A method for rapid batch fabrication of tilted channel micro-aperture optical elements on multiple transparent glass substrates

Abstract

This invention discloses a method for rapidly batch processing tilted channel micro-aperture optical elements on multiple transparent glass substrates. Polished glass slices are stacked together with the same tilt angle and spacing, immersed in a high-viscosity, low-volatility refractive index matching solution, and laser drilling is performed using a vertically incident laser beam. This allows for simultaneous processing of multiple slices, improving efficiency. After laser drilling of multiple slices, marking symbols are created on the micro-aperture substrates using laser marking. These markings are used for batch classification and subsequent traceability of the tilted channel micro-aperture substrates used in matching microchannel plates. The glass refractive index matching solution-assisted laser processing method for tilted channel microchannel plates proposed in this invention solves the problems of low efficiency caused by the current single-slice processing of tilted microchannel arrays and low yield and pass rate caused by laser processing of thick vertical channel glass followed by tilting slicing, thus meeting the requirements for mass production of MCPs.

Description

Technical Field

[0001] This invention relates to the field of microchannel plate technology, and more specifically to a method for rapidly batch processing tilted channel micro-aperture optical elements on multiple transparent glass substrates, thereby improving the processing efficiency of tilted channel micro-aperture optical elements. Background Technology

[0002] Fabricating micro-hole array substrates that meet the requirements of Microchannel Plates (MCPs) using laser-induced etching technology is currently a key research focus both domestically and internationally. Thanks to the excellent drilling effect of lasers on insulating glass materials, no further substrate insulation treatment is needed after the micro-hole array is formed. This fundamentally solves the problem of silicon-based MCP designs, particularly those researched by US institutions, where silicon channel oxidation and insulation deformation prevents the MCP from meeting the stringent requirements for high-voltage operation. In 2022, INCOM in the US proposed a technology for fabricating tilted channel micro-hole arrays using laser-induced etching. Domestic research institutions have also conducted related research and development work on processing micro-hole array substrates using quartz glass sheets through laser-induced etching.

[0003] Currently, research on laser-induced etching technology for fabricating microchannel array substrates that meet the requirements of microchannel plates mainly focuses on the feasibility of the technology, pursuing parameters such as microchannel tilt angle, array accuracy, and channel inner wall roughness to meet the requirements of microchannel plates. However, the efficiency of laser processing in actual mass production and use has not been addressed. Taking a certain type of flat microchannel plate as an example, its aperture is 5μm, the aperture spacing is 6μm, the effective area is φ18.8~φ20.2mm, and there are nearly 10 million channels in the effective area. The array position deviation is ≤±0.2μm. Therefore, processing using a high-speed galvanometer system is not feasible. Only a high-precision motion platform can control the sample to move according to the design pattern to achieve processing. This leads to a significant reduction in processing speed. Even with S-shaped high-speed motion processing, processing a single piece takes at least 1 hour, which cannot meet the needs of mass production.

[0004] Besides single-piece laser drilling, there are two foreseeable ways to improve processing efficiency based on this technology: The first is to directly use a laser to drill holes in thick glass vertically, and then slice the thick glass at a certain tilt angle to prepare a single-piece tilted microchannel array; the second is to tilt the laser at a certain angle to drill holes in a glass column that has already formed a certain tilt angle, and then slice the thick glass column horizontally to prepare a tilted microchannel array.

[0005] However, both of the above-mentioned solutions for improving processing efficiency have fatal problems from the perspectives of feasibility and mass production:

[0006] The first design scheme, taking 5mm thick glass as an example, if the outer diameter of the tilted microchannel array plate is φ25mm, the thickness is 0.3mm, and the tilt angle is 7°, plus the cold processing loss, the slice thickness is at least 0.5mm. If sliced ​​at 7°, a maximum of 3 thin substrate slices can be cut. Moreover, this scheme has more stringent requirements for the optical uniformity and impurity content of the material. If the laser beam collides with the impurities inside the material, the light path emission will be deflected or absorbed, resulting in the array structure of the entire material being unqualified. Therefore, the yield and pass rate are low, and it is not suitable for mass production.

[0007] The second design scheme uses a tilted laser to process glass pillars that are already at an angle. This can solve the problem of excessive loss during cold processing. For a 0.3mm glass pillar, the slice thickness is 0.5mm, and six thin substrate slices can be cut from one section, increasing the yield. However, it also faces the problem of processing scrap due to the inhomogeneity of the material throughout the section. In addition, this scheme has a density defect, that is, when the laser is tilted and focused, due to the asymmetric refraction, the actual processing focal length is lower than the wire length. The applicant conducted relevant research on this issue and found that glass sheets with a thickness of more than 1mm cannot be processed into tilted channels using the tilted laser method, and it is not suitable for the mass processing of tilted channel MCP products. Summary of the Invention

[0008] In view of the shortcomings of existing technologies, the purpose of this invention is to improve the efficiency of laser drilling of tilted microchannel arrays and address the problems of single-piece and multi-piece stacking processing with tilted laser beam angles and the re-slicing of thick glass pillars with vertical laser beams. This invention proposes a method for rapidly batch processing tilted channel microchannel array optical elements on multiple transparent glass substrates. The method uses a refractive index matching fluid to assist in the processing of multiple tilted stacked transparent glass sheets (MCP substrates). It combines height lifting to compensate for the processing height difference caused by the tilt of the transparent glass sheets and the uneven laser modification caused by the difference in the relative focal positions of the left and right regions of the tilted transparent glass sheets. This enables the laser drilling of multiple MCP substrates in a single operation, and each sheet is marked to distinguish etching batches and achieve long-term sample traceability. Finally, a resistive layer and an emitting layer are deposited on the prepared microchannel array, and input and output electrodes are plated to fabricate a functionalized microchannel plate.

[0009] According to a first aspect of the present invention, a method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates is provided, comprising:

[0010] Multiple transparent glass sheets of a certain thickness and the same thickness are stacked at intervals from top to bottom and fixed at the same tilt angle to metal assembly fixtures with slots. Every two transparent glass sheets are spaced at the same distance. Each transparent glass sheet is locked in a set of slots, and the relatively higher side is defined as the first side and the relatively lower side as the second side.

[0011] A metal assembly fixture with assembled transparent glass sheets is fixed together with a processing groove. The metal assembly fixture and the assembled transparent glass sheets are all located within the space defined by the processing groove.

[0012] Add glass refractive index matching liquid into the processing tank. After the glass refractive index matching liquid has soaked each transparent glass sheet, fix the processing tank on the processing platform of the laser processing equipment.

[0013] Adjust the position of the laser cutting head of the laser processing equipment so that it is perpendicular to the liquid surface of the matching liquid in the processing tank;

[0014] The laser processing equipment controls the processing platform to move along the XY direction according to the planned movement path, and controls the laser to emit laser light to perform laser drilling on multiple transparent glass sheets below through the laser cutting head.

[0015] Among them, for multiple transparent glass sheets placed at an angle, the drilling positions of the microchannel array and the moving path of the processing platform are planned from the first side to the second side; for each inclined transparent glass sheet, the drilling positions of each row have the same height, and the drilling positions of each row decrease in gradient from the first row on the first side to the second side.

[0016] During the laser drilling process, the laser processing equipment controls the movement of the processing platform and uses the laser cutting head to simultaneously perform inclined channel laser drilling on multiple glass sheets, starting from the first row. After each row is completed, the laser processing equipment controls the processing platform to rise along the Z-axis and then performs laser drilling on the next row until the laser drilling process is completed.

[0017] According to the first aspect of the present invention, a method for rapidly batch processing tilted channel micro-aperture optical elements on multiple transparent glass substrates is used to improve the laser drilling efficiency of tilted micro-channel arrays based on the refractive index variation of the laser beam at different interfaces and processing compensation for different heights. Based on laser-induced etching technology, polished glass slices are stacked together with the same tilt angle and the same spacing, placed in a high-viscosity, low-volatility refractive index matching liquid, and laser drilling is performed by vertical incident laser beam, thereby realizing simultaneous processing of multiple slices.

[0018] According to the first aspect of the present invention, a method for rapidly batch processing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates involves using polished glass sheets as substrates, fixing them at the same tilt angle on a metal assembly fixture with slots, then fixing them together with a processing tank containing a glass refractive index matching liquid, and fixing the processing tank on the processing platform of a laser processing equipment. The laser cutting head is adjusted to be perpendicular to the liquid surface of the matching liquid in the processing tank. Then, the movement trajectory is controlled by the XYZ mechanical movement of the worktable, and the laser emits laser light, thereby realizing simultaneous laser drilling of tilted channels on multiple glass sheets. During the processing, the Z-axis lifting motion is used to compensate for the height difference caused by the tilt of the substrate, solving the problem of uneven laser modification caused by the difference in the relative position of the focal point in the left and right areas of the tilted glass substrate.

[0019] In an optional embodiment, the tilt angle and / or spacing of the multiple transparent glass sheets are controlled by changing the position of the slot.

[0020] As an optional implementation, the tilt angle is in the range of 0° to 45°, and the distance between the two transparent glass sheets is in the range of 0.2mm to 5mm.

[0021] As an optional implementation, the glass refractive index matching liquid has the same refractive index as the processed transparent glass sheet.

[0022] As an optional implementation, the glass refractive index matching liquid comprises one or more of the following components:

[0023] Cargille 50350; Cargille 06350; ethyl cinnamate / isopropyl myristate mixture; glycerol / water mixture; and benzyl benzoate / anhydrous ethanol mixture.

[0024] As an optional implementation, after each row of corresponding drilling positions with the same height position is completed by laser drilling, the height of the processing platform raised along the Z-axis is controlled to compensate for the difference in processing height caused by the tilt of the transparent glass sheet and the uneven laser modification caused by the difference in the relative position of the focal point in the left and right areas of the tilted transparent glass sheet.

[0025] As an optional implementation, the laser beam emitted by the laser is spatially shaped into a Bessel beam with a filament length in the range of 1 to 10 mm and an effective processing depth in the range of 0.1 mm to 5 mm.

[0026] A method for rapidly batch-processing tilted channel micro-aperture optical elements on multiple transparent glass substrates according to a first aspect of the present invention, the method further comprising the following steps:

[0027] After completing the laser drilling process on multiple transparent glass sheets, the processing platform is controlled to descend along the Z-axis to its initial position;

[0028] The control processing platform moves along the XY direction, so that the laser cutting head is repositioned to the solid edge region of the transparent glass sheet, which is the edge region of the non-tilted channel array of the transparent glass sheet;

[0029] Based on the initial position and height of each transparent glass sheet, the laser's focus parameters are adjusted to focus sequentially onto the surface of the transparent glass sheet from bottom to top. Different marks are then individually processed on the surface of each transparent glass sheet to distinguish the position of each transparent glass sheet during processing, thereby enabling the classification and long-term traceability of multiple processed samples.

[0030] As some optional implementations, after processing the tilted channel array, the beam is repositioned to the edge region of the non-tilted channel array, focused onto a single point, and the focus is adjusted to the surface of each glass sheet. This allows for focusing and marking of each sheet from bottom to top. The marking symbols include the year, month, day, processing board model, batch number processed that day, and location, such as 2025 / 08 / 22 / P1-1. Classification based on the marked processing location avoids the influence of subtle differences in laser processing at different locations on the consistency of subsequent wet etching, while also enabling traceability of each processed glass sheet.

[0031] As an optional implementation, the transparent glass sheets are classified according to the processing position of the markings. After wet etching, a through-hole structure with a certain aperture is formed, and a micro-hole array optical element with an inclined channel is prepared.

[0032] Then, a resistive layer and an emitting layer are deposited in the micro-channels forming through-hole structures on both ends of the micro-aperture array optical element, and metal electrode layers are deposited on both ends to form a functionalized microchannel plate.

[0033] The method for rapidly mass-producing tilted channel micro-aperture optical elements on multiple transparent glass substrates proposed in this invention improves the efficiency of laser drilling of tilted microchannel arrays. It addresses the problems in existing technologies, such as single-piece and multi-piece stacking processing using tilted laser beam angles and the re-slicing of thick glass pillars using vertical laser beams. Furthermore, it proposes a method for rapidly mass-producing tilted channel micro-aperture optical elements on multiple transparent glass substrates. For the challenges of beam deflection and dispersion caused by laser propagation in different media, it employs a high-viscosity, low-volatility material with a refractive index essentially consistent with the glass substrate material. Using a liquid as a matching liquid, multiple tilted stacked samples are immersed in the liquid, thereby transforming the glass-air interface into a glass-liquid cross section. This ensures that the laser beam direction does not deflect after processing each glass sheet, and the beam energy is focused and not dispersed, enabling simultaneous processing of multiple sheets. During the processing, after drilling each row (at the same height) is completed, when drilling a lower row, the Z-axis is lifted to compensate for the processing height difference caused by the tilt of the transparent glass sheet and the uneven laser modification caused by the difference in the relative position of the focal point in the left and right areas of the tilted transparent glass sheet, thus improving the uniformity and consistency of the processing.

[0034] Meanwhile, after processing the tilted channel array, the laser focus is adjusted, and different marks are individually processed on each glass sheet from bottom to top to distinguish the position of each glass sheet during processing, as well as the processing date and batch, so as to achieve classification and long-term traceability.

[0035] It should be understood that all combinations of the foregoing concepts and the additional concepts described in more detail below may be considered part of the inventive subject matter of this disclosure, provided that such concepts do not contradict each other. Furthermore, all combinations of the claimed subject matter are considered part of the inventive subject matter of this disclosure.

[0036] The foregoing and other aspects, embodiments, and features of the teachings of the present invention will be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the invention, such as features and / or beneficial effects of exemplary embodiments, will become apparent from the following description or may be learned through practice of specific embodiments according to the teachings of the present invention. Attached Figure Description

[0037] The accompanying drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component shown in the various figures may be denoted by the same reference numeral. For clarity, not every component is labeled in each figure. Embodiments of various aspects of the invention will now be described by way of example and with reference to the accompanying drawings.

[0038] Figure 1 This is a schematic diagram of refractive index matching liquid-assisted laser processing of multiple tilted stacked glass sheets according to an embodiment of the present invention.

[0039] Figure 2 This is a schematic diagram of laser drilling marking on a transparent glass sheet according to an embodiment of the present invention.

[0040] The meanings of the markings in each of the attached figures are as follows:

[0041] Figure 1 Chinese: 1. Laser cutting head; 2. Grooved metal assembly fixture; 3. Glass sheet; 4. Metal screw; 5. Laser equipment motion platform; 6. Screw; 7. Processing groove; 8. Glass refractive index matching fluid;

[0042] Figure 2 In the middle: 11, MCP entity edge; 12, MCP valid area; 13, marker symbol. Detailed Implementation

[0043] To better understand the technical content of the present invention, specific embodiments are described below in conjunction with the accompanying drawings.

[0044] Various aspects of the invention are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily intended to encompass all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed herein are not limited to any particular implementation. Furthermore, some aspects of the invention disclosed may be used alone or in any suitable combination with other aspects of the invention disclosed.

[0045] {Example 1}

[0046] Combination Figure 1 As shown, a method for rapidly batch-processing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to an embodiment of the present invention includes the following steps:

[0047] Multiple transparent glass sheets 3 of a certain thickness and the same thickness are stacked from top to bottom at intervals and fixed to metal assembly fixtures 2 with slots at the same tilt angle. The two transparent glass sheets are spaced at the same distance. Each transparent glass sheet 3 is locked in a set of slots, and the relatively higher side is defined as the first side and the relatively lower side as the second side.

[0048] The metal assembly fixture 2, with the assembled transparent glass sheet, is fixed together with a machining groove 7, for example... Figure 1 As shown, the metal assembly fixture 2 and the assembled multiple transparent glass sheets 3 are both located within the space defined by the processing groove 7 and are fixed by the first fastener 4 such as bolts / screws.

[0049] Add glass refractive index matching liquid 8 into the processing tank. After the glass refractive index matching liquid 8 has soaked each transparent glass sheet 3, fix the processing tank on the processing platform 5 of the laser processing equipment, for example... Figure 1 As shown, it is secured by a second fastener 6, such as a bolt / screw;

[0050] Adjust the position of the laser cutting head 1 of the laser processing equipment so that it is perpendicular to the liquid surface of the matching liquid in the processing tank;

[0051] The laser processing equipment controls the processing platform to move along the XY direction according to the planned movement path, and controls the laser to emit laser light to perform laser drilling on multiple transparent glass sheets 3 below through the laser cutting head.

[0052] Specifically, for multiple transparent glass sheets placed at an angle, the drilling positions of the microchannel array and the moving path of the processing platform are planned from the first side to the second side; combined with Figure 2 As shown, for each tilted transparent glass sheet, the perforation positions in each row have the same height, and the perforation positions in each row decrease in gradient from the first row on the first side toward the second side.

[0053] During the laser drilling process, the laser processing equipment controls the movement of the processing platform. The laser cutting head simultaneously performs inclined channel laser drilling on multiple glass sheets, starting from the first row. After each row is completed, the laser processing equipment controls the processing platform to rise along the Z-axis to perform laser drilling on the next row until the laser drilling process is completed.

[0054] As an optional implementation, the tilt angle and / or spacing of multiple transparent glass sheets can be controlled by changing the position of the slot.

[0055] As an optional implementation, the metal assembly fixture can be implemented using 3D printing technology. The tilt angle and spacing of the glass sheets can be controlled by changing the position of the slot. For example, the tilt angle of the transparent glass sheet is in the range of 0° to 45°, and the spacing between two transparent glass sheets is in the range of 0.2mm to 5mm.

[0056] As an optional implementation, the glass refractive index matching liquid 8 has the same refractive index as the transparent glass sheet being processed. In particular, a high-viscosity, low-volatility liquid with a refractive index that is basically consistent with that of the transparent glass sheet (i.e., the glass substrate) is selected. This avoids the problem of beam energy dispersion caused by changes in the refractive index of the environment when the laser is emitted from the back of each glass sheet, improves the uniformity and consistency of laser drilling, and ensures processing quality and efficiency.

[0057] For example, when using conventionally used quartz, AF32, BF33, etc., the refractive index matching solution is one or more of the following: Cargille 50350, Cargille 06350, ethyl cinnamate / isopropyl myristate mixture, glycerol / water mixture, benzyl benzoate / anhydrous ethanol mixture.

[0058] As an optional implementation, the laser is emitted when the laser cutting head is at a perpendicular angle to the surface of the matching liquid in the processing tank. The laser beam is spatially shaped into a Bessel beam with a filament length of 1-10mm. The actual processing depth depends on the laser power, the relative distance between the cutting head and the sample being processed, and the height difference of the tilted glass sheet. Taking a φ25mm glass sheet as an example, adjusting the parameters can accommodate an effective processing depth of 0.1mm to 5mm. Simultaneously, emitting the laser at a perpendicular angle to the surface of the matching liquid in the processing tank solves the problem of significantly shortened processing depth caused by asymmetric refraction during processing with a tilted laser beam.

[0059] After completing the laser drilling of each row of corresponding drilling positions with the same height, the height of the processing platform raised along the Z-axis is controlled to compensate for the processing height difference caused by the tilt of the transparent glass sheet, as well as the uneven laser modification caused by the difference in the relative position of the focal point in the left and right areas of the tilted transparent glass sheet.

[0060] As an optional embodiment, the method further includes: after completing the laser drilling process of multiple transparent glass sheets, adjusting the laser focus parameters to enable different markings to be processed individually on the edge area (solid edge) of each glass sheet, that is: for each transparent glass sheet, the beam is focused into a point, and the focus is adjusted on the surface of each glass sheet to perform marking.

[0061] The marking symbols include year, month, day, processing plate model, processing batch on that day, and location, such as 2025 / 08 / 22 / P1-1. The processing location is used for classification to avoid the influence of slight differences in laser processing at different locations on the consistency of subsequent wet etching. At the same time, it can realize the traceability of each processed glass sheet.

[0062] In the specific implementation process, the process of tagging the edges of MCP entities includes:

[0063] After completing the laser drilling process on multiple transparent glass sheets, the processing platform is controlled to descend along the Z-axis to its initial position;

[0064] The control processing platform moves along the XY direction, so that the laser cutting head is repositioned to the solid edge region of the transparent glass sheet, which is the edge region of the non-tilted channel array of the transparent glass sheet;

[0065] Based on the initial position and height of each transparent glass sheet, the laser's focus parameters are adjusted to focus sequentially onto the surface of each glass sheet from bottom to top. Different marks are then individually processed on the surface of each transparent glass sheet to distinguish its processing position. The marking process proceeds from bottom to top, with different marks being individually processed on each glass sheet to differentiate its processing position.

[0066] It should be understood that, based on the processing location of the markings, transparent glass sheets of the same type can be classified and processed by wet etching to form through-hole structures of a certain aperture, thereby producing micro-aperture array optical elements with inclined channels.

[0067] Then, a resistive layer and an emitting layer are deposited in the micro-channels forming through-hole structures on both ends of the micro-aperture array optical element, and metal electrode layers are deposited on both ends to form a functionalized microchannel plate.

[0068] {Example 2}

[0069] In this embodiment, we further elaborate on the implementation of the present invention in conjunction with the methods described above.

[0070] The process employs multiple transparent glass substrates stacked at an angle to improve the efficiency of laser drilling in tilted microchannel arrays.

[0071] According to embodiments of the present invention, a method for rapidly batch-processing tilted channel micro-hole array optical elements on multiple transparent glass substrates is proposed, which can improve the laser drilling efficiency of tilted microchannel arrays and can be applied to the fabrication process of tilted channel micro-hole array substrates for matching microchannel plates. The method includes the following steps:

[0072] Multiple polished glass sheets of a certain thickness are fixed at the same tilt angle to a metal assembly fixture with slots. The metal assembly fixture is 3D printed from metal. The fixed tilt angle is in the range of 0° to 45° and the spacing between the two sheets is in the range of 0.2mm to 5mm.

[0073] Next, the metal assembly fixture 2 with the assembled transparent glass sheet is fixed together with the processing tank, and one or more of the following mixed solutions are added: Cargille 50350, Cargille 06350, ethyl cinnamate / isopropyl myristate mixture, glycerol / water mixture, benzyl benzoate / anhydrous ethanol mixture, so that the entire metal assembly fixture 2 and each glass sheet are immersed in the matching solution in the processing tank;

[0074] The processing tank is fixed on the laser processing motion platform. The laser cutting head is adjusted to be perpendicular to the liquid surface of the matching liquid in the processing tank. Then, the motion trajectory is controlled by the XYZ mechanical movement of the worktable. The laser emits a laser beam, which is shaped by Bezier and has a filament length of 1mm to 10mm. The motion trajectory is controlled by the XY axis mechanical movement of the worktable to perform laser drilling. At the same time, the Z axis compensates for the tilt height difference of the substrate, thereby realizing the simultaneous tilt channel laser drilling of multiple glass sheets.

[0075] Laser drilling for micro-hole array substrate marking symbols

[0076] According to an embodiment of the present invention, after laser drilling is completed on multiple substrates, marking symbols are created on the micro-hole array substrate by laser marking. These marking symbols are used for batch classification and subsequent traceability of the etched inclined channel micro-hole array substrates for matching microchannel plates. The marking method includes the following steps:

[0077] After processing the tilted channel array, the beam is repositioned to the edge area of ​​the non-tilted channel array, focused on a single point, and the focal point is adjusted to mark the surface of each glass sheet. The markings include the year, month, day, processing plate model, batch number processed that day, and location. These markings are clearly identifiable under normal lighting conditions. For example, 2025 / 08 / 22 / P1-1 represents a glass sheet of model P, first batch, and located in the first groove of the metal assembly fixture on August 22, 2025. The markings are categorized according to their processing location to avoid minor differences in laser processing at different locations affecting the consistency of subsequent wet etching.

[0078] After tilting the channel and marking the laser drilling, the holes are enlarged by wet etching. The etching parameters are controlled to adjust the hole diameter to the target value. Finally, deposition and coating are performed on the substrate to produce a functionalized microchannel plate.

[0079] {Preparation Example 1}

[0080] (1) In this preparation example 1, Corning fused silica glass was selected. After slicing and polishing, the thickness was 0.3 mm and the outer diameter was φ25 mm. Six pieces were taken and assembled onto a grooved metal assembly fixture in an arrangement with an inclination angle of 7° and a spacing of 0.2 mm between the two pieces.

[0081] (2) Preparation of fused silica refractive index matching solution: Select myristyl isopropyl ester and ethyl cinnamate solution, mix them in a volume ratio of 100:23.69, and disperse the mixture evenly by stirring and ultrasonic treatment;

[0082] (3) Fix the metal assembly fixture for assembling glass sheets to the processing tank with screws. Then pour the mixed solution of isopropyl myristate and ethyl cinnamate into the processing tank. The liquid surface should submerge each stack of glass sheets. Finally, fix the processing tank on the motion platform of the laser processing equipment.

[0083] (4) Select a 30W infrared laser, shape the beam from Gaussian light to long focal length Bessel light through the laser cutting head, adjust the laser cutting head to be perpendicular to the liquid surface of the matching liquid in the processing tank, adjust the wire length to 3mm, control the movement trajectory by the mechanical movement of the worktable, set the point spacing to 6μm, and process each piece of glass from the high point to the low point in the laser processing direction. For each piece of glass processed, the Z-axis of the motion platform steps up by 0.64μm to compensate for the processing height difference caused by the tilt of the substrate, thereby realizing the simultaneous tilted channel laser drilling processing of multiple glass sheets;

[0084] (5) After processing the tilted channel array, reposition to the edge area of ​​the non-tilted channel array, adjust the laser focus parameters, and process different marks on each glass sheet from bottom to top, namely 2025 / 08 / 22 / P1-1, 2025 / 08 / 22 / P1-2, 2025 / 08 / 22 / P1-3, 2025 / 08 / 22 / P1-4, 2025 / 08 / 22 / P1-5, and 2025 / 08 / 22 / P1-6.

[0085] {Preparation Example 2}

[0086] (1) Corning fused silica glass was selected for this preparation example. After slicing and polishing, the thickness was 0.5 mm and the outer diameter was φ50 mm. Four pieces were taken and assembled onto a grooved metal assembly fixture in an arrangement with an inclination angle of 12° and a spacing of 0.3 mm between the two pieces.

[0087] (2) Preparation of fused silica refractive index matching solution: Select myristyl isopropyl ester and ethyl cinnamate solution, mix them in a volume ratio of 100:23.69, and disperse the mixture evenly by stirring and ultrasonic treatment;

[0088] (3) Fix the metal assembly fixture for assembling glass sheets to the processing tank with screws, then pour the mixed solution of isopropyl myristate and ethyl cinnamate into the processing tank, immerse the stacked glass sheets in the liquid, and finally fix the processing tank on the motion platform of the laser processing equipment.

[0089] (4) Select a 30W infrared laser, shape the beam from Gaussian light to long focal length Bessel light through the laser cutting head, adjust the laser cutting head to be perpendicular to the liquid surface of the matching liquid in the processing tank, adjust the wire length to 5mm, control the movement trajectory by the mechanical movement of the worktable, set the point spacing to 15μm, and process each piece of glass from the high point to the low point in the laser processing direction. For each piece of glass, the Z-axis of the motion platform moves upward by 2.31μm to compensate for the processing height difference caused by the tilt of the substrate, thereby realizing the simultaneous tilting channel laser drilling of multiple glass sheets.

[0090] (5) After processing the tilted channel array, reposition it to the edge area of ​​the non-tilted channel array, adjust the laser focus parameters, and process different marks on each glass sheet from bottom to top, namely 2025 / 08 / 22 / L1-1, 2025 / 08 / 22 / L1-2, 2025 / 08 / 22 / L1-3, and 2025 / 08 / 22 / L1-4.

[0091] Based on Examples 1-2, tilted channel micropore arrays were prepared according to the above preparation method. The correlation between the pore diameter and placement position of each piece processed in the same batch is shown in the table below.

[0092]

[0093] The test data in the table above shows that glass sheets placed in different locations exhibit slight differences in pore size after laser drilling. This is attributed to the fact that the energy of the Bessel beam filament is concentrated in the middle section, while the energy at the top and bottom of the filament is relatively weaker. It should be understood that marking each sheet with a drill hole to distinguish the corrosion batch is necessary, as it reduces inconsistencies in processed products and enables long-term traceability.

[0094] The method for processing tilted channel micro-hole array optical elements with glass refractive index matching liquid-assisted laser processing proposed in this invention solves the problem of low efficiency caused by the current laser processing of tilted micro-channel arrays which can only be processed on a single piece, as well as the problem of low output rate and pass rate caused by laser processing of thick glass in vertical channels and then tilting the slices. It can meet the requirements of MCP mass production processing.

[0095] While the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the invention. Those skilled in the art can make various modifications and refinements without departing from the spirit and scope of the invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A method for rapidly batch-processing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates, characterized in that, include: Multiple transparent glass sheets of a certain thickness and the same thickness are stacked at intervals from top to bottom and fixed at the same tilt angle to metal assembly fixtures with slots. Every two transparent glass sheets are spaced at the same distance. Each transparent glass sheet is locked in a set of slots, and the relatively higher side is defined as the first side and the relatively lower side as the second side. A metal assembly fixture with assembled transparent glass sheets is fixed together with a processing groove. The metal assembly fixture and the assembled transparent glass sheets are all located within the space defined by the processing groove. Add glass refractive index matching liquid into the processing tank. After the glass refractive index matching liquid has soaked each transparent glass sheet, fix the processing tank on the processing platform of the laser processing equipment. Adjust the position of the laser cutting head of the laser processing equipment so that it is perpendicular to the liquid surface of the matching liquid in the processing tank; The laser processing equipment controls the processing platform to move along the XY direction according to the planned movement path, and controls the laser to emit laser light to perform laser drilling on multiple transparent glass sheets below through the laser cutting head. Among them, for multiple transparent glass sheets placed at an angle, the drilling positions of the microchannel array and the moving path of the processing platform are planned from the first side to the second side; for each inclined transparent glass sheet, the drilling positions of each row have the same height, and the drilling positions of each row decrease in gradient from the first row on the first side to the second side. During the laser drilling process, the laser processing equipment controls the movement of the processing platform and uses the laser cutting head to simultaneously perform inclined channel laser drilling on multiple glass sheets, starting from the first row. After each row is completed, the laser processing equipment controls the processing platform to rise along the Z-axis and then performs laser drilling on the next row until the laser drilling process is completed.

2. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, The tilt angle of multiple transparent glass sheets can be controlled by changing the position of the slot.

3. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, The spacing between multiple transparent glass sheets is controlled by changing the position of the slot.

4. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, The tilt angle is in the range of 0° to 45°, and the distance between the two transparent glass sheets is in the range of 0.2mm to 5mm.

5. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, The glass refractive index matching liquid has the same refractive index as the processed transparent glass sheet.

6. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 5, characterized in that, The glass refractive index matching solution comprises one or more of the following components: Cargille 50350; Cargille 06350; ethyl cinnamate / isopropyl myristate mixture; glycerol / water mixture; and benzyl benzoate / anhydrous ethanol mixture.

7. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, After completing the laser drilling of each row of corresponding drilling positions with the same height, the height of the processing platform raised along the Z-axis is controlled to compensate for the processing height difference caused by the tilt of the transparent glass sheet and the uneven laser modification caused by the difference in the relative position of the focal point in the left and right areas of the tilted transparent glass sheet.

8. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, The laser beam emitted by the laser is spatially shaped into a Bessel beam with a filament length in the range of 1 to 10 mm and an effective processing depth in the range of 0.1 mm to 5 mm.

9. The method for rapidly batch processing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to any one of claims 1 to 8, characterized in that, The method further includes the following steps: After completing the laser drilling process on multiple transparent glass sheets, the processing platform is controlled to descend along the Z-axis to its initial position; The control processing platform moves along the XY direction, so that the laser cutting head is repositioned to the solid edge region of the transparent glass sheet, which is the edge region of the non-tilted channel array of the transparent glass sheet; Based on the initial position and height of each transparent glass sheet, the focus parameters of the laser are adjusted to focus on the surface of the transparent glass sheet sequentially from bottom to top, and different marks are individually processed on the surface of each transparent glass sheet to distinguish the position of each transparent glass sheet during processing.

10. The method for rapidly mass-producing micro-aperture array optical elements with tilted channels on multiple transparent glass substrates according to claim 1, characterized in that, Based on the marked processing position, transparent glass sheets of the same type are classified and, after wet etching, through-hole structures of a certain aperture are formed to prepare micro-hole array optical elements with inclined channels. Then, a resistive layer and an emitting layer are deposited in the micro-channels forming through-hole structures on both ends of the micro-aperture array optical element, and metal electrode layers are deposited on both ends to form a functionalized microchannel plate.

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