Double-telecentric optical system for focusing leveling and focusing leveling system

Abstract

The present application relates to a double telecentric optical system for focusing leveling and a focusing leveling system. The present application discloses a double telecentric optical system for focusing leveling, comprising: an object plane, a first group of lenses, an aperture stop, a second group of lenses and an image plane arranged in sequence along the optical axis direction, wherein the first group of lenses and the second group of lenses are symmetrically arranged about the aperture stop, wherein the numerical aperture (NA) of the image side of the system is 0.1, the resolution of the image side is better than 1.25 µm, the back intercept of the system is longer than 220 mm, and wherein the angle between the chief ray of the system and the optical axis is 0.015°. A focusing leveling system comprising the aforementioned double telecentric optical system is also disclosed.

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