High-precision plane mirror pose precision adjusting device

Abstract

The application discloses a high-precision plane mirror pose precision adjusting device, which comprises a base, an azimuth adjusting mechanism, a pitch adjusting mechanism, a mirror chamber and a three-point gap eliminating mechanism. The azimuth adjusting mechanism and the pitch adjusting mechanism each comprise a driving assembly and a linear slide block. The linear slide block is connected with an executing component through the three-point gap eliminating mechanism. The three-point gap eliminating mechanism comprises an adapter, a fisheye bearing connecting screw, a jamming screw, a locking nut and an adjusting gasket, and is used for simultaneously eliminating radial and axial gaps at the connecting position. Through a high-performance transmission chain and the three-point gap eliminating mechanism, the standard plane mirror is used as an optical function carrier of the system, and the micro-arc level angular displacement adjusting precision is realized. Theoretical calculation verification shows that the azimuth and pitch adjusting resolutions are both better than 0.5 mu rad. The device has the excellent characteristics of gap-free transmission, motion decoupling, anti-micro-vibration and long-term stable work.

Description

Technical Field

[0001] This invention belongs to the field of precision optical instrument manufacturing technology, specifically relating to a precision posture adjustment device for a high-precision plane mirror, and particularly a multi-degree-of-freedom precision adjustment device with high resolution, high stability and the ability to eliminate transmission backlash. Background Technology

[0002] As modern optical systems continue to evolve towards higher precision and stability, the surface accuracy and pointing stability of plane mirrors have become key factors limiting system performance. In cutting-edge applications such as astronomical observation, space remote sensing, laser communication, and extreme ultraviolet lithography, the azimuth and pitch adjustment accuracy of mirrors directly determines the overall performance limit of the system.

[0003] Traditional adjustment devices generally employ structures such as worm gears or screw blocks, which have a series of technical drawbacks: First, the inherent backlash in traditional threaded transmission pairs is difficult to completely eliminate, leading to backlash during adjustment and making precise angle adjustments and repositioning at the micro-radius level extremely difficult. Second, azimuth and pitch adjustment mechanisms often have motion coupling in their structure; adjusting one degree of freedom can cause unexpected disturbances to the other, significantly increasing the complexity and time cost of system calibration and fine adjustment. Furthermore, the diverse interface forms of the device base lack a unified standard, requiring complex adapters when integrating with internationally recognized optical platforms, introducing additional assembly errors and reducing the system's modularity and integration efficiency. Finally, under the influence of environmental factors such as temperature changes and vibrations, traditional mechanisms suffer from insufficient long-term stability due to mismatched material thermal expansion coefficients and loosening of connections, making it difficult to meet the requirements of continuous high-precision operation.

[0004] Therefore, there is an urgent need to develop a precision adjustment device for a plane mirror that can minimize transmission backlash, achieve motion decoupling, have a standardized interface, and possess high long-term stability, in order to solve the aforementioned technical bottlenecks. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a high-precision planar reflector posture adjustment device. This device, through a three-point gap elimination mechanism and a precision transmission chain design, can achieve adjustment resolution at the sub-micro-arc level, while possessing excellent repeatability and long-term stability.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A high-precision planar reflector attitude adjustment device includes a base, an azimuth adjustment mechanism, a pitch adjustment mechanism, and a mirror chamber. The mirror chamber is mounted on a rotating component via a rotating shaft, and the rotating component is mounted on the base via crossed roller bearings. The azimuth adjustment mechanism is mounted on the base, and the pitch adjustment mechanism is mounted on the rotating component. Both the azimuth and pitch adjustment mechanisms include a drive assembly and a linear slider that can move linearly under the drive of the drive assembly. The linear slider of the azimuth adjustment mechanism is connected to the rotating component via a three-point gap elimination mechanism, and the linear slider of the pitch adjustment mechanism is connected to the mirror chamber via the three-point gap elimination mechanism. The three-point gap elimination mechanism is used to simultaneously eliminate radial and axial gaps at the connection points. The azimuth and pitch resolutions of the device are both better than 0.5 μrad.

[0008] Furthermore, the three-point gap elimination mechanism includes an adapter, a fisheye bearing connecting screw, a locking screw, a locking nut, and an adjusting shim. The adapter is fixedly connected to the linear slider and includes an adapter body and two mounting plates fixedly connected to or integrally formed with the adapter body. The fisheye bearing connecting screw is installed between the two mounting plates through the cooperation of the locking nut and the locking screw. The end of the locking screw and the mounting plate have a conical surface fit. An adjusting shim is provided between the fisheye bearing connecting screw and the mounting plate. The fisheye bearing connecting screw of the azimuth adjustment mechanism is fixedly connected to the rotating component, and the fisheye bearing connecting screw of the pitch adjustment mechanism is fixedly connected to the mirror chamber. The radial gap is eliminated by the conical surface fit, and the axial gap is eliminated by the plastic deformation of the adjusting shim.

[0009] Furthermore, a rotating component adapter is fixedly installed on the bottom surface of the rotating component, and a mirror chamber connector is fixedly installed on the side of the mirror chamber. The rotating component adapter is fixedly connected to the fisheye bearing connecting screw of the orientation adjustment mechanism, and the mirror chamber connector is fixedly connected to the fisheye bearing connecting screw of the orientation adjustment mechanism.

[0010] Furthermore, the mounting plate surface away from the locking nut is provided with a tapered countersunk hole, and the end of the plug screw has a tapered head that matches the tapered countersunk hole. The tapered countersunk hole and the tapered head form a tapered mating pair.

[0011] Furthermore, the taper screw has a cone angle of 90°±5′, a surface roughness Ra≤0.8μm, and a taper surface clearance ≤0.005mm; the adjusting shim is made of H68 brass with a thickness of 0.5±0.05mm and a Brinell hardness ≥80HB.

[0012] Furthermore, the orientation adjustment mechanism is used to achieve precise rotation of the mirror chamber within a range of ±10° around the vertical axis; the pitch adjustment mechanism is used to achieve precise pitch within a range of ±10° around the horizontal axis.

[0013] Furthermore, the drive assembly includes a directional handwheel, a planetary reducer, and a ball screw assembly. The torque input by the directional handwheel is reduced and increased by the planetary reducer, and then transmitted to the lead screw of the ball screw assembly through a coupling. The linear slider moves linearly along a set track by engaging with the lead screw thread. The planetary reducer has a reduction ratio of 20:1 and a transmission accuracy of ≤1 arc minute.

[0014] Furthermore, the base assembly is manufactured from structural steel using precision machining, and its bottom integrates an array of ISO standard threaded holes with a hole spacing of 25±0.02mm and a positional tolerance of ≤0.05mm, for rapid and precise integration with various optical platforms. This standard interface base provides excellent integration convenience, enabling the device to operate stably for extended periods in complex environments.

[0015] Furthermore, the bottom of the linear slider is adhered with a wear-resistant pad that can effectively suppress micro-vibrations.

[0016] Furthermore, the rotational accuracy of the crossed roller bearing is better than 30 arcseconds.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] This invention achieves extremely high adjustment resolution by employing a high-performance transmission chain comprising a planetary reducer-ball screw assembly-crossed roller bearing azimuth drive system and a planetary reducer-ball screw assembly-mirror chamber connector pitch drive system, along with a three-point backlash elimination mechanism based on a composite principle of "conical radial centering and locking" and "shim axial plastic backlash elimination." The integration of the crossed roller bearings ensures motion decoupling. Theoretical calculations show an azimuth adjustment resolution of 0.5 μrad and a pitch adjustment resolution of 0.5 μrad, meeting the requirements for micro-arc-level angle adjustment accuracy. This invention not only significantly improves the rigidity and accuracy of the transmission system, but also features a compact structure, controllable assembly process, and convenient maintenance. It is highly suitable for advanced equipment fields with stringent requirements for motion smoothness and positioning accuracy, such as CNC machine tools, industrial robots, precision optical platforms, and semiconductor packaging equipment. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Wherein:

[0020] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the inventive device according to an embodiment of the present invention;

[0021] Figure 2 This is a front view of the overall two-dimensional structure of the inventive device described in an embodiment of the present invention;

[0022] Figure 3 This is a schematic diagram of the three-point gap elimination mechanism of the inventive device described in an embodiment of the present invention;

[0023] In the diagram: 1-Base assembly, 2-Azimuth adjustment mechanism, 21-Azimuth handwheel, 22-Azimuth planetary reducer, 23-First coupling, 24-Azimuth ball screw assembly, 3-Pitch adjustment mechanism, 31-Pitch handwheel, 32-Pitch planetary reducer, 33-Second coupling, 34-Pitch screw assembly, 4-Mirror chamber connector, 5-Three-point backlash elimination mechanism, 51-Adapter, 52-Plug screw, 53-Adjusting shim, 54-Locking nut, 55-Fisheye bearing connecting screw, 6-Fork arm mechanism, 7-Fork arm adapter, 8-Ternary assembly, 9-Mirror chamber assembly. Detailed Implementation

[0024] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0025] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0027] This invention is described in detail with reference to the schematic diagrams. When detailing the embodiments of this invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not be construed as limiting the scope of protection of this invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0028] Furthermore, in the description of this invention, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used solely for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. In addition, the terms "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" in this invention should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; similarly, they can refer to mechanical connections, electrical connections, or direct connections, or indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0030] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. Figure 1-2 As shown, the high-precision planar reflector posture adjustment device provided by the present invention mainly comprises a base assembly 1, an orientation adjustment mechanism 2, a pitch adjustment mechanism 3, a mirror chamber connection assembly 4, a three-point gap elimination mechanism 5, a fork arm mechanism 6, a fork arm adapter 7, a trunnion assembly 8, and a mirror chamber assembly 9.

[0031] The base assembly 1 is made of structural steel and undergoes precision machining and aging treatment to ensure long-term dimensional stability. The bottom of the base is machined with an array of ISO standard threaded holes, with a hole spacing of 25±0.02mm and a positional tolerance controlled within 0.05mm. This standardized interface design allows the device to be directly mounted on mainstream optical platforms without any adapters, significantly improving integration accuracy and efficiency.

[0032] The orientation adjustment mechanism 2 constitutes a complete high-precision orientation transmission chain, the core of which lies in the independent integrated design of the "planetary reducer-crossed roller bearing". The system uses the high-precision crossed roller bearing mounted on the base assembly 1 as the absolute rotation reference, and its rotational accuracy of better than 30 arcseconds provides a robust, zero-float support for the entire rotary motion. The transmission chain begins at the orientation handwheel 21, and the torque applied by the operator is first input to the orientation planetary reducer 22. This reducer, through multi-stage planetary gear meshing, achieves a high reduction ratio (significantly increasing output torque) while effectively suppressing backlash due to its compact structure and high rigidity, ensuring unidirectional power transmission and immediate response. The power, after reduction and torque amplification, is transmitted to the orientation ball screw assembly 24 through the first coupling 23. At this critical node, the coupling compensates for radial and angular installation errors, preventing additional stress from being transmitted to the screw and ensuring its pure rotary motion. The lead screw, model 1204 (nominal diameter 12mm, lead 4mm), is designed to convert the rotary motion output from the planetary reducer into precise linear motion. The lead screw and nut assembly is precisely preloaded to eliminate axial backlash. As the lead screw rotates, the nut (i.e., the linear slider) displaces precisely axially, with the displacement being strictly linearly related to the handwheel angle (thanks to the small lead design of 4mm, achieving miniaturized motion). This linear motion is the key transition point driving the final rotary action. The linear slider is rigidly connected to the adapter 51 of the three-point backlash elimination mechanism 5 via screws, thereby driving the lead screw 55 connected to the fisheye bearing. The fisheye bearing not only transmits the linear thrust losslessly to the fork arm adapter 7 but also automatically compensates for potential axial errors caused by the change in motion trajectory (straight line to circular arc) through its spherical joint structure. The fork arm adapter 7 ultimately transmits the force to the fork arm mechanism 6, driving the entire upper load to rotate around the axis of the crossed roller bearing.

[0033] The torque input from the handwheel first enters the azimuth planetary reducer 22 (assuming a reduction ratio of i), and after its backlash-free torque amplification and reduction, the output shaft speed is reduced to 1 / i of the handwheel speed. This output drives the azimuth ball screw assembly 24 via the first coupling 23. The screw lead is 4mm, so for every revolution of the screw, the slider on it will produce a precise linear displacement of 4mm. This linear displacement of the slider is converted into a pure axial thrust on the fisheye bearing connecting screw 55 via the three-point backlash elimination mechanism 5 (as the core backlash-free transmission medium). The connecting screw pushes the fork arm adapter 7, thereby driving the entire upper load to rotate around the axis of the high-precision crossed roller bearing. Quantitatively speaking, one revolution of the handwheel by the operator will ultimately result in a precise, minute change in the azimuth angle of the upper load. The specific angle value Δθ (unit: degrees) can be calculated from the transmission chain parameters using the formula: Δθ = (360° / i) × (P / (2πR)), where *i* is the planetary reducer reduction ratio, P is the lead screw (4mm), and R is the effective radius (mm) from the drive thrust point (the connection between the fisheye bearing connecting rod and the fork arm adapter) to the rotation axis. For example, under typical parameters (such as i=10, R≈150mm), the azimuth adjustment resulting from one revolution of the handwheel is approximately 0.15°. This quantitative relationship clearly demonstrates the high resolution and fine adjustment capability achieved by the system through the combination of "planetary reducer speed reduction and torque increase" and "small lead screw micro-displacement conversion".

[0034] The high performance achieved by this high-precision orientation adjustment system within a ±10° operating range is fundamentally guaranteed by a deeply optimized, interlocking precision transmission chain. The cornerstone of the system's performance lies not only in the redundant drive torque provided by the planetary reducer and the pure rotary guidance provided by the crossed roller bearings, but also in the backlash-free coupling of the entire transmission chain achieved by the three-point backlash elimination mechanism. This mechanism rigidly connects the planetary reducer, precision ball screw, and actuator into a single moving unit, fundamentally eliminating backlash and ensuring strict predictability and repeatability between the operating input (handwheel rotation angle) and the load output (shaft angular displacement).

[0035] From the perspective of mechanical transmission path analysis, the working logic of this system is clear and efficient: the planetary reducer first overcomes the static friction of the system and provides sufficient torque reserve; the precision ball screw, as the core conversion unit, linearizes the rotary motion output by the reducer into high-precision linear displacement, and its lead accuracy directly determines the resolution of the system; finally, through the composite "push rod" mechanism composed of a three-point mechanism and a fisheye bearing, this linear displacement is converted into pure rotary motion of the load around a fixed axis with no backlash and low friction.

[0036] This integrated drive solution achieves high-precision, high-response orientation adjustment at the micro-angle level through the rigid design of the transmission chain and the precise conversion of motion forms. Its technical essence is the result of the synergistic effect of backlash-free transmission, precise conversion, and optimized load path.

[0037] The pitch adjustment mechanism 3 is integrated onto the plane of the fork arm mechanism 6, forming a complete "precision ball screw-articulated arm" drive system, achieving high-precision pitch angle control of the mirror chamber assembly 9. Its transmission chain begins with the input of the pitch handwheel 31. The torque is first amplified and reduced by the pitch planetary reducer 32. This reducer, through its multi-stage planetary gear structure and precise backlash control, provides a high reduction ratio (e.g., *i*=10) while ensuring zero backlash and high rigidity in power transmission. The reduced output directly drives the precision ball screw 34 (lead P=4mm) with a precision grade of C5, precisely converting the rotational motion into linear displacement of the nut slider. This conversion strictly follows the linear law of "displacement = handwheel rotations × (lead / reduction ratio)". This linear displacement is transmitted to the three-point gap elimination mechanism 5 via the fisheye bearing connecting rod. This mechanism, as the core mechanical hub of the entire transmission chain, actively eliminates the gaps of all mechanical connection surfaces through its internal adjustable preload structure, converting the linear displacement of the slider into a pure axial thrust on the mirror chamber assembly 9 without lag or idle travel. Under the action of this thrust, the mirror chamber assembly achieves pitch and rotation around the axis of the trunnion assembly 8. The trunnion assembly not only serves as a high-precision rotary support, but also achieves a significant force-saving effect through its lever design (assuming the driving arm is L1), greatly reducing the torque required to drive the load.

[0038] The change in pitch angle Δφ caused by the operator turning the handwheel one revolution can be precisely quantified using the formula Δφ = (360° / i) × (P / (2π × L1)) × (180 / π). Under typical parameters (i=10, P=4mm, L1=80mm), Δφ is approximately 0.29°, demonstrating the system's excellent motion subdivision and fine-tuning capabilities. Furthermore, a special wear-resistant pad is adhered to the bottom of the linear slider, with its compression set strictly controlled to within 5%, exhibiting excellent dimensional stability and damping performance. This effectively suppresses high-frequency micro-vibrations during transmission, thus ensuring the system's ultra-high stability in both static and dynamic states at the mechanical level.

[0039] The pitch adjustment mechanism, through a complete technology chain of "planetary reducer torque amplification - C5-grade precision ball screw micro-displacement conversion - three-point backlash elimination mechanism backlash-free transmission - trunnion hinge lever for effort saving and support", combined with the vibration-resistant design of special materials, constitutes a high-precision, high-rigidity, and high-stability pitch drive system. This independently integrated design successfully achieves linear and predictable pitch angle conversion based on the number of handwheel rotations.

[0040] like Figure 3 As shown, the three-point gap elimination mechanism 5 includes an adapter 51, a locking screw 52, ​​an adjusting shim 53, and a locking nut 54. Specifically, the adapter is fixedly mounted on the linear slider, serving as the mounting base and force transmission carrier of the mechanism. Its core feature is a precision-machined tapered countersunk hole. The locking screw has a matching tapered head, and the two form a precise tapered surface mating pair. Preferably, the tapered angle of this mating pair is 90°±5′, which achieves an optimal balance between ensuring excellent alignment and the required axial preload conversion efficiency. The surface roughness of the mating surface is strictly controlled to Ra ≤ 0.8μm, and the mating gap is designed to be ≤0.005mm, thereby ensuring that the first contact point has extremely high surface contact accuracy and microscopic fit, laying the physical foundation for eliminating radial gaps.

[0041] The adjusting shim is a key functional component for eliminating axial clearance. It is preferably made of H68 brass with a thickness of 0.5±0.05mm and a Brinell hardness of not less than 80HB. This shim combines good plastic deformation capacity with moderate compressive strength, enabling controllable, uniform, and stable plastic flow during the locking process, while preventing creep relaxation due to excessively soft material. The locking nut is used to apply and maintain the final axial preload.

[0042] The three-point gap elimination mechanism of the present invention achieves complete gap elimination based on the following synergistic principle:

[0043] First contact point (radial clearance elimination and centering): Through the high-precision fit between the tapered surface of the plug screw and the tapered hole of the adapter, a huge radial component force is generated under the action of axial preload, forcing the two to fit tightly, completely eliminating radial fit clearance, realizing automatic precision centering, and establishing a rigid radial motion reference.

[0044] Second contact point (preload application and transmission): Tightening the lock nut causes its end face to press against the copper adjusting shim. This contact point is responsible for converting the axial locking force generated by the thread into the initial preload applied to the entire system and reliably transmitting this force to the first and third contact points.

[0045] The third contact point (axial backlash elimination and long-term retention): Under the continuously increasing axial preload, the copper adjusting shim between the locking nut and the end face of the connector (or fixed base) undergoes a small, controllable plastic deformation. This deformation process fully fills the microscopic gaps in the threaded pair, the flatness errors of each mating end face, and the minute dimensional changes caused by temperature fluctuations, thereby completely eliminating axial backlash. Thanks to the plastic deformation characteristics of the shim material, this backlash elimination effect is durable, effectively overcoming the preload decay problem commonly found in traditional elastic element backlash elimination methods, and achieving a long-term stable zero-backlash connection.

[0046] Resolution calculation verification:

[0047] This invention verifies the resolution performance of the device through rigorous theoretical calculations. The calculations are based on the complete parameters of the self-designed transmission chain:

[0048] Minimum operating angle of handwheel: 0.25° (corresponding to 0.00436 radians), planetary reducer speed ratio: 20:1, ball screw lead: 4mm, pitch lever arm length: 235mm, azimuth lever arm length: 265mm.

[0049] Based on the transmission relationship, when the handwheel rotates to its minimum angle, the linear displacement Δd generated by the lead screw nut is:

[0050] Δd = (Δφ / 2π) × P × i= (0.00436 / 2π) × 4 × 20≈ 0.111μm;

[0051] According to the lever arm principle, the corresponding angular resolution θ_res is: θ_res = Δd / L;

[0052] Pitch resolution calculation: θ_res_pitch = 0.111μm / 235mm ≈ 0.472μrad < 0.5μrad;

[0053] Azimuth resolution calculation: θ_res_azimuth = 0.111μm / 265mm ≈ 0.419μrad < 0.5μrad.

[0054] Calculation results show that the device's theoretical resolution is better than 0.5 μrad, fully meeting the technical requirements for micro-arc-level angle adjustment accuracy. This calculation process fully demonstrates the technical feasibility of achieving ultra-high precision adjustment capabilities based on a fully self-developed architecture.

[0055] Through the above implementation methods, the present invention, based on a fully self-developed architecture, can stably achieve an adjustment resolution better than 0.5 μrad, while also possessing excellent characteristics such as backlash-free transmission, complete motion decoupling, resistance to micro-vibration, and long-term stable operation.

[0056] In summary, this invention provides a high-precision planar reflector attitude adjustment device, comprising a base assembly, an azimuth adjustment mechanism, a pitch adjustment mechanism, a mirror chamber connection assembly, and a three-point backlash elimination mechanism. Through a high-performance transmission chain, including a planetary reducer-crossed roller bearing azimuth drive system and a precision ball screw-hinged arm pitch drive system, combined with the three-point backlash elimination mechanism, and using a standard planar mirror as the system's optical functional carrier, micro-arc-level angular displacement adjustment accuracy is achieved. Theoretical calculations verify that the azimuth and pitch adjustment resolutions are both better than 0.5 μrad. This device possesses excellent characteristics such as backlash-free transmission, motion decoupling, resistance to micro-vibrations, and long-term stable operation.

[0057] The embodiments of the present invention are merely illustrative of the technical solutions of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of the invention without departing from the spirit and scope of the technical solutions of the present invention, and all such modifications and substitutions should be covered within the scope of the claims of the present invention.

Claims

1. A high-precision planar reflector attitude adjustment device, comprising a base, an azimuth adjustment mechanism, a pitch adjustment mechanism, and a mirror chamber, wherein the mirror chamber is mounted on a rotating component via a rotating shaft, and the rotating component is mounted on the base via crossed roller bearings, characterized in that: The azimuth adjustment mechanism is mounted on a base, and the pitch adjustment mechanism is mounted on a rotating component. Both the azimuth and pitch adjustment mechanisms include a drive assembly and a linear slider that can move linearly under the drive of the drive assembly. The linear slider of the azimuth adjustment mechanism is connected to the rotating component through a three-point gap elimination mechanism, and the linear slider of the pitch adjustment mechanism is connected to the mirror chamber through the three-point gap elimination mechanism. The three-point gap elimination mechanism is used to simultaneously eliminate radial and axial gaps at the connection. The azimuth and pitch resolutions of the device are both better than 0.5 μrad. The three-point gap elimination mechanism includes an adapter, a fisheye bearing connecting screw, a stop screw, a lock nut, and an adjusting shim. The adapter is fixedly connected to the linear slider and includes the adapter body. The system includes two mounting plates that are fixedly connected to or integrally formed with the adapter body. The fisheye bearing connecting screw is installed between the two mounting plates through the cooperation of a lock nut and a locking screw. The end of the locking screw and the mounting plate form a tapered surface fit pair. An adjusting shim is provided between the fisheye bearing connecting screw and the mounting plate. The fisheye bearing connecting screw of the azimuth adjustment mechanism is fixedly connected to the rotating component, and the fisheye bearing connecting screw of the pitch adjustment mechanism is fixedly connected to the mirror chamber. Radial clearance is eliminated by the tapered surface fit pair, and axial clearance is eliminated by the plastic deformation of the adjusting shim. A tapered countersunk hole is provided on the surface of the mounting plate away from the lock nut. The end of the locking screw has a tapered head that matches the tapered countersunk hole. The tapered countersunk hole and the tapered head form a tapered surface fit pair.

2. The apparatus according to claim 1, characterized in that: A rotating component adapter is fixedly installed on the bottom surface of the rotating component, and a mirror chamber connector is fixedly installed on the side of the mirror chamber. The rotating component adapter is fixedly connected to the fisheye bearing connecting screw of the orientation adjustment mechanism, and the mirror chamber connector is fixedly connected to the fisheye bearing connecting screw of the orientation adjustment mechanism.

3. The apparatus according to claim 1, characterized in that: The taper screw has a cone angle of 90°±5′, a surface roughness Ra≤0.8μm, and a taper surface clearance≤0.005mm; the adjusting shim is made of H68 brass with a thickness of 0.5±0.05mm and a Brinell hardness ≥80HB.

4. The apparatus according to claim 1, characterized in that: The orientation adjustment mechanism is used to achieve precise rotation of the mirror chamber within a range of ±10° around the vertical axis; the pitch adjustment mechanism is used to achieve precise pitch within a range of ±10° around the horizontal axis.

5. The apparatus according to claim 1, characterized in that: The drive assembly includes a directional handwheel, a planetary reducer, and a ball screw assembly. The torque input by the directional handwheel is reduced and increased by the planetary reducer, and then transmitted to the lead screw of the ball screw assembly through a coupling. The linear slider moves linearly along a set track by engaging with the lead screw thread. The planetary reducer has a reduction ratio of 20:1 and a transmission accuracy of ≤1 arc minute. The accuracy grade of the ball screw assembly is C5.

6. The apparatus according to claim 1, characterized in that: The base is made of structural steel and precision machined. The bottom is integrated with an ISO standard threaded hole array with a hole spacing of 25±0.02mm and a position tolerance of ≤0.05mm, which is used for rapid and accurate integration with various optical platforms.

7. The apparatus according to claim 1, characterized in that: The bottom of the linear slider is adhered with a wear-resistant pad that can effectively suppress micro-vibrations, and the compression set of the wear-resistant pad is ≤5%.

8. The apparatus according to claim 1, characterized in that: The rotational accuracy of the crossed roller bearing is better than 30 arcseconds.

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