A piezoelectric MEMS planar wave resonator driving method based on embedded feedback electrode

By embedding feedback electrodes in a piezoelectric MEMS planar traveling wave resonator and combining them with an adaptive PID feedback algorithm, the problem of resonant frequency drift was solved, enabling real-time tracking of the resonant frequency and adaptive adjustment of the driving frequency, thereby improving the dynamic performance and long-term stability of the driver.

CN121585129BActive Publication Date: 2026-06-19INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
Filing Date
2025-11-26
Publication Date
2026-06-19

AI Technical Summary

⚠Technical Problem

In the existing technology, piezoelectric MEMS planar traveling wave resonators have difficulty in achieving real-time tracking of the resonant frequency and adaptive adjustment of the driving frequency when faced with load changes, ambient temperature fluctuations, or device aging, resulting in attenuation of traveling wave amplitude, mode distortion, and a decrease in output torque.

⚗Method used

By employing an embedded feedback electrode method, the isolated electrodes are distributed within the driving electrode region and in the gaps. By calculating the phase difference between the isolated electrodes and the driving electrode, and combining an adaptive PID feedback automatic adjustment algorithm and the least squares method, real-time tracking of the resonant frequency and adaptive frequency adjustment are achieved.

🎯Benefits of technology

It significantly improves the amplitude and signal-to-noise ratio of the lone pole output signal, reduces the manufacturing cost of MEMS resonators and the complexity of the control system, and ensures that the traveling wave resonator can maintain high performance when facing continuously changing operating conditions.

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Abstract

A driving method for a piezoelectric MEMS planar traveling-wave resonator based on an embedded feedback electrode, relating to the field of traveling-wave micro-actuator technology, includes: applying a preset input driving signal to the resonant device; repeatedly acquiring the output signals of the driving electrode and the lone electrode, and sequentially calculating their phase difference; taking the average value of the phase difference and comparing it with the initial phase difference; if the average phase difference equals the initial phase difference, the frequency of the input driving signal remains unchanged; if the average phase difference is less than the initial phase difference, the frequency of the input driving signal is adjusted until the output phase difference equals the initial phase difference, and the frequency of the input driving signal is maintained; if the average phase difference is greater than the initial phase difference, the frequency of the input driving signal is adjusted until the output phase difference equals the initial phase difference, and the frequency of the driving input signal is maintained. This method addresses the problems of low accuracy in monitoring the resonant state and complex device structure in traditional resonator driving methods.
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