Diaphragm rupture detection device and reciprocating pump device

Abstract

The present application provides a kind of diaphragm damage detection device and reciprocating pump device, even if the gas component contained in the bubble generated in pump chamber also does not occur false action when permeating diaphragm.The diaphragm damage detection device (3) of the present application detects the damage of the diaphragm (25) of reciprocating pump (2).The diaphragm damage detection device has: fluid path (FP), which can be communicated with the through hole (24a) of peripheral ring (24);Pressure detector (8), which detects the pressure in fluid path;Exhaust valve (GV), which is connected to fluid path;And discharge path (65), which is connected to exhaust valve.Exhaust valve has: valve body (9);Valve chamber (Rv), which contains valve body;And valve seat surface (42b), which is arranged at the position more upward than valve body.Discharge path is opened at valve seat surface.Valve body can be moved between closed valve position (P2) and open valve position (P1), and is located at open valve position when diaphragm is not damaged.When valve body is not located at closed valve position, valve chamber is communicated with fluid path and discharge path.

Description

Technical Field

[0001] This invention relates to a diaphragm damage detection device and a reciprocating pump device. Background Technology

[0002] A reciprocating pump draws in and discharges a treatment fluid by reciprocating the movement of a membrane diaphragm. The diaphragm is housed within the pump's casing, dividing the space within the casing (diaphragm chamber) into a fluid pressure chamber and a pump chamber. The fluid pressure chamber is filled with a working fluid (e.g., oil) and is equipped with a plunger that reciprocates relative to the fluid pressure chamber, positioned opposite the diaphragm. The reciprocating movement of the plunger causes the diaphragm to reciprocate. As a result, the volume of the pump chamber changes, drawing in and discharging the treatment fluid. In such a reciprocating pump, if the diaphragm is damaged, not only will the pump's performance decrease, but the working fluid may also become contaminated with the treatment fluid. Therefore, a reciprocating pump equipped with a diaphragm damage detection device (hereinafter referred to as the "detection device") is known (for example, see Patent Document 1).

[0003] In the reciprocating pump disclosed in Patent Document 1, a diaphragm is formed by two diaphragms tightly fitted together. A ring-shaped peripheral ring is installed between the outer edges of each of the two diaphragms. The peripheral ring has a through-hole extending radially through the peripheral ring. A pipe is connected to the through-hole, and this pipe is connected to a pressure gauge. In this structure, if one of the two diaphragms ruptures for some reason during the operation of the reciprocating pump, the working fluid or processing fluid will flow between the two diaphragms and into the through-hole and pipe. As a result, the pressure in the fluid pressure chamber or pump chamber is transmitted to the pressure gauge via the flowing liquid, and the diaphragm rupture can be detected by the rise in the pressure gauge reading. Existing technical documents Patent documents:

[0004] Patent Document 1: Japanese Patent Application Publication No. 11-132149 Summary of the Invention

[0005] Typically, diaphragms are made of synthetic resins such as rubber or fluoropolymers. When these synthetic resins are made into a thin film, they have tiny pores (gap) that allow gas to pass through but not liquids. That is, a diaphragm made of synthetic resin and made into a thin film has a certain degree of air permeability. Therefore, when conveying a processing liquid that easily generates bubbles due to pressure changes in the processing liquid within the pump chamber (e.g., a processing liquid containing a large amount of dissolved gas, a easily vaporized processing liquid, etc.), the bubbles generated within the pump chamber can pass through the diaphragm. As a result, because the gaseous components constituting the bubbles remain within the detection device, a false alarm occurs where the pressure gauge reading rises even though the diaphragm is not damaged.

[0006] The present invention aims to provide a diaphragm damage detection device and a reciprocating pump device that will not malfunction even if gas components in the pump chamber pass through the diaphragm.

[0007] One embodiment of the present invention is a diaphragm damage detection device, which is installed on a reciprocating pump that draws in and discharges a treatment fluid by reciprocating movement of a diaphragm, and detects damage to the diaphragm. The diaphragm is formed by two diaphragm sheets tightly bonded together. The reciprocating pump includes: the diaphragm; and an annular peripheral ring disposed between the outer edges of the two diaphragm sheets. The diaphragm damage detection device has: a fluid path communicating with a through-hole in the peripheral ring radially through the peripheral ring; a pressure detector for detecting pressure within the fluid path; an exhaust valve disposed above and connected to the fluid path; and a discharge path connected to the exhaust valve. ; and a one-way valve installed in the fluid path, allowing fluid to pass only from the through-hole side to the exhaust valve side, the exhaust valve comprising: a valve body; a valve chamber communicating with the fluid path and housing the valve body; and a valve seat face disposed opposite to the valve body at a position higher than the valve body, the discharge path opening at the valve seat face, the valve body being movable between a closed position in which the valve body abuts against the valve seat face and covers the discharge path and an open position in which the valve body moves away from the valve seat face and does not cover the discharge path, and being in the open position when the diaphragm is intact, and the valve chamber communicating with the fluid path and the discharge path when the valve body is not in the closed position.

[0008] One embodiment of the present invention is a reciprocating pump device comprising: a reciprocating pump; and a diaphragm damage detection device according to the above embodiment, which is installed on the reciprocating pump to detect damage to the diaphragm. The reciprocating pump comprises: a diaphragm formed by two diaphragm sheets tightly bonded together and having flexibility; an annular peripheral ring disposed between the outer edges of the two diaphragm sheets respectively; and a connecting tube connected to a through hole in the peripheral ring that penetrates the peripheral ring radially. Invention Effects

[0009] According to the present invention, a diaphragm damage detection device and a reciprocating pump device are provided that will not malfunction even if gas components in the pump chamber pass through the diaphragm. Attached Figure Description

[0010] Figure 1 This is a schematic diagram illustrating an embodiment of the reciprocating pump device of the present invention. Figure 2 for Figure 1 A partially enlarged schematic cross-sectional view of the peripheral ring and diaphragm of the reciprocating pump device. Figure 3 for Figure 1 A schematic diagram of the diaphragm damage detection device of the reciprocating pump unit. Figure 4 for Figure 3 A partially enlarged schematic cross-sectional view of the housing of the diaphragm damage detection device. Figure 5 for Figure 3 A partially enlarged schematic cross-sectional view of the exhaust valve of the diaphragm damage detection device. Figure 6 To show Figure 2 When the diaphragm is undamaged Figure 3 A schematic diagram illustrating the operation of the diaphragm damage detection device. Figure 7 To show Figure 2 When the diaphragm is damaged Figure 3 A schematic diagram illustrating the operation of the diaphragm damage detection device. Figure 8 To show Figure 5 After the exhaust valve is closed Figure 3 A schematic diagram illustrating the operation of the diaphragm damage detection device. Figure 9 (a) shows a variation. Figure 3 The diaphragm damage detection device in Figure 1 A schematic diagram of the configuration in a reciprocating pump unit. Figure 9 (b) is a schematic diagram of the diaphragm damage detection device. Explanation of reference numerals in the attached figures 1: Reciprocating pump device 2: Reciprocating pump 3: Diaphragm damage detection device 42b: Valve seat face 43e: Small diameter section (second fluid path) 43g: Tank section (second fluid path) 61: Path 1 (Fluid Path 1) 62: Second Path (Second Fluid Path) 65: Path 5 (Exhaustion Path) 7: Check valve 8: Pressure detector 9: Valve body FP: Fluid Path GV: Exhaust valve P1: Valve Open Position P2: Valve closed position Detailed Implementation

[0011] The embodiments of the diaphragm damage detection device (hereinafter referred to as "this detection device") and the reciprocating pump device (hereinafter referred to as "this pump device") of the present invention will be described below. In the following description, reference will be made appropriately to the accompanying drawings. In the drawings, the same reference numerals are used to denote the same parts and elements, and repeated descriptions are omitted. Furthermore, for ease of explanation, the dimensional proportions of the elements may sometimes be exaggerated, and the description is not limited to the proportions shown in the drawings.

[0012] Reciprocating pump unit Structure of reciprocating pump device Figure 1 This is a schematic diagram illustrating an embodiment of the pump device.

[0013] This pump device 1 draws in and discharges the treatment liquid L1. This pump device 1 includes a reciprocating pump 2 and this detection device 3.

[0014] "Processing fluid L1" refers to the liquid transported by this pump device 1. In this embodiment, processing fluid L1 is, for example, water.

[0015] It should be noted that, in this invention, the treatment liquid L1 is not limited to water. That is, for example, the treatment liquid L1 may also be a liquid with a specific gravity greater than "1" (e.g., sulfuric acid), a liquid with a specific gravity less than "1" (e.g., fuel oil), a liquid that is easily vaporized (e.g., liquefied gas), or a liquid containing a large amount of dissolved gas (e.g., a liquid that has been pressurized by gas).

[0016] The reciprocating pump 2 has the same structure as a known reciprocating pump (diaphragm pump) that draws in and discharges the treatment fluid by means of the reciprocating movement of a diaphragm. Therefore, the following description only provides a general overview of the structure of the reciprocating pump 2, and omits detailed descriptions. The reciprocating pump 2 includes a housing 21, a suction pipe 22, a discharge pipe 23, a peripheral ring 24, a diaphragm 25, a plunger 26, a drive unit 27, and a connecting pipe 28.

[0017] The housing 21 houses the plunger 26 and the drive device 27. A portion of the housing 21 clamps the peripheral ring 24 to form a diaphragm head 21a that divides the diaphragm chamber R1, which houses the central portion 252 (reciprocating part) of the diaphragm 25 (described later).

[0018] The suction pipe 22 is connected to the diaphragm head 21a and functions as a path for the treatment fluid L1 to be drawn into the diaphragm chamber R1 (the pump chamber R3 described later).

[0019] The discharge pipe 23 is connected to the diaphragm head 21a and functions as the path for the treatment liquid L1 discharged from the diaphragm chamber R1 (the pump chamber R3 described later).

[0020] The peripheral ring 24 holds the diaphragm 25. The peripheral ring 24 is in the shape of a ring plate (i.e., a ring). The peripheral ring 24 has at least one through hole 24a. In the radial direction of the peripheral ring 24, the through hole 24a is a hole that extends from the inner peripheral surface of the peripheral ring 24 to the outer peripheral surface.

[0021] Figure 2 This is a partially enlarged schematic cross-sectional view of the peripheral ring 24 and the diaphragm 25. Please refer to the following explanation as appropriate. Figure 1 .

[0022] The diaphragm 25 draws the treatment fluid L1 into the pump chamber R3 (described later) and discharges the treatment fluid L1 from the pump chamber R3 by reciprocating movement. The outer edge 251 of the diaphragm 25 is mounted on the peripheral ring 24 while the central portion 252 of the diaphragm 25 is under predetermined tension. Specifically, the diaphragm 25 is formed by overlapping and tightly bonding two circular membrane-like diaphragm sheets 25a and 25b. The diaphragm sheets 25a and 25b are made of synthetic resins such as PTFE (polytetrafluoroethylene). The outer edge 25c of the diaphragm sheet 25a is spaced apart from the outer edge 25d of the diaphragm sheet 25b, and the peripheral ring 24 is disposed between the outer edges 25c and 25d. The outer edge portion 25c is mounted on the peripheral ring 24 under a predetermined tension on the central portion 25e of the diaphragm sheet 25a, and the outer edge portion 25d is mounted on the peripheral ring 24 under a predetermined tension on the central portion 25f of the diaphragm sheet 25b. The central portion 25e of the diaphragm sheet 25a and the central portion 25f of the diaphragm sheet 25b are in close contact. The outer edge portions 25c and 25d constitute the outer edge portion 251, and the central portions 25e and 25f constitute the central portion 252.

[0023] As previously described, the peripheral ring 24 is held by the diaphragm head 21a. The central portion 252 of the diaphragm 25 is disposed in the diaphragm chamber R1, dividing the diaphragm chamber R1 into a fluid pressure chamber R2 (the space facing the diaphragm 25b) and a pump chamber R3 (the space facing the diaphragm 25a). The fluid pressure chamber R2 is filled with a working fluid (e.g., oil) L2. During operation of this pump device 1, the pump chamber R3 is filled with a processing fluid L1. In the following description, "forward direction" refers to the direction in which the pump chamber R3 is located relative to the diaphragm 25, and "rear direction" refers to the direction in which the fluid pressure chamber R2 is located relative to the diaphragm 25.

[0024] The following explanation mainly refers to Figure 1 . The plunger 26 reciprocates, thereby causing the central portion 252 of the diaphragm 25 to reciprocate via the working fluid L2. The plunger 26 is positioned behind the diaphragm 25 in a manner that reciprocates relative to the fluid pressure chamber R2 and is opposite to the central portion 252 of the diaphragm 25.

[0025] The drive unit 27 causes the plunger 26 to reciprocate. The drive unit 27 includes, for example, a motor (not shown) and a transmission mechanism (not shown) that transmits the power of the motor to the plunger 26.

[0026] The connecting pipe 28 is a pipe body that connects the through hole 24a of the peripheral ring 24 to the fluid path FP described later. One end of the connecting pipe 28 is connected to the through hole 24a.

[0027] It should be noted that in this invention, the connecting pipe 28 is only required to be configured to connect the through hole 24a with the fluid path FP, and is not limited to a pipe body. That is, for example, the connecting pipe 28 can also be a tubular connector.

[0028] This testing device 3 detects damage to the diaphragm 25. This testing device 3 is installed on the diaphragm head 21a of the reciprocating pump 2. The specific structure of this testing device 3 is described later.

[0029] Diaphragm damage detection device Structure of Diaphragm Damage Detection Device Figure 3 This is a schematic diagram of the detection device 3. For ease of explanation, the figure also schematically shows a portion of the structure of the reciprocating pump 2. In the following description of this testing device 3, appropriate reference will be made. Figure 3 .

[0030] This testing device 3 includes a housing 4, a connecting part 5, an internal path 6, a one-way valve 7, a pressure detector 8, a valve body 9, and a drain valve 10. Except for the fact that this testing device 3 has an exhaust valve GV described later, the main structure of this testing device 3 is the same as that of existing diaphragm damage testing devices (hereinafter referred to as "existing testing devices").

[0031] Figure 4 This is a partially enlarged schematic cross-sectional view of the casing 4. This figure shows a magnified view of the vicinity of the exhaust valve GV. The valve body 9 is shown in a non-sectional view.

[0032] The housing 4 contains an internal path 6 and functions as the housing for the exhaust valve GV. The housing 4 is made of a metal such as stainless steel. The housing 4 extends vertically along the second path 62, through-hole 43c, and fifth path 65 (the axial direction of these, as described later), and is mounted, for example, to the diaphragm head 21a. In the front-rear direction, the housing 4 is positioned, for example, further rearward than the through-hole 24a. The housing 4 includes a first housing 41, a second housing 42, and a third housing 43.

[0033] The first housing 41 contains the first path 61, the second path 62, the third path 63, and the fourth path 64, which will be described later. The first housing 41 is, for example, cylindrical.

[0034] The second housing 42 contains the fifth path 65, which will be described later. The second housing 42 is cylindrical, for example. The central portion of the lower surface 42a of the second housing 42 is a conical surface (i.e., an inverted conical surface) that is recessed upwards into a cone shape, which functions as the valve seat surface 42b, which will be described later. The second housing 42 is disposed above the first housing 41 and is mounted to the first housing 41 by bolts (not shown).

[0035] The third housing 43 internally includes the second path 62 (described later) and the valve chamber Rv. The third housing 43 is, for example, a flattened cylindrical shape in the vertical direction. A through-hole 43c is disposed in the third housing 43, opening at the center of its upper surface 43a and lower surface 43b. The through-hole 43c has a large-diameter portion 43d, a small-diameter portion 43e, a stepped portion 43f, and multiple grooves 43g. The large-diameter portion 43d is cylindrical, and the small-diameter portion 43e is substantially cylindrical. The inner diameter of the large-diameter portion 43d is larger than the inner diameter of the small-diameter portion 43e. The large-diameter portion 43d is adjacent to and positioned above the small-diameter portion 43e. The stepped portion 43f is formed from the annular bottom of the large-diameter portion 43d. A portion of the circumferential surface of the small diameter portion 43e is recessed radially outward from the upper end to the lower end of the small diameter portion 43e to form a groove 43g. The small diameter portion 43e and the groove 43g function as part of the fluid path FP described later.

[0036] The third housing 43 is positioned between the upper surface 41a of the first housing 41 and the lower surface 42a of the second housing 42, and is held between the first housing 41 and the second housing 42. At this time, the valve seat surface 42b is positioned above the large-diameter portion 43d, covering it from above. As a result, the valve seat surface 42b and the large-diameter portion 43d divide the interior of the housing 4 into a generally cylindrical space (hereinafter referred to as "valve chamber Rv"). Furthermore, the first housing 41 to the third housing 43 can be easily disassembled by simply removing the bolts. Sealing components such as O-rings or gaskets (not shown) are appropriately arranged between the first housing 41 and the third housing 43, and between the second housing 42 and the third housing 43.

[0037] The connecting part 5 is, for example, a known tubular connector for connecting the connecting tube 28. The connecting part 5 is installed on the housing 4 (first housing 41) in a manner that connects to the internal path 6 (first path 61 described later). The other end of the connecting tube 28 is connected to the connecting part 5, and the connecting tube 28 is connected to the internal path 6 via the connecting part 5.

[0038] An internal path 6 is configured (formed) inside the housing 4 (first housing 41) and is a path for fluid (hereinafter referred to as "inflow fluid") flowing from the diaphragm 25 into the through hole 24a. That is, the housing 4 contains the internal path 6. The internal path 6 includes a first path 61, a second path 62, a third path 63, a fourth path 64, and a fifth path 65.

[0039] "Inflow fluid" refers to the fluid that seeps into the through hole 24a through or through the diaphragm 25 and flows into (seeps into) the internal path 6 via the connecting pipe 28 and the connecting part 5. Fluid passing through the diaphragm 25 (hereinafter referred to as "through fluid") is, for example, the fluid that flows from the rupture point X (see reference 25) when the diaphragm sheets 25a and 25b (diaphragm 25) are damaged. Figure 7 The processing fluid L1 and / or working fluid L2 flow into (permeate) between diaphragm sheets 25a and 25b through diaphragm sheets 25a and 25b. The fluid permeating diaphragm 25 (hereinafter referred to as "permeable fluid") includes, for example, bubbles generated based on gaseous components dissolved in the processing fluid L1 (dissolved gas), bubbles contained in the processing fluid L1, and / or bubbles generated due to the vaporization of the processing fluid L1. As previously described, diaphragm sheets 25a and 25b (diaphragm 25) are made of synthetic resin, therefore the liquid (processing fluid L1, working fluid L2) does not permeate diaphragm 25, but some gas (dissolved gas, etc.) can permeate diaphragm 25. In the following description, "upstream side" refers to the upstream side where the inflowing fluid flows within the internal path 6, and "downstream side" refers to the downstream side where the inflowing fluid flows within the internal path 6.

[0040] The first path 61 and the second path 62 are the paths through which the inflowing fluid flows between the connecting portion 5 and the exhaust valve GV. The first path 61 is arranged inside the first housing 41 in a series manner relative to the second path 62 (e.g., in the vertical direction (horizontal direction)). The upstream end 61a of the first path 61 is connected to the connecting portion 5, and the downstream end 61b of the first path 61 is connected to the check valve 7. That is, the first path 61 can be connected to the connecting pipe 28 via the connecting portion 5 and to the second path 62 via the check valve 7. The second path 62 is arranged inside the first housing 41 in a vertical direction. The upstream end 62a of the second path 62 is connected to the check valve 7. The downstream end 62b of the second path 62 opens at the center of the upper surface 41a of the first housing 41 and communicates with the small-diameter portion 43e and the groove portion 43g of the third housing 43 disposed above the downstream end 62b. Therefore, the downstream end 62b of the second path 62 is positioned higher than the upstream end 62a of the second path 62, and the small-diameter portion 43e and the groove portion 43g are positioned higher than the downstream end 62b. The first path 61, the second path 62, the small-diameter portion 43e, and the groove portion 43g constitute a fluid path FP that allows the inflow fluid from the connecting pipe 28 to flow to the exhaust valve GV.

[0041] The third path 63 is a drainage path used to discharge fluid (mainly through fluid) flowing into the second path 62 to the outside of the housing 4. The third path 63 is disposed inside the first housing 41. The upstream end 63a of the third path 63 is connected to the second path 62, and the downstream end 63b of the third path 63 opens on the outer surface of the housing 4 (the first housing 41).

[0042] The fourth path 64 is a pressure port connecting the second path 62 and the pressure detector 8, used by the pressure detector 8 to detect the pressure of the fluid in the second path 62. The fourth path 64 is disposed inside the first housing 41.

[0043] The fifth path 65 is the path through which the permeate fluid flowing into the fluid path FP is discharged to the outside of the housing 4. The fifth path 65 is arranged vertically inside the second housing 42. The upstream end 65a of the fifth path 65 opens at the center of the valve seat surface 42b, and the downstream end 65b of the fifth path 65 opens on the outer surface of the housing 4 (second housing 42). The fifth path 65 is an example of a discharge path in this invention.

[0044] The one-way valve 7 is disposed between the first path 61 and the second path 62, and is a known check valve configured to allow fluid to flow only from the first path 61 to the second path 62. In other words, the one-way valve 7 is installed in the fluid path FP and is configured to allow fluid to flow only from the through-hole 24a side to the exhaust valve GV side.

[0045] Pressure detector 8 detects the pressure of the fluid within the second path 62. Pressure detector 8 is, for example, a known pressure gauge.

[0046] It should be noted that in this invention, the pressure detector 8 only needs to be able to detect the pressure within the second path 62, and is not limited to a pressure gauge. That is, for example, the pressure detector 8 can also be a known pressure switch or pressure sensor.

[0047] The valve body 9 functions as the valve body of the exhaust valve GV, moving between the open position P1 and the closed position P2, as described later, depending on the flow of the fluid. As described later, the material of the valve body 9 is determined based on the specific gravity difference with the processing fluid L1 and / or the terminal velocity (also called "free settling velocity" or "terminal velocity") relative to the processing fluid L1 (working fluid L2), and in this embodiment, it is made of polypropylene (PP). The shape of the valve body 9 is determined based on the shape of the valve seat surface 42b relative to the valve body 9, and in this embodiment, it is spherical. The valve body 9 is housed in the valve chamber Rv. The diameter of the valve body 9 is smaller than the inner diameter of the large diameter portion 43d of the third housing 43, and larger than the inner diameter of the small diameter portion 43e. That is, a gap S is formed between the valve body 9 and the large diameter portion 43d in the horizontal direction.

[0048] Drain valve 10 is a drain valve used to discharge fluid (mainly through fluid) flowing into the second path 62 to the outside of the housing 4. Drain valve 10 is installed in the third path 63.

[0049] Structure of the exhaust valve Figure 5 This is a partially enlarged schematic cross-sectional view of the exhaust valve GV. The figure shows the valve body 9 in a non-sectional view. For clarity, the figure shows the valve body 9 and the second path 62 in the closed position P2 with a double-dotted line. For clarity, the figure shows the open position P1 and the closed position P2 at the center of the valve body 9.

[0050] The exhaust valve GV is a valve that discharges the fluid flowing into the second path 62 to the outside of the housing 4, and retains the fluid flowing into the second path 62 inside the housing 4. That is, the exhaust valve GV functions as a valve that discharges gas from the fifth path 65 but not liquid. The exhaust valve GV is composed of at least a valve seat surface 42b, a valve chamber Rv, and a valve body 9. That is, the exhaust valve GV has a valve seat surface 42b, a valve chamber Rv, and a valve body 9. The exhaust valve GV is positioned higher than the fluid path FP and is connected to both the fluid path FP and the fifth path 65. As previously described, the valve body 9 is housed in the valve chamber Rv. In the vertical direction, the valve seat surface 42b is positioned higher than the valve body 9, opposite to it. Within the valve chamber Rv, the valve body 9 can move between the open position P1 and the closed position P2. The valve body 9 moves along the valve chamber Rv (large diameter portion 43d). Therefore, its direction of movement is along the axial direction (vertical direction) of the large diameter portion 43d.

[0051] "Valve open position P1" refers to the position where the valve body 9 does not cover (block) the fifth path 65 from below. In this invention, valve open position P1 is the lowest position within the movement range of the valve body 9 in the valve chamber Rv. In other words, valve open position P1 is the position where the valve body 9 is furthest from the valve seat surface 42b within the valve chamber Rv. When the valve body 9 is in valve open position P1, the valve body 9 abuts against the stepped portion 43f, the upper part of the small diameter portion 43e is blocked by the valve body 9, while the upper part of the groove portion 43g is not blocked by the valve body 9. Therefore, the valve chamber Rv is connected to the second path 62 via the groove portion 43g. In addition, the valve body 9 does not abut against the valve seat surface 42b, and the fifth path 65 is not blocked by the valve body 9. Therefore, the valve chamber Rv is connected to the fifth path 65. Here, when the valve body 9 is in the open position P1, the shortest distance between the valve body 9 and the valve seat surface 42b in the vertical direction (that is, the distance that the valve body 9 can move) is set to a shorter length of about 10 to 20% of the diameter of the valve body 9.

[0052] "Closed valve position P2" refers to the position where the valve body 9 covers (blocks) the fifth path 65 from below. In this invention, the closed valve position P2 is the highest position of the valve body 9 within the valve chamber Rv, where it abuts against the valve seat surface 42b. That is, in the vertical direction, the closed valve position P2 is located above the open valve position P1 (directly above in this embodiment).

[0053] When the specific gravity of valve body 9 is less than that of the treated liquid L1, valve body 9 floats on the treated liquid L1. Therefore, when the treated liquid L1 flows into valve chamber Rv, valve body 9 moves together with the treated liquid L1 from the open position P1 to the closed position P2, covering (blocking) the fifth path 65. At this time, exhaust valve GV closes. In this embodiment, the treated liquid L1 is water, and valve body 9 is made of PP. That is, the specific gravity of valve body 9 is less than that of the treated liquid L1, and valve body 9 moves together with the treated liquid L1 in valve chamber Rv.

[0054] On the other hand, when the specific gravity of valve body 9 is greater than that of the processing fluid L1, valve body 9 does not float on the processing fluid L1. Even in this case, as long as the flow velocity of the processing fluid L1 flowing in valve chamber Rv, especially in the gap S between valve body 9 and large diameter portion 43d, is greater than the ultimate velocity of valve body 9 relative to the processing fluid L1, valve body 9 can be pushed upward by the flow of processing fluid L1 and moved from the open position P1 to the closed position P2. Here, the ultimate velocity "Vs" of valve body 9 relative to the fluid (processing fluid L1) is calculated, for example, according to a formula representing ultimate velocity, represented by the Stokes formula.

[0055] In addition, the velocity “Vf” of the fluid flowing in the pipe with a cross-sectional area “A” at a flow rate “Q” is expressed by the following formula (1).

[0056] Vf=Q / A (1)

[0057] Therefore, by designing the shape of the large diameter portion 43d and the valve body 9 (the cross-sectional area "A" of the gap S) in a way that satisfies the relationship "Vf>Vs" (preferably "Vf>>Vs"), the valve body 9 moves to the closed valve position P2 by the flow of the processing fluid L1.

[0058] Here, when the fluid is the working fluid L2, similar to the processing fluid L1, the shape of the large-diameter portion 43d and the valve body 9 (the cross-sectional area "A" of the gap S) can be designed according to the final velocity relative to the working fluid L2. Therefore, the shape of the large-diameter portion 43d and the valve body 9 (the cross-sectional area "A" of the gap S) is designed so that even if the processing fluid L1 or the working fluid L2 flows into the valve chamber Rv, the valve body 9 can move to the closed position P2. As mentioned above, the housing 4 can be divided into the first housing 41 to the third housing 43. Moreover, in the valve chamber Rv, the large-diameter portion 43d, which determines the cross-sectional area "A" of the gap S, is disposed in the replaceable third housing 43. Therefore, by simply replacing the third housing 43 with another third housing 43 that has a different shape of the through hole 43c (large-diameter portion 43d), a suitable gap S corresponding to the shape and specific gravity of the valve body 9 can be formed. That is, the flow rate "Vf" that causes the valve body 9 to move can be easily adjusted by changing the final velocity "Vs". Similarly, the shape of the valve seat surface 42b can be arbitrarily selected by replacing the second housing 42.

[0059] It should be noted that in this invention, the flow rate can also be calculated using the cross-sectional area of ​​the valve chamber Rv or the small-diameter portion 43e instead of the gap S. In this case, the cross-sectional area of ​​the valve chamber Rv or the small-diameter portion 43e is larger than the cross-sectional area of ​​the gap S. Therefore, the flow rate of the processed liquid L1 in the valve chamber Rv or the small-diameter portion 43e will be slower than the flow rate in the gap S. Under this condition, as long as the relationship "Vf > Vs" is satisfied, the relationship "Vf > Vs" will also be reliably satisfied in the gap S. In this structure, it is not necessary to consider the cross-sectional area of ​​the valve body 9, and a simple flow rate calculation can be performed using only the cross-sectional area of ​​the path.

[0060] Operation of reciprocating pump device Next, focusing on the operation of the detection device 3, the operation of the pump device 1 will be explained as follows. In the following explanation, please refer to the relevant references as appropriate. Figures 1 to 5 .

[0061] During operation of this pump device 1, the drive device 27 causes the plunger 26 to reciprocate, which in turn causes the diaphragm 25 (central portion 252) to reciprocate via the working fluid L2. At this time, based on the reciprocating movement of the diaphragm 25, the processing liquid L1 is drawn from the suction pipe 22 into the pump chamber R3, and the processing liquid L1 in the pump chamber R3 is discharged to the discharge pipe 23. Here, when the processing liquid L1 is drawn from the suction pipe 22 into the pump chamber R3, the pressure applied to the processing liquid L1 in the pump chamber R3 decreases, and dissolved gases in the processing liquid L1 in the pump chamber R3 may precipitate in the form of bubbles (bubbling). Especially when the processing liquid L1 is pressurized by gas (e.g., N2 or H2) in a reservoir connected to the upstream side of the processing liquid L1 that flows closer to the suction pipe 22, its gaseous components easily dissolve into the processing liquid L1 and bubble within the pump chamber R3.

[0062] Figure 6 This diagram illustrates the operation of the detection device 3 when the diaphragm 25 is intact. Hollow arrows indicate the flow of the permeating fluid (gas component). For clarity, the diagram shows the valve open position P1 at the center of the valve body 9.

[0063] When the diaphragm 25 is intact, the processing fluid L1 and the working fluid L2 do not pass through the diaphragm 25 and do not flow into the through hole 24a, the connecting pipe 28, and the internal path 6. In other words, the fluid does not flow into the internal path 6. On the other hand, a portion of the air bubbles present in the pump chamber R3 permeates through the diaphragm 25. As a result, the gaseous component constituting the air bubbles flows into the first path 61 as permeable fluid from between the diaphragm sheets 25a and 25b through the through hole 24a and the connecting pipe 28. When the pressure of the permeable fluid flowing into the first path 61 reaches a pressure that causes the check valve 7 to open, the permeable fluid flows into the second path 62 and the small diameter portion 43e, and then flows into the valve chamber Rv through the groove portion 43g. Here, the flow rate of the permeable fluid in the valve chamber Rv (gap S) is extremely small compared to the flow rate of the fluid, and the specific gravity of the gaseous component of the permeable fluid is extremely small compared to the specific gravity of the valve body 9. Therefore, even if the permeable fluid passes through the gap S, the valve body 9 will not move from the open position P1. In other words, valve body 9 is not in the closed position P2. That is, exhaust valve GV is open. At this time, valve chamber Rv is connected to the second path 62 and the fifth path 65 via groove 43g and small diameter section 43e. Therefore, the permeate fluid flowing into valve chamber Rv is discharged to the outside of housing 4 via the fifth path 65, without stagnating in fluid path FP. As a result, the pressure in the second path 62 (the pressure of the permeate fluid) is equivalent to atmospheric pressure, and the reading of pressure detector 8 does not change.

[0064] Figure 7This diagram illustrates the operation of the detection device 3 when the diaphragm 25 is damaged. The diagram shows the state of the detection device 3 at the point in time when a portion of the diaphragm 25a in contact with the treatment fluid L1 is damaged and the exhaust valve GV is closed. The flow of the fluid is indicated by gray arrows. For clarity, the closed valve position P2 is shown at the center of the valve body 9.

[0065] When diaphragm 25 is damaged (assuming diaphragm 25a is damaged), the processing fluid L1 flows from the damaged point X through diaphragm 25a into the space between diaphragms 25a and 25b. At this time, a pressure equivalent to the discharge pressure is applied to the flowing processing fluid L1. Therefore, the processing fluid L1 flowing into the space between diaphragms 25a and 25b peels off the tight fit between diaphragms 25a and 25b, and flows into the first path 61 as a through fluid through the through hole 24a and the connecting pipe 28. The pressure of the processing fluid L1 flowing into the first path 61 is sufficiently greater than the pressure that opens the check valve 7. Therefore, the processing fluid L1 instantaneously opens the check valve 7 and flows into the second path 62 and the small diameter portion 43e, and flows into the valve chamber Rv through the groove portion 43g. As mentioned above, the specific gravity of the valve body 9 is less than that of the processing fluid L1, so the valve body 9 moves together with the processing fluid L1 towards the closed position P2. At this point, valve body 9 is guided to the conical valve seat surface 42b, and viewed from below, it surrounds the fifth path 65 in a concentric circle, liquid-tightly abutting against the valve seat surface 42b. As a result, valve body 9 covers a portion (upper end) of valve chamber Rv and the fifth path 65 from below. In other words, the fifth path 65 is liquid-tightly blocked by valve body 9. Thus, exhaust valve GV closes, preventing the processed fluid L1 from moving towards the fifth path 65. As mentioned earlier, the distance valve body 9 can move is small, therefore the movement of valve body 9 from the open position P1 to the closed position P2 ends in a very short time. Therefore, processed fluid L1 will not leak into the fifth path 65 (even if it does leak, the amount is extremely small).

[0066] Figure 8 This is a schematic diagram illustrating the operation of the detection device 3 after the exhaust valve GV is closed.

[0067] If the exhaust valve GV closes, the valve body 9 is pressed against the valve seat surface 42b by the pressure of the treatment fluid L1, and fixed in the closed position P2. The treatment fluid L1 remains in the valve chamber Rv, the tank 43g, the small diameter section 43e, and the second path 62, causing the check valve 7 to close. At this time, the pressure in the second path 62 becomes higher than atmospheric pressure due to the treatment fluid L1 (e.g., close to the discharge pressure (several MPa)), and the reading of the pressure detector 8 rises. As a result, damage to the diaphragm 25 can be detected.

[0068] Thus, the detection device 3 is equipped with an exhaust valve GV, which discharges the permeable fluid to the outside of the housing 4. Therefore, in this detection device 3, even if gas components contained in the bubbles generated in the pump chamber R3 pass through the diaphragm 25, the pressure detector 8 will not malfunction. On the other hand, assuming that the diaphragm 25 is damaged, the exhaust valve GV closes quickly, and the pressure detector 8 detects the pressure increase caused by the permeable fluid flowing into the second path 62. Therefore, this detection device 3 can detect damage to the diaphragm 25 in a timely manner.

[0069] Summarize According to the embodiments described above, the detection device 3 includes a fluid path FP (first path 61, second path 62, small diameter portion 43e, and groove portion 43g), a pressure detector 8, an exhaust valve GV, a fifth path 65, and a check valve 7. The first path 61 is connected to the through hole 24a via a connecting pipe 28. The pressure detector 8 detects the pressure of the fluid in the second path 62. The exhaust valve GV includes a valve body 9, a valve chamber Rv, and a valve seat surface 42b. The valve chamber Rv is positioned higher than the small diameter portion 43e and the groove portion 43g, connects to the small diameter portion 43e and the groove portion 43g, and accommodates the valve body 9. The valve seat surface 42b is positioned higher than the valve body 9 and opposite to it. The fifth path 65 has an opening in the valve seat surface 42b. The check valve 7 is installed in the fluid path FP, allowing fluid to flow only from the through hole 24a side (first path 61 side) to the exhaust valve GV side (second path 62 side). Valve body 9 is movable between the closed position P2 and the open position P1. When the diaphragm 25 is intact, valve body 9 is in the open position P1. When valve body 9 is not in the closed position P2, valve chamber Rv is connected to the small diameter portion 43e, the groove portion 43g, and the fifth path 65. According to this structure, when the diaphragm 25 is intact, even if permeate flows into the fluid path FP, the permeate flows through valve chamber Rv to the fifth path 65 and is discharged to the outside of housing 4. Therefore, in this detection device 3, even if the gas components contained in the bubbles generated in pump chamber R3 pass through the diaphragm 25, the pressure detector 8 will not malfunction, and there will be no malfunction where the diaphragm 25 is detected as intact.

[0070] Furthermore, according to the embodiment described above, the specific gravity of the valve body 9 is less than that of the processing liquid L1. With this structure, when the processing liquid L1 flows into the valve chamber Rv, the valve body 9 moves together with the processing liquid L1 towards the closed valve position P2, and the exhaust valve GV closes. As a result, the pressure detector 8 detects an increase in the pressure of the fluid (processing liquid L1) within the second path 62, and this detection device 3 can accurately detect damage to the diaphragm 25.

[0071] Furthermore, according to the embodiments described above, the detection device 3 includes a one-way valve 7, which is positioned between the first path 61 and the second path 62, allowing fluid to flow only from the first path 61 to the second path 62. With this structure, when the exhaust valve GV is closed, the fluid is reliably retained in the second path 62 and does not flow back from the second path 62 to the first path 61. As a result, the pressure of the fluid in the second path 62 does not fluctuate significantly, and the reading of the pressure detector 8 remains stable once it rises, without significant fluctuations. Therefore, the detection device 3 can detect diaphragm 25 damage more reliably and stably.

[0072] Furthermore, according to the embodiment described above, the valve body 9 is spherical in shape, and the valve seat surface 42b is a conical surface recessed into a cone shape towards the fifth path 65. Since the valve body 9 rises together with the processing fluid L1, it will rise while swaying. Therefore, when the valve body 9 abuts against the valve seat surface 42b, when viewed from below, the center position of the valve body 9 can deviate from the center of the valve seat surface 42b (it can deviate from the closed position P2). However, according to this structure, the valve body 9 can be guided to the valve seat surface 42b and ultimately located in a fixed position (closed position P2).

[0073] Variations Next, focusing on the differences from the previously described embodiment (hereinafter referred to as "first embodiment"), variations of the detection device 3 will be described below. In the following variations, for ease of explanation, the same reference numerals are used for components identical to those in the first embodiment and components having common functions. In the following variations, appropriate reference numerals will be used... Figures 1 to 8 .

[0074] Figure 9 (a) is a schematic diagram showing the configuration of the modified detection device 3A in the pump device 1. Figure 9 (b) is a schematic diagram of the detection device 3A.

[0075] In this modified detection device 3A, the angle of the housing 4 mounted on the diaphragm head 21a and the material of the valve body 9 differ from those in the first embodiment. Specifically, in this detection device 3A, the housing 4 is mounted on the diaphragm head 21a at an angle of θ1° (e.g., 30°) compared to the housing 4 in the first embodiment. The valve body 9 is made of a material (e.g., SUS440C) with a specific gravity greater than that of the processing fluid L1. The shape of the large diameter portion 43d and the valve body 9 (the cross-sectional area "A" of the gap S) is designed such that the flow velocity of the processing fluid L1 flowing in the gap S between the valve body 9 and the large diameter portion 43d is (sufficiently) greater than the ultimate velocity of the valve body 9 relative to the processing fluid L1 and the working fluid L2. Therefore, even if the valve body 9 is made of a material with a specific gravity greater than that of the processing fluid L1, the valve body 9 will move to the closed position P2 and block the fifth path 65 when the diaphragm sheets 25a and 25b are damaged. Therefore, this detection device 3A is able to detect damage to the diaphragm 25.

[0076] The second path 62, the through hole 43c (large diameter portion 43d and small diameter portion 43e), and the fifth path 65 extend in a direction inclined at "θ1°" from the vertical direction. That is, the movement direction of the valve body 9 within the valve chamber Rv is approximately inclined at "θ1°" from the vertical direction and approximately inclined at "90°-θ1°" from the horizontal direction. In other words, the inner circumferential surface of the valve chamber Rv (large diameter portion 43d) is an inclined surface. The valve seat surface 42b is positioned obliquely above the valve body 9, that is, higher than the valve body 9. In this structure, the gravity acting on the valve body 9 is decomposed by the inclined surface. If a force greater than the component of gravity along the inclined surface is applied to the valve body 9, the valve body 9 rolls upward along the inclined surface. Therefore, the flow rate of the processing fluid L1 required to move the valve body 9 to the closed valve position P2 is smaller (reduced) than when the valve chamber Rv extends in the vertical direction (when the movement direction of the valve body 9 is in the vertical direction). That is, when the specific gravity of the valve body 9 is greater than that of the processing liquid L1, the valve body 9 in the valve chamber Rv of this modified example is easier to move than the valve body 9 in the valve chamber Rv of the first embodiment.

[0077] It should be noted that in the modified example, as long as the valve body 9 is in the open position P1 by its own weight when the diaphragm 25 is not damaged, the angle "θ1°" is not limited to "30°". The angle "θ1°" may be set to "1° to 89°", preferably an angle at which the valve body 9 can move smoothly between the open position P1 and the closed position P2 (for example, about 30° to 60°).

[0078] Alternatively, in a modified embodiment, only the valve chamber Rv (through hole 43c) may extend at an angle from vertically. In this case, the structure of the housing 4 is the same as in the first embodiment, except for the valve chamber Rv.

[0079] Furthermore, in the modified embodiment, the orientation and shape of the valve seat surface 42b can also be the same as in the first embodiment. That is, the valve seat surface 42b may not be obliquely upward, but rather a conical surface that is concave upward.

[0080] Other implementation methods It should be noted that, in this invention, the valve body 9 is not limited to being made of PP. That is, for example, the valve body 9 may be made of synthetic resins such as PE (polyethylene) with a specific gravity less than 1, or it may be made of synthetic resins such as PTFE with a specific gravity greater than 1. In addition, for example, in environments where the valve body 9 is prone to deformation (e.g., environments with high temperatures and / or high discharge pressures of the treatment fluid L1), the valve body 9 may also be made of materials with higher strength and heat resistance than synthetic resins (e.g., metals).

[0081] Furthermore, in this invention, the shape of the valve body 9 is not limited to a spherical shape, as long as it corresponds to the shape of the valve seat surface 42b relative to the valve body 9. That is, for example, the shape of the valve body 9 can also be conical. In addition, when the shape of the valve seat surface 42b is planar, the shape of the valve body 9 can also be a circular plate, or it can also be a shape in which the shaft portion that can be inserted into the fifth path 65 protrudes from the center of the circular plate (viewed from the side as an inverted T shape).

[0082] Furthermore, in this invention, the principle utilized for the movement of the valve body 9 is not limited to the difference in specific gravity or ultimate velocity. That is, for example, the valve body 9 can also move by utilizing the difference in resistance (throttling resistance) of the fluid flowing into the capillary. Specifically, the valve body 9, for example, has a fine orifice (through hole) that is exposed in the valve chamber Rv when the valve body 9 is in the open position P1, thereby connecting the valve chamber Rv to the fifth path 65, and is not exposed in the valve chamber Rv when the valve body 9 is in the closed position P2. Generally, the throttling resistance of liquids is greater than that of gases. Therefore, when the permeable fluid flows into the valve chamber Rv, the permeable fluid flows more easily into the through hole, and the valve body 9 does not move to the closed position P2. On the other hand, when the through fluid flows into the valve chamber Rv, due to the throttling resistance in the through hole, the through fluid cannot easily flow into the through hole, and the valve body 9 is pushed to the closed position P2 by the through fluid filling the valve chamber Rv.

[0083] Furthermore, in this invention, the valve body 9 can also be hollow. In this case, even if the valve body 9 is made of a material with a specific gravity greater than that of the processing liquid L1, the buoyancy of the valve body 9 will increase. Therefore, the apparent specific gravity of the valve body 9 can be less than that of the processing liquid L1.

[0084] Furthermore, in this invention, the shape of the through hole 43c is not limited to the shape of the first embodiment, as long as fluid can flow into the valve chamber Rv and the fifth path 65 when the valve body 9 is in the open position P1. That is, for example, the through hole 43c may also have multiple through holes with openings at the bottom of the large diameter portion 43d, instead of the small diameter portion 43e and the groove portion 43g.

[0085] Furthermore, in this invention, the structure of the housing 4 is not limited to that of the first embodiment. That is, for example, the third housing 43 may be integrally formed with the first housing 41. Alternatively, for example, only the exhaust valve GV may be modularized and installed inside or outside the housing 4. Moreover, recesses that accommodate and clamp the third housing 43 may be formed on the upper surface 41a of the first housing 41 and / or the lower surface 42a of the second housing 42.

[0086] Furthermore, in this invention, the reciprocating pump 2 may not have a tubular connecting pipe 28. In this case, for example, the connecting part 5 of the detection device 3 may be installed on the diaphragm head 21a, and the connecting part 5 may communicate with the through hole 24a. In this case, the connecting part 5 is an example of the connecting pipe in this invention.

[0087] Furthermore, in this invention, a device for collecting or neutralizing the gas components discharged from the exhaust valve GV may also be installed in the fifth path 65.

[0088] Embodiments of the present invention Next, referring to the terms and reference numerals described in each embodiment, embodiments of the present invention as understood from the above-described embodiments are described below.

[0089] The first embodiment of the present invention is a diaphragm damage detection device (e.g., diaphragm damage detection device 3, 3A), which is installed on a reciprocating pump (e.g., reciprocating pump 2) that draws in and discharges a treatment liquid (e.g., treatment liquid L1) by reciprocating movement of a diaphragm (e.g., diaphragm 25). The device detects damage to the diaphragm, which is formed by tightly fitting two diaphragm sheets (e.g., diaphragm sheets 25a, 25b). The reciprocating pump includes: the diaphragm (e.g., diaphragm 25); and an annular peripheral... A peripheral ring (e.g., peripheral ring 24) is disposed between the outer edges (e.g., outer edges 25c, 25d) of each of the two diaphragms. The diaphragm damage detection device includes: a fluid path (e.g., fluid path FP) capable of communicating with a through-hole (e.g., through-hole 24a) that radially penetrates the peripheral ring; a pressure detector (e.g., pressure detector 8) that detects the pressure within the fluid path; and an exhaust valve (e.g., exhaust valve GV) disposed within the fluid path. A valve body is located further up and connected to the fluid path; a discharge path (e.g., fifth path 65) is connected to the vent valve; and a check valve (e.g., check valve 7) is installed in the fluid path to allow fluid to pass only from the through-hole side to the vent valve side. The vent valve includes: a valve body (e.g., valve body 9); a valve chamber (e.g., valve chamber Rv) connected to the fluid path and housing the valve body; and a valve seat surface (e.g., valve seat surface 42b) disposed opposite the valve body at a position higher than the valve body. The discharge path opens in the valve seat surface. The valve body is movable between a closed position (e.g., closed position P2) where the valve body abuts against the valve seat surface and covers the discharge path, and an open position (e.g., open position P1) where the valve body leaves the valve seat surface and does not cover the discharge path. When the diaphragm is intact, the valve body is in the open position. When the valve body is not in the closed position, the valve chamber is in communication with the fluid path and the discharge path. According to this structure, false alarms will not occur where the diaphragm is detected as damaged even though it is not damaged.

[0090] The second embodiment of the present invention is a diaphragm damage detection device (e.g., diaphragm damage detection device 3) according to the first embodiment, wherein the specific gravity of the valve body is less than the specific gravity of the treatment liquid. Based on this structure, this detection device can accurately detect diaphragm damage.

[0091] The third embodiment of the present invention is a diaphragm damage detection device (e.g., diaphragm damage detection device 3A) according to the first embodiment, wherein the specific gravity of the valve body is greater than the specific gravity of the processing liquid, and the valve chamber and the valve body are formed such that when the processing liquid flowing through the diaphragm flows into the valve chamber, the flow rate of the processing liquid in the valve chamber is greater than the ultimate velocity of the valve body relative to the processing liquid. Based on this structure, the valve body can be formed from a material with high strength and heat resistance.

[0092] The fourth embodiment of the present invention is a diaphragm damage detection device according to the third embodiment, wherein the moving direction of the valve body is inclined relative to the vertical and horizontal directions. According to this structure, the flow rate required to move the valve body is reduced.

[0093] The fifth embodiment of the present invention is a diaphragm damage detection device according to any one of the embodiments of the first to fourth embodiments, wherein the valve body is spherical and the valve seat surface is an inverted conical surface recessed into a cone shape facing the discharge path. According to this structure, the valve body can be guided to the valve seat surface and finally located in a fixed position (closed position).

[0094] The sixth embodiment of the present invention is a reciprocating pump device (e.g., reciprocating pump device 1) comprising: a reciprocating pump (e.g., reciprocating pump 2); and a diaphragm damage detection device (e.g., diaphragm damage detection device 3, 3A) according to the first embodiment, which is installed on the reciprocating pump to detect damage to the diaphragm. The reciprocating pump comprises: a diaphragm (e.g., diaphragm 25) formed by tightly fitting two diaphragm sheets (e.g., diaphragm sheets 25a, 25b); an annular peripheral ring (e.g., peripheral ring 24) disposed between the outer edges (e.g., outer edges 25c, 25d) of each of the two diaphragm sheets; and a connecting tube (e.g., connecting tube 28) connected to a through hole (e.g., through hole 24a) that radially penetrates the peripheral ring. According to this structure, false alarms will not occur where the diaphragm is detected as damaged even though it is not damaged.

Claims

1. A diaphragm damage detection device, installed on a reciprocating pump that draws in and discharges a treatment liquid by means of the reciprocating movement of a diaphragm, for detecting damage to the diaphragm, wherein the diaphragm is formed by two diaphragm sheets tightly bonded together, wherein... The reciprocating pump has the following features: The diaphragm; A circular peripheral ring is disposed between the outer edges of each of the two diaphragms; and The pump chamber, with one side of the diaphragm facing it, draws in and discharges the treatment liquid through the reciprocating movement of the diaphragm. The diaphragm has air permeability, allowing gas contained in the treatment liquid drawn into the pump chamber to pass through. The diaphragm damage detection device has the following features: A fluid path that can connect to a through hole that penetrates the peripheral ring radially. A pressure detector that detects the pressure within the fluid path; An exhaust valve is positioned above the fluid path and connected to the fluid path; The discharge path is connected to the exhaust valve; and A one-way valve, installed in the fluid path, allows fluid to flow only from the through-hole side to the vent valve side. The exhaust valve includes: Valve body; A valve chamber, which is connected to the fluid path, houses the valve body; and The valve seat surface is positioned above the valve body, opposite to it. The discharge path opens on the valve seat surface. The valve body is movable between a closed position where it abuts against the valve seat surface and covers the discharge path, and an open position where it moves away from the valve seat surface and does not cover the discharge path. When the diaphragm is intact, it is in the open position. When the valve body is not in the closed position, the valve chamber is connected to the fluid path and the discharge path.

2. The diaphragm damage detection device according to claim 1, wherein, The specific gravity of the valve body is less than that of the treatment liquid.

3. The diaphragm damage detection device according to claim 1, wherein, The specific gravity of the valve body is greater than that of the treatment liquid. The valve chamber and the valve body are configured such that when the processing liquid flows into the valve chamber through the diaphragm, the flow rate of the processing liquid in the valve chamber is greater than the ultimate velocity of the valve body relative to the processing liquid.

4. The diaphragm damage detection device according to claim 3, wherein, The valve body moves in an inclined direction relative to both the vertical and horizontal directions.

5. The diaphragm damage detection device according to any one of claims 1 to 4, wherein, The valve body is spherical in shape. The valve seat surface is an inverted conical surface that is recessed into a cone shape towards the discharge path.

6. A reciprocating pump device, comprising: Reciprocating pumps; and The diaphragm damage detection device according to claim 1 is installed on the reciprocating pump to detect diaphragm damage. The reciprocating pump has the following features: A diaphragm is formed by two diaphragm sheets that are tightly bonded together. A circular peripheral ring is disposed between the outer edges of each of the two diaphragms; The pump chamber, facing one side of the diaphragm, is used to draw in and discharge the treatment liquid by means of the reciprocating movement of the diaphragm; and A connecting pipe, which is connected to a through hole that penetrates the peripheral ring radially. The diaphragm has permeability that allows gas contained in the treatment liquid drawn into the pump chamber to pass through.

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