SDBG laser stealth cutting apparatus and method

Abstract

The application relates to the technical field of cutting equipment, in particular to SDBG laser invisible cutting equipment and a cutting method. The technical scheme comprises a bottom plate, two groups of first linear motors are arranged in parallel on the top of the bottom plate, a second linear motor is arranged between the first moving ends of the two groups of first linear motors, a laser cutting module is arranged on the side of the second linear motor, a first compensation mechanism is arranged on the second moving end of the second linear motor, the first compensation mechanism is used for compensating the positioning deviation of the first linear motor, a second compensation mechanism is arranged on the side of the first compensation mechanism, and the second compensation mechanism is used for compensating the positioning deviation of the second linear motor. The positioning deviation of the first linear motor and the second linear motor can be accurately compensated, real-time detection feedback of a grating sensing unit is matched, the equipment breaks through the precision limitation of a traditional linear motor drive, and the high-precision cutting demand is met.

Description

Technical Field

[0001] This invention relates to the field of processing and transportation equipment technology, and in particular to an SDBG laser stealth cutting device and cutting method. Background Technology

[0002] In fields such as precision manufacturing, semiconductor processing, and display panel production, laser cutting technology has become an indispensable key process due to its advantages such as non-contact processing and small heat-affected zone. Among them, stealth cutting technology is widely used in high-precision processing of brittle materials (such as sapphire, silicon wafers, and glass) because it can achieve precise separation of the material's interior and effectively avoid problems such as edge damage and contamination caused by traditional cutting methods.

[0003] Existing laser stealth cutting equipment typically requires precise driving and positioning of the laser emitting component or the workpiece during cutting operations to ensure that the laser focus forms a continuous modified layer within the material according to a preset trajectory, ultimately achieving high-quality separation. Currently, the mainstream driving and positioning solutions in the industry mostly adopt linear motor systems. This system directly drives the moving parts through a motor, featuring fast response speed and stable operation.

[0004] However, as downstream applications demand increasingly higher cutting precision (such as semiconductor chip cutting, where precision requirements have reached the micrometer or even sub-micrometer level), existing equipment using linear motors for drive and positioning is gradually revealing its precision bottlenecks. Specifically, during operation, linear motors are limited by factors such as mechanical structure clearances, fluctuations in guide rail friction coefficients, electromagnetic interference from the motor itself, and external vibrations, making it difficult for their positioning accuracy to break through higher technical thresholds. Summary of the Invention

[0005] The purpose of this invention is to address the problems existing in the background technology by proposing an SDBG laser stealth cutting device and cutting method that can accurately compensate for the positioning deviation of the linear motor and, in conjunction with the real-time detection feedback of the grating sensing unit, enable the device to break through the precision limitations of traditional linear motor drives and meet the requirements of high-precision cutting.

[0006] In a first aspect, the present invention proposes an SDBG laser stealth cutting device, comprising a base plate, two sets of parallel first linear motors mounted on the top of the base plate, a second linear motor mounted between the first moving ends of the two sets of first linear motors, and a laser cutting module disposed on the side of the second linear motor; a first compensation mechanism mounted on the second moving end of the second linear motor, the first compensation mechanism being used to compensate for the positioning deviation of the first linear motor; a second compensation mechanism located on the side of the first compensation mechanism, the second compensation mechanism being used to compensate for the positioning deviation of the second linear motor; and a lifting assembly mounted on the side of the first compensation mechanism, the lifting assembly being used to drive the laser cutting module to move up and down for cutting.

[0007] Optionally, the first compensation mechanism includes at least two sets of first guide rails installed on the top of the second moving end. The first guide rails are arranged parallel to the first linear motor. Multiple sets of first sliders are slidably connected to the first guide rails. The multiple sets of first sliders are fixedly connected to a first moving plate. A first fixing plate is installed on the top of the first moving plate. A first threaded sleeve is fixedly connected to the first fixing plate. A first screw is threadedly connected to the first threaded sleeve. A second threaded rod is fixedly connected to the end of the first screw away from the laser cutting module. The first screw and the second threaded rod are coaxially arranged and have different pitches. A second threaded sleeve is threadedly connected to the second threaded rod. A second fixing plate is fixedly sleeved on the outer ring of the second threaded sleeve. The second fixing plate is fixedly connected to the second moving end.

[0008] Optionally, at least two sets of second guide rails are fixedly connected to the top of the first movable plate. The second guide rails are arranged parallel to the first guide rails. Multiple sets of second sliders are slidably connected on the second guide rails. The tops of the multiple sets of second sliders are fixedly connected to the second movable plate. A first servo motor is installed on the top of the second movable plate. The output end of the first servo motor is fixedly connected to the first screw.

[0009] Optionally, the second compensation mechanism comprises a fixing frame fixedly connected to the bottom of the first moving plate, the fixing frame is arranged in a "U" shape, the fixing frame is arranged on the side surface of the second moving end, a third fixing plate is fixedly connected in the fixing frame, a third threaded sleeve is installed in the third fixing plate, a third threaded rod is threadedly connected in the third threaded sleeve, one end of the third threaded rod is fixedly connected with a fourth threaded rod, the third threaded rod and the fourth threaded rod are arranged coaxially and have different pitches, a fourth threaded sleeve is threadedly connected on the fourth threaded rod, a fourth fixing plate is fixedly sleeved on the outer ring of the fourth threaded sleeve, one end of the fourth fixing plate away from the fixing frame is fixedly connected with a third moving plate, a plurality of sets of third guide rails are fixedly connected to the side of the fixing frame away from the second moving end, the third guide rails are arranged in parallel with the second linear motor, a plurality of sets of third sliders are slidably connected on the third guide rails, and the plurality of sets of third sliders are all fixedly connected with the third moving plate.

[0010] Optionally, at least two sets of fourth guide rails are fixedly connected in the fixing frame, the fourth guide rails are arranged in parallel with the third guide rails, a plurality of sets of fourth sliders are slidably connected on the fourth guide rails, a fourth moving plate is fixedly connected to the plurality of sets of fourth sliders together, a second servo motor is installed on the side surface of the fourth moving plate, and the second servo motor is fixedly connected with one end of the third threaded rod away from the fourth threaded rod.

[0011] Optionally, the lifting assembly comprises a connecting plate fixedly connected to the side of the third moving plate away from the fixing frame, four sets of fixing blocks are fixedly connected to the side of the connecting plate away from the third moving plate, two sets of limit rods are slidably connected in the four sets of fixing blocks, two ends of the two sets of limit rods are respectively and fixedly connected with synchronization blocks, a mounting plate is fixedly connected to the side of the two sets of synchronization blocks away from the connecting plate, and the laser cutting module is installed on the side surface of the mounting plate.

[0012] Optionally, a third servo motor is installed on the top of the upper set of synchronization blocks, the output end of the third servo motor penetrates through the synchronization block and is fixedly connected with a fifth threaded rod, the fifth threaded rod is rotatably connected between the two sets of synchronization blocks, a fifth threaded sleeve is threadedly connected on the fifth threaded rod, and the fifth threaded sleeve is fixedly connected between the four sets of fixing blocks.

[0013] Optionally, grating sensing units are provided on the side surfaces of both the first moving plate and the connecting plate.

[0014] Optionally, the device further comprises a control module installed on the top of the bottom plate, and the first linear motor, the second linear motor, the first servo motor, the second servo motor, the third servo motor, the laser cutting module and the grating sensing unit are all electrically connected with the control module.

[0015] In a second aspect, the present invention proposes a cutting method for an SDBG laser stealth cutting device, comprising the following steps: Step 1: The equipment is started. The control module controls the first linear motor and the second linear motor to perform preliminary large-range positioning according to the preset cutting trajectory. The first linear motor drives the first moving end to move the second linear motor along the first direction. The second linear motor then drives the first compensation mechanism, the second compensation mechanism, the lifting component and the laser cutting module along the second direction through the second moving end, so as to move the laser cutting module roughly to the vicinity of the position to be cut. Step two: The grating sensing unit on the side of the first moving plate detects the positioning deviation under the drive of the first linear motor in real time and transmits the signal to the control module; the grating sensing unit on the side of the connecting plate detects the positioning deviation under the drive of the second linear motor and also feeds the signal back to the control module. Step 3: When a positioning deviation is detected in the first linear motor, the control module controls the first servo motor in the first compensation mechanism to start. The first servo motor drives the first screw and the second threaded rod to rotate synchronously, thereby achieving minor compensation for the positioning deviation of the first linear motor. Step 4: When a positioning deviation is detected in the second linear motor, the control module starts the second servo motor of the second compensation mechanism to complete the compensation for the positioning deviation of the second linear motor. Step 5: The control module controls the third servo motor in the lifting assembly to start according to the thickness of the material to be cut, so as to drive the mounting plate and the laser cutting module to rise and fall, and adjust the laser cutting module to a suitable cutting height. Step six: The control module controls the laser cutting module to emit a laser to perform invisible cutting on the material.

[0016] In summary, this application includes at least one of the following beneficial technical effects: This invention can accurately compensate for the positioning deviations of the first and second linear motors. Combined with the real-time detection feedback of the grating sensing unit, it enables the equipment to break through the precision limitations of traditional linear motor drives and meet the requirements of high-precision cutting. The cooperation between the guide rails and the sliders reduces swaying and offset during movement, improving the consistency of cutting quality. The laser cutting module is height-adjustable, allowing for flexible adjustment of the cutting height according to the thickness of the material to be cut, making it suitable for processing materials of different specifications and expanding the application range of the equipment. The control module automatically controls the coordinated operation of each component, completing the entire automated operation from initial positioning and deviation compensation to cutting, reducing manual intervention and improving production efficiency and the stability of cutting accuracy. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of an SDBG laser stealth cutting device; Figure 2 for Figure 1Enlarged view of point A in the middle; Figure 3 This is a schematic diagram of the structure of the first compensation mechanism; Figure 4 for Figure 3 A frontal view diagram; Figure 5 This is a schematic cross-sectional view of the first compensation mechanism. Figure 6 This is a schematic cross-sectional view of the second compensation mechanism. Figure 7 This is a cross-sectional structural diagram of the lifting assembly.

[0018] Reference numerals: 1. Base plate; 2. First linear motor; 21. First moving end; 3. Second linear motor; 31. Second moving end; 4. First compensation mechanism; 41. First guide rail; 42. First slider; 43. First moving plate; 44. First fixed plate; 45. First threaded sleeve; 46. First screw; 47. Second threaded rod; 48. Second threaded sleeve; 49. Second fixed plate; 410. Second guide rail; 411. Second slider; 412. Second moving plate; 413. First servo motor; 5. Second compensation mechanism; 51. Fixed frame; 52. Third fixed plate; 53. Third threaded sleeve; 54. Third threaded rod; 55. Fourth threaded rod; 56. Fourth threaded sleeve; 57. Fourth fixed plate; 58. Third moving plate; 59. Third guide rail; 510. Third slider; 511. Fourth guide rail; 512. Fourth slider; 513. Fourth moving plate; 514. Second servo motor; 6. Lifting assembly; 61. Connecting plate; 62. Fixing block; 63. Limiting rod; 64. Synchronizing block; 65. Mounting plate; 66. Third servo motor; 67. Fifth threaded rod; 68. Fifth threaded sleeve; 7. Laser cutting module; 8. Grating sensing unit; 9. Control module. Detailed Implementation

[0019] The technical solution of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0020] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0021] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] In the description of this application, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0024] like Figure 1 and Figure 2 As shown, the present invention proposes an SDBG laser stealth cutting device, including a base plate 1, which serves as the basic load-bearing structure of the device and provides a stable installation platform for the entire device. Two sets of parallel first linear motors 2 are installed on the top of the base plate 1. A second linear motor 3 is installed between the first moving ends 21 of the two sets of first linear motors 2. The first linear motors 2 can drive the first moving ends 21 to drive the second linear motors 3 to move along a first direction, providing power for the large-scale movement of the device. The device also includes a laser cutting module 7 disposed on the side of the second linear motor 3. The laser cutting module 7 is used to emit an ultra-short pulse laser adapted to the SDBG process for cutting, which can achieve precise stealth cutting of materials.

[0025] For further details, please refer to Figures 2 to 5The aforementioned cutting equipment includes a first compensation mechanism 4 mounted on the second moving end 31 of the second linear motor 3. The first compensation mechanism 4 compensates for the positioning deviation of the first linear motor 2, improving the positioning accuracy of the equipment in the first direction and ensuring that the SDBG laser focus can accurately act on the material along a preset trajectory. The first compensation mechanism 4 includes two sets of first guide rails 41 mounted on the top of the second moving end 31. The first guide rails 41 are arranged parallel to the first linear motor 2. Two sets of first sliders 42 are slidably connected to the first guide rails 41. The cooperation of the first guide rails 41 and the first sliders 42 provides guidance and support for the movement of the first moving plate 43, ensuring its linearity. The four sets of first sliders 42 are fixedly connected to the first moving plate 43. The first moving plate 43 moves smoothly through the limiting action of the first guide rails 41 and the first sliders 42, stably supporting the components above and moving accordingly. A first fixed plate 44 is mounted on the top of the first moving plate 43. When the first fixed plate 44 moves, it drives the first moving plate 43 to move synchronously, serving to connect and transmit power. A first threaded sleeve 45 is fixedly connected to the first fixed plate 44. When the first threaded sleeve 45 moves, it drives the first moving plate 43 to move via the first fixed plate 44, converting the rotational motion of the first screw 46 into linear motion and transmitting it to the first moving plate 43. The first threaded sleeve 45 is threadedly connected to the first screw 46. When the first screw 46 rotates, it drives the first threaded sleeve 45 to move along the length of the first screw 46, providing precise driving force for the movement of the first moving plate 43. A second threaded rod 47 is fixedly connected to the end of the first screw 46 away from the laser cutting module 7. When the first screw 46 rotates, it drives the second threaded rod 47 to rotate synchronously. The two work together to achieve micro-displacement adjustment, ensuring sub-micron-level focus positioning of the SDBG laser. A second threaded sleeve 48 is threadedly connected to the second threaded rod 47. A second fixed plate 49 is fixedly fitted around the outer ring of the second threaded sleeve 48. The second fixed plate 49 is fixedly connected to the second moving end 31. The positions of the second threaded sleeve 48 and the second fixed plate 49 are fixed, providing stable support and positioning for the rotation and movement of the second threaded rod 47. The second threaded rod 47 moves along its own length direction when rotating. Two sets of second guide rails 410 are fixedly connected to the top of the first moving plate 43. The second guide rails 410 are arranged parallel to the first guide rails 41. Two sets of second sliders 411 are slidably connected to the second guide rails 410. The cooperation of the second guide rails 410 and the second sliders 411 provides guidance for the movement of the first servo motor 413, ensuring its smooth movement. The tops of the four sets of second sliders 411 are all fixedly connected to the second moving plate 412. The second moving plate 412 moves smoothly under the limiting action of the second guide rails 410 and the second sliders 411, and can stably install and support the first servo motor 413.The top of the second moving plate 412 is equipped with a first servo motor 413. The output end of the first servo motor 413 is fixedly connected to the first screw 46. After the first servo motor 413 is started, it drives the first screw 46 to rotate, providing precise power output for the rotation of the first screw 46 and the second threaded rod 47, supporting the stringent positioning accuracy requirements of the SDBG process.

[0026] It is worth mentioning that the first screw 46 and the second threaded rod 47 are coaxially arranged with different pitches. Let the pitch of the first screw 46 be 0.9 mm and the pitch of the second threaded rod 47 be 1 mm. When the first servo motor 413 starts and drives the first screw 46 and the second threaded rod 47 to rotate one revolution, the second threaded rod 47 moves along its own length direction during one revolution, simultaneously moving the first screw 46 by 1 mm, and driving the first moving plate 43 to move by 1 mm via the first fixed plate 44. At the same time, when the first screw 46 rotates one revolution, it drives the first threaded sleeve 45, which is threaded to it, to move 0.9 mm in the opposite direction to the second threaded rod 47. Simultaneously, the first servo motor 413 slides on the side of the first moving plate 43 through the limiting action of the second guide rail 410 and the second slider 411. At this time, the first moving plate 43 moves by 0.1 mm when the first servo motor 413 starts running one revolution, realizing a small adjustment of position, compensating for the positioning deviation of the first linear motor 2, and ensuring the precise landing point of the SDBG laser focus in the first direction.

[0027] Furthermore, such as Figures 2 to 6As shown, the above cutting apparatus further includes a second compensation mechanism 5 located on the side of the first compensation mechanism 4. The second compensation mechanism 5 is configured to compensate for the positioning deviation of the second linear motor 3, improve the positioning accuracy of the apparatus in the second direction, and cooperate with the first compensation mechanism 4 to realize precise two-dimensional plane positioning of the SDBG laser focus. The second compensation mechanism 5 comprises a fixing frame 51 fixedly connected to the bottom of the first moving plate 43. When the first moving plate 43 moves, it drives the fixing frame 51 to move synchronously, and the fixing frame 51 provides a mounting and supporting structure for other components of the second compensation mechanism 5. The fixing frame 51 is arranged in a "C" shape, the fixing frame 51 is disposed on the side of the second moving end 31, a third fixing plate 52 is fixedly connected in the fixing frame 51, the third fixing plate 52 provides a stable mounting position for the third threaded sleeve 53, the third threaded sleeve 53 is mounted in the third fixing plate 52, a third threaded rod 54 is threadedly connected in the third threaded sleeve 53, and the third threaded rod 54 moves along its own length direction when rotating, which can convert rotational motion into linear motion. One end of the third threaded rod 54 is fixedly connected with a fourth threaded rod 55, a fourth threaded sleeve 56 is threadedly connected to the fourth threaded rod 55, and when the fourth threaded rod 55 rotates, it drives the fourth threaded sleeve 56 to move along the length direction of the fourth threaded rod 55, which cooperates with the third threaded rod 54 to realize micro-displacement adjustment, further improving the positioning accuracy of the SDBG process. The outer ring of the fourth threaded sleeve 56 is fixedly sleeved with a fourth fixing plate 57, one end of the fourth fixing plate 57 away from the fixing frame 51 is fixedly connected with a third moving plate 58, and when the fourth threaded sleeve 56 moves, it drives the third moving plate 58 to move synchronously through the fourth fixing plate 57, which functions to transmit power and serve as a connection. A plurality of sets of third guide rails 59 are fixedly connected to the side of the fixing frame 51 away from the second moving end 31, the third guide rails 59 are arranged in parallel with the second linear motor 3, a plurality of sets of third sliding blocks 510 are slidably connected to the third guide rails 59, the cooperation of the third guide rails 59 and the third sliding blocks 510 provides guidance for the movement of the third moving plate 58 to ensure its smooth movement, the plurality of sets of third sliding blocks 510 are all fixedly connected with the third moving plate 58, and the arrangement of the third guide rails 59 and the third sliding blocks 510 enables the third moving plate 58 to move smoothly. At least two sets of fourth guide rails 511 are fixedly connected in the fixing frame 51, the fourth guide rails 511 are arranged in parallel with the third guide rails 59, a plurality of sets of fourth sliding blocks 512 are slidably connected to the fourth guide rails 511, the cooperation of the fourth guide rails 511 and the fourth sliding blocks 512 provides guidance for the movement of the fourth moving plate 513 to ensure stable movement thereof, the plurality of sets of fourth sliding blocks 512 are jointly and fixedly connected with the fourth moving plate 513, and the arrangement of the fourth guide rails 511 and the fourth sliding blocks 512 enables the fourth moving plate 513 to move smoothly and stably carry the second servo motor 514.The second servo motor 514 is mounted on the side of the fourth moving plate 513. The second servo motor 514 is fixedly connected to the end of the third threaded rod 54 away from the fourth threaded rod 55. After starting, the second servo motor 514 drives the third threaded rod 54 and the fourth threaded rod 55 to rotate, providing precise power for the rotation of the third threaded rod 54 and the fourth threaded rod 55, and supporting the precise adjustment of the second direction of the SDBG laser focus.

[0028] It is worth mentioning that the third threaded rod 54 and the fourth threaded rod 55 are coaxially arranged with different pitches. Let the pitch of the third threaded rod 54 be 0.9 mm, and the pitch of the fourth threaded rod 55 be 1 mm. When the second servo motor 514 starts and drives the third threaded rod 54 and the fourth threaded rod 55 to rotate one revolution, the third threaded rod 54 moves 0.9 mm along its own length direction during one revolution, simultaneously driving the fourth threaded rod 55 and the second servo motor 514 to move 0.9 mm. The second servo motor 514 slides within the fixed frame 51 under the limiting action of the fourth guide rail 511 and the fourth slider 512. At the same time, when the fourth threaded rod 55 rotates one revolution, it drives the fourth threaded sleeve 56, which is threaded to it, to move 1 mm in the opposite direction to the third threaded rod 54. Simultaneously, the fourth threaded sleeve 56 drives the third moving plate 58 to move 1 mm via the fourth fixed plate 57. At this time, the third moving plate 58 moves by 0.1 mm when the second servo motor 514 starts running one revolution, realizing a small adjustment of position, compensating for the positioning deviation of the second linear motor 3, and ensuring the precise trajectory control of the SDBG laser focus in the two-dimensional plane.

[0029] For details, please refer to Figures 2 to 7The aforementioned cutting equipment also includes a lifting assembly 6 installed on the side of the first compensation mechanism 4. The lifting assembly 6 is used to drive the laser cutting module 7 to rise and fall for cutting. The height of the laser cutting module 7 can be adjusted to precisely control the focusing depth of the SDBG laser within the material, adapting to the cutting needs of materials of different thicknesses. The lifting assembly 6 includes a connecting plate 61 fixedly connected to the side of the third moving plate 58 away from the fixed frame 51. The connecting plate 61 serves to connect the third moving plate 58 and other components of the lifting assembly 6. Four sets of fixing blocks 62 are fixedly connected to the side of the connecting plate 61 away from the third moving plate 58. Two sets of limiting rods 63 are slidably connected to the four sets of fixing blocks 62. The limiting rods 63 move smoothly under the limiting action of the fixing blocks 62, providing guidance and support for the movement of the synchronization block 64 and ensuring its linearity. The two ends of the two sets of limiting rods 63 are respectively fixedly connected to the synchronization blocks 64. The synchronization blocks 64 move synchronously with the limiting rods 63, which can drive the mounting plate 65 to rise and fall synchronously. Two sets of synchronization blocks 64 are fixedly connected to a mounting plate 65 on the side away from the connecting plate 61. The mounting plate 65 moves synchronously with the synchronization blocks 64, providing an installation position for the laser cutting module 7, allowing it to rise and fall together with the mounting plate 65. The laser cutting module 7 is mounted on the side of the mounting plate 65. A third servo motor 66 is mounted on the top of the upper set of synchronization blocks 64. The output end of the third servo motor 66 passes through the synchronization blocks 64 and is fixedly connected to a fifth threaded rod 67. After the third servo motor 66 starts, it drives the fifth threaded rod 67 to rotate, providing power for the lifting assembly 6 to rise and fall, thus achieving precise adjustment of the SDBG laser focus depth. The fifth threaded rod 67 is rotatably connected between two sets of synchronous blocks 64. A fifth threaded sleeve 68 is threadedly connected to the fifth threaded rod 67. The fifth threaded sleeve 68 is fixedly connected between four sets of fixed blocks 62. The position of the fifth threaded sleeve 68 is fixed, so that the fifth threaded rod 67 moves along its own length direction when it rotates, and drives the mounting plate 65 to move synchronously through the synchronous blocks 64, so as to realize the lifting and adjustment of the laser cutting module 7 and ensure the precise correspondence between the laser focus and the internal modification layer of the material in the SDBG process.

[0030] Both the first moving plate 43 and the connecting plate 61 are provided with grating sensing units 8 on their sides. The grating sensing units 8 can detect the position of the first moving plate 43 and the connecting plate 61 in real time, and are used to detect the amount of deviation compensation, so as to facilitate timely adjustment, make the positioning accurate, and provide data support for real-time focus calibration of SDBG laser.

[0031] Finally, the above-mentioned cutting equipment also includes a control module 9 installed on the top of the base plate 1. The first linear motor 2, the second linear motor 3, the first servo motor 413, the second servo motor 514, the third servo motor 66, the laser cutting module 7, and the grating sensing unit 8 are all electrically connected to the control module 9. The control module 9 can receive the detection signal from the grating sensing unit 8 and control the operation of each motor and the laser cutting module 7 according to the preset program to realize the automated and precise operation of the equipment and ensure the precise controllability of the entire SDBG laser stealth cutting process.

[0032] In this embodiment, after the device is started, the control module 9 first controls the first linear motor 2 and the second linear motor 3 to perform preliminary large-range positioning according to the preset cutting trajectory. Specifically, the first linear motor 2 drives the first moving end 21 to move the second linear motor 3 along the first direction, while the second linear motor 3 drives the first compensation mechanism 4, the second compensation mechanism 5, the lifting component 6, and the laser cutting module 7 along the second direction through the second moving end 31, thereby moving the laser cutting module 7 approximately to the vicinity of the position to be cut.

[0033] After the initial positioning is completed, the grating sensing unit 8 starts to work. The grating sensing unit 8 on the side of the first moving plate 43 detects the positioning deviation driven by the first linear motor 2 in real time and transmits the signal to the control module 9; the grating sensing unit 8 on the side of the connecting plate 61 detects the positioning deviation driven by the second linear motor 3 and also feeds the signal back to the control module 9.

[0034] When a positioning deviation is detected in the first linear motor 2, the control module 9 controls the first servo motor 413 in the first compensation mechanism 4 to start. The first servo motor 413 drives the first screw 46 and the second threaded rod 47 to rotate synchronously. Since the screw pitches of the first screw 46 and the second threaded rod 47 are different, at 0.9 mm and 1 mm respectively, the second threaded rod 47 will move 1 mm along its own length direction when rotating one revolution, and drive the first moving plate 43 to move 1 mm through the first fixed plate 44; at the same time, the first screw 46 drives the first threaded sleeve 45 to move 0.9 mm in the opposite direction, and the first servo motor 413 slides on the first moving plate 43 through the second guide rail 410 and the second slider 411, so that the first moving plate 43 moves only 0.1 mm, realizing a small compensation for the positioning deviation of the first linear motor 2, and the first guide rail 41 and the first slider 42 ensure the smoothness and straightness of the movement of the first moving plate 43.

[0035] If a positioning deviation is detected in the second linear motor 3, the control module 9 activates the second servo motor 514 of the second compensation mechanism 5. The second servo motor 514 drives the third threaded rod 54 and the fourth threaded rod 55 to rotate, with pitches of 0.9 mm and 1 mm respectively. When rotating one revolution, the third threaded rod 54 moves 0.9 mm and drives the second servo motor 514 and the fourth threaded rod 55 to move. The fourth threaded rod 55 then drives the fourth threaded sleeve 56 to move 1 mm in the opposite direction, which in turn drives the third moving plate 58 to move 1 mm through the fourth fixed plate 57. Finally, the third moving plate 58 actually moves 0.1 mm, completing the compensation for the positioning deviation of the second linear motor 3. The third guide rail 59 and the third slider 510, and the fourth guide rail 511 and the fourth slider 512 respectively ensure the smoothness of the movement of the third moving plate 58 and the fourth moving plate 513.

[0036] After completing the in-plane positioning compensation, the control module 9 controls the third servo motor 66 in the lifting assembly 6 to start according to the thickness of the material to be cut. The third servo motor 66 drives the fifth threaded rod 67 to rotate. Since the fifth threaded sleeve 68 is fixed, the fifth threaded rod 67 will move along its own length direction when it rotates. Through the synchronization block 64, it drives the mounting plate 65 and the laser cutting module 7 to rise and fall. The limit rod 63 and the fixing block 62 ensure the smoothness of the lifting process, so that the laser cutting module 7 is adjusted to a suitable cutting height and the focusing position of the SDBG laser focus inside the material is precisely controlled.

[0037] Finally, the control module 9 controls the laser cutting module 7 to emit an ultra-short pulse laser specifically for the SDBG process, which performs invisible cutting on the material. Throughout the process, all components work together precisely under the coordination of the control module 9, achieving high-precision cutting operations.

[0038] A cutting method using an SDBG laser stealth cutting device includes the following steps: Step 1: The equipment is started. The control module 9 controls the first linear motor 2 and the second linear motor 3 to perform preliminary large-range positioning according to the preset cutting trajectory. The first linear motor 2 drives the first moving end 21 to move the second linear motor 3 along the first direction. The second linear motor 3 then drives the first compensation mechanism 4, the second compensation mechanism 5, the lifting component 6 and the laser cutting module 7 along the second direction through the second moving end 31, so that the laser cutting module 7 is roughly moved to the vicinity of the position to be cut. Step 2: The grating sensing unit 8 on the side of the first moving plate 43 detects the positioning deviation driven by the first linear motor 2 in real time and transmits the signal to the control module 9; the grating sensing unit 8 on the side of the connecting plate 61 detects the positioning deviation driven by the second linear motor 3 and also feeds the signal back to the control module 9. Step 3: When a positioning deviation is detected in the first linear motor 2, the control module 9 controls the first servo motor 413 in the first compensation mechanism 4 to start. The first servo motor 413 drives the first screw 46 and the second threaded rod 47 to rotate synchronously, thereby achieving minor compensation for the positioning deviation of the first linear motor 2. Step 4: When a positioning deviation is detected in the second linear motor 3, the control module 9 starts the second servo motor 514 of the second compensation mechanism 5 to complete the compensation for the positioning deviation of the second linear motor 3. Step 5: According to the thickness of the material to be cut, the control module 9 controls the third servo motor 66 in the lifting assembly 6 to start, driving the mounting plate 65 and the laser cutting module 7 to rise and fall, so that the laser cutting module 7 is adjusted to a suitable cutting height; Step six: Control module 9 controls laser cutting module 7 to emit laser light to perform invisible cutting on the material.

[0039] The above specific embodiments are merely optional embodiments of the present invention. Based on the technical solutions of the present invention and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. An SDBG laser stealth cutting device, comprising a base plate (1), wherein two sets of parallel first linear motors (2) are mounted on the top of the base plate (1), and a second linear motor (3) is mounted between the first moving ends (21) of the two sets of first linear motors (2), characterized in that, further comprises: a laser cutting module (7) arranged on a side surface of the second linear motor (3); a first compensation mechanism (4) mounted on the second moving end (31) of the second linear motor (3), wherein the first compensation mechanism (4) is configured to compensate for a positioning deviation of the first linear motor (2), the first compensation mechanism (4) comprises at least two sets of first guide rails (41) mounted on the top of the second moving end (31), the first guide rails (41) are arranged in parallel with the first linear motor (2), a plurality of sets of first sliding blocks (42) are slidably connected to the first guide rails (41), the plurality of sets of first sliding blocks (42) are jointly and fixedly connected with a first moving plate (43), a first fixing plate (44) is mounted on the top of the first moving plate (43), a first threaded sleeve (45) is fixedly connected in the first fixing plate (44), a first screw rod (46) is threadedly connected in the first threaded sleeve (45), an end of the first screw rod (46) away from the laser cutting module (7) is fixedly connected with a second threaded rod (47), the first screw rod (46) and the second threaded rod (47) are arranged coaxially and have different pitches, a second threaded sleeve (48) is threadedly connected to the second threaded rod (47), a second fixing plate (49) is fixedly sleeved on the outer ring of the second threaded sleeve (48), and the second fixing plate (49) is fixedly connected with the second moving end (31); a second compensation mechanism (5) located on a side surface of the first compensation mechanism (4), wherein the second compensation mechanism (5) is configured to compensate for a positioning deviation of the second linear motor (3), the second compensation mechanism (5) comprises a fixing frame (51) fixedly connected to the bottom of the first moving plate (43), the fixing frame (51) is arranged in a "C" shape, the fixing frame (51) is arranged on the side surface of the second moving end (31), a third fixing plate (52) is fixedly connected in the fixing frame (51), a third threaded sleeve (53) is mounted in the third fixing plate (52), a third threaded rod (54) is threadedly connected in the third threaded sleeve (53), one end of the third threaded rod (54) is fixedly connected with a fourth threaded rod (55), the third threaded rod (54) and the fourth threaded rod (55) are arranged coaxially and have different pitches, a fourth threaded sleeve (56) is threadedly connected to the fourth threaded rod (55), a fourth fixing plate (57) is fixedly sleeved on the outer ring of the fourth threaded sleeve (56), an end of the fourth fixing plate (57) away from the fixing frame (51) is fixedly connected with a third moving plate (58), a plurality of sets of third guide rails (59) are fixedly connected to a side of the fixing frame (51) away from the second moving end (31), the third guide rails (59) are arranged in parallel with the second linear motor (3), a plurality of sets of third sliding blocks (510) are slidably connected to the third guide rails (59), and the plurality of sets of third sliding blocks (510) are all fixedly connected with the third moving plate (58); a lifting assembly (6) mounted on a side surface of the first compensation mechanism (4), wherein the lifting assembly (6) is configured to drive the laser cutting module (7) to lift for cutting.

2. The SDBG laser stealth cutting device according to claim 1, characterized in that, At least two sets of second guide rails (410) are fixedly connected to the top of the first movable plate (43). The second guide rails (410) are arranged parallel to the first guide rail (41). Multiple sets of second sliders (411) are slidably connected on the second guide rails (410). The top of the multiple sets of second sliders (411) are fixedly connected to a second movable plate (412). A first servo motor (413) is installed on the top of the second movable plate (412). The output end of the first servo motor (413) is fixedly connected to the first screw (46).

3. The SDBG laser stealth cutting device according to claim 2, characterized in that, At least two sets of fourth guide rails (511) are fixedly connected in the fixed frame (51). The fourth guide rails (511) are arranged parallel to the third guide rails (59). Multiple sets of fourth sliders (512) are slidably connected on the fourth guide rails (511). The multiple sets of fourth sliders (512) are fixedly connected to a fourth moving plate (513). A second servo motor (514) is installed on the side of the fourth moving plate (513). The second servo motor (514) is fixedly connected to the end of the third threaded rod (54) away from the fourth threaded rod (55).

4. The SDBG laser stealth cutting device according to claim 3, characterized in that, The lifting assembly (6) includes a connecting plate (61) fixedly connected to the side of the third moving plate (58) away from the fixed frame (51). Four sets of fixing blocks (62) are fixedly connected to the side of the connecting plate (61) away from the third moving plate (58). Two sets of limiting rods (63) are slidably connected to the four sets of fixing blocks (62). Synchronization blocks (64) are fixedly connected to both ends of the two sets of limiting rods (63). Mounting plates (65) are fixedly connected to the side of the two sets of synchronization blocks (64) away from the connecting plate (61). The laser cutting module (7) is mounted on the side of the mounting plate (65).

5. The SDBG laser stealth cutting device according to claim 4, characterized in that, A third servo motor (66) is installed on the top of the upper set of synchronization blocks (64). The output end of the third servo motor (66) passes through the synchronization block (64) and is fixedly connected to a fifth threaded rod (67). The fifth threaded rod (67) is rotatably connected between the two sets of synchronization blocks (64). A fifth threaded sleeve (68) is threadedly connected to the fifth threaded rod (67). The fifth threaded sleeve (68) is fixedly connected between the four sets of fixing blocks (62).

6. The SDBG laser stealth cutting device according to claim 5, characterized in that, The first movable plate (43) and the connecting plate (61) are both provided with grating sensing units (8) on their sides.

7. An SDBG laser stealth cutting device according to claim 6, characterized in that, It also includes a control module (9) installed on the top of the base plate (1), wherein the first linear motor (2), the second linear motor (3), the first servo motor (413), the second servo motor (514), the third servo motor (66), the laser cutting module (7), and the grating sensing unit (8) are all electrically connected to the control module (9).

8. A cutting method for an SDBG laser stealth cutting device according to any one of claims 1-7, characterized in that, Includes the following steps: Step 1: The control module (9) controls the first linear motor (2) and the second linear motor (3) to perform preliminary large-range positioning according to the preset cutting trajectory. The first linear motor (2) drives the first moving end (21) to drive the second linear motor (3) to move along the first direction. The second linear motor (3) drives the first compensation mechanism (4), the second compensation mechanism (5), the lifting component (6) and the laser cutting module (7) to move along the second direction through the second moving end (31), so as to move the laser cutting module (7) to the vicinity of the position to be cut. Step 2: The grating sensing unit (8) on the side of the first moving plate (43) detects the positioning deviation driven by the first linear motor (2) in real time and transmits the signal to the control module (9); the grating sensing unit (8) on the side of the connecting plate (61) detects the positioning deviation driven by the second linear motor (3) and also feeds the signal back to the control module (9). Step 3: When a positioning deviation is detected in the first linear motor (2), the control module (9) controls the first servo motor (413) in the first compensation mechanism (4) to start. The first servo motor (413) drives the first screw (46) and the second threaded rod (47) to rotate synchronously, thereby achieving a small compensation for the positioning deviation of the first linear motor (2). Step 4: When a positioning deviation is detected in the second linear motor (3), the control module (9) starts the second servo motor (514) of the second compensation mechanism (5) to complete the compensation for the positioning deviation of the second linear motor (3); Step 5: The control module (9) controls the third servo motor (66) in the lifting assembly (6) to start according to the thickness of the material to be cut, so that the mounting plate (65) and the laser cutting module (7) are lifted and lowered, so that the laser cutting module (7) is adjusted to a suitable cutting height. The control module (9) controls the laser cutting module (7) to emit laser to perform invisible cutting on the material.

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