Sample magnetic field generating device

Abstract

The invention discloses a sample magnetic field generating device, which comprises a bearing assembly, a magnetic field generating assembly and a magnetic field generating assembly, the magnetic field generation assembly is arranged below the bearing assembly and used for loading a magnetic field to the sample, and the minimum vertical distance of the magnetic field generation assembly relative to the sample is larger than the maximum vertical distance of the bearing assembly relative to the sample. Visibly, the magnetic field generation assembly can be completely arranged below the sample bearing assembly to carry out more flexible and effective magnetic field loading, so that the obstacle of movement of other modules caused by the fact that the magnetic field generation assembly is partially or completely located above the sample bearing assembly in the prior art is avoided; samples with larger sizes can be borne and tested, the design cost is reduced, and the convenience and the flexibility of the whole sample test are improved.

Description

Technical Field

[0001] This invention relates to the field of sample testing technology, and in particular to a sample magnetic field generating device. Background Technology

[0002] In the characterization of micro and nano devices, it is often necessary to apply magnetic fields of different directions and intensities to the test sample to conduct magnetoelectric tests such as hysteresis loops, Hall effect, and magnetoresistive tests, as well as comprehensive physical property tests involving multiple physical fields such as magneto-optical and magneto-acoustic fields. Existing magnetic field generating devices for testing often employ large-volume toroidal magnetic circuits or multi-pole coils placed around or above the sample carrier assembly to apply a magnetic field to the sample. This setup affects the ease of sample detection by other modules and limits the sample size or volume that the sample carrier assembly can support. Due to potential obstruction from other modules, it is difficult or impossible to support and place large-size or large-volume wafer-level samples. These drawbacks result in high overall system design costs and prevent the implementation of more flexible and comprehensive magnetic field-related tests. Therefore, effective solutions are urgently needed to address these shortcomings in existing technologies. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a sample magnetic field generating device that can perform more flexible and effective magnetic field loading by completely setting the magnetic field generating component below the sample carrying component. This avoids the obstacles to the movement of other modules caused by the magnetic field generating component being partially or completely located above the sample carrying component in the prior art. It can carry and test larger-sized samples, reduce design costs, and improve the convenience and flexibility of overall sample testing.

[0004] To address the aforementioned technical problems, the first aspect of the present invention discloses a sample magnetic field generating device, the device comprising:

[0005] A support component, with its top section used to support the sample; A magnetic field generating component is disposed below the support component for applying a magnetic field to the sample, wherein the minimum vertical distance between the magnetic field generating component and the sample is greater than the maximum vertical distance between the support component and the sample.

[0006] As an optional implementation, the magnetic field generating component includes: The first magnetic pole module is used to apply an out-of-plane magnetic field to the sample, perpendicular to the extension direction of the contact surface between the sample and the supporting component. At least one second magnetic pole module group, the second magnetic pole module group including two second magnetic pole modules symmetrically arranged on both sides of the first magnetic pole module, for applying an in-plane magnetic field parallel to the extension direction to the sample.

[0007] As an optional implementation, the magnetic field generating component includes two second magnetic pole module groups, and the angle between the setting axes of the two second magnetic pole module groups is 75°-80°; the setting axis is a virtual straight line formed by connecting the first preset position of the two second magnetic pole modules in the second magnetic pole module group with the second preset position of the first magnetic pole module.

[0008] As an optional implementation, the smaller included angle between the setting axes of the two second magnetic pole module groups is 78°.

[0009] As an optional implementation, the magnetic field generating component further includes: A magnetic pole connection module is connected to the lower ends of the two second magnetic pole modules of the second magnetic pole module group to form a magnetic flux loop.

[0010] As an optional implementation, the magnetic field generating component further includes: The lower end of the first magnetic flux guide module is connected to the upper end of the first magnetic pole module, and the upper end of the module is in contact with the lower end of the bearing component. The lower end of the second magnetic flux guide module, which corresponds to the second magnetic pole module, is connected to the upper end of the second magnetic pole module, and its upper end is in contact with the lower end of the bearing component. At least one water-cooling module is configured to surround the first magnetic pole module or the second magnetic pole module for heat dissipation.

[0011] As an optional implementation, the first magnetic pole module and / or the second magnetic pole module include: Metal core unit; An excitation generating unit is configured to surround the metal core unit.

[0012] As an optional implementation, the magnetic pole connection module is a disk, which is simultaneously connected to the lower end of all the second magnetic pole modules.

[0013] As an optional implementation, the magnetic pole connection module includes a plurality of connectors arranged in parallel with each other, each connector being connected to the lower end of two second magnetic pole modules belonging to different second magnetic pole module groups.

[0014] As an optional implementation, the magnetic pole connection module is a cross-shaped connector, with each end of the cross-shaped connector connected to the lower end of the corresponding second magnetic pole module.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention discloses a sample magnetic field generating device, comprising: a support component for supporting a sample; and a magnetic field generating component disposed below the support component for applying a magnetic field to the sample. The minimum vertical distance between the magnetic field generating component and the sample is greater than the maximum vertical distance between the support component and the sample. Therefore, this invention enables more flexible and effective magnetic field loading by completely placing the magnetic field generating component below the sample support component. This avoids the obstacles to movement of other modules caused by the magnetic field generating component being partially or entirely above the sample support component in existing technologies. It can support and test larger samples, reduces design costs, and improves the convenience and flexibility of overall sample testing. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of a sample magnetic field generating device disclosed in an embodiment of the present invention.

[0018] Figure 2 This is a schematic diagram of the remaining structure of the sample magnetic field generating device disclosed in the embodiments of the present invention after the hidden support component.

[0019] Figure 3 This is a top view of the remaining structure of the sample magnetic field generating device disclosed in the embodiments of the present invention after the hidden support component.

[0020] Figure 4 This is a cross-sectional schematic diagram of the sample magnetic field generating device disclosed in the embodiments of the present invention in a first preset direction.

[0021] Figure 5 This is a cross-sectional schematic diagram of the sample magnetic field generating device disclosed in the embodiments of the present invention in a second preset direction.

[0022] Figure 6 This is a schematic diagram of the magnetic pole connection module of the sample magnetic field generating device disclosed in the embodiments of the present invention, which is a disk.

[0023] Figure 7 This is a schematic diagram of the magnetic pole connection module of the sample magnetic field generating device disclosed in the embodiments of the present invention, which is a parallel connector.

[0024] Figure 8This is a schematic diagram of the magnetic pole connection module of the sample magnetic field generating device disclosed in the embodiments of the present invention, which is a cross-shaped connector.

[0025] Figure 9 This is a schematic diagram of the magnetic field simulation results of the cross connector with different included angles as disclosed in the embodiments of the present invention.

[0026] Figure 10 This is a schematic diagram of the structure of the water cooling module disclosed in an embodiment of the present invention.

[0027] In the diagram: 1-Bearing component; 20-Magnetic field generating component; 2-First magnetic pole module; 30-Second magnetic pole module; 3-Second magnetic pole module; 4-First magnetic flux guide rail module; 5-Excitation generating unit; 6-Metal core unit; 7-Second magnetic flux guide rail module; 8-Metal core unit; 9-Excitation generating unit; 10-Magnetic pole connection module; 11-Upper rounded chamfer; 12-Lower rounded chamfer; 13-Water cooling module. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] The terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, apparatus, product, or end that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or ends.

[0030] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of the invention. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0031] Please see Figures 1-5 , Figures 1-5 This is a schematic diagram of the structure of a sample magnetic field generating device disclosed in an embodiment of the present invention. Figures 1-5 As shown, the sample magnetic field generating device includes a support component 1 and a magnetic field generating component 20.

[0032] Specifically, the upper part of the support component 1 is used to support the sample.

[0033] Specifically, the magnetic field generating component 20 is positioned below the supporting component 1 to apply a magnetic field to the sample. The minimum vertical distance between the magnetic field generating component 20 and the sample is greater than the maximum vertical distance between the supporting component 1 and the sample, so that the magnetic field generating component 20 is completely below the supporting component 1.

[0034] Optionally, the shape of the support component 1 can be set as a flat plate for placing the sample, and its material is preferably ceramic.

[0035] As can be seen, the above setup enables more flexible and effective magnetic field loading by placing the magnetic field generating component entirely below the sample support component. This avoids the obstacles to the movement of other modules caused by the magnetic field generating component being partially or entirely above the sample support component in the prior art. It can support and test larger samples, such as 12-inch large wafer samples, reduce design costs, and improve the convenience and flexibility of overall sample testing.

[0036] As an optional embodiment, such as Figure 1-5 As shown, the magnetic field generating component 20 includes: The first magnetic pole module 2 is used to apply an out-of-plane magnetic field to the sample in the extension direction perpendicular to the contact surface between the sample and the support component 1. At least one second magnetic pole module group 30, the second magnetic pole module group 30 including two second magnetic pole modules 3 symmetrically arranged on both sides of the first magnetic pole module, for applying an in-plane magnetic field parallel to the extension direction to the sample.

[0037] Specifically, when the sample is a wafer in the shape of a disc, it is placed on the support component 1. The out-of-plane magnetic field is perpendicular to the direction in which the wafer is laid flat, while the in-plane magnetic field is parallel to the wafer.

[0038] Specifically, the first magnetic pole module 2 includes a metal core unit 6 disposed in the center and an excitation generation unit 5 disposed around the metal core unit 6, and the second magnetic pole module 3 includes a metal core unit 8 and an excitation generation unit 9 disposed around the metal core unit 8.

[0039] Specifically, metal core unit 6 and metal core unit 8 are iron cores.

[0040] Specifically, the materials for metal core unit 6 and metal core unit 8 are C1008 steel.

[0041] Specifically, excitation generation unit 5 and excitation generation unit 9 are configured as cylindrical units, and their material is copper.

[0042] As can be seen, the above setup can generate out-of-plane magnetic field and in-plane magnetic field respectively through the first magnetic pole module 2 and the second magnetic pole module 3, thereby achieving decoupling of the in-plane magnetic field and the out-of-plane magnetic field. This allows the two magnetic pole modules to provide normal (out-of-plane) components and in-plane components respectively, which are driven independently and vector superimposed, enabling rapid setting of magnetic field in any direction, so as to achieve more comprehensive and flexible magnetic field loading.

[0043] As an optional embodiment, such as Figure 2 and 3 As shown, the magnetic field generating component 20 includes two second magnetic pole module groups 30, that is, it includes four second magnetic pole modules 3, wherein the angle between the setting axes 30 of the two second magnetic pole module groups is 75°-80°.

[0044] Specifically, the axis is set as a virtual straight line connecting the first preset position of the two second magnetic pole modules in the second magnetic pole module group with the second preset position of the first magnetic pole module. The first and second preset positions can be points pre-set by the operator to represent the center position or rotational axis of the magnetic pole module. The resulting axis characterizes the positional relationship between the two second magnetic pole modules symmetrically positioned with respect to the first magnetic pole module in each second magnetic pole module group.

[0045] In a preferred embodiment, the smaller included angle between the setting axes of the two second magnetic pole module groups 30 is 78°.

[0046] As can be seen, the above settings are used to improve the amplitude of the in-plane magnetic field. By setting the angle between the two pairs of second magnetic pole modules used for the in-plane magnetic field based on experimental data, the magnetic field superposition effect is stronger than the traditional 90° orthogonal arrangement, and a larger in-plane synthetic magnetic field is obtained under the same excitation component power consumption.

[0047] As an optional embodiment, such as Figure 1-5 As shown, the magnetic field generating component 30 also includes a magnetic pole connection module 10, which is connected to the lower ends of the two second magnetic pole modules 3 of the second magnetic pole module group 30 to form a magnetic flux loop. This configuration limits the magnetic flux path of the magnetic pole modules in the in-plane magnetic field, significantly reducing magnetic leakage and improving test stability. More specifically, by reducing magnetic leakage through the above configuration, firstly, a stronger magnetic field can be obtained in the target area; secondly, the impact on non-target areas can be reduced, such as the influence of the magnetic field on mechanical components, and the impact of magnetic leakage on testing and electrical chips.

[0048] Optionally, the lower end of the magnetic pole connection module 10 is provided with a rounded chamfer 12 at the position where it is connected to the lower end of the second magnetic pole module 3. This reduces the weight and material usage of the device and reduces the contact area for more flexible movement when the device is driven to move.

[0049] More specifically, the embodiments of the present invention also disclose various shape options for the magnetic pole connection module 10, wherein, as an optional embodiment, such as Figure 6 As shown in the top view on the left and the bottom view on the right, the magnetic pole connection module 10 is a disk that is simultaneously connected to the lower end of all the second magnetic pole modules 3.

[0050] As an optional embodiment, Figure 7 This is a structural diagram of the device viewed from below, as shown. Figure 7 As shown, the magnetic pole connection module 10 includes multiple connectors arranged in parallel with each other, and each connector is connected to the lower end of two second magnetic pole modules 3 belonging to different second magnetic pole module groups 30.

[0051] As an optional embodiment, Figure 8 The left side shows a structural diagram of the device viewed from below, as shown in the diagram. Figure 8 As shown, the magnetic pole connection module 10 is a cross connector. Here, the shape description of the cross connector is only used to limit the connector to have four ends and the shape to be approximately cross-shaped. It is not used to strictly limit the included angle between its different ends to 90 degrees. In fact, any arrangement that is close to this shape should be considered to fall within the protection scope of this invention.

[0052] Specifically, each end of the cross connector is connected to the lower end of the corresponding second magnetic pole module 3.

[0053] Specifically, such as Figure 8 As shown in the angle setting diagram on the right, the smaller included angle between the two setting axes corresponding to the cross connector is 75°-80°. Specifically, in this embodiment, the setting axis is a virtual connection between the two ends of the two second magnetic pole modules 3 connected to the same second magnetic pole module group 30 by the cross connector. Since the two ends of the cross connector are respectively connected to the two second magnetic pole modules 3, this setting axis is actually parallel to the setting axis in the above embodiment.

[0054] Specifically, such as Figure 8 As shown in the diagram on the right, the cross connector is also provided with a chamfer that is tangent to the two adjacent extension arms. The setting of the chamfer distance between the intersection point A of the extension arms and the nearest chamfer arc will affect the strength of the in-plane magnetic field generated by the entire device and the force on the corresponding connector. After experimental verification, the chamfer distance is 7-10mm, with 10mm being the optimal value.

[0055] Specifically, the preset position can be a position point pre-set by the operator to represent the center position or rotation axis position of either end of the magnetic pole module 3 or the cross connector. The set axis formed is used to characterize the positional orientation relationship between the two second magnetic pole modules in each second magnetic pole module group that are symmetrical to the first magnetic pole module.

[0056] As an optional implementation, the smaller included angle between the two setting axes corresponding to the cross connector is 78°.

[0057] Specifically, the experimental simulation data for setting a smaller angle between the axes mentioned above can be found in [reference needed]. Figure 9 It can be seen that when the smaller angle between the two set axes is 75°-80°, the magnetic flux density of the in-plane magnetic field is relatively high, and it reaches its maximum value when the smaller angle is 78°.

[0058] As can be seen, the above setup is used to enhance the amplitude of the in-plane magnetic field. The angle between the two pairs of second magnetic pole modules used for the in-plane magnetic field is set based on experimental data through the cross connector. Compared with the traditional 90° orthogonal arrangement, the magnetic field superposition effect is stronger, and a larger in-plane synthetic magnetic field is obtained under the same excitation component power consumption.

[0059] As an optional embodiment, such as Figure 1-5 As shown, the magnetic field generating component 30 also includes a first magnetic flux guide module 4 and four second magnetic flux guide modules 7 corresponding to the second magnetic pole modules 3. Specifically, the lower end of the first magnetic flux guide module 4 is connected to the upper end of the first magnetic pole module 2, and its upper end is in contact with the lower end of the supporting component 1. Similarly, the lower end of the second magnetic flux guide module 7 is connected to the upper end of the corresponding second magnetic pole module 3, and its upper end is in contact with the lower end of the supporting component 1. This arrangement allows the movement of each magnetic pole module to be limited by the magnetic flux guide modules, enabling more precise and flexible magnetic field loading when subsequently driven.

[0060] For details, see Figure 1-5 The first magnetic flux guide module 4 is set to a conical shape.

[0061] For details, see Figure 1-5 The second magnetic flux guide module 7 is configured as an inverted boot shape.

[0062] Optionally, the upper end of the second magnetic flux guide module 7 that contacts the lower end of the bearing component 1 is provided with an arc chamfer 11, which reduces the weight and material usage of the device on the one hand, and reduces the contact area for more flexible movement when driven to move in the future.

[0063] Furthermore, a calibration sensor can be installed on the support component 1 to detect and adjust the direction and intensity of the resultant magnetic field in the sample area, so as to control the support component 1 to align the sample with the direction of the resultant magnetic field.

[0064] As an optional embodiment, see Figure 10 The magnetic field generating component also includes: At least one water-cooling module 13 is configured to surround the first magnetic pole module 2 or the second magnetic pole module 3 for heat dissipation.

[0065] Optionally, the water cooling module 13 is a water cooling layer.

[0066] Preferred, see Figure 10 The water cooling module 13 is a solenoid wound around the outside of the first magnetic pole module 2 or the second magnetic pole module 3. The solenoid is provided with an inlet and an outlet. Water flows into the solenoid from the inlet and carries away the heat of the first magnetic pole module 2 or the second magnetic pole module 3 before flowing out from the outlet.

[0067] Finally, it should be noted that the sample magnetic field generating device disclosed in the embodiments of the present invention is only a preferred embodiment of the present invention and is only used to illustrate the technical solutions of the present invention, not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A sample magnetic field generating device, characterized in that, The device includes: A support component, with its top section used to support the sample; A magnetic field generating component is disposed below the support component for applying a magnetic field to the sample, wherein the minimum vertical distance between the magnetic field generating component and the sample is greater than the maximum vertical distance between the support component and the sample.

2. The sample magnetic field generating device according to claim 1, characterized in that, The magnetic field generating component includes: The first magnetic pole module is used to apply an out-of-plane magnetic field to the sample, perpendicular to the extension direction of the contact surface between the sample and the supporting component. At least one second magnetic pole module group, the second magnetic pole module group including two second magnetic pole modules symmetrically arranged on both sides of the first magnetic pole module, for applying an in-plane magnetic field parallel to the extension direction to the sample.

3. The sample magnetic field generating device according to claim 2, characterized in that, The magnetic field generating component includes two second magnetic pole module groups, and the angle between the setting axes of the two second magnetic pole module groups is 75°-80°; the setting axis is a virtual straight line formed by connecting the first preset position of the two second magnetic pole modules in the second magnetic pole module group with the second preset position of the first magnetic pole module.

4. The sample magnetic field generating device according to claim 3, characterized in that, The smaller angle between the two second magnetic pole module groups is 78°.

5. The sample magnetic field generating device according to claim 2, characterized in that, The magnetic field generating component also includes: A magnetic pole connection module is connected to the lower ends of the two second magnetic pole modules of the second magnetic pole module group to form a magnetic flux loop.

6. The sample magnetic field generating device according to claim 2, characterized in that, The magnetic field generating component also includes: The lower end of the first magnetic flux guide module is connected to the upper end of the first magnetic pole module, and the upper end of the module is in contact with the lower end of the bearing component. The lower end of the second magnetic flux guide module, which corresponds to the second magnetic pole module, is connected to the upper end of the second magnetic pole module, and its upper end is in contact with the lower end of the bearing component. At least one water-cooling module is configured to surround the first magnetic pole module or the second magnetic pole module for heat dissipation.

7. The sample magnetic field generating device according to claim 2, characterized in that, The first magnetic pole module and / or the second magnetic pole module include: Metal core unit; An excitation generating unit is configured to surround the metal core unit.

8. The sample magnetic field generating device according to claim 5, characterized in that, The magnetic pole connection module is a disk, which is simultaneously connected to the lower end of all the second magnetic pole modules.

9. The sample magnetic field generating device according to claim 5, characterized in that, The magnetic pole connection module includes multiple connectors arranged in parallel with each other, and each connector is connected to the lower end of two second magnetic pole modules belonging to different second magnetic pole module groups.

10. The sample magnetic field generating device according to claim 5, characterized in that, The magnetic pole connection module is a cross-shaped connector, and each end of the cross-shaped connector is connected to the lower end of the corresponding second magnetic pole module.

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