A micro-motor fast mirror system and a laser communication terminal

Abstract

The application discloses a micro motor fast reflecting mirror system and a laser communication terminal. The micro motor fast reflecting mirror system comprises a reflecting mirror assembly and a driving magnetic base; the reflecting mirror assembly is arranged on one side of the driving magnetic base; the reflecting mirror assembly comprises a mirror surface, a flexible beam, a coil frame and an outer frame; the outer frame is fixedly arranged on the driving magnetic base; the coil frame is connected between the mirror surface and the outer frame, the coil frame surrounds the mirror surface, the outer frame surrounds the coil frame, one end of the flexible beam is connected to the coil frame, and the other end of the flexible beam is connected to the outer frame; an elastic body is fixedly arranged on the side of the driving magnetic base close to the reflecting mirror assembly, the elastic body is connected to the flexible beam, and is used for limiting and damping the flexible beam. By arranging the elastic body at the flexible beam of the reflecting mirror assembly, good damping effect can be achieved.

Description

Technical Field

[0001] This application relates to the field of aerospace satellite communication components technology, and in particular to a micro-motor fast reflector system and a laser communication terminal. Background Technology

[0002] Micro-Electro-Mechanical Systems (MEMS) are widely used in industry due to their small size and low power consumption. Especially in recent years, with the rapid development of satellite internet, MEMS plays an irreplaceable role in fields such as laser communication. However, spacecraft MEMS devices must withstand harsh mechanical conditions ranging from 20Hz to 2000Hz during launch, thus requiring vibration reduction design to ensure their normal operation in such harsh environments. Summary of the Invention

[0003] This application discloses a micro-motor fast-reflecting mirror system and a laser communication terminal. By setting an elastic body at the flexible beam of the reflector assembly, a good vibration reduction effect can be achieved.

[0004] To achieve the above objectives, this application provides the following technical solution:

[0005] In a first aspect, this application provides a micro-motor fast-reflecting mirror system, including a mirror assembly and a drive magnetic base;

[0006] The reflector assembly is disposed on one side of the driving magnetic base. The reflector assembly includes a mirror surface, a flexible beam, a coil frame, and an outer frame. The outer frame is fixed to the driving magnetic base. The coil frame is connected between the mirror surface and the outer frame, and the coil frame surrounds the mirror surface. The outer frame surrounds the coil frame. One end of the flexible beam is connected to the coil frame, and the other end is connected to the outer frame.

[0007] An elastic body is fixed on the side of the drive magnet near the reflector assembly. The elastic body is connected to the flexible beam and is used to limit and dampen the flexible beam.

[0008] The aforementioned micro-motor fast-reflecting mirror system includes a mirror assembly and a drive magnetic base. The mirror assembly is disposed on one side of the drive magnetic base. The mirror assembly includes a mirror surface, a flexible beam, a coil frame, and an outer frame. The outer frame is fixed to the drive magnetic base, the coil frame is connected between the mirror surface and the outer frame, and the coil frame surrounds the mirror surface, while the outer frame surrounds the coil frame. One end of the flexible beam is connected to the coil frame, and the other end is connected to the outer frame. The design of the flexible beam provides the necessary flexibility, allowing the mirror surface to rotate freely within a certain range and return to its original position, ensuring the stability of the mirror assembly. Since the flexible beam is connected between the outer frame and the coil frame, the structure of the outer frame and the coil frame can limit the movement of the flexible beam in its length extension direction. To achieve the limitation of the flexible beam in the first direction (the direction perpendicular to the plane of the outer frame), an elastic body is fixed on the side of the drive magnetic base near the mirror assembly. The elastic body is correspondingly disposed and connected to the flexible beam. During vibration, the elastic body's constraint causes the flexible beam's vibration to compress the elastic body, leading to deformation and the conversion of mechanical vibration energy into elastic potential energy. This absorption and buffering of vibration energy is achieved. The deformation of the elastic body then causes internal friction, which is dissipated as heat. It should be noted that when the elastic body extends to and connects to both sides of the flexible beam, it can also limit the flexible beam's movement in the circumferential direction. In other words, this embodiment achieves vibration reduction for the flexible beam by adding an elastic body between the drive magnet and the flexible beam.

[0009] In some embodiments, the flexible beam includes an inner-axis flexible beam and an outer-axis flexible beam, the coil frame includes an inner-axis coil frame and an outer-axis coil frame, and the elastic body includes a first elastic body and a second elastic body;

[0010] The inner axis coil frame and the outer axis coil frame are connected between the mirror and the outer frame, with the inner axis coil frame surrounding the mirror, the outer axis coil frame surrounding the inner axis coil frame, and the outer frame surrounding the outer axis coil frame; one end of the inner axis flexible beam is connected to the inner axis coil frame, and the other end is connected to the outer axis coil frame; one end of the outer axis flexible beam is connected to the outer axis coil frame, and the other end is connected to the outer frame; the extension direction of the inner axis flexible beam intersects the extension direction of the outer axis flexible beam.

[0011] The first elastic body is fixed to the side of the drive magnet facing the reflector assembly and connected to the inner shaft flexible beam; the side wall of the drive magnet has a limiting protrusion, and the second elastic body is disposed on the side of the limiting protrusion facing the reflector assembly and connected to the outer shaft flexible beam.

[0012] In some embodiments, the first elastomer covers the inner axis flexible beam, and the second elastomer covers the outer axis flexible beam.

[0013] In some embodiments, the width of the inner axis flexible beam is 14μm-60μm, and the width of the outer axis flexible beam is 18μm-80μm.

[0014] In some embodiments, the drive magnet base includes an inner magnet base and an outer magnet base, wherein the side of the outer magnet base facing the inner magnet base has an annular step structure, and the annular step structure forms at least three annular step surfaces.

[0015] In some embodiments, the radial dimensions of the at least three annular stepped surfaces gradually decrease from the inner magnet to the mirror assembly.

[0016] In some embodiments, the elastomer is a silicone rubber elastomer.

[0017] In some embodiments, the reflector assembly is integrally formed.

[0018] In some embodiments, the outer frame includes mounting feet, through which the reflector assembly is fixedly connected to the drive magnet.

[0019] In some embodiments, the micro-motor fast-reflecting mirror system further includes a base, and the drive magnet is fixed to the base.

[0020] Secondly, this application provides a laser communication terminal, including the micro-electro-mechanical fast-reflecting mirror system as described in the first aspect. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a micro-motor fast-reflecting mirror system provided in an embodiment of this application;

[0022] Figure 2 This is an exploded structural diagram of a micro-motor fast-reflecting mirror system provided in an embodiment of this application;

[0023] Figure 3 This is a front view structural diagram of a micro-motor fast-reflecting mirror system provided in an embodiment of this application;

[0024] Figure 4 This is a cross-sectional structural diagram of a micro-motor fast-reflecting mirror system provided in an embodiment of this application;

[0025] Figure 5 This is a schematic diagram of the structure of a reflector assembly provided in an embodiment of this application;

[0026] Figure 6 This is a top view of a micro-motor fast-reflecting mirror system provided in an embodiment of this application;

[0027] Figure 7This is a schematic diagram of the structure of a laser communication terminal provided in an embodiment of this application;

[0028] Icons: 1. Mirror assembly; 11. Mirror surface; 12. Flexible beam; 121. Inner axis flexible beam; 122. Outer axis flexible beam; 13. Coil frame; 131. Inner axis coil frame; 132. Outer axis coil frame; 14. Outer frame; 141. Mounting foot; 2. Drive magnetic base; 21. Inner magnetic base; 22. Outer magnetic base; 3. Elastomer; 31. First elastomer; 32. Second elastomer; 4. Limiting protrusion; 5. Base; 100. Front optical engine module; 200. Rear optical path module; 300. Main control module; 01. Micro-motor fast-reflecting mirror system; 02. Color separator assembly; 03. Silicon reflector assembly; 04. 45° folding mirror group; 05. Single-axis MEMS galvanometer; 06. Transceiver mirror group; 07. Precision tracking detector; 08. Beacon light. Detailed Implementation

[0029] First, let me introduce the design background of this application: Currently, in the application of MEMS fast-reflecting mirrors, stress concentration and damage easily occur at the flexible beams. Traditional MEMS vibration reduction mainly uses two methods: active and passive. Active vibration reduction methods mainly adjust the stiffness of stiffness components, such as changing the stiffness of the component beam by applying electricity to heat it, so that the working mode avoids the non-working mode, thereby achieving the vibration reduction effect. Although active vibration isolation can achieve precise control of the vibration isolation system, it inevitably increases the complexity of component control and also increases power consumption. Passive vibration reduction methods mainly increase damping, such as filling the mounting feet of the MEMS system with dampers or designing an elastic beam structure, with the MEMS device mounted at the elastic beam to form a vibration reduction system. Passive vibration reduction structures are simple and easy to control, but using only a damping structure can cause resonance amplification in the low-frequency range of the MEMS system. On the other hand, using only an elastic beam structure is often not conducive to suppressing high-frequency vibrations.

[0030] To address the aforementioned issues, this application provides a micro-motor fast-reflecting mirror system and a laser communication terminal. By incorporating an elastic body at the flexible beam of the reflector assembly, a good vibration reduction effect can be achieved.

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application. In the description of the embodiments of this application, unless otherwise stated, " / " means "or", for example, A / B can mean A or B; "and / or" in the text is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone.

[0032] The terms "first" and "second" are used for descriptive purposes only and should not be construed as implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this application, unless otherwise stated, "multiple" means two or more.

[0033] Firstly, such as Figures 1-6 As shown, this application provides a micro-motor fast-reflecting mirror system, including a mirror assembly 1 and a drive magnetic base 2;

[0034] The reflector assembly 1 is disposed on one side of the driving magnetic base 2. The reflector assembly 1 includes a mirror surface 11, a flexible beam 12, a coil frame 13, and an outer frame 14. The outer frame 14 is fixed to the driving magnetic base 2. The coil frame 13 is connected between the mirror surface 11 and the outer frame 14, and the coil frame 13 surrounds the mirror surface 11. The outer frame 14 surrounds the coil frame 13. One end of the flexible beam 12 is connected to the coil frame 13, and the other end is connected to the outer frame 14.

[0035] An elastic body 3 is fixed on the side of the drive magnetic base 2 near the reflector assembly 1. The elastic body 3 is connected to the flexible beam 12 and is used to limit and dampen the flexible beam 12.

[0036] like Figure 1 and Figure 2As shown, the aforementioned micro-motor fast-reflecting mirror system includes a mirror assembly 1 and a drive magnet 2. The mirror assembly 1 is disposed on one side of the drive magnet 2. The mirror assembly 1 includes a mirror surface 11, a flexible beam 12, a coil frame 13, and an outer frame 14. The outer frame 14 is fixed to the drive magnet 2, the coil frame 13 is connected between the mirror surface 11 and the outer frame 14, and the coil frame 13 surrounds the mirror surface 11, while the outer frame 14 surrounds the coil frame 13. One end of the flexible beam 12 is connected to the coil frame 13, and the other end is connected to the outer frame 14. It should be noted that the design of the flexible beam 12 provides the necessary flexibility, allowing the mirror surface 11 to rotate freely within a certain range and return to its original position, ensuring the stability of the mirror assembly 1. Since the flexible beam 12 is connected between the outer frame 14 and the coil frame 13, the structure of the outer frame 14 and the coil frame 13 can limit the movement of the flexible beam 12 in its length extension direction. To limit the flexible beam 12 in the first direction (the direction perpendicular to the plane of the outer frame 14), this embodiment of the application has an elastic body 3 fixed on the side of the drive magnet 2 near the reflector assembly 1. The elastic body 3 is correspondingly arranged and connected to the flexible beam 12. During vibration, due to the limiting effect of the elastic body 3, the vibration of the flexible beam 12 will compress the elastic body 3, thereby causing the elastic body 3 to deform under force, that is, converting mechanical vibration energy into elastic potential energy, realizing the absorption and buffering of vibration energy. Then, the deformation of the elastic body 3 will cause internal friction, which will then be converted into heat energy and dissipated. It should be noted that when the elastic body 3 extends to and connects to the two sides of the flexible beam 12, it can also limit the flexible beam 12 in the circumferential direction. That is to say, this embodiment of the application achieves the vibration reduction effect of the flexible beam 12 by adding an elastic body 3 between the drive magnet 2 and the flexible beam 12.

[0037] In some embodiments, such as Figure 1 , Figure 2 , Figure 5 and Figure 6 As shown, the flexible beam 12 includes an inner axis flexible beam 121 and an outer axis flexible beam 122, the coil frame 13 includes an inner axis coil frame 131 and an outer axis coil frame 132, and the elastic body 3 includes a first elastic body 31 and a second elastic body 32.

[0038] The inner axis coil frame 131 and the outer axis coil frame 132 are connected between the mirror surface 11 and the outer frame 14, with the inner axis coil frame 131 surrounding the mirror surface 11, the outer axis coil frame 132 surrounding the inner axis coil frame 131, and the outer frame 14 surrounding the outer axis coil frame 132; one end of the inner axis flexible beam 121 is connected to the inner axis coil frame 131, and the other end is connected to the outer axis coil frame 132; one end of the outer axis flexible beam 122 is connected to the outer axis coil frame 132, and the other end is connected to the outer frame 14; the extension direction of the inner axis flexible beam 121 intersects the extension direction of the outer axis flexible beam 122;

[0039] The first elastic body 31 is fixed on the side of the drive magnetic base 2 facing the reflector assembly 1 and connected to the inner shaft flexible beam 121; the side wall of the drive magnetic base 2 has a limiting protrusion 4, and the second elastic body 32 is disposed on the side of the limiting protrusion 4 facing the reflector assembly 1 and connected to the outer shaft flexible beam 122.

[0040] One possible way to achieve this is, such as Figure 1 and Figure 2 As shown, the micro-motor fast-reflecting mirror system can be a two-dimensional micro-motor fast-reflecting mirror system, meaning the mirror 11 can rotate around two intersecting rotation axes. This design allows the mirror 11 to operate in two degrees of freedom, achieving complex and high-precision optical mirror reflection. For example, the extension direction of the inner axis flexible beam 121 and the extension direction of the outer axis flexible beam 122 can be perpendicular to each other, enabling independent control of the mirror 11 in two directions. This arrangement ensures that the force on the mirror 11 is more uniform during rotation, improving the motion accuracy of the mirror 11. In this embodiment, elastic bodies 3 are provided at both the inner axis flexible beam 121 and the outer axis flexible beam 122. The limiting and energy absorption of the elastic bodies 3 achieves a vibration reduction effect on the multiple flexible beams 12.

[0041] In some embodiments, the first elastic body 31 covers the inner axial flexible beam 121, and the second elastic body 32 covers the outer axial flexible beam 122.

[0042] One possible way to achieve this is, such as Figure 1 and Figure 2 As shown, the first elastic body 31 is directly fixed to the side of the drive magnetic base 2 facing the reflector assembly 1. When the reflector assembly 1 is installed on the drive magnetic base 2, it... Figure 2 As shown, the first elastic body 31 covers the front and rear sides and the upper surface of the inner axial flexible beam 121, and may also cover the lower surface of the inner axial flexible beam 121. Figure 3 and Figure 4 As shown, the second elastic body 32 is fixed to the side surface of the limiting protrusion 4 facing the reflector assembly 1. When the reflector assembly 1 is installed on the drive magnetic base 2, it... Figure 4 As shown, the second elastic body 32 covers the left and right sides and the upper surface of the outer shaft flexible beam 122, and can also cover the lower surface of the outer shaft flexible beam 122. In this embodiment, by covering the inner shaft flexible beam 121 and the outer shaft flexible beam 122 with the first elastic body 31 and the second elastic body 32, vibration reduction in the 360-degree direction can be achieved during the rotation and vibration of the inner shaft flexible beam 121 and the outer shaft flexible beam 122, which is beneficial to further enhance the vibration reduction effect.

[0043] In some embodiments, the width of the inner axial flexible beam 121 is 14μm-60μm, and the width of the outer axial flexible beam 122 is 18μm-80μm.

[0044] For example, the width of the inner axis flexible beam 121 is 14μm, 15μm, 16μm, 17μm, 18μm, 19μm, 20μm, 21μm, 22μm, 23μm, 24μm, 25μm, 26μm, 30μm, 35μm, 40μm, 45μm, 50μm, 55μm, 60μm, etc., and the width of the outer axis flexible beam 122 is 18μm, The specific dimensions are not limited to 19μm, 20μm, 21μm, 22μm, 23μm, 24μm, 25μm, 26μm, 27μm, 28μm, 29μm, 30μm, 31μm, 32μm, 33μm, 34μm, 35μm, 40μm, 45μm, 50μm, 55μm, 60μm, 65μm, 70μm, 75μm, and 80μm. By rationally designing the width dimensions of the inner axis flexible beam 121 and the outer axis flexible beam 122, their stiffness and flexibility can be adjusted, which helps ensure the rotational accuracy of the mirror 11. At the same time, stress distribution can be optimized, stress concentration can be avoided, and the service life of the inner axis flexible beam 121 and the outer axis flexible beam 122 can be extended.

[0045] In some embodiments, the drive magnet 2 includes an inner magnet 21 and an outer magnet 22. The side of the outer magnet 22 facing the inner magnet 21 has an annular step structure, and the annular step structure forms at least three annular step surfaces.

[0046] One possible way to achieve this is, such as Figures 1-3 As shown, the stepped structure with an annular stepped surface formed on the inner wall of the outer magnetic base 22 can make the magnetic field act more concentrated on the reflector assembly 1, constrain the diffusion of the magnetic field in the effective area, and reduce energy consumption.

[0047] In some embodiments, the radial dimensions of at least three annular step surfaces gradually decrease from the inner magnetic base 21 to the reflector assembly 1.

[0048] One possible way to achieve this is, such as Figures 1-3 As shown, the radial dimension design of the annular stepped surface allows for the superposition of multiple magnetic fields within a limited space, making it more suitable for highly integrated micro-motor fast-reflecting mirror systems. By optimizing the radial dimension of the annular stepped surface, the use of magnetic materials can be reduced while ensuring magnetic field performance, thus lowering costs. By designing the radial dimensions of at least three annular stepped surfaces to gradually decrease, the magnetic field can be further concentrated on the reflector assembly 1, constraining the diffusion of the magnetic field within the effective area and reducing energy consumption.

[0049] In some embodiments, the elastomer 3 is a silicone rubber elastomer.

[0050] The elastomer 3 in this embodiment is made of silicone rubber. Silicone rubber's molecular chain structure has a high coefficient of internal friction, effectively converting vibrational energy into heat energy (damping characteristics), suppressing resonance peaks, and reducing vibration transmission. Silicone rubber is not easily corroded by environmental media and has high chemical inertness and environmental tolerance. It should be noted that the material of the elastomer 3 is not limited to silicone rubber; other elastic elements can also be used for vibration damping and energy absorption.

[0051] It should be noted that in this embodiment, the elastomer 3 is formed by filling the inner axial flexible beam 121 and the outer axial flexible beam 122 with viscous silicone rubber liquid, which, after curing, forms a solid silicone rubber elastomer covering the outside of the inner axial flexible beam 121 and the outer axial flexible beam 122. The elastomer 3 in this application is formed by using a dispensing process to apply viscous silicone rubber liquid to the sides and top of the inner axial flexible beam 121 and the outer axial flexible beam 122, so that after the viscous silicone rubber liquid cures, it covers the inner axial flexible beam 121 and the outer axial flexible beam 122, thereby achieving vibration reduction in all directions of the inner axial flexible beam 121 and the outer axial flexible beam 122.

[0052] In some embodiments, the reflector assembly 1 is integrally formed.

[0053] One possible way to achieve this is, such as Figure 1 As shown, the mirror 11, flexible beam 12, coil frame 13, and outer frame 14 in the reflector assembly 1 are integrally formed, which is beneficial for improving structural rigidity and precision, simplifying the process, reducing costs, and enabling the reflector assembly 1 to develop towards high performance, high integration, and high reliability. It should be noted that the reflector assembly 1 is made of silicon wafer, and a gold film of a certain thickness is deposited on the surface of the mirror 11 to achieve optical reflection. The drive magnetic base 2 can be manufactured entirely by lathe milling combined with wire cutting.

[0054] In some embodiments, such as Figure 5 As shown, the outer frame 14 includes mounting feet 141, and the reflector assembly 1 is fixedly connected to the drive magnet 2 via the mounting feet 141.

[0055] In some embodiments, such as Figure 1 and Figure 2 As shown, the micro-motor fast-reflecting mirror system also includes a base 5, and a drive magnetic base 2 is fixed to the base 5.

[0056] Through random vibration testing, the random vibration intensity of the MEMS fast-reflecting mirror system without the use of an elastomer was 10.78 grms, and the mirror surface detached and the flexible beam completely broke. After using an elastomer to protect the flexible beam from vibration, its random vibration intensity increased to 32 grms, which is about twice the normal intensity. After the test, the mirror surface and the flexible beam remained intact.

[0057] Finite element simulation analysis was used to determine the weakest direction of the MEMS fast-reflection mirror. Figure 1 A comparative analysis was conducted before and after adhesive injection vibration isolation (shown in the first direction). With the characteristic frequency completely suppressed, the random vibration stress response decreased from 400 MPa to 22 MPa, a decrease of 18 times, demonstrating a significant vibration reduction effect. This application, while ensuring a simple and easily controllable structure, avoids the resonance amplification phenomenon in the low-frequency domain caused by simply using a damping structure, and also avoids the unfavorable high-frequency vibration suppression phenomenon caused by simply using an elastic beam structure.

[0058] Secondly, such as Figure 7 As shown, this application provides a laser communication terminal, including a front optical-mechanical module 100, a rear optical path module 200, and a main control module 300. The rear optical path module 200 may include a micro-electro-mechanical fast reflector system 01, a dichroic filter assembly 02, a silicon reflector assembly 03, a 45° folding mirror group 04, a single-axis MEMS galvanometer 05, a transceiver mirror group 06, a fine tracking detector 07, and a beacon beam 08.

[0059] Figure 7 The design is primarily for laser terminal communication scenarios, with the thick black line in the diagram representing the optical path. The front optical-mechanical module 100 performs tasks such as coarse tracking and scanning of the laser link. The rear optical path module 200 performs tasks such as beacon and communication light transmission collimation, communication light reception coupling, and precise position detection for fine tracking. The micro-motor fast-reflecting mirror system 01 participates in the optical path adjustment of the rear optical path of the laser communication terminal, achieving high-speed, precise pointing, stabilization, and tracking of the signal transmission and reception beams. The main control module 300 controls the relevant components in the rear optical path module 200.

[0060] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A micro-motor fast-reflecting mirror system, characterized in that, Includes the mirror assembly and the drive magnet; The reflector assembly is disposed on one side of the driving magnetic base. The reflector assembly includes a mirror surface, a flexible beam, a coil frame, and an outer frame. The outer frame is fixed to the driving magnetic base. The coil frame is connected between the mirror surface and the outer frame, and the coil frame surrounds the mirror surface. The outer frame surrounds the coil frame. One end of the flexible beam is connected to the coil frame, and the other end is connected to the outer frame. An elastic body is fixed on the side of the drive magnetic base near the reflector assembly. The elastic body is connected to the flexible beam and is used to limit and dampen the flexible beam. The flexible beam includes an inner-axis flexible beam and an outer-axis flexible beam, the coil frame includes an inner-axis coil frame and an outer-axis coil frame, and the elastic body includes a first elastic body and a second elastic body. The inner axis coil frame and the outer axis coil frame are connected between the mirror and the outer frame, with the inner axis coil frame surrounding the mirror, the outer axis coil frame surrounding the inner axis coil frame, and the outer frame surrounding the outer axis coil frame; one end of the inner axis flexible beam is connected to the inner axis coil frame, and the other end is connected to the outer axis coil frame; one end of the outer axis flexible beam is connected to the outer axis coil frame, and the other end is connected to the outer frame; the extension direction of the inner axis flexible beam intersects the extension direction of the outer axis flexible beam. The first elastic body is fixed to the side of the driving magnetic base facing the reflector assembly and connected to the inner shaft flexible beam; the side wall of the driving magnetic base has a limiting protrusion, and the second elastic body is disposed on the side of the limiting protrusion facing the reflector assembly and connected to the outer shaft flexible beam. The first elastomer covers the inner axis flexible beam, and the second elastomer covers the outer axis flexible beam; The elastomer is formed by filling the inner and outer flexible beams with viscous silicone rubber liquid and then curing it.

2. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The width of the inner axis flexible beam is 14μm-60μm, and the width of the outer axis flexible beam is 18μm-80μm.

3. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The driving magnetic base includes an inner magnetic base and an outer magnetic base. The side of the outer magnetic base facing the inner magnetic base has an annular step structure, and the annular step structure forms at least three annular step surfaces.

4. The micro-motor fast-reflecting mirror system according to claim 3, characterized in that, The radial dimensions of the at least three annular stepped surfaces gradually decrease from the direction from the inner magnetic base to the reflector assembly.

5. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The elastomer is a silicone rubber elastomer.

6. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The reflector assembly is integrally formed.

7. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The outer frame includes mounting feet, and the reflector assembly is fixedly connected to the drive magnet via the mounting feet.

8. The micro-motor fast-reflecting mirror system according to claim 1, characterized in that, The micro-motor fast-reflecting mirror system also includes a base, and the drive magnetic base is fixed to the base.

9. A laser communication terminal, characterized in that, Including the micro-motor fast-reflecting mirror system as described in any one of claims 1-8.

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