Micro-Electro-Mechanical Gyroscope

Abstract

The present disclosure provides a micro-electro-mechanical gyroscope, comprising a tuning fork structure with a Coriolis unit, a driving unit, a detection unit and a plurality of beam structures, part of the beam structures as adjustment beams, comprising a main stem and a first elastic part and a second elastic part connected to both ends of the main stem respectively, the first elastic part connected to the Coriolis unit, the second elastic part connected to the driving unit or the detection unit, the micro-electro-mechanical gyroscope further comprising a first adjustment part connected to the main stem, for providing the freedom of rotation of the main stem around the thickness direction of the substrate, the distance from the connection of the first adjustment part to the main stem to both ends of the main stem being a first preset distance and a second preset distance, adjusting the ratio of the first preset distance to the second preset distance to adjust the displacement and / or stress of the Coriolis unit along the driving axis and / or the detection axis, and using a mechanical Coriolis unit stress adjustment structure to change the amplitude of the output signal of the micro-electro-mechanical gyroscope.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor device technology, and more specifically, to microelectromechanical gyroscopes. Background Technology

[0002] Devices manufactured using Micro-Electro-Mechanical Systems (MEMS) technology are called MEMS devices. Among them, MEMS gyroscopes have broad application prospects in both military and civilian markets due to their advantages of small size, light weight, low cost, and high reliability. Currently, most MEMS gyroscopes operate on the principle that a moving mass (Coriolis force element) generates a Coriolis force when there is an angular velocity input. Specifically, the Coriolis force element undergoes simple harmonic motion along the drive axis under the action of the driving force. When an angular velocity input perpendicular to the drive axis is applied, the Coriolis force element experiences a Coriolis force perpendicular to both the drive axis and the angular velocity direction, resulting in displacement along the Coriolis force direction, also known as the detection axis direction. To suppress interference from environmental vibrations, MEMS gyroscopes generally employ a tuning fork structure, using differential motion to suppress its influence.

[0003] After the microelectromechanical gyroscope generates a detection signal, it transmits the detection signal to the subsequent processing unit through an interface circuit. However, noise in the interface circuit can interfere with the detection signal. Therefore, it is desirable to provide an improved microelectromechanical gyroscope to enhance product performance. Summary of the Invention

[0004] In view of this, the present disclosure provides an improved microelectromechanical gyroscope, which changes the amplitude of the output signal of the microelectromechanical gyroscope by setting a mechanical Coriolis force unit displacement or force adjustment structure in the microelectromechanical gyroscope to adapt to the needs of different application scenarios.

[0005] The microelectromechanical gyroscope provided according to embodiments of this disclosure includes:

[0006] substrate;

[0007] Multiple fixing parts are connected to the substrate; and

[0008] A tuning fork structure is located above and separated from the substrate. The tuning fork structure includes a Coriolis force unit, a driving unit, a detection unit, and multiple beam structures. The Coriolis force unit is connected to the driving unit and the detection unit respectively through corresponding beam structures. The driving unit and the detection unit are respectively connected to corresponding fixing parts.

[0009] Among the plurality of beam structures, some beam structures serve as adjusting beams. Each adjusting beam includes a main trunk and a first elastic portion and a second elastic portion connected to both ends of the main trunk. The first elastic portion is connected to the Coriolis force element, and the second elastic portion is connected to the driving unit or the detection unit.

[0010] The microelectromechanical gyroscope further includes a first adjustment section connected to the main stem, used to provide the main stem with a degree of freedom in the thickness direction around the substrate. The distance from the connection point of the first adjustment section to the main stem to both ends of the main stem is a first preset distance and a second preset distance. The displacement and / or force of the Coriolis force unit along the drive axis and / or detection axis is controlled by the ratio of the first preset distance to the second preset distance, thereby adjusting it.

[0011] The drive shaft direction, the detection shaft direction, and the thickness direction of the substrate are all perpendicular to each other.

[0012] Optionally, in the plurality of adjusting beams, a portion of the second elastic portion is connected to the driving unit, and another portion of the second elastic portion is connected to the detection unit.

[0013] Optionally, the driving unit includes:

[0014] Drive capacitor; and

[0015] The drive frame is connected to the drive capacitor.

[0016] The plurality of beam structures include drive connecting beams, which are respectively connected to the Coriolis force element and the drive frame.

[0017] Optionally, the detection unit includes:

[0018] A detection frame is located on one side of the Coriolis force element along the detection axis; and

[0019] The detection capacitor is connected to the detection frame.

[0020] The plurality of beam structures also include detection connecting beams, which are respectively connected to the Coriolis force element and the detection frame.

[0021] Optionally, the detection unit includes:

[0022] Detecting capacitance; and

[0023] The detection frame is connected to the detection capacitor.

[0024] The plurality of beam structures include detection connecting beams, which are respectively connected to the Coriolis force element and the detection frame.

[0025] Optionally, the driving unit includes:

[0026] A drive frame, located on one side of the Coriolis force element along the drive shaft direction; and

[0027] The driving capacitor is connected to the driving frame.

[0028] The plurality of beam structures also include drive connecting beams, which are respectively connected to the Coriolis force element and the drive frame.

[0029] Optionally, the adjusting beam includes the driving connecting beam, and / or the adjusting beam includes the detection connecting beam.

[0030] In the drive connecting beam that serves as the adjusting beam, the main stem extends along the direction of the detection axis, the first elastic portion extends along the direction of the drive shaft, and the second elastic portion extends along either the direction of the drive shaft or the direction of the detection axis.

[0031] In the detection connecting beam that serves as the adjustment beam, the main stem extends along the direction of the drive shaft, the first elastic portion extends along the direction of the detection shaft, and the second elastic portion extends along the direction of the drive shaft or the detection shaft.

[0032] Optionally, it further includes a first elastic connection portion, in which the ends of the two main trunks connected to the first elastic portion are connected by the first elastic connection portion in either the pair of drive connecting beams that serve as the adjustment beams or the pair of detection connecting beams that serve as the adjustment beams.

[0033] Optionally, the number of the tuning fork structures is two.

[0034] The microelectromechanical gyroscope further includes a drive coupling part and a detection coupling part. Along the drive axis and the detection axis, the drive coupling part is used to couple the drive units of the two tuning fork structures, and the detection coupling part is used to couple the detection units of the two tuning fork structures.

[0035] Optionally, the number of tuning fork structures is four, and the four tuning fork structures are arranged in an array.

[0036] The microelectromechanical gyroscope further includes a drive coupling part and a detection coupling part. Along the drive axis and the detection axis, the drive coupling part is used to couple the drive units of adjacent tuning fork structures in pairs, and the detection coupling part is used to couple the detection units of adjacent tuning fork structures in pairs.

[0037] Optionally, the Coriolis force unit, the driving unit, and the detection unit in each tuning fork structure are arranged separately in pairs, and the Coriolis force unit is connected to the driving unit and the detection unit respectively through the corresponding beam structure, so that the motion of the driving unit and the detection unit in each tuning fork structure is not coupled to each other.

[0038] One of the above technical solutions has the following beneficial effects:

[0039] By configuring a portion of the beam structure in the microelectromechanical gyroscope as an adjustment beam, with its main stem connected to a first adjustment section, the main stem achieves the degree of freedom to rotate around the substrate in the thickness direction (angular velocity direction). The two ends of the main stem are connected to a first elastic section and a second elastic section, with the first elastic section connected to a Coriolis force element and the second elastic section connected to a drive unit or a detection unit. By adjusting the connection position between the main stem and the first adjustment section (the rotation point of the main stem around the angular velocity direction), the displacement and / or force on the Coriolis force element along the drive axis and / or detection axis is adjusted, thereby changing the amplitude of the microelectromechanical gyroscope's output signal to adapt to the needs of different application scenarios.

[0040] In addition, by using a drive coupling structure and a detection coupling structure, the drive units in multiple tuning fork structures can move synchronously, and the detection units can move synchronously. Through the dual decoupling design of the drive unit and the detection unit in each tuning fork structure, the interference of environmental noise on the output signal of the microelectromechanical gyroscope is further suppressed, thereby improving the measurement accuracy of the microelectromechanical gyroscope.

[0041] It should be noted that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this disclosure. Attached Figure Description

[0042] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of this disclosure, and are not intended to limit this disclosure.

[0043] Figure 1 A schematic diagram of the structure of a microelectromechanical gyroscope according to the first embodiment of this disclosure is shown.

[0044] Figure 2 It shows Figure 1 An enlarged schematic diagram of the first tuning fork structure.

[0045] Figure 3 It shows Figure 2 Enlarged structural schematic diagram of the central drive connecting beam.

[0046] Figure 4 It shows Figure 2 A three-dimensional structural diagram of the central drive connecting beam.

[0047] Figure 5 A schematic diagram of the structure of a microelectromechanical gyroscope according to a second embodiment of the present disclosure is shown.

[0048] Figure 6 A schematic diagram of the structure of a microelectromechanical gyroscope according to a third embodiment of the present disclosure is shown.

[0049] Figure 7 A schematic diagram of the structure of a microelectromechanical gyroscope according to the fourth embodiment of this disclosure is shown.

[0050] Figure 8a It shows Figure 7 A schematic diagram of the first enlarged structure of the connecting beam in the detection system.

[0051] Figure 8b It shows Figure 8a A three-dimensional structural diagram of the connecting beam in the middle of the inspection.

[0052] Figure 9 It shows Figure 7 A second enlarged structural diagram of the connecting beam in the detection system.

[0053] Figure 10 A schematic diagram of the structure of a microelectromechanical gyroscope according to the fifth embodiment of this disclosure is shown.

[0054] Figure 11 A schematic diagram of the structure of a microelectromechanical gyroscope according to the sixth embodiment of this disclosure is shown.

[0055] Figure 12 A schematic diagram of the structure of a microelectromechanical gyroscope according to the seventh embodiment of this disclosure is shown.

[0056] Figure 13 A schematic diagram of the structure of a microelectromechanical gyroscope according to the eighth embodiment of this disclosure is shown.

[0057] Figure 14 It shows Figure 13 An enlarged schematic diagram of the first tuning fork structure.

[0058] Figure 15 A schematic diagram of the structure of a microelectromechanical gyroscope according to the ninth embodiment of this disclosure is shown.

[0059] Figure 16 A schematic diagram of the structure of a microelectromechanical gyroscope according to the tenth embodiment of this disclosure is shown.

[0060] Figure 17 A schematic diagram of the structure of a microelectromechanical gyroscope according to the eleventh embodiment of this disclosure is shown. Detailed Implementation

[0061] The present disclosure will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the various parts in the drawings are not drawn to scale. Furthermore, some well-known parts may not be shown.

[0062] Many specific details of this disclosure are described below to provide a clearer understanding of it. However, as those skilled in the art will understand, this disclosure may be implemented without following these specific details.

[0063] This disclosure may be presented in various forms, some of which will be described below.

[0064] According to the Coriolis force calculation formula, the magnitude of the Coriolis force is directly proportional to the displacement of the Coriolis force element. Therefore, increasing the displacement of the Coriolis force element is a direct and effective way to improve the amplitude of the effective signal and reduce the influence of interface circuit noise. To improve the linearity of the gyroscope scale factor, detection closed-loop control technology is often used. In force feedback closed-loop control, the Coriolis force is counteracted by electrostatic force to maintain the equilibrium position of the Coriolis force element. To increase the gyroscope range, increasing the force acting on the Coriolis force element is the most effective approach.

[0065] Based on the above, this disclosure incorporates a mechanical Coriolis force unit displacement / force adjustment structure in the microelectromechanical gyroscope.

[0066] Figure 1 A schematic diagram of the structure of a microelectromechanical gyroscope according to the first embodiment of this disclosure is shown. Figure 2 It shows Figure 1 An enlarged schematic diagram of the first tuning fork structure. Figure 3 It shows Figure 2 Enlarged structural schematic diagram of the central drive connecting beam. Figure 4 It shows Figure 2 A three-dimensional structural diagram of the central drive connecting beam.

[0067] like Figures 1 to 4 As shown, the microelectromechanical gyroscope of this embodiment includes: a substrate 800, a first tuning fork structure 100, a second tuning fork structure 200, multiple fixing parts 500, drive coupling parts 601 and 602, a detection coupling part 701, multiple adjustment parts 10, and multiple elastic connection parts 20. The first tuning fork structure 100 and the second tuning fork structure 200 are located above the substrate 800 and separated from it. The multiple fixing parts 500 are connected to the substrate 800 and are used to fix the first tuning fork structure 100 and the second tuning fork structure 200 onto the substrate 800.

[0068] In this embodiment, the X-axis, Y-axis, and Z-axis are mutually perpendicular. The X-axis can be considered as the drive axis of the microelectromechanical gyroscope, the Y-axis as the detection axis, and the Z-axis as the sensing axis. The Z-axis direction can be considered as the thickness direction or angular velocity direction of the substrate 800. The microelectromechanical gyroscope is symmetrical about the X1-X1 axis and the Y1-Y1 axis, respectively. Specifically, the first tuning fork structure 100 and the second tuning fork structure 200 are symmetrical about the X1-X1 axis. The following description uses the first tuning fork structure 100 as an example; the second tuning fork structure 200 can be configured with reference to the first tuning fork structure 100.

[0069] See Figure 2 The first tuning fork structure 100 includes a Coriolis force unit 110, a drive unit 120, a detection unit 130, and multiple beam structures. The Coriolis force unit 110, the drive unit 120, and the detection unit 130 are arranged separately from each other, and the Coriolis force unit 110 is connected to the drive unit 120 and the detection unit 130 respectively through corresponding beam structures. The drive unit 120 and the detection unit 130 are connected to corresponding fixing parts 500 respectively through corresponding beam structures.

[0070] The driving unit 120 includes a first driving capacitor 121, a second driving capacitor 122, and a driving frame 123. The first driving capacitor 121 and the second driving capacitor 122 are located on both sides of the Coriolis force unit 110 along the X-axis. The driving frame 123 is used to define the areas where the Coriolis force unit 110, the first driving capacitor 121, and the second driving capacitor 122 are located. A portion of the capacitor plates of the first driving capacitor 121 and the second driving capacitor 122 are connected to the driving frame 123, and another portion of the capacitor plates of the first driving capacitor 121 and the second driving capacitor 122 are connected to the corresponding fixing parts 500. However, the embodiments disclosed herein are not limited to this, and those skilled in the art can make other arrangements of the relative positions of the first driving capacitor 121, the second driving capacitor 122, and the Coriolis force unit 110 as needed. Optionally, the first driving capacitor 121 or the second driving capacitor 122 can be replaced with a driving detection capacitor.

[0071] The detection unit 130 includes a detection frame 131 and a detection capacitor 132. The detection frame 131 is located on one side of the Coriolis force element 110 along the Y-axis, defining the area where the detection capacitor 132 is located. A portion of the capacitor plates of the detection capacitor 132 is connected to the detection frame 131, and another portion of the capacitor plates is connected to the corresponding fixing part 500. Optionally, a portion of the capacitor in the detection capacitor 132 can be configured as a force feedback capacitor to achieve closed-loop control of the gyroscope's detection force feedback.

[0072] The multiple beam structure includes: multiple drive connecting beams 141, multiple drive beams 142, a detection connecting beam 143, and multiple detection beams 145. The multiple drive connecting beams 141 and 142 are symmetrical about the Y1-Y1 axis. The multiple drive connecting beams 141 connect the Coriolis force element 110 to the drive frame 123; the multiple drive beams 142 connect the drive frame 123 to the corresponding fixing part 500; the detection connecting beams 143 connect the Coriolis force element 110 to the detection frame 131; and the multiple detection beams 145 connect the detection frame 131 to the corresponding fixing part 500.

[0073] Optionally, the morphology of the Coriolis force element 110 matches the morphology of the multiple drive connecting beams 141 and the detection connecting beam 143, thereby saving space. Specifically, the detection connecting beam 143 has an "M" shaped structure, including two bottom ends located at the opening and a straight beam extending along the Y-axis within the opening. The portion of the Coriolis force element 110 near the detection frame 131 has a groove, the top of the detection connecting beam 143 is close to the bottom of the groove but does not contact it, the two bottom ends of the opening of the detection connecting beam 143 are connected to the two ends of the opening of the groove, and the straight beam in the opening is connected to the detection frame 131.

[0074] In this embodiment, multiple driving connecting beams 141 serve as adjusting beams to adjust the force on the Coriolis force element 110. See also Figure 3 and Figure 4 The drive connecting beam 141, serving as an adjusting beam, includes a main trunk 1413, a first elastic portion 1411, and a second elastic portion 1412. The main trunk 1413 extends along the Y-axis. The first elastic portion 1411 and the second elastic portion 1412 extend along the X-axis, and are respectively connected to both ends of the main trunk 1413. The first elastic portion 1411 is also connected to a Coriolis force element 110, and the second elastic portion 1412 is also connected to a drive frame 123. The first elastic portion 1411 and the second elastic portion 1412 are elastically bendable along the Y-axis, but have high stiffness along the X-axis, making them difficult to deform. The main trunk 1413 has high stiffness along both the X-axis and Y-axis, making it difficult to deform. Each main trunk 1413 corresponds to an adjusting portion 10 connected to a fixing portion 500. This adjusting portion 10 serves as a first adjusting portion, providing the main trunk 1413 with a degree of freedom to rotate around the Z-axis. Optionally, the adjusting part 10 is a hinge structure. The distances from the connection point of the first adjusting part to the main trunk 1413 to both ends of the main trunk 1413 are a first preset distance L1 and a second preset distance L2, respectively.

[0075] When the second elastic part 1412 is subjected to a force F1 along the X-axis by the driving unit 120, the second elastic part 1412 generates a displacement x along the X-axis, thereby causing the main body 1413 to rotate around the Z-axis by a certain angle. The first elastic part 1411 will be subjected to a force F2 in the opposite direction along the X-axis by the main body 1413. At this time, the first elastic part 1411 will generate The displacement, where "-" indicates that the displacement direction is opposite to that of the second elastic part 1412. When At this time, the displacement of the Coriolis force element 110 can be amplified, that is, the displacement of the Coriolis force element 110 is equal to the displacement of the driving frame 123 and the driving capacitors 121 and 122. Times. Conversely, when At this time, it is possible to amplify the tension of the Coriolis force element 110 (or reduce the displacement of the Coriolis force element 110), which is beneficial for driving gyroscopes operating under atmospheric conditions or with low quality factors. Compared with conventional methods, under the premise that the Coriolis force element 110 achieves the same amplitude, it is possible to make To reduce the driving voltage. In short, by adjusting The size of the force can be adjusted to achieve the amplification ratio of displacement or tension of the Coriolis force element 110.

[0076] See Figure 1 and Figure 2 In the first tuning fork structure 100 and the second tuning fork structure 200, the drive coupling unit 601 is connected to the drive beam located on one side of the Y1-Y1 axis, and the drive coupling unit 602 is connected to the drive beam located on the other side of the Y1-Y1 axis, thereby coupling the drive units of the adjacent first tuning fork structure 100 and second tuning fork structure 200. The detection coupling unit 701 is located between the first tuning fork structure 100 and the second tuning fork structure 200, and is connected to the detection beams in the first tuning fork structure 100 and the second tuning fork structure 200, thereby coupling the detection units of the adjacent first tuning fork structure 100 and second tuning fork structure 200.

[0077] When the microelectromechanical gyroscope is working, the driving units and Coriolis force units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phase along the X-axis. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force units and detection units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phase along the Y-axis. Under the action of the driving coupling unit 601 and the driving coupling unit 602, the driving units in the first tuning fork structure 100 and the second tuning fork structure 200 can move synchronously; under the action of the detection coupling unit 701, the detection units in the first tuning fork structure 100 and the second tuning fork structure 200 can move synchronously, reducing the influence of environmental noise on the output signal of the microelectromechanical gyroscope.

[0078] Furthermore, because the drive beam 142 has high stiffness along the Y-axis and is difficult to deform, when the detection unit and Coriolis force unit in the first tuning fork structure 100 and the second tuning fork structure 200 move along the Y-axis, the drive unit remains stationary along the Y-axis under the constraint of the drive beam 142. Similarly, because the detection beam 145 has high stiffness along the X-axis and is difficult to deform, when the drive unit and Coriolis force unit in the first tuning fork structure 100 and the second tuning fork structure 200 move along the X-axis, the detection unit remains stationary along the X-axis under the constraint of the detection beam 145. In other words, when the drive unit moves along the X-axis, the detection unit remains stationary along the X-axis; when the detection unit moves along the Y-axis, the drive unit remains stationary along the Y-axis. The movements of the drive unit and the detection unit are not coupled, achieving a double decoupling design.

[0079] Figure 5 A schematic diagram of the structure of a microelectromechanical gyroscope according to a second embodiment of the present disclosure is shown.

[0080] like Figure 5 As shown, the similarities between this embodiment and the first embodiment will not be repeated here. The difference lies in that the microelectromechanical gyroscope of this embodiment has four tuning fork structures, including a first tuning fork structure 100, a second tuning fork structure 200, a third tuning fork structure 300, and a fourth tuning fork structure 400. The microelectromechanical gyroscope is symmetrical about the X2-X2 axis and the Y2-Y2 axis, respectively. The first tuning fork structure 100 and the second tuning fork structure 200 are symmetrical about the X2-X2 axis, the third tuning fork structure 300 and the fourth tuning fork structure 400 are symmetrical about the X2-X2 axis, the first tuning fork structure 100 and the third tuning fork structure 300 are symmetrical about the Y2-Y2 axis, and the second tuning fork structure 200 and the fourth tuning fork structure 400 are symmetrical about the Y2-Y2 axis.

[0081] A drive coupling unit 601 is located on one side of the Y2-Y2 axis and connects the drive beams of the first tuning fork structure 100 and the second tuning fork structure 200, thereby coupling the drive units of adjacent first tuning fork structures 100 and second tuning fork structures 200. A drive coupling unit 602 is located on the other side of the Y2-Y2 axis and connects the drive beams of the third tuning fork structure 300 and the fourth tuning fork structure 400, thereby coupling the drive units of adjacent third tuning fork structures 300 and fourth tuning fork structures 400. A drive coupling unit 603 is located between the first tuning fork structure 100 and the third tuning fork structure 300 and connects the drive beams of the first tuning fork structure 100 and the third tuning fork structure 300, thereby coupling the drive units of adjacent first tuning fork structures 100 and third tuning fork structures 300. The drive coupling part 604 is located between the second tuning fork structure 200 and the fourth tuning fork structure 400, and connects the drive beams of the second tuning fork structure 200 and the fourth tuning fork structure 400, thereby coupling the drive units of the adjacent second tuning fork structure 200 and fourth tuning fork structure 400.

[0082] The detection coupling unit 701 is located between the first tuning fork structure 100 and the second tuning fork structure 200, and is connected to the detection beams in both structures, thereby coupling the detection units of adjacent tuning fork structures 100 and 200. The detection coupling unit 702 is located between the second tuning fork structure 200 and the fourth tuning fork structure 400, and is connected to the detection frames in both structures, thereby coupling the detection units of adjacent tuning fork structures 200 and 400. The detection coupling unit 703 is located between the third tuning fork structure 300 and the fourth tuning fork structure 400, and is connected to the detection beams in both structures, thereby coupling the detection units of adjacent third tuning fork structures 300 and 400. The detection coupling unit 704 is located between the first tuning fork structure 100 and the third tuning fork structure 300, and is connected to the detection frames in the first tuning fork structure 100 and the third tuning fork structure 300 respectively, thereby coupling the detection units of adjacent first tuning fork structures 100 and third tuning fork structures 300. The design of the driving unit being located on both sides of the Coriolis force unit along the X-axis in each tuning fork structure is more conducive to the driving coupling unit coupling the driving units in the four tuning fork structures. Similarly, the design of the detection unit being located on one side of the Coriolis force unit along the Y-axis in each tuning fork structure is more conducive to the detection coupling unit coupling the detection units in the four tuning fork structures.

[0083] When the microelectromechanical gyroscope is working, the driving units and Coriolis force units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phases along the X-axis, and the driving units and Coriolis force units in the third tuning fork structure 300 and the fourth tuning fork structure 400 vibrate in opposite phases along the X-axis. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force units and detection units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phases along the Y-axis, and the Coriolis force units and detection units in the third tuning fork structure 300 and the fourth tuning fork structure 400 vibrate in opposite phases along the Y-axis.

[0084] Under the action of the drive coupling units 601 to 604, the drive units in the first tuning fork structure 100 to the fourth tuning fork structure 400 can move synchronously; under the action of the detection coupling units 701 to 704, the detection units in the first tuning fork structure 100 to the fourth tuning fork structure 400 can move synchronously, reducing the influence of environmental noise on the output signal of the microelectromechanical gyroscope.

[0085] Similar to the first embodiment, the drive beam has high stiffness along the Y-axis and is difficult to deform. Therefore, when the detection unit and Coriolis force unit in the first to fourth tuning fork structures 100 move along the Y-axis, the drive unit remains stationary along the Y-axis under the constraint of the drive beam. Similarly, the detection beam has high stiffness along the X-axis and is difficult to deform. Therefore, when the drive unit and Coriolis force unit in the first to fourth tuning fork structures 100 move along the X-axis, the detection unit remains stationary along the X-axis under the constraint of the detection beam. In other words, when the drive unit moves along the X-axis, the detection unit remains stationary along the X-axis; when the detection unit moves along the Y-axis, the drive unit remains stationary along the Y-axis. The movements of the drive unit and the detection unit are not coupled, achieving a double decoupling design.

[0086] Figure 6 A schematic diagram of the structure of a microelectromechanical gyroscope according to a third embodiment of the present disclosure is shown.

[0087] like Figure 6 As shown, the similarities between this embodiment and the first embodiment will not be repeated here. The difference lies in that, in each tuning fork structure of this embodiment, the multiple drive connecting beams 141 are straight beams, all extending along the X-axis direction. The detection connecting beams 143 serve as adjustment beams, and there are two of them, symmetrically arranged about the longitudinal axis of symmetry of the microelectromechanical gyroscope. The detection connecting beams 143, which serve as adjustment beams, have a similar structure to the drive connecting beams that serve as adjustment beams in the first embodiment, including a main body, a first elastic part, and a second elastic part. For details, please refer to the textual description of the first embodiment.

[0088] Using the detection connecting beam as an adjustment beam is advantageous for gyroscopes operating under the detection force feedback closed-loop condition. Compared with conventional methods, it can increase the gyroscope range, or reduce the number of force feedback capacitors while achieving the same range.

[0089] Figure 7 A schematic diagram of the structure of a microelectromechanical gyroscope according to the fourth embodiment of this disclosure is shown. Figure 8a It shows Figure 7 An enlarged structural diagram of the connecting beam in the middle of the inspection system. Figure 8b It shows Figure 8a A three-dimensional structural diagram of the connecting beam in the middle of the inspection.

[0090] like Figure 7 , Figure 8a and Figure 8bAs shown, the similarities between this embodiment and the third embodiment will not be repeated here. The difference lies in that, in this embodiment, each detection connecting beam 143, which serves as an adjustment beam, includes: a main trunk 1433, a first elastic portion 1431, and a second elastic portion 1432. The main trunk 1433 extends along the X-axis, the first elastic portion 1431 extends along the Y-axis, and the second elastic portion 1432 extends along the X-axis. The first elastic portion 1431 and the second elastic portion 1432 are respectively connected to both ends of the main trunk 1433. The first elastic portion 1431 is also connected to the Coriolis force element 110, and the second elastic portion 1432 is also connected to the detection frame 131. The first elastic portion 1431 can be elastically bent along the X-axis, but its stiffness along the Y-axis is relatively large, making it difficult to deform. The main trunk 1433 has relatively large stiffness along both the X-axis and Y-axis, making it difficult to deform. Each main stem 1433 corresponds to an adjustment part 10 connected to the fixing part 500. This adjustment part 10 serves as a first adjustment part, providing the main stem 1433 with a degree of freedom to rotate around the Z-axis. Optionally, the adjustment part 10 is a hinge structure. The distances from the connection point of the first adjustment part to the main stem 1433 to both ends of the main stem 1433 are a first preset distance L1 and a second preset distance L2, respectively.

[0091] A first elastic connection portion 21 is provided between a pair of detection connecting beams 143. Optionally, the first elastic connection portion 21 has a "U" shaped structure. In the pair of detection connecting beams 143, the ends of the two main beams 1433 that are connected to the first elastic portion 1431 are connected by the first elastic connection portion 21.

[0092] Furthermore, compared to the third embodiment, in this embodiment, the detection frame 131 of each tuning fork structure does not have a crossbeam and detection beam near the Coriolis force unit 110, but only a detection beam near another tuning fork structure. In this embodiment, the detection connecting beam 143 can also serve as a detection beam to connect the detection frame 131 and the fixing part 500.

[0093] Figure 9 It shows Figure 7 A second enlarged structural diagram of the connecting beam in the detection system.

[0094] like Figure 9 As shown, the second enlarged structure of the testing connecting beam is compared with... Figure 8a The difference in the first enlarged structure shown is that the second elastic part 1432 extends along the Y direction.

[0095] Figure 10 A schematic diagram of the structure of a microelectromechanical gyroscope according to the fifth embodiment of this disclosure is shown.

[0096] like Figure 10As shown, the similarities between this embodiment and the third embodiment will not be repeated here. The difference is that the microelectromechanical gyroscope in this embodiment has four tuning fork structures, including a first tuning fork structure 100, a second tuning fork structure 200, a third tuning fork structure 300, and a fourth tuning fork structure 400. The symmetry relationship of the microelectromechanical gyroscope and the coupling structure of the four tuning forks can be referred to the description of the second embodiment.

[0097] Alternatively, all four tuning fork structures can be replaced with Figure 7 The structure in.

[0098] Figure 11 A schematic diagram of the structure of a microelectromechanical gyroscope according to the sixth embodiment of this disclosure is shown.

[0099] like Figure 11 As shown, this embodiment combines the solutions of the first and third embodiments, making both the driving connecting beam 141 and the detection connecting beam 143 as adjustment beams.

[0100] Figure 12 A schematic diagram of the structure of a microelectromechanical gyroscope according to the seventh embodiment of this disclosure is shown.

[0101] like Figure 12 As shown, the similarities between this embodiment and the sixth embodiment will not be repeated here. The difference is that the microelectromechanical gyroscope in this embodiment has four tuning fork structures, including a first tuning fork structure 100, a second tuning fork structure 200, a third tuning fork structure 300, and a fourth tuning fork structure 400. The symmetry relationship of the microelectromechanical gyroscope and the coupling structure of the four tuning forks can be referred to the description of the second embodiment.

[0102] Figure 13 A schematic diagram of the structure of the microelectromechanical gyroscope according to the eighth embodiment of this disclosure is shown. Figure 14 It shows Figure 13 An enlarged schematic diagram of the first tuning fork structure.

[0103] like Figure 13 and Figure 14 As shown, the difference between the microelectromechanical gyroscope of this embodiment and the first embodiment is that the X-axis of this embodiment can be regarded as the detection axis of the microelectromechanical gyroscope, and the Y-axis can be regarded as the driving axis. Specifically, the microelectromechanical gyroscope of this embodiment includes: a substrate, a first tuning fork structure 100, a second tuning fork structure 200, a plurality of fixing parts 500, detection coupling parts 605 and 606, a driving coupling part 705, a plurality of adjusting parts 10, and a plurality of elastic connecting parts 20. Among them, the first tuning fork structure 100 and the second tuning fork structure 200 are located above the substrate and separated from the substrate, and the plurality of fixing parts 500 are connected to the substrate for fixing the first tuning fork structure 100 and the second tuning fork structure 200 on the substrate.

[0104] See Figure 14The first tuning fork structure 100 includes a Coriolis force unit 110, a drive unit 120, a detection unit 130, and multiple beam structures. The Coriolis force unit 110, the drive unit 120, and the detection unit 130 are arranged separately from each other, and the Coriolis force unit 110 is connected to the drive unit 120 and the detection unit 130 respectively through corresponding beam structures. The drive unit 120 and the detection unit 130 are respectively connected to corresponding fixing parts 500.

[0105] The drive unit 120 includes a drive frame 124 and a drive capacitor 125. The drive frame 124 is located on one side of the Coriolis force element 110 along the Y-axis and is used to define the area where the drive capacitor 125 is located. A portion of the capacitor plates of the drive capacitor 125 is connected to the drive frame 124, and another portion of the capacitor plates is connected to the corresponding fixing part 500.

[0106] The detection unit 130 includes a detection frame 133, a first detection capacitor 134, and a second detection capacitor 135. The first detection capacitor 134 and the second detection capacitor 135 are located on opposite sides of the Coriolis force unit 110 along the X-axis. The detection frame 133 defines the areas where the Coriolis force unit 110, the first detection capacitor 134, and the second detection capacitor 135 are located. A portion of the capacitor plates of the first detection capacitor 134 and the second detection capacitor 135 are connected to the detection frame 133, and another portion of the capacitor plates of the first detection capacitor 134 and the second detection capacitor 135 are connected to corresponding fixing parts 500. However, this embodiment is not limited to this; those skilled in the art can make other arrangements regarding the relative positions of the first detection capacitor 134, the second detection capacitor 135, and the Coriolis force unit 110 as needed. Optionally, the first detection capacitor 134 or the second detection capacitor 135 can be replaced with a closed-loop force feedback capacitor.

[0107] The detection unit 130 is divided into a first detection area 130a, a second detection area 130b, a third detection area 130c, and a fourth detection area 130d by the detection frame 133. The first detection area 130a and the third detection area 130c are distributed along the X-axis on both sides of the Coriolis force unit 110, and the second detection area 130b and the fourth detection area 130d are distributed along the X-axis on both sides of the drive unit 120.

[0108] The multiple beam structure includes: multiple drive connecting beams 141, multiple drive beams 142, multiple detection connecting beams 143, and multiple detection beams 145. Specifically, the multiple drive connecting beams 141 connect the Coriolis force unit 110 to the drive frame 124; the multiple drive beams 142 connect the drive frame 124 to the corresponding fixing part 500; the multiple detection connecting beams 143 connect the Coriolis force unit 110 to the detection frame 133; and the multiple detection beams 145 connect the detection frame 133 to the corresponding fixing part 500.

[0109] See Figure 13 In the first tuning fork structure 100 and the second tuning fork structure 200, the detection coupling part 605 is connected to the detection beam located on one side of the Y1-Y1 axis, and the detection coupling part 606 is connected to the detection beam located on the other side of the Y1-Y1 axis, thereby coupling the detection units of the adjacent first tuning fork structure 100 and second tuning fork structure 200. The drive coupling part 705 is located between the first tuning fork structure 100 and the second tuning fork structure 200, and is connected to the drive beams in the first tuning fork structure 100 and the second tuning fork structure 200, thereby coupling the drive units of the adjacent first tuning fork structure 100 and second tuning fork structure 200.

[0110] When the microelectromechanical gyroscope is working, the driving units and Coriolis force units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phase along the Y-axis. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force units and detection units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phase along the X-axis. Under the action of the driving coupling unit 705, the driving units in the first tuning fork structure 100 and the second tuning fork structure 200 can move synchronously. Under the action of the detection coupling units 605 and 606, the detection units in the first tuning fork structure 100 and the second tuning fork structure 200 can move synchronously.

[0111] Because the drive beam 142 has high stiffness along the X-axis and is difficult to deform, when the detection unit and Coriolis force unit in the first tuning fork structure 100 and the second tuning fork structure 200 move along the X-axis, the drive unit remains stationary along the X-axis under the constraint of the drive beam 142. Similarly, because the detection beam 145 has high stiffness along the Y-axis and is difficult to deform, when the drive unit and Coriolis force unit in the first tuning fork structure 100 and the second tuning fork structure 200 move along the Y-axis, the detection unit remains stationary along the Y-axis under the constraint of the detection beam 145. In other words, when the drive unit moves along the Y-axis, the detection unit remains stationary along the Y-axis; when the detection unit moves along the X-axis, the drive unit remains stationary along the X-axis. The movements of the drive unit and the detection unit are not coupled, achieving a double decoupling design.

[0112] In this embodiment, multiple drive connecting beams 141 serve as adjustment beams to adjust the force on the Coriolis force unit 110. The specific structure of the adjustment beams can be referred to the description of the first embodiment, which will not be repeated here.

[0113] Alternatively, the multiple drive connecting beams 141 serving as adjustment beams can be configured as follows: Figure 8a or Figure 9 The structure shown.

[0114] Figure 15 A schematic diagram of the structure of a microelectromechanical gyroscope according to the ninth embodiment of this disclosure is shown.

[0115] like Figure 15 As shown, the similarities between this embodiment and the eighth embodiment will not be repeated here. The difference is that the microelectromechanical gyroscope in this embodiment has four tuning fork structures, including a first tuning fork structure 100, a second tuning fork structure 200, a third tuning fork structure 300, and a fourth tuning fork structure 400. The symmetry relationship of the microelectromechanical gyroscope can be referred to the description of the second embodiment.

[0116] The detection coupling unit 605 is located on one side of the longitudinal axis of symmetry of the microelectromechanical gyroscope and connects the detection beams of the first tuning fork structure 100 and the second tuning fork structure 200, thereby coupling the detection units of adjacent first tuning fork structures 100 and second tuning fork structures 200. The detection coupling unit 606 is located on the other side of the longitudinal axis of symmetry and connects the detection beams of the third tuning fork structure 300 and the fourth tuning fork structure 400, thereby coupling the detection units of adjacent third tuning fork structures 300 and fourth tuning fork structures 400. The detection coupling unit 607 is located between the first tuning fork structure 100 and the third tuning fork structure 300 and connects the detection beams of the first tuning fork structure 100 and the third tuning fork structure 300, thereby coupling the detection units of adjacent first tuning fork structures 100 and third tuning fork structures 300. The detection coupling part 608 is located between the second tuning fork structure 200 and the fourth tuning fork structure 400, and connects the detection beams of the second tuning fork structure 200 and the fourth tuning fork structure 400, thereby coupling the detection units of the adjacent second tuning fork structure 200 and fourth tuning fork structure 400.

[0117] A drive coupling unit 705 is located between the first tuning fork structure 100 and the second tuning fork structure 200, and is connected to the drive beams in both structures, thereby coupling the drive units of adjacent tuning fork structures 100 and 200. A drive coupling unit 706 is located between the second tuning fork structure 200 and the fourth tuning fork structure 400, and is connected to the drive frames in both structures, thereby coupling the drive units of adjacent tuning fork structures 200 and 400. A drive coupling unit 707 is located between the third tuning fork structure 300 and the fourth tuning fork structure 400, and is connected to the drive beams in both structures, thereby coupling the drive units of adjacent third tuning fork structures 300 and 400. The drive coupling unit 708 is located between the first tuning fork structure 100 and the third tuning fork structure 300, and is connected to the drive frames in the first tuning fork structure 100 and the third tuning fork structure 300 respectively, thereby coupling the drive units of the adjacent first tuning fork structure 100 and third tuning fork structure 300. The design of the detection unit being located on both sides of the Coriolis force unit along the X-axis in each tuning fork structure further facilitates the coupling of the detection units in the four tuning fork structures by the drive coupling unit. Similarly, the design of the drive unit being located on one side of the Coriolis force unit along the Y-axis in each tuning fork structure further facilitates the coupling of the drive units in the four tuning fork structures by the drive coupling unit.

[0118] Optionally, in order to facilitate the coupling of the drive units of adjacent tuning fork structures along the X-axis, the second detection area 130b and the fourth detection area 130d located on both sides of the detection unit are not provided in each tuning fork structure.

[0119] When the microelectromechanical gyroscope is working, the driving units and Coriolis force units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phases along the Y-axis, and the driving units and Coriolis force units in the third tuning fork structure 300 and the fourth tuning fork structure 400 vibrate in opposite phases along the Y-axis. When an angular velocity is input, under the action of the Coriolis force, the Coriolis force units and detection units in the first tuning fork structure 100 and the second tuning fork structure 200 vibrate in opposite phases along the X-axis, and the Coriolis force units and detection units in the third tuning fork structure 300 and the fourth tuning fork structure 400 vibrate in opposite phases along the X-axis.

[0120] Under the action of the drive coupling units 705 to 708, the drive units in the first tuning fork structure 100 to the fourth tuning fork structure 400 can move synchronously; under the action of the detection coupling units 605 to 608, the detection units in the first tuning fork structure 100 to the fourth tuning fork structure 400 can move synchronously, thereby reducing the influence of environmental noise on the output signal of the microelectromechanical gyroscope.

[0121] The drive beam has high stiffness along the X-axis and is difficult to deform. Therefore, when the detection unit and Coriolis force unit in the first to fourth tuning fork structures 100 move along the X-axis, the drive unit remains stationary along the X-axis under the constraint of the drive beam. Similarly, the detection beam has high stiffness along the Y-axis and is difficult to deform. Therefore, when the drive unit and Coriolis force unit in the first to fourth tuning fork structures 100 move along the Y-axis, the detection unit remains stationary along the Y-axis under the constraint of the detection beam. In other words, when the drive unit moves along the Y-axis, the detection unit remains stationary along the Y-axis; when the detection unit moves along the X-axis, the drive unit remains stationary along the X-axis. The movements of the drive unit and the detection unit are not coupled, achieving a double decoupling design.

[0122] Figure 16 A schematic diagram of the structure of a microelectromechanical gyroscope according to the tenth embodiment of this disclosure is shown.

[0123] like Figure 16 As shown, the similarities between this embodiment and the eighth embodiment will not be repeated here. The difference is that in this embodiment, the detection connecting beam 143 is used as an adjustment beam.

[0124] Optionally, the morphology of the Coriolis force element 110 matches the morphology of the multiple detection connecting beams 143 and drive connecting beams 141, thereby saving space. Specifically, the drive connecting beam 141 has an "M" shaped structure, including two bottom ends located at the opening and a straight beam extending along the Y-axis in the opening. The portion of the Coriolis force element 110 near the drive frame 124 has a groove, the top of the drive connecting beam 141 is close to the bottom of the groove but does not contact it, the two bottom ends of the opening of the drive connecting beam 141 are connected to the two ends of the opening of the groove, and the straight beam in the opening is connected to the drive frame 124.

[0125] Optionally, the solutions of the eighth and tenth embodiments can be combined, with the driving connecting beam and the detection connecting beam serving as adjustment beams.

[0126] Figure 17 A schematic diagram of the structure of a microelectromechanical gyroscope according to the eleventh embodiment of this disclosure is shown.

[0127] like Figure 17As shown, the similarities between this embodiment and the tenth embodiment will not be repeated here. The difference is that the microelectromechanical gyroscope in this embodiment has four tuning fork structures, including a first tuning fork structure 100, a second tuning fork structure 200, a third tuning fork structure 300, and a fourth tuning fork structure 400. The symmetry relationship of the microelectromechanical gyroscope and the coupling structure of the four tuning forks can be referred to the description of the ninth embodiment.

[0128] The embodiments of this disclosure have been described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of this disclosure. The scope of this disclosure is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of this disclosure, and all such substitutions and modifications should fall within the scope of this disclosure.

Claims

1. A microelectromechanical gyroscope, comprising: substrate; Multiple fixing parts are connected to the substrate; as well as A tuning fork structure is located above and separated from the substrate. The tuning fork structure includes a Coriolis force unit, a driving unit, a detection unit, and multiple beam structures. The Coriolis force unit is connected to the driving unit and the detection unit respectively through corresponding beam structures. The driving unit and the detection unit are respectively connected to corresponding fixing parts. Among the plurality of beam structures, some beam structures serve as adjusting beams. Each adjusting beam includes a main trunk and a first elastic portion and a second elastic portion connected to both ends of the main trunk. The first elastic portion is connected to the Coriolis force element, and the second elastic portion is connected to the driving unit or the detection unit. The microelectromechanical gyroscope further includes a first adjustment section connected to the main stem, used to provide the main stem with a degree of freedom in the thickness direction around the substrate. The distance from the connection point of the first adjustment section to the main stem to both ends of the main stem is a first preset distance and a second preset distance. At least one of the displacement of the Coriolis force unit along the drive axis direction, the displacement of the Coriolis force unit along the detection axis direction, and the force on the Coriolis force unit is controlled by the ratio of the first preset distance to the second preset distance, thereby adjusting it. The drive shaft direction, the detection shaft direction, and the thickness direction of the substrate are all perpendicular to each other. The driving unit includes: Drive capacitor; and The drive frame is connected to the drive capacitor. The plurality of beam structures include drive connecting beams, which are respectively connected to the Coriolis force element and the drive frame; The detection unit includes: A detection frame is located on one side of the Coriolis force element along the detection axis; and The detection capacitor is connected to the detection frame. The plurality of beam structures also include detection connecting beams, which are respectively connected to the Coriolis force element and the detection frame.

2. The microelectromechanical gyroscope according to claim 1, wherein, In the plurality of adjusting beams, a portion of the second elastic portion is connected to the driving unit, and another portion of the second elastic portion is connected to the detection unit.

3. The microelectromechanical gyroscope according to claim 1, wherein, The detection unit includes: Detecting capacitance; and The detection frame is connected to the detection capacitor. The plurality of beam structures include detection connecting beams, which are respectively connected to the Coriolis force element and the detection frame.

4. The microelectromechanical gyroscope according to claim 3, wherein, The driving unit includes: A drive frame, located on one side of the Coriolis force element along the drive shaft direction; and The driving capacitor is connected to the driving frame. The plurality of beam structures also include drive connecting beams, which are respectively connected to the Coriolis force element and the drive frame.

5. The microelectromechanical gyroscope according to claim 4, wherein, The adjusting beam includes the driving connecting beam, and / or the adjusting beam includes the detection connecting beam. In the drive connecting beam that serves as the adjusting beam, the main stem extends along the direction of the detection axis, the first elastic portion extends along the direction of the drive shaft, and the second elastic portion extends along either the direction of the drive shaft or the direction of the detection axis. In the detection connecting beam that serves as the adjustment beam, the main stem extends along the direction of the drive shaft, the first elastic portion extends along the direction of the detection shaft, and the second elastic portion extends along the direction of the drive shaft or the detection shaft.

6. The microelectromechanical gyroscope according to claim 5 further includes a first elastic connection portion, wherein in a pair of drive connecting beams serving as the adjustment beams or in a pair of detection connecting beams serving as the adjustment beams, the ends of the two main beams connected to the first elastic connection portion are connected by the first elastic connection portion.

7. The microelectromechanical gyroscope according to any one of claims 1 to 4, wherein, The tuning fork structure is of two types. The microelectromechanical gyroscope further includes a drive coupling part and a detection coupling part. Along the drive axis and the detection axis, the drive coupling part is used to couple the drive units of the two tuning fork structures, and the detection coupling part is used to couple the detection units of the two tuning fork structures.

8. The microelectromechanical gyroscope according to any one of claims 1 to 4, wherein, The number of tuning fork structures is four, and the four tuning fork structures are arranged in an array. The microelectromechanical gyroscope further includes a drive coupling part and a detection coupling part. Along the drive axis and the detection axis, the drive coupling part is used to couple the drive units of adjacent tuning fork structures in pairs, and the detection coupling part is used to couple the detection units of adjacent tuning fork structures in pairs.

9. The microelectromechanical gyroscope according to any one of claims 1 to 4, wherein, The Coriolis force unit, the driving unit, and the detection unit in each tuning fork structure are arranged separately in pairs, and the Coriolis force unit is connected to the driving unit and the detection unit respectively through the corresponding beam structure, so that the motion of the driving unit and the detection unit in each tuning fork structure is not coupled to each other.

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