A carousel aerosol particle velocimeter

CN121741220BActive Publication Date: 2026-10-16江苏富乐华功率半导体研究院有限公司
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202512002911.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2025-12-29
Publication Date
2026-10-16
Estimated Expiration
2045-12-29

AI Technical Summary

Technical Problem

而纹影测试系统又无法直接测量粒子的速度,主要用于流场可视化,定性或半定量分析流体流速不符合我们的使用需求;且纹影光路搭建费时费力

Benefits of technology

1、通过旋转组件带动基板转动,配合粒子沉积轨迹的偏移距离与区域宽度计算速度,操作便捷且结果精准,同时此装置搭建成本远低于传统光学测速系统。

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN121741220B_ABST
    Figure CN121741220B_ABST
Patent Text Reader

Abstract

The application discloses a rotary disc type aerosol particle speed measuring device and relates to the technical field of speed measurement. The speed measuring device comprises a rotating motor, an upper disc, a ceramic deposition substrate, a deposition plate mounting fastener, a rotating shaft, a lower disc, a mounting shell and a cleaning assembly. The rotating motor output end is fastened to the rotating shaft, the rotating shaft is fastened to the deposition plate mounting fastener, the deposition plate mounting fastener is fastened to the upper disc, the deposition plate mounting fastener is fastened to the ceramic deposition substrate, the upper disc abuts against the ceramic deposition substrate, the rotating shaft is fastened to the lower disc, the rotating motor is fastened to the mounting shell, the ceramic deposition substrate is located below the upper disc, and the deposition plate mounting fastener is connected to the cleaning assembly.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This invention relates to the field of speed measuring device technology, specifically a rotary aerosol particle speed measuring device. Background Technology

[0002] During aerosol deposition, due to process characteristics, powder particles under high pressure differential conditions move at supersonic speeds. Simultaneously, particle velocity is a crucial parameter in aerosol deposition and needs to be characterized. However, schlieren testing systems cannot directly measure particle velocity; they are primarily used for flow field visualization, and their qualitative or semi-quantitative analysis of fluid velocity does not meet our requirements. Furthermore, schlieren optical path setup is time-consuming and labor-intensive. Traditional ultra-high-speed camera velocimetry systems are expensive and struggle to accurately visualize and measure high-density aerosols.

[0003] Meanwhile, existing aerosol particle velocimetry devices suffer from problems such as incomplete cleaning of residual particles on the substrate after velocimetry and low cleaning efficiency. Residual particles can interfere with the accuracy of subsequent velocimetry measurements, and there is a lack of targeted and precise cleaning mechanisms, making it difficult to adapt to the cleaning needs of particles with different levels of accumulation. In addition, excess undeposited particles can easily accumulate in the device, causing secondary pollution and affecting the long-term stable operation of the device. Summary of the Invention

[0004] The purpose of this invention is to provide a rotary aerosol particle velocity measuring device to solve the problems raised in the prior art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: A technical solution for a rotary aerosol particle velocimeter includes a rotary motor, an upper plate, a ceramic deposition substrate, deposition plate mounting fasteners, a rotating shaft, a lower plate, a mounting shell, and a cleaning assembly. The output end of the rotary motor is fastened to the rotating shaft, the rotating shaft is fastened to the deposition plate mounting fasteners, the deposition plate mounting fasteners are fastened to the upper plate, the deposition plate mounting fasteners are fastened to the ceramic deposition substrate, the upper plate and the ceramic deposition substrate abut against each other, the rotating shaft is fastened to the lower plate, the rotary motor is fastened to the mounting shell, the ceramic deposition substrate is located below the upper plate, and the deposition plate mounting fasteners are connected to the cleaning assembly.

[0006] The mounting housing serves as the primary mounting base for positioning other components. Initially, the rotational speed range of the rotary motor is determined based on the approximate velocity of the aerosol particles. The set rotational motor outputs torque to drive the rotating shaft, which in turn drives the upper plate. The upper plate, via fasteners mounted on the deposition plate, drives the ceramic deposition substrate to rotate. The rotating shaft then drives the lower plate, allowing aerosol particles to enter from below the lower plate and ultimately impact the ceramic deposition substrate. After stabilization, the deposition is maintained for a period of time before the device is shut down. The deposition offset distance and area width are measured, and the velocity range of the aerosol particles is calculated. After measurement, the aerosol particles on the ceramic deposition substrate are cleaned using the cleaning components and the rotating shaft for future use.

[0007] Furthermore, the cleaning component includes a fixing block, a first fixing cylinder, a detection component, a vibration component, a second fixing cylinder, and a brush. The fixing block and the deposition plate are rotatably connected by fasteners. The fixing block is provided with a first mounting cavity and a second mounting cavity. The bottom of the first mounting cavity is provided with a first fixing cylinder, and the bottom of the second mounting cavity is provided with a second fixing cylinder. The output end of the first fixing cylinder is fastened to the detection component, the second fixing cylinder is fastened to the vibration component, and the brush is connected to the detection component. There are multiple first fixing cylinders and multiple second fixing cylinders.

[0008] The first and second mounting cavities provide a mounting base for other components. When cleaning the ceramic deposition substrate is required, the rotating shaft drives the ceramic deposition substrate to rotate, and the output of the first fixed cylinder drives the detection component to move. At the same time, the detection component drives the brush to move until the brush contacts the ceramic deposition substrate. Simultaneously, the second fixed cylinder drives the vibration component to move until the vibration component contacts the ceramic deposition substrate. The rotation of the shaft allows the brush to clean the ceramic deposition substrate. At the same time, the detection component can detect the accumulation of aerosol particles near the location through the brush signal. The detection component sends the detected signal to the vibration component, which adjusts the vibration power. The vibration of the vibration component shakes off the difficult-to-clean aerosol particles on the ceramic deposition substrate for cleaning.

[0009] Furthermore, there are several detection components and several vibration components, with each detection component connected to a different vibration component.

[0010] By setting up multiple detection and vibration components, precise detection and targeted cleaning of different areas on the surface of the ceramic deposition substrate can be achieved. When the ceramic deposition substrate rotates with the shaft, multiple detection components can simultaneously cover a wider cleaning range, avoiding cleaning blind spots caused by insufficient coverage of a single detection component. At the same time, each detection component corresponds to an independent vibration component. If a thick accumulation of aerosol particles is detected in a certain area, the vibration component corresponding to that area can increase its vibration power. Through high-frequency vibration, stubborn particles are detached from the substrate surface. Combined with the physical cleaning of the brush, the cleaning efficiency and cleanliness are greatly improved, ensuring that the accuracy of the deposition trajectory during subsequent speed measurement is not affected by residual particles.

[0011] Furthermore, the detection assembly includes a detection body, a circular plate, a magnet, an electromagnetic coil, and a return spring. The detection body has a third mounting cavity and mounting holes, which are connected. There are several mounting holes. The third mounting cavity contains a circular plate, a magnet, an electromagnetic coil, and a return spring. The circular plate and the third mounting cavity are slidably connected. The return spring and the third mounting cavity are fastened together. The end of the return spring away from the third mounting cavity is fastened to the circular plate. The electromagnetic coil is fastened to the third mounting cavity. The magnet is fastened to the circular plate. The magnet is placed inside the electromagnetic coil. A brush is provided inside the mounting hole. The brush passes through the mounting hole and is fastened to the circular plate. The electromagnetic coil is electrically connected to an adjacent vibration assembly.

[0012] The third mounting cavity serves as the primary mounting base for positioning other components. When aerosol particles adhere to the surface of the ceramic deposition substrate, the brush experiences resistance from these particles as it rotates with the shaft. This resistance is transmitted through the brush to the circular plate, causing a slight displacement of the plate within the third mounting cavity. This displacement moves the magnet inside the electromagnetic coil, altering the magnetic flux and inducing an electrical signal related to the resistance. This signal is transmitted in real-time to the adjacent vibration component, serving as a basis for adjusting the vibration power. When the particle buildup is thick, increasing resistance, the change in magnetic flux is more significant, and the intensity of the electrical signal output by the electromagnetic coil increases accordingly. Upon receiving the enhanced signal, the vibration component increases its vibration power, using high-frequency vibration to assist the brush in removing stubborn particles. When the resistance decreases, the electrical signal weakens, and the vibration component automatically reduces its power to prevent excessive vibration from damaging the ceramic deposition substrate surface. The reset spring, when the brush leaves the resistance area (e.g., after particles are removed), pushes the circular plate and magnet back to their initial state, ensuring accurate detection of particle buildup in subsequent areas.

[0013] Furthermore, the vibration assembly includes a vibration motor and a vibration block. The output end of the vibration motor and the second fixed cylinder are fastened together. The output end of the vibration motor and the vibration block are fastened together. The electromagnetic coil and the vibration motor are electrically connected.

[0014] As the core power component, the vibration motor can adjust its output power according to the electrical signal transmitted by the electromagnetic coil. When the detection component detects that aerosol particles have accumulated in a certain area of ​​the ceramic deposition substrate, the intensity of the electrical signal output by the electromagnetic coil increases. After receiving the enhanced signal, the vibration motor increases its speed and drives the vibrating block to generate high-frequency vibration through the output end. The vibrating block directly contacts the surface of the ceramic deposition substrate and transfers the vibration energy to the substrate, causing the attached stubborn particles to loosen or even detach from the surface due to vibration. At this time, in conjunction with the physical cleaning of the brush, the loosened particles can be quickly removed.

[0015] Furthermore, a slit is provided on the lower plate.

[0016] The slits allow aerosol particles to pass through and be deposited onto the ceramic substrate.

[0017] Furthermore, an aerosol generator is installed below the lower plate.

[0018] The aerosol generator can stably produce aerosol particle streams with uniform particle size and controllable concentration. As the particle stream moves upward, it needs to pass through the slits of the lower plate in sequence and then hit the rotating ceramic deposition substrate, which facilitates subsequent velocity measurement and calculation.

[0019] Furthermore, the mounting housing is equipped with an exhaust pipe located below the upper plate.

[0020] The exhaust pipe is connected to an air pump. The air pump creates negative pressure below the upper plate, which allows the exhaust pipe to promptly remove excess aerosol particles that have not been deposited on the ceramic deposition substrate, thus preventing particles from accumulating inside the mounting housing and causing secondary pollution.

[0021] Compared with the prior art, the beneficial effects of the present invention are: 1. By rotating the substrate through the rotating component, and combining the offset distance and area width of the particle deposition trajectory with the calculation speed, the operation is convenient and the results are accurate. At the same time, the construction cost of this device is much lower than that of traditional optical velocimetry systems.

[0022] 2. The cleaning components enable intelligent and precise cleaning. Multiple detection components work in conjunction with the vibration components to detect particle accumulation and adjust the vibration power. The combination of brush cleaning and vibration stripping eliminates blind spots and avoids residual interference with the next speed measurement.

[0023] 3. The detection component uses changes in magnetic flux to provide feedback on the resistance signal, the reset spring ensures detection accuracy, and the vibration component adjusts its power as needed, which improves the cleaning effect while avoiding damage to the substrate. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2This is a schematic diagram of the aerosol generator structure of the present invention; Figure 3 This is a schematic diagram of the rotary motor structure of the present invention; Figure 4 This is a schematic diagram of the cleaning component structure of the present invention; Figure 5 This is a schematic diagram of the fixing block structure of the present invention; Figure 6 This is a schematic diagram of the detection body structure of the present invention; Figure 7 for Figure 6 A magnified view of part A.

[0025] In the diagram: 1. Rotary motor; 2. Upper plate; 3. Ceramic deposition substrate; 4. Deposition plate mounting fastener; 5. Rotating shaft; 6. Lower plate; 61. Slit; 7. Mounting shell; 71. Exhaust pipe; 8. Cleaning assembly; 81. Fixing block; 811. First mounting cavity; 812. Second mounting cavity; 82. First fixing cylinder; 83. Detection assembly; 831. Detection body; 8311. Third mounting cavity; 8312. Mounting hole; 832. Circular plate; 833. Magnet; 834. Electromagnetic coil; 835. Return spring; 84. Vibration assembly; 841. Vibration motor; 842. Vibration block; 85. Second fixing cylinder; 86. Brush; 9. Aerosol generator. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Example: Figures 1-7 As shown, the present invention provides a technical solution for a rotary aerosol particle velocity measuring device. The velocity measuring device includes a rotary motor 1, an upper plate 2, a ceramic deposition substrate 3, a deposition plate mounting fastener 4, a rotating shaft 5, a lower plate 6, a mounting shell 7, and a cleaning assembly 8. The output end of the rotary motor 1 is fastened to the rotating shaft 5, the rotating shaft 5 is fastened to the deposition plate mounting fastener 4, the deposition plate mounting fastener 4 is fastened to the upper plate 2, the deposition plate mounting fastener 4 is fastened to the ceramic deposition substrate 3, the upper plate 2 and the ceramic deposition substrate 3 abut against each other, the rotating shaft 5 is fastened to the lower plate 6, the rotary motor 1 is fastened to the mounting shell 7, the ceramic deposition substrate 3 is located below the upper plate 2, and the deposition plate mounting fastener 4 is connected to the cleaning assembly 8.

[0028] Mounting housing 7 serves as the main mounting base for positioning other components. Initially, the rotational speed range of rotary motor 1 is determined based on the approximate velocity of the aerosol particles. The rotational torque output by rotary motor 1 drives shaft 5 to rotate, which in turn drives upper plate 2. Upper plate 2, via fasteners 4 mounted on the deposition plate, drives ceramic deposition substrate 3 to rotate. The rotation of shaft 5 drives lower plate 6 to rotate, and then aerosol particles enter from below lower plate 6 and ultimately impact the ceramic deposition substrate 3. After stabilization, deposition is maintained for a period of time, and then the device is shut down. The deposition offset distance and area width are measured, and the velocity range of the aerosol particles is calculated. After the measurement is completed, the aerosol particles on the ceramic deposition substrate 3 are cleaned using cleaning component 8 and shaft 5 for future use.

[0029] like Figures 3-6 As shown, the cleaning component 8 includes a fixing block 81, a first fixing cylinder 82, a detection component 83, a vibration component 84, a second fixing cylinder 85, and a brush 86. The fixing block 81 and the sedimentation plate mounting fastener 4 are rotatably connected. The fixing block 81 is provided with a first mounting cavity 811 and a second mounting cavity 812. The first fixing cylinder 82 is provided at the bottom of the first mounting cavity 811, and the second fixing cylinder 85 is provided at the bottom of the second mounting cavity 812. The output end of the first fixing cylinder 82 is fastened to the detection component 83, the second fixing cylinder 85 is fastened to the vibration component 84, and the brush 86 is connected to the detection component 83. There are several first fixing cylinders 82 and several second fixing cylinders 85.

[0030] The first mounting cavity 811 and the second mounting cavity 812 provide a mounting base for other components. When it is necessary to clean the ceramic deposition substrate 3, the rotating shaft 5 drives the ceramic deposition substrate 3 to rotate. The output of the first fixed cylinder 82 drives the detection component 83 to move. At the same time, the detection component 83 drives the brush 86 to move until the brush 86 contacts the ceramic deposition substrate 3. Simultaneously, the second fixed cylinder 85 drives the vibration component 84 to move until the vibration component 84 contacts the ceramic deposition substrate 3. The rotation of the rotating shaft 5 allows the brush 86 to clean the ceramic deposition substrate 3. At the same time, the detection component 83 can detect the accumulation of aerosol particles near the location through the signal of the brush 86. The detection component 83 sends the detected signal to the vibration component 84. The vibration component 84 adjusts the vibration power. The vibration of the vibration component 84 shakes off the aerosol particles that are difficult to clean from the ceramic deposition substrate 3 and then cleans them.

[0031] like Figure 4 and Figure 5 As shown, there are several detection components 83 and several vibration components 84, and the several detection components 83 are connected to the several vibration components 84 respectively.

[0032] By setting up multiple detection components 83 and vibration components 84, precise detection and targeted cleaning of different areas on the surface of the ceramic deposition substrate 3 can be achieved. When the ceramic deposition substrate 3 rotates with the rotating shaft 5, multiple detection components 83 can simultaneously cover a wider cleaning range, avoiding cleaning blind spots caused by insufficient coverage of a single detection component 83. At the same time, each detection component 83 corresponds to an independent vibration component 84. If a thick accumulation of aerosol particles is detected in a certain area, the vibration component 84 corresponding to that area can increase its vibration power independently. Through high-frequency vibration, stubborn particles are removed from the substrate surface. Combined with the physical cleaning of the brush 86, the cleaning efficiency and cleanliness are greatly improved, ensuring that the accuracy of the deposition trajectory during subsequent speed measurement is not affected by residual particles.

[0033] like Figures 4-7 As shown, the detection assembly 83 includes a detection body 831, a circular plate 832, a magnet 833, an electromagnetic coil 834, and a return spring 835. The detection body 831 has a third mounting cavity 8311 and mounting holes 8312, which communicate with each other. There are several mounting holes 8312. The third mounting cavity 8311 contains the circular plate 832, the magnet 833, the electromagnetic coil 834, and the return spring 835. The circular plate 832 and the third mounting cavity 8311 are slidably connected. The position spring 835 is fastened to the third mounting cavity 8311. The end of the return spring 835 away from the third mounting cavity 8311 is fastened to the circular plate 832. The electromagnetic coil 834 is fastened to the third mounting cavity 8311. The magnet 833 is fastened to the circular plate 832. The magnet 833 is placed inside the electromagnetic coil 834. A brush 86 is provided in the mounting hole 8312. The brush 86 passes through the mounting hole 8312 and is fastened to the circular plate 832. The electromagnetic coil 834 is electrically connected to the adjacent vibration component 84.

[0034] The third mounting cavity 8311 serves as the primary mounting base for positioning other components. When aerosol particles adhere to the surface of the ceramic deposition substrate 3, the brush 86 experiences resistance from these particles as it rotates with the shaft 5. This resistance is transmitted through the brush 86 to the circular plate 832, causing a slight displacement of the circular plate 832 within the third mounting cavity 8311. This displacement of the circular plate 832 drives the magnet 833 to move within the electromagnetic coil 834, altering the magnetic flux within the electromagnetic coil 834. Consequently, the electromagnetic coil 834 induces an electrical signal related to the magnitude of the resistance. This electrical signal is transmitted in real-time to the adjacent vibration component 84 to regulate vibration. Based on the rate, when the particle accumulation is thick and the resistance increases, the change in magnetic flux is more significant, and the intensity of the electrical signal output by the electromagnetic coil 834 increases accordingly. After receiving the enhanced signal, the vibration component 84 increases the vibration power, and the high-frequency vibration assists the brush 86 in removing stubborn particles. When the resistance decreases, the electrical signal weakens, and the vibration component 84 automatically reduces the power to avoid excessive vibration damaging the surface of the ceramic deposition substrate 3. The reset spring 835 pushes the circular plate 832 and the magnet 833 to reset when the brush 86 leaves the resistance area (such as after the particles are removed), so that the detection component 83 returns to its initial state, ensuring accurate detection of particle accumulation in subsequent areas.

[0035] like Figure 5 As shown, the vibration assembly 84 includes a vibration motor 841 and a vibration block 842. The output end of the vibration motor 841 and the second fixed cylinder 85 are fastened together. The output end of the vibration motor 841 and the vibration block 842 are fastened together. The electromagnetic coil 834 is electrically connected to the vibration motor 841.

[0036] As the core power component, the vibration motor 841 can adjust its output power according to the electrical signal transmitted by the electromagnetic coil 834. When the detection component 83 detects that the aerosol particles in a certain area of ​​the ceramic deposition substrate 3 are thickly accumulated, the intensity of the electrical signal output by the electromagnetic coil 834 increases. After receiving the enhanced signal, the vibration motor 841 increases its speed and drives the vibrating block 842 to generate high-frequency vibration through the output end. The vibrating block 842 directly contacts the surface of the ceramic deposition substrate 3 and transmits the vibration energy to the substrate, causing the attached stubborn particles to loosen or even detach from the surface due to vibration. At this time, in conjunction with the physical cleaning of the brush 86, the loosened particles can be quickly removed.

[0037] like Figures 1-3 As shown, a slit 61 is provided on the lower plate 6.

[0038] The slit 61 allows aerosol particles to pass through and hit the ceramic deposition substrate 3.

[0039] like Figures 1-2 As shown, an aerosol generator 9 is located below the lower plate 6.

[0040] The aerosol generator 9 can stably generate aerosol particle streams with uniform particle size and controllable concentration. When the particle stream moves upward, it needs to pass through the slit 61 of the lower plate 6 in sequence, and then hit the rotating ceramic deposition substrate 3, which facilitates subsequent velocity measurement and calculation.

[0041] like Figures 1-2 As shown, the mounting housing 7 is provided with an exhaust pipe 71, which is located below the upper plate 2.

[0042] The exhaust pipe 71 is connected to an air pump. The air pump creates a negative pressure below the upper plate 2, which allows the exhaust pipe 71 to promptly discharge excess aerosol particles that have not been deposited on the ceramic deposition substrate 3, thus preventing particles from accumulating inside the mounting shell 7 and causing secondary pollution.

[0043] Working principle of the invention: Initially, the rotation speed of the rotary motor 1 is adjusted according to the particle velocity range. The motor drives the rotating shaft 5 to rotate the upper plate 2, ceramic deposition substrate 3, and lower plate 6 synchronously. The particle stream generated by the aerosol generator 9 passes through the slit 61 of the lower plate 6 and deposits on the rotating ceramic deposition substrate 3. After stabilization, the device is turned off. The particle velocity can be calculated by measuring the deposition offset distance and area width. After the calculation is completed, the rotating shaft 5 drives the ceramic deposition substrate 3 to rotate. The first fixed cylinder 82 pushes the detection component 83 to make the brush 86 fit tightly against the ceramic deposition substrate 3. The second fixed cylinder 85 pushes the vibration component 84 to also fit against the ceramic deposition substrate 3. The brush 86 rotates with the rotating shaft 5 to clean. The detection component 83 judges the amount of particles by the force on the brush 86 and sends a signal to the vibration component 84 to adjust the power—increasing the vibration when the particles are thicker. The smaller the resistance, the less the stubborn particles. The vibration-assisted brush 86 cleans the stubborn particles in the detection component 83. When the brush 86 encounters resistance, it pushes the circular plate 832, which drives the magnet 833 to move in the electromagnetic coil 834. This changes the magnetic flux and generates an electrical signal to the vibration component 84. The greater the resistance (thicker particles), the stronger the signal and the higher the vibration power; the smaller the resistance (fewer particles), the weaker the signal and the lower the power. The reset spring 835 pushes the circular plate 832 back to its original position after the resistance disappears, ensuring accurate detection next time. The vibration motor 841 adjusts its speed by connecting to the signal from the electromagnetic coil 834: the stronger the signal, the faster it rotates, driving the vibration block 842 to vibrate at high frequency, loosening the stubborn particles on the ceramic deposition substrate 3. This, combined with the brush 86, quickly removes the particles. Finally, a negative pressure is formed under the upper plate 2 through the exhaust pipe 71, which promptly removes the undeposited particles and prevents dust accumulation and contamination in the device.

[0044] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A rotary aerosol particle velocimetry device, characterized in that: The speed measuring device includes a rotary motor (1), an upper plate (2), a ceramic deposition substrate (3), a deposition plate mounting fastener (4), a rotating shaft (5), a lower plate (6), a mounting shell (7), and a cleaning assembly (8). The output end of the rotary motor (1) is fastened to the rotating shaft (5). The rotating shaft (5) is fastened to the deposition plate mounting fastener (4). The deposition plate mounting fastener (4) is fastened to the upper plate (2). The deposition plate mounting fastener (4) is fastened to the ceramic deposition substrate (3). The upper plate (2) and the ceramic deposition substrate (3) abut against each other. The deposition plate mounting fastener (4) is fastened to the lower plate (6). The rotary motor (1) is fastened to the mounting shell (7). The ceramic deposition substrate (3) is located below the upper plate (2). The deposition plate mounting fastener (4) is connected to the cleaning assembly (8). The cleaning assembly (8) includes a detection assembly (83), a vibration assembly (84), and a brush (86). The detection assembly (83) includes a detection body (831), a circular plate (832), a magnet (833), an electromagnetic coil (834), and a return spring (835). The detection body (831) has a third mounting cavity (8311) and mounting holes (8312) inside. The mounting holes (8312) and the third mounting cavity (8311) are connected. There are several mounting holes (8312). The third mounting cavity (8311) has a circular plate (832), a magnet (833), an electromagnetic coil (834), and a return spring (835). The circular plate (832) and the third mounting cavity (8311) are connected. The three mounting cavities (8311) are slidably connected. The return spring (835) is fastened to the third mounting cavity (8311). The end of the return spring (835) away from the third mounting cavity (8311) is fastened to the circular plate (832). The electromagnetic coil (834) is fastened to the third mounting cavity (8311). The magnet (833) is fastened to the circular plate (832). The magnet (833) is placed inside the electromagnetic coil (834). A brush (86) is provided in the mounting hole (8312). The brush (86) passes through the mounting hole (8312) and is fastened to the circular plate (832). The electromagnetic coil (834) is electrically connected to the adjacent vibration component (84).

2. The rotary aerosol particle velocimetry device according to claim 1, characterized in that: The cleaning component (8) further includes a fixing block (81), a first fixing cylinder (82), and a second fixing cylinder (85). The fixing block (81) and the deposition plate mounting fastener (4) are rotatably connected. The fixing block (81) is provided with a first mounting cavity (811) and a second mounting cavity (812). The bottom of the first mounting cavity (811) is provided with a first fixing cylinder (82), and the bottom of the second mounting cavity (812) is provided with a second fixing cylinder (85). The output end of the first fixing cylinder (82) is fastened to the detection component (83), and the second fixing cylinder (85) is fastened to the vibration component (84). There are several first fixing cylinders (82) and several second fixing cylinders (85).

3. The rotary aerosol particle velocimetry device according to claim 2, characterized in that: There are several detection components (83) and several vibration components (84), and several detection components (83) are connected to several vibration components (84) respectively.

4. The rotary aerosol particle velocimetry device according to claim 3, characterized in that: The vibration assembly (84) includes a vibration motor (841) and a vibration block (842). The vibration motor (841) is fastened to the output end of the second fixed cylinder (85). The output end of the vibration motor (841) and the vibration block (842) are fastened together. The electromagnetic coil (834) is electrically connected to the vibration motor (841).

5. The rotary aerosol particle velocimetry device according to claim 1, characterized in that: The lower plate (6) is provided with a slit (61).

6. The rotary aerosol particle velocimetry device according to claim 1, characterized in that: An aerosol generator (9) is provided below the lower plate (6).

7. The rotary aerosol particle velocimetry device according to claim 1, characterized in that: The mounting housing (7) is provided with an exhaust pipe (71), which is located below the upper plate (2).

Citation Information

Patent Citations

  • Substrate cleaning device

    CN117198927A

  • Method and apparatus for collecting fine particles by particle size

    JP2007278912A

  • Aerosol Collection Apparatus and Methods

    US20120174650A1