A coating apparatus

Abstract

The application discloses a coating equipment, and relates to the technical field of vacuum equipment, which comprises an equipment main body, a workpiece adjusting device, a vacuum adjusting device and a coating source. The equipment main body is provided with a vacuum operation cavity, the coating source is located at the bottom of the cavity, and the vacuum adjusting device is communicated with the operation cavity. The workpiece adjusting device comprises an elastic clamping mechanism, a rotating adjusting mechanism and two-stage lifting mechanisms. The rotating adjusting mechanism is composed of a first adjusting frame, a second adjusting frame and corresponding adjusting components: the first adjusting frame is rotatably arranged on the second adjusting frame around a horizontal shaft and is driven by a first adjusting component; the elastic clamping mechanism is rotatably arranged on the first adjusting frame around a vertical shaft and is driven by a second adjusting component. The first lifting mechanism is connected with the second adjusting frame and drives the second adjusting frame to lift in the cavity; the second lifting mechanism drives a trigger to lift and realizes the opening operation of the clamping cavity by pressing the elastic clamping mechanism. The above design can realize multi-dimensional posture adjustment of the coating workpiece and convenient clamping in the vacuum environment.

Description

Technical Field

[0001] This application relates to the field of vacuum equipment technology, and more particularly to a coating equipment. Background Technology

[0002] In recent decades, vacuum coating technology has made significant progress, resulting in a substantial improvement in the coating effects of various coating equipment. The core objective of improving film formation is to enhance key performance indicators such as film uniformity, density, coating efficiency, and film-substrate adhesion strength.

[0003] In existing technologies, evaporation and ion implantation coating equipment primarily improves coating uniformity and other properties by adjusting process parameters such as target spacing, sputtering angle, and offset between the substrate and the coating ion source (or evaporation source) within a vacuum chamber to achieve the optimal process combination. Specifically, in magnetron sputtering technology, due to the directional nature of its sputtering process, these parameters can be flexibly adjusted by changing the position and angle of the sputtering source (ion source), thereby optimizing the coating effect.

[0004] However, the situation is different for evaporation coating technology. The coating material in a vacuum environment primarily exhibits a vertically upward diffusion characteristic, making it impossible to adjust the sputtering angle by changing the angle of the evaporation source. To address this challenge, typical evaporation coating equipment generally incorporates an umbrella-like structure, designed to optimize process performance such as coating uniformity and coating efficiency.

[0005] While umbrella frame structures can improve coating uniformity to some extent, existing umbrella frame designs have significant limitations. The main problem is that existing umbrella frames typically only address the inhomogeneity issues of a specific type of coating material to a limited degree. Once the workpiece is placed on the umbrella frame, the angle and position of the workpiece are fixed and cannot be dynamically adjusted according to actual needs. This fixed design means it still cannot perfectly adapt to the conical distribution of the deposited material reaching the workpiece surface after evaporation. More importantly, existing umbrella frames cannot meet the need for flexible process adjustments for various coating materials. This limitation is particularly pronounced for users such as research institutions that require frequent prototyping tests, severely restricting the applicability and practicality of the equipment and making it difficult to meet diverse, high-precision experimental and production requirements.

[0006] Therefore, in view of the problems of fixed umbrella frame structure, poor adaptability, and inability to meet the process adjustment and scientific research sampling and testing needs of various coating materials in existing evaporation coating equipment, there is an urgent need to propose a new technical solution to overcome the defects of existing technology and improve the overall performance and application range of evaporation coating equipment. Summary of the Invention

[0007] In view of this, the purpose of this application is to provide a coating equipment to solve the shortcomings of the umbrella frame structure in the existing evaporation coating equipment and improve the overall performance and application range of the evaporation coating equipment.

[0008] To achieve the above-mentioned technical objectives, this application provides a coating equipment, including an equipment body, a workpiece adjustment device, a vacuum adjustment device, and a coating source;

[0009] The main body of the equipment is provided with a vacuum working chamber;

[0010] The coating source is installed at the bottom of the vacuum working chamber;

[0011] The vacuum regulating device is installed on the main body of the equipment and is in communication with the vacuum working chamber;

[0012] The workpiece adjustment device includes an elastic clamping mechanism, a rotation adjustment mechanism, a first lifting mechanism, and a second lifting mechanism;

[0013] The rotation adjustment mechanism includes a first adjustment frame, a second adjustment frame, a first adjustment component, and a second adjustment component;

[0014] The first adjusting frame is rotatably mounted on the second adjusting frame along a horizontal axis;

[0015] The first adjustment component is mounted on the second adjustment frame and connected to the first adjustment frame, and is used to drive the first adjustment frame to rotate;

[0016] The elastic clamping mechanism is rotatably mounted on the first adjusting frame along the vertical axis;

[0017] The second adjustment component is installed on the first adjustment frame and connected to the elastic clamping mechanism, and is used to drive the elastic clamping mechanism to rotate;

[0018] The first lifting mechanism is installed on the main body of the equipment, and its telescopic end extends into the vacuum working chamber and is connected to the second adjusting frame, for driving the second adjusting frame to move up and down;

[0019] The second lifting mechanism is installed on the first lifting mechanism and is driven by the first lifting mechanism to lift and lower synchronously. Its telescopic end extends into the vacuum working chamber through the outer shaft tube of the first lifting mechanism and is connected to a trigger, which is used to drive the trigger to contact and press the elastic clamping mechanism, so that the clamping chamber of the elastic clamping mechanism is in the open state.

[0020] Furthermore, the first adjustment component includes a first adjustment motor and a first transmission component;

[0021] A first rotating shaft is fixed on the first adjusting frame;

[0022] The first rotating shaft is rotatably connected to the second adjusting frame;

[0023] The first adjusting motor is mounted on the second adjusting frame and connected to the first rotating shaft through the first transmission assembly, and is used to drive the first rotating shaft to rotate.

[0024] Furthermore, the elastic clamping mechanism includes a fixing member, a carrier member, a support member, and an elastic member;

[0025] The support member is slidably disposed above the fixing member in a vertical direction;

[0026] The carrier is disposed below the fixing member and is fixedly connected to the support member by a connector that moves through the fixing member;

[0027] The elastic element is disposed between the fixing element and the support element, and is used to provide an elastic force for the support element to move away from the fixing element;

[0028] The center of the fixing member is fixed with a second rotating shaft that is rotatably connected to the first adjusting frame;

[0029] The clamping cavity is formed between the carrier and the support;

[0030] The trigger has multiple pins arranged around its central circumference for pressing the support.

[0031] Furthermore, the fixing member is provided with multiple guide posts around its central circumference;

[0032] The support member is provided with guide holes for the guide posts to move through in a corresponding manner;

[0033] The elastic element is a compression spring, which is fitted onto the guide post.

[0034] Furthermore, the second adjustment component includes a second adjustment motor and a second transmission component;

[0035] The second adjusting motor is mounted on the first adjusting frame and connected to the second rotating shaft through the second transmission assembly, and is used to drive the second rotating shaft to rotate.

[0036] Furthermore, the first lifting mechanism includes a first lifting drive and a first lifting shaft;

[0037] The first lifting driver is installed on the main body of the device, and its telescopic end is connected to one end of the first lifting shaft;

[0038] The other end of the first lifting shaft extends into the vacuum working chamber and is fixedly connected to the second adjusting frame;

[0039] The first lifting shaft forms the outer shaft tube.

[0040] Furthermore, the second lifting mechanism includes a second lifting drive and a second lifting shaft;

[0041] The second lifting driver is installed on the first lifting mechanism, and its telescopic end is connected to one end of the second lifting shaft;

[0042] The other end of the second lifting shaft extends into the vacuum working chamber and is connected to the trigger element;

[0043] The first lifting shaft and the second lifting shaft are coaxially arranged, and the second lifting shaft moves through the first lifting shaft.

[0044] Furthermore, a connecting plate is fixed on the first lifting shaft;

[0045] The second lifting driver is fixed on the connecting plate.

[0046] Furthermore, the main body of the equipment includes a base and a housing;

[0047] The housing is mounted on the top of the base and forms the vacuum working chamber between the housing and the base.

[0048] The housing is provided with a transfer port that communicates with the vacuum working chamber;

[0049] A sealing door assembly is installed on the transfer port;

[0050] The vacuum regulating device is installed on the outside of the housing;

[0051] The coating source is installed at the bottom of the housing;

[0052] A protective cover is also installed on the top of the casing;

[0053] An installation cavity is formed between the protective cover and the top of the housing for the installation of the first lifting mechanism and the second lifting mechanism.

[0054] Furthermore, it also includes a water cooling device installed on the main body of the equipment for cooling the heat source on the main body of the equipment.

[0055] As can be seen from the above technical solutions, the coating equipment designed in this application has the following beneficial effects:

[0056] 1. A rotating adjustment mechanism enables real-time adjustment and rotation control of the workpiece's tilt angle. Tilting angle adjustment changes the angle between the workpiece surface and the coating source, adapting to the conical distribution of the evaporated deposition material, avoiding uneven local deposition, and improving coating uniformity. Rotation control ensures uniform circumferential reception of deposition material on the workpiece, further enhancing coating uniformity. A first lifting mechanism enables real-time adjustment of the workpiece's height, changing the distance between the workpiece and the coating source to adapt to different evaporation rates and diffusion ranges of coating materials, optimizing coating efficiency and film-substrate adhesion strength. An elastic clamping mechanism, in conjunction with a trigger connected to the second lifting mechanism, enables rapid clamping of the workpiece, improving work efficiency and making it suitable for scenarios requiring frequent workpiece changes in scientific research prototyping.

[0057] 2. The clamping, rotation control, tilt adjustment, and lifting control functions of the coated workpiece are integrated into one, while each function is independent of the others. This not only achieves a compact overall structure, but also allows each function to be implemented independently in real time. This enables the equipment to flexibly adjust the workpiece state according to the evaporation characteristics (such as diffusion angle and deposition rate) of different coating materials, meeting the process adjustment needs of various coating materials (especially meeting the needs of scientific research prototyping for frequent parameter adjustments, thus improving the applicability and practicality of the equipment). This overcomes the limitation of existing umbrella frames that can only improve the unevenness of a certain type of coating material.

[0058] 3. The equipment adopts a modular design and is equipped with an independent vacuum working chamber, which can be used as a standalone coating machine, offering high flexibility and expanding its application range. After connecting to the carrier chamber, transfer chamber, etc., via vacuum valves, it can be used as a process module to expand the functionality of other equipment. Attached Figure Description

[0059] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0060] Figure 1 This is a front view of a coating apparatus provided in this application;

[0061] Figure 2 This is a rear view of a coating apparatus provided in this application;

[0062] Figure 3 This is a cross-sectional view of a coating apparatus provided in this application;

[0063] Figure 4 This is a partial structural schematic diagram of a vacuum adjustment device for a coating equipment provided in this application;

[0064] Figure 5 This is a partial structural diagram of a coating source with a baffle mechanism provided in this application for a coating equipment;

[0065] Figure 6 This is a front view of a workpiece adjustment device for a coating equipment provided in this application;

[0066] Figure 7 This is a perspective view of a rotation adjustment mechanism for a coating equipment provided in this application;

[0067] Figure 8 This is a perspective view of an elastic clamping mechanism for a coating equipment provided in this application;

[0068] Figure 9 This is a partial front view of the rotation adjustment mechanism of a coating equipment provided in this application;

[0069] Figure 10 This is a partial structural side view of the rotation adjustment mechanism of a coating equipment provided in this application;

[0070] Figure 11 This is a partial structural cross-sectional view of the rotation adjustment mechanism of a coating equipment provided in this application;

[0071] In the diagram: 100. Main body of the equipment; 101. Vacuum working chamber; 102. Base; 103. Housing; 104. Protective cover; 105. Transfer port; 106. Casters; 107. Height adjuster; 200. Vacuum adjustment device; 201. Vacuum pump set; 202. Vacuum pipeline; 203. Vacuum gauge; 204. Balance valve set; 300. Coating source; 301. Baffle mechanism; 400. Water cooling device; 500. Workpiece adjustment device; 501. Elastic clamping mechanism; 502. First adjusting frame; 503. Second adjusting frame; 504. First adjusting component; 505. Second adjusting component; 506. Rotation adjustment mechanism; 507. First lifting mechanism ; 508, Second lifting mechanism; 509, Trigger; 11, First adjusting motor; 12, First transmission assembly; 121, First drive gear; 122, First transmission gear; 13, First rotating shaft; 14, Ejector pin; 21, Fixing component; 22, Carrier component; 221, Slot; 23, Support component; 231, Guide hole; 24, Elastic component; 25, Connecting component; 26, Guide post; 27, Second rotating shaft; 31, Second adjusting motor; 32, Second transmission assembly; 321, Second drive gear; 322, Second transmission gear; 41, First lifting driver; 42, First lifting shaft; 43, Connecting plate; 51, Second lifting driver; 52, Second lifting shaft. Detailed Implementation

[0072] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0073] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0074] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0075] This application discloses a coating apparatus.

[0076] Please see Figures 1 to 6 One embodiment of a coating apparatus provided in this application includes:

[0077] The equipment consists of a main body 100, a workpiece adjustment device 500, a vacuum adjustment device 200, and a coating source 300.

[0078] The main body of the equipment 100 is provided with a vacuum working chamber 101; the main body of the equipment 100 also has an electrical control and communication module, which can be used as a coating module for various equipment such as cluster type, continuous line type, and circulation type, and can realize low-cost upgrade of existing equipment without restrictions.

[0079] The coating source 300 is installed at the bottom of the vacuum working chamber 101 and sputters (evaporates) the coating material upwards. The coating source 300 can be a magnetron sputtering source, an ion source, an evaporation coating source 300, an electron gun coating source, etc., providing material source substances for the coating process. Figure 5As shown, a baffle mechanism 301 is also provided at the bottom of the vacuum working chamber 101, which can shield the coating source 300 in a timely manner to prevent unstable film particles from being directly deposited on the workpiece surface in the early stage of coating, and effectively improve the purity and uniformity of the film layer in the initial coating stage.

[0080] The vacuum regulating device 200 is installed on the main body 100 of the equipment and is connected to the vacuum working chamber 101; for example Figure 4 As shown, the vacuum regulating device 200 mainly consists of components such as a vacuum pump group 201, a vacuum pipeline 202, a vacuum gauge 203, and a balance valve group 204. It realizes the switching of the vacuum working chamber 101 in atmospheric state, ultimate vacuum state, and coating vacuum state, and can also maintain the pressure under different coating vacuum pressures. The specific details are not elaborated here.

[0081] The workpiece adjustment device 500 includes an elastic clamping mechanism 501, a rotation adjustment mechanism 506, a first lifting mechanism 507, and a second lifting mechanism 508.

[0082] The rotation adjustment mechanism 506 includes a first adjustment frame 502, a second adjustment frame 503, a first adjustment component 504, and a second adjustment component 505. The first adjustment frame 502 is rotatably mounted on the second adjustment frame 503 along a horizontal axis. The first adjustment component 504 is mounted on the second adjustment frame 503 and connected to the first adjustment frame 502, used to drive the first adjustment frame 502 to rotate. The elastic clamping mechanism 501 is rotatably mounted on the first adjustment frame 502 along a vertical axis. The second adjustment component 505 is mounted on the first adjustment frame 502 and connected to the elastic clamping mechanism 501, used to drive the elastic clamping mechanism. The first lifting mechanism 507 is installed on the main body 100 of the equipment, and its telescopic end extends into the vacuum working chamber 101 and is connected to the second adjusting frame 503, which is used to drive the second adjusting frame 503 to move up and down; the second lifting mechanism 508 is installed on the first lifting mechanism 507, and is driven by the first lifting mechanism 507 to move up and down synchronously, and its telescopic end extends into the vacuum working chamber 101 through the outer shaft tube of the first lifting mechanism 507 and is connected to a trigger 509, which is used to drive the trigger 509 to contact and press the elastic clamping mechanism 501, so that the clamping cavity of the elastic clamping mechanism 501 is in the open state.

[0083] In the above design, when the first adjusting component 504 operates, it can drive the first adjusting frame 502 to rotate around the horizontal axis, thereby adjusting the horizontal angle of the first adjusting frame 502 and thus adjusting the tilt angle of the coated workpiece. Secondly, the elastic clamping mechanism 501 is mounted on the first adjusting frame 502 in a manner that allows it to rotate around the vertical axis. The second adjusting component 505 is mounted on the first adjusting frame 502 and connected to the elastic clamping mechanism 501. The driving of the second adjusting component 505 causes the elastic clamping mechanism 501 to rotate around the vertical axis, thereby completing the rotation control of the coated workpiece. Furthermore, the first lifting mechanism 507 is mounted on the equipment body 100, and its telescopic end extends into the vacuum working chamber 101 and connects to the second adjusting frame 503. Through the telescopic movement of the telescopic end of the first lifting mechanism 507, the second adjusting frame 503 can be raised or lowered, thereby adjusting the height position of the coated workpiece within the vacuum working chamber 101. Finally, when the second lifting mechanism 508 drives the trigger 509 to move and contact the elastic clamping mechanism 501, the clamping cavity of the elastic clamping mechanism 501 will be opened so as to perform loading or unloading operations of the coated workpiece.

[0084] In the above design, the first lifting mechanism 507 and the second lifting mechanism 508 adopt a coaxial design, and the first lifting mechanism 507 can synchronously drive the second lifting mechanism 508 to move, so as to achieve a more compact overall structure.

[0085] As can be seen from the above technical solutions, the coating equipment designed in this application has the following beneficial effects:

[0086] 1. The tilt angle and rotation control of the workpiece are achieved in real time through the rotation adjustment mechanism 506. The tilt angle adjustment can change the angle between the workpiece surface and the coating source 300, adapting to the conical distribution of the deposited material after evaporation, avoiding uneven local deposition, and improving coating uniformity. The rotation control ensures that the workpiece receives the deposited material evenly in the circumferential direction, further improving coating uniformity. The height of the workpiece is adjusted in real time through the first lifting mechanism 507, which can change the distance between the workpiece and the coating source 300, adapting to the evaporation rate and diffusion range of different coating materials, and optimizing coating efficiency and film-substrate bonding strength. The elastic clamping mechanism 501, in conjunction with the trigger 509 connected to the second lifting mechanism 508, enables rapid clamping of the workpiece, improving work efficiency and making it suitable for scenarios where workpieces are frequently changed in scientific research prototyping.

[0087] 2. The clamping, rotation control, tilt adjustment, and lifting control functions of the coated workpiece are integrated into one, while each function is independent of the others. This not only achieves a compact overall structure, but also allows each function to be implemented independently in real time. This enables the equipment to flexibly adjust the workpiece state according to the evaporation characteristics (such as diffusion angle and deposition rate) of different coating materials, meeting the process adjustment needs of various coating materials (especially meeting the needs of scientific research prototyping for frequent parameter adjustments, thus improving the applicability and practicality of the equipment). This overcomes the limitation of existing umbrella frames that can only improve the unevenness of a certain type of coating material.

[0088] 3. The equipment adopts a modular design and is equipped with an independent vacuum working chamber 101, which can be used as a standalone coating machine, offering high flexibility and expanding the scope of application.

[0089] The above is Embodiment 1 of a coating equipment provided in this application. The following is Embodiment 2 of a coating equipment provided in this application. Please refer to the following for details. Figures 1 to 11 .

[0090] Based on the solution of Embodiment 1 above:

[0091] Furthermore, such as Figure 7 As shown, the first adjustment component 504 includes a first adjustment motor 11 and a first transmission component 12; a first rotating shaft 13 is fixed on the first adjustment frame 502; the first rotating shaft 13 is rotatably connected to the second adjustment frame 503; the first adjustment motor 11 is installed on the second adjustment frame 503 and is connected to the first rotating shaft 13 through the first transmission component 12, for driving the first rotating shaft 13 to rotate.

[0092] Using the first adjusting motor 11 as the power source, it can provide stable and precise driving force, ensuring that the rotation angle of the first adjusting frame 502 is highly controllable. The first adjusting motor 11 can be a stepper motor or a servo motor, with high-precision angle positioning function, which can realize arbitrary angle adjustment within the range of 0-90 degrees, and the adjustment accuracy can reach ±0.1 degrees, meeting the precise requirements of different coating processes for the tilt angle of the workpiece.

[0093] The first transmission component 12 serves to connect the first adjusting motor 11 and the first rotating shaft 13. Its specific form can be gear transmission, belt transmission or worm gear transmission, etc. Through reasonable transmission ratio design, it can not only ensure the effective transmission of power, but also optimize the rotation speed and torque of the first adjusting frame 502, so that the rotation of the first adjusting frame 502 around the horizontal axis is more stable and precise, thereby accurately adjusting the angle of the workpiece clamped on the elastic clamping mechanism 501 in the pitch direction to adapt to different coating requirements.

[0094] Taking gear transmission as an example, the first transmission component 12 includes a first driving gear 121 and a first transmission gear 122. The first driving gear 121 is fixed to the output shaft of the first regulating motor 11, while the first transmission gear 122 is fixed to the first rotating shaft 13.

[0095] In this application, both the first adjustment frame 502 and the second adjustment frame 503 can be inverted U-shaped frame structures. Both ends of the first adjustment frame 502 are fixed with a first rotating shaft 13, and the first rotating shaft 13 is rotatably connected to the two side walls of the second adjustment frame 503 through bearings, so that the first adjustment frame 502 can stably rotate around the horizontal axis on the second adjustment frame 503.

[0096] The first adjustment component 504 can drive the coated workpiece to tilt and swing, thereby achieving the purpose of adjusting the angle between the coated workpiece and the horizontal plane.

[0097] Furthermore, such as Figure 7 as well as Figure 8 As shown, the elastic clamping mechanism 501 includes a fixing member 21, a carrier member 22, a support member 23, and an elastic member 24. The support member 23 is slidably disposed above the fixing member 21 in a vertical direction. The carrier member 22 is disposed below the fixing member 21 and is fixedly connected to the support member 23 through a connector 25 that moves through the fixing member 21. The elastic member 24 is disposed between the fixing member 21 and the support member 23 and is used to provide an elastic force for the support member 23 to move away from the fixing member 21. A second rotating shaft 27 that is rotatably connected to the first adjusting frame 502 is fixed at the center of the fixing member 21. A clamping cavity is formed between the carrier member 22 and the support member 23. A plurality of pins 14 are provided on the trigger member 509 around its own central circumference for pressing the support member 23.

[0098] In its natural state, the elastic element 24 applies an upward elastic force to the support element 23, causing the support element 23 to drive the carrier 22 upward through the connector 25. At this time, the clamping cavity between the carrier 22 and the support element 23 is in a closed state, which can stably clamp the coated workpiece located in the clamping cavity. When the second lifting mechanism 508 drives the trigger element 509 to descend, the pin 14 on the trigger element 509 will contact and press down on the support element 23. The support element 23 slides down against the elastic force of the elastic element 24, and at the same time, it drives the carrier 22 to move downward synchronously through the connector 25, thereby opening the clamping cavity between the carrier 22 and the support element 23, making it convenient for operators or automated devices to put the coated workpiece into or take it out of the clamping cavity. Once the workpiece to be coated is properly placed or removed, the second lifting mechanism 508 drives the trigger 509 to rise. The ejector pin 14 no longer applies pressure to the support 23, and the support 23 moves upward under the elastic restoring force of the elastic element 24. The carrier 22 then returns to its original position, and the clamping cavity closes again, achieving reliable clamping of the workpiece to be coated. This elastic clamping method has a simple structure, responds quickly, and provides uniform clamping force on the workpiece, effectively preventing damage to the workpiece surface. It also ensures that the workpiece will not loosen or shift during the coating process, guaranteeing coating accuracy.

[0099] The fixing member 21 and the support member 23 can be circular ring structures, without limitation. The carrier member 22 can be an arc-shaped structure, and there are at least two carrier members 22 distributed circumferentially. The carrier member 22 can be provided with a slot 221 for the edge of the coated workpiece or the carrier with the coated workpiece to be inserted, ensuring that the workpiece can be stably positioned during clamping and preventing slippage during rotation or tilting. The connecting member 25 can be a rod structure, with one end fixedly connected to the support member 23, and the other end passing through the through hole on the fixing member 21 and fixed to the carrier member 22, so that the up and down sliding of the support member 23 can be accurately transmitted to the carrier member 22, ensuring that the opening and closing of the clamping cavity is synchronous and smooth.

[0100] Furthermore, such as Figure 8 As shown, the fixing member 21 has multiple guide posts 26 arranged around its central circumference; the support member 23 has guide holes 231 for the guide posts 26 to pass through in a corresponding manner; the elastic member 24 is a compression spring, which is fitted onto the guide posts 26. The guide posts 26 provide precise guidance for the up-and-down sliding of the support member 23, effectively preventing the support member 23 from shifting or wobbling during movement, and ensuring the stability and reliability of the opening and closing action of the clamping cavity. The compression spring fitted onto the guide post 26 allows the spring's extension and contraction to proceed stably along the axial direction of the guide post 26, preventing the spring from bending or twisting, ensuring the uniformity and durability of the elastic force, and thus improving the overall service life and working stability of the elastic clamping mechanism 501.

[0101] Furthermore, such as Figure 8As shown, the second adjustment component 505 includes a second adjustment motor 31 and a second transmission component 32; the second adjustment motor 31 is mounted on the first adjustment frame 502 and is connected to the second rotating shaft 27 through the second transmission component 32, and is used to drive the second rotating shaft 27 to rotate.

[0102] The second adjusting motor 31 serves as the drive source, providing stable and controllable power for the rotation of the elastic clamping mechanism 501. The second adjusting motor 31 can also be a stepper motor or a servo motor, possessing high-precision speed and position control capabilities. It can achieve continuous 360-degree rotation of the elastic clamping mechanism 501 around the vertical axis or indexing rotation at specific angles, with a rotation accuracy of ±0.1 degrees, meeting the process requirements for uniform circumferential coating of the workpiece. The second transmission component 32 connects the second adjusting motor 31 and the second rotating shaft 27. Its specific structural form can adopt gear transmission, synchronous belt transmission, or worm gear transmission, etc. Through reasonable transmission design, the efficiency and stability of power transmission are ensured. Simultaneously, the transmission ratio can be adjusted according to actual needs to obtain suitable rotation speed and torque, enabling the elastic clamping mechanism 501 to smoothly and accurately drive the workpiece to rotate circumferentially, thereby ensuring that all parts of the workpiece surface can uniformly receive the deposited material, further improving the uniformity of the coating. Taking gear transmission as an example, the second transmission component 32 may include a second driving gear 321 and a second driven gear. The second driving gear 321 is mounted on the output shaft of the second adjusting motor 31, and the second driven gear is fixedly mounted on the second rotating shaft 27. Through the meshing transmission of the two, the rotation of the second adjusting motor 31 is accurately transmitted to the second rotating shaft 27, thereby driving the fixed member 21 and the support member 23, the carrier member 22 and the clamped workpiece to rotate together around the vertical axis.

[0103] When the coated workpiece or the fixture with the coated workpiece is placed on the carrier 22, the second adjustment component 505 can realize the forward rotation, stop, reverse rotation and real-time control and adjustment of the rotation speed of the coated workpiece.

[0104] Furthermore, such as Figure 9 as well as Figure 10 As shown, the first lifting mechanism 507 includes a first lifting driver 41 and a first lifting shaft 42; the first lifting driver 41 is installed on the main body 100 of the equipment, and its telescopic end is connected to one end of the first lifting shaft 42; the other end of the first lifting shaft 42 extends into the vacuum working chamber 101 and is fixedly connected to the second adjusting frame 503. The first lifting shaft 42 is a hollow shaft, forming the aforementioned outer shaft tube.

[0105] The first lifting drive 41 can be a servo electric cylinder, ball screw slide, or pneumatic cylinder, etc., possessing precise displacement control capabilities. It can drive the first lifting shaft 42 to perform smooth linear lifting motion, thereby driving the second adjusting frame 503 and the rotating adjusting mechanism 506, elastic clamping mechanism 501, and coated workpiece mounted on it to achieve precise height adjustment. The first lifting shaft 42 is made of high-strength metal material, possessing good rigidity and stability, and can effectively bear the overall weight of the workpiece adjusting device 500 and the load generated during movement, ensuring the smoothness and reliability of the lifting motion. A dynamic sealing component, such as a magnetohydrodynamic seal or a bellows seal, is provided between the first lifting shaft 42 and the main body of the equipment 100 to ensure that the sealing of the vacuum working chamber 101 is not affected during the lifting motion of the first lifting shaft 42, maintaining a stable vacuum environment within the chamber. Through the precise control of the first lifting drive 41, the deposition characteristics requirements of different coating materials at different distances are met, optimizing the film thickness and uniformity.

[0106] The first lifting driver 41 can adjust the distance between the coated workpiece and the coating source 300 by driving the elastic clamping mechanism 501 to lift and lower, and can also drive the elastic clamping mechanism 501 to the loading / unloading height during loading or unloading to facilitate loading or unloading of the coated workpiece.

[0107] Furthermore, such as Figures 9 to 11 As shown, the second lifting mechanism 508 includes a second lifting driver 51 and a second lifting shaft 52; the second lifting driver 51 is installed on the first lifting mechanism 507, and its telescopic end is connected to one end of the second lifting shaft 52; the other end of the second lifting shaft 52 extends into the vacuum working chamber 101 and is connected to the trigger 509.

[0108] The second lifting driver 51 can adopt a similar driving form to the first lifting driver 41, such as a servo electric cylinder, pneumatic cylinder, or ball screw mechanism, which can provide stable linear driving force to drive the second lifting shaft 52 and the connected trigger 509 to move up and down within the vacuum working chamber 101. The second lifting shaft 52 also needs to be made of high-strength and high-rigidity materials. The structure of the trigger 509 is adapted to the elastic clamping mechanism 501. When the second lifting mechanism 508 drives the trigger 509 to descend to the predetermined position, the ejector pin 14 on the trigger 509 can accurately contact and press the support member 23 of the elastic clamping mechanism 501, so that the clamping cavity opens. After the coated workpiece or the fixture with the coated workpiece is clamped or unloaded, the second lifting mechanism 508 drives the trigger 509 to rise and reset, the ejector pin 14 disengages from the support member 23, and the elastic clamping mechanism 501 automatically closes the clamping cavity under the action of the compression spring, thus completing the stable clamping of the workpiece. This design makes loading and unloading of coated workpieces convenient and efficient, and the entire process is completed within the vacuum working chamber 101, avoiding the impact of frequent opening of the vacuum chamber on the internal environment. It is especially suitable for coating processes that require maintaining specific vacuum conditions or an inert gas atmosphere.

[0109] Furthermore, such as Figure 11 As shown, the first lifting shaft 42 and the second lifting shaft 52 are coaxially arranged, and the second lifting shaft 52 moves through the first lifting shaft 42.

[0110] The coaxial design significantly optimizes the spatial layout of the equipment within the vacuum working chamber 101, preventing structural interference between the first lifting shaft 42 and the second lifting shaft 52 during movement. It also makes the overall transmission structure more compact, reducing the space occupied within the vacuum working chamber 101 and reserving more space for the arrangement of other components such as the coating source 300. The second lifting shaft 52 moves through the first lifting shaft 42, forming a nested structure. This design not only simplifies the number of openings on the main body 100 for installing the lifting mechanism, reducing the difficulty and cost of vacuum sealing, but also ensures that the lifting movements of the two shafts do not interfere with each other, maintaining independent and precise displacement control, further improving the stability and reliability of the equipment operation.

[0111] Furthermore, such as Figure 10 as well as Figure 11As shown, a connecting plate 43 can be fixedly mounted on the first lifting shaft 42, and the second lifting driver 51 is fixed on the connecting plate 43. This design allows the second lifting mechanism 508 to be mounted on the first lifting mechanism 507. When the second lifting driver 51 is not in operation, the first lifting shaft 42, the second lifting shaft 52, and the second lifting driver 51 are driven by the first lifting driver 41 to move up and down synchronously. When the second lifting shaft 52 is driven by the second lifting driver 51, it will experience relative vertical displacement within the first lifting shaft 42. By adjusting the second lifting driver 51, the opening and closing speeds and displacement of the elastic clamping mechanism 501 can be adjusted.

[0112] When the first lifting mechanism 507 and the second lifting mechanism 508 in the workpiece adjustment device 500 are running, they will not cause other driving components (first adjustment component 504 and second adjustment component 505) to move together, but they can be linked and adjusted together with other components to achieve multi-dimensional adjustment of the lifting distance, tilt angle, rotational movement, and picking up, placing and clamping of the coated workpiece.

[0113] Furthermore, such as Figure 1 as well as Figure 2 As shown, the main body 100 of the equipment includes a base 102 and a housing 103. The housing 103 is installed on the top of the base 102 and forms a vacuum working chamber 101 between the housing 103 and the base 102. The housing 103 is provided with a transfer port 105 that communicates with the vacuum working chamber 101. The vacuum working chamber 101, as a vacuum space required for the coating process, can be designed and adjusted in height to allow its transfer port 105 to connect with the transfer windows of other equipment without restriction. A sealing door assembly is installed on the transfer port 105. A vacuum regulating device 200 is installed on the outside of the housing 103. A coating source 300 is installed at the bottom of the housing 103. A protective cover 104 is also installed on the top of the housing 103. An installation cavity is formed between the protective cover 104 and the top of the housing 103 for the installation of the first lifting mechanism 507 and the second lifting mechanism 508.

[0114] The base 102 serves as the supporting foundation for the main body 100 of the equipment. Its bottom can be equipped with casters 106 and a height adjuster 107. The casters 106 facilitate the overall handling and position adjustment of the equipment, allowing for flexible movement of the equipment within the production workshop according to process layout requirements. The height adjuster 107 allows for fine-tuning of the levelness and height of the base 102, ensuring the equipment remains stable during installation and use, and preventing tilting from affecting the adjustment accuracy and coating quality of the workpiece. The housing 103, as a major component of the vacuum working chamber 101, can have its inner wall made of stainless steel, which offers good corrosion resistance and a smooth finish, facilitating cleaning and maintenance. It also effectively reflects heat generated during the coating process, reducing heat loss. The outer wall of the housing 103 can be reinforced with ribs to enhance the overall structural strength and rigidity, preventing deformation due to excessive internal and external pressure differences under vacuum conditions.

[0115] The sealing door assembly includes a door panel, a drive cylinder, and a sealing strip. The door panel is rotatably connected to the housing 103 via a hinge. The piston rod of the drive cylinder is connected to the door panel and is used to drive the door panel to rotate around the hinge to open and close the plate transfer port 105. The sealing strip is embedded in the edge where the door panel contacts the housing 103. When the sealing door is closed, the sealing strip is squeezed and undergoes elastic deformation, thereby ensuring the sealing of the vacuum working chamber 101 and preventing external air from entering and affecting the vacuum level.

[0116] The protective cover 104 adopts a detachable structural design and is fixed to the top of the housing 103 by bolts or clips 25, so as to facilitate subsequent inspection and maintenance of components such as the first lifting mechanism 507 and the second lifting mechanism 508 inside the installation cavity. The protective cover 104 can be made of high-strength aluminum alloy or stainless steel, which ensures structural strength while effectively reducing the weight of the overall equipment.

[0117] Furthermore, such as Figure 1 as well as Figure 2 As shown, it also includes a water cooling device 400, installed on the main body 100, used to cool down the heat source on the main body 100. The water cooling device 400 mainly includes components such as a water drain, flow meter, cooling water channel, and regulating valve, to achieve cooling down of the heat source or heated part of the main body 100. The flow rate is adjusted and monitored through the regulating valve and flow meter, improving the safety and economy of equipment operation.

[0118] The cooling channels of the water-cooling device 400 can be optimized according to the distribution of heat-generating components in the main body 100 of the equipment. For example, a spiral or serpentine cooling channel can be set in the interlayer of the housing 103 to ensure that the cooling water can fully contact the inner wall of the housing 103 and quickly remove the heat radiated to the housing 103 during the coating process, preventing the housing 103 from overheating and affecting the vacuum sealing performance or causing thermal impact on the surrounding environment. For drive components such as the first regulating motor 11 and the second regulating motor 31, a special cooling jacket can be set on their outer shell. The cooling water flows through the cooling jacket to directly cool the motor, preventing the motor from overheating due to long-term high-speed operation and ensuring the stability of its output power and control accuracy. The water drain, as the heat exchange core of the water-cooling system, can be installed in a well-ventilated location outside the main body 100 of the equipment. By accelerating the airflow with a fan, the heat exchange efficiency between the water drain and the external environment is improved, allowing the cooling water that has absorbed heat to be quickly cooled in the water drain for recycling. The flow meter monitors the cooling water flow in real time. When the flow rate is lower than the set threshold, it can issue an alarm signal in time to remind the operator to check whether there are any blockages or leaks in the water circuit. The regulating valve can manually or automatically adjust the cooling water flow according to the heat dissipation requirements under different working conditions, so as to avoid water waste while ensuring the cooling effect and achieve the economy of equipment operation.

[0119] The above provides a detailed description of a coating device provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A coating equipment, characterized in that, It includes the main body of the equipment (100), the workpiece adjustment device (500), the vacuum adjustment device (200), and the coating source (300). The main body of the equipment (100) is provided with a vacuum working chamber (101); The coating source (300) is installed at the bottom of the vacuum working chamber (101); The vacuum regulating device (200) is installed on the main body of the equipment (100) and is connected to the vacuum working chamber (101); The workpiece adjustment device (500) includes an elastic clamping mechanism (501), a rotation adjustment mechanism (506), a first lifting mechanism (507), and a second lifting mechanism (508). The rotation adjustment mechanism (506) includes a first adjustment frame (502), a second adjustment frame (503), a first adjustment component (504), and a second adjustment component (505); The first adjusting frame (502) is rotatably mounted on the second adjusting frame (503) along the horizontal axis. The first adjusting frame (502) is used to drive the elastic clamping mechanism (501) and the workpiece clamped therein to swing around the horizontal axis. The first adjustment component (504) is installed on the second adjustment frame (503) and connected to the first adjustment frame (502) to drive the first adjustment frame (502) to rotate; The elastic clamping mechanism (501) is rotatably mounted on the first adjusting frame (502) along a vertical axis, and the vertical axis intersects the horizontal axis perpendicularly. The second adjustment component (505) is installed on the first adjustment frame (502) and connected to the elastic clamping mechanism (501), and is used to drive the elastic clamping mechanism (501) to rotate independently around the vertical axis. The independent rotation and the swing of the elastic clamping mechanism (501) and the workpiece clamped therein driven by the first adjustment frame (502) around the horizontal axis are carried out simultaneously during the coating process. The first lifting mechanism (507) is installed on the main body of the equipment (100), and its telescopic end extends into the vacuum working chamber (101) and is connected to the second adjusting frame (503) to drive the second adjusting frame (503) to move up and down; The second lifting mechanism (508) is installed on the first lifting mechanism (507) and is driven by the first lifting mechanism (507) to lift synchronously. Its telescopic end extends into the vacuum working chamber (101) through the outer shaft tube of the first lifting mechanism (507) and is connected to a trigger (509). The trigger (509) has multiple pins (14) around its own center circumference for pressing the elastic clamping mechanism (501) so that the clamping cavity of the elastic clamping mechanism (501) is in the open state.

2. The coating equipment according to claim 1, characterized in that, The first adjustment component (504) includes a first adjustment motor (11) and a first transmission component (12); The first adjusting frame (502) is fixed with a first rotating shaft (13); The first rotating shaft (13) is rotatably connected to the second adjusting frame (503); The first adjusting motor (11) is installed on the second adjusting frame (503) and connected to the first rotating shaft (13) through the first transmission assembly (12) to drive the first rotating shaft (13) to rotate.

3. The coating equipment according to claim 1, characterized in that, The elastic clamping mechanism (501) includes a fixing member (21), a carrier member (22), a support member (23), and an elastic member (24); The support member (23) is slidably disposed above the fixing member (21) in the vertical direction; The carrier (22) is disposed below the fixing member (21) and is fixedly connected to the support member (23) by a connector (25) that moves through the fixing member (21); The elastic element (24) is disposed between the fixing element (21) and the support element (23) to provide an elastic force for the support element (23) to move away from the fixing element (21); The center of the fixing member (21) is fixed with a second rotating shaft (27) that is rotatably connected to the first adjusting frame (502); The clamping cavity is formed between the carrier (22) and the support (23).

4. The coating equipment according to claim 3, characterized in that, The fixing member (21) is provided with multiple guide posts (26) around its own central circumference. The support member (23) is provided with guide holes (231) through which the guide posts (26) move in a corresponding manner. The elastic element (24) is a compression spring, which is fitted onto the guide post (26).

5. The coating equipment according to claim 3, characterized in that, The second adjustment component (505) includes a second adjustment motor (31) and a second transmission component (32); The second adjusting motor (31) is installed on the first adjusting frame (502) and connected to the second rotating shaft (27) through the second transmission assembly (32) to drive the second rotating shaft (27) to rotate.

6. The coating equipment according to claim 1, characterized in that, The first lifting mechanism (507) includes a first lifting driver (41) and a first lifting shaft (42); The first lifting drive (41) is installed on the main body of the device (100), and its telescopic end is connected to one end of the first lifting shaft (42); The other end of the first lifting shaft (42) extends into the vacuum working chamber (101) and is fixedly connected to the second adjusting frame (503); The first lifting shaft (42) forms the outer shaft tube.

7. A coating apparatus according to claim 6, characterized in that, The second lifting mechanism (508) includes a second lifting drive (51) and a second lifting shaft (52); The second lifting drive (51) is installed on the first lifting mechanism (507), and its telescopic end is connected to one end of the second lifting shaft (52); The other end of the second lifting shaft (52) extends into the vacuum working chamber (101) and is connected to the trigger (509); The first lifting shaft (42) and the second lifting shaft (52) are coaxially arranged, and the second lifting shaft (52) moves through the first lifting shaft (42).

8. A coating apparatus according to claim 7, characterized in that, A connecting plate (43) is fixed on the first lifting shaft (42); The second lifting driver (51) is fixed on the connecting plate (43).

9. A coating apparatus according to claim 1, characterized in that, The main body of the equipment (100) includes a base (102) and a housing (103); The housing (103) is mounted on the top of the base (102) and forms the vacuum working chamber (101) between the housing (103) and the base (102). The housing (103) is provided with a transfer port (105) that communicates with the vacuum working chamber (101). A sealing door assembly is installed on the transfer port (105); The vacuum regulating device (200) is installed on the outside of the housing (103); The coating source (300) is installed at the bottom of the housing (103); The top of the housing (103) is also equipped with a protective cover (104). An installation cavity is formed between the protective cover (104) and the top of the housing (103) for the installation of the first lifting mechanism (507) and the second lifting mechanism (508).

10. A coating apparatus according to claim 1, characterized in that, It also includes a water cooling device (400), which is installed on the main body of the equipment (100) to cool down the heat source on the main body of the equipment (100).

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