一种基于离焦度引导的白光干涉测量方法及相关装置
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- GUANGDONG UNIV OF TECH
- Filing Date
- 2025-12-29
- Publication Date
- 2026-07-17
AI Technical Summary
Existing white light interferometry technology requires a long time to scan position by position to determine the height range of unknown morphological components and cross-scale microstructure features, resulting in low measurement efficiency of the workpiece.
Multiple sets of binary fringe patterns are projected by the structured light defocus measurement system, and the actual reflected binary fringe images are acquired. The defocus degree is calculated and a preset defocus degree-height mapping relationship is established. Combined with peak detection and Gaussian fitting algorithms, the scanning planning area is determined, and the motion platform is guided to move to the field of view of the white light interferometry system. The global three-dimensional shape is reconstructed using the white light interferometry phase shift method.
It enables efficient scanning of components with unknown morphology and microstructures across scales, reduces scanning time in featureless regions, and improves the efficiency and robustness of white light interferometry.
Smart Images
Figure CN121702302B_ABST