一种光模块电路板线路均匀性控制方法

By using a vacuum two-fluid circuit board etching system and high-precision exposure and development technology, the problem of circuit uniformity in optical module circuit boards was solved, improving circuit uniformity and the overall performance of the circuit board.

CN121442583BActive Publication Date: 2026-07-17INNO CIRCUITS LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INNO CIRCUITS LTD
Filing Date
2025-11-07
Publication Date
2026-07-17

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Abstract

一种光模块电路板线路均匀性控制方法，涉及电路板加工领域，包括以下步骤：线路前处理：清洗电路板表面脏污，并对电路板的铜基板进行表面氧化处理；在电路板表面覆盖一层超高解析干膜；曝光：将工程设计图形转移至铜基板上，利用高精度对位激光自动成像曝光对需要保留的图形线路曝光光固；显影：使用弱碱性药水将未曝光部分的干膜去除；蚀刻：使用真空二流体蚀刻系统对电路板进行腐蚀，方便药水进入电路板细小间距处，蚀刻底铜减小侧蚀，提高线宽一致性；剥膜：使用强碱性药水将固化干膜剥离，露出线路图形。本方法在蚀刻过程中将蚀刻液从电路板两侧吸取，使蚀刻液分布更加均匀，提高线路均匀性，具有较强的实用性。
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