment, and wait for the liquid injection to complete before setting n=n+1. A similar cyclic process will then continue.

[0135] In summary, the bubbler monitoring and control method of this application, before process execution, if the low liquid level feedback signal is detected as a normal liquid level signal, determines the remaining liquid source based on the consumption of liquid source in the bubbler. Then, by comparing whether the remaining liquid source is lower than a preset low liquid level remaining liquid source threshold, it determines whether the actual liquid level is too low. This allows for timely and accurate monitoring and detection of low liquid levels, avoiding situations where the actual liquid level is too low due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, but the low liquid level feedback signal is still a normal liquid level signal, preventing the liquid level sensor from detecting the low liquid level in time and potentially causing multiple batches of products to be scrapped. During the replenishment process, if the replenishment time exceeds the replenishment time threshold and the low liquid level feedback signal is still a low liquid level signal, replenishment is stopped and an alarm message is output, preventing over-replenishment and facilitating timely detection of liquid level sensor malfunctions. During process execution, the low liquid level feedback signal is monitored in real time, and A is updated when the low liquid level feedback signal is a low liquid level signal.max This enables subsequent actions based on A max The consumption assessment is more accurate.

[0136] This application also provides a semiconductor process apparatus. For example... Figure 9 As shown, the semiconductor process equipment 900 includes: a bubbler 901 and a monitoring and control device 902 connected to the bubbler 901. The monitoring and control device 902 includes at least one processor and at least one memory. The memory stores a computer program, which, when executed by the processor, is used to implement the steps of any of the bubbler monitoring and control method embodiments described above.

[0137] In the semiconductor process equipment of this application embodiment, if a low liquid level feedback signal is detected as a normal liquid level signal before process execution, the remaining liquid level is determined based on the consumption of liquid in the bubbler. Then, by comparing the remaining liquid level with a preset low liquid level remaining liquid level threshold, the actual liquid level is determined to be too low. This allows for timely and accurate monitoring and detection of low liquid levels, avoiding situations where the actual liquid level is too low due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, even though the low liquid level feedback signal is still a normal liquid level signal. This prevents the liquid level sensor from detecting the low liquid level in time, potentially leading to the scrapping of multiple batches of products. During replenishment, if the replenishment time exceeds the replenishment time threshold and the low liquid level feedback signal is still a low liquid level signal, replenishment is stopped and an alarm message is output. This avoids over-replenishment and facilitates timely detection of liquid level sensor malfunctions. During process execution, the low liquid level feedback signal is monitored in real time, and A is updated when the low liquid level feedback signal becomes a low liquid level signal. max This enables subsequent actions based on A max The consumption assessment is more accurate.

[0138] This application also proposes a readable storage medium storing one or more computer programs, the one or more computer programs including instructions. When the program or instructions are executed by a processor in a semiconductor process apparatus including multiple applications, the processor in the semiconductor process apparatus is able to execute the various processes of the above-described bubble monitoring and control method embodiments, and is specifically used to execute the steps of any of the above-described bubble monitoring and control method embodiments.

[0139] The readable storage medium of this application embodiment, before process execution, if the low liquid level feedback signal is detected as a normal liquid level signal, determines the remaining liquid level based on the consumption of liquid in the bubbler. Then, by comparing whether the remaining liquid level is lower than a preset low liquid level remaining liquid level threshold, it determines whether the actual liquid level is too low. This allows for timely and accurate monitoring and detection of low liquid levels, avoiding situations where the actual liquid level is too low due to the presence of bubbles above the liquid source or damage to the liquid level sensor hardware, but the low liquid level feedback signal remains a normal liquid level signal, preventing the liquid level sensor from detecting the low liquid level in time and potentially causing multiple batches of products to be scrapped. During the replenishment process, if the replenishment time exceeds the replenishment time threshold and the low liquid level feedback signal is still a low liquid level signal, replenishment is stopped and an alarm message is output. This avoids over-replenishment and facilitates timely detection of liquid level sensor malfunctions. During process execution, the low liquid level feedback signal is monitored in real time, and A is updated when the low liquid level feedback signal becomes a low liquid level signal. max This enables subsequent actions based on A max The consumption assessment is more accurate.

[0140] The systems, devices, modules, or units described in the above embodiments can be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, a computer can be, for example, a personal computer, laptop computer, cellular phone, camera phone, smartphone, personal digital assistant, media player, navigation device, email device, game console, tablet computer, wearable device, or any combination of these devices.

[0141] For ease of description, the above devices are described separately by function as various units. Of course, in implementing this application, the functions of each unit can be implemented in one or more software and / or hardware.

[0142] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0143] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0144] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0145] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0146] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0147] Memory may include non-persistent storage in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0148] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0149] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0150] This application can be described in the general context of computer-executable instructions, such as program modules, that are executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc., that perform a specific task or implement a specific abstract data type. This application can also be practiced in distributed computing environments where tasks are performed by remote processing devices connected via a communication network. In distributed computing environments, program modules can reside in local and remote computer storage media, including storage devices.

[0151] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

[0152] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A monitoring and control method for a bubbler, characterized in that, include: Before the current furnace process is executed, the low liquid level feedback signal output by the liquid level sensor of the bubbler is obtained; If the low liquid level feedback signal is a normal liquid level signal, then the remaining amount of liquid in the bubbler is determined based on the amount of liquid consumed in the bubbler. If the remaining amount of the liquid source is lower than the preset low liquid level liquid source remaining amount threshold, the current furnace process is terminated, and an alarm message is output to prompt the user to check the bubbler. The low liquid level liquid source remaining amount threshold is the remaining amount of liquid source corresponding to the low liquid level threshold of the liquid level sensor. Determining the remaining amount of liquid source in the bubbler based on the consumption of liquid source in the bubbler includes: Obtain the current low liquid level consumption threshold A of the liquid source. max and the maximum consumption of a single furnace process max ; Determine whether the sum of the first consumption M and the second consumption a of the liquid source is greater than the consumption alarm threshold, wherein the consumption alarm threshold is the low liquid level consumption threshold A. max and the maximum consumption a of the single furnace process max The sum of the values, the first consumption M is the cumulative consumption of the liquid source after the bubbler has been injected most recently, and the second consumption a is the consumption of the liquid source required to execute the current furnace process; If the remaining amount is greater than the consumption alarm threshold, then it is determined that the remaining amount of the liquid source is lower than the low liquid level liquid source remaining amount threshold. If the remaining amount of liquid is equal to or less than the consumption alarm threshold, then the remaining amount of liquid source is determined to be equal to or higher than the low liquid level liquid source remaining amount threshold.

2. The method according to claim 1, characterized in that, Also includes: If the remaining amount of the liquid source is equal to or higher than the low liquid level liquid source remaining amount threshold, then the current furnace process is executed.

3. The method according to claim 1, characterized in that, Also includes: If the low liquid level feedback signal is a low liquid level signal, set the first consumption M to 0; The bubbler is replenished with liquid until the low liquid level feedback signal becomes a normal liquid level signal, at which point the replenishment is stopped. Execute the current furnace process.

4. The method according to claim 1, characterized in that, Also includes: After the current furnace process is completed, the maximum consumption a for the single furnace process is re-determined. max and the first consumption amount M; If the second consumption amount a is greater than the maximum consumption amount a of the single furnace process max Then the maximum consumption a of the single furnace process will be... max Updated to the second consumption amount a; if the second consumption amount a is equal to or less than the maximum consumption amount a of the single furnace process. max Then maintain the maximum consumption a of the single furnace process. max The first consumption amount M remains unchanged; the first consumption amount M is updated to the sum of the first consumption amount M and the second consumption amount a.

5. The method according to claim 1, characterized in that, After the current furnace process is completed, it also includes: Obtain the low liquid level feedback signal; If the low liquid level feedback signal is a normal liquid level signal, then the current furnace process will end. If the low liquid level feedback signal is a low liquid level signal, then the first consumption M is set to 0, and liquid is replenished to the bubbler until the low liquid level feedback signal is a normal liquid level signal, then the liquid replenishment is stopped and the current furnace process is terminated.

6. The method according to claim 3 or 5, characterized in that, Also includes: If the replenishment time exceeds the preset replenishment time threshold, and the low liquid level feedback signal is still a low liquid level signal, then replenishment will stop, the current furnace process will be terminated, and an alarm message will be output to prompt the user to check the bubbler.

7. The method according to claim 3 or 5, characterized in that, Also includes: After stopping the infusion, increment the number of infusions n by one; During the current furnace process, the low liquid level feedback signal is acquired in real time. If the low liquid level feedback signal is a low liquid level signal, then the fourth consumption amount a' of the liquid source is obtained, and the fourth consumption amount a' is the amount of liquid source consumed by the current furnace process up to the current moment. Based on the number of injections n, the first consumption M, and the fourth consumption a', the low liquid level consumption threshold A is determined. max Update.

8. The method according to claim 7, characterized in that, The low liquid level consumption threshold A is determined based on the number of injections n, the first consumption M, and the fourth consumption a'. max Updates will be made, including: The low liquid level consumption threshold A is calculated using the following formula. max Update: A max '=(nA) max +M+a') / (n+1); Among them, A max ' represents the updated low liquid level consumption threshold, A max The previous low liquid level consumption threshold.

9. A semiconductor process apparatus, characterized in that, include: A bubbler and a monitoring and control device connected to the bubbler, the monitoring and control device comprising at least one processor and at least one memory, the memory storing a computer program that, when executed by the processor, implements the steps of the method as described in any one of claims 1-8.

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