A tube wall gold infiltration device and a method for preparing TiN on a tube wall by using the same

Abstract

A kind of tube wall gold infiltration device and the method for preparing TiN in tube wall using it, device includes: vacuum furnace, is communicated with gas inlet and gas outlet;Workpiece support, be set in vacuum furnace, for pipe workpiece placement;Workpiece power supply, negative pole is electrically connected with pipe workpiece through workpiece support, positive pole is electrically connected with the furnace wall of vacuum furnace;Target material, for providing metal to be infiltrated, is located in vacuum furnace;Target material power supply, negative pole is electrically connected with target material, positive pole is electrically connected with the furnace wall of vacuum furnace;Gas supply system, is communicated with gas inlet, for providing working gas;Vacuum air pump, is communicated with gas outlet, for pumping;Ventilation pipe, extend along the axial direction of pipe workpiece, pass through in pipe workpiece, one end is communicated to gas supply system, sidewall is provided with multiple ventilation holes, to make the working gas provided by gas supply system enter the inside of pipe workpiece through ventilation hole.Can make pipe inner wall gold infiltration more evenly.

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