一种基于孪生双腔的计量型皮米级位移分辨力产生方法
By using twin Fabry-Perot cavities and optical phase-locked loop technology, controllable picometer-level standard displacement steps are generated, solving the problems of measurement instability and insufficient traceability caused by environmental noise interference in existing technologies, and realizing high-precision picometer-level displacement measurement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NATIONAL INSTITUTE OF METROLOGY CHINA
- Filing Date
- 2026-02-02
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies struggle to achieve stable and traceable picometer-level displacement measurements, are susceptible to environmental noise interference, and produce inconsistent measurement results. They also lack high-precision picometer-level displacement benchmarks and noise control schemes.
By employing a parameter-matched twin Fabry-Perot cavity, the laser is locked to the cavity resonance peak using PDH technology. Combined with an optical frequency comb and an optical phase-locked loop, a controllable picometer-level standard displacement step is generated, enabling direct traceability of the cavity length to the optical frequency standard.
It achieves 10pm resolution measurement in the 5µm range, suppresses the influence of environmental noise, ensures the stability and repeatability of the measurement, and realizes absolute traceability and high-resolution measurement of picometer-level displacement signals.
Smart Images
Figure CN121677573B_ABST