A processing system of a gas distribution plate and a processing method thereof

Abstract

The application relates to a processing system and a processing method of a gas distribution plate. The processing system comprises a cleaning cylinder, a horizontal milling device, a fixed seat installed on a workbench of the horizontal milling device, a top cutter mechanism opposite to a processing end of the horizontal milling device, a moving mechanism for taking and placing the gas distribution plate, and a piston mechanism arranged in the cleaning cylinder in a sliding mode; the gas distribution plate is placed on the fixed seat, the processing end of the horizontal milling device acts on the gas distribution plate from one side, and the top cutter mechanism passes through the gas distribution plate from the other side and contacts the processing end of the horizontal milling device; the cleaning cylinder contains a cleaning medium and the gas distribution plate, and the piston mechanism reciprocatingly moves to push the cleaning medium to repeatedly flush the gas distribution plate. The problems that positioning errors exist in various processing cutters in the prior art, the structural strength is weak, the machining precision of stepped holes is affected, the cleaning medium can act on the surface of the stepped holes only after long-time soaking, and the cleaning efficiency is reduced are solved.

Description

Technical Field

[0001] This invention relates to the field of processing equipment, and more particularly to a processing system and method for a gas distribution plate. Background Technology

[0002] Gas distribution disks for vapor deposition are used to uniformly inject gas and ensure the uniformity of deposition. The gas distribution disk is constructed by machining several stepped holes of varying depths into its structure, followed by surface cleaning using various cleaning media through immersion to ensure its corrosion resistance.

[0003] Because stepped holes have many steps, multiple sets of machining tools are required. Positioning errors in each tool affect the machining accuracy. Furthermore, the depth of the stepped holes necessitates longer machining tools with weaker structural strength, which also impacts machining accuracy.

[0004] Due to the complex structure and small pore size of the stepped holes, the gas distribution plate needs to be immersed for a long time before the cleaning medium can act on the surface of the stepped holes, which further reduces the cleaning efficiency.

[0005] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0006] In view of the shortcomings of the prior art, the purpose of this invention is to provide a processing system and method for a gas distribution plate, so as to solve the problems in the prior art where the positioning error of each processing tool is poor and the structural strength is weak, which affects the processing accuracy of the stepped holes and the cleaning medium has to be soaked for a long time to act on the surface of the stepped holes, thus reducing the cleaning efficiency.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows: A processing system for a gas distribution plate; The device includes: a cleaning cylinder, a horizontal milling machine, a fixed base mounted on the worktable of the horizontal milling machine, a top-load mechanism relative to the machining end of the horizontal milling machine, a moving mechanism for picking up and placing a gas distribution plate, and a piston mechanism slidably disposed within the cleaning cylinder; wherein, the gas distribution plate is placed on the fixed base, the machining end of the horizontal milling machine acts on the gas distribution plate from one side, and the top-load mechanism passes through the gas distribution plate from the other side and contacts the machining end of the horizontal milling machine; the moving mechanism is located between the horizontal milling machine and the cleaning cylinder; the cleaning cylinder contains a cleaning medium and a gas distribution plate, and the piston mechanism reciprocates to push the cleaning medium to repeatedly flush the gas distribution plate.

[0008] A further technical solution is that the fixed base includes: a fixed ring installed on the worktable of the horizontal milling machine and a clamping ring coaxially connected to the fixed ring; wherein the clamping ring and the fixed ring clamp and fix the gas distribution disc.

[0009] A further technical solution is that the top tool mechanism includes a bracket, a first driving device for driving the bracket to move linearly, and a tool bar mounted on the bracket; wherein the bracket is mounted on the driving end of the first driving device; and the tool bar passes through the gas distribution plate from the other side and contacts the processing end of the horizontal milling equipment.

[0010] A further technical solution is that a rod groove is formed on the end face of the tool holder, and a rolling element is formed around the rod groove; a channel communicating with the rod groove is formed inside the tool holder.

[0011] A further technical solution is that the machining end of the horizontal milling equipment includes: a machining tool holder; the end face of the machining tool holder forms a rod protrusion, and the machining edge of the machining tool holder surrounds the rod protrusion; the rod protrusion is inserted into the rod groove and contacts the rolling element; cutting fluid flows out of the channel and acts on the machining edge of the machining tool holder.

[0012] A further technical solution is that the cleaning cylinder includes: a cylinder body and clamping blocks that are tilted and movable on the cylinder body; wherein, the clamping blocks are located on both sides of the gas distribution disk; the clamping blocks move out of the cylinder body, and the clamping blocks avoid the gas distribution disk or the piston mechanism; the clamping blocks move into the cylinder body, and the clamping blocks restrict the gas distribution disk.

[0013] A further technical solution is that the piston mechanism includes: a second moving device, a drive frame movably disposed outside the cylinder, and a plug body relatively movably disposed inside the cylinder; wherein, the second moving device drives the drive frame to move; one side of the plug body is fixed on the drive frame, and the other side of the plug body is movably disposed on the drive frame.

[0014] A method for processing a gas distribution disk processing system includes the following steps: Clamping steps: The moving mechanism picks up the gas distribution plate and places it on the fixed ring. The clamping ring magnetically attracts the fixed ring, clamping and fixing the gas distribution plate to the fixed ring. Machining steps: The machining end of the horizontal milling machine acts on the gas distribution plate to machine a straight hole; the machining end of the horizontal milling machine acts on the straight hole to machine a stepped hole; the first drive device drives the tool bar to extend into the straight hole, the protrusion of the bar inserts into the bar groove and contacts the rolling element; the cutting fluid flows out of the channel and acts on the machining edge of the machining tool bar; Material transfer step: The clamping ring and the fixed ring disengage from each other, and the moving mechanism picks up the gas distribution plate and places it into the cylinder; Cleaning steps: The other side plug pushes the gas distribution plate to move between the clamping blocks, the clamping blocks move into the cylinder, and the other side plug moves to control the spacing between the plugs; the cleaning medium flows into the cylinder, and the second moving device drives the plugs on both sides to move back and forth, and the cleaning medium flows back and forth through the gas distribution plate. Material receiving steps: The clamping block moves out of the cylinder, and the plug pushes the gas distribution plate in the moving direction; the moving mechanism removes the gas distribution plate.

[0015] Compared with the prior art, the beneficial technical effects of the present invention are as follows: (1) During the processing of the horizontal milling equipment, the vibration of the processing end of the horizontal milling equipment is limited by the contact top tool mechanism, so as to ensure the processing accuracy of the stepped hole; each processing end of the horizontal milling equipment is positioned by contacting the top tool mechanism, so as to ensure the processing accuracy of the stepped hole; the piston mechanism moves back and forth to push the cleaning medium to repeatedly flush the gas distribution plate; the cleaning medium acts on the surface of the gas distribution plate and the stepped hole with high pressure, so that all positions of the gas distribution plate are cleaned, the surface of the gas distribution plate and the stepped hole have high cleanliness and strong corrosion resistance; the gas distribution plate is completely immersed in the cleaning medium, and there is no blind spot in the cleaning; the distance between the piston mechanisms is short, and the cleaning medium can complete the cleaning with a small amount.

[0016] (2) A rod block is slidably installed in the support hole. Cutting fluid flows in the channel and acts on the rod block outward. The rod block extends out and contacts the stepped hole. The rod block supports the tool bar and prevents the tool bar from shaking. This allows the tool bar to effectively support the end face of the machining tool bar and ensures high-precision machining of stepped holes with a depth multiple of the hole diameter. The stepped hole has a lot of steps. During the machining process, multiple sets of various machining tool bars are needed to machine different steps. The tool bar does not retract from the gas distribution plate during the machining process, so that all kinds of machining tool bars contact the tool bar to achieve positioning during machining and ensure the machining accuracy of the stepped hole.

[0017] (3) During the flushing process, the cleaning medium flows along the stepped holes, and the piston mechanism moves back and forth so that the cleaning medium is always immersed in the stepped holes for cleaning; the cleaning medium flushes the stepped holes with a large pressure, and there is no blind spot in the cleaning; the clamping block restricts the movement range of the gas distribution plate, so that the cleaning medium can clean the entire left and right surfaces, and there is no blind spot in the surface cleaning; the first power device drives the drive rod to move, so that the clamping block moves into and out of the cylinder, and the distance of the clamping block moving into the cylinder can be adjusted, thereby adjusting the movement range of the gas distribution plate.

[0018] (4) The cleaning medium outlet and the cleaning medium inlet face the surface of the cylinder, so that the cleaning medium flows into the cylinder and forms a rotating flow. After rotating for several revolutions, the flow cuts out. The direction of the cleaning medium outlet is opposite to that of the cleaning medium inlet, so that the cleaning medium can flow in and out smoothly. The rotating flow of the cleaning medium can quickly flush the surface of the gas distribution plate. The surface of the gas distribution plate is fully exposed. There is no obstruction or cleaning blind spot during the rotating flow of the cleaning medium, which ensures the cleaning effect. Attached Figure Description

[0019] Figure 1 A top view of the processing system for the gas distribution disk according to the first embodiment of the present invention is shown.

[0020] Figure 2 It shows Figure 1 Enlarged structural diagram of the positions of the central fixed seat and the top cutter mechanism.

[0021] Figure 3 A front view structural schematic diagram of the fixing base according to the first embodiment of the present invention is shown.

[0022] Figure 4 A front view schematic diagram of the top knife mechanism according to the first embodiment of the present invention is shown.

[0023] Figure 5 A partial structural schematic diagram of the tool holder for machining in a stepped hole and the contact position of the tool holder in the first embodiment of the present invention is shown.

[0024] Figure 6 A top view of the cleaning cylinder and piston mechanism according to the first embodiment of the present invention is shown.

[0025] Figure 7 A front view structural schematic diagram of the cleaning cylinder according to the first embodiment of the present invention is shown.

[0026] Figure 8 A partial left-side view of the cleaning medium inlet location according to the first embodiment of the present invention is shown.

[0027] Figure 9 A partial left-side view of the cleaning medium outlet location according to the first embodiment of the present invention is shown.

[0028] In the attached diagram, the following are the markings: 1. Horizontal milling machine; 11. Machining tool holder; 12. Tool protrusion; 121. Second inclined surface; 2. Fixed seat; 21. Fixed ring; 211. First ring body; 212. Seat block; 213. Ring seat; 214. Magnetic suction device; 22. Clamping ring; 221. Second ring body; 222. Ring rod; 223. Elastic device; 3. Top tool mechanism; 31. Bracket; 311. First threaded ring; 312. First gear; 32. First drive device; 321. First moving module; 322. Second moving module; 323. Guide rod; 324. Inclined bracket; 33. Tool holder; 331. First screw; 332. Support hole; 333. Rod block; 34. Rod groove; 341. 1. First inclined plane; 35. Rolling element; 36. Channel; 4. Moving mechanism; 41. Mechanical arm; 42. Suction cup; 5. Cleaning cylinder; 51. Cylinder body; 511. Opening; 52. Clamping block; 53. Drive mechanism; 531. Drive rod; 532. Cylinder frame; 533. First power unit; 6. Piston mechanism; 61. Drive frame; 611. End frame; 612. Frame rod; 613. Side frame; 614. Second power unit; 615. Second screw; 62. Plug body; 63. Second moving device; 631. Guide rail; 632. Moving frame; 64. Seat frame; 641. Third screw; 642. Third power unit; 7. Flow port; 71. Cylinder block; 72. Fourth power unit. Detailed Implementation

[0029] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0030] Figure 1 A top view schematic diagram of the processing system for the gas distribution disk according to a first embodiment of the present invention is shown. (In conjunction with...) Figure 1 As shown, the present invention discloses a processing system for a gas distribution plate, comprising: a cleaning cylinder 5, a horizontal milling machine 1, a fixed base 2 installed on the worktable of the horizontal milling machine 1, a top tool mechanism 3 relative to the processing end of the horizontal milling machine 1, a moving mechanism 4 for picking up and placing the gas distribution plate, and a piston mechanism 6 relatively slidably disposed in the cleaning cylinder 5.

[0031] In this design, a gas distribution plate is placed on a fixed base 2. The machining end of the horizontal milling machine 1 passes through the gas distribution plate, acting on it from one side. A top-loading mechanism 3 passes through the gas distribution plate from the other side and contacts the machining end of the horizontal milling machine 1. The machining end of the horizontal milling machine 1 gradually moves into the gas distribution plate, while the top-loading mechanism 3 gradually moves out. During machining, the vibration of the machining end of the horizontal milling machine 1 is limited by contacting the top-loading mechanism 3, ensuring the machining accuracy of the stepped holes. Each machining end of the horizontal milling machine 1 contacts the top-loading mechanism 3 for positioning, ensuring the machining accuracy of the stepped holes.

[0032] The moving mechanism 4 is located between the horizontal milling machine 1 and the cleaning cylinder 5. The moving mechanism 4 places the gas distribution plate on the fixed seat 2. After the machining is completed, the gas distribution plate is moved into the cleaning cylinder 5. After the cleaning is completed, the gas distribution plate is moved out.

[0033] The cleaning cylinder 5 contains the cleaning medium and a gas distribution plate. The gas distribution plate is placed vertically in the center of the cleaning cylinder 5, and piston mechanisms 6 are located on both sides of the gas distribution plate. The reciprocating movement of the piston mechanisms 6 pushes the cleaning medium to repeatedly flush the gas distribution plate. The cleaning medium acts on the surface and orifices of the gas distribution plate at high pressure, ensuring that all parts of the gas distribution plate are cleaned. The surface and orifices of the gas distribution plate have high cleanliness and strong corrosion resistance. The gas distribution plate is completely immersed in the cleaning medium, with no blind spots in the cleaning process. The short distance between the piston mechanisms 6 allows for cleaning with a relatively small amount of cleaning medium.

[0034] Figure 2 It shows Figure 1 Enlarged structural diagram of the positions of the central fixed seat and the top cutter mechanism. Figure 3 A front view of the fixing base according to the first embodiment of the present invention is shown. (In conjunction with...) Figures 1-3 As shown, the fixed base 2 includes: a fixed ring 21 installed on the worktable of the horizontal milling machine 1 and a clamping ring 22 coaxially connected to the fixed ring 21.

[0035] The fixing ring 21 includes a first ring body 211, a seat block 212 connected to one side of the bottom of the first ring body 211, a ring seat 213 connected to the other side of the bottom of the first ring body 211, and a magnetic suction device 214 spaced around the first ring body 211. The magnetic suction device 214 is located on the other side of the first ring body 211. The ring seat 213 is fixedly installed on the worktable of the horizontal milling machine 1. The gas distribution plate is placed vertically on the seat block 212. The magnetic suction device 214 magnetically attracts the clamping ring 22, and the clamping ring 22 presses the gas distribution plate tightly onto the first ring body 211, thus completing the clamping ring 22 and the fixing ring 21 clamping and fixing of the gas distribution plate.

[0036] The clamping ring 22 includes a second ring body 221, a ring rod 222 connected to the bottom of the second ring body 221, and an elastic device 223 sleeved on the ring rod 222. For example, there are two sets of ring rods 222. The ring rods 222 are connected to the bottom of the second ring body 221 in a left-right direction, and the two sets of ring rods 222 are distributed in a front-back direction. The ring rods 222 are movably mounted on the ring seat 213. The elastic device 223 pushes the second ring body 221 away from the first ring body 211. When the magnetic attraction device 214 stops magnetically attracting the clamping ring 22, the elastic device 223 pushes the second ring body 221 back to its original position.

[0037] With the first ring 211 and the second ring 221 clamping together completely, the gas distribution plate is subjected to uniform force, avoiding clamping indentations, and at the same time increasing the contact area to prevent displacement of the gas distribution plate. The first ring 211 and the second ring 221 simultaneously restrict the gas distribution plate from the left and right sides of the outer periphery, and the gas distribution plate can withstand the cutting pressure of the machining end of the horizontal milling machine 1.

[0038] Figure 4 A front view schematic diagram of the top-blade mechanism according to a first embodiment of the present invention is shown. (Combined with...) Figures 1-4 As shown, the top-cutting mechanism 3 includes a bracket 31, a first driving device 32 that drives the bracket 31 to move linearly, and a cutter bar 33 mounted on the bracket 31.

[0039] The first driving device 32 includes a guide rod 323, a horizontally arranged first moving module 321, and a vertically arranged second moving module 322. The moving end of the first moving module 321 moves along the guide rod 323, and the second moving module 322 is mounted on the moving end of the first moving module 321. The moving end of the first moving module 321 is provided with an inclined bracket 324, which connects to and supports the second moving module 322.

[0040] A bracket 31 is mounted on the drive end of the first drive device 32. A first helical ring 311 and a first gear 312 are rotatably mounted on the bracket 31. The first gear 312 is driven to rotate by a motor, forming teeth around the first helical ring 311. The first helical ring 311 and the first gear 312 mesh with each other. A first screw 331 is coaxially mounted on the tool holder 33, and the first screw 331 is threadedly connected to the first helical ring 311. The motor drives the first gear 312 to rotate, which in turn drives the first helical ring 311 to rotate. The first helical ring 311 pushes the first screw 331 and the tool holder 33 to move, so that the tool holder 33 passes through the gas distribution plate from the other side and contacts the processing end of the horizontal milling machine 1.

[0041] Figure 5 A partial structural schematic diagram of the tool holder for machining stepped holes and the contact position of the tool holder in the first embodiment of the present invention is shown. (Combined with...) Figures 1-5As shown, a groove 34 is formed on the end face of the tool holder 33, and a rolling element 35 is formed around the groove 34. A first inclined surface 341 is formed around the groove 34, and the rolling element 35 is rotatably mounted on the first inclined surface 341. A channel 36 is formed inside the tool holder 33, communicating with the groove 34. Cutting fluid enters the groove 34 through the channel 36 and diffuses through the first inclined surface 341, causing the cutting fluid to flush the machining end of the horizontal milling machine 1.

[0042] The machining end of the horizontal milling machine 1 includes a machining shank 11. A shank protrusion 12 is formed on the end face of the machining shank 11, and the machining cutting edge of the machining shank 11 surrounds the shank protrusion 12. The shank protrusion 12 is inserted into a shank groove 34 and contacts a rolling element 35. A second inclined surface 121 is formed around the shank protrusion 12, and the second inclined surface 121 contacts the rolling element 35. Cutting fluid flows out through a channel 36 and acts on the machining cutting edge of the machining shank 11.

[0043] To avoid interference between the tool holder 33 and the machining edge of the machining tool holder 11, the diameter of the tool holder 33 is smaller than that of the machining tool holder 11. A support hole 332 is formed on the tool holder 33, which connects the channel 36 and the outer surface of the tool holder 33. A rod block 333 is slidably disposed within the support hole 332. Cutting fluid flows within the channel 36, acting outward on the rod block 333. The rod block 333 extends outward to contact the stepped hole, providing support for the tool holder 33 and preventing vibration. This allows the tool holder 33 to effectively support the end face of the machining tool holder 11, ensuring high-precision machining of stepped holes with a depth multiple of the hole diameter. A spring is fitted on the rod block 333. When the cutting fluid stops acting on the rod block 333, the spring pushes the rod block 333 out of the stepped hole.

[0044] Because the stepped hole is a multiple of the hole diameter, the machining tool holder 11 is relatively long. If the channel 36 were formed on the machining tool holder 11, the structural strength of the machining tool holder 11 would be weak. In this application, the channel 36 is formed on the tool holder 33, which does not damage the structure of the machining tool holder 11 and ensures the precision machining of the stepped hole.

[0045] The stepped hole has a lot of steps, and multiple sets of various machining tool holders 11 are needed to process different steps during the machining process. The tool holder 33 does not retract from the gas distribution plate during the machining process, so that all kinds of machining tool holders 11 contact the tool holder 33 to achieve positioning and ensure the machining accuracy of the stepped hole.

[0046] Combination Figure 1 As shown, the moving mechanism 4 includes a robotic arm 41 and a suction cup 42 mounted on the working end of the robotic arm 41. The suction cup 42 is connected to a suction source and forms a suction port on its side. The robotic arm 41 drives the suction cup 42 to move to the side of the upper end of the gas distribution plate. After the suction cup 42 adsorbs the gas distribution plate, it is moved by the robotic arm 41.

[0047] Figure 6A top view of the cleaning cylinder and piston mechanism according to the first embodiment of the present invention is shown. Figure 7 A front view structural schematic diagram of the cleaning cylinder according to the first embodiment of the present invention is shown. (In conjunction with...) Figures 1-7 As shown, the cleaning cylinder 5 includes a cylinder 51 arranged in a left-right direction and clamping blocks 52 inclinedly movable on the cylinder 51. An opening 511 is formed on the cylinder 51 for placing and removing a gas distribution plate. The opening 511 is located outside the clamping blocks 52 and affects the structural strength of the cylinder 51 between the clamping blocks 52. The cylinder 51 can withstand the pressure of the cleaning medium.

[0048] Clamping block 52 moves out of cylinder 51, avoiding the gas distribution plate or piston mechanism 6. When the gas distribution plate needs to be placed, both clamping blocks 52 move out of cylinder 51 simultaneously, and both piston mechanisms 6 move to the left to approach opening 511. After the gas distribution plate is placed between the piston mechanisms 6 through opening 511, both piston mechanisms 6 move to the right to reset. After the right piston mechanism 6 passes the right clamping block 52, the right clamping block 52 moves into cylinder 51 to restrict the gas distribution plate from moving further to the right. When the gas distribution plate is located between the two clamping blocks 52, the left clamping block 52 moves into cylinder 51 to restrict the movement range of the gas distribution plate.

[0049] After the clamping blocks 52 on both sides move into the cylinder 51 simultaneously, the clamping blocks 52 restrict the gas distribution disk. The clamping blocks 52 are located on both sides of the gas distribution disk, and there is a gap between the gas distribution disk and the clamping blocks 52. When the piston mechanism 6 moves from right to left, the gas distribution disk contacts the clamping block 52 on the left side, and the cleaning medium flows from right to left to flush the stepped holes and the right surface of the gas distribution disk. When the piston mechanism 6 moves from left to right, the gas distribution disk contacts the clamping block 52 on the right side, and the cleaning medium flows from left to right to flush the stepped holes and the left surface of the gas distribution disk. During the flushing process, the cleaning medium flows along the stepped holes, and the reciprocating movement of the piston mechanism 6 ensures that the cleaning medium is always immersed in the stepped holes for cleaning. The cleaning medium flushes the stepped holes with a large pressure, and there are no blind spots in the cleaning. The clamping blocks 52 restrict the movement range of the gas distribution disk, so that the cleaning medium can clean the entire left and right surfaces, and there are no blind spots in the surface cleaning.

[0050] The clamping block 52 is driven to move in and out of the cylinder 51 by a drive mechanism 53. The drive mechanism 53 includes: a drive rod 531 tiltably mounted on the cylinder 51, a cylinder frame 532 mounted on the cylinder 51, and a first power device 533 tiltingly mounted on the cylinder frame 532. For example, the first power device 533 is a hydraulic cylinder. The first power device 533 drives the drive rod 531 to move, causing the clamping block 52 to move in and out of the cylinder 51, and can adjust the distance the clamping block 52 moves into the cylinder 51, thereby adjusting the movement range of the gas distribution disc.

[0051] A cleaning medium outlet and a cleaning medium inlet are formed between adjacent clamping blocks 52, with the outlet and inlet positions close to each other. The outlet and inlet face the surface of the cylinder 51, allowing the cleaning medium to flow into the cylinder 51 in a rotating motion, rotating several times before exiting. The outlet and inlet face opposite directions, ensuring smooth flow of the cleaning medium in and out.

[0052] The rotating flow of the cleaning medium can quickly flush the surface of the gas distribution plate, which is fully exposed. There are no obstructions or blind spots in the rotating flow of the cleaning medium, ensuring the cleaning effect.

[0053] Figure 8 A partial left-side view of the cleaning medium inlet location according to the first embodiment of the present invention is shown. Figure 9 This diagram shows a partial left-side view of the cleaning medium outlet location according to a first embodiment of the present invention. (Combined with...) Figures 1-9 As shown, the outlet and inlet positions of the cleaning medium form a flow port 7. A cylindrical block 71 is slidably disposed within the flow port 7, and the cylindrical block 71 is driven to move by a fourth power device 72. The end face of the cylindrical block 71 forms a curved surface corresponding to the inner surface of the cylinder 51, eliminating interference and ensuring smooth rotational flow of the cleaning medium.

[0054] The fourth power unit 72 drives the cylinder block 71 to approach the inner surface of the cylinder 51 and close the flow port 7, thus shutting off the cleaning medium outlet or the cleaning medium inlet. The fourth power unit 72 drives the cylinder block 71 to move into the flow port 7 and open the flow port 7, allowing the cleaning medium to flow out or in through the flow port 7.

[0055] Combination Figure 6 As shown, the piston mechanism 6 includes: a second moving device 63, a drive frame 61 movably disposed outside the cylinder 51, and a plug 62 movably disposed inside the cylinder 51. The plug 62 is vertically disposed inside the cylinder 51. The second moving device 63 drives the drive frame 61 to move.

[0056] One plug 62 is fixed to the drive frame 61, and the other plug 62 is movably mounted on the drive frame 61. The drive frame 61 includes opposing end frames 611, a support rod 612 connecting the end frames 611, and a side frame 613 slidably mounted on the support rod 612. One plug 62 is fixed to the end frame 611, and the other plug 62 is fixed to the side frame 613. A second power device 614 is mounted on the end frame 611, and a second screw 615 is threaded onto the end frame 611. The second screw 615 is connected to the side frame 613.

[0057] A second threaded ring 616 is rotatably mounted on the end frame 611. The second threaded ring 616 is threadedly connected to the second screw 615. A second gear 617 is mounted on the power end of the second power device 614. The second threaded ring 616 and the second gear 617 mesh with each other. The second power device 614 drives the second gear 617 to rotate, which in turn drives the second threaded ring 616 to rotate. The second threaded ring 616 pushes the second screw 615 to move, and the second screw 615 pushes the side frame 613 and the other side plug 62 to move, thereby adjusting the distance between the plugs 62.

[0058] The second moving device 63 includes a guide rail 631 and a moving frame 632. The moving frame 632 is movably mounted on the guide rail 631 via a slider. The end frame 611 is mounted opposite to the moving frame 632, and the structure of the moving frame 632 avoids interference with the cylinder 51.

[0059] The piston mechanism 6 also includes a base 64. A third screw 641 is threadedly connected to the base 64, and a third power unit 642 is mounted on the base 64. One end of the third screw 641 is connected to the power end of the third power unit 642, and the other end is connected to an end frame 611. A third threaded ring 643 is rotatably mounted on the base 64, and the third threaded ring 643 is threadedly connected to the third screw 641. A third gear 644 is mounted on the power end of the third power unit 642, and the third threaded ring 643 and the third gear 644 mesh with each other. The third power unit 642 drives the third gear 644 to rotate, the third gear 644 drives the third threaded ring 643 to rotate, the third threaded ring 643 drives the third screw 641 to move, and the third screw 641 pushes the piston mechanism 6 to move along the guide rail 631, thereby completing the reciprocating movement of the piston body 62.

[0060] Second embodiment: The machining method for the gas distribution disc machining system includes the following steps: Clamping steps: The moving mechanism 4 picks up the gas distribution plate and places it on the fixing ring 21. The clamping ring 22 magnetically attracts the fixing ring 21, clamping and fixing the gas distribution plate on the fixing ring 21. The gas distribution plate is placed on the ring seat 213, and the magnetic attraction device 214 magnetically attracts the clamping ring 22. The first ring body 211 and the second ring body 221 clamp the gas distribution plate.

[0061] Machining steps: The horizontal milling machine 1 is equipped with a drilling tool at the machining end, which acts on the gas distribution plate to machine a straight hole that passes through the gas distribution plate.

[0062] The horizontal milling machine 1 uses a machining shank 11 clamped at the machining end to machine a stepped hole in a straight hole. When the machining shank 11 extends into the straight hole, the first moving module 321 and the second moving module 322 drive the shank 33 to approach the corresponding straight hole. The first screw 331 drives the shank 33 to extend into the straight hole. The shank 33 and the machining shank 11 come into contact, and the shank protrusion 12 inserts into the shank groove 34 and contacts the rolling element 35. The rotation of the rolling element 35 causes the machining shank 11 to rotate and contact the shank 33, and the shank 33 provides support for the machining shank 11.

[0063] The cutting fluid flows along channel 36 and into support hole 332. The cutting fluid pushes the rod block 333 outward to contact the straight hole, and the rod block 333 supports the tool holder 33. The cutting fluid flows out of channel 36, sprays onto the rod protrusion 12 and flows out along the first inclined surface 341. The cutting fluid acts on the machining edge of the machining tool holder 11, and the vibration caused by the impact of the cutting fluid is limited by the support of the rod block 333.

[0064] Once the stepped hole machining is complete, the cutting fluid supply stops. The spring on the lever 333 pushes the lever 333 inward to reset, facilitating the removal of the tool holder 33. The higher the cutting rate of the tool holder 11, the more cutting fluid is used, and the greater the vibration caused by the cutting fluid impact. When the cutting fluid flow rate increases, the thrust of the cutting fluid on the lever 333 increases, and the lever 333 completes the adaptive adjustment of the support force.

[0065] Material transfer step: The magnetic suction device 214 stops the magnetic suction clamping ring 22, and the elastic device 223 pushes the ring rod 222 to reset the second ring body 221, thus completing the separation of the clamping ring 22 and the fixed ring 21.

[0066] The moving mechanism 4 picks up the gas distribution plate and places it inside the cylinder 51. The piston mechanism 6 moves to the left along the cylinder 51, so that the opening 511 is positioned between the plugs 62. The robotic arm 41 drives the suction cup 42 to move to the side of the upper end of the gas distribution plate, and the suction cup 42 adsorbs the gas distribution plate to complete the retrieval. The robotic arm 41 drives the suction cup 42 and the gas distribution plate to the opening 511, the suction cup 42 stops adsorbing, and the gas distribution plate is placed in the cylinder 51.

[0067] Cleaning steps: The third screw 641 drives the piston mechanism 6 to move along the guide rail 631. The second screw 615 pushes the side frame 613 and the other side plug 62 to move. The other side plug 62 pushes the gas distribution disc to move between the clamping blocks 52. The movement of the other side plug 62 controls the spacing of the plugs 62. The first power unit 533 drives the drive rod 531 to move, so that the clamping blocks 52 move into the cylinder 51, and the gas distribution is located between the clamping blocks 52 on the left and right sides.

[0068] The fourth power unit 72 drives the cylinder block 71 to move into the flow port 7, opening the flow port 7, allowing the cleaning medium to flow in and out through the flow port 7. The cleaning medium flows into the cylinder 51, where it rotates and flows. Once the cylinder 51 is full of cleaning medium, it flows out of the cylinder 51. The rotating flow of the cleaning medium completes the cleaning of the gas distribution plate surface.

[0069] The second moving device 63 drives the two side plugs 62 to move back and forth, and the cleaning medium flows back and forth through the gas distribution plate. The third screw 641 drives the piston mechanism 6 to move along the guide rail 631, so that the two side plugs 62 move to the left and right at the same time, so that the cleaning medium flows to the left and right along the inside of the cylinder 51 during the rotation flow, and the cleaning medium flushes the stepped holes with high pressure to complete the cleaning of the stepped holes.

[0070] If the cleaning medium is driven by the piston mechanism 6 to flow back and forth in a straight line, the cleaning medium will scour the stepped hole in a straight line in the left and right direction, resulting in poor cleaning effect on the recessed areas of the stepped hole. In this application, the cleaning medium is driven by the piston mechanism 6 to enter the stepped hole in a rotating flow state. The cleaning medium repeatedly acts on the inner surface of the stepped hole in a curved flow state, which improves the cleaning effect of the stepped hole.

[0071] The reciprocating speed of the plug body 62 is related to the diameter and structure of the stepped orifice. Specifically: the larger the diameter of the stepped orifice, the faster the plug body 62 moves, allowing the cleaning medium to flow in quickly and complete the cleaning process. The smaller the diameter of the stepped orifice, the slower the plug body 62 moves, allowing more cleaning medium to flow in and complete the cleaning process.

[0072] Specifically: the smoother the stepped hole structure, the faster the plug 62 moves, and the faster the cleaning medium can flush the stepped hole. The more uneven the stepped hole structure, the slower the plug 62 moves, and the more the cleaning medium can penetrate into all parts of the stepped hole to complete the cleaning.

[0073] The moving plug 62 pushes the cleaning medium into the stepped orifice. Simultaneously, the reciprocating movement of the plugs 62 on both sides causes the cleaning medium to flow back and forth within the orifice. After a number of reciprocating movements, the plugs 62 on both sides move to one side, discharging the cleaning medium and pushing new cleaning medium into the orifice. The plugs 62 then begin their reciprocating movement again. The longer the stepped orifice, the more repetitions are required. The shorter the stepped orifice, the fewer repetitions are required. A longer stepped orifice requires a larger cleaning area, necessitating multiple cleaning cycles to ensure effective cleaning.

[0074] Material receiving steps: The first power unit 533 drives the drive rod 531 to move, and the drive rod 531 moves the clamping block 52 out of the cylinder 51. The third screw 641 pushes the piston mechanism 6 to move to the left along the guide rail 631. The plug 62 pushes the gas distribution plate in the infeeding direction, and the gas distribution plate approaches the opening 511. The moving mechanism 4 removes the gas distribution plate, and the robotic arm 41 drives the suction cup 42 to extend into the opening 511. The suction cup 42 is located on the side of the upper end of the gas distribution plate. The suction cup 42 adsorbs the gas distribution plate, and the robotic arm 41 moves the gas distribution plate out.

[0075] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A processing system for a gas distribution disc, characterized in that, include: The equipment comprises a cleaning cylinder (5), a horizontal milling machine (1), a fixed base (2) mounted on the worktable of the horizontal milling machine (1), a top-cutting mechanism (3) relative to the machining end of the horizontal milling machine (1), a moving mechanism (4) for picking up and placing a gas distribution plate, and a piston mechanism (6) relatively slidingly disposed within the cleaning cylinder (5); wherein, the gas distribution plate is placed on the fixed base (2), the machining end of the horizontal milling machine (1) acts on the gas distribution plate from one side, and the top-cutting mechanism (3) passes through the gas distribution plate from the other side and contacts the machining end of the horizontal milling machine (1); the moving mechanism (4) is located between the horizontal milling machine (1) and the cleaning cylinder (5); the cleaning cylinder (5) contains the cleaning medium and the gas distribution plate, and the piston mechanism (6) reciprocates to push the cleaning medium to repeatedly flush the gas distribution plate; The top-cutting mechanism (3) includes a bracket (31), a first driving device (32) that drives the bracket (31) to move linearly, and a cutter bar (33) mounted on the bracket (31); wherein the bracket (31) is mounted on the driving end of the first driving device (32); the cutter bar (33) passes through the gas distribution plate from the other side and contacts the processing end of the horizontal milling machine (1); The end face of the cutter bar (33) forms a bar groove (34), and a rolling element (35) is formed around the bar groove (34); a channel (36) is formed inside the cutter bar (33) to communicate with the bar groove (34).

2. The processing system for the gas distribution disc as described in claim 1, characterized in that, The fixed base (2) includes: a fixed ring (21) installed on the worktable of the horizontal milling machine (1) and a clamping ring (22) coaxially connected to the fixed ring (21); wherein the clamping ring (22) and the fixed ring (21) clamp and fix the gas distribution plate.

3. The processing system for the gas distribution disc as described in claim 2, characterized in that, The horizontal milling machine (1) includes a machining tool holder (11) at the machining end; the end face of the machining tool holder (11) forms a rod protrusion (12), and the machining edge of the machining tool holder (11) surrounds the rod protrusion (12); the rod protrusion (12) is inserted into the rod groove (34) and contacts the rolling element (35); the channel (36) flows out cutting fluid and acts on the machining edge of the machining tool holder (11).

4. The processing system for the gas distribution disc as described in claim 3, characterized in that, The cleaning cylinder (5) includes: a cylinder body (51) and a clamping block (52) that is inclined and movable on the cylinder body (51); wherein the clamping block (52) is located on both sides of the gas distribution plate; the clamping block (52) moves out of the cylinder body (51) and avoids the gas distribution plate or the piston mechanism (6); the clamping block (52) moves into the cylinder body (51) and restricts the gas distribution plate.

5. The processing system for the gas distribution disc as described in claim 4, characterized in that, The piston mechanism (6) includes: a second moving device (63), a drive frame (61) movably disposed outside the cylinder (51), and a plug (62) relatively movably disposed inside the cylinder (51); wherein, the second moving device (63) drives the drive frame (61) to move; one side of the plug (62) is fixed on the drive frame (61), and the other side of the plug (62) is movably disposed on the drive frame (61).

6. A method for processing a gas distribution disk processing system, using the gas distribution disk processing system as described in claim 5, characterized in that, Includes the following steps: Clamping steps: The moving mechanism (4) takes the gas distribution plate and places it on the fixing ring (21), and the clamping ring (22) magnetically attracts the fixing ring (21) to clamp and fix the gas distribution plate on the fixing ring (21). Machining steps: The machining end of the horizontal milling machine (1) acts on the gas distribution plate to machine a straight hole; the machining end of the horizontal milling machine (1) acts on the straight hole to machine a stepped hole; the first driving device (32) drives the tool bar (33) to extend into the straight hole, the rod protrusion (12) inserts into the rod groove (34) and contacts the rolling element (35); the cutting fluid flows out of the channel (36) and acts on the machining edge of the machining tool bar (11); Material transfer step: The clamping ring (22) and the fixed ring (21) disengage from each other, and the moving mechanism (4) takes the gas distribution plate and places it inside the cylinder (51); Cleaning steps: The other plug (62) pushes the gas distribution plate to move between the clamps (52), the clamps (52) move into the cylinder (51), and the other plug (62) moves to control the distance between the two plugs (62); the cleaning medium flows into the cylinder (51), and the second moving device (63) drives the two plugs (62) to move back and forth, and the cleaning medium flows back and forth through the gas distribution plate; Material receiving steps: the clamping block (52) moves out of the cylinder (51), the plug (62) pushes the gas distribution plate in the moving direction; the moving mechanism (4) takes out the gas distribution plate.

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