Plasma environment-adaptable annular quartz cavity surface treatment method and system

Abstract

The application provides a ring-shaped quartz cavity surface treatment method and system suitable for a plasma environment, relates to the technical field of surface treatment, and comprises the following steps: processing and treating the surface of the ring-shaped quartz cavity based on numerical control milling, and performing image acquisition; performing granularity partitioning by using the cavity surface image, sequentially performing three-stage laser scanning processing, and recording the surface state of the ring-shaped quartz cavity; taking the attribute feature set and the surface state as matching features, and performing matching analysis of the gradient coating; performing matching scheme optimization according to the surface state, the attribute feature set and real-time environment data; and completing surface coating treatment by using the control optimization result. The application solves the technical problem that the surface of the quartz cavity is easily contaminated and generates particle pollutants in the plasma environment, resulting in unstable quality of the ring-shaped quartz cavity in the prior art. The surface is processed by numerical control milling, and surface coating treatment is performed, thereby improving the stability of the quality of the ring-shaped quartz cavity.

Description

Technical Field

[0001] This application relates to the field of surface treatment technology, specifically to a method and system for surface treatment of annular quartz cavities adaptable to plasma environments. Background Technology

[0002] During prolonged use in a plasma environment, the surface of a toroidal quartz cavity is continuously bombarded by high-energy ions and eroded by reactive chemical free radicals, leading to continuous etching of the quartz material and the initiation and propagation of microcracks. Simultaneously, chemical erosion induces a transformation of the quartz surface from an amorphous to a crystalline state, deteriorating its physicochemical properties and significantly increasing surface roughness. This not only directly weakens the structural integrity of the cavity but also generates microscopic particulate contaminants that directly contaminate the processed workpiece, resulting in a significant decrease in product yield. Furthermore, the degradation of the cavity's performance makes it difficult to maintain the uniformity and repeatability of the plasma process, severely limiting processing efficiency.

[0003] In summary, the existing technology has the technical problem that the surface of the quartz cavity is easily etched and the material is modified in a plasma environment, resulting in the generation of particulate contaminants, which leads to unstable quality of the annular quartz cavity and further affects the processing efficiency. Summary of the Invention

[0004] The purpose of this application is to provide a surface treatment method and system for annular quartz cavities that is adaptable to plasma environments, in order to solve the technical problem in the prior art that the surface of the quartz cavity is easily etched and the material is modified in a plasma environment, resulting in the generation of particulate contaminants, which leads to unstable quality of the annular quartz cavity and further affects the processing efficiency.

[0005] To achieve the above objectives, this application provides a method and system for surface treatment of annular quartz cavities that are adaptable to plasma environments.

[0006] In a first aspect, this application provides a plasma environment-adaptive surface treatment method for a ring-shaped quartz cavity. This method is implemented using a plasma environment-adaptive ring-shaped quartz cavity surface treatment system. The method includes: after machining the surface of the ring-shaped quartz cavity using CNC milling, image acquisition is performed to establish a cavity surface image; the cavity surface image is then used to perform grain size partitioning, followed by sequential three-stage laser scanning processing based on the grain size partitioning results, and the surface state of the ring-shaped quartz cavity is recorded; material and application characteristics of the ring-shaped quartz cavity are collected to construct an attribute feature set; using the attribute feature set and surface state as matching features, gradient coating matching analysis is performed to establish a matching scheme; after reading real-time environmental data, the matching scheme is optimized based on the surface state, attribute feature set, and real-time environmental data; and the surface coating treatment is completed using the optimization results.

[0007] Optionally, the anomaly identification of the surface of the annular quartz cavity is performed using the cavity surface image to establish a position anomaly identifier; control backtracking of CNC milling is performed based on the position anomaly identifier to establish a control backtracking result; anomaly source verification is performed using the position anomaly identifier and the control backtracking result to establish anomaly source verification result; and control optimization management of CNC milling is performed based on the anomaly source verification result.

[0008] Optionally, a minimum identification target with independent granularity is set, and granularity identification of the cavity surface image is performed based on the minimum identification target. Granularity partitioning results are established based on the granularity identification results. Using the granularity partitioning results as independent partitioning targets, control fitting of long-wavelength laser is performed, and uniform grid segmentation of the annular quartz cavity surface is performed using the control fitting results. The first stage of long-wavelength laser processing is performed based on the granularity partitioning results. After the first stage of processing is completed, the second stage of short-wavelength laser processing under grid partitioning is performed using the uniform grid segmentation results. After the second stage of processing is completed, path control optimization under global perspective is performed, and the third stage of processing under global scanning is performed.

[0009] Optionally, the surface of the annular quartz cavity is inspected after the second stage of processing to establish a detection and verification dataset; a path planning objective is configured, including a shortest path objective, a path parameter mutation minimization objective, and a repeated scan penalty objective; after configuring the balance factor according to the path planning objective, a global scan path optimization is performed on the surface of the annular quartz cavity based on the detection and verification dataset to establish a path optimization result, and the third stage of processing under global scanning is performed using the path optimization result.

[0010] Optionally, material features from the attribute feature set are obtained, and the material features and the surface state are used as matching features to perform adhesion adaptation matching of the bottom layer coating and establish a bottom layer coating matching result; application features from the attribute feature set are obtained, and the application features are used as matching features to perform matching analysis of the surface layer coating and establish a surface layer coating matching result; a transition layer is constructed using the bottom layer coating matching result and the surface layer coating matching result, and a transition layer matching result is established; the gradient coating matching analysis is completed based on the bottom layer coating matching result, the transition layer matching result, and the surface layer coating matching result.

[0011] Optionally, a spraying parameter set is established, which includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness. The spraying parameter set is initialized using the surface state, attribute feature set, and real-time environmental data as configuration features to construct an initial solution set. After creating a fitness index for spraying, the fitness index is used to perform fitness analysis on the initial solution set, and a genetic search update is performed to establish the control optimization result.

[0012] Optionally, surface coating control is performed using the control optimization results, and real-time coating status data is recorded; dynamic feedback is generated based on the real-time coating status data, and the control optimization results are optimized using the dynamic feedback.

[0013] Secondly, this application also provides a plasma environment-adaptive annular quartz cavity surface treatment system for performing the plasma environment-adaptive annular quartz cavity surface treatment method as described in the first aspect. The plasma environment-adaptive annular quartz cavity surface treatment system includes: an image acquisition module for acquiring images and establishing a cavity surface image after CNC milling of the annular quartz cavity surface; a three-stage laser scanning module for performing three-stage laser scanning processing sequentially based on the particle size partitioning results after particle size partitioning of the cavity surface image, and recording the surface state of the annular quartz cavity; a scheme matching module for acquiring the material and application characteristics of the annular quartz cavity, constructing an attribute feature set, and using the attribute feature set and surface state as matching features to perform gradient coating matching analysis and establish a matching scheme; a scheme optimization module for controlling and optimizing the matching scheme based on the surface state, attribute feature set, and real-time environmental data after reading real-time environmental data; and a coating processing module for completing surface coating processing using the control optimization results.

[0014] One or more technical solutions provided in this application have at least the following technical effects or advantages: After machining the surface of a ring-shaped quartz cavity using CNC milling, image acquisition is performed to establish a surface image. The surface image is then divided into grain sizes, and a three-stage laser scanning process is sequentially executed based on the grain size division results, recording the surface state of the ring-shaped quartz cavity. Material and application characteristics of the ring-shaped quartz cavity are collected to construct an attribute feature set. Using the attribute feature set and surface state as matching features, gradient coating matching analysis is performed to establish a matching scheme. After reading real-time environmental data, the matching scheme is optimized based on the surface state, attribute feature set, and real-time environmental data. The surface coating process is completed using the optimization results. In other words, by machining the surface of the ring-shaped quartz cavity using CNC milling, combined with three-stage laser scanning, gradient coating matching analysis is performed based on the surface state and environmental data of the quartz cavity to optimize the coating treatment scheme. Real-time reading of environmental data allows for dynamic adjustment of the surface treatment scheme, reducing particle contamination and performance fluctuations, and improving the quality stability of the quartz cavity.

[0015] The above description is merely an overview of the technical solution of this application. To better understand the technical means of this application and to facilitate its implementation according to the description, and to make the above and other objects, features, and advantages of this application more apparent, specific embodiments of this application are described below. It should be understood that the content described in this section is not intended to identify key or important features of the embodiments of this application, nor is it intended to limit the scope of this application. Other features of this application will become readily apparent through the following description. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0017] Figure 1 This is a schematic flowchart of the surface treatment method for annular quartz cavities adapted to plasma environment in this application.

[0018] Figure 2 This is a schematic diagram of the surface treatment system for a toroidal quartz cavity that is adaptable to plasma environments, as described in this application.

[0019] Figure labeling: Image acquisition module 11, three-stage laser scanning module 12, scheme matching module 13, scheme optimization module 14, coating processing module 15. Detailed Implementation

[0020] This application provides a plasma-environment-adaptable surface treatment method and system for annular quartz cavities, solving the technical problem in existing technologies where the surface of the quartz cavity is easily etched and undergoes material modification in a plasma environment, generating particulate contaminants, leading to unstable quality of the annular quartz cavity and further affecting processing efficiency. By performing CNC milling on the surface of the annular quartz cavity, combined with three-stage laser scanning, and based on the surface condition of the quartz cavity and environmental data, gradient coating matching analysis is performed to optimize the coating treatment scheme. Real-time reading of environmental data allows for dynamic adjustment of the surface treatment scheme, reducing particulate contamination and performance fluctuations, and improving the quality stability of the quartz cavity.

[0021] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. It should be understood that this application is not limited to the exemplary embodiments described herein. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application. It should also be noted that, for ease of description, only the parts related to this application are shown in the accompanying drawings, not all of them.

[0022] Example 1, please refer to the appendix. Figure 1 This application provides a surface treatment method for a toroidal quartz cavity that is adaptable to plasma environments. The method is applied to a surface treatment system for a toroidal quartz cavity that is adaptable to plasma environments. The specific steps of the method are as follows: After machining the surface of the annular quartz cavity using CNC milling, image acquisition is performed to create an image of the cavity surface.

[0023] Furthermore, this application also includes the following steps: using the cavity surface image to identify anomalies on the surface of the annular quartz cavity and establishing a position anomaly identifier; performing control backtracking of CNC milling based on the position anomaly identifier and establishing a control backtracking result; using the position anomaly identifier and the control backtracking result to perform anomaly source verification and establishing anomaly source verification result; and performing control optimization management of CNC milling based on the anomaly source verification result.

[0024] Specifically, CNC milling is used to precision machine the surface of a toroidal quartz cavity. By controlling the movement of the milling cutter, the flatness and accuracy of the quartz cavity surface are ensured. CNC milling is a precision machining technology that uses pre-programmed computer software to control the movement of the milling cutter to cut, shape, and surface-treat the toroidal quartz cavity to achieve high-precision geometry and surface finish. A toroidal quartz cavity typically refers to a cavity with a ring-shaped structure made of quartz material.

[0025] A high-resolution industrial camera was used to acquire panoramic images of the CNC-milled toroidal quartz cavity. Image processing software was then used to perform grayscale conversion and filtering preprocessing on the panoramic surface images. Subsequently, the cavity surface images were analyzed to identify abnormal areas such as cracks, pits, scratches, or other surface defects, and the specific locations of these abnormal areas were marked, typically represented by coordinate ranges or region masks, for precise defect localization.

[0026] Based on the identified anomaly locations, control backtracking of the CNC milling process is performed. By backtracking the parameters used during machining, such as feed rate, depth of cut, and tool path, as well as equipment operating data, the analysis is conducted to determine whether the surface anomalies are caused by control commands, equipment malfunctions, or other external factors, in order to identify potential causes. In other words, the control parameters corresponding to the anomaly locations are analyzed and compared with the parameters in the normal area to establish control backtracking results and identify parameter anomalies.

[0027] Anomaly tracing and verification are performed by combining location anomaly identification and control backtracking results. This involves reproducing parameter settings and measuring surface morphology during actual machining to confirm the causal relationship between defects and specific parameters, thus obtaining the anomaly tracing and verification results. Based on these results, the control parameters for CNC milling are optimized, such as adjusting feed rate and depth of cut, or adding temperature control during machining, to prevent similar anomalies from recurring and to improve machining accuracy and production efficiency.

[0028] For example, suppose a toroidal quartz cavity with an outer diameter of 300 mm and an inner diameter of 200 mm is surface-finished using a CNC milling machine with the following parameters: spindle speed 18,000 RPM, feed rate 400 mm / min, depth of cut 0.05 mm, and diamond cutting tool. After machining, images are acquired using a 5-megapixel industrial camera at a rate of 10 frames / second, covering the entire cavity surface. SIFT feature detection identifies a microcrack on the surface, approximately 60 μm in length and 8 μm in width, located in the coordinate range X = 120-125 mm and Y = 80-85 mm. Backtracking analysis reveals that the feed rate of the CNC milling machine at this location suddenly increases to 550 mm / min at X = 122 mm, while the normal range remains at 400 mm / min. To verify the source of the problem, the parameter settings were reproduced in the laboratory at a feed rate of 550 mm / min. Quartz samples of the same material were machined, and surface measurements were taken using a white light interferometer. The results showed that the microcrack incidence rate increased from the baseline of 3% to 12%, confirming that the excessive feed rate was the primary cause. Control optimization management set the feed rate limit to 450 mm / min and added a real-time monitoring module. In subsequent batch processing, the proportion of abnormal areas decreased from the initial 5% to 1.5%, and the surface roughness Ra improved from 0.8 μm to 0.4 μm.

[0029] By combining image acquisition with anomaly recognition, surface defects can be quickly located, reducing errors from manual inspection. Root cause analysis is performed through control backtracking and source verification to avoid recurring defects caused by improper parameter settings, reducing the risk of particle generation in the annular quartz cavity under plasma conditions, while improving production efficiency and product yield.

[0030] After dividing the cavity surface image into grain sizes, a three-stage laser scanning process is sequentially performed according to the grain size division results, and the surface state of the annular quartz cavity is recorded.

[0031] Furthermore, this application also includes the following steps: setting a minimum identification target with independent granularity; performing granularity identification of the cavity surface image based on the minimum identification target; establishing granularity partitioning results based on the granularity identification results; using the granularity partitioning results as independent partitioning targets, performing control fitting of long-wavelength lasers; performing uniform grid segmentation of the annular quartz cavity surface using the control fitting results; performing a first-stage processing of long-wavelength lasers based on the granularity partitioning results; performing a second-stage processing of short-wavelength lasers under grid partitioning using the uniform grid segmentation results; and performing a third-stage processing under global scanning after the second-stage processing is completed.

[0032] Furthermore, this application also includes the following steps: performing surface detection of the annular quartz cavity after the second stage processing, and establishing a detection and verification dataset; configuring path planning objectives, including a shortest path objective, a path parameter mutation minimization objective, and a repeated scan penalty objective; configuring a balance factor according to the path planning objectives, performing global scanning path optimization on the surface of the annular quartz cavity based on the detection and verification dataset, establishing path optimization results, and using the path optimization results to perform the third stage processing under global scanning.

[0033] Specifically, a minimum recognition target with independent granularity is set, which is the minimum detectable defect size defined in image processing. This threshold determines which details can be identified and processed in the image. Based on the minimum recognition target, the acquired cavity surface image is analyzed to identify and statistically analyze the granularity distribution of various defects, generating granularity partitioning results. This clearly divides the surface of the toroidal quartz cavity into several regions with different defect characteristics. Based on the granularity identification results, the surface of the toroidal quartz cavity is divided into different regions, each with similar granularity.

[0034] The grain size partitioning results are used as independent partitioning targets, and a long-wavelength laser is used to uniformly divide the cavity surface into grids. Long-wavelength lasers, with their longer wavelengths, are typically used for deep processing or large-scale surface finishing because their longer wavelengths have a greater impact on large-scale surface effects. The long-wavelength laser control fitting process involves adjusting the laser parameters to ensure uniform coverage within each partitioned region, allowing the laser to act evenly on each grid area without over-processing or under-processing. In the first stage of processing, based on the grain size partitioning results, a long-wavelength laser is used to perform preliminary processing on the cavity surface. Long-wavelength lasers are primarily used to process larger particle areas and deeper surface defects. Through the coarse processing effect of the long-wavelength laser, larger particles or significant defect areas are removed.

[0035] After the first stage of processing, the second stage of processing using short-wavelength lasers proceeds, focusing on the meticulous finishing of small particle areas. Short-wavelength lasers, with their shorter wavelengths, are used for fine machining and can typically be concentrated on the material surface to achieve high-precision micro-machining. Utilizing the uniform mesh segmentation results, the second stage of short-wavelength laser processing is performed within each mesh cell, focusing on the precise repair of microcracks. Surface inspection is then performed on the annular quartz cavity after the second stage of processing. A high-resolution industrial camera is used to acquire images of the annular quartz cavity after the second stage of processing, obtaining an inspection and verification dataset to validate the surface treatment effect.

[0036] Configure path planning objectives, including the shortest path objective, the path parameter mutation minimization objective, and the repetitive scan penalty objective. The shortest path objective minimizes the total distance the laser head moves, reducing processing time, and is used to find the shortest path to the target area. The path parameter mutation minimization objective avoids sudden changes in laser power or speed, ensuring that path changes are as smooth as possible during path planning to prevent local overheating or damage. The repetitive scan penalty objective applies a penalty to repeated scans of the same area, avoiding repeated scanning of the same area by the laser beam, reducing processing redundancy, and preventing overprocessing.

[0037] A balancing factor is configured for the path planning objectives, setting weight coefficients for multi-objective path planning to balance the priorities of different objectives. Based on the detection and verification dataset, a global scanning path optimization is performed on the surface of the toroidal quartz cavity to find an optimal path that combines the shortest path, the smoothest path, and the minimum repeated scans. This ensures that the laser processing can fully cover all areas while minimizing processing time and energy consumption. In the third processing stage, based on the optimized path optimization results, the cavity surface undergoes fine-tuning, i.e., final surface finishing and optimization, ensuring that all surface defects are repaired and the surface finish meets requirements. Since the first two stages of rough processing and preliminary finishing have already been completed, the focus of the third stage is on fine-tuning and final refinement.

[0038] For example, assuming a ring-shaped quartz cavity with an outer diameter of 400 mm and an inner diameter of 250 mm, made of synthetic quartz glass, and a minimum identification target of 20 μm, surface images are acquired using a 5-megapixel industrial camera. Grain size identification is performed using a gray-level co-occurrence matrix algorithm, identifying the defect size distribution: defects in the high-roughness area are 50-150 μm, accounting for 15%; defects in the medium-defect area are 20-50 μm, accounting for 25%; and defects in the low-defect area are <20 μm, accounting for 60%, establishing grain size partitioning results. Using the partitioning results as the target, a long-wavelength laser with a wavelength of 10.6 μm is used for controlled fitting. Parameters are adjusted as follows: power 250 W and scanning speed 80 mm / s in the high-roughness area, power 180 W and scanning speed 120 mm / s in the medium-defect area, and the surface is divided into a uniform grid of 1.5 mm * 1.5 mm based on the fitting results. Then, the first stage of long-wavelength laser processing is performed, scanning in the high-roughness area to reduce the surface roughness Ra from the initial 1.2 μm to 0.8 μm. After the first stage, a second stage of processing was performed using a short-wavelength laser with a wavelength of 1.064 μm within each grid, with parameters of 50 W power, 200 mm / s scanning speed, and a focused spot diameter of 30 μm. After processing, the microcrack density decreased from 50 cracks / cm². 2 Reduced to 10 / cm 2After the second stage, a white light interferometer with a resolution of 0.1 nm was used to inspect the surface and establish a validation dataset, showing an average roughness Ra of 0.5 μm. Subsequently, path planning objectives were configured: shortest path (target distance ≤ 5000 mm), minimum parameter mutation (power change rate ≤ 5% / ms), and a penalty factor of 0.1 for repeated scans. Balance factors were also set: shortest path weight 0.5, mutation minimization weight 0.4, and repeated scan penalty factor 0.1. Based on the validation dataset, a genetic algorithm with a population size of 100 and 500 iterations was used to optimize the global scan path, obtaining an optimal path with a total length of 4800 mm and a parameter change rate of 4.5%. Finally, this path was used for the third stage of short-wavelength laser processing at a power of 30 W and a scanning speed of 250 mm / s. Ultimately, the surface roughness Ra stabilized at 0.3 μm, and the defect density decreased to 5 defects / cm². 2 Processing time is reduced by 20%.

[0039] By identifying and partitioning particles, the risk of over- or under-processing is reduced for different laser parameters. Uniform grid segmentation and multi-stage laser processing ensure the uniformity and consistency of surface modification, significantly reducing the probability of micro-defects and particle generation.

[0040] The material and application characteristics of the annular quartz cavity are collected to construct an attribute feature set. Using the attribute feature set and surface state as matching features, a matching analysis of the gradient coating is performed to establish a matching scheme.

[0041] Furthermore, this application also includes the following steps: obtaining material features from the attribute feature set, using the material features and the surface state as matching features, performing adhesion adaptation matching of the bottom layer coating, and establishing a bottom layer coating matching result; obtaining application features from the attribute feature set, using the application features as matching features, performing matching analysis of the surface layer coating, and establishing a surface layer coating matching result; constructing a transition layer using the bottom layer coating matching result and the surface layer coating matching result, and establishing a transition layer matching result; and completing the gradient coating matching analysis based on the bottom layer coating matching result, the transition layer matching result, and the surface layer coating matching result.

[0042] Specifically, the study collects material and application characteristics of the toroidal quartz cavity. Material characteristics refer to the intrinsic properties of the toroidal quartz cavity itself, including quartz type, hardness, coefficient of thermal expansion, and corrosion resistance. Application characteristics refer to the requirements and performance of the toroidal quartz cavity in practical applications, such as operating temperature. Based on these material and application characteristics, an attribute feature set is constructed to describe the performance requirements of the toroidal quartz cavity under different working environments.

[0043] Based on the material characteristics and current surface condition of the cavity, adhesion matching of the underlayer coating is performed to ensure good adhesion between the underlayer coating and the surface of the toroidal quartz cavity, preventing coating peeling or detachment during use. The underlayer coating is the lowest layer of paint applied to the cavity surface, typically used to enhance substrate adhesion and corrosion resistance, and is closely related to the material characteristics of the toroidal quartz cavity. Application characteristics are obtained from the attribute feature set, a suitable surface coating material is selected, and matching analysis is performed. The surface coating is the outermost layer of the toroidal quartz cavity, and its application environment characteristics must be considered, i.e., the material most resistant to plasma erosion in the specific application.

[0044] After determining the base and top layer materials, a transition layer is constructed based on the matching results of the base and top layer coatings. This transition layer mitigates the differences in physical properties between the base and top layer coatings, such as differences in thermal expansion coefficients and hardness, thereby improving the adhesion and durability of the coatings. For example, if the quartz substrate is silica with an oxygen-rich surface, yttrium silicate with a silica content exceeding 50% is selected as the base layer coating. For plasma, a material capable of generating a stable protective film is selected as the top layer coating. Based on the thermal expansion coefficients of the base and top layer coatings, a gradually varying transition layer with a thickness of approximately 10 μm is designed.

[0045] By combining the matching results of the base coat, transition layer, and top coat, a matching analysis of the gradient coating is completed. Seamless transitions between different coatings are achieved through gradually changing material properties, ensuring optimal overall coating performance. A gradient coating is formed by a gradual transition between the base coat, transition layer, and top coat. Its purpose is to optimize the adhesion and performance between different coatings, ensuring the overall coating exhibits optimal physical and chemical properties during use. In coating design, adhesion compatibility matching refers to ensuring good adhesion between the base coat and the annular quartz cavity material, preventing coating peeling or detachment.

[0046] After reading the real-time environmental data, the matching scheme is optimized based on the surface state, attribute feature set, and real-time environmental data.

[0047] Furthermore, this application also includes the following steps: establishing a spraying parameter set, which includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness; initializing the spraying parameter set and constructing an initial solution set using the surface state, attribute feature set, and real-time environmental data as configuration features; and after creating a fitness index for spraying, performing fitness analysis of the initial solution set using the fitness index and performing genetic search update to establish control optimization results.

[0048] Specifically, in the spraying process, the spraying parameter set is a key variable used to control coating quality and efficiency. Establishing the spraying parameter set includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness. Spraying pressure is the gas pressure driving the sprayed material, affecting particle velocity and atomization; spraying speed is the speed at which the spray gun moves relative to the cavity surface, affecting the deposition amount per unit area and heat input; spraying angle and path are the angle between the spray gun and the surface normal, and the trajectory of the spray gun. Vertical spraying usually achieves the best deposition efficiency; for complex curved surfaces, the angle needs to be adjusted to ensure coverage; path planning ensures no omissions and no excessive overlap. Spraying thickness is the target coating thickness for a single or cumulative deposition.

[0049] During the spraying process, environmental factors have a significant impact on the spraying effect. Real-time environmental data, including parameters such as temperature, humidity, and wind speed, affects the spraying effect, adhesion, and drying speed of the coating. Surface condition, attribute feature set, and real-time environmental data are used as configuration features, i.e., the known conditions and constraints for parameter optimization. Based on the configuration features, the spraying parameter set is initialized to construct an initial solution set, which is the preliminary combination of spraying parameters generated at the beginning.

[0050] A fitness index for spraying is created as an evaluation criterion. Fitness analysis is performed on parameter combinations in the initial solution set to quantify their performance. A genetic search update process is initiated, iteratively executing selection, crossover, and mutation operations to continuously evolve new parameter populations. Finally, after a preset number of iterations, a control optimization result with optimal overall performance is output. Genetic search update is an optimization algorithm that simulates natural selection and genetic mechanisms. Through operations such as selection, crossover, and mutation, a new solution set is generated based on the initial solution set. Fitness analysis is performed on the generated new solution set, and the one with the best fitness is selected as the control optimization result. For example, assuming the initial solution set has a pressure of 0.65 MPa, a velocity of 450 mm / s, an angle of 88°, and a thickness of 22 μm, the fitness index is quantified into a weighted formula: Fitness Score = Coating Bond Strength * 0.4 + Deposition Efficiency * 0.3 + Surface Roughness * 0.2 + Porosity * 0.1, calculating the fitness score of the initial solution set to be 55 points. A genetic algorithm was launched with a population size of 50 and 100 generations. The top 50% of individuals were retained, and the parameters of the best individuals were randomly swapped and combined. A small random perturbation was applied to the parameters of 5% of the individuals. After 100 generations of evolution, the algorithm converged, and the optimal control parameters were: pressure 0.72 MPa, velocity 580 mm / s, angle 90°, and thickness 18 μm. The measured performance was: bonding strength 58 MPa, deposition efficiency 92%, coating roughness Ra 1.2 μm, porosity 2.1%, and overall fitness score 91.

[0051] By incorporating real-time environmental data and automatically adjusting parameters to compensate for the impact of environmental changes, excellent repeatability and stability between batches are ensured. The genetic algorithm's global search strategy can escape local optima and find the optimal balance between complex parameters such as pressure, speed, and angle, thereby achieving comprehensive optimization across multiple performance metrics.

[0052] The surface coating process is completed using the results of the control optimization.

[0053] Furthermore, this application also includes the following steps: performing surface coating control using the control optimization results and recording real-time coating state data; generating dynamic feedback based on the real-time coating state data, and using the dynamic feedback to optimize the control optimization results.

[0054] Specifically, surface coating control is performed based on the optimization results. This means that the actual coating deposition is carried out on the annular quartz cavity strictly according to the optimal combination of spraying parameters obtained from the optimization results to ensure that the coating meets the predetermined quality requirements. Simultaneously, real-time coating status data, including coating thickness distribution, coating surface temperature, deposition rate, and spectral signals, are recorded for real-time evaluation of coating quality. Dynamic feedback is generated by monitoring the coating status data in real time. Dynamic feedback refers to real-time feedback results derived from the coating status data, such as whether the coating is uniform, whether the thickness is appropriate, and whether the adhesion meets the standards. This feedback is used to determine whether the spraying process is proceeding smoothly and whether adjustments to the spraying parameters are needed.

[0055] Based on dynamic feedback, the control optimization results are processed and the spraying parameters, such as spraying pressure, spraying speed, and spraying angle, are readjusted to ensure optimal coating quality. For example, based on dynamic feedback, if the coating thickness in some areas is found to be too thick, it may be due to an excessively slow spraying speed or excessively high spraying pressure. In this case, the spraying speed is automatically reduced by 8% to approximately 535 mm / s, the powder feed rate is slightly increased by 5%, and the spraying angle is moderately adjusted to reduce coating thickness variations. Through real-time thickness compensation, the problem of uneven thickness caused by equipment vibration, powder delivery fluctuations, or substrate geometry is completely solved, significantly improving the uniformity of coating performance.

[0056] In summary, the plasma environment-adaptive annular quartz cavity surface treatment method provided in this application has the following technical advantages: After machining the surface of a ring-shaped quartz cavity using CNC milling, image acquisition is performed to establish a surface image. The surface image is then divided into grain sizes, and a three-stage laser scanning process is sequentially executed based on the grain size division results, recording the surface state of the ring-shaped quartz cavity. Material and application characteristics of the ring-shaped quartz cavity are collected to construct an attribute feature set. Using the attribute feature set and surface state as matching features, gradient coating matching analysis is performed to establish a matching scheme. After reading real-time environmental data, the matching scheme is optimized based on the surface state, attribute feature set, and real-time environmental data. The surface coating process is completed using the optimization results. In other words, by machining the surface of the ring-shaped quartz cavity using CNC milling, combined with three-stage laser scanning, gradient coating matching analysis is performed based on the surface state and environmental data of the quartz cavity to optimize the coating treatment scheme. Real-time reading of environmental data allows for dynamic adjustment of the surface treatment scheme, reducing particle contamination and performance fluctuations, and improving the quality stability of the quartz cavity.

[0057] Example 2: Based on the same inventive concept as the plasma environment-adaptive annular quartz cavity surface treatment method in Example 1, this application also provides a plasma environment-adaptive annular quartz cavity surface treatment system. Please refer to the appendix. Figure 2 The plasma environment-adaptive annular quartz cavity surface treatment system includes: Image acquisition module 11 is used to acquire images and establish a cavity surface image after the surface of the annular quartz cavity is machined by CNC milling; three-stage laser scanning module 12 is used to perform three-stage laser scanning processing sequentially according to the particle size partitioning results after the cavity surface image is partitioned by particle size, and record the surface state of the annular quartz cavity; scheme matching module 13 is used to collect the material and application characteristics of the annular quartz cavity, construct an attribute feature set, and use the attribute feature set and surface state as matching features to perform gradient coating matching analysis and establish a matching scheme; scheme optimization module 14 is used to control and optimize the matching scheme according to the surface state, attribute feature set, and real-time environmental data after reading real-time environmental data; coating processing module 15 is used to complete the surface coating processing using the control optimization results.

[0058] Furthermore, the image acquisition module 11 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used for: identifying anomalies on the surface of the annular quartz cavity using the cavity surface image and establishing a position anomaly identifier; performing control backtracking of CNC milling based on the position anomaly identifier and establishing a control backtracking result; performing anomaly source verification using the position anomaly identifier and the control backtracking result and establishing anomaly source verification result; and performing control optimization management of CNC milling based on the anomaly source verification result.

[0059] Furthermore, the three-stage laser scanning module 12 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used for: setting a minimum identification target with independent particle size; performing particle size identification of the cavity surface image based on the minimum identification target; establishing particle size partitioning results based on the particle size identification results; using the particle size partitioning results as independent partitioning targets, performing control fitting of long-wavelength lasers; performing uniform grid segmentation of the annular quartz cavity surface using the control fitting results; performing a first-stage processing of long-wavelength lasers based on the particle size partitioning results; performing a second-stage processing of short-wavelength lasers under grid partitioning using the uniform grid segmentation results; and performing a third-stage processing under global scanning after the second-stage processing is completed.

[0060] Furthermore, the three-stage laser scanning module 12 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used for: performing annular quartz cavity surface inspection after the second stage of processing and establishing an inspection and verification dataset; configuring path planning objectives, including a shortest path objective, a path parameter mutation minimization objective, and a repeated scan penalty objective; configuring a balance factor according to the path planning objectives, and then performing global scanning path optimization on the annular quartz cavity surface based on the inspection and verification dataset, establishing path optimization results, and using the path optimization results to perform the third stage of processing under global scanning.

[0061] Furthermore, the scheme matching module 13 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used to: acquire material features from the attribute feature set, use the material features and the surface state as matching features, perform adhesion adaptation matching of the bottom layer coating, and establish the bottom layer coating matching result; acquire application features from the attribute feature set, use the application features as matching features, perform matching analysis of the surface layer coating, and establish the surface layer coating matching result; construct a transition layer using the bottom layer coating matching result and the surface layer coating matching result, and establish the transition layer matching result; and complete the gradient coating matching analysis based on the bottom layer coating matching result, the transition layer matching result, and the surface layer coating matching result.

[0062] Furthermore, the optimization module 14 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used to: establish a spraying parameter set, which includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness; initialize the spraying parameter set and construct an initial solution set using the surface state, attribute feature set, and real-time environmental data as configuration features; after creating a fitness index for spraying, perform fitness analysis of the initial solution set using the fitness index, and perform genetic search update to establish control optimization results.

[0063] Furthermore, the coating processing module 15 in the plasma environment-adaptive annular quartz cavity surface treatment system is also used to: perform surface coating control using the control optimization results and record real-time coating status data; generate dynamic feedback based on the real-time coating status data, and use the dynamic feedback to optimize the control optimization results.

[0064] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The plasma environment adaptable annular quartz cavity surface treatment method and specific examples in the aforementioned Embodiment 1 are also applicable to the plasma environment adaptable annular quartz cavity surface treatment system of this embodiment. Through the foregoing detailed description of the plasma environment adaptable annular quartz cavity surface treatment method, those skilled in the art can clearly understand the plasma environment adaptable annular quartz cavity surface treatment system of this embodiment. Therefore, for the sake of brevity, it will not be described in detail here.

[0065] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0066] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of this application and its equivalents, this application also intends to include such modifications and variations.

Claims

1. A method for surface treatment of annular quartz cavities adaptable to plasma environments, characterized in that, include: After machining the surface of the annular quartz cavity using CNC milling, image acquisition is performed to create an image of the cavity surface. After performing grain size partitioning using the cavity surface image, a three-stage laser scanning process is sequentially executed according to the grain size partitioning results, and the surface state of the annular quartz cavity is recorded. The material and application characteristics of the annular quartz cavity are collected to construct an attribute feature set. The attribute feature set and surface state are used as matching features to perform gradient coating matching analysis and establish a matching scheme. After reading the real-time environmental data, the matching scheme is optimized based on the surface state, attribute feature set, and real-time environmental data. The surface coating process is completed using the control optimization results. Based on the grain size partitioning results, a three-stage laser scanning process is performed sequentially, and the surface state of the annular quartz cavity is recorded, including: Set an independent minimum recognition target, perform particle size recognition on the cavity surface image based on the minimum recognition target, and establish particle size partitioning results based on the particle size recognition results; Using the particle size partitioning results as independent partitioning targets, long-wavelength laser control fitting is performed, and the control fitting results are used to perform uniform grid segmentation on the surface of the annular quartz cavity. The first stage of long-wavelength laser processing is performed based on the granularity partitioning results. After the first stage of processing is completed, the second stage of processing of short-wavelength lasers under the grid partition is performed using the uniform grid segmentation results; After the second stage of processing is completed, path control optimization is performed from a global perspective, followed by the third stage of processing under a global scan. Using the attribute feature set and surface state as matching features, a gradient coating matching analysis is performed, including: The material features of the attribute feature set are obtained. The material features and the surface state are used as matching features to perform adhesion adaptation matching of the bottom coating and establish the bottom coating matching result. The material features are the intrinsic properties of the annular quartz cavity itself, including quartz type, hardness, coefficient of thermal expansion and corrosion resistance. The application features in the attribute feature set are obtained. The application features are used as matching features to perform matching analysis on the surface coating and establish the surface coating matching results. The application features are the requirements and performance of the annular quartz cavity in actual applications, including the operating temperature. A transition layer is constructed using the matching results of the bottom coating and the top coating, and the matching results of the transition layer are established. The matching analysis of the gradient coating is completed based on the matching results of the bottom layer, the transition layer, and the top layer. Based on the surface state, attribute feature set, and real-time environmental data, the matching scheme is optimized and controlled, including: Establish a spraying parameter set, which includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness; Using the surface state, attribute feature set, and real-time environmental data as configuration features, initialize the spraying parameter set and construct the initial solution set; After creating the fitness index for spraying, the fitness analysis of the initial solution set is performed using the fitness index, and a genetic search update is performed to establish control over the optimization results.

2. The surface treatment method for annular quartz cavities with plasma environment adaptability as described in claim 1, characterized in that, Perform path control optimization from a global perspective, and carry out the third stage of processing under global scanning, including: Perform surface inspection of the annular quartz cavity after the second stage of processing, and establish an inspection and verification dataset; Configure path planning objectives, which include shortest path objective, path parameter mutation minimization objective, and repeated scan penalty objective; After configuring the balance factor according to the path planning objective, the global scanning path of the annular quartz cavity surface is optimized based on the detection and verification dataset, the path optimization result is established, and the third stage processing under global scanning is performed using the path optimization result.

3. The surface treatment method for annular quartz cavities with plasma environment adaptability as described in claim 1, characterized in that, Create images of the cavity surface, including: Anomalies on the surface of the annular quartz cavity are identified using the cavity surface image, and location anomaly markers are established. Based on the position anomaly identifier, perform control backtracking for CNC milling and establish control backtracking results; The anomaly identification and the control backtracking results are used to perform anomaly source tracing and verification, and anomaly source tracing and verification results are established. Based on the anomaly tracing and verification results, control optimization management of CNC milling is performed.

4. The surface treatment method for annular quartz cavities with plasma environment adaptability as described in claim 1, characterized in that, The surface coating treatment is completed using the control optimization results, including: The surface coating control is performed using the control optimization results, and real-time coating status data is recorded. Dynamic feedback is generated based on the real-time coating state data, and the dynamic feedback is used to optimize the control optimization results.

5. A plasma environment-adaptable annular quartz cavity surface treatment system, characterized in that, The plasma environment-adaptive annular quartz cavity surface treatment system includes: The image acquisition module is used to perform image acquisition and establish an image of the cavity surface after the surface of the annular quartz cavity is processed by CNC milling. The three-stage laser scanning module is used to perform three-stage laser scanning processing sequentially according to the particle size partitioning results after the cavity surface image is divided into particle size partitions, and to record the surface state of the annular quartz cavity. The scheme matching module is used to collect the material and application characteristics of the annular quartz cavity, construct an attribute feature set, and use the attribute feature set and surface state as matching features to perform gradient coating matching analysis and establish a matching scheme. The scheme optimization module is used to control and optimize the matching scheme based on the surface state, attribute feature set, and real-time environmental data after reading the real-time environmental data. The coating processing module is used to complete the surface coating process using the control optimization results; The three-stage laser scanning module is also used for: Set an independent minimum recognition target, perform particle size recognition on the cavity surface image based on the minimum recognition target, and establish particle size partitioning results based on the particle size recognition results; Using the particle size partitioning results as independent partitioning targets, long-wavelength laser control fitting is performed, and the control fitting results are used to perform uniform grid segmentation on the surface of the annular quartz cavity. The first stage of long-wavelength laser processing is performed based on the granularity partitioning results. After the first stage of processing is completed, the second stage of processing of short-wavelength lasers under the grid partition is performed using the uniform grid segmentation results; After the second stage of processing is completed, path control optimization is performed from a global perspective, followed by the third stage of processing under a global scan. The scheme matching module is also used for: The material features of the attribute feature set are obtained. The material features and the surface state are used as matching features to perform adhesion adaptation matching of the bottom coating and establish the bottom coating matching result. The material features are the intrinsic properties of the annular quartz cavity itself, including quartz type, hardness, coefficient of thermal expansion and corrosion resistance. The application features in the attribute feature set are obtained. The application features are used as matching features to perform matching analysis on the surface coating and establish the surface coating matching results. The application features are the requirements and performance of the annular quartz cavity in actual applications, including the operating temperature. A transition layer is constructed using the matching results of the bottom coating and the top coating, and the matching results of the transition layer are established. The matching analysis of the gradient coating is completed based on the matching results of the bottom layer, the transition layer, and the top layer. The solution optimization module is also used for: Establish a spraying parameter set, which includes spraying pressure, spraying speed, spraying angle and path, and spraying thickness; Using the surface state, attribute feature set, and real-time environmental data as configuration features, initialize the spraying parameter set and construct the initial solution set; After creating the fitness index for spraying, the fitness analysis of the initial solution set is performed using the fitness index, and a genetic search update is performed to establish control over the optimization results.

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