An oil-filled pressure sensor core with high reliability against low-temperature short circuit

Abstract

The application provides an oil-filled pressure sensor core body with high reliability and low-temperature short-circuit resistance, comprising: a sintering seat, a welding ring and a diaphragm; the diaphragm and the sintering seat jointly form a closed cavity; a filling ceramic and a profiling support are arranged in the closed cavity; a guide column is inserted into the closed cavity from a second end surface of the sintering seat; a bonding lead wire is connected to the guide column at one end, and passes through the filling ceramic and the profiling support in sequence and is arranged in the profiling support at the other end; and an end surface of the profiling support close to the diaphragm is a limiting curved surface, and the shape of the limiting curved surface is adapted to the deformation curved surface of the diaphragm under a preset temperature condition. By arranging the limiting curved surface on the upper surface of the profiling support, when the diaphragm retracts to the critical failure position at low temperature, the diaphragm will completely fit the limiting curved surface, the profiling support rigidly prevents the diaphragm from continuing to shrink, and the lead wire contact risk is eliminated, so that the problems of signal drift, intermittent no output or complete failure of the oil-filled pressure sensor under a low-temperature environment are solved.

Description

Technical Field

[0001] This application relates to the field of oil-filled pressure sensor technology, specifically to a highly reliable oil-filled pressure sensor core resistant to low-temperature short circuits. Background Technology

[0002] In aerospace, meteorological detection, metrology, and industrial measurement and control, pressure sensors, as core measurement components, must adapt to complex operating conditions across a wide temperature range of -55℃ to 200℃, especially maintaining high reliability and stability in low-temperature environments. Oil-filled pressure sensor cores, due to their excellent pressure transmission and environmental adaptability, have become the mainstream choice for such scenarios. However, in the low-temperature range of -55℃ to 0℃, their diaphragms tend to shrink inwards, potentially directly compressing or contacting the internal bonding wires, causing wire deformation, short circuits, or even breakage. This can lead to sensor signal drift, intermittent no output, or complete failure.

[0003] Solutions to the low-temperature short-circuit problem in oil-filled pressure sensor cores mainly revolve around increasing the distance between the diaphragm and the leads, specifically falling into two technical approaches. One approach reduces the redundant distance between the two by lowering the height of the bonding leads; some solutions also use reduced bonding glass thickness to further reduce the bonding height. The second approach increases the height of the sintering chamber to raise the diaphragm welding position, indirectly expanding the spatial distance between the diaphragm and the leads, thereby mitigating the risk of the diaphragm shrinking and contacting the leads at low temperatures.

[0004] However, reducing the bonding wire height can easily lead to excessive bending angles at the wire bends, increasing the risk of breakage and failure. Furthermore, the bonding height cannot be reduced indefinitely. At the same time, reducing the thickness of the bonding glass will weaken the stress isolation effect, introducing additional stress into the chip and causing a decrease in sensor accuracy. Increasing the height of the sintering chamber will increase the amount of silicone oil filling, causing an increase in temperature drift. Moreover, the additional volume of silicone oil will exacerbate diaphragm shrinkage in the low-temperature region, weakening the effect of increasing the spacing. Summary of the Invention

[0005] This application provides a highly reliable oil-filled pressure sensor core that is resistant to low-temperature short circuits, in order to solve the problems of signal drift, intermittent no output, or complete failure of oil-filled pressure sensors in low-temperature environments.

[0006] This application provides a highly reliable oil-filled pressure sensor core resistant to low-temperature short circuits, comprising:

[0007] Sintering stand;

[0008] A welding ring fixed to the first end face of the sintering seat;

[0009] A diaphragm is positioned between the first end face of the sintering seat and the welding ring; the diaphragm and the sintering seat together form a sealed chamber.

[0010] The filling ceramic and the contoured support are installed in a sealed chamber; the filling ceramic has a ring-shaped structure and the contoured support has a cylindrical structure, and the contoured support is housed in the inner ring of the filling ceramic.

[0011] The guide column is inserted into the sealed chamber from the second end face of the sintering seat.

[0012] The bonding wire has one end connected to the guide post, and the other end passes through the filler ceramic and the contoured bracket in sequence, and is placed inside the contoured bracket.

[0013] The end face of the conformal support near the diaphragm is a limiting curved surface, the shape of which is adapted to the deformation curved surface of the diaphragm as it retracts inward under preset temperature conditions.

[0014] Optionally, under the first preset temperature condition, the distance from the side of the diaphragm close to the conformal support to the conformal support is the first spacing; the first spacing is greater than the maximum deformation of the diaphragm, and the first spacing is less than the critical distance from the indentation of the diaphragm to the contact bonding wire.

[0015] Optionally, the limiting surface of the contoured support is configured to match the concave deformation surface of the diaphragm caused by the shrinkage of silicone oil under a pre-set second temperature condition.

[0016] Optionally, the side wall of the conformal bracket is provided with a wire outlet hole for the bonding wire to pass through, and the conformal bracket is provided with several oil passage holes.

[0017] Optionally, the second end face of the sintering seat is provided with a number of insertion holes, which extend from the second end face to the first end face into the sealed cavity, and the guide post is inserted into the insertion hole.

[0018] Optionally, the diameter of the guide post is a first diameter, and the diameter of the socket is a second diameter, wherein the first diameter and the second diameter are the same.

[0019] Optionally, the filling ceramic is provided with several cable outlet grooves, and the cable outlet grooves, cable outlet holes and guide posts are arranged on the same straight line.

[0020] Optionally, the edge of the diaphragm is clamped between the first end face of the sintering seat and the welding ring, and a sealed connection is formed by circumferential welding along the welding ring, so that the diaphragm and the sintering seat together form a closed chamber.

[0021] Optionally, the height of the filling ceramic is a first height, and the height of the contoured support is a second height, with the first height and the second height being the same.

[0022] Optionally, the conformal support is made of polyimide.

[0023] As can be seen from the above technical solution, this application provides a highly reliable oil-filled pressure sensor core with resistance to low-temperature short circuits, comprising: a sintering base; a welding ring fixed to the first end face of the sintering base; a diaphragm disposed between the first end face of the sintering base and the welding ring; the diaphragm and the sintering base together forming a sealed chamber; a filling ceramic and a contoured support disposed within the sealed chamber; the filling ceramic has a ring-shaped structure, and the contoured support has a cylindrical structure, the contoured support being housed within the inner ring of the filling ceramic; a guide post, the guide post being inserted into the sealed chamber from the second end face of the sintering base; a bonding wire, one end of the bonding wire being connected to the guide post, and the other end of the bonding wire passing through the filling ceramic and the contoured support in sequence, and disposed within the contoured support; the end face of the contoured support near the diaphragm is a limiting curved surface, the shape of which is adapted to the deformation curved surface of the diaphragm retracting inward under a preset temperature condition. This application solves the problem of signal drift, intermittent no output, or complete failure of oil-filled pressure sensors in low-temperature environments by setting a limiting curved surface on the upper surface of the conformal bracket. When the diaphragm retracts to the critical failure position at low temperature, it will completely fit the limiting curved surface. The conformal bracket rigidly prevents the diaphragm from continuing to shrink, eliminating the risk of lead wire contact. Attached Figure Description

[0024] To more clearly illustrate the technical solution of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a cross-sectional view of the core of a high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor provided in an embodiment of this application.

[0026] Figure 2 A schematic diagram of the core structure of a high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor provided in an embodiment of this application;

[0027] Figure 3 This is a schematic diagram of the contour-following support structure provided in the embodiments of this application;

[0028] Figure 4 A schematic diagram of the simulation analysis results of the diaphragm thermal-fluid-solid multiphysics coupling provided in the embodiments of this application.

[0029] Figure label:

[0030] Among them, 1-sintering seat; 11-first end face; 12-second end face; 13-insertion hole; 2-welding ring; 3-diaphragm; 4-sealed chamber; 5-filled ceramic; 51-outlet groove; 6-contour bracket; 61-outlet hole; 62-oil passage hole; 7-guide post; 8-bonding lead wire. Detailed Implementation

[0031] The embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described below do not represent all embodiments consistent with this application. They are merely examples of systems and methods consistent with some aspects of this application.

[0032] It should be noted that the brief descriptions of terms in this application are only for the convenience of understanding the embodiments described below, and are not intended to limit the embodiments of this application. Unless otherwise stated, these terms should be understood in their ordinary and common meaning.

[0033] The terms "first," "second," "third," etc., are used to distinguish similar or related objects or entities, and do not necessarily imply a specific order or sequence, unless otherwise specified. It should be understood that such terms can be used interchangeably where appropriate.

[0034] The terms “comprising” and “having”, and any variations thereof, are intended to cover but not exclude inclusion, for example, a product or device that includes a range of components is not necessarily limited to all of the components that are clearly listed, but may include other components that are not clearly listed or that are inherent to such product or device.

[0035] For pressure measurement and control applications in aerospace, meteorological detection, metrology, and industrial measurement and control, and the specific needs of typical instruments and equipment, pressure sensors used in these fields must be adaptable to complex operating environments, especially maintaining high reliability and stability over a wide temperature range. Currently, the required wide temperature range is -55℃ to 200℃. At the low-temperature range of -55℃ to 0℃, for oil-filled pressure sensor cores, it is crucial to address the industry-wide pain point of short-circuit failure caused by the retraction of the diaphragm 3 contact lead, thereby significantly improving pressure sensor quality and product yield.

[0036] To address the issues of signal drift, intermittent no output, or complete failure of oil-filled pressure sensors in low-temperature environments, please refer to [reference needed]. Figure 1 and Figure 2 This application provides a highly reliable oil-filled pressure sensor core resistant to low-temperature short circuits, comprising:

[0037] Sintering seat 1.

[0038] Among them, the sintering seat 1 serves as the basic load-bearing and structural support component of the core, providing an installation reference and fixing carrier for the welding ring 2, diaphragm 3, and guide post 7; the sintering seat 1, as the internally preset spatial structure, directly determines the forming shape of the sealed chamber 4, and at the same time undertakes the connection function between the core and external equipment, and is the core framework that ensures the overall structural stability of the core.

[0039] The welding ring 2 is fixed to the first end face 11 of the sintering seat 1.

[0040] The welding ring 2 is fixed to the first end face 11 of the sintering seat 1, and together with the sintering seat 1, it clamps the edge of the diaphragm 3 to form a stable clamping structure. As the welding carrier for the circumferential welding process, the edge of the diaphragm 3 is tightly connected to the sintering seat 1 and the welding ring 2 through circumferential welding, thereby achieving the sealing and forming of the sealed chamber 4. The clamping design can limit the displacement of the edge of the diaphragm 3, preventing the diaphragm 3 from shifting when pressure or temperature changes. The continuous weld formed by circumferential welding can completely block the communication between the chamber and the external environment, effectively preventing silicone oil leakage, while blocking external impurities from entering the chamber, ensuring the accuracy of pressure transmission and the stability of sensor performance.

[0041] A diaphragm 3 is disposed between the first end face 11 of the sintering seat 1 and the welding ring 2; the diaphragm 3 and the sintering seat 1 together form a sealed chamber 4.

[0042] Among them, the diaphragm 3, as a pressure-sensitive element, directly senses the external pressure and converts the pressure signal into its own deformation; together with the sintering seat 1, it forms a closed chamber 4, providing a closed space for silicone oil filling, and at the same time, it transmits the pressure change of the silicone oil in the chamber to the internal structure through its own deformation.

[0043] The filling ceramic 5 and the contoured support 6 are disposed in the sealed chamber 4; the filling ceramic 5 has a circular structure and the contoured support 6 has a cylindrical structure, and the contoured support 6 is housed in the inner ring of the filling ceramic 5.

[0044] Guide column 7 is inserted into the sealed chamber 4 from the second end face 12 of sintering seat 1.

[0045] The bonding wire 8 has one end connected to the guide post 7, and the other end of the bonding wire 8 passes through the filler ceramic 5 and the contour bracket 6 in sequence, and is set inside the contour bracket 6.

[0046] The end face of the conformal support 6 near the diaphragm 3 is a limiting curved surface, the shape of which is adapted to the deformation curved surface of the diaphragm 3 that retracts inward under preset temperature conditions.

[0047] The filler ceramic 5 has a ring-shaped structure and is placed inside the sealed chamber 4. By occupying part of the chamber space, it reduces the amount of silicone oil filling. The inner ring of the filler ceramic 5 provides installation space for the conformal support 6 and forms a radial limit on the conformal support 6, ensuring the stability of the conformal support 6 in the chamber. At the same time, it helps to disperse the pressure and temperature stress in the chamber and avoid local stress concentration. In addition, the filler ceramic 5 can reduce the amount of silicone oil filling, reduce the shrinkage driving force of silicone oil on the diaphragm 3 at low temperature, alleviate the tendency of the diaphragm 3 to shrink back, and indirectly reduce the risk of lead wire contact; the ring structure also has a limiting effect on the conformal support 6.

[0048] The contoured support 6 is a cylindrical structure housed within the inner ring of the filling ceramic 5. The contoured design of the limiting curved surface allows for seamless contact with the diaphragm 3 at low temperatures, maximizing the contact area to avoid damage to the diaphragm 3. At the same time, it blocks the path of the contact leads of the diaphragm 3, completely solving the problem of short circuit at low temperatures.

[0049] The guide post 7 is inserted into the sealed chamber 4 from the second end face 12 of the sintering seat 1. One end is connected to the external circuit and the other end is connected to the bonding lead 8, serving as a signal transmission relay component for the bonding lead 8.

[0050] One end of the bonding wire 8 is connected to the guide post 7, and the other end passes through the filling ceramic 5 and the contour bracket 6 in sequence and is placed inside the contour bracket 6. The bonding wire 8 serves as the transmission channel for the electrical signal inside the pressure sensor core, and is used to transmit the electrical signal of the pressure sensor core to external devices through the guide post 7.

[0051] In some embodiments, under a first preset temperature condition, the distance from the side of the diaphragm 3 close to the conformal support 6 to the conformal support 6 is a first gap; the first gap is greater than the maximum deformation of the diaphragm 3, and the first gap is less than the critical distance from the inward concavity of the diaphragm 3 to the contact bonding lead 8.

[0052] Specifically, the first preset temperature condition is room temperature or the normal operating temperature range of the sensor, such as 0℃~200℃. The distance between the side of the diaphragm 3 close to the conformal support 6 and the conformal support 6 is set as the first gap. The first gap must meet the condition of being greater than the maximum deformation of the diaphragm 3 and less than the critical distance from the inward concavity of the diaphragm 3 to the contact bonding lead 8.

[0053] The first spacing is greater than the maximum deformation of the diaphragm 3, which ensures that when the sensor is working under normal pressure load and the first preset temperature, the deformation of the diaphragm 3 caused by pressure will not touch the contour bracket 6, thus avoiding interference of the contour bracket 6 with normal pressure transmission and ensuring the basic measurement performance of the sensor.

[0054] The first spacing is less than the critical distance from the inward indentation of the diaphragm 3 to the contact lead. This allows the sensor to enter the low-temperature zone. When the diaphragm 3 retracts inward due to cold shrinkage, it first touches the contour bracket 6 and is precisely intercepted, rather than contacting the bonding lead 8. The distance design directly blocks the possibility of the diaphragm 3 contacting the lead, completely avoiding the risk of low-temperature short-circuit failure, and taking into account both normal operating performance and low-temperature protection effect.

[0055] In some embodiments, the limiting surface of the contoured support 6 is configured to conform to the concave deformation surface of the diaphragm 3 caused by the shrinkage of silicone oil under a second preset temperature condition.

[0056] The contoured support 6, near the diaphragm 3, is designed to conform to the concave deformation surface of the diaphragm 3 caused by the shrinkage of the silicone oil within the chamber under a second preset temperature condition. The second preset temperature condition is a low-temperature failure risk condition, such as -55℃.

[0057] When the low-temperature environment causes the silicone oil to shrink and drive the diaphragm 3 to retract inward, the concave deformation surface of the diaphragm 3 can achieve seamless contact with the limiting surface of the conformal support 6. Compared with a flat or non-fitting surface, the matching limiting surface can maximize the contact area between the diaphragm 3 and the conformal support 6, avoid local stress concentration that could damage the diaphragm 3, and precisely intercept the diaphragm 3 at the critical position where it is about to contact the bonding lead 8, blocking the path of the diaphragm 3 to continue retracting; and in the fitted state, the conformal support 6 can stably support the diaphragm 3, and even if the temperature drops further or the pressure fluctuates, there will be no displacement of the diaphragm 3 or failure of the support limiting, thus ensuring the reliable realization of the low-temperature short-circuit protection function from the perspective of structural adaptability.

[0058] For details, see Figure 4 , Figure 4 The diagram shows the results of the thermo-fluid-solid multiphysics coupling simulation analysis of diaphragm 3. The surface function of the limiting surface is the waveform function of diaphragm 3 when it should be cut off and retracted in the low temperature region, which is calculated based on the thermo-fluid-solid coupling simulation model of diaphragm 3. This function can ensure the complete fit between diaphragm 3 and the conformal support 6.

[0059] In some embodiments, see Figure 3 The side wall of the contour bracket 6 is provided with a wire outlet hole 61 for the bonding lead 8 to pass through, and the contour bracket 6 is provided with several oil passage holes 62.

[0060] The wire outlet 61 provides a routing channel for the bonding wire 8, guiding it through the contoured support 6 and connecting it to the guide post 7. This prevents the bonding wire 8 from being randomly arranged in the cavity and interfering with other structures. It also provides a certain limit to the wire, reducing its displacement due to vibration or temperature changes. The oil passage 62 allows for the smooth flow of silicone oil in the sealed cavity 4. This does not affect the silicone oil's ability to transmit pressure signals, ensuring the sensor's dynamic pressure response performance is unimpeded. It also balances the volume fluctuation of silicone oil in the cavity when the temperature changes, preventing sudden increases or decreases in local pressure from causing abnormal deformation of the diaphragm 3, and further improving the core's working stability under wide temperature range conditions.

[0061] In some embodiments, the second end face 12 of the sintering seat 1 is provided with a plurality of insertion holes 13, which extend from the second end face 12 to the first end face 11 into the sealed chamber 4, and the guide post 7 is inserted into the insertion hole 13.

[0062] Specifically, the sintering base 1 has several insertion holes 13 at the end opposite to the diaphragm 3. The insertion holes 13 extend from the second end face 12 to the first end face 11, and finally penetrate into the sealed chamber 4 formed by the diaphragm 3 and the sintering base 1. The guide post 7 is inserted into the insertion hole 13 to connect with the sealed chamber 4. By inserting the guide post 7 into the insertion hole 13, a stable installation channel and positioning structure are provided for the guide post 7, ensuring that the guide post 7 can be accurately inserted into the chamber and docked with the bonding wire 8, avoiding abnormal wire layout due to the position deviation of the guide post 7. On the other hand, the extension of the insertion hole 13 from the outside of the sintering base 1 directly to the chamber simplifies the assembly process of the guide post 7. The insertion of the guide post 7 can be completed without disassembling other parts of the core. At the same time, the cooperation between the insertion hole 13 and the guide post 7 can also help to enhance the sealing of the sealed chamber 4, reduce the exchange of substances inside and outside the chamber, and provide a guarantee for the stable filling of silicone oil and the reliable operation of the sensor.

[0063] In some embodiments, the diameter of the guide post 7 is a first diameter, and the diameter of the socket 13 is a second diameter, wherein the first diameter and the second diameter are the same.

[0064] Specifically, the first diameter of the guide post 7 and the second diameter of the insertion hole 13 on the sintering seat 1 are designed to be the same size, that is, the guide post 7 and the insertion hole 13 form a gapless fit. From the perspective of assembly stability, the consistent diameter design allows the guide post 7 to be tightly embedded in the insertion hole 13, avoiding radial displacement or shaking of the guide post 7 due to vibration, pressure changes or temperature fluctuations during core operation, and ensuring the positional stability of the guide post 7 as the connection reference for the bonding wire 8. From the perspective of sealing performance, the gapless fit can reduce the gap between the guide post 7 and the insertion hole 13, reducing the risk of silicone oil leakage in the sealed chamber 4 through the gap between the guide post 7 and the sintering seat 1, while preventing external impurities from entering the chamber and interfering with the sensor operation, ensuring the accuracy of pressure transmission and signal output. From the perspective of structural strength, the tight fit connection can enhance the bonding strength between the guide post 7 and the sintering seat 1, enabling the guide post 7 to better withstand the tension of the bonding wire 8 and the impact of external working conditions, further improving the overall structural reliability and resistance to harsh environments of the core.

[0065] In some embodiments, the filling ceramic 5 is provided with a plurality of wire outlet grooves 51, and the wire outlet grooves 51, the wire outlet holes 61 and the guide posts 7 are arranged on the same straight line.

[0066] Specifically, the collinear design of the wire outlet groove 51, the wire outlet hole 61, and the guide post 7 provides a straight routing channel for the bonding wire 8, avoiding additional stress or irregular deformation caused by path bends in the bonding wire 8, and reducing the potential risk of wire breakage and short circuit.

[0067] In addition, the straight-line routing can reduce lead length redundancy, reduce signal loss and interference during signal transmission, and ensure the stability and accuracy of sensor electrical signal transmission; the collinear positional relationship of the wire outlet groove 51, wire outlet hole 61 and guide post 7 can provide a clear positioning benchmark for the processing of wire outlet groove 51 and wire outlet hole 61 and the installation of guide post 7, reduce alignment deviation during assembly, and improve the overall assembly accuracy and production efficiency of the core.

[0068] In some embodiments, the edge of the diaphragm 3 is clamped between the first end face 11 of the sintering seat 1 and the welding ring 2, and a sealed connection is formed by circumferential welding along the welding ring 2, so that the diaphragm 3 and the sintering seat 1 together form a sealed chamber 4.

[0069] The clamping design provides stable positioning of the diaphragm 3 at its edge, preventing it from shifting under pressure load or temperature changes. The circumferential welding creates a continuous and uniform weld, completely blocking the connection between the sealed chamber 4 and the external environment, effectively preventing silicone oil leakage and ensuring the accuracy of pressure transmission.

[0070] In addition, in terms of performance stability, the sealed connection method can maintain a stable pressure environment inside the chamber, preventing external impurities from entering the sealed chamber 4 and interfering with the sensor's operation. At the same time, the high-strength connection characteristics of the ring weld can be adapted to a wide temperature range of -55℃ to 200℃, preventing drastic temperature changes from causing seal failure, and further improving the reliability and service life of the core in complex environments.

[0071] In some embodiments, the height of the filling ceramic 5 is a first height, and the height of the contoured bracket 6 is a second height, with the first height and the second height being the same.

[0072] The first height of the filler ceramic 5 and the second height of the contoured bracket 6 are designed to be the same size, meaning that the filler ceramic 5 and the contoured bracket 6 remain flush along the height direction within the sealed chamber 4. The filler ceramic 5 and the contoured bracket 6 form a highly consistent and cooperative support structure. On one hand, the flush height ensures that the contoured bracket 6 is stably housed within the inner ring of the filler ceramic 5, preventing tilting or displacement of the contoured bracket 6 due to height differences, and ensuring that the limiting curved surface of the contoured bracket 6 can accurately align with the diaphragm 3 and stably perform its interception function. On the other hand, the consistent height allows for a more uniform spatial distribution within the chamber, reducing local obstruction to the flow of silicone oil, further ensuring stable dynamic pressure response performance of the sensor, while avoiding additional stress concentration due to height differences, reducing the risk of component deformation, and improving the overall structural stability and reliability of the core.

[0073] In some embodiments, the conformal support 6 is made of polyimide.

[0074] Specifically, the conformal support 6 is made of polyimide. Polyimide has high mechanical strength, ensuring that the conformal support 6 will not deform excessively or break under large pressure loads. Polyimide has a low coefficient of thermal expansion, which is close to that of the metal materials commonly used in the sintering base 1 (such as stainless steel). This ensures good thermal matching between the conformal support 6 and the sintering base 1, preventing large volume changes due to temperature variations or thermal mismatch with the base that could introduce additional stress. Polyimide has excellent insulation properties, preventing short circuits caused by contact with the bonding leads 8. Polyimide has stable physicochemical properties and does not react with silicone oil. Polyimide can be firmly bonded to the sintering base 1 through adhesive bonding.

[0075] As can be seen from the above technical solutions, the embodiments of this application provide a highly reliable oil-filled pressure sensor core resistant to low-temperature short circuits, comprising: a sintering base 1; a welding ring 2 fixed to the first end face 11 of the sintering base 1; a diaphragm 3 disposed between the first end face 11 of the sintering base 1 and the welding ring 2; the diaphragm 3 and the sintering base 1 together forming a sealed chamber 4; a filling ceramic 5 and a contoured support 6 disposed within the sealed chamber 4; the filling ceramic 5 having a ring-shaped structure, and the contoured support 6 having a cylindrical structure. The conformal support 6 is housed within the inner ring of the filling ceramic 5; a guide post 7 is inserted into the sealed chamber 4 from the second end face 12 of the sintering seat 1; a bonding wire 8 is connected at one end to the guide post 7, and the other end passes through the filling ceramic 5 and the conformal support 6 in sequence, and is disposed within the conformal support 6; the end face of the conformal support 6 near the diaphragm 3 is a limiting curved surface, the shape of which is adapted to the deformation curved surface of the diaphragm 3 when it retracts inward under a preset temperature condition. This application solves the problem of signal drift, intermittent no output, or complete failure of oil-filled pressure sensors under low-temperature conditions by setting a limiting curved surface on the upper surface of the conformal support 6. When the diaphragm 3 retracts to the critical failure position at low temperatures, it will completely fit the limiting curved surface. The conformal support 6 rigidly prevents the diaphragm 3 from continuing to shrink, eliminating the risk of lead contact.

[0076] Similar parts between the embodiments provided in this application can be referred to mutually. The specific implementation methods provided above are only a few examples under the overall concept of this application and do not constitute a limitation on the scope of protection of this application. For those skilled in the art, any other implementation methods extended from the solution of this application without creative effort shall fall within the scope of protection of this application.

Claims

1. A highly reliable oil-filled pressure sensor core resistant to low-temperature short circuits, characterized in that, include: Sintering stand (1); A welding ring (2) fixed to the first end face (11) of the sintering seat (1); A diaphragm (3) is disposed between the first end face (11) of the sintering seat (1) and the welding ring (2); the diaphragm (3) and the sintering seat (1) together form a sealed chamber (4); The filling ceramic (5) and the contoured support (6) are disposed in the sealed chamber (4); the filling ceramic (5) is a ring-shaped structure, the contoured support (6) is a cylindrical structure, and the contoured support (6) is housed in the inner ring of the filling ceramic (5); Guide post (7), the guide post (7) is inserted into the sealed chamber (4) from the second end face (12) of the sintering seat (1); A bonding wire (8) is provided, one end of which is connected to the guide post (7), and the other end of which passes through the filler ceramic (5) and the contour bracket (6) in sequence and is disposed in the contour bracket (6). The end face of the conformal support (6) near the diaphragm (3) is a limiting curved surface, and the shape of the limiting curved surface is adapted to the deformation curved surface of the diaphragm (3) that retracts inward under a preset temperature condition. Wherein, under the first preset temperature condition, the distance from the side of the diaphragm (3) close to the conformal support (6) to the conformal support (6) is the first spacing; the first spacing is greater than the maximum deformation of the diaphragm (3), and the first spacing is less than the critical distance from when the diaphragm (3) is concave to contact the bonding lead (8); The limiting surface of the contoured support (6) is constructed to match the concave deformation surface of the diaphragm (3) caused by the shrinkage of silicone oil under the second preset temperature condition.

2. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 1, characterized in that, The side wall of the contour bracket (6) is provided with a wire outlet hole (61) for the bonding lead (8) to pass through, and the contour bracket (6) is provided with a number of oil passage holes (62).

3. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 1, characterized in that, The second end face (12) of the sintering seat (1) is provided with a plurality of insertion holes (13). The insertion holes (13) extend from the second end face (12) to the first end face (11) into the sealed chamber (4), and the guide post (7) is inserted into the insertion hole (13).

4. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 3, characterized in that, The diameter of the guide post (7) is a first diameter, and the diameter of the insertion hole (13) is a second diameter. The first diameter and the second diameter are the same.

5. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 2, characterized in that, The filling ceramic (5) is provided with a plurality of wire outlet grooves (51), and the wire outlet grooves (51), the wire outlet holes (61) and the guide post (7) are arranged on the same straight line.

6. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 1, characterized in that, The edge of the diaphragm (3) is clamped between the first end face (11) of the sintering seat (1) and the welding ring (2), and a sealed connection is formed by circumferential welding along the welding ring (2), so that the diaphragm (3) and the sintering seat (1) together form the sealed chamber (4).

7. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 1, characterized in that, The height of the filling ceramic (5) is the first height, and the height of the contour bracket (6) is the second height. The first height and the second height are the same.

8. The high-reliability, low-temperature short-circuit resistant oil-filled pressure sensor core according to claim 1, characterized in that, The material of the conformal support (6) is polyimide.

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