Flow verification multiplexer and flow control system for a gas reaction chamber

Abstract

The embodiment of the application discloses a flow verification multiplexer suitable for a gas reaction cavity and a flow control system. The flow verification multiplexer comprises a dial switch module, a working enable module, an enable control module, a path enable module and a signal control module. The enable control module outputs a debugging enable signal or a working enable signal. The path enable module selects a first signal output path in response to the debugging enable signal or the working enable signal. The signal control module outputs a valve driving signal in response to a valve control signal. Since the enable control module initially works in a debugging mode, the embodiment of the application can directly output the debugging mode signal as the debugging enable signal, and then the path enable module selects the first signal output path to transmit the valve driving signal, so that the gas mass flow verification module can avoid frequently interacting with the terminal master control module to switch the control right of the secondary valve, and the debugging efficiency is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, specifically to a flow verification multiplexer and flow control system suitable for gas reaction chambers. Background Technology

[0002] In the semiconductor equipment field, achieving complete self-sufficiency across the entire industry chain is extremely difficult for a single semiconductor equipment manufacturer. It often requires collaboration with upstream and downstream equipment manufacturers to achieve better control over semiconductor manufacturing processes. A single semiconductor manufacturing process necessitates the participation of multiple parties. For example, semiconductor component and system suppliers need to cooperate with semiconductor manufacturers to debug the manufacturer's gas flow equipment, ensuring it operates under optimal conditions and that the semiconductor devices manufactured using this equipment meet requirements. During the debugging process, semiconductor manufacturers frequently need to grant debugging access to component and system suppliers, leading to low debugging efficiency for these suppliers. Summary of the Invention

[0003] To address the aforementioned technical problems, this application provides a flow verification multiplexer and flow control system suitable for gas reaction chambers, thereby improving the low debugging efficiency of related technologies.

[0004] In a first aspect, embodiments of this application provide a flow verification multiplexer suitable for gas reaction chambers, comprising: The DIP switch module is used to electrically connect to the terminal master control module and is configured to output a debug mode signal in debug mode or a dual control mode signal in dual control working mode. The working enable module is electrically connected to the terminal master control module and is configured to respond to the dual control mode signal and output a working enable signal based on the enable activation signal output by the terminal master control module in the dual control working mode. The enable control module is electrically connected to the DIP switch module and the working enable module respectively. It is configured to initially operate in the debug mode and output the debug mode signal as the debug enable signal, or, in the dual-control working mode, it is controlled by the dual-control mode signal and outputs the working enable signal. The path enabling module is electrically connected to the enabling control module and the industrial control computer module respectively, and is configured to select the first signal output path in response to the debugging enable signal or the working enable signal; The signal control module is electrically connected to the path enable module, the industrial control computer module, and the gas mass flow verification module, respectively. It is configured to respond to the valve control signal transmitted by the gas mass flow verification module and output the valve drive signal transmitted by the industrial control computer module through the first signal output path.

[0005] Optionally, the operation enable module is further configured to output an enable failure signal in response to an external invalid signal output by the terminal master control module in single-control operation mode; The enable control module is also configured to control the path enable module to select a second signal output path based on the enable failure signal. The second signal output path is used to directly transmit the valve drive signal output by the industrial control computer module.

[0006] Optionally, the operation enabling module includes: The first relay is electrically connected to the terminal control module and is configured to, in response to the dual-control mode signal, enter an action state to transmit the enable activation signal based on the enable activation signal output by the terminal control module in the dual-control working mode, or, in response to the external invalid signal output by the terminal control module in the single-control working mode, maintain an initial state to output the external invalid signal. The first optocoupler isolation circuit is electrically connected to the first relay and the enable control module, respectively, and is configured to optocoupler isolate the enable activation signal to obtain a working enable signal, or to output the external invalid signal as an enable failure signal.

[0007] Optionally, the enable control module includes a second relay, which is electrically connected to both the DIP switch module and the working enable module. The second relay has a debugging path and a dual-control path. It is configured to select the debugging path by default. In the debugging mode, the debugging mode signal is output as a debugging enable signal through the debugging path. Alternatively, in response to the dual-control mode signal output by the DIP switch module in the dual-control working mode, the dual-control path is selected to transmit the working enable signal or enable failure signal output by the working enable module.

[0008] Optionally, the second relay is further configured to transmit an enable failure signal to the path enable module in response to the terminal master control module in single-control operation mode, so that the path enable module selects a second signal output path, the second signal output path being used to directly transmit the valve drive signal output by the industrial control computer module.

[0009] Optionally, the path enabling module includes a third relay, which is electrically connected to both the enabling control module and the industrial control computer module. The third relay has a first signal output path and a second signal output path. It is configured to select the second signal output path by default. In response to the enable failure signal output by the working enable module, it selects the second signal output path to directly transmit the valve drive signal output by the industrial control computer module. Alternatively, in response to the debugging enable signal or the working enable signal, it selects the first signal output path to transmit the valve drive signal output by the signal control module.

[0010] Optionally, the signal control module includes multiple signal control units, which are electrically connected to the industrial control computer module and the gas mass flow verification module, respectively, and are configured to output the valve drive signal transmitted by the industrial control computer module through the first signal output path in response to the valve control signal transmitted by the gas mass flow verification module.

[0011] Optionally, the industrial control computer module is provided with multiple signal output terminals and is configured to select a target signal output terminal to output a valve drive signal according to the valve drive command transmitted by the terminal control module; The signal control unit includes a logic processing circuit and a second optocoupler isolation circuit. The first input terminal of the logic processing circuit is electrically connected to the corresponding signal output terminal. The second input terminal of the logic processing circuit is electrically connected to the gas mass flow verification module. The output terminal of the logic processing circuit is connected to the second optocoupler isolation circuit. The second optocoupler isolation circuit is also electrically connected to the path enable module. The logic processing circuit is configured to perform logic processing on the valve drive signal and the valve control signal output from the target signal output terminal, and output the processed valve drive signal to the second optocoupler isolation circuit, so that the second optocoupler isolation circuit performs optocoupler isolation processing on the processed valve drive signal and outputs the isolated valve drive signal through the first signal output path.

[0012] Optionally, the logic processing circuit is further configured to perform logic processing on the valve stop signal output from the reference signal output terminal and the valve control signal to obtain an optocoupler stop signal, and output the optocoupler stop signal to the second optocoupler isolation circuit so that the second optocoupler isolation circuit stops outputting signals, wherein the reference signal output terminal is a plurality of signal output terminals other than the target signal output terminal.

[0013] In a second aspect, embodiments of this application provide a flow control system, comprising: The gas mass flow verification module is configured to pre-output valve control commands; The terminal control module is communicatively connected to the gas mass flow verification module and is configured to output a valve drive command in response to the valve control command. An industrial control computer module is communicatively connected to the terminal control module. The industrial control computer module has multiple signal output terminals and is configured to select a target signal output terminal among the multiple signal output terminals to output a valve drive signal in response to the valve drive command. The flow verification multiplexer described above, applicable to the gas reaction chamber, is electrically connected to the gas mass flow verification module, the terminal control module, and the industrial control computer module, respectively.

[0014] The beneficial effects of the flow verification multiplexer provided in this application embodiment are as follows: First, when the DIP switch module is configured in debug mode, since the enable control module initially operates in debug mode, the gas mass flow verification module does not need to be enabled by the working enable module. In this application embodiment, the debug mode signal can be directly output as the debug enable signal, thereby enabling the path enable module to select the first signal output path to transmit the valve drive signal. This avoids the gas mass flow verification module frequently interacting with the terminal master control module to switch control of the secondary valves, which is beneficial to improving debugging efficiency. Second, regardless of whether the DIP switch module is configured in debug mode or dual-control working mode, when it is necessary to transmit the valve drive signal through the first signal output path, the signal control module can only transmit the valve drive signal through the first signal output path under the control of the valve control signal. This avoids the irregular valve action sequence caused by delay uncertainty, thereby ensuring that each secondary valve operates on time, which is beneficial to improving process efficiency. Furthermore, the embodiments of this application are compatible with both debugging mode and dual-control working mode. On the one hand, this allows debugging personnel to perform efficient debugging. On the other hand, it can reduce the uncertainty of valve action caused by delay in dual-control working mode, so that each secondary valve can act in a regular sequence of action. Attached Figure Description

[0015] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0016] Figure 1 A schematic diagram of a semiconductor process scenario provided for related technologies; Figure 2 A schematic diagram of the circuit structure of a flow control system provided in an embodiment of this application; Figure 3A schematic diagram of the circuit structure of a flow control system provided for another embodiment of this application; Figure 4 A schematic diagram of the circuit structure of a flow verification multiplexer provided in this application embodiment; Figure 5 for Figure 4 The circuit structure diagram of the DIP switch module shown is shown. Figure 6 A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 7 for Figure 6 The circuit structure diagram of the first relay is shown below; Figure 8 A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 9 for Figure 8 The circuit structure diagram of the second relay is shown below; Figure 10 A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 11 for Figure 10 The circuit structure diagram of the third relay is shown below; Figure 12a A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 12b A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 13 A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 14 A circuit structure diagram of a flow verification multiplexer is provided for another embodiment of this application; Figure 15 for Figure 12a The circuit structure diagram of the signal control unit is shown. Detailed Implementation

[0017] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as being "electrically connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "upper," "lower," "inner," "outer," "bottom," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0018] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items. Furthermore, technical features involved in the different embodiments of this application described below may be combined with each other as long as they do not conflict with each other.

[0019] As noted in the background section, in the semiconductor equipment field, upstream and downstream equipment manufacturers need to collaborate to ensure good control over semiconductor processes. Please refer to [link / reference needed]. Figure 1 The related technology provides a semiconductor process scenario in which semiconductor equipment manufacturers and semiconductor component and system suppliers need to work together to ensure that the gas flow quality meets the requirements of the semiconductor process.

[0020] like Figure 1 As shown, the semiconductor process scenario includes multiple gas output modules 11, multiple secondary valves 12, process chamber 13, mass flow controller 14 (MFC), industrial control unit 15, programmable logic controller 16 (PLC), central terminal controller 17 (CTC), and gas mass flow verification system 18.

[0021] The gas output module 11 is used to output reaction gases, including oxygen, hydrogen, helium, etc. Multiple gas output modules 11 can be distributed on the same reactor or distributed on different reactors.

[0022] Secondary valve 12 is used to control the output of the reaction gas from gas output module 11, wherein one secondary valve 12 corresponds to one gas output module 11. When secondary valve 12 is closed, the reaction gas from gas output module 11 is output through secondary valve 12. When secondary valve 12 is open, the reaction gas from gas output module 11 cannot be output.

[0023] Process chamber 13 provides a process space for the process reaction between the reactive gases and the wafer.

[0024] The mass flow controller 14 is used to detect the gas flow rate transmitted from the gas output module 11 to the process chamber 13 per unit time, and transmits the deviation value of the gas flow rate to the industrial control unit 15. It can be understood that one mass flow controller 14 manages the gas flow rate of the corresponding gas output module 11.

[0025] The industrial control unit 15, also known as the process machine controller (PMC), controls the secondary valve 12 to enter the closed state based on the valve drive signal. Simultaneously, the industrial control unit 15 adjusts the gas flow rate output from the secondary valve 12 based on the gas flow rate deviation value fed back by the mass flow controller 14 to meet process requirements. It can be understood that one industrial control unit 15 can control multiple secondary valves 12 simultaneously, or one industrial control unit 15 can control only the corresponding secondary valve 12.

[0026] The programmable logic controller 16 is communicatively connected to one or more industrial control units 15 and a terminal control unit 17. It is understood that, at any given time, the relevant technology can only control one gas output module 11 to output the reaction gas, while the other gas output modules 11 stop outputting the reaction gas. That is, among multiple secondary valves 12, only one corresponding secondary valve 12 can be controlled to enter a closed state, while the other secondary valves 12 enter an open state.

[0027] The programmable logic controller 16 polls the working status of each industrial control unit 15 according to the command sent by the terminal control unit 17, and sends a valve drive command to the corresponding industrial control unit 15 based on the working status of each industrial control unit 15. The corresponding industrial control unit 15 transmits a valve drive signal to the corresponding secondary valve 12 based on the valve drive command. The corresponding secondary valve 12 enters the closed state based on the valve drive signal, thereby releasing the gas from the corresponding gas output module 11.

[0028] The terminal control unit 17 serves as the control core or coordination center for each industrial control unit 15 in the semiconductor process scenario, and is responsible for handling various core process matters.

[0029] In semiconductor manufacturing processes, precise gas supply to the process chambers is a crucial prerequisite for achieving high-precision control at each step. Therefore, the accuracy of gas flow control to the process chambers is paramount, as flow control errors directly impact the quality of the finished wafer. Semiconductor manufacturing environments are complex scenarios with multiple machines, chambers, and input gas paths. Each gas source is equipped with a corresponding mass flow controller to regulate the gas flow into the process chamber. However, the mass flow controllers of different gas sources exhibit individual differences, making it difficult to guarantee consistent mass flow output across multiple machines, chambers, and gas paths. Furthermore, factors such as changes in chamber ambient temperature, volume differences, pressure measurement accuracy, and the large gas consumption or long measurement time required during the measurement process all further affect the measurement accuracy of the mass flow controllers. This directly leads to difficulties in ensuring consistent gas parameter control in semiconductor manufacturing, ultimately impacting the quality of semiconductor products.

[0030] The gas mass flow verification system 18 is used to correct errors in semiconductor process scenarios to ensure that the gas output modules of process chambers of different machines or different gas output modules of the same process chamber maintain consistent gas flow rates, thereby ensuring the "remanufacturability" of semiconductor equipment production.

[0031] The gas mass flow verification system 18 is typically provided by a semiconductor component and system supplier, while the gas output module 11, secondary valve 12, process chamber 13, mass flow controller 14, industrial control unit 15, programmable logic controller 16, and terminal control unit 17 are provided by the semiconductor manufacturer. The gas mass flow verification system 18 needs to communicate with the terminal control unit 17 to complete the commissioning process.

[0032] Understandably, during commissioning or operation, the control of secondary valves is affected not only by the gas mass flow verification system 18, but also by the central control unit 17 and the industrial control unit 15. During commissioning, the relevant technology requires the gas mass flow verification system 18 to frequently request permissions from the central control unit 17 to perform the next gas mass flow verification operation. At the same time, the central control unit 17 also needs to suspend the permissions of the gas mass flow verification system 18 and control the secondary valves according to preset rules. Therefore, the control time of the secondary valves and the switching of control roles are quite important.

[0033] As mentioned earlier, the secondary valves are controlled by the industrial control unit 15, which in turn is controlled by the programmable logic controller 16, which is controlled by the terminal control unit 17. The operation of controlling the secondary valves to enter the closed state requires processing and analysis by the aforementioned hardware from the initiation of the command to the valve action. This process involves a significant action delay, which can easily lead to confusion in the closing sequence of the secondary valves of different gas output modules. They may close prematurely or delayedly when they should close, or open prematurely or delayedly when they should open. It is difficult to ensure that the time for each gas output module to output the reaction gas is in accordance with the predetermined time point, thereby affecting the process effect.

[0034] In addition, the programmable logic controller 16 adopts a cyclic scanning execution mode. When the programmable logic controller 16 enters the running state, it cyclically scans and executes the user program. Each complete scan cycle typically includes the following stages: 1) Input sampling stage; 2) Program execution stage; 3) Output update stage; 4) Internal processing and communication services.

[0035] The input sampling phase, program execution phase, and output refresh phase constitute the refresh cycle of the programmable logic controller 16. The input sampling phase collects each input quantity and uses a snapshot mechanism to collect all IO states. After processing, the output refresh phase is executed uniformly. Therefore, there is a response delay inside the programmable logic controller 16. Then, the time wasted by complex communication nodes in the field is added on, and the final action delay on the valve can reach 80ms-240ms. Therefore, the delay is caused by the working mechanism of the programmable logic controller 16 and is also caused by the influence of external communication nodes.

[0036] Understandably, the uncertainty of the delay leads to uncertainty in the timing of the action of each secondary valve, resulting in a lack of regularity in the actions of each secondary valve. For example, for the primary, secondary, tertiary, and quaternary valves, according to the normal action sequence, the primary, secondary, and quaternary valves close sequentially every 50ms, with only one secondary valve entering the closed state at a time, while the others remain open. However, due to the uncertainty of the delay, in the first scan cycle, the primary valve closes at 50ms, the secondary valve actuates at 130ms, the tertiary valve actuates at 220ms, and the quaternary valve actuates at 320ms. In the second scan cycle, the primary valve closes at 370ms, the secondary valve actuates at 460ms, the tertiary valve actuates at 570ms, and the quaternary valve actuates at 770ms.

[0037] This demonstrates that the action time of each secondary valve is irregular and uncertain. For example, under ideal process conditions, the primary valve should close within 200ms during the second scan cycle. This delay uncertainty or variability severely degrades the performance of the semiconductor process and reduces yield.

[0038] Based on this, embodiments of this application provide a flow control system. Please refer to... Figure 2 The flow control system 200 includes a gas mass flow verification module 300, a terminal control module 400, an industrial control computer module 500, and a flow verification multiplexer 600.

[0039] The gas mass flow verification module 300 is used to verify the pipeline volume involved in the reaction gas, ensuring that the pipeline volume can be accurately obtained, and thus ensuring that the gas flow rate calculated based on the pipeline volume can also be accurately obtained.

[0040] The gas mass flow verification module 300 is configured to output valve control commands in advance. The valve control commands are used to instruct the terminal control module 400 to control the industrial computer module 500 to output valve drive signals in advance. After waiting for the input of the valve control signal from the gas mass flow verification module 300, the valve drive signal is then transmitted to the corresponding secondary valve. This can eliminate the impact of the uncertainty caused by the delay and ensure that each secondary valve operates regularly.

[0041] The terminal control module 400 is communicatively connected to the gas mass flow verification module 300 and is configured to output valve drive commands in response to valve control commands. These valve drive commands are used to drive the industrial control computer module 500 to control the corresponding secondary valve to enter a closed state. Specifically, the terminal control module 400 determines the valve number of the secondary valve that needs to enter a closed state and generates a valve drive command based on that valve number. For example, if the process requires the output of hydrogen, and the output path of the hydrogen output module is controlled by a secondary valve, the terminal control module 400 obtains the valve number of the secondary valve and generates a valve drive command based on that valve number.

[0042] like Figure 2 As shown, the terminal control module 400 includes a terminal control device 41 and a PLC device 42. The terminal control device 41 and the PLC device 42 are electrically connected, and the PLC device 42 is electrically connected to the industrial computer module 500.

[0043] The industrial control computer module 500 is communicatively connected to the terminal control module 400. The industrial control computer module 500 has multiple signal output terminals, each configured to output a valve drive signal for a corresponding secondary valve. The industrial control computer module 500 is configured to select a target signal output terminal among the multiple signal output terminals to output a valve drive signal in response to a valve drive command. For example, the industrial control computer module 500 has four signal output terminals: the first signal output terminal is configured to output a valve drive signal VAL_Sec0, which drives the secondary valve F0 to close; the second signal output terminal is configured to output a valve drive signal VAL_Sec1, which drives the secondary valve F1 to close; the third signal output terminal is configured to output a valve drive signal VAL_Sec2, which drives the secondary valve F2 to close; and the fourth signal output terminal is configured to output a valve drive signal VAL_Sec3, which drives the secondary valve F3 to close.

[0044] The industrial control computer module 500 parses the valve number of the secondary valve from the valve drive command, selects the signal output terminal that matches the parsed valve number from multiple signal output terminals as the target signal output terminal, and controls the target signal output terminal to output the valve drive signal.

[0045] Understandably, the industrial computer module 500 includes an industrial computer and multiple MFC controllers. The industrial computer is electrically connected to the multiple MFC controllers, and each MFC controller is used to detect the gas flow rate or gas quality of each gas output module 11.

[0046] It is also understandable that you should refer to [the relevant documentation / reference]. Figure 3The industrial control computer module 500 includes multiple industrial control computers 51 and multiple MFC controllers. Each industrial control computer 51 is communicatively connected to the terminal control module 400. Each industrial control computer 51 is electrically connected to one MFC controller. Each MFC controller is used to detect the gas flow rate or gas quality of each gas output module. It can be understood that one industrial control computer can control one secondary valve or multiple secondary valves.

[0047] The terminal control module 400 can broadcast valve drive commands to all industrial control computers 51. Each industrial control computer 51 can parse the valve drive command to obtain the valve number of the secondary valve that needs to enter the closed state. Then, it determines whether the valve number belongs to the valve number managed by itself. If it does not belong, the valve drive command is discarded. If it does belong, the valve drive signal is output to the secondary valve according to the valve number of the secondary valve that needs to enter the closed state.

[0048] The flow verification multiplexer 600 is suitable for gas reaction chambers. The flow verification multiplexer 600 is electrically connected to the gas mass flow verification module 300, the terminal control module 400, and the industrial control computer module 500.

[0049] Please see Figure 4 The flow verification multiplexer 600 includes a DIP switch module 61, an enable module 62, an enable control module 63, a path enable module 64, and a signal control module 65.

[0050] The DIP switch module 61 is used to electrically connect with the terminal master control module 400 and is configured to output a debug mode signal in debug mode or a dual control mode signal in dual control working mode.

[0051] The debugging mode is the mode in which the gas mass flow verification module 300 needs to verify the corresponding pipeline volume in the flow control system 200. Typically, before the flow control system 200 is put into production, it needs to enter debugging mode. In debugging mode, the gas mass flow verification module 300 verifies the corresponding pipeline volume in the flow control system 200 to ensure that the pipeline volume can be accurately obtained, thereby ensuring that the gas flow rate calculated based on the pipeline volume can also be accurately obtained.

[0052] The dual-control operating mode involves the flow control system 200 being controlled by both the gas mass flow verification module 300 and the terminal control module 400. Both modules work together to control the output of the reactant gas during the process. After a trial run, both the gas mass flow verification module 300 and the terminal control module 400 can accurately obtain the pipeline volume. When both modules are in dual-control mode, the gas flow rate can be determined based on the pipeline volume. With the cooperation of the industrial control computer module 500, the gas output module can then output a precise gas flow rate.

[0053] The terminal control module 400 can configure the DIP switch module 61 to enter either a debugging mode or a dual-control working mode. In some embodiments, the terminal control module 400 receives a mode configuration command sent by the gas mass flow verification module 300, and controls the DIP switch module 61 to enter the target mode based on the mode configuration command. Specifically, the terminal control module 400 parses the mode configuration command to obtain a target mode identifier. If the target mode identifier is a debugging mode identifier, the debugging mode is determined to be the target mode; if the target mode identifier is a dual-control mode identifier, the dual-control working mode is determined to be the target mode. In other embodiments, the terminal control module 400 does not require triggering by the gas mass flow verification module 300, and controls the DIP switch module 61 to enter either the debugging mode or the dual-control working mode according to preset control logic.

[0054] The debug mode signal is the signal output by the DIP switch module 61 when configured in debug mode, and the dual-control mode signal is the signal output by the DIP switch module 61 when configured in dual-control operation mode. Both the debug mode signal and the dual-control mode signal can be high or low, depending on the type of DIP switch module 61 and the circuit structure of the enable control module 63.

[0055] Please see Figure 5 The terminal control module 400 configures the DIP switch module 61 to enter either debug mode or dual-control working mode via the enable terminal SW1. When ports 7 and 6 of the DIP switch module 61 are configured to connect and ports 2 and 3 are configured to connect, the DIP switch module 61 enters debug mode, with port 7 (i.e., port K2) outputting a high-level debug mode signal and port 2 (i.e., port K1) in a high-impedance state. When ports 7 and 8 of the DIP switch module 61 are configured to connect and ports 1 and 2 are configured to connect, the DIP switch module 61 enters dual-control working mode, with port 7 (i.e., port K2) in a high-impedance state and port 2 (i.e., port K1) outputting a high-level dual-control mode signal.

[0056] The operation enable module 62 is electrically connected to the terminal master control module 400 and is configured to output an operation enable signal in response to the dual control mode signal, based on the enable activation signal output by the terminal master control module 400 in the dual control operation mode.

[0057] The enable activation signal indicates that the terminal master control module 400 is in dual-control working mode. The working enable signal is the signal after the enable activation signal has been processed by the working enable module 62. In some embodiments, both the enable activation signal and the working enable signal are high level. In other embodiments, both the enable activation signal and the working enable signal are low level. The level type of the enable activation signal and the working enable signal is constrained by the circuit structure of the working enable module 62 and the enable control module 63.

[0058] The enable control module 63 is electrically connected to both the DIP switch module 61 and the working enable module 62. It is configured to initially operate in debug mode and output the debug mode signal as the debug enable signal. The enable control module 63 is also configured to be controlled by the dual-control mode signal in dual-control operating mode and output the working enable signal.

[0059] The path enable module 64 is electrically connected to the enable control module 63 and the industrial computer module 500 respectively, and is configured to select the first signal output path in response to the debug enable signal or the working enable signal.

[0060] The signal control module 65 is electrically connected to the path enable module 64, the industrial computer module 500, and the gas mass flow verification module 300, respectively. It is configured to respond to the valve control signal transmitted by the gas mass flow verification module 300 and output the valve drive signal transmitted by the industrial computer module 500 through the first signal output path.

[0061] First, when the DIP switch module 61 is configured in debug mode, since the enable control module 63 is initially working in debug mode (i.e., working in debug mode by default), the gas mass flow verification module 300 does not need to be enabled by the enable module 62. It can directly output the debug mode signal as the debug enable signal, which in turn enables the path enable module 64 to select the first signal output path to transmit the valve drive signal. This avoids the gas mass flow verification module 300 frequently interacting with the terminal master control module 400 to switch control of the secondary valve, which helps to improve debugging efficiency.

[0062] Secondly, regardless of whether the DIP switch module 61 is configured in debug mode or dual-control working mode, when it is necessary to transmit the valve drive signal through the first signal output path, the signal control module 65 can transmit the valve drive signal through the first signal output path under the control of the valve control signal. This can avoid the irregular valve action sequence caused by the uncertainty of delay, thereby ensuring that each secondary valve acts on time, which is conducive to improving the process effect.

[0063] Furthermore, the embodiments of this application are compatible with both debugging mode and dual-control working mode. On the one hand, this allows debugging personnel to perform efficient debugging. On the other hand, it can reduce the uncertainty of valve action caused by delay in dual-control working mode, so that each secondary valve can act in a regular sequence of action.

[0064] In some embodiments, the operation enable module 62 is further configured to output an enable failure signal in response to an external invalid signal output by the terminal control module 400 in single-control operation mode. The enable control module 63 is further configured to, based on the enable failure signal, control the path enable module 64 to select a second signal output path, the second signal output path being used to transmit the valve drive signal output by the industrial control computer module 500.

[0065] The single-control working mode is a mode in which the flow control system 200 is only controlled by the terminal master control module 400. That is, the gas mass flow verification module 300 does not participate in controlling the output of the reactant gas during the process. The output of the reactant gas is controlled by the terminal master control module 400. In this way, the output of the reactant gas is only controlled by the terminal master control module 400 of the semiconductor manufacturer, and is no longer controlled by the semiconductor component and system suppliers who have been given control authority by the semiconductor manufacturer. Even if the gas mass flow verification module 300 enters the test mode, it will not affect the output of the reactant gas.

[0066] The external invalid signal indicates that the terminal control module 400 is in a single-control operation mode, and the terminal control module 400 deprives the gas mass flow verification module 300 of control. The enable failure signal can be understood as a signal output by the working enable module 62 based on the external invalid signal. In some embodiments, the external invalid signal and the enable failure signal can be low-level; in other embodiments, they can be high-level. The level type of the external invalid signal and the enable failure signal is constrained by the circuit structure of the working enable module 62 and the enable control module 63.

[0067] The signal control module 65 is controlled by the gas mass flow verification module 300 and the industrial computer module 500. When the user needs to reclaim control of the flow control system, the process is no longer controlled by the gas mass flow verification module 300. The terminal control module 400 can output an enable failure signal through the enable module 62. Based on the enable failure signal, the enable control module 63 controls the path enable module 64 to select the second signal output path. The valve drive signal output by the industrial computer module 500 can be directly output through the second signal output path without going through the signal control module 65, thereby achieving the purpose of reclaiming control of the flow control system.

[0068] The embodiments of this application are compatible not only with debugging mode and dual-control working mode, but also with single-control working mode, thus meeting the various control needs of multiple parties. With the support of the flow verification multiplexer 600, it is beneficial to improve the adaptability of the flow control system in various application scenarios.

[0069] Please see Figure 6 The enabling module 62 includes a first relay 621 and a first optocoupler isolation circuit 622. The first relay 621 is electrically connected to the terminal control module 400, and the first optocoupler isolation circuit 622 is electrically connected to the first relay 621 and the enabling control module 63, respectively.

[0070] The first relay 621 is configured to respond to a dual-control mode signal, and enter an operating state based on the enable activation signal output by the terminal master control module 400 in dual-control working mode to transmit the enable activation signal. The first optocoupler isolation circuit 622 is configured to optocoupler isolate the enable activation signal to obtain a working enable signal.

[0071] The first relay 621 is also configured to maintain its initial state and output an external invalid signal in response to an external invalid signal output by the terminal control module 400 in single-control operation mode. The first optocoupler isolation circuit 622 is also configured to output the external invalid signal as an enable / disable signal.

[0072] In this embodiment, the enable activation signal output by the terminal master control module 400 is optically isolated by the first optocoupler isolation circuit 622, which can filter out interference signals and thus reliably trigger the enable control module 63 to perform its operation.

[0073] Please see Figure 7 The first relay 621 includes a first coil L1 and a first diode D1, and the first optocoupler isolation circuit 622 includes a first resistor R1, a second diode D2, and a first optocoupler U1.

[0074] The terminal control module 400 outputs an enable activation signal or an external invalid signal through connector P5. With the DIP switch module 61 configured in dual-control mode, port K1 outputs a high-level dual-control mode signal. This high-level signal flows through the first coil L1 of the first relay 621, generating a magnetic field. Under the influence of this magnetic field, contacts 3 and 4 of the first relay 621 connect, as do contacts 6 and 5, thus establishing a circuit between the first relay 621 and connector P5. The first diode D1 provides freewheeling current to the first coil L1.

[0075] When the terminal control module 400 outputs a high-level enable activation signal through connector P5, the high-level enable activation signal is transmitted to the primary side of the first optocoupler U1 through this path and the first resistor R1. The primary side of the first optocoupler U1 enters the conducting state and generates light. The secondary side of the first optocoupler U1 detects the light and enters the conducting state, causing the +5V voltage to be pulled to the target port S2, that is, the target port S2 outputs a 5V working enable signal. The second diode D2 can provide freewheeling current to the primary side of the first optocoupler U1.

[0076] When the terminal control module 400 outputs a low-level external invalid signal through connector P5, the low-level external invalid signal is transmitted to the first optocoupler U1 through this path and the first resistor R1. The first optocoupler U1 is in the off state, and the +5V voltage is not pulled to the target port S2, that is, the target port S2 outputs a 0V enable failure signal.

[0077] Please see Figure 8 The enable control module 63 includes a second relay 631, which is electrically connected to the DIP switch module 61 and the enable module 62.

[0078] The second relay 631 has a debugging path 63a and a dual-control path 63b. It is configured to default to selecting the debugging path 63a, and in debugging mode, outputs the debugging mode signal as a debugging enable signal through the debugging path 63a. The second relay 631 is also configured to respond to the dual-control mode signal output by the DIP switch module 61 in dual-control working mode, and select the dual-control path 63b to transmit the working enable signal or enable failure signal output by the working enable module 62. By configuring the second relay 631, this embodiment of the application can flexibly select the corresponding path to transmit the debugging enable signal, working enable signal, or enable failure signal in debugging mode or dual-control working mode.

[0079] The second relay 631 is also configured to transmit an enable failure signal to the path enable module 64 in response to the terminal master control module 400 in single control mode, so that the path enable module 64 selects the second signal output path, which is used to transmit the valve drive signal output by the industrial control computer module.

[0080] Please see Figure 9 The second relay 631 includes a second coil L2 and a third diode D3.

[0081] 1) With the DIP switch module 61 configured in dual-control mode, the K1 port outputs a high-level dual-control mode signal. This high-level signal flows through the second coil L2, generating a magnetic field. Under the influence of this magnetic field, the third and fourth contacts of the second relay 631 connect to form a dual-control path. Therefore, the target port S2 outputs a 5V enable signal, which is transmitted to the path enable module 64 through the dual-control path and the FUC_EN port. The third diode D3 provides freewheeling current to the second coil L2.

[0082] 2) With the DIP switch module 61 configured in debug mode, port K2 outputs a high-level debug mode signal, port K1 is in a high-impedance state, and no current flows through the second coil L2. Since the second and third contacts of the second relay 631 are connected by default to form a debug path, the high-level debug mode signal is transmitted to the path enable module 64 through the debug path and the FUC_EN port.

[0083] 3) When the terminal master control module 400 enters single-control working mode, the target port S2 outputs a low-level enable / disable signal. Regardless of whether the DIP switch module 61 is configured in dual-control working mode or debug mode, the signal output by the FUC_EN port is a low-level signal. Specifically, when the DIP switch module 61 is configured in dual-control working mode, the third and fourth contacts of the second relay 631 are connected; however, the target port S2 outputs a low level, therefore, the FUC_EN port outputs a low-level enable / disable signal. When the DIP switch module 61 is configured in debug mode, the second and third contacts of the second relay 631 are connected; however, the K2 port is in a high-impedance state, outputting a low-level enable / disable signal; therefore, the FUC_EN port still outputs a low-level enable / disable signal.

[0084] Please see Figure 10 The path enable module 64 includes a third relay 641, which is electrically connected to the enable control module 63 and the industrial computer module 500.

[0085] The third relay 641 has a first signal output path 64a and a second signal output path 64b. It is configured to select the second signal output path 64b by default. In response to the enable failure signal output by the working enable module 62, it selects the second signal output path to directly transmit the valve drive signal output by the industrial control computer module. Alternatively, in response to the debugging enable signal or the working enable signal, it selects the first signal output path 64a to transmit the valve drive signal output by the signal control module 65.

[0086] Please see Figure 11 The third relay 641 includes a third coil L3 and a fourth diode D4. When the third and fourth contacts of the third relay 641 are connected, they form a first signal output path 64a. Alternatively, when the fifth and sixth contacts of the third relay 641 are connected, they form another first signal output path 64a. The first signal output path 64a formed by the third and fourth contacts of the third relay 641 is used to transmit the 0th valve drive signal DO0 of a secondary valve, and the first signal output path 64a formed by the fifth and sixth contacts of the third relay 641 is used to transmit the 1st valve drive signal DO1 of another secondary valve.

[0087] When the third contact of the third relay 641 is connected to the second contact, the third contact of the third relay 641 and the second contact form a second signal output path 64b. Alternatively, when the sixth contact of the third relay 641 is connected to the seventh contact, the sixth contact of the third relay 641 and the seventh contact form another second signal output path 64b. The second signal output path 64b formed by the second contact of the third relay 641 and the third contact is used to directly transmit the second valve drive signal VAL_Sec0 output by the industrial control computer module 500, and the second signal output path 64b formed by the sixth contact of the third relay 641 and the seventh contact is used to directly transmit the third valve drive signal VAL_Sec1 output by the industrial control computer module 500.

[0088] When the FUC_EN port outputs a high-level debug enable signal or operation enable signal, current flows through the third coil L3, generating a magnetic field. The third and fourth contacts of the third relay 641 are connected to form a first signal output path 64a, and the fifth and sixth contacts of the third relay 641 are connected to form another first signal output path 64a. The 0th valve drive signal DO0 can be output through the first signal output path 64a formed by the third and fourth contacts of the third relay 641, or the 1st valve drive signal DO1 can be output through the first signal output path 64a formed by the fifth and sixth contacts of the third relay 641.

[0089] When the FUC_EN port outputs a low-level enable failure signal, no current flows through the third coil L3. The second valve drive signal VAL_Sec0 is output through the second signal output path 64b formed by the second and third contacts of the third relay 641, and the third valve drive signal VAL_Sec1 is output through the second signal output path 64b formed by the sixth and seventh contacts of the third relay 641.

[0090] The 0th valve drive signal DO0 or the 2nd valve drive signal VAL_Sec0 is transmitted to the first-stage valve through port VAL0_Sec0, and the 1st valve drive signal DO1 or the 3rd valve drive signal VAL_Sec1 is transmitted to the second-stage valve through port VAL0_Sec1.

[0091] Please see Figure 12a The signal control module 65 includes multiple signal control units 651, which are electrically connected to the industrial control computer module 500 and the gas mass flow verification module 300, respectively. These signal control units are configured to output valve drive signals transmitted by the industrial control computer module 500 through a first signal output path in response to valve control signals transmitted by the gas mass flow verification module 300. This embodiment of the application, by configuring multiple signal control units 651, supports the closing and opening of multiple secondary valves, thus meeting the requirements for controlling multiple gas output modules.

[0092] The industrial control computer module 500 has multiple signal output terminals 50a, configured to select a target signal output terminal to output a valve drive signal based on the valve drive command transmitted by the terminal control module 400. It can be understood that at any given time, the industrial control computer module 500 outputs a valve signal sequence through the multiple signal output terminals 50a. This valve signal sequence includes multiple valve signals, of which only one is a valve drive signal; the others are not. For example, if the valve drive signal is high, at the same time, the valve signal sequence Q={0,0,1,0}, meaning the third signal output terminal outputs the valve drive signal, while the other signal output terminals 50a do not output valve drive signals.

[0093] Please see Figure 12b The signal control unit 651 includes a logic processing circuit 652 and a second optocoupler isolation circuit 653. The first input terminal of the logic processing circuit 652 is electrically connected to the corresponding signal output terminal 50a. The second input terminal of the logic processing circuit 652 is electrically connected to the gas mass flow verification module 300. The output terminal of the logic processing circuit 652 is connected to the second optocoupler isolation circuit 653. The second optocoupler isolation circuit 653 is also electrically connected to the path enable module 64.

[0094] The logic processing circuit 652 is configured to perform logic processing on the valve drive signal and valve control signal output from the target signal output terminal, and output the processed valve drive signal to the second optocoupler isolation circuit 653, so that the second optocoupler isolation circuit 653 performs optocoupler isolation processing on the processed valve drive signal and outputs the isolated valve drive signal through the first signal output path.

[0095] The logic processing circuit 652 is also configured to perform logic processing on the valve stop signal and valve control signal output from the reference signal output terminal to obtain the optocoupler stop signal, and output the optocoupler stop signal to the second optocoupler isolation circuit 653 so that the second optocoupler isolation circuit 653 stops outputting signals. The reference signal output terminal is a signal output terminal other than the target signal output terminal among multiple signal output terminals.

[0096] In some embodiments, the logic processing circuit 652 includes NAND gates, latches, or circuits or controllers composed of latches and other logic devices.

[0097] When the logic processing circuit 652 includes a NAND gate, and the level signal output by the NAND gate is high, the high level output by the NAND gate controls the second optocoupler isolation circuit 653 to enter the cut-off state, so that the second optocoupler isolation circuit 653 outputs an optocoupler stop signal.

[0098] When the logic processing circuit 652 includes a NAND gate, and the level signal output by the NAND gate is low, the low level output by the NAND gate controls the second optocoupler isolation circuit 653 to enter the conduction state, so that the second optocoupler isolation circuit 653 outputs a valve drive signal.

[0099] Please see Figure 13 The signal control module 65 includes a first signal control unit 6511, a second signal control unit 6512, a third signal control unit 6513, and a fourth signal control unit 6514. The industrial control computer module 500 is provided with a first signal output terminal 501, a second signal output terminal 502, a third signal output terminal 503, and a fourth signal output terminal 504. Each signal output terminal is connected to a signal control unit. The industrial control computer module 500 outputs a valve signal sequence through the four signal output terminals 50a, with the signal expression Q={VAL_Sec0,VAL_Sec1,VAL_Sec2,VAL_Sec3}.

[0100] When the industrial control computer module 500 selects the third signal output terminal 503 as the target signal output terminal to output the valve drive signal according to the valve drive command, the signal expression of the valve signal sequence is as follows: Q={VAL_Sec0,VAL_Sec1,VAL_Sec2,VAL_Sec3}={0,0,1,0}.

[0101] The gas mass flow verification module 300 outputs a high-level valve control signal in debug mode or dual-control operation mode. The logic processing circuit 652 is a NAND gate.

[0102] The first signal output terminal 501 inputs a low-level "0" valve stop signal to the logic processing circuit 652 of the first signal control unit 6511. The gas mass flow verification module 300 also inputs a high-level "1" valve control signal to the logic processing circuit 652 of the first signal control unit 6511. The logic processing circuit 652 performs NAND processing on "0" and "1" and outputs a high level. This high level controls the second optocoupler isolation circuit 653 to enter the cutoff state, so that the second optocoupler isolation circuit 653 outputs a low-level optocoupler stop signal.

[0103] Similarly, the working principle of the second signal control unit 6512 and the fourth signal control unit 6514 is the same as that of the first signal control unit 6511, and will not be repeated here.

[0104] The third signal output terminal 503 inputs a high-level "1" valve drive signal to the logic processing circuit 652 of the first signal control unit 6511. The gas mass flow verification module 300 also inputs a high-level "1" valve control signal to the logic processing circuit 652 of the first signal control unit 6511. The logic processing circuit 652 performs NAND processing on the "1" and "1" and outputs a low level. This low level controls the second optocoupler isolation circuit 653 to enter the conduction state, so that the second optocoupler isolation circuit 653 outputs a high-level valve drive signal.

[0105] In some embodiments, the industrial computer module 500 includes multiple industrial computers, each equipped with a signal output terminal. Please refer to [link to relevant documentation]. Figure 14 The industrial control computer module 500 includes a first industrial control computer 511, a second industrial control computer 512, a third industrial control computer 513, and a fourth industrial control computer 514. The first industrial control computer 511 is electrically connected to the first signal control unit 6511 and is used to transmit the signal VAL_Sec0. The second industrial control computer 512 is electrically connected to the second signal control unit 6512 and is used to transmit the signal VAL_Sec1. The third industrial control computer 513 is electrically connected to the third signal control unit 6513 and is used to transmit the signal VAL_Sec2. The fourth industrial control computer 514 is electrically connected to the fourth signal control unit 6514 and is used to transmit the signal VAL_Sec3.

[0106] It is understandable that the working principles of the first industrial control computer 511, the second industrial control computer 512, the third industrial control computer 513, the fourth industrial control computer 514, the first signal control unit 6511, the second signal control unit 6512, the third signal control unit 6513, and the fourth signal control unit 6514 are the same as described above, and will not be repeated here.

[0107] Please see Figure 15 Each signal control unit 651 has a logic processing circuit 652 including a NAND gate Uk, a second resistor and a third resistor. The second optocoupler isolation circuit 653 includes a second optocoupler U2 and a fourth resistor. The second resistors of all signal control units 651 form a first voltage divider resistor set Qr1, the third resistors of all signal control units 651 form a second voltage divider resistor set Qr2, and the fourth resistors of all signal control units 651 form a third voltage divider resistor set Qr3.

[0108] The working principle of the signal control module 65 is as follows: The signal expression for the valve signal sequence output by the industrial control computer module 500 is as follows: Q={VAL_Sec0,VAL_Sec1,VAL_Sec2,VAL_Sec3}={0,0,1,0}.

[0109] Each signal control unit 651's NAND gate Uk performs NAND processing on the signal VAL_SecX and the valve control signal SecRelay. Specifically, the NAND gates Uk of the first signal control unit 6511, the second signal control unit 6512, and the fourth signal control unit 6514 all output a high level. This high level applies to the second optocoupler U2 of the first signal control unit 6511, the second signal control unit 6512, and the fourth signal control unit 6514, causing the second optocoupler U2 to enter a cutoff state. Therefore, the second optocoupler U2 outputs a low-level valve stop signal {DO0,DO1,DO3}={0,0,0}.

[0110] The NAND gate Uk of the third signal control unit 6513 outputs a low level. The low level acts on the second optocoupler U2 of the third signal control unit 6513, and the second optocoupler U2 enters the conducting state. Therefore, the second optocoupler U2 outputs a high-level valve drive signal {1}. Therefore, the signal output of the signal control module 65 is {DO0,DO1,DO2,DO3}={0,0,1,0}.

[0111] To illustrate the working principle of the traffic verification multiplexer 600 provided in the embodiments of this application, the following is combined with... Figure 5 , Figure 6 , Figure 9 , Figure 11 and Figure 15 This will be explained in detail below: When the DIP switch module 61 is configured to enter debug mode, the K2 port outputs a high-level debug mode signal. No current flows through the second coil L2. Since the second and third contacts of the second relay 631 are connected by default to form a debug path, the high-level debug mode signal is transmitted to the path enable module 64 through the debug path and the FUC_EN port.

[0112] When the DIP switch module 61 is configured to enter the dual-control working mode, the K1 port outputs a high-level dual-control mode signal. The high-level dual-control mode signal flows through the second coil L2 to generate a magnetic field. Under the action of the magnetic field, the third and fourth contacts of the second relay 631 are connected to form a dual-control path. Therefore, the target port S2 outputs a 5V working enable signal, which is transmitted to the path enable module 64 through the dual-control path and the FUC_EN port.

[0113] When the FUC_EN port outputs a high-level debug enable signal or working enable signal, current flows through the third coil L3 to generate a magnetic field. The third and fourth contacts of the third relay 641 are connected to form a first signal output path 64a, and the fifth and sixth contacts of the third relay 641 are connected to form another first signal output path 64a.

[0114] The gas mass flow verification module 300 sends valve control commands to the terminal control module 400 in advance, so that the terminal control module 400 can control the industrial control computer module 500 to output the corresponding valve signal sequence in advance. The industrial control computer module 500 outputs the valve signal sequence through four signal output terminals 50a, with the signal expression Q={VAL_Sec0,VAL_Sec1,VAL_Sec2,VAL_Sec3}. It is worth noting that since the working principle of each signal control unit is the same, for ease of integration... Figure 11 For explanation purposes, only valve drive signals VAL_Sec0 and VAL_Sec1 will be used here, and valve drive signals VAL_Sec2 and VAL_Sec3 will not be used here.

[0115] The NAND gate of the first signal control unit 6511 receives the valve drive signal VAL_Sec0 and the valve control signal SecRelay output by the gas mass flow verification module 300. It performs NAND processing on the valve drive signal VAL_Sec0 and the valve control signal SecRelay, resulting in a low-level output from the NAND gate. The valve drive signal VAL_Sec0 is then processed by the second optocoupler to obtain the isolated valve drive signal DO0. The isolated valve drive signal DO0 is transmitted to a secondary valve through a first signal output path 64a formed by the third and fourth contacts of the third relay 641, controlling the secondary valve to enter a closed state.

[0116] Similarly, the NAND gate of the second signal control unit 6512 receives the valve drive signal VAL_Sec1 and the valve control signal SecRelay output by the gas mass flow verification module 300, performs NAND processing on the valve drive signal VAL_Sec1 and the valve control signal SecRelay, and the NAND gate outputs a low level. After the valve drive signal VAL_Sec1 is processed by the second optocoupler, the isolated valve drive signal DO1 is obtained. The isolated valve drive signal DO1 is transmitted to another secondary valve through another first signal output path 64a formed by the fifth and sixth contacts of the third relay 641, controlling the secondary valve to enter the closed state.

[0117] It is understandable that the valve drive signal of the first signal control unit 6511 and the valve drive signal of the second signal control unit 6512 are both controlled by the valve control signal SecRelay. This ensures that the valve drive signals of each signal control unit can be output regularly and on time, avoiding irregular valve action timing caused by delay uncertainty. This ensures that each secondary valve operates on time, which is beneficial to improving the process effect.

[0118] When the terminal control module 400 enters single-control operation mode, the target port S2 outputs a low-level enable / disable signal. Regardless of whether the DIP switch module 61 is configured in dual-control or debug mode, the signal output by the FUC_EN port is always low. Specifically, when the DIP switch module 61 is configured in dual-control mode, the third and fourth contacts of the second relay 631 are connected; however, the target port S2 outputs a low level, therefore, the FUC_EN port outputs a low-level enable / disable signal. When the DIP switch module 61 is configured in debug mode, the second and third contacts of the second relay 631 are connected; however, the K2 port is in a high-impedance state, outputting a low-level enable / disable signal; therefore, the FUC_EN port still outputs a low-level enable / disable signal. The third relay 641 defaults to selecting the second signal output path 64b to directly transmit the valve drive signal VAL_Sec0 or valve drive signal VAL_Sec1 output by the industrial control computer module.

[0119] The embodiments of this application are compatible not only with debugging mode and dual-control working mode, but also with single-control working mode, thus meeting the various control needs of multiple parties. With the support of the flow verification multiplexer 600, it is beneficial to improve the adaptability of the flow control system in various application scenarios.

[0120] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them; under the concept of this application, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of this application as described above, which are not provided in detail for the sake of brevity; although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A flow verification multiplexer suitable for gas reaction chambers, characterized in that, include: The DIP switch module is used to electrically connect to the terminal master control module and is configured to output a debug mode signal in debug mode or a dual control mode signal in dual control mode; wherein, the debug mode is the mode in which the gas mass flow verification module verifies the corresponding pipeline volume in the flow control system; the dual control mode is the mode in which the flow control system is controlled by both the gas mass flow verification module and the terminal master control module. The working enable module is electrically connected to the terminal master control module and is configured to respond to the dual control mode signal and output a working enable signal based on the enable activation signal output by the terminal master control module in the dual control working mode. The enable control module includes a second relay, which is electrically connected to the DIP switch module and the working enable module. The second relay has a debugging path and a dual-control path. The enable control module is configured to initially operate in the debugging mode, outputting the debugging mode signal as a debugging enable signal through the debugging path, or, in the dual-control working mode, being controlled by the dual-control mode signal, selecting the dual-control path to transmit the working enable signal or enable failure signal output by the working enable module. The path enabling module includes a third relay, which is electrically connected to the enabling control module and the industrial control computer module respectively; the third relay has a first signal output path and is configured to select the first signal output path in response to the debugging enable signal or the working enable signal. The signal control module is electrically connected to the path enable module, the industrial control computer module, and the gas mass flow verification module, respectively. It is configured to respond to the valve control signal transmitted by the gas mass flow verification module and output the valve drive signal transmitted by the industrial control computer module through the first signal output path.

2. The flow verification multiplexer according to claim 1, characterized in that, The enabling module is also configured to output an enabling failure signal in response to an external invalid signal output by the terminal master control module in single-control operation mode. The third relay further includes a second signal output path, and the enable control module is further configured to control the path enable module to select the second signal output path based on the enable failure signal. The second signal output path is used to transmit the valve drive signal output by the industrial control computer module.

3. The flow verification multiplexer according to claim 1, characterized in that, The enabling module includes: The first relay is electrically connected to the terminal control module and is configured to, in response to the dual-control mode signal, enter an action state to transmit the enable activation signal based on the enable activation signal output by the terminal control module in the dual-control working mode, or, in response to the external invalid signal output by the terminal control module in the single-control working mode, maintain an initial state to output the external invalid signal. The first optocoupler isolation circuit is electrically connected to the first relay and the enable control module, respectively, and is configured to optocoupler isolate the enable activation signal to obtain a working enable signal, or to output the external invalid signal as an enable failure signal.

4. The flow verification multiplexer according to claim 1, characterized in that, The second relay is configured to select the debugging path by default.

5. The flow verification multiplexer for gas reaction chambers according to claim 4, characterized in that, The second relay is also configured to transmit an enable failure signal to the path enable module in response to the terminal master control module in single-control operation mode, so that the path enable module selects a second signal output path, the second signal output path being used to directly transmit the valve drive signal output by the industrial control computer module.

6. The flow verification multiplexer according to claim 2, characterized in that, The third relay is configured to select the second signal output path by default.

7. The flow verification multiplexer according to any one of claims 1 to 6, characterized in that, The signal control module includes multiple signal control units, which are electrically connected to the industrial control computer module and the gas mass flow verification module, respectively. They are configured to respond to the valve control signal transmitted by the gas mass flow verification module and output the valve drive signal transmitted by the industrial control computer module through the first signal output path.

8. The flow verification multiplexer according to claim 7, characterized in that, The industrial control computer module is equipped with multiple signal output terminals and is configured to select a target signal output terminal to output a valve drive signal according to the valve drive command transmitted by the terminal control module. The signal control unit includes a logic processing circuit and a second optocoupler isolation circuit. The first input terminal of the logic processing circuit is electrically connected to the corresponding signal output terminal. The second input terminal of the logic processing circuit is electrically connected to the gas mass flow verification module. The output terminal of the logic processing circuit is connected to the second optocoupler isolation circuit. The second optocoupler isolation circuit is also electrically connected to the path enable module. The logic processing circuit is configured to perform logic processing on the valve drive signal and the valve control signal output from the target signal output terminal, and output the processed valve drive signal to the second optocoupler isolation circuit, so that the second optocoupler isolation circuit performs optocoupler isolation processing on the processed valve drive signal and outputs the isolated valve drive signal through the first signal output path.

9. The flow verification multiplexer according to claim 8, characterized in that, The logic processing circuit is further configured to perform logic processing on the valve stop signal output from the reference signal output terminal and the valve control signal to obtain an optocoupler stop signal, and output the optocoupler stop signal to the second optocoupler isolation circuit so that the second optocoupler isolation circuit stops outputting signals. The reference signal output terminal is a plurality of signal output terminals other than the target signal output terminal.

10. A flow control system, characterized in that, include: The gas mass flow verification module is configured to pre-output valve control commands; The terminal control module is communicatively connected to the gas mass flow verification module and is configured to output a valve drive command in response to the valve control command. An industrial control computer module is communicatively connected to the terminal control module. The industrial control computer module has multiple signal output terminals and is configured to select a target signal output terminal among the multiple signal output terminals to output a valve drive signal in response to the valve drive command. The flow verification multiplexer for a gas reaction chamber as described in any one of claims 1 to 9, wherein the flow verification multiplexer is electrically connected to the gas mass flow verification module, the terminal control module and the industrial control computer module respectively.

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