一种采用并行数字微镜阵列的扫描式曝光方法及系统
By using benchmark target exposure detection registration and generating a block distortion field parameter table, inserting micro-markers and collecting imaging data, and extracting measured coordinates for differential calculation, the problem of mapping relationship dependence on offline calibration and difficulty in maintaining geometric consistency in parallel digital micromirror array scanning exposure is solved, and traceability and closed-loop linkage in the scanning process are realized.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- DONGGUAN HECHUAN MASCH EQUIP TECH CO LTD
- Filing Date
- 2026-03-02
- Publication Date
- 2026-07-17
AI Technical Summary
In existing parallel digital micromirror array scanning exposure methods, the mapping relationship from pixel coordinates to substrate coordinates depends on offline calibration and drifts with scanning position and time. It is difficult to maintain geometric consistency between subarrays and at strip boundaries, and there is a lack of traceable observation residual collection and incremental update mechanism.
A parallel digital micromirror initial mapping is established by using a detection and registration method based on a reference target exposure. A block distortion field parameter table is generated, micro-markers are inserted and imaging data is collected. The measured coordinates are extracted and differential calculations are performed to form a residual set. The block distortion field parameter table is then updated by incremental fitting, realizing a closed-loop linkage between pattern remapping and exposure triggering.
It achieves the accessibility and traceability of mapping relationships, has a consistent coordinate reference, and the coordinate conversion within the scanning strip range has block-level manageability. Deviations during the scanning process can be structurally collected, and the scanning exposure process maintains continuous operation, achieving the effect of an implementable online correction mechanism and a complete closed-loop link.
Smart Images
Figure CN121763673B_ABST