An end effector mounting fixture and method of use thereof

Abstract

The application discloses an end effector mounting and fixing device and a use method thereof, and belongs to the technical field of semiconductor equipment. The end effector mounting and fixing device comprises a connecting pressing plate, the connecting pressing plate comprises a horizontal connecting plate, one support column is fixedly arranged below each end of the horizontal connecting plate, grooves are formed in the middle parts of the adjacent end faces of the two support columns, a first positioning block and a second positioning block are slidably arranged in the two grooves respectively, the lower end faces of the first positioning block and the second positioning block form a first cavity, the first cavity is used for fixing the root part of a mechanical hand, a second cavity is formed between the horizontal plate of the first positioning block and the horizontal plate of the second positioning block, and the second cavity is used for fixing an end effector. The double-cavity structure formed by the first positioning block, the second positioning block and the connecting pressing plate is adopted, the bidirectional positioning and fixing of the root part of the mechanical hand and the end effector are completed at one time, and the particles generated due to the friction between a screw and a screw hole caused by the insufficient positioning precision in the installation process are reduced.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an end effector mounting and fixing device and its usage method. Background Technology

[0002] In semiconductor manufacturing, wafers undergo multiple process steps, including deposition, etching, annealing, and cleaning, in a vacuum or controlled atmosphere. To minimize exposure to the external environment, semiconductor processing systems typically integrate multiple processing chambers onto a single platform. Multiple process chambers are arranged radially around a central transfer chamber, and all chambers are isolated from the transfer chamber by gate valves. Inside, a robotic arm handles wafer loading and unloading. The robotic arm uses the extension and rotation of its end effector to move wafers from one position on the platform to another. The surface material, positioning accuracy, mounting method, and trajectory of the end effector all have a decisive impact on the level of wafer control.

[0003] Currently, commonly used end effectors are machined from a single piece of quartz or ceramic, utilizing their high hardness, low precipitation, and resistance to plasma erosion to meet the cleanliness and chemical resistance requirements of process chambers. However, these hard and brittle materials expose new particulate risks during assembly: to secure the end effector to the robot arm, two symmetrical countersunk holes are first machined at the base of the end effector, and then threaded holes are machined at corresponding positions on the forearm; during installation, the end effector is fitted against the base of the robot arm and then secured with screws.

[0004] Currently, the commonly used robotic arms have an L-shaped cross-section at the root, with the end effector positioned against the vertical plate at the root for positioning. However, for other directions, alignment relies solely on visual inspection, resulting in significant errors in hole coaxiality. When the screw is screwed in, the countersunk hole edge collides and scrapes against the thread crest, causing microcrystalline particles of quartz or ceramic to flake off and form debris. Some of this debris is pressed into the thread gap as the screw is screwed in, while the rest falls to the bottom of the transmission chamber or floats with the airflow. Even immediate wiping of the chamber cannot completely remove the suspended particles.

[0005] When the equipment enters production mode, the end effector and the root of the robot arm are in a near-rigid connection due to the threaded fastening during movement. Due to machining and assembly errors, the root end face and the positioning boss do not have ideal surface contact, but rather multi-point contact. During high-speed start-up, stopping, and reversing, the contact points are subjected to periodic micro-impacts, leading to localized stress concentration. Although quartz / ceramics have high hardness, their fracture toughness is low, causing microcracks to gradually expand and peel off, forming new particles. Simultaneously, the broadband vibrations caused by the robot arm's movement cause slippage on the threaded fastening surface, generating fretting wear, further exacerbating particle formation.

[0006] These particles detach from the end effector surface and are suspended in the transfer cavity by a vacuum pump or inert gas flow, eventually depositing onto the wafer surface due to gravity or electrostatic forces. This can cause pattern short circuits, open circuits, or etching blockages, leading to device failure. Because the particles originate from the back side or under the edge of the wafer, traditional online particle monitoring is difficult to detect in real time, often only discovering them during electrical testing or final visual inspection, at which point the entire batch of wafers has been scrapped, resulting in huge losses. Summary of the Invention

[0007] Based on the technical problems existing in the prior art, the present invention provides an end effector mounting and fixing device and its usage method.

[0008] According to the technical solution of the present invention, an end effector mounting and fixing device includes a first positioning block, a second positioning block, and a connecting pressure plate. The connecting pressure plate includes a horizontal connecting plate, and a support column is fixedly provided at the lower ends of each of the two horizontal connecting plates. A groove is formed in the middle of the adjacent end faces of the two support columns. The first positioning block and the second positioning block are both L-shaped plates. The first positioning block and the second positioning block are slidably disposed in the two grooves respectively. The recessed area of ​​the first positioning block, the recessed area of ​​the second positioning block, and the lower end face of the horizontal connecting plate form a first cavity. The first cavity is used to fix the root of the robot. The space between the horizontal plate of the first positioning block and the horizontal plate of the second positioning block is a second cavity. The second cavity is used to fix the end effector.

[0009] A further improvement of the present invention is that: the first positioning block includes a first L-plate, the second positioning block includes a second L-plate, the vertical plates of the first L-plate and the second L-plate are both used to slide in the groove, a first baffle is fixedly provided on the side of the horizontal plate of the first L-plate away from the end effector, and a second baffle is fixedly provided on the side of the horizontal plate of the second L-plate away from the end effector.

[0010] A further improvement of the present invention is that: both the recessed portion of the first positioning block and the recessed portion of the second positioning block are provided with clearance grooves.

[0011] A further improvement of the present invention is that the first positioning block, the second positioning block, and the connecting pressure plate are all rounded.

[0012] A further improvement of the present invention is that the first positioning block, the second positioning block, and the connecting pressure plate are all made of polyetherimide material.

[0013] A further improvement of the present invention is that: an observation groove is provided on the top surface of the connecting pressure plate, and the observation groove extends through the first cavity.

[0014] A further improvement of the present invention is that an elastic pad is provided below each of the support columns.

[0015] A further improvement of the present invention is that each of the grooves is provided with a plurality of inserts.

[0016] A further improvement of the present invention is that the depth of the groove is less than the length of the support column.

[0017] According to the technical solution of the present invention, a method for using an end effector mounting and fixing device, based on the above-mentioned end effector mounting and fixing device, includes the following steps: S1: Install the first positioning block and the second positioning block into the two grooves with the opening direction facing the center of the first cavity. The recessed area of ​​the first positioning block, the recessed area of ​​the second positioning block and the lower end face of the horizontal connecting plate form the first cavity. S2: Insert the root of the robotic arm into the first cavity. The root of the robotic arm has an L-shaped structure, and the vertical plate of the root of the robotic arm is located outside the second cavity. S3: Insert the end effector into the second cavity and align it with the root of the robot arm for installation.

[0018] The above technical solution has the following beneficial technical effects: This invention employs a double-cavity structure enclosed by a first positioning block, a second positioning block, and a connecting pressure plate to complete the bidirectional positioning and fixation of the robot's root and end effector in one step. This reduces the generation of particles caused by friction between screws and screw holes due to insufficient positioning accuracy during installation, thereby improving the quality of subsequent wafer processing.

[0019] The present invention automatically centers itself by sliding the vertical plates of the first L-plate and the second L-plate within the groove. The first baffle and the second baffle pre-isolate the vertical plate of the robot arm from the end effector to avoid collision between the two. The cavity size remains constant before locking, and the installation misalignment is reduced to zero.

[0020] This invention avoids the rounded / chamfered corners at the root of the robot by using a clearance groove, so that the lower end face of the horizontal plate at the root of the robot is completely in contact with the upper end face of the vertical plate of the positioning block, maximizing the bearing area, dispersing contact stress during vibration, and reducing microcrack spalling.

[0021] This invention reduces the risk of particles and improves safety by rounding all sharp edges, preventing sharp corners from scratching the quartz or operators during assembly and operation.

[0022] This invention uses a first positioning block and a second positioning card supported by polyetherimide to avoid metal shavings and maintain the cleanliness of the cavity over a long period of time.

[0023] This invention provides an observation slot that extends into the first cavity, allowing for visual confirmation of the fit between the root and the actuator without disassembly, ensuring successful alignment on the first attempt and avoiding repeated disassembly and reassembly that could introduce particles.

[0024] This invention provides uniform clamping force and absorbs wide-frequency vibrations of the equipment by setting an elastic gasket under the support column. The elastic gasket is compressed when the screw is tightened, preventing local fretting wear caused by rigid impact.

[0025] This invention incorporates inserts that allow the inserts to withstand sliding wear before the sidewalls of the grooves, enabling them to be replaced individually. This maintains guiding accuracy while preventing the entire support column from becoming unusable, resulting in low maintenance costs and a consistently low particle level.

[0026] This invention forms a closed end face by setting the groove depth to be less than the length of the support column. The first positioning block and the second positioning block are limited when they slide to the end point to prevent them from sliding out or over-extending, thus ensuring the accuracy of repeated positions. Attached Figure Description

[0027] The accompanying drawings are provided to better understand the invention and are not intended to unduly limit the scope of the invention. Wherein: Figure 1 This is a schematic diagram of the structure of an end effector mounting and fixing device according to the present invention; Figure 2 This is a schematic diagram of the structure of the first or second positioning block in an end effector mounting and fixing device of the present invention; Figure 3 This is a schematic diagram of the connecting pressure plate in an end effector mounting and fixing device of the present invention.

[0028] In the figure: 1. First positioning block; 11. First L-plate; 12. First baffle; 2. Second positioning block; 21. Second L-plate; 22. Second baffle; 3. Connecting pressure plate; 31. Groove; 32. Horizontal connecting plate; 33. Support column; 34. Observation slot. Detailed Implementation

[0029] The following description, in conjunction with the accompanying drawings, illustrates exemplary embodiments of the present invention, including various details to aid understanding. These details should be considered merely exemplary. Therefore, those skilled in the art will recognize that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the invention. Similarly, for clarity and brevity, descriptions of well-known functions and structures are omitted in the following description.

[0030] Example 1 like Figure 1As shown, an end effector mounting and fixing device includes a first positioning block 1, a second positioning block 2, and a connecting pressure plate 3. The connecting pressure plate 3 includes a horizontal connecting plate 32. A support column 33 is fixedly provided at the lower ends of each of the two horizontal connecting plates 32. A groove 31 is formed in the middle of the adjacent end faces of the two support columns 33. The first positioning block 1 and the second positioning block 2 are both L-shaped plates. The first positioning block 1 and the second positioning block 2 are slidably disposed in the two grooves 31 respectively. The recessed area of ​​the first positioning block 1, the recessed area of ​​the second positioning block 2, and the lower end face of the horizontal connecting plate 32 form a first cavity. The first cavity is used to fix the root of the robot. The space between the horizontal plate of the first positioning block 1 and the horizontal plate of the second positioning block 2 is a second cavity. The second cavity is used to fix the end effector. A first cavity is formed by the L-shaped recessed areas of the first positioning block 1 and the second positioning block 2 and the lower end face of the horizontal connecting plate 32. This cavity is used to fix the root of the robot arm. The root of the robot arm is L-shaped, and only the horizontal plate of the root is inserted into the first cavity. The first positioning block 1 and the second positioning block 2 fix the root of the robot arm to prevent it from swaying left and right. The horizontal plates of the first positioning block 1 and the second positioning block 2 prevent the vertical plate of the root of the robot arm from entering the second cavity. A second cavity is formed between the horizontal plates of the first positioning block 1 and the second positioning block 2 to fix the end effector. When the actuator is inserted into the second cavity, it contacts the vertical plate at the root of the robot arm to achieve a limiting position. Alternatively, the limiting function can be achieved through the first baffle 12 and the second baffle 22. The first positioning block 1 and the second positioning block 2 limit the end effector to prevent it from swaying left and right. The connecting pressure plate 3 provides a sliding guide for the first positioning block 1 and the second positioning block 2 through the grooves 31 of the support columns 33 at both ends, connecting the two into a whole. This changes the installation process from step-by-step hole alignment to a one-time snap-fit, avoiding direct friction between the screw and the quartz end effector, reducing particle generation. At the same time, the double-sided plane support reduces vibration and wear, extending the life of the end effector.

[0031] Specifically, the first positioning block 1 includes a first L-plate 11, and the second positioning block 2 includes a second L-plate 21. The vertical plates of both the first L-plate 11 and the second L-plate 21 are used to slide within the groove 31. A first baffle 12 is fixedly mounted on the horizontal plate of the first L-plate 11 away from the end effector, and a second baffle 22 is fixedly mounted on the horizontal plate of the second L-plate 21 away from the end effector. During installation, both the first baffle 12 and the second baffle 22 are positioned between the end effector and the vertical plate at the root of the robot arm to prevent collisions. By setting the first baffle 12 and the second baffle 22, it is ensured that the first cavity and the second cavity maintain a constant size before the locking screw, preventing friction particles from being generated due to positional movement of the end effector.

[0032] Specifically, both the recessed areas of the first positioning block 1 and the second positioning block 2 are provided with clearance grooves. These clearance grooves are located on the inner side of the intersection of the vertical and horizontal plates of the first positioning block 1, and also on the inner side of the intersection of the vertical and horizontal plates of the second positioning block 2. By providing these clearance grooves, the rounded / right angles of the robot's root are avoided during installation, ensuring that the lower end face of the horizontal plate at the robot's root fits against the upper end face of the vertical plate of the first positioning block 1 / second positioning block 2, thereby improving stability.

[0033] Specifically, all sharp edges of the first positioning block 1, the second positioning block 2, and the connecting pressure plate 3 are rounded to eliminate sharp corners and prevent scratches from occurring with the end effector, the root of the robot, and the operator during assembly or operation, thereby further reducing the risk of particle generation and improving operational safety.

[0034] Specifically, the first positioning block 1, the second positioning block 2, and the connecting pressure plate 3 are all supported by polyetherimide. By utilizing the properties of polyetherimide material, such as high temperature resistance, low precipitation, self-lubrication, and lower hardness than quartz / ceramic, the generation of metal or ceramic debris caused by friction at the contact surfaces of the parts is avoided when they come into contact. At the same time, electrostatic adsorption is reduced, keeping the cavity clean.

[0035] Specifically, the top surface of the connecting pressure plate 3 is provided with an observation groove 34, which extends from top to bottom into the first cavity. During installation, the fit between the root of the robot and the end effector can be directly observed through the observation groove 34 without removing the connecting pressure plate 3, thus ensuring alignment accuracy and avoiding the risk of particles caused by additional disassembly.

[0036] Specifically, each of the support columns 33 is provided with an elastic pad underneath. This pad is used to provide uniform clamping force and buffer vibration when fixing the root of the robot to the end effector, avoiding stress concentration and microparticle generation caused by rigid contact.

[0037] Specifically, each of the grooves 31 is provided with a plurality of inserts. The surface of the inserts slides in contact with the vertical plate of the first L plate 11 / second L plate 21. The inserts are used to reduce the coefficient of friction and withstand wear in advance, thereby protecting the sidewall precision of the groove 31 and reducing particle shedding.

[0038] Specifically, the depth of the groove 31 is less than the length of the support column 33 to prevent the first positioning block 1 and the second positioning block 2 from sliding out of the groove 31 that runs through the front and back. Along the direction in which the first positioning block 1 / second positioning block 2 slides into the groove 31, the end of the support column 33 is not through, thereby fixing the first positioning block 1 and the second positioning block 2 in the preset position.

[0039] Example 2 A method of using an end effector mounting and fixing device, based on an end effector mounting and fixing device in Embodiment 1, includes the following steps: S1: Install the first positioning block 1 and the second positioning block 2 into the two grooves 31 with the opening direction towards the center of the first cavity. The recessed area of ​​the first positioning block 1, the recessed area of ​​the second positioning block 2 and the lower end face of the horizontal connecting plate 32 form the first cavity. S2: Insert the root of the robotic arm into the first cavity. The root of the robotic arm has an L-shaped structure, and the vertical plate of the root of the robotic arm is located outside the second cavity. S3: Insert the end effector into the second cavity and align it with the root of the robot arm for installation.

[0040] Specifically, in step S1, the first positioning block 1 is taken, and the vertical plate of the first L plate 11 is placed against the left groove 31, with the horizontal plate facing the right groove 31; it is slowly slid into the groove 31 until the end face is close to the bottom of the groove, confirming that the first baffle 12 is located on the side away from the second cavity; the second positioning block 2 is installed into the right groove 31 using the same method. At this time, the two horizontal plates are opposite each other, and the recessed area and the lower end face of the horizontal connecting plate 32 naturally form the first cavity, and the horizontal plate of the first L plate 11, the horizontal plate of the second L plate 21, the first baffle 12 and the second baffle 22 form the second cavity.

[0041] Specifically, in step S2, the horizontal plate of the root of the L-shaped robot is aligned with the opening of the first cavity and inserted, keeping the vertical plate of the root of the robot facing outward (i.e. placed outside the second cavity), and pushed horizontally until the end face of the vertical plate of the root of the robot fits against the first baffle 12 and the second baffle 22; visually confirm through the observation slot 34 that there is no gap between the upper surface of the root and the lower end face of the horizontal connecting plate 32.

[0042] Specifically, in step S3, the end effector is horizontally inserted into the second cavity until its end face abuts against the inner side of the vertical plate at the root of the robot / the first baffle 12 and the second baffle 22. At this time, the left and right sides of the end effector are respectively in contact with the horizontal sides of the first positioning block 1 and the second positioning block 2, achieving zero-gap positioning in the X and Y directions. Keeping the end effector in contact with the root of the robot, screws are sequentially inserted and the rated torque is applied to complete the locking process. The elastic washer is compressed during tightening, providing continuous cushioning force, and the installation is complete.

[0043] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the above-described division of functional units and modules is merely an example. In practical applications, the above functions can be assigned to different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiments can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit. Furthermore, the specific names of the functional units and modules are only for easy differentiation and are not intended to limit the scope of protection of this application. The specific working process of the units and modules in the above system can be referred to the corresponding process in the foregoing method embodiments, and will not be repeated here.

[0044] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can occur depending on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A mounting and fixing device for an end effector, characterized in that, The device includes a first positioning block (1), a second positioning block (2), and a connecting pressure plate (3). The connecting pressure plate (3) includes a horizontal connecting plate (32). A support column (33) is fixedly provided at each of the two ends of the horizontal connecting plate (32). A groove (31) is provided in the middle of the adjacent end face of the two support columns (33). The first positioning block (1) and the second positioning block (2) are both L-shaped plates. The first positioning block (1) and the second positioning block (2) are slidably disposed in the two grooves (31). The recessed area of ​​the first positioning block (1), the recessed area of ​​the second positioning block (2), and the lower end face of the horizontal connecting plate (32) form a first cavity. The first cavity is used to fix the root of the robot. The second cavity is between the horizontal plate of the first positioning block (1) and the horizontal plate of the second positioning block (2). The second cavity is used to fix the end effector. The first positioning block (1) includes a first L plate (11), and the second positioning block (2) includes a second L plate (21). The vertical plates of the first L plate (11) and the second L plate (21) are both used to slide in the groove (31). A first baffle (12) is fixedly provided on the side of the horizontal plate of the first L plate (11) away from the end effector, and a second baffle (22) is fixedly provided on the side of the horizontal plate of the second L plate (21) away from the end effector. The depth of the groove (31) is less than the length of the support column (33), forming a closed end face; Both the first baffle (12) and the second baffle (22) are located between the end effector and the vertical plate at the root of the robot.

2. The end effector mounting and fixing device according to claim 1, characterized in that, Both the recess of the first positioning block (1) and the recess of the second positioning block (2) are provided with clearance grooves.

3. The end effector mounting and fixing device according to claim 1, characterized in that, The first positioning block (1), the second positioning block (2) and the connecting pressure plate (3) are all rounded.

4. The end effector mounting and fixing device according to claim 1, characterized in that, The first positioning block (1), the second positioning block (2) and the connecting pressure plate (3) are all made of polyetherimide material.

5. The end effector mounting and fixing device according to claim 1, characterized in that, The top surface of the connecting pressure plate (3) is provided with an observation groove (34), which extends through the first cavity.

6. The end effector mounting and fixing device according to claim 1, characterized in that, Each of the support columns (33) is provided with an elastic pad underneath.

7. The end effector mounting and fixing device according to claim 1, characterized in that, Each of the grooves (31) is provided with several strips.

8. A method of using an end effector mounting and fixing device, based on an end effector mounting and fixing device according to any one of claims 1-7, characterized in that, Includes the following steps: S1: Install the first positioning block (1) and the second positioning block (2) into the two grooves (31) in the middle of the first cavity according to the opening direction. The recessed area of ​​the first positioning block (1), the recessed area of ​​the second positioning block (2) and the lower end face of the horizontal connecting plate (32) form the first cavity. S2: Insert the root of the robotic arm into the first cavity. The root of the robotic arm has an L-shaped structure, and the vertical plate of the root of the robotic arm is located outside the second cavity. S3: Insert the end effector into the second cavity and align it with the root of the robot arm for installation.

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