A turning-milling combined machine tool for semiconductor precision parts processing and a processing method thereof

Abstract

The application relates to the technical field of semiconductor manufacturing equipment, and particularly discloses a turning and milling combined machine tool for processing semiconductor precision parts and a processing method thereof, which comprises a machine tool body, a protective cover is fixedly connected to the upper side of the machine tool body, a tool seat is arranged in the protective cover, a plurality of installation grooves are formed in the bottom end of the tool seat, a tool head mechanism is fixedly connected to the inside of the installation grooves, a switching mechanism is arranged on one side of the tool seat, the tool seat is integrated with multiple groups of double-tool mechanisms, covers multiple types of processing, does not need an external tool magazine, can change tools by rotating, cooperates with a monitoring mechanism to realize quick switching of worn tools, reduces positioning errors, guarantees continuous processing, avoids workpiece scrapping, realizes synchronous adjustment of multiple tools through a single power source, improves tool changing efficiency, shortens downtime, guarantees that positions are consistent after switching, improves processing precision uniformity, and adapts to the demand of semiconductor precision processing.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing equipment technology, and in particular to a milling and turning machine tool for machining precision semiconductor components and its machining method. Background Technology

[0002] Precision semiconductor components are the core foundation of semiconductor equipment. They refer to key components that meet the stringent requirements of semiconductor manufacturing in terms of materials, structure, precision, and stability. They are used to build the equipment framework, ensure the reaction environment, or achieve precise control. They cover various types such as metal parts and ceramic parts and are widely used in core processes such as photolithography and etching. Milling and turning composite machine tools are required for processing.

[0003] For example, Chinese patent CN220782908U discloses a large gantry milling machine with a vertical lathe disc, including a machine table, disc base, rotary table, clamping block, rotating shaft, motor B, transmission chamber, gear B and gear A. The above-mentioned equipment facilitates quick clamping of workpieces. However, when the tool head assembly completes workpiece processing and needs to switch to different processing steps such as punching, grinding and milling, it needs to rely on the built-in station disc-type tool magazine to perform tool changing operations. The operation process is cumbersome and time-consuming. At the same time, existing equipment generally lacks a real-time wear monitoring structure for the tool head assembly, which cannot predict the wear state of the tool head in advance and cannot replace the spare tool head in time. This significantly prolongs the equipment downtime, reduces the overall processing efficiency, and may cause the processed workpiece to be scrapped due to the failure to detect tool head damage in time. Summary of the Invention

[0004] The purpose of this invention is to provide a milling and turning composite machine tool and its processing method for machining precision semiconductor components, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides a milling and turning composite machine tool for machining precision semiconductor components, comprising a machine tool body, a protective cover fixedly connected to the upper side of the machine tool body, a tool holder provided inside the protective cover, a mounting groove provided at the bottom of the tool holder, and multiple mounting grooves provided, a tool head mechanism fixedly connected inside the mounting groove, a switching mechanism provided on one side of the tool holder, and multiple tool head mechanisms connected through the switching mechanism, a monitoring mechanism fixedly connected to one side of the inside of the machine tool body, a support mechanism fixedly connected to the inside of the machine tool body below the tool holder, a controller fixedly connected to one side of the protective cover, a door hinged to one side of the protective cover, and a first... A linear motor assembly is provided. Inside the protective cover, a first screw seat is slidably connected to the upper side of the tool holder via a first linear motor assembly. A fixing frame is fixedly connected to the bottom end of the first screw seat. A second linear motor assembly is provided on one side of the fixing frame. A second screw seat is slidably connected to the lower side of the fixing frame via the second linear motor assembly. A fourth motor is fixedly connected inside the second screw seat. A first cylinder is fixedly connected to the output end of the fourth motor. A third circular block is fixedly connected to the output end of the first cylinder. A second shock absorber is fixedly connected to the bottom end of the third circular block, and multiple second shock absorbers are provided. A fourth circular block is fixedly connected to the bottom end of the second shock absorber. The bottom end of the fourth circular block is fixedly connected to the top end of the tool holder.

[0006] Furthermore, the cutting head mechanism includes a rotating block, which is rotatably connected to the inside of the mounting slot via a switching mechanism. A first motor is fixedly connected to both sides of the rotating block. The output end of the first motor is provided with a machining tool. Both machining tools can be rotatably extended out of the mounting slot. A first circular block is fixedly connected to the output end of the first motor. A first shock absorber is fixedly connected to one side of the first circular block. Multiple first shock absorbers are provided. A second circular block is fixedly connected to the side of the first shock absorber away from the first circular block. The machining tool is fixedly connected to the second circular block by bolts.

[0007] Furthermore, the switching mechanism includes a first power assembly, which is located on one side of the top of the tool holder. A driven gear is rotatably connected to the tool holder via the first power assembly. Multiple driven gears are provided. A first shaft is fixedly connected to one side of each driven gear, and the first shaft is rotatably connected to the tool holder. A driving bevel is fixedly connected to the side of the first shaft away from the driven gear. A driven bevel is meshed with one side of the driving bevel. A second shaft is fixedly connected to one side of the driven bevel. The rotating block is rotatably connected to the inside of the mounting slot via the second shaft. The first power assembly includes a second motor, which is fixedly connected to one side of the top of the tool holder. A driving gear is fixedly connected to the output end of the second motor. A gear ring is meshed with one side of the driving gear. Multiple driven gears are all meshed with the gear ring.

[0008] Furthermore, the monitoring mechanism includes a second power assembly, which is fixedly connected to one side of the inner side of the protective cover. A lifting plate is connected to one side of the second power assembly. An industrial camera is fixedly connected to one end of the lifting plate, and a laser rangefinder is fixedly connected to the other end of the lifting plate. The second power assembly includes a fixed plate, which is fixedly connected to one side of the inner side of the protective cover. Lead screws are rotatably connected to both sides of the inner side of the fixed plate. Both sides of the lifting plate are threadedly connected to the lead screws. A third motor is fixedly connected to one side of the top of the fixed plate. A linkage rod is fixedly connected to the output end of the third motor. The linkage rod is rotatably connected to the fixed plate through the third motor. Worms are fixedly connected to both sides of the linkage rod. A worm gear is meshed with one side of the worm gear, and the worm gear is fixedly connected to the side of the lead screw extending out of the fixed plate.

[0009] Furthermore, a first linear motor assembly is provided on one side of the protective cover. Inside the protective cover, a first screw seat is slidably connected to the upper side of the tool holder via the first linear motor assembly. A fixing frame is fixedly connected to the bottom end of the first screw seat. A second linear motor assembly is provided on one side of the fixing frame. A second screw seat is slidably connected to the lower side of the fixing frame via the second linear motor assembly. A fourth motor is fixedly connected inside the second screw seat. A first cylinder is fixedly connected to the output end of the fourth motor. A third circular block is fixedly connected to the output end of the first cylinder. A second shock absorber is fixedly connected to the bottom end of the third circular block, and multiple second shock absorbers are provided. A fourth circular block is fixedly connected to the bottom end of the second shock absorber. The bottom end of the fourth circular block is fixedly connected to the top end of the tool holder.

[0010] Furthermore, the support mechanism includes a fifth motor, which is fixedly connected inside the protective cover. The output end of the fifth motor is fixedly connected to a support plate, and the support plate is offset from directly below the tool holder. A second cylinder is fixedly connected to both sides of the top of the support plate. A clamping plate is fixedly connected to the output end of the second cylinder, and the clamping plate is slidably connected to the support plate through the second cylinder.

[0011] A machining method for precision semiconductor components using a milling and turning machine tool includes the following steps: S1. Based on the material, size, processing accuracy and process requirements of the semiconductor precision parts to be processed, the controller presets the processing parameters and starts the switching mechanism. The rotating block of the cutter head mechanism is driven to rotate through the drive gear, gear ring, driven gear, shaft and bevel gear, so that one of the processing tools of the multiple cutter head mechanisms extends out of the mounting slot to the working position. S2. Open the protective cover door, place the precision semiconductor component to be processed stably in the clamping area of ​​the support plate of the support mechanism and center it to match the processing trajectory. After closing the cover door, control the second cylinder through the controller to drive the clamping plate to move towards each other to clamp and fix the workpiece. S3. Start the monitoring mechanism. Drive the lead screw to rotate through the third motor, linkage rod, worm gear and worm wheel, which will move the lifting plate up and down to adjust the industrial camera and laser range sensor to the best monitoring position for the working tool. S4. By coordinating the actions of the first linear motor assembly, the second linear motor assembly, the fourth motor and the first cylinder through the controller, the X-axis, Y-axis and Z-axis directions and angles of the tool holder are precisely adjusted, and the machining tool is moved to the workpiece machining start position. S5. Start the first motor to drive the machining tool to rotate, start the fifth motor to drive the workpiece to rotate to complete the turning, and use the fourth motor to adjust the position of the tool head mechanism to switch tools to complete composite machining such as milling and punching. During the machining process, the monitoring mechanism continuously monitors the tool status. S6. When the monitoring mechanism detects that the tool wear reaches the preset threshold, the controller starts the switching mechanism to drive the corresponding tool head mechanism rotating block to rotate, collect the worn tool and switch the same group of spare tools to the working position. The switching process does not stop the machine. S7. After processing is completed, open the protective cover door to remove the workpiece, clean the chips and cutting fluid from the processing area, check the status of each mechanism and reset it.

[0012] Compared with the prior art, the beneficial effects of the present invention are: Firstly, in this invention, multiple tool head mechanisms are integrated on the tool holder, with each group of tool head mechanisms equipped with the same type of machining tools on both sides. Different groups of tool head mechanisms are configured with different types of machining tools, such as punching, grinding, and milling tools. Compared to the existing technology that relies on an external disc-type tool magazine for tool changing, the integrated tool design of this invention eliminates the need for cumbersome steps such as tool magazine positioning and tool grabbing. Switching of the working tool head can be completed simply by rotating and adjusting the position of the tool head mechanism, greatly simplifying the tool changing operation process and significantly improving the convenience of tool changing. Simultaneously, the real-time monitoring mechanism further enhances this convenience. The wear monitoring function, using an industrial camera and laser rangefinder, can accurately capture the wear and chipping of the cutting tools. Once the wear of the current working tool reaches a preset threshold, the tool head mechanism can be immediately triggered to rotate and switch to a spare tool, eliminating the need to stop the machine and wait for an external tool magazine to retrieve the tool. This not only effectively reduces positioning errors during tool changing and ensures the stability of machining accuracy, but also avoids machining interruptions and semiconductor workpiece scrapping caused by the failure to detect damage to a single tool in time, significantly improving the continuity of the semiconductor machining process.

[0013] Secondly, this invention, by setting up a switching mechanism, achieves synchronous adjustment and batch replacement of multiple sets of different types of machining tools. Compared with the existing technology that requires independent adjustment of each individual tool, this significantly improves tool changing efficiency. The switching mechanism drives the drive gear to rotate through a single power source, which in turn drives multiple driven gears to rotate synchronously through the linkage of the gear ring. Then, through the bevel gear transmission structure, it drives the rotating blocks of each tool head mechanism to move synchronously, enabling multiple sets of machining tools to complete position switching at the same time. This synchronous switching design not only shortens tool changing time and effectively reduces equipment downtime, but also ensures the consistency of the position of each tool after switching, avoiding tool positioning deviations caused by adjusting each set individually. This further improves the uniformity of machining accuracy across multiple processes, enhances overall machining efficiency, and better meets the needs of high-efficiency machining of semiconductor precision components. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 This is a schematic diagram of the inner side structure of the protective cover in this invention; Figure 3 This is a schematic diagram of the structure inside the protective cover in this invention, viewed from below. Figure 4 This is a schematic diagram of the structure below the fixed frame in this invention; Figure 5 This is a bottom view of the tool holder structure in this invention; Figure 6 In this invention Figure 6 A magnified structural diagram at point A; Figure 7 This is a partial structural diagram of the switching mechanism in this invention; Figure 8 This is a schematic diagram of the support mechanism structure in this invention; Figure 9 This is a schematic diagram of the monitoring mechanism structure in this invention; Figure 10 In this invention Figure 9 A magnified structural diagram at point B.

[0015] In the diagram: 1. Machine tool body; 2. Controller; 3. Protective cover; 4. Tool holder; 5. Mounting slot; 6. Tool head mechanism; 61. Rotating block; 62. First motor; 63. Machining tool; 64. First circular block; 65. First shock absorber; 66. Second circular block; 7. Switching mechanism; 71. Driven gear; 72. First shaft; 73. Driving bevel gear; 74. Driven bevel gear; 75. Second shaft; 76. First power assembly; 761. Second motor; 762. Driving gear; 763. Gear ring; 8. Monitoring mechanism; 81. Industrial camera; 82. Laser rangefinder sensor 83. Lifting plate; 84. Second power assembly; 841. Fixing plate; 842. Lead screw; 843. Third motor; 844. Linkage rod; 845. Worm gear; 846. Worm wheel; 9. First linear motor assembly; 10. First screw seat; 11. Fixing frame; 12. Second linear motor assembly; 13. Second screw seat; 14. Fourth motor; 15. First cylinder; 16. Third circular block; 17. Second shock absorber; 18. Fourth circular block; 19. Support mechanism; 191. Fifth motor; 192. Support plate; 193. Second cylinder; 194. Clamping plate. Detailed Implementation

[0016] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0017] Please see Figures 1-10 This invention provides a milling and turning composite machine tool for precision semiconductor component processing, comprising a machine tool body 1, a protective cover 3 fixedly connected to the upper side of the machine tool body 1, a tool holder 4 disposed inside the protective cover 3, a mounting groove 5 provided at the bottom of the tool holder 4, and multiple mounting grooves 5, a tool head mechanism 6 fixedly connected inside the mounting groove 5, a switching mechanism 7 disposed on one side of the tool holder 4, and multiple tool head mechanisms 6 connected through the switching mechanism 7, a monitoring mechanism 8 fixedly connected to one side of the inside of the machine tool body 1, a support mechanism 19 fixedly connected to the inside of the machine tool body 1 below the tool holder 4, a controller 2 fixedly connected to one side of the protective cover 3, and a door hinged to one side of the protective cover 3; multiple tool head mechanisms 6 are integrated on the tool holder 4, and can be quickly switched between different types of processing tools 63 in conjunction with the switching mechanism 7, the monitoring mechanism 8 monitors the tool status in real time, and the coordinated work of all structures greatly improves the continuity of semiconductor component processing.

[0018] Please see Figure 6The cutting head mechanism 6 includes a rotating block 61, which is rotatably connected to the inside of the mounting slot 5 via a switching mechanism 7. A first motor 62 is fixedly connected to both sides of the rotating block 61. The output end of each first motor 62 is equipped with a machining tool 63, and both machining tools 63 can rotatably extend out of the mounting slot 5. A first circular block 64 is fixedly connected to the output end of the first motor 62. A first shock absorber 65 is fixedly connected to one side of the first circular block 64. Multiple first shock absorbers 65 are provided. A second circular block 66 is fixedly connected to the side of the first shock absorber 65 away from the first circular block 64. The machining tool 63 is fixedly connected to the second circular block 66 by bolts. The first motor 62 drives the machining tool 63 to rotate at high speed to process the workpiece. When a spare tool needs to be switched, the switching mechanism 7 drives the rotating block 61 to rotate within the mounting slot 5, rotating the worn machining tool 63 into the mounting slot. The tool 63 is stored in the slot 5, while the spare tool 63 on the other side is rotated to the machining position and extended. The first shock absorber 65 can effectively buffer the vibration generated during the machining process and reduce the impact of vibration on the tool 63 and the workpiece. It should be noted that a laser displacement sensor is installed on one side of the inner wall of each mounting slot 5. The laser displacement sensor works in conjunction with the rotating block 61 to achieve precise adjustment of the tool 63. Specifically, the laser displacement sensor collects the rotation position signal of the rotating block 61 in real time and feeds the signal back to the controller 2 in real time. The controller 2 compares the current position data of the rotating block 61 fed back by the laser displacement sensor with the preset extension position parameters of the tool 63, and precisely controls the power output of the switching mechanism 7, thereby adjusting the rotation angle of the rotating block 61 to ensure that the tool 63 connected to both sides of the rotating block 61 can accurately extend from the mounting slot 5 to the preset working position.

[0019] Please see Figures 6-7The switching mechanism 7 includes a first power assembly 76, which is located on one side of the top of the tool holder 4. A driven gear 71 is rotatably connected to the tool holder 4 via the first power assembly 76. Multiple driven gears 71 are provided. A first shaft 72 is fixedly connected to one side of each driven gear 71, and the first shaft 72 is rotatably connected to the tool holder 4. A driving tooth cone 73 is fixedly connected to the side of the first shaft 72 away from the driven gear 71. A driven tooth cone 74 is meshed with one side of the driving tooth cone 73. A second shaft 75 is fixedly connected to one side of the driven tooth cone 74. The rotating block 61 is connected via the second... The shaft 75 is rotatably connected inside the mounting slot 5. The first power assembly 76 includes a second motor 761, which is fixedly connected to one side of the top of the tool holder 4. The output end of the second motor 761 is fixedly connected to a drive gear 762. A gear ring 763 is meshed with one side of the drive gear 762. Multiple driven gears 71 are meshed with the gear ring 763. Multiple tool head mechanisms 6 can be driven to move synchronously by a single power source, which not only simplifies the transmission structure and reduces the probability of equipment failure, but also ensures the synchronicity and consistency of the switching of each tool head mechanism 6, greatly shortens the tool changing time, and improves the processing efficiency.

[0020] Please see Figures 9-10 The monitoring mechanism 8 includes a second power assembly 84, which is fixedly connected to one side of the inner side of the protective cover 3. A lifting plate 83 is connected to one side of the second power assembly 84. An industrial camera 81 is fixedly connected to one end of the lifting plate 83, and a laser rangefinder sensor 82 is fixedly connected to the other end of the lifting plate 83. The second power assembly 84 includes a fixing plate 841, which is fixedly connected to one side of the inner side of the protective cover 3. Lead screws 842 are rotatably connected to both sides of the inner side of the fixing plate 841. Both sides of the lifting plate 83 are threadedly connected to the lead screws 842. A third motor 843 is fixedly connected to one side of the top of the fixing plate 841. A linkage rod 844 is fixedly connected to the output end of the third motor 843. 4. The third motor 843 is rotatably connected to the fixed plate 841. Both sides of the linkage rod 844 are fixedly connected to the worm gear 845. One side of the worm gear 845 is meshed with the worm wheel 846. The worm wheel 846 is fixedly connected to the side of the lead screw 842 that extends out of the fixed plate 841. The industrial camera 81 is equipped with an AI recognition module, which can perform high-definition dynamic imaging of the cutting edge of the processing tool 63. The AI ​​algorithm analyzes and captures the wear degree of the tool and the chipping of the cutting edge in real time. The laser range sensor 82 accurately judges the wear amount by detecting the change in distance between the cutting edge of the tool and the sensor. By adjusting the height, it can be ensured that the monitoring equipment is in the optimal monitoring position under different processing stages and different tool types, ensuring the accuracy of the monitoring data and providing a reliable basis for subsequent tool switching.

[0021] Please see Figures 3-5 A first linear motor assembly 9 is provided on one side of the protective cover 3. A first screw seat 10 is slidably connected to the upper side of the tool holder 4 inside the protective cover 3 via the first linear motor assembly 9. A fixing frame 11 is fixedly connected to the bottom end of the first screw seat 10. A second linear motor assembly 12 is provided on one side of the fixing frame 11. A second screw seat 13 is slidably connected to the lower side of the fixing frame 11 via the second linear motor assembly 12. A fourth motor 14 is fixedly connected inside the second screw seat 13. A first cylinder 15 is fixedly connected to the output end of the fourth motor 14. A third cylinder 15 is fixedly connected to the output end of the first cylinder 15. The bottom end of the third circular block 16 is fixedly connected to a second shock absorber 17, and multiple second shock absorbers 17 are provided. The bottom end of the second shock absorber 17 is fixedly connected to a fourth circular block 18, and the bottom end of the fourth circular block 18 is fixedly connected to the top end of the tool holder 4. Through multi-directional position and angle adjustment, the processing tool 63 on the tool holder 4 can be precisely moved to any processing position of the workpiece, adapting to semiconductor precision components of different shapes and processing requirements. The second shock absorber 17 further buffers the vibration transmitted to the tool holder 4 during processing, avoiding vibration from affecting the positioning accuracy of the tool holder 4 and ensuring the stability of processing.

[0022] Please see Figure 8 The support mechanism 19 includes a fifth motor 191, which is fixedly connected inside the protective cover 3. A support plate 192 is fixedly connected to the output end of the fifth motor 191, and the support plate 192 is offset from directly below the tool holder 4. Second cylinders 193 are fixedly connected to both sides of the top of the support plate 192. A clamping plate 194 is fixedly connected to the output end of each second cylinder 193, and the clamping plate 194 is slidably connected to the support plate 192 via the second cylinders 193. The semiconductor precision component to be processed is placed on the support plate 192, and the two second cylinders 193... The synchronous telescopic drive brings the clamping plates 194 on both sides closer together until the workpiece is stably clamped and fixed. During the processing, the fifth motor 191 can drive the support plate 192 and the clamped workpiece to rotate, thereby cooperating with the machining tool 63 to complete the turning process. At the same time, combined with the tool holder 4 driving the movement and rotation of the machining tool 63, the composite machining of turning and milling can be realized, which meets the multi-process integrated machining requirements of semiconductor precision parts. The design of the support plate 192 being offset from directly below the tool holder 4 makes it easy for the machining tool 63 to be located exactly at the axis of the support plate 192, ensuring the smooth progress of the machining process.

[0023] A machining method for precision semiconductor components using a milling and turning machine tool includes the following steps: S1. Based on the material, size, processing accuracy requirements and specific processing procedures of the semiconductor precision parts to be processed, the controller 2 presets various processing parameters and simultaneously causes different types of processing tools 63 to extend out of the mounting slot 5. Specifically, the controller 2 issues a command to start the switching mechanism 7, and the first power component 76 of the switching mechanism 7 drives the drive gear 762 to rotate. With the help of the gear ring 763, multiple driven gears 71 rotate synchronously. Then, through the transmission action of the shaft and bevel gear, the rotating block 61 of the corresponding tool head mechanism 6 is driven to rotate, so that one of the processing tools 63 of the multiple tool head mechanisms 6 extends out of the working position of the mounting slot 5. S2. Open the protective cover 3 door and place the precision semiconductor component to be processed stably in the clamping area of ​​the support plate 192 of the support mechanism 19, ensuring that the workpiece is centered and adapted to the subsequent processing trajectory. Then close the cover door and issue a clamping command through the controller 2. The two second cylinders 193 of the support mechanism 19 extend and retract synchronously, driving the clamping plates 194 on both sides to move smoothly towards each other along the support plate 192 until the clamping plates 194 are tightly attached to the two sides of the workpiece and apply a uniform clamping force, thus achieving a stable fixation of the workpiece. Stable placement and uniform clamping can prevent the workpiece from shifting, shaking, or unevenly stressed during processing, avoiding dimensional deviations caused by workpiece offset, and ensuring processing accuracy. At the same time, closing the cover door can prevent chips and cutting fluid from splashing during processing, protecting the operating environment. S3. Start the monitoring mechanism 8. Control the third motor 843 of the second power component 84 through the controller 2 to drive the linkage rod 844 and the worm gears 845 on both sides to rotate synchronously. Drive the two lead screws 842 to rotate synchronously through the meshing transmission of the worm gears 845 and the worm wheel 846. Since the lifting plate 83 is threadedly connected to the lead screw 842, the lifting plate 83 moves smoothly up and down along the axis of the lead screw 842 during the rotation of the lead screw 842 until the industrial camera 81 and the laser range sensor 82 are adjusted to the best monitoring position for the current working tool. This adjustment action can ensure that the monitoring equipment can clearly and accurately capture the tool status and avoid monitoring data deviation due to improper monitoring angle or distance. The industrial camera 81 can perform high-definition imaging analysis of the tool edge through the built-in AI recognition module, and the laser range sensor 82 can accurately detect the wear amount, providing reliable data support for subsequent tool wear judgment and switching. S4. The controller 2 coordinates the operation of the first linear motor assembly 9 and the second linear motor assembly 12. The first linear motor assembly 9 drives the first screw seat 10 to move precisely in the horizontal direction, thereby driving the fixed frame 11 and the lower tool holder 4 to adjust the position in the X-axis direction. The second linear motor assembly 12 drives the second screw seat 13 to move along the lower side of the fixed frame 11, thereby driving the tool holder 4 to adjust the position in the Y-axis direction. At the same time, the fourth motor 14 is started to drive the first cylinder 15 and the tool holder 4 to rotate, thereby achieving a fine adjustment of the angle of the tool holder 4. Then, the first cylinder 15 extends and retracts to drive the tool holder 4 to move up and down, thereby completing the position adjustment in the Z-axis direction. Finally, the working tool 63 is precisely moved to the starting position of the workpiece to be processed. The precise adjustment can adapt to semiconductor precision parts with different shapes and processing requirements, ensuring that the tool can be accurately aligned with the processing starting point, thus providing a guarantee for the subsequent processing accuracy. S5. Start the first motor 62 of the cutter head mechanism 6 to drive the machining tool 63 to rotate at high speed. At the same time, the controller 2 controls the fifth motor 191 of the support mechanism 19 to rotate synchronously, driving the support plate 192 and the clamped workpiece to complete the turning process with the tool. When it is necessary to switch to other machining processes such as milling and punching, the fourth motor 14 adjusts the position of each set of cutter head mechanisms 6 and switches the machining tool 63 adapted to the new process to the working position to complete the composite machining. During the machining process, the monitoring mechanism 8 works continuously to capture the status of the cutting edge and the amount of wear in real time. The milling and turning composite machining mode can realize multi-process integrated machining, reduce the number of workpiece clamping times, avoid positioning errors caused by multiple clamping, and improve machining accuracy and efficiency. The continuous monitoring of the tool status during the machining process can promptly grasp the tool wear and provide timely signals for subsequent tool switching. S6. When the monitoring mechanism 8 detects that the wear of the current working tool has reached the preset threshold, it immediately sends a switching command to the switching mechanism 7 through the controller 2. The switching mechanism 7 quickly drives the rotating block 61 of the corresponding tool head mechanism 6 to rotate, and rotates the worn tool into the mounting slot 5 for storage. At the same time, it rotates the spare tool of the same type on the other side of the same tool head mechanism 6 to the working position and extends it. The entire switching process can be completed without stopping the machine, which can avoid the decrease in machining accuracy or tool breakage due to excessive tool wear, prevent the production of unqualified workpieces, and eliminate the need to stop the machine to wait for the external tool magazine to retrieve the tool, greatly shortening the equipment downtime, ensuring the continuity of the machining process, and improving the overall machining efficiency. S7. After all processing steps are completed, open the protective cover 3 door, take out the processed semiconductor precision parts, thoroughly clean the machine tool processing area, remove residual chips and cutting fluid, check the status of each mechanism and reset it to prepare for the next processing.

Claims

1. A milling and turning composite machine tool for machining precision semiconductor components, characterized in that, The machine tool includes a machine tool body (1), a protective cover (3) is fixedly connected to the upper side of the machine tool body (1), a tool holder (4) is provided inside the protective cover (3), a mounting groove (5) is provided at the bottom end of the tool holder (4), and multiple mounting grooves (5) are provided. A tool head mechanism (6) is fixedly connected inside the mounting groove (5), a switching mechanism (7) is provided on one side of the tool holder (4), and multiple tool head mechanisms (6) are connected through the switching mechanism (7). A monitoring mechanism (8) is fixedly connected to one side of the machine tool body (1), a support mechanism (19) is fixedly connected to the side of the machine tool body (1) below the tool holder (4), and a controller (2) is fixedly connected to one side of the protective cover (3). The cutting head mechanism (6) includes a rotating block (61), which is rotatably connected to the inside of the mounting slot (5) via a switching mechanism (7). A first motor (62) is fixedly connected to both sides of the rotating block (61). A processing tool (63) is provided at the output end of the first motor (62). A first circular block (64) is fixedly connected to the output end of the first motor (62). A first shock absorber (65) is fixedly connected to one side of the first circular block (64). A second circular block (66) is fixedly connected to the side of the first shock absorber (65) away from the first circular block (64). The processing tool (63) is fixedly connected to the second circular block (66) by bolts. The switching mechanism (7) includes a first power assembly (76), which is located on one side of the top of the tool holder (4). A driven gear (71) is rotatably connected to the tool holder (4) via the first power assembly (76). A first shaft (72) is fixedly connected to one side of the driven gear (71). The first shaft (72) is rotatably connected to the tool holder (4). A driving tooth cone (73) is fixedly connected to the side of the first shaft (72) away from the driven gear (71). A driven tooth cone (74) is meshed with one side of the driving tooth cone (73). A second shaft (75) is fixedly connected to one side of the driven tooth cone (74), and the rotating block (61) is rotatably connected to the inside of the mounting groove (5) through the second shaft (75). The first power assembly (76) includes a second motor (761), which is fixedly connected to one side of the top of the tool holder (4). The output end of the second motor (761) is fixedly connected to a drive gear (762), and a gear ring (763) is meshed with one side of the drive gear (762). Multiple driven gears (71) are meshed with the gear ring (763). The monitoring mechanism (8) includes a second power assembly (84), which is fixedly connected to the inside side of the protective cover (3). A lifting plate (83) is connected to one side of the second power assembly (84). An industrial camera (81) is fixedly connected to one side of the lifting plate (83), and a laser rangefinder (82) is fixedly connected to the other side of the lifting plate (83). The second power assembly (84) includes a fixed plate (841), which is fixedly connected to the inside of the protective cover (3). Both sides of the inside of the fixed plate (841) are rotatably connected to lead screws (842). Both sides of the lifting plate (83) are threadedly connected to the lead screws (842). A third motor (843) is fixedly connected to one side of the top of the fixed plate (841). A linkage rod (844) is fixedly connected to the output end of the third motor (843). The linkage rod (844) is rotatably connected to the fixed plate (841) through the third motor (843). Both sides of the linkage rod (844) are fixedly connected to worm gears (845). A worm wheel (846) is meshed with one side of the worm gear (845). The worm wheel (846) is fixedly connected to the side of the lead screw (842) that extends out of the fixed plate (841). Start the monitoring mechanism (8), and control the third motor (843) of the second power component (84) to run through the controller (2), which drives the linkage rod (844) and the worm gears (845) on both sides to rotate synchronously. With the help of the meshing transmission of the worm gear (845) and the worm wheel (846), the two lead screws (842) are driven to rotate synchronously. Since the lifting plate (83) is threadedly connected to the lead screw (842), the lead screw (842) rotates and drives the lifting plate (83) to move smoothly up and down along the axis of the lead screw (842) until the industrial camera (81) and the laser range sensor (82) are adjusted to the monitoring position that is suitable for the current working tool. When the monitoring mechanism (8) detects that the wear of the current working tool has reached the preset threshold, it immediately sends a switching command to the switching mechanism (7) through the controller (2). The switching mechanism (7) quickly drives the rotating block (61) of the corresponding tool head mechanism (6) to rotate, and rotates the worn tool into the mounting slot (5) for storage. At the same time, it rotates the spare tool of the same type on the other side of the same tool head mechanism (6) to the working position and extends it. The entire switching process can be completed without stopping the machine.

2. The milling and turning composite machine tool for machining precision semiconductor components according to claim 1, characterized in that, A first linear motor assembly (9) is provided on one side of the protective cover (3). A first screw seat (10) is slidably connected to the upper side of the tool holder (4) inside the protective cover (3) via the first linear motor assembly (9). A fixing frame (11) is fixedly connected to the bottom end of the first screw seat (10). A second linear motor assembly (12) is provided on one side of the fixing frame (11). A second screw seat (13) is slidably connected to the lower side of the fixing frame (11) via the second linear motor assembly (12). 3) is internally fixedly connected to a fourth motor (14), the output end of the fourth motor (14) is fixedly connected to a first cylinder (15), the output end of the first cylinder (15) is fixedly connected to a third circular block (16), the bottom end of the third circular block (16) is fixedly connected to a second shock absorber (17), and multiple second shock absorbers (17) are provided. The bottom end of the second shock absorber (17) is fixedly connected to a fourth circular block (18), and the bottom end of the fourth circular block (18) is fixedly connected to the top end of the tool holder (4).

3. The milling and turning composite machine tool for machining precision semiconductor components according to claim 1, characterized in that, The support mechanism (19) includes a fifth motor (191), which is fixedly connected inside the protective cover (3). The output end of the fifth motor (191) is fixedly connected to a support plate (192), and the support plate (192) is offset from the bottom of the tool holder (4). The top two sides of the support plate (192) are fixedly connected to a second cylinder (193). The output end of the second cylinder (193) is fixedly connected to a clamping plate (194), and the clamping plate (194) is slidably connected to the support plate (192) through the second cylinder (193).

4. A machining method using a milling-turning composite machine tool for machining precision semiconductor components, comprising the milling-turning composite machine tool for machining precision semiconductor components as described in any one of claims 1-3, characterized in that, Includes the following steps: S1. Based on the material, size, processing accuracy and process requirements of the semiconductor precision parts to be processed, the processing parameters are preset by the controller (2), and the switching mechanism (7) is started. The rotating block (61) of the cutter head mechanism (6) is driven to rotate through the drive gear (762), gear ring (763), driven gear (71), shaft and bevel gear transmission, so that one of the processing tools (63) of the multiple cutter head mechanisms (6) extends out of the mounting slot (5) to the working position; S2. Open the protective cover (3) door, place the semiconductor precision parts to be processed stably in the clamping area of ​​the support plate (192) of the support mechanism (19) and center them to match the processing trajectory. After closing the cover door, control the second cylinder (193) through the controller (2) to drive the clamping plate (194) to move towards each other to clamp and fix the workpiece. S3. Start the monitoring mechanism (8), drive the lead screw (842) to rotate through the third motor (843), linkage rod (844), worm (845), and worm wheel (846), drive the lifting plate (83) to move up and down, and adjust the industrial camera (81) and laser range sensor (82) to the best monitoring position to match the working tool. S4. By coordinating the actions of the first linear motor assembly (9), the second linear motor assembly (12), the fourth motor (14) and the first cylinder (15) through the controller (2), the X-axis, Y-axis and Z-axis directions and angles of the tool holder (4) are precisely adjusted, and the machining tool (63) is moved to the workpiece machining start position. S5. Start the first motor (62) to drive the machining tool (63) to rotate, start the fifth motor (191) to drive the workpiece to rotate and complete the turning, and adjust the position of the tool head mechanism (6) through the fourth motor (14) to switch the tool to complete the composite machining such as milling and punching. During the machining process, the monitoring mechanism (8) continuously monitors the tool status. S6. When the monitoring mechanism (8) detects that the tool wear amount reaches the preset threshold, the controller (2) starts the switching mechanism (7) to drive the corresponding tool head mechanism (6) rotating block (61) to rotate, collect the worn tool and switch the spare tool in the same group to the working position. The switching process does not stop the machine. S7. After processing, open the protective cover (3) door to take out the workpiece, clean the chips and cutting fluid in the processing area, check the status of each mechanism and reset it.

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