A data transmission method and semiconductor processing apparatus

Abstract

The application discloses a data transmission method and a semiconductor processing device, the semiconductor processing device comprises a control system and at least one process module, the control system comprises a host computer, a lower computer and a server, the process module comprises a plurality of subsystems, the lower computer is associated with the process module and controls the subsystems, the server is used for receiving, storing and processing data, the host computer issues process parameters to the lower computer, the subsystems execute actions based on the process parameters and collect feedback signals, the feedback signals are divided into first signals with small data volume and second signals with large data volume, the second signals are directly transmitted to the server without being directly transmitted to the lower computer or the host computer, and the problems of the transmission channel from the subsystems to the host computer being occupied by the feedback signals with large data volume and the data processing efficiency of the lower computer or the host computer are solved.

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