Vacuum microscopy apparatus and sample delivery method

Abstract

The application discloses a vacuum microscopy device and a sample delivery method. The vacuum microscopy device comprises an electron microscope lens barrel, a conveying module, a first vacuum system and a second vacuum system. The electron microscope lens barrel comprises a barrel body, a pair of objective lens pole pieces are arranged in the barrel body, and an observation gap for passing a sample is formed between the objective lens pole pieces. The conveying module comprises a conveying tunnel. The conveying tunnel is used for passing the sample, the conveying tunnel is arranged in the observation gap, a space in the conveying tunnel is isolated from the barrel body, a side wall of the conveying tunnel is provided with a penetrating observation window, and the observation window is located on a connecting line of the two objective lens pole pieces. The first vacuum system is used for providing a vacuum environment for the barrel body, and the second vacuum system is used for providing a vacuum environment for the conveying tunnel.

Description

Technical Field

[0001] This application relates to the field of vacuum microscopy equipment technology, and in particular to a vacuum microscopy device and a sample delivery method. Background Technology

[0002] Cryo-electron microscopy, a type of vacuum microscopy device, enables the observation of targets in low-temperature environments. Before using a cryo-electron microscope, the sample to be observed needs to be frozen and then placed into the microscope's tube for observation. Before using the tube, it must be evacuated to meet the microscope's environmental requirements.

[0003] In related technologies, because cryo-electron microscopy operates in a high-vacuum environment, the introduction of outside air when a sample is placed into the microscope tube disrupts this vacuum environment. The removal of the sample also disrupts the vacuum. Therefore, a lengthy vacuuming process is required before each sample is introduced into the tube, resulting in significant waiting time and hindering the efficiency of cryo-electron microscopy. Furthermore, when observing samples, cryo-electron microscopy typically involves introducing multiple samples at once, observing them individually, and then removing them simultaneously. This process repeats for the next observation. Consequently, waiting time also exists during sample loading, observation, and unloading, leading to wasted time and hindering the efficient use of cryo-electron microscopy. Summary of the Invention

[0004] To solve at least one of the above-mentioned technical problems, this application provides a vacuum microscopy device and a sample delivery method, and the technical solution adopted is as follows.

[0005] The vacuum microscope apparatus provided in the first aspect of this application includes an electron microscope tube, a transport module, a first vacuum system, and a second vacuum system. The electron microscope tube includes a body with a pair of objective pole pieces arranged inside, forming an observation gap between the objective pole pieces for sample passage. The transport module includes a transport tunnel for sample passage, which passes through the observation gap. The space inside the transport tunnel is isolated from the body. The sidewall of the transport tunnel has a through observation window located on the line connecting the two objective pole pieces. The first vacuum system provides a vacuum environment for the body, and the second vacuum system provides a vacuum environment for the transport tunnel.

[0006] In some embodiments of this application, the conveying module further includes a first buffer chamber connected to the entrance of the conveying tunnel. The first buffer chamber is selectively connected to the conveying tunnel. When the first buffer chamber is evacuated, the first buffer chamber is isolated from the conveying tunnel. When the vacuum level of the first buffer chamber reaches the vacuum level of the conveying tunnel, the first buffer chamber is connected to the conveying tunnel, and the sample can enter the conveying tunnel from the first buffer chamber.

[0007] In some embodiments of this application, a first valve is provided at the connection between the first buffer chamber and the conveying tunnel, and the first valve can connect or disconnect the first buffer chamber and the conveying tunnel.

[0008] In some embodiments of this application, the first buffer chamber is disposed outside the cylinder.

[0009] In some embodiments of this application, the first buffer chamber is disposed inside the cylinder.

[0010] In some embodiments of this application, the two ends of the transport tunnel are respectively formed as an inlet and an outlet. The transport module is provided with at least two transport mechanisms. One of the transport mechanisms is movably disposed in the transport tunnel for moving the sample to the observation window, and the other transport mechanism is used to send the sample into the inlet of the transport tunnel or output it from the outlet of the transport tunnel. The sample can be transferred between the two transport mechanisms.

[0011] In some embodiments of this application, the conveying module further includes a first buffer chamber and a second buffer chamber. The first buffer chamber is connected to the entrance of the conveying tunnel, and the second buffer chamber is connected to the exit of the conveying tunnel. The conveying module includes three conveying mechanisms, namely a first conveying mechanism, a second conveying mechanism, and a third conveying mechanism. The first conveying mechanism is movably disposed in the conveying tunnel, the second conveying mechanism is disposed in the first buffer chamber, and the second conveying mechanism is used to transfer samples to the first conveying mechanism. The third conveying mechanism is disposed in the second buffer chamber, and the third conveying mechanism is used to receive samples from the first conveying mechanism.

[0012] In some embodiments of this application, when at least one of the second conveying mechanism or the first conveying mechanism is working, the third conveying mechanism performs sample feeding.

[0013] When the third conveying mechanism or at least one of the first conveying mechanisms is working, the second conveying mechanism loads the sample.

[0014] In some embodiments of this application, the first buffer chamber and the transport tunnel may be selectively connected. When the first buffer chamber is evacuated, the first buffer chamber and the transport tunnel are isolated from each other. When the vacuum level of the first buffer chamber reaches the vacuum level of the transport tunnel, the first buffer chamber and the transport tunnel are connected. The second conveying mechanism transfers the sample from the entrance of the transport tunnel to the first conveying mechanism.

[0015] The second buffer chamber is selectively connected to the conveying tunnel. When the second buffer chamber is evacuated, the second buffer chamber is isolated from the conveying tunnel. When the vacuum level of the second buffer chamber reaches the vacuum level of the conveying tunnel, the second buffer chamber is connected to the conveying tunnel. The third conveying mechanism receives the sample from the first conveying mechanism at the outlet of the conveying tunnel.

[0016] In some embodiments of this application, a first conveying mechanism disposed in the conveying tunnel includes a track and a first conveying arm. The track is disposed along the extension direction of the conveying tunnel, and the first conveying arm is slidably connected to the track. The first conveying arm is used to connect to at least one side of the sample.

[0017] In some embodiments of this application, the vacuum microscope further includes a sample carrier assembly, which includes a mesh and a first heat sink. The mesh is encapsulated in the first heat sink, and the bearing surface of the mesh protrudes from the first heat sink. The bearing surface is used to carry the sample. A first conveying arm is connected to the first heat sink. When the first conveying arm moves the first heat sink to the observation window, the bearing surface is located in the observation window.

[0018] In some embodiments of this application, the first heat sink includes a mounting portion and a side end portion connected in sequence. The mounting portion is used to encapsulate the carrier mesh. The mounting portion has a cutout portion, and the bearing surface is exposed from the cutout portion. The side end portion is engaged with and / or magnetically connected to the first conveying arm.

[0019] In some embodiments of this application, there are two tracks, two first conveying arms, and the two first conveying arms are respectively disposed in the two tracks. The first heat sink includes two side ends, which are symmetrically disposed about the mounting portion. The two first conveying arms are respectively engaged with the two side ends on both sides, and the two first conveying arms synchronously drive the sample carrying assembly to move.

[0020] In some embodiments of this application, the thickness of the side end is greater than the thickness of the mounting portion, the outer contour of the transport tunnel is conformally set according to the shape of the sample carrying assembly, and along the thickness direction of the first heat sink, the mounting portion is recessed relative to the side end to form a clearance space, and a portion of the objective lens pole shoe extends into the clearance space.

[0021] In some embodiments of this application, the thickness of the side end is greater than the thickness of the mounting portion, the mounting portion is recessed relative to the side end to form a clearance space, the second conveying mechanism and the third conveying mechanism both include a claw, the claw includes at least a pair of spaced teeth, the claw extends into the clearance space, and the mounting portion is located between the two teeth.

[0022] In some embodiments of this application, the claw is magnetically connected to the first heat sink.

[0023] In some embodiments of this application, the conveying mechanism includes a clamping structure with a groove and a movable part in the groove. The movable part extends to abut against and hold the surface of the sample carrier assembly when energized, and retracts and moves away from the surface of the sample carrier assembly when de-energized to release the sample carrier assembly.

[0024] In some embodiments of this application, the active element includes a piezoelectric stacked actuator.

[0025] In some embodiments of this application, the observation window is disposed on the first sidewall of the transport tunnel, and the track is disposed on the second sidewall of the transport tunnel, with the second sidewall and the first sidewall being disposed adjacent to each other.

[0026] In some embodiments of this application, a first conveying mechanism disposed in the conveying tunnel includes a conveyor belt disposed along the extension direction of the conveying tunnel, the conveyor belt being used to connect to the sidewall of the sample carrying assembly to drive the sample to move along the conveying tunnel.

[0027] In some embodiments of this application, the conveying module further includes a first buffer chamber, a first end of which is connected to the entrance of the conveying tunnel, and a second end of which is used to deliver a sample.

[0028] The conveying module includes a second conveying arm, which includes a first sub-arm and a second sub-arm. The second sub-arm is sleeved on the outer periphery of the first sub-arm. The first sub-arm is telescopically movable relative to the second sub-arm along its own axial direction. When the second conveying arm delivers the sample into the first buffer chamber, the outer periphery of the second sub-arm abuts against the opening at the second end of the first buffer chamber and is sealed to the opening at the second end. The first sub-arm extends relative to the second sub-arm and can pass through the opening at the first end of the first buffer chamber to enter the conveying tunnel.

[0029] In some embodiments of this application, the vacuum microscope further includes a storage module for storing samples. The storage module is disposed at the second end of the first buffer chamber and is connected to the second end of the first buffer chamber.

[0030] Secondly, this application provides a sample delivery method in a vacuum microscope apparatus, including...

[0031] S100. The second transfer mechanism delivers the sample to the first transfer mechanism from the entrance of the transport tunnel;

[0032] S200. The first transmission mechanism moves the sample in the transport tunnel to the observation gap for observation;

[0033] S300. The first transfer mechanism delivers the sample from the exit of the transport tunnel to the third transfer mechanism.

[0034] In some embodiments of this application, while performing step S100 or S200, the third transfer mechanism performs a sample feeding from the previous sample; and / or

[0035] While performing step S200 or S300, the second transfer mechanism loads the previous sample.

[0036] In some embodiments of this application, the third transmission mechanism for unloading the previous sample includes transporting the sample away from the second buffer chamber by the third transmission mechanism.

[0037] The second transfer mechanism for loading the previous sample includes transporting the sample into the first buffer chamber.

[0038] Thirdly, this application provides a sample delivery method in a vacuum microscope apparatus, comprising:

[0039] The sample is fed into the delivery module;

[0040] Vacuum the delivery module and the electron microscope tube.

[0041] The delivery module transports the sample to the observation window;

[0042] The electron microscope tube allows observation of the sample through an observation window;

[0043] The sample is sent out from the delivery module.

[0044] The embodiments of this application have at least the following beneficial effects: By isolating the space within the transport tunnel from the cylinder, the space within the transport tunnel and the space within the cylinder are formed as two independent spaces. Two different vacuum systems are used to provide vacuum environments for these two spaces respectively. This improves the efficiency of vacuuming in both spaces, ensuring that both spaces maintain good vacuum conditions. For example, during sample loading, unloading, and observation in the transport tunnel, even if a small amount of air enters the transport tunnel and disrupts the vacuum conditions, the independent arrangement of the transport tunnel and the cylinder protects the vacuum conditions within the cylinder, preventing the transport tunnel from affecting the vacuum level of the cylinder. Simultaneously, the space of the transport tunnel can be made very small, just enough to allow sample passage. This helps improve the vacuuming efficiency of the transport tunnel, reduces the difficulty of maintaining a vacuum in the transport tunnel, and shortens the time required for the transport tunnel to reach the target vacuum level. This arrangement shortens the waiting time for vacuuming the transport tunnel or cylinder during sample loading and unloading, improving the efficiency of the vacuum microscope. Attached Figure Description

[0045] The present application will be further illustrated below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments illustrated in the following drawings are exemplary and are only used to explain the present application, and should not be construed as limiting the present application.

[0046] Figure 1 This is a schematic diagram of the structure of the vacuum microscope device provided in the embodiments of this application;

[0047] Figure 2 A schematic diagram showing the transfer of a sample from a second conveying mechanism to a first conveying mechanism at the entrance of the transport tunnel of the vacuum microscope provided in this application embodiment;

[0048] Figure 3 A schematic diagram of the sample passing through the observation gap in the transport tunnel of the vacuum microscope provided in this application embodiment;

[0049] Figure 4 A schematic diagram showing the first conveying mechanism delivering a sample to a third conveying mechanism at the exit of the transport tunnel of the vacuum microscope provided in this application embodiment;

[0050] Figure 5 This is a schematic diagram of the sample carrier component in the vacuum microscope provided in the embodiments of this application;

[0051] Figure 6 This is a schematic diagram of the structure of the first buffer chamber in the vacuum microscope device provided in the embodiments of this application;

[0052] Figure 7 A schematic diagram of the structure of the vacuum microscope device provided in the embodiment of this application within the storage module;

[0053] Figure 8 A flowchart illustrating a first example of a sample delivery method provided in an embodiment of this application;

[0054] Figure 9 A flowchart illustrating a second example of a sample delivery method provided in an embodiment of this application.

[0055] Figure reference numerals: 1000, electron microscope tube; 100, tube body; 110, objective lens pole piece; 111, observation gap;

[0056] 2000, Conveying module; 2100, Conveying tunnel; 2110, Observation window; 2111, Entrance; 2112, Exit; 2200, First buffer chamber; 2210, First end; 2220, Second end; 2300, Clamping structure; 2301, Groove; 2302, Moving part; 2310, First conveying mechanism; 2311, First conveying arm; 2312, Track; 2320, Second conveying mechanism; 2321, Claw; 2322, Gear; 2323, First sub-arm; 2324, Second sub-arm; 2330, Third conveying mechanism; 2400, Second buffer chamber;

[0057] 3000, Sample support assembly; 3100, Carrier net; 3111, Support surface; 3200, First heat sink; 3210, Mounting part; 3211, Hollowed-out part; 3212, Clearance space; 3220, Side end;

[0058] 4000, Storage Module. Detailed Implementation

[0059] The embodiments of this application are described in detail below with reference to the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0060] In the description of this application, it should be understood that the terms "center", "middle", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0061] In the description of this application, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0062] In the description of this application, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0063] In the description of this application, the use of terms such as "as one implementation," "an embodiment," "some examples," "some embodiments," "illustrative embodiment," "example," "specific example," "some examples," etc., indicates that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0064] Vacuum microscopy devices (such as cryo-electron microscopes) typically include an electron optics system, a sample stage system, a vacuum system, a detection and recording system, a control system, and a power supply system to enable observation of target objects. Cryo-electron microscopes, as a subcategory of vacuum microscopy devices, may also include a cryo-system, and these systems work together to achieve sample observation.

[0065] Firstly, please refer to Figure 1 This application provides a vacuum microscopy apparatus, which includes a sample preparation module (not shown) and an electron microscope tube 1000. The sample preparation module can prepare samples that meet the observation requirements, and the samples can be stored or immediately transferred to the electron microscope tube 1000 for observation. The electron microscope tube 1000 and the sample preparation module can be set up independently. After the sample is frozen and prepared in the sample preparation module, it can be stored in the sample preparation module, or a storage module 4000 can be set up in the vacuum microscopy apparatus, and the sample can be transferred to the storage module 4000 for storage, or directly transferred to the electron microscope tube 1000 for observation. The independent setting of the sample preparation module and the electron microscope tube 1000 can improve the independence of the operation between the two modules, reduce the problem of mutual interference between the two modules, and improve the reliability of the sample preparation module and the electron microscope tube 1000.

[0066] The sample preparation module and the electron microscope tube 1000 can be connected via the transport module 2000. The vacuum microscope apparatus will be further described below.

[0067] The vacuum microscope apparatus includes an electron microscope tube 1000, a transport module 2000, a first vacuum system (not shown), and a second vacuum system (not shown). The electron microscope tube 1000 includes a body 100, within which a pair of objective pole pieces 110 are arranged, forming an observation gap 111 between the objective pole pieces 110 for sample passage. The transport module 2000 includes a transport tunnel 2100 for sample passage, extending through the observation gap 111. The space within the transport tunnel 2100 is isolated from the body 100. A through observation window 2110 is provided on the side wall of the transport tunnel 2100, located on the line connecting the two objective pole pieces 110. The first vacuum system provides a vacuum environment for the body 100, and the second vacuum system provides a vacuum environment for the transport tunnel 2100.

[0068] By isolating the space within the transport tunnel 2100 from the cylinder 100, the two spaces are formed as two independent spaces. Two different vacuum systems provide vacuum environments for these two spaces respectively, thus improving the vacuuming efficiency and ensuring good vacuum conditions in both spaces. For example, during sample loading, unloading, and observation within the transport tunnel 2100, even if a small amount of air enters and disrupts the vacuum, the independent arrangement of the transport tunnel 2100 and the cylinder 100 protects the vacuum condition within the cylinder 100, preventing the transport tunnel 2100 from affecting the vacuum level of the cylinder 100. Simultaneously, the space within the transport tunnel 2100 can be made very small, just enough to allow sample passage. This helps improve the vacuuming efficiency of the transport tunnel 2100, reduces the difficulty of maintaining a vacuum, and shortens the time required to reach the target vacuum level. This setup can shorten the waiting time for vacuuming in the transport tunnel 2100 or cylinder 100 during sample loading and unloading, thereby improving the efficiency of the vacuum microscope.

[0069] Understandably, the transport tunnel 2100 is equipped with an observation window 2110, which allows the electron beam from the objective lens pole piece 110 to pass through, ensuring that the sample can be observed within the observation gap 111. As the observation window 2110 is the only point of connection between the transport tunnel 2100 and the cylinder 100, by reducing the size of the observation window 2110, while ensuring sufficient field of view for the sample, the space within the transport tunnel 2100 can be isolated from the space within the cylinder 100 to the greatest extent possible, improving the independence of these two spaces and reducing the mutual influence of vacuum levels between them.

[0070] In some embodiments, the transport module 2000 further includes a first buffer chamber 2200, which is connected to the inlet 2111 of the transport tunnel 2100. The first buffer chamber 2200 and the transport tunnel 2100 are selectively connected. When the first buffer chamber 2200 is evacuated, it is isolated from the transport tunnel 2100. When the vacuum level of the first buffer chamber 2200 reaches the vacuum level of the transport tunnel 2100, the first buffer chamber 2200 is connected to the transport tunnel 2100, and the sample can enter the transport tunnel 2100 from the first buffer chamber 2200. By setting the first buffer chamber 2200 and the transport channel to be selectively connected, the first buffer chamber 2200 can be evacuated in advance when loading the sample into the transport tunnel 2100. When the first buffer chamber 2200 reaches a sufficient vacuum level, it is then connected to the transport tunnel 2100 to send the sample into the transport tunnel 2100, thus avoiding damage to the vacuum environment in the transport tunnel 2100. The first buffer chamber 2200 can be set to a smaller space. Compared with evacuating the entire transport tunnel 2100, evacuating only the first buffer chamber 2200 can further shorten the vacuum time, reduce the waiting time during the vacuuming process, and thus improve the efficiency of sample loading.

[0071] In some embodiments, a first valve is provided at the connection between the first buffer chamber 2200 and the conveying tunnel 2100. The first valve can connect or disconnect the first buffer chamber 2200 and the conveying tunnel 2100. By using the opening and closing action of the valve, the connection and isolation states between the first buffer chamber 2200 and the conveying tunnel 2100 can be switched.

[0072] In some embodiments, the two ends of the transport tunnel 2100 are respectively formed as an inlet 2111 and an outlet 2112. The transport module 2000 is provided with at least two conveying mechanisms. One conveying mechanism is movably disposed in the transport tunnel 2100 for moving the sample to the observation window 2110, and the other conveying mechanism is used to feed the sample into the inlet 2111 of the transport tunnel 2100 or output it from the outlet 2112 of the transport tunnel 2100. The sample can be transferred between the two conveying mechanisms. On the one hand, the sample enters from one end inlet 2111 of the transport tunnel 2100 and is sent out from the other end outlet 2112. In this way, the sample can form a unidirectional flow in the transport tunnel 2100, which helps to realize continuous sample loading. When the first sample is sent into the transport tunnel 2100 from the inlet 2111 and moved to the observation window 2110 for observation, or when it is sent out of the transport tunnel 2100 from the outlet 2112 after observation, the second sample can continue to be sent into the transport tunnel 2100 from the inlet 2111. The second sample and the first sample enter the transport tunnel 2100 in sequence and move in the same direction. Therefore, the two samples will not interfere with each other. On the other hand, by using at least two conveying mechanisms to transport the samples, while one conveying mechanism is carrying the sample through the observation window 2110 for observation, at least another conveying mechanism can carry the sample for loading or unloading operations. That is, in the three stages of loading, observation and unloading, at least two stages can be carried out simultaneously, thereby reducing the sample waiting time. Compared to the method of sending multiple samples into the cylinder 100 at once for observation, the vacuum microscope provided in this application allows multiple samples to enter one by one from the inlet 2111 at one end of the transport tunnel 2100 and exit from the outlet 2112 at the other end. Furthermore, while sending out the previous sample, the next sample can be sent in from the inlet 2111. Therefore, it saves the time waiting for sample loading, reduces the waste of sample loading time, and improves the efficiency of sample loading.

[0073] In some embodiments, the transfer module further includes a first buffer chamber 2200 and a second buffer chamber 2400. The first buffer chamber 2200 is connected to the inlet 2111 of the transfer tunnel 2100, and the second buffer chamber 2400 is connected to the outlet 2112 of the transfer tunnel 2100. The transfer module includes three transfer mechanisms: a first transfer mechanism 2310, a second transfer mechanism 2320, and a third transfer mechanism 2330. The first transfer mechanism 2310 is movably disposed in the transfer tunnel 2100. The second transfer mechanism 2320 is disposed in the first buffer chamber 2200 and is used to transfer samples to the first transfer mechanism 2310. The third transfer mechanism 2330 is disposed in the second buffer chamber 2400 and is used to receive samples from the first transfer mechanism 2310. Using three transfer mechanisms, the sample loading, observation, and unloading stages can be controlled independently, improving the reliability and efficiency of sample delivery between different stages of the vacuum microscope apparatus. For example, the transfer mechanism located at inlet 2111 transfers the sample to the transfer mechanism located in transport tunnel 2100, thus completing the sample loading operation. The transfer mechanism located in transport tunnel 2100 carries the sample through observation window 2110, enabling the sample observation operation. The transfer mechanism located in transport tunnel 2100 transfers the sample to the transfer mechanism located at outlet 2112, completing the sample loading operation. It can be seen that in the three stages of sample loading, observation, and unloading, one or two transfer mechanisms are involved. Simultaneously, there will always be two or one remaining transfer mechanisms that do not participate in the sample delivery process. These remaining transfer mechanisms can then operate on the previous sample (e.g., sample retrieval) or on the next sample (e.g., retrieving a sample from the sample preparation module or storage module 4000), thereby further shortening the sample waiting time and improving the sample transfer efficiency in the vacuum microscope. By setting buffer chambers at the inlet 2111 and outlet 2112 of transport tunnel 2100, the sample loading and unloading processes can be set independently, avoiding mutual interference between the two stages.

[0074] Optionally, the first buffer chamber 2200 and the second buffer chamber 2400 can both be located outside the cylinder 100 (e.g., Figure 1 As shown, this helps reduce the space occupied in the cylinder 100. Of course, in other examples, it can also be set inside the cylinder 100, or one buffer chamber can be set inside the cylinder 100 and the other can be set outside the cylinder 100. No specific limitation is made here.

[0075] In some embodiments, when at least one of the second transfer mechanism 2320 or the first transfer mechanism 2310 is operating, the third transfer mechanism 2330 unloads the sample; when at least one of the third transfer mechanism 2330 or the first transfer mechanism 2310 is operating, the second transfer mechanism 2320 loads the sample. This arrangement increases the overlap time of the simultaneous operation of the three transfer mechanisms, reduces the waiting time between them, thereby reducing wasted time and improving the efficiency of the vacuum microscope in observing samples.

[0076] In some embodiments, the first buffer chamber 2200 and the transport tunnel 2100 may be selectively connected. When the first buffer chamber 2200 is evacuated, the first buffer chamber 2200 and the transport tunnel 2100 are isolated from each other. When the vacuum level of the first buffer chamber 2200 reaches the vacuum level of the transport tunnel 2100, the first buffer chamber 2200 and the transport tunnel 2100 are connected. The second conveying mechanism 2320 transfers the sample from the inlet 2111 of the transport tunnel 2100 to the first conveying mechanism 2310. The second buffer chamber 2400 and the transport tunnel 2100 may be selectively connected. When the second buffer chamber 2400 is evacuated, the second buffer chamber 2400 and the transport tunnel 2100 are isolated from each other. When the vacuum level of the second buffer chamber 2400 reaches the vacuum level of the transport tunnel 2100, the second buffer chamber 2400 and the transport tunnel 2100 are connected. The third conveying mechanism 2330 receives the sample from the first conveying mechanism 2310 at the outlet 2112 of the transport tunnel 2100. By setting buffer chambers at the inlet 2111 and outlet 2112 of the conveying tunnel 2100, and selectively connecting the first buffer chamber 2200 and the conveying tunnel 2100, and selectively connecting the second buffer chamber 2400 and the conveying tunnel 2100, the conveying tunnel 2100 can be connected to the outside world through the first buffer chamber 2200 and the second buffer chamber 2400. The first buffer chamber 2200, the second buffer chamber 2400 and the conveying tunnel 2100 can be vacuumed step by step, avoiding the problem that the vacuum level in the conveying tunnel 2100 will drop too much due to direct connection with the outside world, and solving the problem that it takes a long time to reach a sufficient vacuum level each time the conveying tunnel 2100 is vacuumed.

[0077] In some embodiments, please refer to Figures 2 to 4 , Figures 2 to 4The process of transporting a sample in a transport tunnel 2100 is illustrated. A first transport mechanism 2310 disposed in the transport tunnel 2100 includes a track 2312 and a first transport arm 2311. The track 2312 is arranged along the extending direction of the transport tunnel 2100, and the first transport arm 2311 is slidably connected to the track 2312. The first transport arm 2311 is used to connect with at least one side of the sample. By utilizing the track 2312 to follow the extending direction of the transport tunnel 2100, a guiding function can be achieved for the first transport arm 2311, guiding the first transport arm to move along the extending direction of the transport tunnel 2100.

[0078] Optionally, the first conveying arm 2311 can be a gripper, a holding structure, a magnetic attraction structure, etc. The first conveying arm 2311 is connected to one side of the sample, which can both move the sample in the conveying tunnel 2100 and avoid obstructing the observation window 2110 when the sample moves to it, thus facilitating the observation of the sample. The driving structure and transmission structure of the first conveying arm 2311 can also be set in the conveying tunnel 2100.

[0079] In some embodiments, please refer to Figure 5 The vacuum microscope also includes a sample carrier assembly 3000, which includes a mesh 3100 and a first heat sink 3200. The mesh 3100 is encapsulated in the first heat sink 3200, and the bearing surface 3111 of the mesh 3100 is exposed from the first heat sink 3200. The bearing surface 3111 is used to carry the sample. A first transfer arm 2311 is connected to the first heat sink 3200. When the first transfer arm 2311 moves the first heat sink 3200 to the observation window 2110, the bearing surface 3111 is located in the observation window 2110. By encapsulating the carrier mesh 3100 with the first heat sink 3200, the volume of the carrier mesh 3100 can be reduced, making it easier to prepare samples that meet the observation requirements. On the other hand, the first heat sink 3200 can protect the carrier mesh 3100, improve its strength, and allow direct operation of the first heat sink 3200 when moving the sample, avoiding direct contact between the conveying mechanism and the carrier mesh 3100, thus preventing damage to the carrier mesh 3100 or the sample.

[0080] In some embodiments, the first heat sink 3200 includes a mounting portion 3210 and a side end portion 3220 connected in sequence. The mounting portion 3210 is used to encapsulate the carrier mesh 3100. The mounting portion 3210 has a cutout portion 3211, through which the bearing surface 3111 is exposed. The side end portion 3220 is engaged with and / or magnetically connected to the first conveying arm 2311. The first conveying arm 2311 is connected to the side end portion 3220 of the first heat sink 3200. On the one hand, it can form a connection with the first heat sink 3200, driving the carrier mesh 3100 to move in the transport tunnel 2100, realizing the movement and observation of the sample. On the other hand, being connected to the side end portion 3220 can prevent the first conveying arm 2311 from directly acting on the mounting portion 3210, reducing the interference of the first conveying arm 2311 on the carrier mesh 3100 and the sample on the carrier mesh 3100 during operation, ensuring that the sample can be observed smoothly. Optionally, the side end 3220 and the first conveying arm 2311 can be connected by either snap-fit ​​or magnetic connection, or both snap-fit ​​and magnetic connection methods can be used simultaneously.

[0081] In some embodiments, please continue reading Figures 2 to 4 Two tracks 2312 and two first conveyor arms 2311 are provided, each set in one track 2312. The first heat sink 3200 includes two side ends 3220, which are symmetrically arranged about the mounting part 3210. The two first conveyor arms 2311 are respectively engaged with the side ends 3220 on both sides, and the two first conveyor arms 2311 synchronously drive the sample carrying assembly 3000 to move. By symmetrically arranging the two side ends 3220 on both sides of the mounting part 3210, the balance of the first heat sink 3200 on both sides can be improved. By using the two first conveyor arms 2311 to simultaneously drive the first heat sink 3200 to move on both sides, the stability of the first heat sink 3200 during the transfer process can be further improved.

[0082] In some embodiments, the thickness of the side end portion 3220 is greater than the thickness of the mounting portion 3210, the outer contour of the transport tunnel 2100 is set according to the shape of the sample carrier assembly 3000, and along the thickness direction of the first heat sink 3200, the mounting portion 3210 is recessed relative to the side end portion 3220 to form a clearance space 3212, and a portion of the objective lens pole piece 110 extends into the clearance space 3212. Taking advantage of the first heat sink 3200's thin middle and thick sides, a recessed clearance space 3212 can be formed at the mounting part 3210. When observing the sample, a portion of the objective lens pole piece 110 extends into the clearance space 3212. That is, as the sample carrier assembly 3000 moves along the transport tunnel 2100, the first heat sink 3200 and the objective lens pole piece 110 move relative to each other. The clearance space 3212 allows the objective lens pole piece 110 to pass through, thereby further shortening the distance between the objective lens pole piece 110 and the carrier net 3100. On the one hand, it can shorten the distance between the two objective lens pole pieces 110, thereby reducing the power of the objective lens pole piece 110 while ensuring sufficient electric field strength, thus achieving the effect of reducing energy consumption. On the other hand, it also helps to realize the miniaturization design of the electron microscope tube 1000.

[0083] In some embodiments, please combine Figure 2 , Figures 4 to 6 The thickness of the side end 3220 is greater than the thickness of the mounting portion 3210. The mounting portion 3210 is recessed relative to the side end 3220 to form a clearance space 3212. The second transmission mechanism 2320 and the third transmission mechanism 2330 both include a claw 2321. The claw 2321 includes at least a pair of spaced-apart teeth 2322. The claw 2321 extends into the clearance space 3212. The mounting portion 3210 is located between the two teeth 2322. Taking advantage of the fact that the first heat sink 3200 is thin in the middle and thick on both sides, when the chuck 2321 clamps the first heat sink 3200, the chuck 2321 can extend into the clearance space 3212, so that the mounting part 3210 is located between the two chuck teeth 2322, and the side end 3220 is located outside the chuck teeth 2322. The thickness difference between the mounting part 3210 and the side end 3220 can limit the chuck 2321, thereby improving the stability of the chuck 2321 when clamping the first heat sink 3200.

[0084] In some embodiments, the claw 2321 is magnetically connected to the first heat sink 3200. In addition to the mutual snapping action, the claw 2321 and the first heat sink 3200 can also be magnetically connected to further improve the stability of their connection.

[0085] In some embodiments, the conveying mechanism includes a clamping structure 2300, which has a groove 2301. A movable member 2302 is provided in the groove 2301. The movable member 2302 extends to abut against and hold the surface of the sample carrier assembly 3000 when energized, and retracts and moves away from the surface of the sample carrier assembly 3000 when de-energized, thereby releasing the sample carrier assembly 3000. The groove 2301 structure allows a portion of the sample carrier assembly 3000 to be accommodated within it, thereby improving connection strength and clamping stability. The extension and retraction of the movable member 2302 enables the clamping and release of the sample carrier assembly 3000.

[0086] In some embodiments, the movable component 2302 includes a piezoelectric stack actuator. Utilizing the principle of piezoelectric stacking, when energized, the piezoelectric stack effectively enhances the piezoelectric effect by stacking and combining multiple piezoelectric crystals. Piezoelectric stacking has advantages such as high responsiveness, precise control, and large output force, which helps to realize the clamping and releasing actions of the sample carrier component 3000 for transportation purposes.

[0087] In some embodiments, the observation window 2110 is disposed on the first sidewall of the conveying tunnel 2100, and the track 2312 is disposed on the second sidewall of the conveying tunnel 2100, with the second sidewall and the first sidewall being adjacent to each other. This satisfies the requirement of simultaneously disposing of the observation window 2110 and the track 2312 within the conveying tunnel 2100, while also preventing mutual interference between the track 2312 and the observation window 2110, avoiding the track 2312 from obstructing the observation window 2110, and resolving the problem that the observation window 2110 prevents the track 2312 from being discontinuously disposed.

[0088] For example, the two objective pole pieces 110 can be arranged vertically at intervals. In this case, the top wall of the transport tunnel 2100 can serve as the first sidewall, and the observation window 2110 is located on the top wall of the transport tunnel 2100. The left and right side walls of the transport tunnel 2100 can then serve as the second sidewall. When two tracks 2312 are provided in the transport tunnel 2100, the two tracks 2312 can be arranged horizontally at intervals, with the line connecting the two tracks 2312 perpendicular to the line connecting the two objective pole pieces 110. Of course, in other examples, the two objective pole pieces 110 can also be arranged horizontally at intervals. In this case, the left and right side walls of the transport tunnel 2100 can serve as the first sidewall, and the top or bottom wall can serve as the second sidewall.

[0089] Besides taking the form of grippers, the first conveying mechanism 2310 can also take the form of a conveyor belt. For example, in some embodiments, the first conveying mechanism 2310 disposed in the conveying tunnel 2100 includes a conveyor belt, which is disposed along the extension direction of the conveying tunnel 2100. The conveyor belt is used to connect with the side wall of the sample carrying assembly 3000 to drive the sample to move along the conveying tunnel 2100. The conveyor belt and the sample carrying assembly 3000 (e.g., the end of the first heat sink 3200) can abut against each other, and the static friction force is used to drive the sample carrying assembly 3000 to move along the conveying tunnel 2100. Two conveyor belts can be provided, which are respectively located on both sides of the first heat sink 3200 and clamp the side end 3220 of the first heat sink 3200. The clamping action of the two conveyor belts is used to drive the sample carrying assembly 3000 to move.

[0090] In some embodiments, please refer to Figure 6 and Figure 7 The conveying module 2000 also includes a first buffer chamber 2200. The first end 2210 of the first buffer chamber 2200 is connected to the entrance 2111 of the conveying tunnel 2100, and the second end 2220 of the first buffer chamber 2200 is used to deliver a sample. The conveying module 2000 includes a second conveying arm, which includes a first sub-arm 2323 and a second sub-arm 2324. The second sub-arm 2324 is sleeved on the outer periphery of the first sub-arm 2323. The first sub-arm 2323 is telescopically movable relative to the second sub-arm 2324 along its own axial direction. When the second conveying arm delivers the sample into the first buffer chamber 2200, the outer periphery of the second sub-arm 2324 abuts against the opening of the second end 2220 of the first buffer chamber 2200 and is sealed to the opening of the second end 2220. The first sub-arm 2323 extends relative to the second sub-arm 2324 and can pass through the opening of the first end 2210 of the first buffer chamber 2200 to enter the conveying tunnel 2100. The sample is gradually delivered from outside the first buffer chamber 2200 into the first buffer chamber 2200 using the first sub-arm 2323 and the second sub-arm 2324. After sealing the first buffer chamber 2200, the sample is then delivered into the transport tunnel 2100. On the one hand, the sample is evacuated at least twice during its gradual entry into the transport tunnel 2100, gradually reaching the required vacuum level. On the other hand, the sealing connection between the outer periphery of the second sub-arm 2324 and the second end 2220 of the first buffer chamber 2200 simplifies the sealing structure and steps of the first buffer chamber 2200, achieving sealing of the first buffer chamber 2200 simultaneously with sample delivery, thus improving the sealing efficiency of the first buffer chamber 2200 and consequently increasing the efficiency of sample delivery.

[0091] In some embodiments, the vacuum microscope apparatus further includes a storage module 4000 for storing samples. The storage module 4000 is disposed at the second end 2220 of the first buffer chamber 2200 and communicates with the second end 2220 of the first buffer chamber 2200. The storage module 4000 can store the prepared samples, thereby providing suitable preservation conditions for the samples and ensuring that the samples maintain their good morphology under suitable conditions (e.g., low temperature) while waiting to be sent into the transport tunnel 2100. By communicating the first buffer chamber 2200 with the storage module 4000, the path of the sample from storage to observation in the electron microscope tube 1000 can be shortened, improving sample transport efficiency. Exemplarily, the storage module 4000 can be a sealed, low-temperature chamber, in which suitable temperature, pressure, and other conditions can be provided to maintain the good performance of the sample.

[0092] Secondly, please refer to Figure 8 This application also provides a sample delivery method in a vacuum microscope apparatus, including...

[0093] S100. The second transmission mechanism delivers the sample to the first transmission mechanism from the entrance 2111 of the transport tunnel 2100;

[0094] S200. The first transmission mechanism moves the sample in the transport tunnel 2100 to the observation gap 111 for observation;

[0095] S300. The first transfer mechanism delivers the sample from the outlet 2112 of the transport tunnel 2100 to the third transfer mechanism.

[0096] Three transport mechanisms are used to deliver samples. Each transport mechanism can transport samples to areas outside the entrance 2111 of the transport tunnel 2100, inside the transport tunnel 2100, and outside the exit 2112 of the transport tunnel 2100. When any two of the three transport mechanisms are delivering samples to each other, the remaining transport mechanism can simultaneously operate on another sample (the previous sample or the next sample). This allows multiple transport mechanisms to work simultaneously, improving the efficiency of sample delivery into and out of the transport tunnel 2100, shortening the time samples are occupied by each transport mechanism, and thus improving the efficiency of sample observation.

[0097] In some embodiments, while performing step S100 or S200, in step S400, the third transfer mechanism unloads the previous sample. This parallel delivery method saves sample waiting time and improves sample transport efficiency.

[0098] In some embodiments, step S400, where the third transfer mechanism unloads the previous sample, includes S410, where the third transfer mechanism transports the sample out of the second buffer chamber 2400. After leaving the buffer chamber, the sample can be further transported to other modules for processing, such as sample recovery. After releasing the sample, the third transfer mechanism can return to an empty state, thus preparing to receive the next sample.

[0099] Similarly, in some embodiments, while performing step S200 or S300, in step S500, the second transfer mechanism loads the previous sample. Using this parallel operation delivery method during sample loading can save sample waiting time and improve sample delivery efficiency.

[0100] In some embodiments, step S500, where the second transfer mechanism loads the previous sample, includes step S510, where the second transfer mechanism transports the sample into the first buffer chamber 2200. When performing step S200 or S300, the second transfer mechanism can simultaneously send the sample into the first buffer chamber 2200, for example, by retrieving a sample from the storage module 4000 or taking a sample from the sample preparation module. This way, after the previous sample has been observed and recovered, the second transfer mechanism can immediately deliver this new sample to the first transfer mechanism, shortening sample waiting time, reducing wasted time, and thereby improving sample transport efficiency.

[0101] Thirdly, please refer to Figure 9 This application also provides a sample delivery method in a vacuum microscope apparatus, comprising:

[0102] S1100. Send the sample into the conveying module 2000;

[0103] S1200. Vacuum the conveyor module 2000 and the electron microscope tube 1000;

[0104] S1300. The transport module 2000 transports the sample to the observation window 2110;

[0105] S1400. Electron microscope tube 1000 observes the sample through observation window 2110;

[0106] S1500. The sample is sent out from the delivery module 2000.

[0107] By isolating the space within the transport tunnel 2100 from the cylinder 100, the space within the transport tunnel 2100 and the space within the cylinder 100 are formed as two independent spaces. Two different vacuum systems are used to provide vacuum environments for these two spaces respectively. This shortens the vacuuming time for both spaces, that is, it shortens the execution time of step S1200, thereby improving the vacuuming efficiency of these two spaces. By shortening the vacuuming time, the observation cycle for each sample can be shortened, improving the utilization efficiency of the vacuum microscope.

[0108] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application. Furthermore, unless otherwise specified, the embodiments and features described in the embodiments of this application can be combined with each other.

Claims

1. A vacuum microscope device, characterized in that: include An electron microscope tube (1000) includes a tube body (100), in which a pair of objective pole pieces are provided, and an observation gap (111) is formed between the objective pole pieces (110) to allow the sample to pass through. The transport module (2000) includes a transport tunnel (2100) and a first buffer chamber (2200). The first buffer chamber (2200) is selectively connected to the transport tunnel (2100). The transport tunnel (2100) is used for sample passage. The transport tunnel passes through the observation gap (111). The space inside the transport tunnel (2100) is isolated from the cylinder (100). The side wall of the transport tunnel (2100) is provided with a through observation window (2110). The observation window (2110) is located on the line connecting the two objective lens pole pieces (110). The first buffer chamber (2200) is connected to the entrance (2111) of the transport tunnel (2100). When the first buffer chamber (2200) is evacuated, the first buffer chamber (2200) and the transport tunnel (2100) are isolated from each other. When the vacuum degree of the first buffer chamber (2200) reaches the vacuum degree of the transport tunnel (2100), the first buffer chamber (2200) and the transport tunnel (2100) are connected, and the sample can enter the transport tunnel (2100) from the first buffer chamber (2200). A first vacuum system and a second vacuum system, wherein the first vacuum system is used to provide a vacuum environment for the cylinder (100) and the second vacuum system is used to provide a vacuum environment for the conveying tunnel (2100), such that the space inside the conveying tunnel (2100) and the space inside the cylinder (100) are formed as two independent spaces; The two ends of the transport tunnel (2100) are respectively formed as an inlet (2111) and an outlet (2112). The transport module (2000) is provided with at least two transport mechanisms. One of the transport mechanisms is movably disposed in the transport tunnel (2100) for moving the sample to the observation window (2110). The other transport mechanism is used to send the sample into the inlet (2111) of the transport tunnel (2100) or out from the outlet (2112) of the transport tunnel (2100). The sample can be transferred between the two transport mechanisms.

2. The vacuum microscope apparatus according to claim 1, characterized in that: A first valve is provided at the connection between the first buffer chamber (2200) and the conveying tunnel (2100). The first valve can connect or disconnect the first buffer chamber (2200) and the conveying tunnel (2100).

3. The vacuum microscope apparatus according to claim 1, characterized in that: The first buffer chamber (2200) is located outside the cylinder (100).

4. The vacuum microscope apparatus according to claim 1, characterized in that: The first buffer chamber (2200) is located inside the cylinder (100).

5. The vacuum microscope apparatus according to claim 1, characterized in that: The conveying module further includes a second buffer chamber (2400), which is connected to the outlet (2112) of the conveying tunnel (2100). The conveying module includes three conveying mechanisms, namely a first conveying mechanism (2310), a second conveying mechanism (2320), and a third conveying mechanism (2330). The first conveying mechanism (2310) is movably disposed in the conveying tunnel (2100), the second conveying mechanism (2320) is disposed in the first buffer chamber (2200), and the second conveying mechanism (2320) is used to transfer samples to the first conveying mechanism (2310). The third conveying mechanism (2330) is disposed in the second buffer chamber (2400), and the third conveying mechanism (2330) is used to receive samples from the first conveying mechanism (2310).

6. The vacuum microscope apparatus according to claim 5, characterized in that: When at least one of the second conveying mechanism (2320) or the first conveying mechanism (2310) is working, the third conveying mechanism (2330) performs sample loading; When at least one of the third conveying mechanism (2330) or the first conveying mechanism (2310) is working, the second conveying mechanism (2320) loads the sample.

7. The vacuum microscope apparatus according to claim 5, characterized in that: The first buffer chamber (2200) and the transport tunnel (2100) are selectively connected. When the first buffer chamber (2200) is evacuated, the first buffer chamber (2200) and the transport tunnel (2100) are isolated from each other. When the vacuum degree of the first buffer chamber (2200) reaches the vacuum degree of the transport tunnel (2100), the first buffer chamber (2200) and the transport tunnel (2100) are connected. The second conveying mechanism (2320) transfers the sample to the first conveying mechanism (2310) from the entrance (2111) of the transport tunnel (2100). The second buffer chamber (2400) is selectively connected to the transport tunnel (2100). When the second buffer chamber (2400) is evacuated, the second buffer chamber (2400) and the transport tunnel (2100) are isolated from each other. When the vacuum degree of the second buffer chamber (2400) reaches the vacuum degree of the transport tunnel (2100), the second buffer chamber (2400) and the transport tunnel (2100) are connected. The third conveying mechanism (2330) receives the sample from the first conveying mechanism (2310) at the outlet (2112) of the transport tunnel (2100).

8. The vacuum microscope apparatus according to any one of claims 5 to 7, characterized in that: The first conveying mechanism (2310) disposed in the conveying tunnel (2100) includes a track (2312) and a first conveying arm (2311). The track (2312) is disposed along the extension direction of the conveying tunnel (2100). The first conveying arm (2311) is slidably connected to the track (2312) and is used to connect to at least one side of the sample.

9. The vacuum microscope apparatus according to claim 8, characterized in that: The vacuum microscope further includes a sample carrier assembly (3000), which includes a carrier mesh (3100) and a first heat sink (3200). The carrier mesh (3100) is encapsulated in the first heat sink (3200), and the bearing surface (3111) of the carrier mesh (3100) is exposed from the first heat sink (3200). The bearing surface (3111) is used to carry the sample. The first conveying arm (2311) is connected to the first heat sink (3200). When the first conveying arm (2311) moves the first heat sink (3200) to the observation window (2110), the bearing surface (3111) is located in the observation window (2110).

10. The vacuum microscope apparatus according to claim 9, characterized in that: The first heat sink (3200) includes a mounting portion (3210) and a side end portion (3220) connected in sequence. The mounting portion (3210) is used to encapsulate the carrier net (3100). The mounting portion (3210) is provided with a cutout portion (3211). The bearing surface (3111) is exposed from the cutout portion (3211). The side end portion (3220) is engaged and / or magnetically connected to the first conveying arm (2311).

11. The vacuum microscope apparatus according to claim 10, characterized in that: Two tracks (2312) are provided, and two first conveying arms (2311) are provided. The two first conveying arms (2311) are respectively arranged in the two tracks (2312). The first heat sink (3200) includes two side ends (3220). The two side ends (3220) are symmetrically arranged about the mounting part (3210). The two first conveying arms (2311) are respectively engaged with the two side ends (3220). The two first conveying arms (2311) synchronously drive the sample carrying assembly (3000) to move.

12. The vacuum microscope apparatus according to claim 10, characterized in that: The thickness of the side end (3220) is greater than the thickness of the mounting portion (3210). The outer contour of the transport tunnel (2100) is set according to the shape of the sample carrier assembly (3000). Along the thickness direction of the first heat sink (3200), the mounting portion (3210) is recessed relative to the side end (3220) to form a clearance space (3212). A portion of the objective lens pole piece (110) extends into the clearance space (3212).

13. The vacuum microscope apparatus according to claim 11, characterized in that: The thickness of the side end portion (3220) is greater than the thickness of the mounting portion (3210). The mounting portion (3210) is recessed relative to the side end portion (3220) to form a clearance space (3212). The second transmission mechanism (2320) and the third transmission mechanism (2330) both include a claw (2321). The claw (2321) includes at least one pair of spaced teeth (2322). The claw (2321) extends into the clearance space (3212). The mounting portion (3210) is located between the two teeth (2322).

14. The vacuum microscope apparatus according to claim 13, characterized in that: The claw (2321) is magnetically connected to the first heat sink (3200).

15. The vacuum microscope apparatus according to any one of claims 3 to 7, characterized in that: The conveying mechanism includes a clamping structure (2300) with a groove (2301) and a movable part (2302) in the groove (2301). The movable part (2302) extends to abut against and hold the surface of the sample carrier assembly (3000) when energized, and retracts and moves away from the surface of the sample carrier assembly (3000) when de-energized to release the sample carrier assembly (3000).

16. The vacuum microscope apparatus according to claim 15, characterized in that: The moving part includes a piezoelectric stacked actuator.

17. The vacuum microscope apparatus according to claim 8, characterized in that: The observation window (2110) is disposed on the first side wall of the transport tunnel (2100), and the track (2312) is disposed on the second side wall of the transport tunnel (2100). The second side wall and the first side wall are disposed adjacent to each other.

18. The vacuum microscope apparatus according to any one of claims 5 to 7, characterized in that: The first conveying mechanism (2310) disposed in the conveying tunnel (2100) includes a conveyor belt disposed along the extension direction of the conveying tunnel (2100) and the conveyor belt is used to connect to the side wall of the sample carrying assembly (3000) to drive the sample to move along the conveying tunnel (2100).

19. The vacuum microscope apparatus according to claim 1, characterized in that: The conveying module (2000) further includes a first buffer chamber (2200), the first end (2210) of the first buffer chamber (2200) is connected to the entrance (2111) of the conveying tunnel (2100), and the second end (2220) of the first buffer chamber (2200) is used to deliver a sample; The conveying module (2000) includes a second conveying arm, which includes a first sub-arm (2323) and a second sub-arm (2324). The second sub-arm (2324) is sleeved on the outer periphery of the first sub-arm (2323). The first sub-arm (2323) is retractable relative to the second sub-arm (2324) along its own axial direction. When the second conveying arm delivers the sample into the first buffer chamber (2200), the outer periphery of the second sub-arm (2324) abuts against the opening of the second end (2220) of the first buffer chamber (2200) and is sealed to the opening of the second end (2220). The first sub-arm (2323) extends relative to the second sub-arm (2324) and can pass through the opening of the first end (2210) of the first buffer chamber (2200) to enter the conveying tunnel (2100).

20. The vacuum microscope apparatus according to claim 19, characterized in that: The vacuum microscope device further includes a storage module (4000) for storing samples. The storage module (4000) is disposed at the second end (2220) of the first buffer chamber (2200) and is connected to the second end (2220) of the first buffer chamber (2200).

21. A sample delivery method in a vacuum microscope apparatus, employing the vacuum microscope apparatus as described in any one of claims 1-20, characterized in that: include S90. The first buffer chamber (2200) and the transport tunnel (2100) are isolated from each other. The first buffer chamber (2200) is evacuated. When the vacuum degree of the first buffer chamber (2200) reaches the vacuum degree of the transport tunnel (2100), the first buffer chamber (2200) and the transport tunnel (2100) are connected, and the sample can enter the transport tunnel (2100) from the first buffer chamber (2200). S100. The second conveying mechanism delivers the sample to the first conveying mechanism from the entrance (2111) of the conveying tunnel (2100); S200. The first conveying mechanism moves the sample in the conveying tunnel (2100) to the observation gap (111) for observation; S300. The first conveying mechanism delivers the sample from the outlet (2112) of the conveying tunnel (2100) to the third conveying mechanism.

22. The sample delivery method in a vacuum microscope according to claim 21, characterized in that: While performing step S100 or S200, the third conveying mechanism unloads the previous sample; and / or While performing step S200 or S300, the second conveying mechanism loads the previous sample.

23. The sample delivery method in a vacuum microscope according to claim 22, characterized in that: The third conveying mechanism performs the unloading of the previous sample by transporting the sample out of the second buffer chamber (2400). The second conveying mechanism loads the previous sample by transporting the sample into the first buffer chamber (2200).

24. A sample delivery method in a vacuum microscope apparatus, employing the vacuum microscope apparatus according to any one of claims 1-20, characterized in that: include The sample is fed into the delivery module (2000); Vacuum the delivery module (2000) and the electron microscope tube (1000); The transport module (2000) transports the sample to the observation window (2110); The electron microscope tube (1000) is used to observe the sample through the observation window (2110); The sample is sent out from the delivery module (2000).

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