Integrated dust removal device

Abstract

This invention discloses an integrated dust removal device, including a dust removal head with a positive pressure chamber and a negative pressure chamber inside. The positive pressure chamber and the negative pressure chamber are independently separated, with the negative pressure chamber located outside the positive pressure chamber. An air inlet duct connected to the positive pressure chamber is located at the top of the dust removal head. Dust collection boxes are located at both ends of the dust removal head, with the dust collection boxes located outside the negative pressure chamber. Two L-shaped bent exhaust pipes, one extending towards the dust collection box, are located on both sides of the air inlet duct at the top of the dust removal head. The bottom ends of the first and second L-shaped bent exhaust pipes are connected to the negative pressure chamber. A negative pressure integrated module is located on top of the dust collection box, and a cyclone separator is located on the negative pressure integrated module. The cyclone separator is a frustum-shaped cylinder, with its upper surface larger than its lower surface. This application integrates positive and negative pressure fans into the dust removal head, thereby better adapting to the space-efficient utilization requirements of semiconductor workshops.

Description

Technical Field

[0001] This invention relates to the field of non-contact dust removal technology, and in particular to a dust removal device for efficiently cleaning dust generated during semiconductor and lithium battery production processes. Background Technology

[0002] In the semiconductor industry, wafers are silicon chips used in the fabrication of semiconductor integrated circuits. Wafers are used to produce integrated circuit chips, and wafer cassettes are transported to different loadports via AMHS (Automated Material Handling System). During wafer production, ultrafine dust is easily generated, which falls to the ground. Simultaneously, the repeated transport by the AMHS over long periods causes this dust to gradually compact into highly adhesive, stubborn dust. This stubborn dust can easily re-levitate due to equipment vibration and worker movement. The presence of dust significantly reduces the yield rate during wafer production. To maintain the cleanliness of the semiconductor workshop and ensure high wafer production yield, regular cleaning is necessary. Existing cleaning methods mostly rely on manual methods, requiring manual wiping, which is time-consuming, labor-intensive, and disrupts the normal operation of other machines. Furthermore, manual cleaning is unstable, lacks control over the cleanliness level, and has low automation.

[0003] In the lithium battery industry, dust particles generated during processes such as coating, rolling, slitting, and winding fall onto the electrode surface, leading to a decrease in product yield. Current cleaning solutions typically connect dust removal devices and dust collectors via long pipes, resulting in significant pressure loss. This not only increases energy consumption but also increases the space required for the large dust collectors. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention aims to provide an integrated dust removal device. By integrating the fan into the dust removal head and adopting a positive and negative pressure integration, the flexible hose connection in the traditional design is eliminated, thereby significantly shortening the airflow path and reducing pressure loss. The overall device size and floor space are also significantly optimized. The positive and negative pressure integration scheme significantly reduces the size of the dust removal device. This improvement provides important support for improving the energy efficiency of the dust removal system.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: An integrated dust removal device includes a dust removal head, which has a positive pressure chamber and a negative pressure chamber. The positive pressure chamber and the negative pressure chamber are independently separated from each other, with the negative pressure chamber located outside the positive pressure chamber. The top of the dust removal head has an air inlet duct that is connected to the positive pressure chamber. Dust collection boxes are provided at both ends of the dust removal head. The dust collection boxes are located outside the negative pressure chamber. On both sides of the air inlet duct at the top of the dust removal head, there are two L-shaped bent exhaust pipes extending toward the dust collection boxes. The bottom ends of L-shaped bent exhaust pipes one and two L-shaped bent exhaust pipes two are respectively connected to the negative pressure chamber in the dust removal head. The dust collection boxes at both ends of the dust collector head are equipped with a negative pressure integrated module. The negative pressure integrated module is equipped with a cyclone separator. The cyclone separator is a frustum-shaped cylinder. The upper bottom surface of the cyclone separator is larger than its lower bottom surface. An exhaust port is opened in the middle of the side wall of the cyclone separator near the negative pressure chamber. The outer ends of L-shaped bent exhaust pipe one and L-shaped bent exhaust pipe two, which are away from the air inlet, are connected to the exhaust port. The top surface of the cyclone separator is provided with a diversion exhaust duct extending toward the dust collection box. The bottom end of the diversion exhaust duct extends downward beyond the exhaust port and below the exhaust port. The exhaust port is set facing the lower part of the diversion exhaust duct and is higher than the bottom end of the diversion exhaust duct. There is a gap between the exhaust port and the diversion exhaust duct.

[0006] Furthermore, in some embodiments, the bottom surface of the cyclone separator is disposed on the top of the dust collection box, and the bottom surface of the cyclone separator is connected to the dust collection box in a through manner. The cyclone separator has a filter chamber on its top surface, which contains a high-efficiency filter. Above the filter chamber is a negative pressure fan housing, which contains a negative pressure fan connected to a battery. The top of the negative pressure fan housing is equipped with a horn-shaped sound-absorbing cover, and the outer end of the sound-absorbing cover is equipped with a noise reduction mesh.

[0007] Furthermore, in some embodiments, a positive pressure fan housing is provided on the top of the air inlet duct, and the positive pressure fan housing is located on the top surface of the dust removal head; a positive pressure fan is provided inside the positive pressure fan housing, the air outlet of the positive pressure fan faces the air inlet duct, and the positive pressure fan is connected to a battery.

[0008] Furthermore, in some embodiments, a dust blowing gap is provided at the bottom of the positive pressure chamber through which a multi-stage pulse channel is connected. The multi-stage pulse channel includes a dual-stage expansion airway cavity and a dual-stage narrowing surface channel. From top to bottom, the multi-stage pulse channel is provided with an air inlet gap D1 with varying air gap spacing, a first narrowing airway gap D2, a first-stage expansion cavity gap D3 of the dual-stage expansion airway cavity, a second narrowing airway gap D4, a second-stage expansion cavity gap D5 of the dual-stage expansion airway cavity, and a dust blowing gap spacing.

[0009] Furthermore, in some embodiments, the air gap spacing on the multi-stage pulse channel is the same for the air inlet spacing D1, the first-stage expansion cavity spacing D3 of the dual-stage expansion airway cavity, and the second-stage expansion cavity spacing D5 of the dual-stage expansion airway cavity (i.e., D1=D3=D5). The first narrowing airway spacing D2, the second narrowing airway spacing D4, and the dust blowing gap spacing are the same (i.e., D2=D4=dust blowing gap spacing 45). The ratio of the air inlet spacing D1 to the first narrowing airway spacing D2 is 1:1.5~2 (i.e., D1:D2=1:1.5~2). The airflow passes through the airway fluctuation changes of wide airway D1 → narrow airway D2 → wide airway D3 → narrow airway D4 → wide airway D5 → narrow airway dust blowing gap, and impacts the dust blowing and sweeping airway from the air outlet of the dust blowing gap.

[0010] Furthermore, in some embodiments, the dual-stage expansion airway cavity of the multi-stage pulse channel adopts a square cavity structure, and the width spacing D3 and spacing D5 between the inner sidewalls of the square cavity of the dual-stage expansion airway cavity are the width of the expansion cavity. The dual-stage expansion airway cavity of the multi-stage pulse channel adopts a circular cavity structure. The width spacing D3 and D5 between the outer top of the circular arc of the inner side wall of the dual-stage expansion airway cavity is the width of the expansion cavity. The dual-stage expansion airway cavity of the multi-stage pulse channel adopts a trapezoidal cavity structure. The width spacing D3 and D5 of the bottom width of the trapezoidal cavity chamber of the dual-stage expansion airway cavity is the width of the expansion cavity.

[0011] Furthermore, in some embodiments, a gap is provided between the top of the positive pressure chamber and the inner top of the dust removal head, and the gap between the top of the positive pressure chamber and the inner top of the dust removal head is set in the negative pressure chamber; the dust removal head is provided with a positive pressure sensor that is connected to the positive pressure chamber, and the dust removal head is provided with a negative pressure sensor that is connected to the negative pressure chamber; the ratio of the height H2 of the positive pressure chamber to the height H1 of the dust removal head cavity is 2 / 3 to 3 / 4:1 (i.e., H2:H1=2 / 3 to 3 / 4:1).

[0012] Furthermore, in some embodiments, the bottom plate of the positive pressure chamber has a transversely penetrating dust blowing slit, and the bottom plate of the negative pressure chamber has a first exhaust slit and a second exhaust slit that are transversely penetrating and parallel to the dust blowing slit. The first exhaust slit and the second exhaust slit are located on both sides of the dust blowing slit, and the second exhaust slit is located outside the first exhaust slit; reinforcing ribs are provided in the transverse gaps of the first exhaust slit and the second exhaust slit. The bottom plate of the negative pressure chamber has a third exhaust slit that runs longitudinally through both ends. The third exhaust slit is located on the outer side of both ends of the dust blowing slit. The distance C1 between the dust blowing gap and the first exhaust gap is between 15 and 25 mm, the distance C2 between the first exhaust gap and the second exhaust gap is between 10 and 15 mm, and the distance C3 between the end of the dust blowing gap and the third exhaust gap is between 5 and 8 mm.

[0013] Furthermore, in some embodiments, the ratio of the air volume of the dust blowing gap to the air volume of the first exhaust gap is 1:1.5~2, the air volume of the first exhaust gap is equal to the air volume of the second exhaust gap, and the ratio of the air volume of the dust blowing gap to the air volume of the third exhaust gap is 1:1.5~2. The pressure in the first, second, and third exhaust slits is the same, and the pressure ratio of the first, second, and third exhaust slits to the dust blowing slit is 1:8~12.

[0014] This integrated solution significantly reduces the overall size and footprint of the cleaning system by integrating the positive and negative pressure fans near the dust collection head, thus better meeting the space-efficient utilization requirements of semiconductor workshops. Simultaneously, due to reduced airflow energy loss, the required fan power is correspondingly lower to achieve the same airflow conditions at the dust collection head outlet. This not only improves the flexibility of fan selection but also allows for the selection of more compact fan models.

[0015] This application employs a dust removal head with two suction slits (narrow suction channels) on each side, the width of which is greater than the width of the dust blowing slit. The air blown down from the dust blowing slit in the middle of the dust removal head (working gun) diffuses to both sides, and two suction slits on each side form an air curtain, which then sucks away the dust. Dust blowing slits and suction slits are added to the narrow sides at both ends of the dust removal head, and the suction slits around the perimeter form an air curtain; this prevents dust from spreading out of the dust blowing gun, improves cleaning efficiency, and enhances the automation level of the equipment. Attached Figure Description

[0016] Figure 1 This is a three-dimensional schematic diagram of an embodiment of the present invention; Figure 2 This is a cross-sectional structural diagram of an embodiment of the present invention; Figure 3 This is a schematic diagram of the dust removal head portion according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of an embodiment of the present invention; Figure 5 This is a top view schematic diagram of an embodiment of the present invention; Figure 6 This is a schematic diagram of the negative pressure integrated module in an embodiment of the present invention; Figure 7 This is a schematic diagram of the air duct of the dust removal head section in an embodiment of the present invention; Figure 8 This is a schematic diagram of the structure of a first embodiment of the multi-stage pulse channel of the present invention; Figure 9 This is a schematic diagram of the airflow of the dust collector head base plate according to an embodiment of the present invention; Figure 10 This is a schematic diagram of the structure of a second embodiment of the multi-stage pulse channel of the present invention; Figure 11 This is a schematic diagram of the structure of Embodiment 3 of the multi-stage pulse channel of the present invention.

[0017] Dust collector head 11, dust collection box 12, positive pressure chamber 13, negative pressure integrated module 14, L-shaped bent exhaust pipe 15, positive pressure sensor 16, positive pressure fan 17, positive pressure fan housing 18, air inlet duct 19, negative pressure chamber 21, negative pressure sensor 22, L-shaped bent exhaust pipe 23, cyclone separator 24, diversion exhaust duct 25, high efficiency filter 26, filter chamber 27, negative pressure fan housing 28, negative pressure fan 29, silencer 31, noise reduction mesh 32, exhaust port 33, first exhaust slit 41, second exhaust slit 42, third exhaust slit 43, reinforcing rib 44, dust blowing slit 45, multi-stage pulse channel 46, dual-stage expansion airway cavity 47, battery 51. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0019] In the description of this invention, it should be noted that the terms "lateral," "upper," "lower," "front," "rear," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly defined.

[0020] Please refer to the attached drawings. This application includes an ultrasonic dust removal head 11. The dust removal head 11 is provided with a positive pressure chamber 13 and a negative pressure chamber 21. The positive pressure chamber 13 and the negative pressure chamber 21 are independently separated from each other. The negative pressure chamber 21 is located outside the positive pressure chamber 13. There is a gap between the top of the positive pressure chamber 13 and the inner top of the dust removal head 11. The gap between the top of the positive pressure chamber 13 and the inner top of the dust removal head 11 is located in the negative pressure chamber 21. The dust removal head 11 is provided with a positive pressure sensor 16 (pressure) that is connected through the positive pressure chamber 13. The dust removal head 11 is provided with a negative pressure sensor 22 that is connected through the negative pressure chamber 21.

[0021] Furthermore, in one embodiment, the positive pressure chamber 13 (positive pressure cavity) is spaced apart from the top plate of the dust removal head 11 frame, and the ratio of the height H2 of the positive pressure chamber 13 to the height H1 of the dust removal head 11 cavity is 2 / 3 to 3 / 4:1 (H2:H1=2 / 3 to 3 / 4:1). A smaller cavity height ratio shortens the path of the positive pressure airflow, reduces energy loss, concentrates the output ultrasonic airflow energy, and increases the desorption capacity for dust.

[0022] Furthermore, in one embodiment, the bottom plate (bottom surface) of the positive pressure chamber 13 is provided with a horizontally penetrating dust blowing slit 45, and the bottom plate (bottom surface) of the negative pressure chamber 21 is provided with a first exhaust slit 41 and a second exhaust slit 42 that are horizontally penetrating and parallel to the dust blowing slit 45 (matching and corresponding). The first exhaust slit 41 and the second exhaust slit 42 are provided on both sides of the dust blowing slit 45, and the second exhaust slit 42 is located outside the first exhaust slit 41; reinforcing ribs 44 (reinforcing strips) are provided in the horizontal gaps of the first exhaust slit 41 and the second exhaust slit 42.

[0023] The bottom plate (bottom surface) of the negative pressure chamber 21 has a longitudinally penetrating third exhaust slit 43 at both ends, which is located on the outer side of both ends of the dust blowing slit 45.

[0024] See appendix Figure 9 As shown, the distance between the dust blowing gap 45 and the first exhaust gap 41 is designed such that the distance C1 between the two gaps is between 15 and 25 mm. This design is beneficial for the ultrasonic airflow generated by the positive pressure chamber 13 to effectively act on the cleaning surface and prevent the negative pressure generated by the negative pressure chamber from affecting the airflow. The distance C2 between the first exhaust gap 41 and the second exhaust gap 42 is between 10 and 15 mm (which increases the cleaning area while preventing the airflow of the two exhaust gaps from interfering with each other). A third exhaust gap 43 is provided at both ends of the dust blowing gap 45, and the distance C3 between the end of the dust blowing gap 45 and the third exhaust gap 43 is between 5 and 8 mm. The design of the first exhaust slit 41 and the third exhaust slit 43 helps to prevent the dust generated by the ultrasonic airflow in the positive pressure chamber 13 from detaching from the dust on the cleaning surface and escaping to areas other than the dust removal head 11; the design of the second exhaust slit 42, in addition to eliminating the possibility of dust escape, also has the function of pre-cleaning the surface to be cleaned, thus improving the degree of cleaning.

[0025] Airflow ratio: The ratio of airflow from dust blowing gap 45 to airflow from the first exhaust gap 41 is 1:1.5~2; the airflow from the first exhaust gap 41 is equal to the airflow from the second exhaust gap 42; and the ratio of airflow from dust blowing gap 45 to airflow from the third exhaust gap 43 is 1:1.5~2. This airflow ratio ensures that the air generated in the positive pressure chamber 13 is drawn away by negative pressure, preventing desorbed dust from escaping outside the dust collector area at any given time.

[0026] Pressure relationship: The pressure ratio between the dust blowing gap 45 and the exhaust gaps (first exhaust gap 41, second exhaust gap 42, and third exhaust gap 43) is 8~12:1. This pressure relationship is beneficial for positive pressure dust blowing to desorb dust from the surface to be cleaned, while ensuring negative pressure suction to collect the desorbed dust.

[0027] Furthermore, in one embodiment, dust collection boxes 12 are respectively provided at both ends (ends) of the dust removal head 11, and the dust collection boxes 12 are located at the outer end of the negative pressure chamber 21. The top of the dust removal head 11 is provided with an air inlet duct 19 that is connected to the positive pressure chamber 13; L-shaped bent exhaust pipe 15 and L-shaped bent exhaust pipe 23 extending toward the dust collection box 12 are provided on both sides of the air inlet duct 19 at the top of the dust removal head 11; the bottom end of L-shaped bent exhaust pipe 15 and the bottom end of L-shaped bent exhaust pipe 23 (negative pressure) are connected to the negative pressure chamber 21 inside the dust removal head 11. A negative pressure integrated module 14 is provided on the dust collection boxes 12 at both ends of the dust removal head 11; an exhaust port 33 is opened on the negative pressure integrated module 14; the ends of L-shaped bent exhaust pipe 15 and L-shaped bent exhaust pipe 23 away from the air inlet duct 19 are connected to the exhaust port 33 on the negative pressure integrated module 14.

[0028] A positive pressure fan housing 18 is provided on the top of the air inlet duct 19, and the positive pressure fan housing 18 is located on the top surface of the dust removal head 11; a positive pressure fan 17 is provided inside the positive pressure fan housing 18, and the air outlet of the positive pressure fan 17 faces the air inlet duct 19; the positive pressure fan 17 is connected to a battery 51, and the battery 51 is located on the top of the positive pressure fan housing 18, or the battery 51 is located on the dust removal head 11.

[0029] The negative pressure integrated module 14 is equipped with a cyclone separator 24, which is a frustum-shaped cylinder. The upper bottom surface of the cyclone separator 24 is larger than its lower bottom surface (the cross-section through the axis is an inverted trapezoid). An exhaust port 33 is opened in the middle of the side wall (inner side wall) of the cyclone separator 24 near the negative pressure chamber 21. The ends of the L-shaped bent exhaust pipe 15 and the L-shaped bent exhaust pipe 23 away from the air inlet duct 19 are connected to the exhaust port 33. The lower bottom surface of the cyclone separator 24 is set at... The top of the dust collection box 12 and the bottom surface of the cyclone separator 24 are connected to the dust collection box 12. The top surface of the cyclone separator 24 is provided with a diversion exhaust duct 25 extending toward the dust collection box 12. The bottom end of the diversion exhaust duct 25 extends downward beyond the exhaust port 33 and extends below the exhaust port 33. That is, the exhaust port 33 is set horizontally facing the lower part of the diversion exhaust duct 25. The exhaust port 33 is higher than the bottom end of the diversion exhaust duct 25. There is a gap between the exhaust port 33 and the diversion exhaust duct 25.

[0030] Furthermore, in one embodiment, the cyclone separator 24 has a filter chamber 27 on its bottom surface, a high-efficiency filter 26 in the filter chamber 27, a negative pressure fan housing 28 on top of the filter chamber 27, a negative pressure fan 29 in the negative pressure fan housing 28, and the negative pressure fan 29 is connected to a battery 51. The battery 51 is located on top of the negative pressure fan housing 28, or the battery 51 is located on the dust collection head 11; see attached figure. Figure 5 As shown, the top of the negative pressure fan housing 28 is provided with a horn-shaped soundproof cover 31; the outer end of the soundproof cover 31 is provided with a noise reduction mesh 32.

[0031] Furthermore, in one embodiment, the dust removal head 11 has two cavities inside: one is a positive pressure chamber 13, which is connected to the air inlet duct 19, and the bottom surface of the positive pressure chamber 13 has a dust blowing slit 45; the other cavity is a negative pressure chamber 21, which is connected to the L-shaped bent exhaust pipe 15 and the L-shaped bent exhaust pipe 23 (negative pressure), and the bottom of the negative pressure chamber 21 has six slender exhaust slits (two of each of the first exhaust slit 41, the second exhaust slit 42, and the third exhaust slit 43 are symmetrically arranged).

[0032] Furthermore, in one embodiment, a dust blowing gap 45 is provided at the bottom of the positive pressure chamber 13, which is penetrated by a multi-stage pulse channel 46. The multi-stage pulse channel 46 includes a double-stage expansion airway cavity 47 and a two-stage narrowing surface channel. The multi-stage pulse channel 46 is provided sequentially from the inside to the outside (from top to bottom) with an air gap spacing of varying inlet spacing D1, a first narrowing airway spacing D2, a first-stage expansion cavity spacing D3 of the double-stage expansion airway cavity 47, a second narrowing airway spacing D4, a second-stage expansion cavity spacing D5 of the double-stage expansion airway cavity 47, and a dust blowing gap 45; the width of the dust blowing gap 45 is the dust blowing gap.

[0033] The air gap spacing on the multi-stage pulse channel 46 is the same as that of the air inlet spacing D1, the first-stage expansion cavity spacing D3 of the dual-stage expansion airway cavity 47, and the second-stage expansion cavity spacing D5 of the dual-stage expansion airway cavity 47 (D1=D3=D5). The spacing between the first narrowing airway D2, the second narrowing airway D4, and the dust blowing gap 45 are the same (D2=D4=dust blowing gap 45). The ratio of spacing D1:D2 is 1:1.5~2 (D1:D2=1:1.5~2). The airflow passes through D1→D2→D3→D4→D5→dust blowing gap 45, undergoing airway fluctuation changes from wide airway D1→narrow airway D2→wide airway D3→narrow airway D4→wide airway D5→narrow airway 45. When the airflow enters the wide airway from the narrow airway, the airflow on both sides of the airway develops into a free shear flow, forming a large vortex at the wide airway. The main airflow continues to flow downward and merges with the airflow in the wide airway at the opening and continues to move downward, resulting in a high-frequency, high-speed pulsed airflow. The airflow pulse frequency reaches the ultrasonic frequency, and the air outlet of the dust blowing gap 45 performs impact dust blowing and sweeping.

[0034] Multi-stage pulse channel 46 Example 1: See appendix Figure 8 As shown, the dual-stage expansion airway cavity 47 adopts a square cavity structure. The square cavity has well-defined edges and walls, which is conducive to the formation of a stable separation zone and promotes the development of the shear layer. The width of the square cavity of the dual-stage expansion airway cavity 47 is shown in the attached figure. Figure 8 The spacing D3 and D5 of the mid-section structure expands the cavity width (spacing), enhances the periodic generation and collision of the vortex ring, and is the best solution to achieve high-intensity and high-stability pulse jets.

[0035] Example 2 of multi-stage pulse channel 46: See appendix Figure 10 As shown, the dual-stage expansion airway cavity 47 adopts a circular cavity structure, providing a solution that emphasizes energy efficiency and stability; the width of the circular cavity of the dual-stage expansion airway cavity 47 (see attached diagram). Figure 10 The spacing D3 and D5 of the mid-section structure is the width of the expanded cavity (spacing). The streamlined inner wall of the circular chamber minimizes the local energy loss caused by flow separation and vortex generation, allowing for smoother airflow. Under the same input power, this structure can achieve higher overall flow efficiency, which helps to reduce the energy consumption of the system.

[0036] Example 3 of multi-stage pulse channel 46: See appendix Figure 11 As shown, the dual-stage expansion airway cavity 47 adopts a trapezoidal cavity structure, providing an alternative suitable for specific scenarios; the bottom width of the trapezoidal cavity of the dual-stage expansion airway cavity 47 (see attached diagram). Figure 11 The trapezoidal bottom spacing (D3, D5) of the mid-section structure expands the cavity width (spacing). The trapezoidal chamber can induce strong, transient flow separation, establish initial oscillations more quickly, and achieve rapid response. In space-constrained applications, the trapezoidal structure allows for a more compact nozzle layout.

[0037] This application provides a variety of optional cavity structures for the multi-level pulse channel 46, which greatly enhances the adaptability of the dust removal device of the present invention; users can flexibly choose a suitable solution based on a comprehensive consideration of dust removal efficiency, energy consumption level and special working conditions, thus overcoming the shortcomings of the single solution in the prior art.

[0038] This application integrates both the positive and negative pressure fans 17 and 29 into a single unit above the ultrasonic dust collector head 11 using a combined positive and negative pressure design. Dust is collected via a cyclone separator 24 and a high-efficiency filter 26: first, the cyclone separator 24 separates and captures large particles (dust collection box 12), and then the high-efficiency filter 26 intercepts ultrafine dust to prevent escape. Integrating the positive and negative pressure fans into the dust collector head 11, and eliminating the need for flexible hoses, significantly reduces pressure loss within the pipeline. For semiconductor workshops with limited space and low dust generation, integrating the positive and negative pressure fans above the dust collector head 11 helps to further reduce the overall equipment size and improve space utilization.

[0039] This application uses a multi-stage pulse channel 46 (fluctuating) airflow to blow away dust, followed by an air curtain barrier (negative pressure suction) to close off the dust removal working space. A high-efficiency filter 26 is installed under the negative pressure fan 29 (suction fan) to filter the dust. Positive and negative pressure fans provide positive or negative pressure air sources, eliminating the need for an external air source. Powered by a battery 51, the entire device is isolated from external air and electricity. The dust removal head 11 (blowing and suction head) cleans the dust through the central dust-blowing gap 45, while the surrounding suction gaps (first suction gap 41, second suction gap 42, and third suction gap 43) draw in dust. The central dust-blowing gap 45 and the surrounding suction gaps prevent dust from escaping, and the surrounding negative pressure suction (suction gaps) prevents air leakage, thus preventing dust from drifting out.

[0040] To address the problem of desorption and collection of ultrafine dust in semiconductor workshops, this application designs several ultrasonic positive pressure multi-stage pulse channels 46 on the base plate of the dust removal head 11. The multi-stage pulse channels 46 (ultrasonic positive pressure structure) can transform positive pressure DC airflow into pulsed airflow with ultrasonic frequency. The airflow with high-frequency oscillation properties can effectively destroy the airflow boundary layer, thereby removing micron-sized and submicron-sized dust and meeting the cleanliness requirements of semiconductor workshops.

[0041] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements all fall within the scope of protection of the present invention. Therefore, the scope of protection of this application should be determined by the appended claims.

Claims

1. An integrated, all-in-one dust extraction device, comprising: A dust removal head (11) is provided with a positive pressure chamber (13) and a negative pressure chamber (21); characterized in that the positive pressure chamber (13) and the negative pressure chamber (21) are independently separated from each other, the negative pressure chamber (21) is located outside the positive pressure chamber (13), and the top of the dust removal head (11) is provided with an air inlet duct (19) that is connected to the positive pressure chamber (13). Dust collection boxes (12) are provided at both ends of the dust removal head (11). The dust collection boxes (12) are located at the outer end of the negative pressure chamber (21). On both sides of the air inlet duct (19) at the top of the dust removal head (11), there are L-shaped bent exhaust pipes one (15) and two L-shaped bent exhaust pipes two (23) extending toward the dust collection box (12). The bottom ends of L-shaped bent exhaust pipes one (15) and two L-shaped bent exhaust pipes two (23) are respectively connected to the negative pressure chamber (21) in the dust removal head (11). The dust collection boxes (12) at both ends of the dust collector head (11) are equipped with a negative pressure integrated module (14), and a cyclone separator (24) is provided on the negative pressure integrated module (14). The cyclone separator (24) is a truncated cylindrical shape. The upper bottom surface of the cyclone separator (24) is larger than its lower bottom surface. An exhaust port (33) is opened in the middle of the side wall of the cyclone separator (24) near the negative pressure chamber (21). The outer ends of the L-shaped bent exhaust pipe one (15) and the L-shaped bent exhaust pipe two (23) away from the air inlet (19) are connected to the exhaust port (33). The top surface of the cyclone separator (24) is provided with a diversion exhaust duct (25) extending toward the dust collection box (12). The bottom end of the diversion exhaust duct (25) extends downward beyond the exhaust port (33) and then extends below the exhaust port (33). The exhaust port (33) is set facing the lower part of the diversion exhaust duct (25). The exhaust port (33) is higher than the bottom end of the diversion exhaust duct (25). There is a gap between the exhaust port (33) and the diversion exhaust duct (25).

2. The integrated dust removal device according to claim 1, characterized in that, The bottom surface of the cyclone separator (24) is located on the top of the dust collection box (12), and the bottom surface of the cyclone separator (24) is connected to the dust collection box (12). A filter chamber (27) is provided on the bottom surface of the cyclone separator (24). A high-efficiency filter (26) is provided in the filter chamber (27). A negative pressure fan housing (28) is provided on the top of the filter chamber (27). A negative pressure fan (29) is provided in the negative pressure fan housing (28). The negative pressure fan (29) is connected to a battery (51). A horn-shaped soundproof cover (31) is provided on the top of the negative pressure fan housing (28). A noise reduction mesh (32) is provided at the outer end of the soundproof cover (31).

3. The integrated dust removal device according to claim 1, characterized in that, The air inlet duct (19) is provided with a positive pressure fan housing (18), which is located on the top surface of the dust removal head (11). A positive pressure fan (17) is provided inside the positive pressure fan housing (18), and the air outlet of the positive pressure fan (17) is directly opposite the air inlet duct (19). The positive pressure fan (17) is connected to the battery (51).

4. The integrated dust removal device according to claim 3, characterized in that, The bottom of the positive pressure chamber (13) is provided with a dust blowing gap (45) that is traversed by a multi-stage pulse channel (46). The multi-stage pulse channel (46) includes a double-stage expansion airway cavity (47) and a two-stage narrowing surface channel. The multi-stage pulse channel (46) is provided with an air inlet gap D1 with varying air gap spacing, a first narrowing airway spacing D2, a first-stage expansion cavity spacing D3 of the double-stage expansion airway cavity (47), a second narrowing airway spacing D4, a second-stage expansion cavity spacing D5 of the double-stage expansion airway cavity (47), and a dust blowing gap (45) in sequence from top to bottom.

5. The integrated dust removal device according to claim 4, characterized in that, The air gap spacing on the multi-stage pulse channel (46) is the same as that of the air inlet spacing D1, the first-stage expansion cavity spacing D3 of the dual-stage expansion airway cavity (47), and the second-stage expansion cavity spacing D5 of the dual-stage expansion airway cavity (47). The first narrowing airway spacing D2, the second narrowing airway spacing D4, and the dust blowing gap (45) have the same dust blowing spacing; The ratio of the air inlet spacing D1 to the first narrowing airway spacing D2 is 1:1.5~2. The airflow fluctuates through the airway D1 wide → D2 narrow → D3 wide → D4 narrow → D5 wide → dust blowing gap (45) narrow, and impacts the dust blowing and sweeping air from the air outlet of the dust blowing gap (45).

6. The integrated dust removal device according to claim 5, characterized in that, The dual-stage expansion airway cavity (47) of the multi-stage pulse channel (46) adopts a square cavity structure. The width spacing D3 and spacing D5 between the inner sidewalls of the square cavity of the dual-stage expansion airway cavity (47) are the width of the expansion cavity. The dual-stage expansion airway cavity (47) of the multi-stage pulse channel (46) adopts a circular cavity structure. The width spacing D3 and spacing D5 between the outer top of the inner side wall of the circular cavity of the dual-stage expansion airway cavity (47) are the width of the expansion cavity. The dual-stage expansion airway cavity (47) of the multi-stage pulse channel (46) adopts a trapezoidal cavity structure. The bottom width spacing D3 and spacing D5 of the trapezoidal cavity of the dual-stage expansion airway cavity (47) is the width of the expansion cavity.

7. The integrated dust removal device according to claim 1, characterized in that, The top of the positive pressure chamber (13) and the inner top of the dust removal head (11) are provided with a gap, and the gap between the top of the positive pressure chamber (13) and the inner top of the dust removal head (11) is set in the negative pressure chamber (21); the dust removal head (11) is provided with a positive pressure sensor (16) that is connected through the positive pressure chamber (13), and the dust removal head (11) is provided with a negative pressure sensor (22) that is connected through the negative pressure chamber (21); the ratio of the height H2 of the positive pressure chamber (13) to the height H1 of the dust removal head (11) cavity is 2 / 3 to 3 / 4:

1.

8. The integrated dust removal device according to claim 1, characterized in that, The bottom plate of the positive pressure chamber (13) has a horizontally penetrating dust blowing slit (45), and the bottom plate of the negative pressure chamber (21) has a first exhaust slit (41) and a second exhaust slit (42) that are horizontally penetrating and parallel to the dust blowing slit (45). The first exhaust slit (41) and the second exhaust slit (42) are located on both sides of the dust blowing slit (45), and the second exhaust slit (42) is located outside the first exhaust slit (41). The horizontal slits of the first exhaust slit (41) and the second exhaust slit (42) are provided with reinforcing ribs (44). The bottom plate of the negative pressure chamber (21) has a longitudinally penetrating third exhaust slit (43) at both ends, and the third exhaust slit (43) is located on the outer side of both ends of the dust blowing slit (45). The distance C1 between the dust blowing gap (45) and the first exhaust gap (41) is between 15 and 25 mm, the distance C2 between the first exhaust gap (41) and the second exhaust gap (42) is between 10 and 15 mm, and the distance C3 between the end of the dust blowing gap (45) and the third exhaust gap (43) is between 5 and 8 mm.

9. An integrated dust removal device according to claim 8, characterized in that, The ratio of the air volume of the dust blowing gap (45) to the air volume of the first exhaust gap (41) is 1:1.5~2, the air volume of the first exhaust gap (41) is equal to the air volume of the second exhaust gap (42), and the ratio of the air volume of the dust blowing gap (45) to the air volume of the third exhaust gap (43) is 1:1.5~2. The pressures of the first exhaust slit (41), the second exhaust slit (42), and the third exhaust slit (43) are the same. The pressure ratio of the first exhaust slit (41), the second exhaust slit (42), and the third exhaust slit (43) to the dust blowing slit (45) is 1:8~12.

Images