Multilayer plane lens module based on nanoimprint and preparation method thereof

Abstract

The invention provides a nanoimprint-based multi-layer planar lens module and a preparation method thereof, and the preparation method comprises the following steps: S1, preparing a female mold; s2, preparing a working mold; s3, forming a first layer of lens; s4, filling and leveling up the first-layer structure; s5, preparing a tackifying layer; s6, layer-by-layer superposition preparation: the steps S3 to S5 are repeated, the Nth layer of plane lens is prepared layer by layer, and N is greater than or equal to 2; and when the Nth layer is prepared, the positioning mark of the working die of the current layer is aligned with the positioning mark of the formed layer through an alignment system, and it is ensured that the axis deviation of the plane lenses of all the layers is within the range. According to the method, high-precision and large-scale manufacturing of the multi-layer super lens is realized by utilizing high efficiency and high resolution of nano-imprinting and combining a synergistic effect of a'double-layer overlay 'type nano-imprinting process alternately constructed by high / low refractive index materials.

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