A gas path module, a control module, and a semiconductor device

Abstract

This application relates to a gas path module, a control module, and a semiconductor device. The gas path module includes a quick-connect interface and a unidirectional gas path unit. The quick-connect interface includes an input quick-connect interface and at least one output quick-connect interface. Both the input quick-connect interface and the at least one output quick-connect interface are detachably connected to the unidirectional gas path unit. The input quick-connect interface is used to input gas, and the unidirectional gas path unit allows the gas to flow along a unidirectional path and output through the at least one output quick-connect interface. The control module includes a single gas path module or multiple gas path modules connected in parallel. Therefore, the gas path can be switched on and off through the design of the gas path module. When a new pneumatic valve is added to the device, only the connection of the driving gas for the pneumatic valve needs to be adjusted.

Description

Technical Field

[0001] This application relates primarily to the field of semiconductor equipment, and more particularly to a pneumatic circuit module, a control module, and a semiconductor device. Background Technology

[0002] In semiconductor process equipment, chemical vapor deposition (CVD) equipment is one of the core process devices, and its gasline system is frequently modified to meet new customer requirements. For example, gas filters and pneumatic valves are added to achieve gas filtration and on / off control functions. Pneumatic valve switching control often requires the coordination of compressed dry air (CDA) valve islands and electrical boxes. This involves modifying the pneumatic valve drive valve island and arranging new CDA drive points for the newly added valves. The electrical box is also modified to provide power to the newly added points on the valve island.

[0003] To drive newly added valves, factory-installed machines often require modifications to the CDA valve island and electrical control box. Replacing the CDA valve island necessitates a complete design, procurement, and installation; the electrical control box is often limited by the number of power supply points on the factory-installed machine, requiring changes to the internal circuit boards. This modification work is extensive, time-consuming, and costly. It does not meet the basic needs of on-site customers and significantly impacts the machine's online time.

[0004] For example, such as Figure 1 As shown, a new pneumatic valve DAV was added during the pneumatic circuit modification of a CVD machine. Its control logic explicitly requires that when any of the associated valves ABV, BBV, and CBV open under different operating conditions, the DAV must open synchronously; when all the associated valves are closed, the DAV must close synchronously. To address this specific control requirement, the existing CDA valve island and electrical box modification scheme not only doubles the workload but also lacks a hardware module that can directly match this linkage control logic, further increasing the modification difficulty. Summary of the Invention

[0005] One object of this application is to provide a gas path module, a control module, and a semiconductor device to solve the problems in the prior art.

[0006] According to a first aspect of this application, a pneumatic module is provided, the pneumatic module comprising: a quick-connect interface and a unidirectional pneumatic unit; The quick-connect interface includes an input quick-connect interface and at least one output quick-connect interface; The input quick-connect interface and the at least one output quick-connect interface are detachably connected to the unidirectional air passage unit; The input quick-connect interface is used to input gas, and the unidirectional gas path unit is used for the gas flow to travel along a unidirectional path and be output through the at least one output quick-connect interface.

[0007] Optionally, the unidirectional air circuit unit is connected to the input quick-connect interface by a thread, and the threaded connection is sealed by wrapping PTFE tape.

[0008] Optionally, the one-way air circuit unit is internally provided with a valve core, a spring, a one-way valve seat, and a sealing ring.

[0009] Optionally, the one-way valve seat is located on the airflow path between the input quick-connect interface and the output quick-connect interface, and cooperates with the valve core to form a conduction or cutoff position to limit the airflow to flow along the one-way path.

[0010] Optionally, the spring is disposed on the airflow output side of the one-way valve seat, and is used to push the valve core against the one-way valve seat to block the reverse airflow when there is no positive airflow, and to push open the one-way valve seat to conduct airflow when the positive airflow pressure is greater than the spring force.

[0011] Optionally, the sealing ring is fitted into the contact surface between the valve core and the one-way valve seat for sealing.

[0012] Optionally, the quick-connect interface includes a spring clamp and a clamp release ring; The reed clamp adopts a surface contact structure; The clamp release ring is fitted onto the outer top of the quick-connect interface and is used to release the air tube by elastically opening the spring clamp when pressed.

[0013] According to a second aspect of this application, a control module for a gas path is also provided, the control module comprising: A single pneumatic module as described above; When in operation, after CDA gas is introduced into the input quick-connect interface, the unidirectional gas path unit is turned on, and multiple output quick-connect interfaces simultaneously output CDA gas.

[0014] According to a third aspect of this application, a control module for a gas path is also provided, the control module comprising: Multiple air circuit modules, parallel connectors, and end plugs as described above; The gas path module includes a side output port, an upper end output port, and a lower end output port, and the upper end output port is connected to the output quick-connect interface; Each gas circuit module's side output ports are connected using parallel connectors. A specified number of lower end output ports are reserved in the parallel gas circuit modules for connecting the corresponding number of output quick-connect interfaces. The remaining lower end output ports are sealed with end plugs.

[0015] Optionally, in operation, when CDA gas is introduced into the input quick-connect interface, the output quick-connect interface connected to the upper output port and the output quick-connect interface connected to the lower output port simultaneously output CDA gas.

[0016] According to a third aspect of this application, a semiconductor device is also provided, comprising: a pneumatic module as described above and a valve island; The valve island includes multiple valves. When a new valve point is added to the valve island, the control module is matched according to the position of the new valve point. The control module includes a single pneumatic circuit module or multiple pneumatic circuit modules connected in parallel. The number of output quick-connect interfaces in the control module matches the number of valve groups that need to be controlled in the valve island, so as to realize the on / off control of the newly added valve at each newly added valve point.

[0017] Compared with existing technologies, the gas path module provided in this application includes: a quick-connect interface and a unidirectional gas path unit; the quick-connect interface includes an input quick-connect interface and at least one output quick-connect interface; both the input quick-connect interface and the at least one output quick-connect interface are detachably connected to the unidirectional gas path unit; the input quick-connect interface is used to input gas, and the unidirectional gas path unit is used for the gas flow along a unidirectional path and output through the at least one output quick-connect interface. The control module includes a single gas path module or multiple gas path modules connected in parallel. Therefore, the on / off control of the gas path can be achieved through the design of the gas path module; when a new pneumatic valve is added to the equipment, only the connection of the driving gas for the pneumatic valve needs to be adjusted. Attached Figure Description

[0018] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings, wherein: Figure 1 This diagram shows the valve point connection within the valve island when a new valve is added. Figure 2 A schematic diagram of a gas path module structure provided according to the first aspect of this application is shown; Figure 3 A schematic diagram of the external structure of a unidirectional air passage is shown in one embodiment of this application; Figure 4 This is a schematic diagram of the internal structure of a unidirectional air passage in one embodiment of this application; Figure 5 This diagram illustrates the installation of internal components of a one-way air passage in one embodiment of this application. Figure 6 This diagram shows a structural schematic of a quick-connect interface in one embodiment of the present application; Figure 7 This diagram shows a structural schematic of a single gas path module in one embodiment of this application; Figure 8 This diagram illustrates the structure of two parallel pneumatic circuit modules in one embodiment of this application. Figure 9 This diagram illustrates the structure of another two parallel pneumatic circuit modules in one embodiment of this application. Figure 10 An exploded view of two parallel gas path modules is shown in one embodiment of this application; Figure 11 This diagram illustrates the structure of three parallel pneumatic circuit modules in one embodiment of this application. Figure 12 An exploded view of three parallel gas path modules is shown in one embodiment of this application; Figure 13 A schematic diagram of a single pneumatic module controlling a valve is shown in one embodiment of this application; Figure 14 This diagram illustrates two parallel pneumatic circuit modules controlling valves in one embodiment of this application. Figure 15 This diagram illustrates two parallel pneumatic circuit modules controlling another set of valves in one embodiment of this application. Figure 16 This diagram illustrates a scheme in which three parallel pneumatic circuit modules control a first group of valves in one embodiment of this application. Figure 17 This diagram illustrates three parallel pneumatic circuit modules controlling a second group of valves in one embodiment of this application. Figure 18 This diagram illustrates a third group of valves controlled by three parallel pneumatic circuit modules in one embodiment of this application.

[0019] The same or similar reference numerals in the accompanying drawings represent the same or similar parts. Detailed Implementation

[0020] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0021] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein, and therefore this application is not limited to the specific embodiments disclosed below.

[0022] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0023] Furthermore, the terms “up,” “down,” “left,” “right,” “top,” “bottom,” “horizontal,” and “vertical” used in the following description should be understood as the orientations shown in the paragraph and related figures. This relative terminology is for illustrative purposes only and does not imply that the described device must be manufactured or operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0024] It is understood that although terms such as “first,” “second,” “third,” etc., may be used here to describe various pipes, channels, components, areas, layers, and / or parts, these components, areas, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different pipes, channels, components, areas, layers, and / or parts.

[0025] Figure 2 The diagram shows a pneumatic circuit module structure according to the first aspect of this application. The pneumatic circuit module 01 includes: a quick-connect interface 10 and a unidirectional pneumatic circuit unit 20.

[0026] The quick-connect interface 10 includes an input quick-connect interface 101 and at least one output quick-connect interface 102; both the input quick-connect interface 101 and the at least one output quick-connect interface 102 are detachably connected to the unidirectional gas path unit 20; the input quick-connect interface 101 is used to input gas, and the unidirectional gas path unit 20 is used for the gas to flow along a unidirectional path and be output through the at least one output quick-connect interface 102.

[0027] The quick-connect interface 10 includes an input quick-connect interface 101 for inputting gas and an output quick-connect interface 102 for outputting gas. One input quick-connect interface 101 and multiple output quick-connect interfaces 102 can be designed. The unidirectional gas path unit 20 can ensure that the airflow flows along a unidirectional path, allowing gas to flow only from the input direction to the output direction.

[0028] like Figure 3The unidirectional gas path unit 20 may include multiple interfaces, such as a top interface a1 and a side interface b1 at the upper end, and a bottom interface a2 and a side interface b2 (not shown) at the lower end, for a total of four interfaces. The top interface a1 is connected to an input quick-connect interface 101 for gas inlet, and the remaining interfaces are detachably connected to the output quick-connect interface 102. When an interface is not in use, it can be sealed, and the remaining interfaces are connected to the output quick-connect interface 102 respectively for synchronous gas output.

[0029] In one embodiment of this application, the one-way air circuit unit 20 is connected to the input quick-connect interface 101 by a thread, and the threaded connection is sealed by wrapping PTFE tape.

[0030] The unidirectional air circuit unit 20 can be connected to the input quick-connect interface 101 and the output quick-connect interface 102 by threads, and a small amount of PTFE tape is wrapped between the threads for sealing, such as wrapping 1 to 3 turns of PTFE tape.

[0031] In one embodiment of this application, as Figure 4 and Figure 5 As shown, the one-way air passage unit 20 is equipped with a valve core 203, a spring 202, a one-way valve seat (not shown), and a sealing ring 204, wherein 201 represents the main airflow passage.

[0032] The one-way valve seat is located on the airflow path between the input quick-connect interface 101 and the output quick-connect interface 102, and cooperates with the valve core 203 to form a conduction or cutoff position to limit the airflow to flow along the one-way path.

[0033] The one-way valve seat is located in the main airflow passage of the one-way airflow unit 20, on the airflow path between the input quick-connect interface 101 and the output quick-connect interface 102; the one-way valve seat serves as a base for airflow interruption and cooperates with the valve core 203 to form a conduction or cutoff position, limiting the CDA airflow to flow along the one-way path from input to output.

[0034] Continue to refer to Figure 4 The spring 202 is disposed on the airflow output side of the one-way valve seat. When there is no positive airflow, it pushes the valve core 203 to fit against the one-way valve seat to block the reverse airflow. When the positive airflow pressure is greater than the spring force of the spring 202, it pushes open the one-way valve seat to conduct airflow.

[0035] Spring 202 abuts against the airflow output side of the one-way valve seat, with one end connected to the internal fixing structure of the one-way air circuit unit 20 and the other end abutting against the valve core 203; spring 202 is used to provide elastic preload: when there is no positive CDA airflow, it pushes the valve core 203 to fit against the one-way valve seat to block the reverse airflow; when the positive CDA airflow pressure is greater than the elastic force of spring 202, it opens the fit between the valve core 203 and the one-way valve seat to conduct airflow.

[0036] refer to Figure 4 The sealing ring 204 is embedded in the contact surface between the valve core 203 and the one-way valve seat for sealing.

[0037] The sealing ring 204 is embedded in the contact mating surface of the one-way valve seat and the valve core 203 to enhance the sealing performance between the one-way valve seat and the valve core 203, and to prevent gap leakage when the forward airflow is conducting and reverse leakage of CDA gas in the reverse cut-off state.

[0038] In one embodiment of this application, as Figure 6 As shown, the quick-connect interface 10 includes a spring clamp 1011 and a clamp release ring 1012; the spring clamp 1011 adopts a surface contact structure; the clamp release ring 1012 is sleeved on the outer side of the top of the quick-connect interface 10 and is used to elastically open the spring clamp 1011 when pressed to release the clamping state on the air tube.

[0039] The quick-connect interface 10 also includes a quick-connect base 1013, a sealing element 1014, a lower fixing ring 1015, and an upper fixing seat 1016; wherein, one end of the quick-connect base 1013 is connected to the one-way airway unit 20, and the other end forms a CDA air tube insertion channel; the sealing element 1014 is embedded between the quick-connect base 1013 and the lower fixing ring 1015, and is used to seal the gap between the CDA air tube and the inner wall of the quick-connect interface; the lower fixing ring is located between the quick-connect base and the spring clamp, and is used to limit and fix the installation position of the sealing ring, while supporting the bottom of the spring clamp.

[0040] The spring clamp 1011 is located between the lower fixing ring 1015 and the upper fixing seat 1016, and is used to elastically clamp the CDA endotracheal tube to prevent it from loosening. The upper fixing seat 1016 cooperates with the lower fixing ring 1015 to form an axial limit on the spring clamp 1011, which is used to fix the radial position of the spring clamp 1011. The clamp release ring 1012 is sleeved on the outer side of the top of the quick-connect interface 10. When pressed, it can push the upper fixing seat 1016 inward or directly act on the spring clamp 1011, so that the spring clamp 1011 elastically opens to release the clamping state on the CDA endotracheal tube.

[0041] When a CDA tube is inserted into a CDA quick-connect fitting, the existing fitting retainer has a sharp edge structure, which can damage the CDA tube and cause CDA gas leakage. In this application, the original line contact of the retainer is optimized to a surface contact, that is, the retainer clamp 1011 adopts a surface contact structure design, so as to avoid damaging the CDA tube and prevent CDA gas leakage while achieving tight clamping and limiting of the inserted CDA tube.

[0042] The quick-connect base 1013 is the main base of the quick-connect interface. One end is connected to the one-way airway unit 20, and the other end forms a CDA tracheal insertion channel. It is used to support and assemble other structures of the quick-connect interface, and at the same time, it serves as a carrier for connecting the one-way airway unit and provides guidance for tracheal insertion.

[0043] The sealing element 1014 can be a sealing ring, which is embedded in the inner wall groove of the quick-connect base 1013 or in the mating gap between the quick-connect base and the lower fixing ring 1015, and surrounds the outer wall of the inserted CDA tube to seal the gap between the CDA tube and the inner wall of the quick-connect interface to prevent CDA gas leakage.

[0044] The lower fixing ring 1015 is located between the quick-connect base 1013 and the spring clamp 1011, in the axial middle position inside the quick-connect interface. It is used to limit and fix the installation position of the seal 1014, and at the same time support the bottom of the spring clamp 1011 to constrain the axial displacement of the spring clamp 1011.

[0045] The spring clamp 1011 is located between the lower fixing ring 1015 and the upper fixing seat 1014, surrounds the outer wall of the inserted CDA trachea and is in surface contact with the trachea. It is used to clamp the CDA trachea with its own elasticity to prevent the trachea from loosening, and the surface contact structure ensures clamping force while avoiding damage to the trachea.

[0046] The upper fixing seat 1014 is sleeved on the outside of the spring clamp 1011 and is axially located on the upper part of the spring clamp 1011. It cooperates with the lower fixing ring 1015 to form an axial limit on the spring clamp 1011, which is used to fix the radial position of the spring clamp 1011 and maintain the stability of the clamping structure of the spring clamp 1011.

[0047] The clamp release ring 1012 is fitted around the top outer side of the quick-connect interface and covers part of the upper fixing seat 1014. When pressed, it can push the upper fixing seat 1014 inward or act directly on the spring clamp 1011, so that the spring clamp 1011 can elastically open to release the clamping state of the CDA trachea.

[0048] According to a second aspect of this application, a control module for a gas path is provided, with reference to... Figure 2 The control module includes: a single gas path module 01 as described above; in the working state, when CDA gas is introduced into the input quick-connect interface 101, the unidirectional gas path unit 20 is turned on, and multiple output quick-connect interfaces 102 synchronously output CDA gas.

[0049] This control module can be used for the switching logic control of the CDA gas circuit. The control module includes: a CDA input quick-connect interface 101 and a one-way gas circuit unit 20 for inputting CDA gas; the input quick-connect interface 101 and the one-way gas circuit unit 20 are connected by threads and a small amount of PTFE tape is wrapped between the threads for sealing; the CDA output quick-connect interface 102 is connected to the one-way gas circuit unit 20 by threads. Due to internal interconnection, multiple output quick-connect interfaces 102 can output CDA gas simultaneously, such as one output quick-connect interface connected to the upper part and two output quick-connect interfaces connected to the lower part simultaneously outputting CDA gas.

[0050] It should be noted that when using a single gas circuit module 01, one of the quick-connect ports can be sealed with an end plug, such as... Figure 7 As shown.

[0051] According to a third aspect of this application, a control module for a gas path is also provided. The control module includes: a plurality of gas path modules as described above, a parallel connector, and an end plug; the gas path module includes a side output port, an upper end output port, and a lower end output port, the upper end output port being connected to the output quick-connect interface; the side output ports of each gas path module are connected using a parallel connector, and a specified number of lower end output ports are reserved in the parallel gas path modules for connecting a corresponding number of output quick-connect interfaces, and the remaining lower end output ports are sealed using end plugs.

[0052] like Figure 8 As shown, when two air circuit modules are connected in parallel, each air circuit module has an output port on its side. The two air circuit modules are connected through the side output ports and the parallel connector 103. All output quick-connect interfaces can be used in the two parallel air circuit modules, and the two lower end output ports of the two parallel air circuit modules can be used simultaneously. Figure 9 As shown, one or more can be sealed using end plug 104, and gas will be output from the unsealed output port using only the remaining output quick-connect interface.

[0053] refer to Figure 9Two connected gas path modules, L and R, allow CDA gas to enter through the input quick-connect interface and the unidirectional gas path unit. The input quick-connect interface and the unidirectional gas path unit are connected by threads, with a small amount of PTFE tape wrapped around the threads for sealing. Input quick-connect interfaces C1 and C2 are also threaded to the unidirectional gas path unit for input CDA gas. Due to internal interconnection, when input comes from C1, output quick-connect interfaces A1 and B simultaneously output CDA gas; when input comes from C2, output quick-connect interfaces A2 and B output CDA gas. The unidirectional gas path unit contains a unidirectional valve core to ensure unidirectional CDA flow; that is, CDA flowing inside the unidirectional gas path module L will only flow to the output interface and not to other input ports. An end plug is threaded to the unidirectional gas path unit to seal the gas path outlet. A parallel connector connects the unidirectional gas path modules L and R in parallel; if CDA flows through either path, CDA will also flow through quick-connect interface B.

[0054] In one embodiment of this application, during operation, when CDA gas is introduced into the input quick-connect interface, the output quick-connect interface connected to the upper end output port and the output quick-connect interface connected to the lower end output port simultaneously output CDA gas.

[0055] refer to Figure 10 The exploded diagram shows gas path modules L and R connected via parallel connectors. End plugs can be used to seal the output quick-connect interfaces at the lower ends of gas path modules L and R, such as sealing B1 or B2; alternatively, both interfaces can be retained simultaneously. When both B1 and B2 are retained, CDA output is completed in the working state: when CDA gas is input into C1, output quick-connect interfaces A1, B1, and B2 output synchronously; when CDA is input into C2, output quick-connect interfaces A2, B1, and B2 output synchronously.

[0056] like Figure 11 As shown, when three gas circuit modules (L, M, R) are connected in parallel, each gas circuit module has an output port on its side. The three gas circuit modules are connected through the side output ports and the parallel connector 103. All output quick-connect ports can be used in the three parallel gas circuit modules, or one or more can be blocked, and only the remaining output quick-connect ports can be used. For example, the three lower output ports of the three parallel gas circuit modules can be used at the same time, or two of the used end plugs 104 can be sealed, leaving only the lower output quick-connect port B of the middle gas circuit module M, from which gas will be output.

[0057] like Figure 12The exploded view shows that CDA gas is introduced into the input quick-connect interface and the unidirectional gas flow module. The input quick-connect interface and the unidirectional gas path unit are connected by threads, with a small amount of PTFE tape wrapped around the threads for sealing. The input quick-connect interface and the unidirectional gas path unit are connected by threads to input CDA gas. Due to internal interconnection, output interfaces A (A1, A2, or A3) and B simultaneously output CDA gas. The unidirectional gas path unit is equipped with a unidirectional valve core to achieve unidirectional CDA flow. That is, if CDA flows inside the unidirectional gas flow module L, it will only flow to the output quick-connect interface and not to other input ports. The end plug 104 is connected to the unidirectional gas path unit by threads to achieve gas path outlet sealing. The parallel connector realizes the parallel connection of the unidirectional gas flow modules L, M, and R. If CDA flows through any one path, CDA will also flow through the quick-connect interface B. In the working state, CDA output is completed: if the valve is opened and gas flows through any path, CDA will be output from the quick-connect interface B.

[0058] According to a third aspect of this application, a semiconductor device is also provided, comprising: a pneumatic circuit module as described above and a valve island; the valve island includes a plurality of valves, and when a new valve position is added within the valve island, a control module is matched according to the position of the new valve position; the control module includes a single pneumatic circuit module or a plurality of pneumatic circuit modules connected in parallel, and the number of output quick-connect interfaces in the control module matches the number of valve groups that need to be controlled in the valve island, so as to realize the on / off control of the new valve at each new valve position.

[0059] The number of air circuit modules can be added as needed, such as Figure 1 As shown, pneumatic valves (valve BFV_1, valve AFV_1, and valve DAV) are added to the semiconductor equipment, and three valve positions (control points for valves BFV_1, AFV_1, and DAV) are added to the valve island. Adding valve BFV_1 requires one group of gases (Group B) to simultaneously control both valves BFV_1 and BBV. Adding valve AFV_1 requires two groups of gases (Group A and Group C) to simultaneously control both valves AFV and AFV_1, and valve CFV and valve AFV_1. Adding valve DAV requires three groups of gases (Group A, Group B, and Group C) to control three valves: ABV and DAV open and close simultaneously, BBV and DAV open and close simultaneously, and CBV and DAV open and close simultaneously.

[0060] When a group of valves needs to be controlled, a single pneumatic circuit module can be used to complete the on / off control, such as... Figure 7 As shown, when adding valve BFV_1, a single gas path module is used. CDA gas is introduced into the upper quick-connect input interface, as follows: Figure 13As shown, the CDA gas output from the quick-connect output interface on the upper side is used to control valve BFV, and the CDA gas output from the quick-connect output interface on the lower side is used to control valve BFV_1; thus realizing the simultaneous opening and closing of valves BFV and BFV_1.

[0061] When adding a new valve AFV_1, if it is necessary to control the opening and closing of two sets of valves, then two parallel pneumatic circuit modules are used, such as... Figure 9 As shown, when CDA gas is introduced into the input quick-connect interface C1 of the gas path module L, the output quick-connect interface B at the lower end of the gas path module L and the output quick-connect interface A1 at the upper end of the gas path module L synchronously output CDA gas, as follows. Figure 14 This is used to control valves AFV and AFV_1 to open and close simultaneously; when CDA gas is introduced into the input quick-connect interface C2 of the gas circuit module R, the output quick-connect interface B at the lower end of the gas circuit module L and the output quick-connect interface A2 at the upper end of the gas circuit module R synchronously output CDA gas, such as... Figure 15 It is used to control valves CFV and AFV_1 to open and close simultaneously.

[0062] When adding a new valve DAV, if it is necessary to control the opening and closing of three sets of valves, then three parallel pneumatic circuit modules (L, M, R) are used, such as... Figure 12 As shown. When CDA gas is introduced into the input quick-connect interface C1 of the gas path module L, the lower output quick-connect interface B of the parallel gas path module and the upper output quick-connect interface A1 of the gas path module L simultaneously output CDA gas, as shown. Figure 16 As shown, valves ABV and DAV are used to control the simultaneous opening and closing of the valves. When CDA gas is introduced into the input quick-connect port C2 of the gas circuit module M, CDA gas is simultaneously output from the lower output quick-connect port B of the parallel gas circuit module and the upper output quick-connect port A2 of the gas circuit module M, as shown. Figure 17 As shown, valves BBV and DAV are used to control the simultaneous opening and closing of the valves. When CDA gas is introduced into the input quick-connect port C3 of the gas circuit module R, CDA gas is simultaneously output from the lower output quick-connect port B of the parallel-connected gas circuit module and the upper output quick-connect port A3 of the gas circuit module R, as shown. Figure 18 As shown, valves CBV and DAV are used to control the simultaneous opening and closing of valves. The switching of valves ABV, BBV, and CBV does not interfere with each other.

[0063] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0064] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0065] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

Claims

1. A control module of a gas circuit, applied to drive control of a pneumatic valve in a semiconductor process equipment, characterized in that, The control module includes: Multiple air circuit modules, parallel connectors, and end plugs; The pneumatic module includes: a quick-connect interface and a one-way pneumatic unit; The quick-connect interface includes an input quick-connect interface and at least one output quick-connect interface; The input quick-connect interface and the at least one output quick-connect interface are detachably connected to the unidirectional air passage unit; The input quick-connect interface is used to input gas, and the unidirectional gas path unit is used for the gas flow to flow along a unidirectional path and output through the at least one output quick-connect interface; The one-way air circuit unit is equipped with a valve core, a spring, a one-way valve seat, and a sealing ring. The one-way valve seat is located on the airflow path between the input quick-connect interface and the output quick-connect interface, and cooperates with the valve core to form a conduction or cut-off position to limit the airflow to flow along the one-way path; The unidirectional gas path unit includes multiple interfaces, including a top interface, a side output port, an upper end output port, and a lower end output port. The top interface is connected to the input quick-connect interface, the upper end output port is connected to the output quick-connect interface, and the side output port and the lower end output port can be optionally equipped with output quick-connect interfaces or sealed. The one-way valve seat is located downstream of the top interface and the upper end output port, and upstream of the lower end output port and the side output port. The spring is located on the airflow input side of the one-way valve seat and is used to push the valve core to fit against the one-way valve seat to block the reverse airflow when there is no positive airflow. When the positive airflow pressure is greater than the spring force, the one-way valve seat is opened to allow airflow. Each gas circuit module's side output ports are connected using parallel connectors. A specified number of lower end output ports are reserved in the parallel gas circuit modules for connecting the corresponding number of output quick-connect interfaces. The remaining lower end output ports are sealed with end plugs.

2. The control module of claim 1, wherein, The unidirectional air circuit unit is connected to the input quick-connect interface by a thread, and the threaded connection is sealed with PTFE tape.

3. The control module according to claim 1, characterized in that, The sealing ring is fitted into the contact surface between the valve core and the one-way valve seat for sealing.

4. The control module according to claim 1, characterized in that, The quick-connect interface includes a spring clamp and a clamp release ring; The spring clamp adopts a surface contact structure; The clamp release ring is fitted onto the outer top of the quick-connect interface and is used to elastically open the spring clamp when pressed to release the clamping state on the air tube.

5. The control module according to claim 1, characterized in that, In operation, when CDA gas is introduced into the input quick-connect interface, the output quick-connect interface connected to the upper end output port and the output quick-connect interface connected to the lower end output port simultaneously output CDA gas.

6. A semiconductor device, characterized in that, The semiconductor device includes: a control module and a valve island as described in any one of claims 1 to 5; The valve island includes multiple valves. When a new valve point is added to the valve island, the control module is matched according to the position of the new valve point. The control module includes a single pneumatic circuit module or multiple pneumatic circuit modules connected in parallel. The number of output quick-connect interfaces in the control module matches the number of valve groups that need to be controlled in the valve island, so as to realize the on / off control of the newly added valve at each newly added valve point.

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