A method for fabricating a subsurface defect calibration plate based on an ultrathin glass cap and the calibration plate itself.

Abstract

This application provides a method for fabricating a subsurface defect calibration plate based on an ultrathin glass cap and a calibration plate itself, belonging to the field of optical detection and calibration technology. The method includes: preparing a main glass substrate and a glass cover plate, both made of glass, with the glass cover plate being an ultrathin cover plate; fabricating simulated defect structures on the surface of the main glass substrate using micro-nano fabrication technology, using the surface containing the simulated defect structures as the defect surface; coating the defect surface with an optical adhesive, determining the coating thickness of the optical adhesive based on the refractive index between the optical adhesive and the main glass substrate; and bonding the glass cover plate to the defect surface to form the subsurface defect calibration plate. The method for fabricating a subsurface defect calibration plate based on an ultrathin glass cap and the calibration plate provided in this application are used to achieve stable encapsulation and accurate calibration of subsurface defects.

Images