A lens, a method of manufacturing a lens, an optical device, and a terminal device

Abstract

The present application relates to the technical field of optical structure, and particularly relates to a lens, a preparation method of the lens, an optical device and a terminal device. The lens comprises a lens body and at least two stress relief structures, the at least two stress relief structures are arranged symmetrically along the center of the lens body, and the stress relief structures are integrally formed with the lens body; the stress relief structure comprises an elastic part and a connecting part which are integrally formed, one end of the elastic part is connected to the edge of the lens body, and the other end of the elastic part is connected to the connecting part. The lens in the present application can reduce the influence of stress change on the position accuracy and surface accuracy of the lens.

Description

Technical Field

[0001] This invention relates to the field of optical structure technology, and more particularly to a lens, a method for preparing the lens, an optical device, and a terminal device. Background Technology

[0002] In existing technologies, optical lenses are primarily made of glass and resin. Different application requirements are achieved by creating different coatings on the surface of the optical lenses. Optical lenses possess good light transmittance, mechanochemical properties, and a constant refractive index. Generally, optical glass lenses are heavier and more fragile, while resin lenses are lighter and less fragile, but have poorer heat resistance and scratch resistance.

[0003] Firstly, depending on the application scenario, lens type, and usage requirements, optical lenses have different installation methods, such as vacuum adsorption, clamp fixing, adhesive bonding, pressure plate and screw fixing, and magnetic adsorption. When using these methods, the curing and shrinkage of the adhesive during lens fixing introduces stress changes. Different adhesives produce different stress magnitudes, leading to a deterioration in the lens's surface shape. Screw installation also introduces stress changes, resulting in reduced positional accuracy. The impact of stress introduced by these two methods is particularly pronounced in the installation of micro- and small lenses.

[0004] Secondly, during use, significant changes in ambient temperature can introduce thermal stress into the lens itself, causing deformation and resulting in a deterioration in lens shape. The mounting bracket also introduces thermal stress, causing deformation and reducing lens positional accuracy. Changes in the adhesive's properties can introduce stress changes, leading to alterations in lens shape. When the lens and bracket are made of different materials, the greater the difference in their coefficients of thermal expansion, the greater the stress changes introduced by ambient temperature at their fixed contact points, resulting in a poorer lens shape and lower positional accuracy.

[0005] Therefore, how to reduce the impact of stress changes on the surface accuracy and positional accuracy of optical lenses during installation and use has become an urgent problem to be solved. Summary of the Invention

[0006] This invention provides a lens, a method for preparing the lens, an optical device, and a terminal device to reduce the impact of stress changes on the surface accuracy and positional accuracy of the lens.

[0007] In a first aspect, embodiments of the present invention provide a lens, the lens comprising: a lens body and at least two stress-relieving structures, the at least two stress-relieving structures being symmetrically arranged along the center of the lens body, and the stress-relieving structures being integrally formed with the lens body; the stress-relieving structure comprising an integrally formed elastic portion and a connecting portion, one end of the elastic portion being connected to the edge of the lens body, and the other end of the elastic portion being connected to the connecting portion.

[0008] In this application, the stress-relief structure is integrally formed with the lens body, and the stress-relief structure and the lens body are made of the same material. When the external ambient temperature changes, there is no issue of different coefficients of thermal expansion between the stress-relief structure and the lens body, reducing the impact of the stress-relief structure on the surface shape of the lens body. Furthermore, the symmetrical arrangement of at least two stress-relief structures along the center of the lens body also improves the stability of the lens mounted on the mounting frame and enhances the lens's positional accuracy. The connecting portion is used to connect with the mounting frame, and the elastic portion absorbs the stress generated when the connecting portion connects to the mounting frame, thereby reducing the impact of stress changes during installation on the lens's positional accuracy. Moreover, the elastic portion is made of the same material as the lens body, further reducing the impact of the elastic portion on the surface shape of the lens body.

[0009] In one embodiment, the elastic portion includes a first elastic element, the first elastic element including at least one first through hole, the at least one first through hole penetrating the first elastic element along the thickness direction, and the side of the first elastic element having at least one first opening, the at least one first opening being used to communicate at least one first through hole with the side of the first elastic element.

[0010] In one embodiment, there are two first through holes and two first openings, with the two first openings respectively communicating with the two first through holes, and the two first openings are arranged on both sides of the first elastic member along the center line of the first elastic member.

[0011] In one embodiment, the centerline of the first elastic element coincides with the centerline of the connecting portion.

[0012] In one embodiment, the elastic portion further includes a second elastic member and an elastic connecting plate. One end of the first elastic member and one end of the second elastic member are spaced apart and connected to the edge of the lens body. The other end of the first elastic member and the other end of the second elastic member are connected through the elastic connecting plate, and there is a gap between the elastic connecting plate and the edge of the lens body. The connecting portion is disposed at the center line of the elastic connecting plate.

[0013] In one embodiment, the first elastic element and the second elastic element have the same structure.

[0014] In one embodiment, the first elastic element and the second elastic element are arranged symmetrically about the centerline of the elastic connecting plate.

[0015] In one embodiment, the shape of the lens body is one of a circle, a rectangle, an ellipse, or a rhombus.

[0016] Secondly, embodiments of the present invention provide an optical device comprising a mounting bracket and a lens as described in any of the embodiments of the first aspect above. The mounting bracket includes a mounting frame and a base, the mounting frame being detachably mounted on the base, and the mounting frame including mounting holes through which the lens is connected to the mounting frame. Because the lens has a stress-relief structure, during the mounting process, the stress-relief structure can absorb the stress generated during mounting, and can also eliminate stress caused by external vibrations and thermal effects, reducing the impact of external vibrations and thermal effects on the lens surface shape. This, in turn, ensures the performance of the optical device.

[0017] Thirdly, embodiments of the present invention provide a method for preparing a lens as described in the first aspect, comprising the following steps:

[0018] Photoresist is coated onto the surface of a wafer substrate;

[0019] A lens pattern with at least two stress relief structures is formed on the photoresist using MEMS technology.

[0020] Lenses with at least two stress relief structures are formed on a wafer substrate using MEMS processes.

[0021] Remove the photoresist from the etched wafer substrate, and clean and dry it;

[0022] A glass cover is applied to the surface of the wafer substrate, and the glass cover corresponds to the lens having at least two stress relief structures.

[0023] A film is deposited on the surface of the wafer substrate;

[0024] Remove the glass cover plate;

[0025] The lens is removed by laser invisible scratching.

[0026] In the lens manufacturing method of this application, the stress-relieving structure and the lens body are an integral structure, and the materials of the two are generally the same. There is no issue of different coefficients of thermal expansion between the stress-relieving structure and the lens body. Thus, when the temperature of the external environment changes, the lens body will not experience significant changes in its surface shape due to the difference in the coefficients of thermal expansion between it and the stress-relieving structure. In addition, when the lens is mounted on the mounting frame, the material of the mounting frame is generally different from that of the lens. When the temperature changes, the stress generated between the stress-relieving structure and the mounting frame can also be absorbed by the stress-relieving structure, thereby reducing the impact on the surface shape of the lens body.

[0027] Fourthly, this application also provides a terminal device, including a transceiver assembly. The transceiver assembly includes a transmitter, a receiver, and the optical device described in the second aspect. The transmitter is used to emit a light beam to the optical device, and the optical device is used to reflect the light beam to the receiver. Since the lens in the optical device does not experience significant changes in surface shape due to its different coefficient of thermal expansion compared to the stress-relief structure, the performance of the optical device can be guaranteed, thereby improving the stability of the light beam transmission in the terminal device. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the light spot energy distribution under ideal conditions when RMS=0, provided in an embodiment of the present invention;

[0029] Figure 2a This is a schematic diagram of the energy distribution of the RMS=1 / 50λ wavefront spot provided in an embodiment of the present invention;

[0030] Figure 2b This is a schematic diagram of the energy distribution of the RMS=1 / 30λ wavefront spot provided in an embodiment of the present invention;

[0031] Figure 2c This is a schematic diagram of the energy distribution of the RMS=1 / 10λ wavefront spot provided in an embodiment of the present invention;

[0032] Figure 3 This is a schematic diagram of the structure of an optical device provided in an embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of the structure of a mounting bracket in an optical device provided in an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of a lens structure provided in an embodiment of the present invention;

[0035] Figure 6 This is a schematic diagram of another structure of a lens provided in an embodiment of the present invention;

[0036] Figure 7 This is a schematic diagram of another structure of a lens provided in an embodiment of the present invention;

[0037] Figure 8 This is a schematic diagram of another structure of a lens provided in an embodiment of the present invention;

[0038] Figure 9 This is a schematic diagram of another structure of a lens provided in an embodiment of the present invention;

[0039] Figure 10 This is a schematic diagram of another structure of a lens provided in an embodiment of the present invention;

[0040] Figure 11 This is a flowchart illustrating a method for manufacturing a lens according to an embodiment of the present invention;

[0041] Figures 12a to 12h This is a flowchart illustrating the manufacturing process of a lens according to an embodiment of the present invention;

[0042] Figure 13 This is a schematic diagram of the structure of a terminal device provided in an embodiment of the present invention;

[0043] Figure 14 This is a schematic diagram of another structure of an optical device provided in an embodiment of the present invention;

[0044] Figure 15 This is another structural schematic diagram of a terminal device provided in an embodiment of the present invention;

[0045] Figure 16 This is a schematic diagram of another structure of an optical device provided in an embodiment of the present invention.

[0046] Figure label:

[0047] 1-Wafer substrate; 2-Glass cover; 3-Photoresist; 4-Coating; 10-Lens; 11-Lens body; 12-Stress relief structure; 120-Elastic part; 1201-First elastic element; 1202-First through hole; 1203-Second elastic element; 1204-Elastic connecting plate; 121-Connecting part; 1210-Opening; 20-Mounting bracket; 21-Mounting frame; 211-Mounting groove; 210-Mounting hole; 22-Base; 220-Fixing hole; 30-Transmitter; 40-Receiver; 50-Collimating lens; 60-Primary lens; 70-Secondary lens. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of this application clearer, the application will now be described in further detail with reference to the accompanying drawings.

[0049] Figure 1 This is a schematic diagram of the light spot energy distribution when the lens is in an ideal state with RMS = 0. (Refer to...) Figure 1 When the lens surface shape characterization value: RMS=0, the optical transmission efficiency is 100% and the light energy density of the lens spot is the highest. Figure 2a This is a schematic diagram of the energy distribution of the RMS=1 / 50λ wavefront spot provided in an embodiment of the present invention. Figure 2b This is a schematic diagram of the energy distribution of the RMS=1 / 30λ wavefront spot provided in an embodiment of the present invention. Figure 2c This is a schematic diagram of the energy distribution of the RMS=1 / 10λ wavefront spot provided in an embodiment of the present invention. (Refer to...) Figure 2a , Figure 2b and Figure 2cAs the RMS value gradually increases, the corresponding spot dispersion also increases significantly, the spot energy density decreases, and the link transmission efficiency is reduced. Generally speaking, the surface accuracy required for lens processing is: RMS ≤ 1 / 50λ, where λ is 632.8nm. During lens installation and use, the lens will be affected by stress, causing changes in its surface shape, which will lead to a decrease in optical transmission efficiency.

[0050] Therefore, how to reduce the impact of stress changes on the surface accuracy and positional accuracy of lenses has become an urgent problem to be solved.

[0051] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” “the,” and “this” are intended to also include expressions such as “one or more” unless the context clearly indicates otherwise.

[0052] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0053] Figure 3 This is a schematic diagram of the structure of an optical device provided in an embodiment of the present invention. Figure 4 This is a schematic diagram of a mounting bracket in an optical device provided in an embodiment of the present invention. (Refer to...) Figure 3 and Figure 4The optical device includes a mounting bracket 20 and a lens 10. The mounting bracket 20 includes a base 22 and a mounting frame 21, wherein the mounting frame 21 is detachably fixed to the base 22. The base 22 has a fixing hole 220 that penetrates the base 22 along its thickness direction. The mounting frame 21 has a mounting hole 210, through which the lens 10 is connected to the mounting frame 21. Specifically, at least two mounting slots 211 are provided on the mounting frame 21, which correspond to the stress relief structure 12 on the lens 10, so that the lens 10 is mounted on the mounting frame 21. During the mounting of the lens 10 to the mounting frame 21, the stress relief structure 12 on the lens 10 can absorb the stress generated between the lens 10 and the mounting frame 21, thereby reducing the impact of stress changes on the positional accuracy and surface accuracy of the lens 10. In addition, during the use of the optical device, the stress relief structure 12 can also eliminate stress caused by external vibration and thermal effects, reducing the impact of external vibration and thermal effects on the surface of the lens 10.

[0054] The number of mounting slots on the mounting bracket 21 corresponds to the number of stress relief structures 12 included in the lens 10. Specifically, the number of mounting slots can also be greater than the number of stress relief structures 12.

[0055] The structure of lens 10 will be described in detail below.

[0056] Figure 5 This is a schematic diagram of the structure of a lens provided in an embodiment of this application. Figure 6 This is another schematic diagram of the structure of the lens provided in the embodiments of this application. Figure 7 This is another structural schematic diagram of the lens 10 provided in an embodiment of this application. Figure 8 This is another structural schematic diagram of the lens 10 provided in an embodiment of this application. (Refer to...) Figure 5 , Figure 6 , Figure 7 and Figure 8 The lens 10 includes a lens body 11 and at least two stress-relieving structures 12, wherein the at least two stress-relieving structures 12 are symmetrically arranged along the center of the lens body 11, and are integrally formed with the lens body 11. This means that the stress-relieving structures 12 and the lens body 11 are made of the same material. When the external ambient temperature changes, there is no difference in the coefficient of thermal expansion between the stress-relieving structures 12 and the lens body 11, reducing the impact of the stress-relieving structures 12 on the surface shape of the lens body 11. Furthermore, the symmetrical arrangement of the at least two stress-relieving structures 12 along the center of the lens body 11 also improves the stability of the lens 10 mounted on the mounting bracket 21 and enhances the positional accuracy of the lens 10.

[0057] The stress relief structure 12 includes an elastic portion 120 and a connecting portion 121, which are integrally formed. One end of the elastic portion 120 is connected to the edge of the lens body 11, and the other end is connected to the connecting portion 121. The connecting portion 121 is used to connect with the mounting bracket 21. The elastic portion 120 can absorb the stress generated when the connecting portion 121 is connected to the mounting bracket 21, thereby reducing the impact of stress changes during installation on the positional accuracy of the lens 10. Furthermore, the material of the elastic portion 120 is the same as that of the lens body 11, which also reduces the influence of the elastic portion 120 on the surface shape of the lens body 11.

[0058] It is worth mentioning that, in this embodiment, the stress-relieving structure 12 for eliminating stress generated during lens 10 installation is integrally formed with the lens body 11. The lens 10 can be mounted on any mounting bracket 21, as long as the mounting bracket 21 has a mounting groove or support that mates with the connecting part 121. This allows for more flexible assembly while ensuring positional accuracy and surface shape of the lens 10. Furthermore, the stress-relieving structure 12 also enables the optical device with the lens 10 to absorb the impact of vibration and thermal effects on the surface shape of the lens 10 during operation.

[0059] In one embodiment, the elastic portion 120 includes a first elastic element 1201, which includes at least one first through hole 1202. The at least one first through hole 1202 penetrates the first elastic element 1201 along its thickness direction. The side of the first elastic element 1201 has at least one first opening, which connects the at least one first through hole 1202 to the side of the first elastic element 1201. In this embodiment, the provision of the first through hole 1202 can form a first notch on the first elastic element 1201, which allows the first elastic element 1201 to absorb stress. The number of first through holes 1202 on the first elastic element 1201 can be one, two, three, four, or five, etc., and the corresponding number of first openings can also be one, two, three, four, or five, etc. When the number of first through holes 1202 is greater than one, the number of first openings can also be less than the number of first through holes 1202.

[0060] In one embodiment, when there are two first through holes 1202 and two first openings, the two first openings are respectively connected to the two first through holes 1202, and the two openings are arranged on both sides of the first elastic member 1201 along the center line of the first elastic member 1201, which can make the first elastic member 1201 more stable when absorbing stress.

[0061] In some embodiments, when there are three first through holes 1202 and three first openings, the three first openings are respectively connected to the three first through holes 1202. The structure formed by the first through holes 1202 and the first openings that cooperate with them can be understood as a notch. The notch penetrates the first elastic member 1201 along the thickness direction of the first elastic member 1201, and the notch is connected to one side of the first elastic member 1201. The location of this connection is the location of the first opening. When there are three first through holes 1202 and three first openings, it can be considered that three notches are provided on the first elastic member 1201, and two of the three notches are located on one side of the first elastic member 1201, and the other notch is located on the other side of the first elastic member 1201, so that an S-shaped stress-absorbing part is formed on the first elastic member 1201.

[0062] In the above embodiments, when the elastic part 120 includes only the first elastic member 1201, the center line of the first elastic member 1201 can coincide with the center line of the connecting part 121, so that when the connecting part 121 is installed on the mounting bracket 21, the stress is more easily absorbed by the first elastic member 1201.

[0063] Figure 9 This is a schematic diagram of another structure of a lens 10 provided in an embodiment of the present invention. Figure 10 This is a schematic diagram of yet another structure of a lens 10 provided in an embodiment of the present invention. (Refer to...) Figure 9 and Figure 10 The elastic part 120 may further include a second elastic element 1203 and an elastic connecting plate 1204. One end of the first elastic element 1201 and the second elastic element 1203 are both connected to the edge of the lens body 11, and the one end of the first elastic element 1201 and the one end of the second elastic element 1203 are spaced apart. The other ends of the first elastic element 1201 and the other ends of the second elastic element 1203 are connected through the elastic connecting plate 1204. There is a gap between the elastic connecting plate and the edge of the lens body 11. The connecting part 121 is disposed on the elastic connecting plate 1204. When the connecting part 121 is installed on the mounting bracket 21, the elastic connecting plate 1204 can absorb the stress generated between the connecting part 121 and the mounting bracket 21. Excess stress can be absorbed by the first elastic element 1201 and the second elastic element 1203. The structures of the first elastic element 1201 and the second elastic element 1203 may be the same. In some embodiments, the structures of the first elastic member 1201 and the second elastic member 1203 may be different. Specifically, the first elastic member 1201 may include two first through holes 1202 and two first openings, and the second elastic member 1203 may include two or three second through holes and three second openings. Alternatively, the first elastic member 1201 may include two first through holes 1202 and two second openings, and the second elastic member 1203 may also include two second through holes and two second openings, and the size of the second through holes is larger than the size of the first through holes 1202.

[0064] In one embodiment, the first elastic element 1201 and the second elastic element 1203 are symmetrically arranged around the centerline of the elastic connecting plate 1204, so that the stress absorbed by the first elastic element 1201 and the second elastic element 1203 is relatively even. In addition, the connecting portion 121 is located at the centerline of the elastic connecting plate 1204, so that the stress generated by the connecting portion 121 and the mounting bracket 21 can be absorbed relatively evenly by the first elastic element 1201 and the second elastic element 1203 respectively, thereby reducing the impact of stress changes during installation on the positional accuracy of the lens 10.

[0065] In the above embodiments, the shape of the first through hole 1202 can be a strip or a rectangle, etc.

[0066] When the lens 10 is connected to the mounting frame 21 by adhesive bonding, the connecting part 121 can directly mate with the mounting groove on the mounting frame 21 to fix the lens 10 to the mounting frame 21. When the lens 10 is detachably connected to the mounting frame 21, the connecting part 121 on the lens 10 can be provided with an opening 1210, and the mounting frame 21 can be provided with a protrusion that mates with the opening 1210. The lens 10 is mounted on the mounting frame 21 by the cooperation of the protrusion and the opening 1210. When the connection method between the lens 10 and the mounting frame 21 is different, the connecting part 121 and the mounting frame 21 can be adjusted accordingly.

[0067] In one embodiment, the shape of the lens body 11 may be, but is not limited to, one of the following: circular, rectangular, elliptical, or rhomboid.

[0068] Figure 11 This is a flowchart illustrating a method for manufacturing a lens according to an embodiment of the present invention; Figures 12a to 12h This is a flowchart illustrating the manufacturing process of a lens according to an embodiment of the present invention. (Refer to...) Figure 11 , Figures 12a to 12h This application also provides a method for preparing a lens 10, which includes the following steps:

[0069] S10: Coat the surface of wafer substrate 1 with photoresist;

[0070] S20: A lens 10 pattern with at least two stress relief structures 12 is formed on the photoresist 3 using MEMS technology;

[0071] S30: A lens 10 having at least two stress relief structures 12 is formed on a wafer substrate 1 using MEMS technology;

[0072] S40: Remove the photoresist 3 from the etched wafer substrate 1, and clean and dry it;

[0073] S50: A glass cover plate 2 is added to the surface of the wafer substrate 1, and the glass cover plate 2 corresponds to the lens 10 having at least two stress relief structures 12.

[0074] S60: Deposit film 4 on the surface of wafer substrate 1;

[0075] S70: Remove glass cover plate 2;

[0076] S80: Lens 10 is dislodged by laser invisible scratching.

[0077] In the lens 10 prepared by the above method, the wafer substrate is usually a silicon wafer, a quartz wafer, or a silicon carbide wafer.

[0078] In the lens 10 prepared by the above method, the stress-relief structure 12 and the lens body 11 are an integral structure made of the same material. There is no difference in the coefficient of thermal expansion between the stress-relief structure 12 and the lens body 11. Therefore, when the temperature of the external environment changes, there will be no significant change in the surface shape due to the difference in the coefficients of thermal expansion between the lens body 11 and the stress-relief structure 12. Furthermore, when the lens 10 is mounted on the mounting frame 21, the material of the mounting frame 21 is generally different from that of the lens 10. When the temperature changes, the stress generated between the stress-relief structure 12 and the mounting frame 21 can also be absorbed by the stress-relief structure 12, thereby reducing the impact on the surface shape of the lens body 11.

[0079] It is worth mentioning that when the lens 10 is prepared by the above method, both the lens body 11 and the stress relief structure 12 are formed on the wafer substrate 1. In this way, only one wafer substrate 1 needs to be processed to form the required lens 10, which also simplifies the processing.

[0080] In the above embodiments, the wafer substrate 1 is typically made of silicon wafer, quartz wafer, or silicon carbide wafer, and the thickness of the silicon wafer is typically in the range of 250 μm to 1 mm, but is not limited to this range.

[0081] Step S20 may specifically include: exposing the surface of the photoresist 3 to form the desired pattern through MEMS process, the pattern being a lens structure 10 with stress relief structure 12; depending on the stress relief structure 12 and the lens structure 10, different photomask patterns can be made to form different patterns; and then the desired pattern is formed on the surface of the photoresist 3 through development and drying steps.

[0082] In step S30, etching is performed using MEMS technology to form a lens structure 10 with a stress-relief structure 12. Because MEMS etching technology offers high processing precision, it can achieve a structural dimensional tolerance of ±2μm. The fit tolerance between the stress-relief structure 12 and the mounting bracket 21 is small, resulting in high assembly precision and further reducing stress introduced by assembly tolerances during installation.

[0083] In step S60, the coating is either a reflective film or a transmissive film. The reflective film can be an optical film layer such as a metal film or a dielectric film; the transmissive film can also be an optical film layer such as a metal film or a dielectric film. The coating method can be achieved using conventional MEMS processes such as sputtering or evaporation, or through optical coating.

[0084] In the above embodiments, the fabrication method may further include: covering another surface of the wafer substrate 1 with a glass cover plate 2, the glass cover plate 2 corresponding to at least two stress relief structures 12; and depositing a film on another surface of the wafer substrate 1. The lens 10 thus formed can be a reflective mirror or a transmissive mirror.

[0085] When the ambient temperature changes, the silicon-based lens and the mounting structure will undergo corresponding deformation. ANSYS simulation analysis shows that after stress relief by springs, the stress change difference of the lens is 0, proving that the elastic structure can eliminate the stress change introduced by temperature changes.

[0086] In the experiment, the above-mentioned structural components were subjected to a 500g mechanical impact test, an acceptance-level random vibration test, and a sine wave test. The components were not damaged, proving that the stress-relieving spring structure does not affect the stability of the components during structural installation, nor does it damage the mirror structure.

[0087] Figure 13 This is a schematic diagram of a terminal device provided in an embodiment of the present invention. The terminal device can be a lidar system or a satellite lidar terminal. (Refer to...) Figure 13 The terminal device includes a transceiver assembly, which includes a transmitter 30, a receiver 40, and an optical component as described in the second aspect. The transmitter 30 emits a light beam to the optical component, and the optical component reflects the light beam to the receiver 40. Since the lens in the optical component does not exhibit significant changes in surface shape due to its different coefficient of thermal expansion compared to the stress-relief structure, the performance of the optical component is guaranteed, thereby improving the stability of the light beam transmission in the terminal device. Furthermore, since the lens 10 in the optical component does not exhibit significant changes in surface shape due to its different coefficient of thermal expansion compared to the stress-relief structure, the performance of the optical component is guaranteed, thereby improving the stability of the light beam transmission in the terminal device.

[0088] Figure 14 for Figure 13A schematic diagram of an optical device is shown. In this method, the light beam emitted by the transmitting end 30 can be directly directed to the lens 10 in the optical device. The lens 10 in the optical device reflects the light beam to the receiving end 40, and the receiving end 40 can further reflect the light beam.

[0089] Figure 15 This is another structural schematic diagram of a terminal device provided in an embodiment of the present invention. (Refer to...) Figure 15 The receiving assembly may further include a collimating lens 50, a primary mirror 60, and a secondary mirror 70. The collimating lens 50 can be disposed between the receiving end 40 and the optical device, while the primary mirror 60 and the secondary mirror 70 are disposed sequentially on the side of the optical device away from the collimating lens 50. In this configuration, the receiving end 40 can function as both a receiver and a transmitter, meaning it can both receive and emit a light beam. Both the primary mirror 60 and the secondary mirror 70 can be reflectors.

[0090] Figure 16 for Figure 15 A schematic diagram of the structure of an optical device in the image, with reference to... Figure 15 and Figure 16 The light beam passing through the collimating lens 50 can pass through the gap between the mounting bracket 20 and the lens 10 and be directed towards the main mirror 60. The light beam directed from the main mirror 60 towards the collimating lens passes through the lens 10.

[0091] In the optical device of the above embodiment, the function of lens 10 is to perform spatial beam splitting, i.e., spatial multiplexing beam splitter. Its function is to combine two beams or split one beam into two beams. Its main advantage is that its beam combining or splitting efficiency for beams with different energy distributions is higher than that of ordinary broadband beam splitters, and it does not require the addition of extra components. When the optical device is applied in a terminal, the lens, as a spatial multiplexing beam splitter, is used to combine the beacon beam transmitted and received. The beacon beam transmitted has a long strip of energy distribution, and the received beacon beam can be regarded as a uniform circular beam. Therefore, the spatial multiplexing beam splitter reflects the transmitted beam in the area where the energy distribution is relatively concentrated, and the remaining area is used to transmit the received beacon beam. Its transmission and reception efficiency is higher than that of traditional broadband beam splitters.

[0092] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. A lens, characterized in that, include: The lens body and at least two stress-relieving structures are arranged symmetrically along the center of the lens body, and the stress-relieving structures are integrally formed with the lens body; The stress relief structure includes an integrally formed elastic part and a connecting part. One end of the elastic part is connected to the edge of the lens body, and the other end of the elastic part is connected to the connecting part. The elastic part includes a first elastic element, the first elastic element includes a plurality of first through holes, the plurality of first through holes penetrate the first elastic element along the thickness direction of the first elastic element, the side of the first elastic element has a plurality of first openings, the plurality of first openings are used to connect the plurality of first through holes with the side of the first elastic element, and the first openings are provided on both sides of the center line of the first elastic element. The material of the first elastic element is the same as the material of the lens body.

2. The lens as described in claim 1, characterized in that, There are two first through holes and two first openings. The two first openings are respectively connected to the two first through holes, and the two first openings are arranged on both sides of the first elastic member along the center line of the first elastic member.

3. The lens as described in claim 2, characterized in that, The centerline of the first elastic element coincides with the centerline of the connecting portion.

4. The lens as described in claim 1, characterized in that, The elastic part further includes a second elastic element and an elastic connecting plate. One end of the first elastic element and one end of the second elastic element are connected to the edge of the lens body at a distance. The other end of the first elastic element and the other end of the second elastic element are connected through the elastic connecting plate. There is a gap between the elastic connecting plate and the edge of the lens body. The connecting part is located at the center line of the elastic connecting plate.

5. The lens as described in claim 4, characterized in that, The first elastic element and the second elastic element have the same structure.

6. The lens as described in claim 4, characterized in that, The first elastic element and the second elastic element are arranged symmetrically about the center line of the elastic connecting plate.

7. The lens as described in any one of claims 1 to 6, characterized in that, The shape of the lens body is one of the following: circular, rectangular, elliptical, rhomboid, or polygonal.

8. An optical device, characterized in that, The invention includes a mounting bracket and a lens as described in any one of claims 1 to 4, wherein the mounting bracket includes a mounting frame and a base, the mounting frame is detachably mounted on the base, the mounting frame includes mounting holes, and the lens is connected to the mounting bracket through the mounting holes.

9. A method for preparing a lens as described in any one of claims 1 to 7, characterized in that, The steps include the following: Photoresist is coated onto the surface of a wafer substrate; A lens pattern with at least two stress relief structures is formed on the photoresist using MEMS technology. A lens with at least two stress relief structures is formed on the wafer substrate using MEMS technology; Remove the photoresist from the etched wafer substrate, and clean and dry it; A glass cover is applied to the surface of the wafer substrate, and the glass cover corresponds to a lens having the at least two stress relief structures. A film is deposited on the surface of the wafer substrate; Remove the glass cover plate; The lens is removed by laser invisible scratching.

10. The method for preparing a lens as described in claim 9, characterized in that, The coating is a reflective film or a transmissive film.

11. A terminal device, characterized in that, The transceiver assembly includes a transmitter, a receiver, and an optical device as described in claim 8, wherein the transmitter is used to emit a light beam to the optical device, and the optical device is used to reflect the light beam to the receiver.

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