高密度盲埋孔PCB激光钻孔方法、装置及设备

By using a high-density blind buried via PCB laser drilling method that combines 355nm ultraviolet laser and X-ray detection, problems such as hole diameter accuracy, hole wall quality, and depth control have been solved, achieving high-precision, high-quality, and high-efficiency laser drilling, thereby improving PCB yield and reducing costs.

CN121551874BActive Publication Date: 2026-07-17SHENZHEN LIDIA ELECTRONICS CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHENZHEN LIDIA ELECTRONICS CO LTD
Filing Date
2025-12-01
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing laser drilling technology suffers from problems such as insufficient hole diameter accuracy, poor hole wall quality, inaccurate depth control, interlayer alignment difficulties, and low hole bottom flatness when processing high-density blind and buried via PCBs. This results in low yield, high cost, and an inability to meet the requirements of high-frequency signal transmission.

Method used

A 355nm ultraviolet laser is used for cold ablation drilling. Combined with an X-ray detection module and DOE optics, precise matching of laser parameters and real-time monitoring are achieved. High-pressure nitrogen and ultrasonic cleaning are used to solve the residue problem, and a closed-loop feedback mechanism is established to optimize processing parameters.

Benefits of technology

It achieves 50μm aperture accuracy control within ±3μm, hole roundness >95%, hole wall roughness Ra <0.5μm, depth deviation control within ±2%, hole void rate reduced to below 1%, yield increased to 98%, cost reduced by 8%-15%, and meets the requirements of high frequency signal transmission.

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Abstract

本发明公开了一种高密度盲埋孔PCB激光钻孔方法、装置及设备。其中,所述方法包括:获取PCB待钻孔区域的基材参数,所述基材参数包括基材类型、目标盲孔孔径及深度;根据所述基材参数匹配激光加工参数,所述激光加工参数包括采用波长355nm的紫外激光,及与基材类型对应的激光功率和脉冲宽度,其中PI基材匹配5W功率、10μs脉冲宽度,FR‑4基材匹配7W功率、8μs脉冲宽度;控制紫外激光以冷消融方式对所述待钻孔区域进行钻孔,所述冷消融通过光子能量破坏材料化学键实现材料剥离,且激光热影响区控制在3μm以内。通过上述方式,能够实现激光钻孔能兼顾精度、质量与效率的目的。
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