A heater failure safeguard detection method and system

CN121826671BActive Publication Date: 2026-06-16JIAJI ENVIRONMENTAL CONTROL (XIAN) TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JIAJI ENVIRONMENTAL CONTROL (XIAN) TECH CO LTD
Filing Date
2026-03-16
Publication Date
2026-06-16

AI Technical Summary

Technical Problem

In existing semiconductor thin film deposition equipment heater lifting and positioning systems, the sensors have single functions and lack cross-verification, resulting in positional deviations and undetected sensor failures. This leads to inaccurate equipment positioning, frequent alarms, and safety risks, affecting wafer yield.

Method used

A heater failure protection detection method and system is adopted. By using functional reuse sensors, multi-segment verification and full-process closed-loop detection are achieved. The system can identify coupling looseness, encoder error and sensor abnormality in real time, and optimize the mode switching logic to ensure heater position accuracy and equipment stability.

Benefits of technology

It reduced the false alarm rate of the equipment, improved the positioning accuracy of the heater and the consistency of wafer transfer, and met the long-term stable operation requirements of advanced processes.

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Abstract

The application discloses a kind of heater failure protection detection method and system, belong to servo control technical field.It mainly includes: when thin film deposition equipment is switched from maintenance mode to standard mode, heater is operated to origin;With predetermined speed, heater is operated from origin to lower limit sensor direction, and the trigger signal of lower limit sensor is acquired, and trigger position of trigger signal is recorded;Trigger position is compared with the fixed position of stored lower limit sensor, if the error of both does not satisfy predetermined error threshold, lower limit sensor failure is determined, and lower limit sensor failure alarm is carried out;If the error of both satisfies predetermined error threshold and heater is operated to process standby position, thin film deposition equipment is switched from maintenance mode to standard mode, and starts to carry out film deposition according to corresponding process.
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