An experimental apparatus for collecting cathode emanations

Abstract

The application provides an experimental device for collecting cathode evaporation products, which comprises, in sequence from top to bottom along the axial direction, a beam vertical plane collection plate, a beam lateral collection assembly and a cathode assembly. The beam vertical plane collection plate comprises a disc-shaped vertical collection plate body with a central through hole, and the vertical collection plate body is circumferentially spliced around a central axis by multiple petal-shaped ring-shaped vertical plane plate bodies of equal size. The beam lateral collection assembly comprises an external fixing member, a multi-petal-shaped outer beam lateral collection plate is coaxially arranged and detachably mounted in the external fixing member, and an inner plate support member is coaxially arranged at the bottom of the external fixing member. An inner plate support cylinder is fixedly connected in the inner plate support member, and a multi-petal-shaped inner beam lateral collection plate is arranged in the inner plate support cylinder. The device in the application collects cathode evaporation products by using the multi-petal-shaped beam vertical plane collection plate, the inner beam lateral collection plate and the outer beam lateral collection plate, and solves the surface pollution problem caused by the cutting sampling mode.

Description

Technical Field

[0001] This invention belongs to the field of vacuum electronic device technology, and relates to the collection of cathode evaporates, specifically to an experimental device for collecting cathode evaporates. Background Technology

[0002] Traveling wave tubes (TWTs) possess a range of advantages, including wide operating bandwidth, high output power, high efficiency, and large dynamic range, making them widely used in microwave communications, resource exploration, and radar. As a core component directly affecting the overall performance and lifespan of the TWT, the electron gun generates an electron beam of a specific shape and intensity. However, when the electron gun's cathode operates at temperatures ranging from 950°C to 1050°C, the active material continuously evaporates. Once all the material has evaporated, the cathode (i.e., the TWT) reaches the end of its lifespan. Simultaneously, the evaporated cathode active material deposits in other parts of the electron gun, posing a threat to the normal operation of the TWT. To ensure the reliability of the electron gun components, it is necessary to collect and characterize the cathode evaporates from the anode and focusing electrode regions. However, currently, there is a lack of devices for collecting these cathode evaporates. Destructive methods, such as cutting, are currently used to remove the focusing electrode and anode from the electron gun for characterization and analysis of the cathode evaporates, which leads to surface contamination and affects the accuracy of the results. Summary of the Invention

[0003] In view of the shortcomings of the existing technology, the purpose of this invention is to provide an experimental device for collecting cathode evaporates, thereby solving the technical problem that the degree of pollution of cathode evaporates during collection needs to be further reduced in the existing technology.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] An experimental apparatus for collecting cathode evaporates comprises, from top to bottom along the axial direction, a beam vertical surface collection plate, a beam lateral collection assembly, and a cathode assembly.

[0006] The beam vertical surface collecting plate includes a disc-shaped vertical collecting plate body with a central through hole. The vertical collecting plate body is composed of multiple vertical panel body parts of equal size in the shape of fan-shaped rings, which are spliced ​​around the central axis. The collection of cathode evaporates in the anode region is achieved through the multiple vertical panel body parts.

[0007] The beam lateral collection assembly includes an external fixing member, within which an outer beam lateral collection plate is coaxially arranged and detachably installed. An inner side plate support member is also coaxially arranged at the bottom of the external fixing member. The inner side plate support member includes, from top to bottom along the axial direction, a first annular metal plate, a first annular insulator, and a second annular metal plate arranged coaxially and connected in sequence. The inner diameter of the second annular metal plate is smaller than the inner diameter of the first annular insulator. The inner diameters of the first annular insulator and the first annular metal plate are both equal to the inner diameter of the outer beam lateral collection plate.

[0008] The axial top of the first annular metal plate is detachably connected to the axial bottom of the external fixing member; an inner side plate support cylinder is coaxially arranged and fixedly connected inside the second annular metal plate, the axial top of the inner side plate support cylinder is lower than the axial top of the outer beam side collecting plate, and an inner beam side collecting plate is coaxially arranged and detachably connected inside the inner side plate support cylinder, the axial top of the inner beam side collecting plate is lower than the axial top of the outer beam side collecting plate.

[0009] The outer beam lateral collection plate includes a cylindrical outer plate body that is open at both ends along the axial direction. The outer plate body is composed of multiple outer plate segments of the same shape and size, which are spliced ​​around the central axis. The collection of cathode evaporates in the gap between the anode and the focusing electrode is achieved through the multiple outer plate segments.

[0010] The inner beam lateral collection plate includes a cylindrical inner plate body that is open at both ends along the axial direction. The inner plate body is composed of multiple inner plate segments of the same shape and size, which are spliced ​​around the central axis. The collection of cathode evaporates in the focusing electrode region is achieved through the multiple inner plate segments.

[0011] The axial top of the external fastener is detachably connected to the axial bottom of the multi-lobed vertical panel body.

[0012] The cathode assembly includes a cathode, which is coaxially arranged inside the multi-lobed inner side plate; the axial top of the cathode assembly is also detachably connected to the axial bottom of the second annular metal plate.

[0013] The present invention also has the following technical features: Specifically, the inner side plate support cylinder includes a cylindrical inner side plate support cylinder body that is open at both ends in the axial direction. The axial bottom of the outer side wall of the inner side plate support cylinder body is fixedly connected to the inner side wall of the second annular metal plate. The axial top of the inner side plate support cylinder body is also lower than the axial top of the outer beam side collection plate. An annular inner side plate support boss is also integrally provided on the inner side wall of the inner side plate support cylinder body near the axial top in the radial direction. The inner diameter of the inner side plate support boss is larger than the outer diameter of the cathode. The inner side plate support boss supports the axial bottom of the multi-lobed inner side plate distribution.

[0014] Each inner side plate segment is provided with a radially arranged blind hole for mounting the inner side plate segment, and the blind hole for mounting the inner side plate segment corresponds one-to-one with the inner side plate segment.

[0015] The inner side plate support cylinder body is provided with multiple radially penetrating inner side plate support cylinder mounting holes. The inner side plate support cylinder mounting holes correspond one-to-one with the inner side plate sectional mounting thread blind holes. The multiple inner side plate support cylinder mounting holes are arranged at the axial top of the inner side plate support boss. Each inner side plate support cylinder mounting hole is also provided with an inner side plate sectional mounting screw. The inner side plate sectional mounting screw is installed radially from the outside to the inside of the inner side plate support cylinder mounting hole and the inner side plate sectional mounting thread blind hole, so as to realize the detachable connection between the inner side plate support cylinder body and the multi-lobed inner side plate sectional.

[0016] Specifically, each vertical panel body segment is provided with an axially penetrating vertical panel mounting hole near the outer side wall, and the vertical panel mounting hole corresponds one-to-one with the vertical panel body segment.

[0017] The external fastener comprises, from top to bottom, a coaxially arranged and sequentially fixed upper annular plate, an annular waist, and a lower annular plate; the structure and size of the upper annular plate are the same as those of the lower annular plate; the inner diameter of the upper annular plate is equal to the inner diameter of the annular waist, and the outer diameter of the upper annular plate is greater than the outer diameter of the annular waist.

[0018] The upper annular plate of the fixing component is also provided with a plurality of axially penetrating mounting holes. The mounting holes of the upper annular plate of the fixing component correspond one-to-one with the mounting holes of the vertical panel and are arranged coaxially. The mounting holes of the vertical panel and the mounting holes of the upper annular plate of the fixing component are installed by the first bolt, so as to realize the detachable connection between the axial top of the upper annular plate of the fixing component and the axial bottom of the multi-lobed vertical panel body.

[0019] Specifically, the annular waist section is coaxially provided with multiple outer side plate segments. The axial top of the multiple outer side plate segments is flush with the axial top of the upper annular plate of the fixing member, and the axial bottom of the multiple outer side plate segments is flush with the axial bottom of the lower annular plate of the fixing member. Each outer side plate segment is also provided with a radially arranged threaded blind hole for mounting the outer side plate segment. The threaded blind hole for mounting the outer side plate segment corresponds one-to-one with the outer side plate segment.

[0020] The annular waist has multiple radially penetrating annular waist mounting holes on its sidewall. The annular waist mounting holes correspond one-to-one with the outer plate sectional mounting thread blind holes. The outer plate sectional mounting thread blind holes and the annular waist mounting holes are installed by the outer plate sectional mounting screws, realizing a detachable connection between the annular waist and the multi-lobed outer plate sectional.

[0021] The lower annular plate of the fixing component is also provided with multiple axially penetrating mounting holes, which are evenly distributed circumferentially. The first annular metal plate is also provided with multiple axially penetrating mounting holes, which correspond one-to-one with the mounting holes of the lower annular plate of the fixing component. The mounting holes of the lower annular plate of the fixing component and the mounting holes of the first annular plate are installed by a second bolt, thereby realizing a detachable connection between the axial bottom of the lower annular plate of the fixing component and the axial top of the first annular metal plate.

[0022] The second annular metal plate is also provided with a plurality of axially penetrating second annular metal plate mounting holes, which are evenly distributed circumferentially.

[0023] Specifically, the cathode assembly includes a cathode assembly support, which includes, from top to bottom along the axial direction, a third annular metal plate, a second annular insulator, and a fourth annular metal plate that are coaxially arranged and sequentially fixedly connected. The inner diameter of the third annular metal plate and the inner diameter of the second annular insulator are both equal to the inner diameter of the first annular insulator. The inner diameter of the third annular metal plate is also larger than the inner diameter of the fourth annular metal plate, and the inner diameter of the fourth annular metal plate is smaller than the inner diameter of the second annular metal plate.

[0024] The fourth annular metal plate is also coaxially provided with a cathode support cylinder. The axial bottom of the outer wall of the cathode support cylinder is fixedly connected to the inner wall of the fourth annular metal plate. The cathode is also coaxially provided with a cathode at the axial top of the cathode support cylinder. The axial top of the cathode support cylinder and the axial bottom of the cathode are detachably connected.

[0025] The third annular metal plate is also provided with a plurality of axially penetrating third annular metal plate mounting holes, which correspond one-to-one with the second annular metal plate mounting holes. The second annular metal plate mounting holes and the third annular metal plate mounting holes are installed by third bolts to realize a detachable connection between the axial bottom of the second annular metal plate and the axial top of the third annular metal plate.

[0026] Specifically, the vertical panel body segment has a number of lobes greater than or equal to 2, and the surface roughness of the axial bottom end face of each vertical panel body segment is equal to or better than 1.6 micrometers.

[0027] The number of petals in the outer side plate segment is greater than or equal to 2, and the surface roughness of the inner sidewall of each petal of the outer side plate segment is equal to or better than 1.6 micrometers.

[0028] The inner side plate segment has a number of lobes greater than or equal to 2, and the surface roughness of the inner sidewall of each lobe of the inner side plate segment is equal to or better than 1.6 micrometers.

[0029] Compared with the prior art, the present invention has the following technical effects: (I) The device in this invention uses a multi-lobed beam vertical surface collecting plate, an inner beam lateral collecting plate, and an outer beam lateral collecting plate to collect cathode evaporates in the anode region, the focusing electrode region, and the anode-focusing electrode gap region of the electron gun, thus solving the surface contamination problem caused by the cutting sampling method.

[0030] (II) The components such as the beam vertical surface collecting plate, the inner beam lateral collecting plate, the outer beam lateral collecting plate, and the cathode in the device of the present invention can be reused, which greatly reduces the manufacturing cost of related research devices and has broad application prospects in the field of vacuum electronic devices. Attached Figure Description

[0031] Figure 1 This is a cross-sectional schematic diagram of the overall structure of the device in an embodiment of the present invention.

[0032] Figure 2 This is a cross-sectional view of the beam vertical plane collection plate in an embodiment of the present invention.

[0033] Figure 3 This is a cross-sectional view of the beam lateral collection component in an embodiment of the present invention.

[0034] Figure 4 This is a cross-sectional view of the cathode assembly in an embodiment of the present invention.

[0035] Figure 5 This is a physical diagram of the overall structure of the device in an embodiment of the present invention.

[0036] The meanings of the labels in the figure are as follows: 1-beam vertical plane collection plate, 2-beam lateral collection assembly, 3-cathode assembly, 4-inner side plate mounting screws, 5-first bolt, 6-outer side plate mounting screws, 7-second bolt, 8-third bolt.

[0037] 101-Vertical collection plate body, 102-Vertical panel body section, 103-Vertical panel mounting hole.

[0038] 201-External fixing component, 202-Outer beam lateral collection plate, 203-Inner plate support component, 204-Inner beam lateral collection plate.

[0039] 301 - Cathode, 302 - Cathode assembly support.

[0040] 20101 - Upper annular plate of the fastener, 20102 - Annular waist, 20103 - Lower annular plate of the fastener, 20104 - Mounting hole of the upper annular plate of the fastener, 20105 - Mounting hole of the annular waist, 20106 - Mounting hole of the lower annular plate of the fastener.

[0041] 20201 - Outer side plate body, 20202 - Outer side plate section, 20203 - Outer side plate section mounting threaded blind hole.

[0042] 20301 - First annular metal plate, 20302 - First annular insulator, 20303 - Second annular metal plate, 20304 - Inner side plate support cylinder, 20305 - Mounting hole for the first annular metal plate, 20306 - Mounting hole for the second annular metal plate.

[0043] 20401 - Inner side plate body, 20402 - Inner side plate section, 20403 - Inner side plate section mounting thread blind hole.

[0044] 30201 - Third annular metal plate, 30202 - Second annular insulator, 30203 - Fourth annular metal plate, 30204 - Cathode support cylinder, 30205 - Mounting hole for the third annular metal plate.

[0045] 2030401-Inner side plate support cylinder body, 2030402-Inner side plate support boss, 2030403-Inner side plate support cylinder mounting hole.

[0046] The specific content of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Detailed Implementation

[0047] It should be noted that all components and materials in this work, unless otherwise specified, are all commonly used components and materials known in the art in the prior art. For example, the first bolt is a known bolt, the outer plate mounting screws are known screws, the cathode is a known cathode, and the molybdenum block is a known molybdenum block.

[0048] Following the above technical solution, specific embodiments of the present invention are given below. It should be noted that the present invention is not limited to the following specific embodiments, and all equivalent modifications made on the basis of the technical solution of the present invention fall within the protection scope of the present invention.

[0049] Example: This embodiment provides an experimental apparatus for collecting cathode evaporates in the Ku band, such as... Figure 1 As shown, the beam vertical surface collection plate 1, the beam lateral collection assembly 2, and the cathode assembly 3 are sequentially arranged from top to bottom along the axial direction.

[0050] like Figure 2 and Figure 5 As shown, the beam vertical surface collecting plate 1 includes a disc-shaped vertical collecting plate body 101 with a central through hole. The vertical collecting plate body 101 is formed by splicing together multiple vertical panel body portions 102 of equal size in the shape of fan-shaped rings around the central axis. The collection of cathode evaporates in the anode region is achieved through the multiple vertical panel body portions 102.

[0051] like Figure 3 As shown, the beam lateral collection assembly 2 includes an external fixing member 201. An outer beam lateral collection plate 202 is coaxially arranged and detachably installed inside the external fixing member 201. An inner side plate support member 203 is also coaxially arranged at the bottom of the external fixing member 201. The inner side plate support member 203 includes a first annular metal plate 20301, a first annular insulator 20302 and a second annular metal plate 20303 arranged coaxially and connected in sequence from top to bottom along the axial direction. The inner diameter of the second annular metal plate 20303 is smaller than the inner diameter of the first annular insulator 20302. The inner diameters of the first annular insulator 20302 and the first annular metal plate 20301 are both equal to the inner diameter of the outer beam lateral collection plate 202.

[0052] The axial top of the first annular metal plate 20301 is detachably connected to the axial bottom of the external fixing member 201; an inner side plate support cylinder 20304 is coaxially arranged and fixedly connected inside the second annular metal plate 20303, the axial top of the inner side plate support cylinder 20304 is lower than the axial top of the outer beam side collecting plate 202, and an inner beam side collecting plate 204 is coaxially arranged and detachably connected inside the inner side plate support cylinder 20304, the axial top of the inner beam side collecting plate 204 is lower than the axial top of the outer beam side collecting plate 202.

[0053] The outer beam lateral collection plate 202 includes a cylindrical outer plate body 20201 with open ends along the axial direction. The outer plate body 20201 is formed by splicing multiple outer plate segments 20202 of the same shape and size around the central axis. The collection of cathode evaporates in the gap between the anode and the focusing electrode is achieved through the multiple outer plate segments 20202.

[0054] The inner beam lateral collection plate 204 includes a cylindrical inner plate body 20401 with open ends along the axial direction. The inner plate body 20401 is formed by splicing together multiple inner plate segments 20402 of the same shape and size around the central axis. The collection of cathode evaporates in the focusing electrode region is achieved through the multiple inner plate segments 20402.

[0055] The axial top of the external fastener 201 is also detachably connected to the axial bottom of the multi-lobed vertical panel body portion 102.

[0056] like Figure 1 and Figure 4 As shown, the cathode assembly 3 includes a cathode 301, which is coaxially arranged inside the multi-lobed inner side plate portion 20402; the axial top of the cathode assembly 3 is also detachably connected to the axial bottom of the second annular metal plate 20303.

[0057] In this embodiment, the Ku band is the commonly used Ku band known in the art.

[0058] In this embodiment, the vertical collecting plate body 101 is a centrally symmetrical multi-lobed structure. After the multi-lobed vertical panel body portion 102 is assembled, the center has a through hole with an inner diameter of 3 mm. The number of lobes is 4. The material of each vertical panel body portion 102 is a molybdenum plate. The molybdenum plate adopts the molybdenum plate commonly known in the art.

[0059] In this embodiment, the outer side plate body 20201 is formed by splicing four outer side plate segments 20202 of the same shape and size around the central axis. Each outer side plate segment 20202 is a molybdenum block. The molybdenum blocks are commonly used in the art. The four molybdenum blocks are combined to form a ring.

[0060] In this embodiment, the inner side plate body 20401 is composed of inner side plate segments 20402 with the same shape, equal size and four petals. Each inner side plate segment 20402 is a molybdenum block. The molybdenum block adopts the molybdenum block commonly known in the art. The four inner side plate segments 20402 are combined to form a ring.

[0061] In this embodiment, both the first annular metal plate 20301 and the second annular metal plate 20303 are annular Kovar alloy plates, and the first annular insulator 20302 is an annular alumina insulator. The axial ends of the first annular insulator 20302 are connected to the first annular metal plate 20301 and the second annular metal plate 20303 respectively using a vacuum brazing process. The Kovar alloy plate is a commonly known type in the art, and the alumina insulator is a commonly known type in the art.

[0062] As a preferred embodiment, the inner side plate support cylinder 20304 includes a cylindrical inner side plate support cylinder body 2030401 with open ends in the axial direction. The axial bottom of the outer side wall of the inner side plate support cylinder body 2030401 is fixedly connected to the inner side wall of the second annular metal plate 20303. The axial top of the inner side plate support cylinder body 2030401 is also lower than the axial top of the outer beam side collection plate 202. An annular inner side plate support boss 2030402 is integrally provided on the inner side wall of the inner side plate support cylinder body 2030401 near the axial top and radially inward. The inner diameter of the inner side plate support boss 2030402 is larger than the outer diameter of the cathode 301. The inner side plate support boss 2030402 supports the axial bottom of the multi-lobed inner side plate portion 20402.

[0063] Each inner side plate segment 20402 has a radially provided inner side plate segment mounting thread blind hole 20403 on its outer side wall, and the inner side plate segment mounting thread blind hole 20403 corresponds one-to-one with the inner side plate segment 20402.

[0064] The inner side plate support cylinder body 2030401 is also provided with multiple radially penetrating inner side plate support cylinder mounting holes 2030403. The inner side plate support cylinder mounting holes 2030403 correspond one-to-one with the inner side plate sectional mounting threaded blind holes 20403. The multiple inner side plate support cylinder mounting holes 2030403 are arranged at the axial top of the inner side plate support boss 2030402. Each inner side plate support cylinder mounting hole 2030403 is also provided with an inner side plate sectional mounting screw 4. The inner side plate sectional mounting screw 4 is installed radially from the outside to the inside of the inner side plate support cylinder mounting hole 2030403 and the inner side plate sectional mounting threaded blind hole 20403, so as to realize the detachable connection between the inner side plate support cylinder body 2030401 and the multi-lobed inner side plate sectional 20402.

[0065] In this embodiment, the inner diameter of the threaded blind holes 20403 installed in the inner side plate is 2mm.

[0066] In this embodiment, the inner side plate support cylinder 20304 is made of molybdenum. The outer wall and axial bottom of the inner side plate support cylinder body 2030401 are welded to the inner wall of the second annular metal plate 20303. The welding adopts a welding method commonly known in the art. The number of inner side plate support cylinder mounting holes 2030403 is 4, and the inner diameter of each inner side plate support cylinder mounting hole 2030403 is 2mm.

[0067] As a preferred embodiment, each vertical panel body segment 102 is provided with an axially penetrating vertical panel mounting hole 103 near the outer side wall, and the vertical panel mounting hole 103 corresponds one-to-one with the vertical panel body segment 102.

[0068] The external fastener 201 includes, from top to bottom along the axial direction, an upper annular plate 20101, an annular waist 20102, and a lower annular plate 20103, which are coaxially arranged and sequentially fixed and connected. The structure and size of the upper annular plate 20101 are the same as those of the lower annular plate 20103. The inner diameter of the upper annular plate 20101 is equal to the inner diameter of the annular waist 20102, and the outer diameter of the upper annular plate 20101 is greater than the outer diameter of the annular waist 20102.

[0069] The upper annular plate 20101 of the fastener is also provided with a plurality of axially through mounting holes 20104. The mounting holes 20104 of the upper annular plate of the fastener correspond one-to-one with the mounting holes 103 of the vertical panel and are arranged coaxially. The mounting holes 103 of the vertical panel and the mounting holes 20104 of the upper annular plate of the fastener are installed by the first bolt 5, so as to realize the detachable connection between the axial top of the upper annular plate 20101 of the fastener and the axial bottom of the multi-lobed vertical panel body 102.

[0070] In this embodiment, the inner diameter of each vertical panel mounting hole 103 is 3 mm.

[0071] As a preferred embodiment, a multi-lobed outer side plate portion 20202 is coaxially arranged inside the annular waist portion 20102. The axial top of the multi-lobed outer side plate portion 20202 is flush with the axial top of the upper annular plate 20101 of the fixing member, and the axial bottom of the multi-lobed outer side plate portion 20202 is flush with the axial bottom of the lower annular plate 20103 of the fixing member. A radially arranged outer side plate portion mounting thread blind hole 20203 is also provided on the outer side wall of each outer side plate portion 20202, and the outer side plate portion mounting thread blind hole 20203 corresponds one-to-one with the outer side plate portion 20202.

[0072] The annular waist 20102 has multiple radially penetrating annular waist mounting holes 20105 on its side wall. The annular waist mounting holes 20105 correspond one-to-one with the outer plate sectional mounting threaded blind holes 20203. The outer plate sectional mounting threaded blind holes 20203 and the annular waist mounting holes 20105 are installed by the outer plate sectional mounting screws 6, realizing a detachable connection between the annular waist 20102 and the multi-lobed outer plate sectional 20202.

[0073] The lower annular plate 20103 of the fastener is also provided with a plurality of axially penetrating mounting holes 20106, which are evenly distributed circumferentially. The first annular metal plate 20301 is also provided with a plurality of axially penetrating mounting holes 20305, which correspond one-to-one with the mounting holes 20106 of the lower annular plate of the fastener. The mounting holes 20106 of the lower annular plate of the fastener and the mounting holes 20305 of the first annular plate are installed by the second bolt 7, thereby realizing a detachable connection between the axial bottom of the lower annular plate 20103 of the fastener and the axial top of the first annular metal plate 20301.

[0074] The second annular metal plate 20303 is also provided with a plurality of axially penetrating second annular metal plate mounting holes 20306, which are evenly distributed along the circumference.

[0075] In this embodiment, the external fastener 201 is made of molybdenum and is generally annular in shape. There are four mounting holes 20104 on the upper annular plate and four mounting holes 20106 on the lower annular plate. The inner diameter of each mounting hole 20104 on the upper annular plate and each mounting hole 20106 on the lower annular plate is 3 mm. The sidewall thickness of the annular waist 20102 is 2 mm. There are four mounting holes 20105 on the annular waist, and the inner diameter of each mounting hole 20105 is 2 mm. The molybdenum used is commonly known in the art.

[0076] In this embodiment, the inner diameter of the threaded blind hole 20203 installed in each outer plate section is 2mm.

[0077] In this embodiment, the number of first annular metal plate mounting holes 20305 and second annular metal plate mounting holes 20306 is 4, and the inner diameter of each first annular metal plate mounting hole 20305 and each second annular metal plate mounting hole 20306 is 3mm.

[0078] As a preferred embodiment of this invention, such as Figure 4 As shown, the cathode assembly 3 includes a cathode assembly support 302. The cathode assembly support 302 includes, from top to bottom along the axial direction, a third annular metal plate 30201, a second annular insulator 30202, and a fourth annular metal plate 30203, which are coaxially arranged and sequentially fixedly connected. The inner diameter of the third annular metal plate 30201 and the inner diameter of the second annular insulator 30202 are both equal to the inner diameter of the first annular insulator 20302. The inner diameter of the third annular metal plate 30201 is also larger than the inner diameter of the fourth annular metal plate 30203, and the inner diameter of the fourth annular metal plate 30203 is also smaller than the inner diameter of the second annular metal plate 20303.

[0079] The cathode support cylinder 30204 is coaxially arranged inside the fourth annular metal plate 30203. The axial bottom of the outer side wall of the cathode support cylinder 30204 is fixedly connected to the inner side wall of the fourth annular metal plate 30203. The cathode 301 is coaxially arranged at the axial top of the cathode support cylinder 30204. The axial top of the cathode support cylinder 30204 and the axial bottom of the cathode 301 are detachably connected.

[0080] The third annular metal plate 30201 is also provided with multiple axially penetrating third annular metal plate mounting holes 30205, which correspond one-to-one with the second annular metal plate mounting holes 20306. The second annular metal plate mounting holes 20306 and the third annular metal plate mounting holes 30205 are installed by the third bolt 8, realizing a detachable connection between the axial bottom of the second annular metal plate 20303 and the axial top of the third annular metal plate 30201.

[0081] In this embodiment, the third annular metal plate 30201 and the fourth annular metal plate 30203 are both annular Kovar alloy plates, and the second annular insulator 30202 is an annular alumina insulator. The axial ends of the second annular insulator 30202 are connected to the third annular metal plate 30201 and the fourth annular metal plate 30203 using a vacuum brazing process. The vacuum brazing process used is a commonly known and technically advanced vacuum brazing process. Furthermore, the third annular metal plate has four mounting holes 30205, each with an inner diameter of 3 mm.

[0082] As a preferred embodiment, the vertical panel body portion 102 has a number of lobes greater than or equal to 2, and the surface roughness of the axial bottom end face of each lobe of the vertical panel body portion 102 is equal to or better than 1.6 micrometers.

[0083] The number of lobes in the outer side plate segment 20202 is greater than or equal to 2, and the surface roughness of the inner sidewall of each lobe of the outer side plate segment 20202 is equal to or better than 1.6 micrometers.

[0084] The inner side plate segment 20402 has a number of lobes greater than or equal to 2, and the surface roughness of the inner sidewall of each lobe of the inner side plate segment 20402 is equal to or better than 1.6 micrometers.

[0085] In this embodiment, the vertical panel body portion 102 has 4 lobes, and the surface roughness of the axial bottom end face of each lobe of the vertical panel body portion 102 is 1.6 micrometers.

[0086] In this embodiment, the number of petals in the outer side plate segment 20202 is equal to 4, and the surface roughness of the inner sidewall of each petal of the outer side plate segment 20202 is equal to 1.6 micrometers.

[0087] In this embodiment, the number of lobes in the inner side plate segment 20402 is equal to 4, and the surface roughness of the inner sidewall of each lobe of the inner side plate segment 20402 is equal to 1.6 micrometers.

Claims

1. An experimental apparatus for collecting cathode evaporates, characterized in that, Along the axial direction from top to bottom, it includes a beam vertical surface collection plate (1), a beam lateral collection assembly (2), and a cathode assembly (3); The beam vertical surface collecting plate (1) includes a disc-shaped vertical collecting plate body (101) with a central through hole. The vertical collecting plate body (101) is formed by splicing together multiple vertical plate body segments (102) of equal size in the shape of fan-shaped rings around the central axis. The collection of cathode evaporates in the anode region is achieved through the multiple vertical plate body segments (102). The beam lateral collection assembly (2) includes an external fixing member (201), an outer beam lateral collection plate (202) is coaxially arranged and detachably installed inside the external fixing member (201), and an inner side plate support member (203) is coaxially arranged at the bottom of the external fixing member (201); the inner side plate support member (203) includes a first annular metal plate (20301), a first annular insulator (20302) and a second annular metal plate (20303) arranged coaxially and connected in sequence along the axial direction from top to bottom. The inner diameter of the second annular metal plate (20303) is smaller than the inner diameter of the first annular insulator (20302), and the inner diameters of the first annular insulator (20302) and the first annular metal plate (20301) are both equal to the inner diameter of the outer beam lateral collection plate (202); The axial top of the first annular metal plate (20301) is detachably connected to the axial bottom of the external fastener (201); the inner side plate support cylinder (20304) is coaxially arranged and fixedly connected inside the second annular metal plate (20303), the axial top of the inner side plate support cylinder (20304) is lower than the axial top of the outer beam side collecting plate (202), the inner side plate support cylinder (20304) is coaxially arranged and detachably connected to the inner beam side collecting plate (204), the axial top of the inner beam side collecting plate (204) is lower than the axial top of the outer beam side collecting plate (202); The outer beam lateral collection plate (202) includes a cylindrical outer plate body (20201) with open ends along the axial direction. The outer plate body (20201) is formed by splicing together multiple outer plate segments (20202) of the same shape and size around the central axis. The collection of cathode evaporates in the gap between the anode and the focusing electrode is achieved through the multiple outer plate segments (20202). The inner beam lateral collection plate (204) includes a cylindrical inner plate body (20401) with open ends in the axial direction. The inner plate body (20401) is formed by splicing together multiple inner plate segments (20402) of the same shape and size around the central axis. The collection of cathode evaporates in the focusing electrode area is achieved through the multiple inner plate segments (20402). The axial top of the external fastener (201) is also detachably connected to the axial bottom of the multi-lobed vertical panel body (102). The cathode assembly (3) includes a cathode (301), which is coaxially arranged inside the multi-lobed inner side plate (20402); the axial top of the cathode assembly (3) is also detachably connected to the axial bottom of the second annular metal plate (20303).

2. The experimental apparatus for collecting cathode evaporates as described in claim 1, characterized in that, The inner side plate support cylinder (20304) includes a cylindrical inner side plate support cylinder body (2030401) with open axial ends. The axial bottom of the outer side wall of the inner side plate support cylinder body (2030401) is fixedly connected to the inner side wall of the second annular metal plate (20303). The axial top of the inner side plate support cylinder body (2030401) is also lower than the axial top of the outer beam side collection plate (202). An annular inner side plate support boss (2030402) is integrally provided on the inner side wall of the inner side plate support cylinder body (2030401) near the axial top and radially inward. The inner diameter of the inner side plate support boss (2030402) is larger than the outer diameter of the cathode (301). The inner side plate support boss (2030402) supports the axial bottom of the multi-lobed inner side plate section (20402). Each inner side plate segment (20402) is provided with a radially arranged inner side plate segment mounting thread blind hole (20403) on its outer side wall. The inner side plate segment mounting thread blind hole (20403) corresponds one-to-one with the inner side plate segment (20402). The inner side plate support cylinder body (2030401) is provided with multiple radially penetrating inner side plate support cylinder mounting holes (2030403) on its side wall. The inner side plate support cylinder mounting holes (2030403) correspond one-to-one with the inner side plate sectional mounting threaded blind holes (20403). The multiple inner side plate support cylinder mounting holes (2030403) are arranged on the axial top of the inner side plate support boss (2030402). Each inner side plate support cylinder mounting hole (2030403) is also provided with an inner side plate sectional mounting screw (4). The inner side plate sectional mounting screw (4) is installed radially from the outside to the inside of the inner side plate support cylinder mounting hole (2030403) and the inner side plate sectional mounting threaded blind hole (20403), so as to realize the detachable connection between the inner side plate support cylinder body (2030401) and the multi-lobed inner side plate section (20402).

3. The experimental apparatus for collecting cathode evaporates as described in claim 1, characterized in that, Each vertical panel body segment (102) is provided with an axially penetrating vertical panel mounting hole (103) near the outer side wall, and the vertical panel mounting hole (103) corresponds one-to-one with the vertical panel body segment (102). The external fastener (201) comprises, from top to bottom along the axial direction, an upper annular plate (20101), an annular waist (20102), and a lower annular plate (20103) that are coaxially arranged and sequentially fixed together. The structure and size of the upper annular plate (20101) are the same as those of the lower annular plate (20103). The inner diameter of the upper annular plate (20101) is equal to the inner diameter of the annular waist (20102), and the outer diameter of the upper annular plate (20101) is greater than the outer diameter of the annular waist (20102). The upper annular plate (20101) of the fixing component is also provided with a plurality of axially penetrating mounting holes (20104). The mounting holes (20104) of the upper annular plate of the fixing component correspond one-to-one with the mounting holes (103) of the vertical panel and are arranged coaxially. The mounting holes (103) of the vertical panel and the mounting holes (20104) of the upper annular plate of the fixing component are installed by the first bolt (5) to realize the detachable connection between the axial top of the upper annular plate (20101) of the fixing component and the axial bottom of the multi-lobed vertical panel body (102).

4. The experimental apparatus for collecting cathode evaporates as described in claim 3, characterized in that, The annular waist (20102) is coaxially provided with a multi-lobed outer side plate section (20202). The axial top of the multi-lobed outer side plate section (20202) is flush with the axial top of the upper annular plate (20101) of the fixing member, and the axial bottom of the multi-lobed outer side plate section (20202) is flush with the axial bottom of the lower annular plate (20103) of the fixing member. Each outer side plate section (20202) has a radially opened outer side plate section mounting thread blind hole (20203) on its outer side wall. The outer side plate section mounting thread blind hole (20203) corresponds one-to-one with the outer side plate section (20202). The annular waist (20102) has multiple radially penetrating annular waist mounting holes (20105) on its side wall. The annular waist mounting holes (20105) correspond one-to-one with the outer plate sectional mounting threaded blind holes (20203). The outer plate sectional mounting threaded blind holes (20203) and the annular waist mounting holes (20105) are installed by the outer plate sectional mounting screws (6), thereby realizing a detachable connection between the annular waist (20102) and the multi-lobed outer plate sectional (20202). The lower annular plate (20103) of the fixing component is also provided with a plurality of axially penetrating mounting holes (20106), which are evenly distributed circumferentially; the first annular metal plate (20301) is also provided with a plurality of axially penetrating mounting holes (20305), which correspond one-to-one with the mounting holes (20106) of the lower annular plate of the fixing component. The mounting holes (20106) of the lower annular plate of the fixing component and the mounting holes (20305) of the first annular plate of the fixing component are installed by the second bolt (7), thereby realizing a detachable connection between the axial bottom of the lower annular plate (20103) of the fixing component and the axial top of the first annular metal plate (20301). The second annular metal plate (20303) is also provided with a plurality of axially penetrating second annular metal plate mounting holes (20306), which are evenly distributed along the circumference.

5. The experimental apparatus for collecting cathode evaporates as described in claim 4, characterized in that, The cathode assembly (3) includes a cathode assembly support (302). The cathode assembly support (302) includes a third annular metal plate (30201), a second annular insulator (30202), and a fourth annular metal plate (30203) arranged coaxially and fixedly connected in sequence from top to bottom along the axial direction. The inner diameter of the third annular metal plate (30201) and the inner diameter of the second annular insulator (30202) are both equal to the inner diameter of the first annular insulator (20302). The inner diameter of the third annular metal plate (30201) is also larger than the inner diameter of the fourth annular metal plate (30203). The inner diameter of the fourth annular metal plate (30203) is also smaller than the inner diameter of the second annular metal plate (20303). The fourth annular metal plate (30203) is also coaxially provided with a cathode support cylinder (30204). The axial bottom of the outer side wall of the cathode support cylinder (30204) is fixedly connected to the inner side wall of the fourth annular metal plate (30203). The cathode (301) is also coaxially provided with a cathode (301) at the axial top. The axial top of the cathode support cylinder (30204) and the axial bottom of the cathode (301) are detachably connected. The third annular metal plate (30201) is also provided with a plurality of axially penetrating third annular metal plate mounting holes (30205). The third annular metal plate mounting holes (30205) correspond one-to-one with the second annular metal plate mounting holes (20306). The second annular metal plate mounting holes (20306) and the third annular metal plate mounting holes (30205) are installed by third bolts (8) to realize a detachable connection between the axial bottom of the second annular metal plate (20303) and the axial top of the third annular metal plate (30201).

6. The experimental apparatus for collecting cathode evaporates as described in claim 1, characterized in that, The vertical panel body segment (102) has a number of lobes greater than or equal to 2, and the surface roughness of the axial bottom end face of each lobe of the vertical panel body segment (102) is equal to 1.6 micrometers. The number of petals in the outer side plate segment (20202) is greater than or equal to 2, and the surface roughness of the inner sidewall of each petal of the outer side plate segment (20202) is equal to 1.6 micrometers; The inner side plate segment (20402) has a number of lobes greater than or equal to 2, and the surface roughness of the inner side wall of each lobe of the inner side plate segment (20402) is equal to 1.6 micrometers.

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