一种多通道质量流量控制器的集中管理与数据交互系统
By integrating modules for device access, command synchronization, data marking, and timing feature monitoring, the synchronization and data interaction problems of multi-channel mass flow controllers are solved, achieving nanosecond-level control and millisecond-level alignment, thereby improving the system's reliability and data analysis accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- BEIJING JINGLIANG TECH CO LTD
- Filing Date
- 2025-12-10
- Publication Date
- 2026-07-17
AI Technical Summary
Existing multi-channel mass flow controller systems suffer from millisecond-level timing jitter and difficulties in data correlation during synchronization and data interaction, leading to a decrease in thin film deposition uniformity and interface quality.
The system, built with an embedded MCU and a TSN switch, employs a device access module, a command synchronization module, a data marking module, a data allocation module, and a timing feature monitoring module. It achieves nanosecond-level synchronization control and millisecond-level data alignment. Combined with an error model and a time series alignment algorithm, it eliminates timing jitter and ensures data traceability.
Nanosecond-level synchronous start-stop control of a multi-channel mass flow controller was achieved, reducing pulse waveform distortion, improving thin film deposition uniformity and interface quality, while solving the problem of data correlation and improving system reliability and data analysis accuracy.
Smart Images
Figure CN121531015B_ABST