一种扁平化三维加速度与三维力复合传感器及其检测方法

By using a flat design and component integration, the size and stability issues of the three-dimensional acceleration and force composite sensor in extreme environments have been solved, achieving high-precision and low-cost three-dimensional detection.

CN121559110BActive Publication Date: 2026-07-17SHANDONG LIANS INTELLIGENT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHANDONG LIANS INTELLIGENT TECH CO LTD
Filing Date
2025-11-20
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing three-dimensional acceleration and force composite sensors are bulky, making them unsuitable for high-temperature, high-pressure, strong-radiation, and corrosive environments, and they lack stability under extreme conditions.

Method used

The device employs a flat design, integrating longitudinal and shear effect sensing elements coplanarly. Combined with an insulating ring and pre-compression structure, it utilizes lithium niobate crystal wafers and piezoelectric ceramic wafers as detection elements. The outer sleeve is welded and sealed, simplifying signal transmission and enabling single-layer three-dimensional detection.

Benefits of technology

Significantly reducing sensor thickness allows for installation in confined spaces, improves detection accuracy and stability, reduces costs, enhances environmental adaptability and shock resistance, and avoids signal interference.

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Abstract

本发明为一种扁平化三维加速度与三维力复合传感器及其检测方法,属于传感器领域。其技术方案为,一种扁平化三维加速度与三维力复合传感器,包括力传感器模块和加速度传感器模块,力传感器模块包括四个剪切效应力检测元件和纵向效应力检测元件,四个剪切效应力检测元件和四个纵向效应力检测元件共面,加速度传感器模块包括四个剪切效应加速度检测元件和纵向效应加速度检测元件,四个剪切效应加速度检测元件和四个纵向效应加速度检测元件共面。本方案将纵向效应和剪切效应两种形式的敏感元件进行结合,以单层敏感元件的厚度实现了三维检测,敏感元件单层布置实现了传感器的扁平化,在安装方向上,大幅减小了热膨胀和应力,保证了检测精度。
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