用于在真空管道内壁制备低阻抗复合吸气膜的方法
By fabricating a composite structure of TiZrV getter film and CrN conductive film on the inner wall of a vacuum pipe, the problem of high wall impedance in the vacuum pipe in the particle accelerator was solved, achieving a high-efficiency combination of vacuum and electromagnetic performance, and improving the accelerator's operational stability and efficiency.
CN121759885BActive Publication Date: 2026-07-17INST OF MODERN PHYSICS CHINESE ACADEMY OF SCI
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2026-03-03
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
Vacuum tubes in particle accelerators often lack both excellent vacuum and electromagnetic performance. Traditional getter film materials result in high wall impedance, which affects acceleration efficiency and beam stability.
Method used
A TiZrV getter film was deposited on the inner wall of a vacuum pipe using a magnetron sputtering coating process, and a CrN conductive film was deposited on the opposite side of the film. A low-resistance composite getter film was formed by in-situ composite activation.
Benefits of technology
Reducing the wall impedance of vacuum pipes improves vacuum and electromagnetic performance, enhances stability and wear resistance, reduces beam energy loss, and improves accelerator operating efficiency.
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Figure CN121759885B_ABST
Abstract
本发明涉及粒子加速器技术领域，特别是涉及一种用于在真空管道内壁制备低阻抗复合吸气膜的方法。制备方法包括：对真空管道的内壁进行表面活化处理；采用磁控溅射镀膜工艺在真空管道的内壁沉积TiZrV吸气剂膜；采用磁控溅射镀膜工艺在TiZrV吸气剂膜背离真空管道的一侧沉积CrN导电膜；对TiZrV吸气剂膜和CrN导电膜进行原位复合激活。本发明中，采用磁控溅射镀膜工艺顺序将TiZrV和CrN附着在真空管道的内壁，形成了表层具备低阻抗特性、底层具备高吸气特性的多层复合膜，使得真空管道在保持优异真空性能的同时，还可以大幅降低真空管道的壁面阻抗，CrN的硬度高、耐磨特性，可以防止真空管道受到腐蚀、提高稳定性。
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Citation Information
Patent Citations
CrN-(CrZr) N-ZrN nano ceramic composite coating and preparation method thereof
CN117802453A