High-precision nine-dimensional profile measuring instrument

Abstract

The application discloses a high-precision nine-dimensional profile measuring instrument, which comprises a rack, an adjusting table and a measuring head seat, the measuring head seat can move along the X direction, the Y direction or the Z direction relative to the adjusting table; the adjusting table comprises a rotating table, an XY direction aligning platform and a leveling platform; the rotating table table top of the rotating table is connected with the XY direction aligning platform; the XY direction aligning platform is connected with the leveling platform; the leveling platform comprises a workbench, and the workbench can swing around at least two horizontal axes; the measuring head seat comprises a support, a mandrel, an optical measuring head, a first driving device and a braking device; a non-interference area is formed by the support; the mandrel is rotationally connected with one side of the support, and the optical measuring head is arranged on the mandrel; the first driving device drives the mandrel to rotate; in the braking state, the braking device is in contact with the mandrel and generates friction to realize the braking of the mandrel. The high-precision nine-dimensional profile measuring instrument provided by the application realizes the inner and outer contour measurement of a part and meets the measurement requirements of high-precision measurement and high measurement efficiency.

Description

Technical Field

[0001] This invention relates to the field of part contour measurement technology, and in particular to a high-precision nine-dimensional contour measuring instrument. Background Technology

[0002] High-precision contour measurement of complex curved surface parts is a crucial application requirement in industrial manufacturing, precision machinery, and other fields. Its measurement accuracy and efficiency directly impact product assembly precision, performance, and production efficiency. Currently, the main common equipment used in the industry for contour measurement of complex curved surface parts includes cylindricity measuring instruments and coordinate measuring machines (CMMs).

[0003] A cylindricity measuring instrument is a typical measuring device with 3D main motion and 4D auxiliary motion. It mainly consists of a turntable, a Z-axis kinematic pair, a Y-axis measuring arm, and a self-aligning and leveling mechanism (an auxiliary motion component used to fix the measured part). When paired with an inductive inductor, it can measure the roundness, cylindricity, and roughness of rotating parts. However, the turntable and self-aligning and leveling mechanism of this type of equipment lack sufficient positioning accuracy, making it difficult to achieve high-precision contour measurement of complex curved surfaces. Furthermore, the connection structure between the inductive inductor and the Y-axis measuring arm is large, making it difficult to penetrate deep into the internal cavities of small parts, thus limiting its applicability.

[0004] Coordinate measuring machines (CMMs) utilize the coordinated operation of three linear motion pairs along the X, Y, and Z axes, coupled with a trigger-type probe, to measure the contours of complex surfaces. However, the trigger-type probe in these devices can only acquire one contour point at a time, resulting in low measurement efficiency. To meet high-precision measurement requirements, massive amounts of data need to be collected, leading to a lengthy measurement process and further reducing efficiency. In summary, neither of the aforementioned measuring instruments can simultaneously measure the internal and external contours of a part, nor can they meet the requirements for both high measurement accuracy and high efficiency. Existing technologies require further improvement and enhancement. Summary of the Invention

[0005] In view of the shortcomings of the prior art, the purpose of this invention is to provide a high-precision nine-dimensional contour measuring instrument, which aims to solve the technical problems in the prior art that it is impossible to simultaneously measure the inner and outer contours of parts, and it is difficult to balance high measurement accuracy and high measurement efficiency.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A high-precision nine-dimensional contour measuring instrument includes: a frame, an adjustment table mounted on the frame, and a probe holder located above the adjustment table. The probe holder can move relative to the adjustment table along the X, Y, or Z directions. The adjustment platform includes a turntable, an XY-axis self-aligning platform, and a leveling platform. The turntable surface is connected to the XY-axis self-aligning platform, which drives the XY-axis self-aligning platform and the leveling platform to rotate 360° in the horizontal plane. The XY-axis self-aligning platform is connected to the leveling platform, which drives the leveling platform to move along the X or Y direction of the turntable surface. The XY-axis self-aligning platform has a ring structure, is fitted outside the turntable, and is located below the turntable surface to reduce the overall axial dimension. The leveling platform includes a worktable for fixing the part to be measured. The worktable can swing around at least horizontal axis A and horizontal axis B, which are perpendicular to each other. The probe holder includes a bracket, a spindle, an optical probe, a first drive device, a first encoder, and a braking device. The bracket has an n-shaped structure, and a non-interference zone is formed within the bracket. The spindle is rotatably connected to one side of the bracket, and the optical probe is located in the middle of the spindle, with the optical axis of the optical probe perpendicular to the axis of the spindle. The first drive device is mounted on the bracket and is used to drive the spindle to rotate around its axis. The first encoder is connected to the spindle and is used to detect the rotation angle of the spindle. The braking device is mounted on the bracket. In the braking state, the braking device contacts the spindle and generates friction to brake the spindle.

[0007] Furthermore, it also includes an X-axis linear motion component, a Y-axis linear motion component, and a Z-axis linear motion component. The X-axis linear motion component is mounted on the frame, and the adjustment table is located at the output end of the X-axis linear motion component. The frame is equipped with a column, and the column and the X-axis linear motion component are arranged diagonally opposite each other on the frame. The Z-axis linear motion component is mounted on the column, the Y-axis linear motion component is located at the output end of the Z-axis linear motion component, and the probe holder is located at the output end of the Y-axis linear motion component.

[0008] Furthermore, the XY-axis self-aligning platform includes a first sub-base plate, a second sub-base plate, a Y-axis slide, an X-axis motion actuator, an X-axis motion damper, a Y-axis motion actuator, and a Y-axis motion damper; the first sub-base plate, the second sub-base plate, and the Y-axis slide are all in a ring structure and are all sleeved outside the turntable, arranged sequentially from bottom to top. The first sub-base plate is fixedly connected to the turntable surface; the second sub-base plate is movably disposed on the first sub-base plate along the X direction of the turntable surface, and the X-direction motion actuator and the X-direction motion damper cooperate to drive the second sub-base plate to move horizontally along the X direction. The Y-axis slide is movably mounted on the second base plate along the Y-axis of the turntable surface. The Y-axis motion actuator and the Y-axis motion damper work together to drive the Y-axis slide to move horizontally along the Y-axis.

[0009] Furthermore, the leveling platform also includes: A leveling base is located at the output end of the XY-axis self-aligning platform; the leveling base is provided with an arc-shaped limiting groove, and a ball joint is fixed at the bottom of the worktable, with the ball joint located in the arc-shaped limiting groove; The first angle adjustment driver is located on the leveling base. When the telescopic end of the first angle adjustment driver extends, it can push the worktable, causing the worktable to swing around the horizontal axis A. The second angle adjustment driver is mounted on the leveling base. When the telescopic end of the second angle adjustment driver extends, it can push the worktable, causing the worktable to swing around the horizontal axis B.

[0010] Furthermore, a support damper is fixed on the leveling base, and the support damper protrudes from the upper surface of the leveling base. There are two support dampers respectively positioned opposite to the first angle adjustment driver and the second angle adjustment driver, used to abut against the bottom of the worktable; The leveling platform also includes several tension springs, with the upper end of the tension springs fixed to the worktable and the lower end of the tension springs fixed to the output end of the XY-axis self-aligning platform. All the tension springs, all the support dampers, the first angle adjustment actuator, and the second angle adjustment actuator are arranged in a circular array on the outer periphery of the leveling base.

[0011] Furthermore, the turntable also includes a fixed base, a limiting plate, a lower static pressure plate, a hemispherical mandrel, and a second drive device; The limiting plate is located on the fixed base; the turntable surface, hemispherical spindle and lower static pressure plate are arranged in sequence from top to bottom; the second driving device is located on the fixed base and is used to drive the hemispherical spindle to drive the turntable surface to rotate around its axis. The limiting plate is provided with a hemispherical limiting groove, and the hemispherical mandrel is located in the hemispherical limiting groove through a hemispherical throttle; a planar throttle is provided between the lower static pressure plate and the limiting plate; The limiting plate is provided with a first airflow channel group, the hemispherical throttle is provided with a first air inlet groove on the side away from the hemispherical spindle, and the planar throttle is provided with a second air inlet groove on the side away from the lower static pressure plate. Both the planar throttle and the hemispherical throttle have dense air holes. The first airflow channel group is connected to the first air inlet slot and the second air inlet slot, which is used to form an air film between the hemispherical throttle and the hemispherical mandrel, and between the planar throttle and the lower static pressure plate.

[0012] Furthermore, the bracket includes two parallel legs; the probe seat also includes two symmetrically arranged annular throttles respectively mounted on the two legs; the cross-section of the mandrel is I-shaped, the annular throttle has a third air inlet groove on its outer wall away from the mandrel, and a fourth air inlet groove on its end face away from the mandrel, and each leg is provided with a second airflow channel group; The annular throttle is provided with dense air holes, and the second airflow channel group is connected to the third and fourth air inlet slots to form an air film between the annular throttle and the outer wall of the mandrel, and between the annular throttle and the end face of the mandrel.

[0013] Furthermore, the first drive device includes a first torque motor, the first stator of the first torque motor is fixed on the bracket, the first rotor of the first torque motor is fixed on the spindle, and the end of the spindle is provided with a short shaft extending out of the first rotor; the braking device contacts the short shaft to generate friction to achieve braking.

[0014] Furthermore, the braking device includes a translation component and a brake ring; the translation component is mounted on a bracket, and the output end of the translation component is provided with a connector, the connector having a waist hole extending along its translation direction, and the brake ring being embedded in the waist hole; the brake ring includes an arc-shaped braking part adapted to the outer diameter of the short shaft, and two non-contact parts respectively connected to both ends of the arc-shaped braking part, the distance between the two non-contact parts being greater than the outer diameter of the short shaft.

[0015] Furthermore, it also includes an adjuster, wherein the mandrel has a mounting part in the middle, and a through hole extending vertically is provided in the mounting part; The adjuster includes an adjusting pad, a first connecting block, and a second connecting block. The first and second connecting blocks are fixedly connected to both sides of the mounting part, respectively. One end of the adjusting pad is connected to the bottom of the first connecting block by two first locking screws, and the other end of the adjusting pad is connected to the bottom of the second connecting block by a second locking screw. Two adjusting screws with their ends abutting the bottom of the second connecting block are screwed onto the adjusting pad. The two adjusting screws are arranged along the axis of the spindle and symmetrically arranged on both sides of the second locking screw. The adjusting pad has a mounting hole coaxial with the through hole. The optical probe is assembled in the mounting hole, and its upper end passes through the through hole.

[0016] Beneficial effects: This invention provides a high-precision nine-dimensional contour measuring instrument. The measuring base 30 adopts an n-shaped structure bracket to form a non-interference zone. Core components such as the mandrel, optical probe, first drive device, and braking device are integrated on one side of the bracket. The overall layout is compact and the size is small, allowing it to penetrate deep into small parts. Combined with the high-precision movement of the optical probe relative to the adjustment table in three-dimensional space in the X, Y, and Z directions, and the five-dimensional movement of the workpiece driven by the adjustment table, it can not only cover the measurement of the outer contour of the workpiece in all directions, but also accurately complete the measurement of the inner contour. At the same time, the adjustment table, through the coordinated action of the XY-axis self-aligning platform driving the leveling platform to move horizontally in the X or Y direction, and the leveling platform driving the workpiece to swing along two mutually perpendicular horizontal axes, can accurately achieve workpiece self-alignment and leveling. Moreover, the XY-axis self-aligning platform adopts a ring structure sleeved outside the turntable and located below the turntable surface, which effectively reduces the overall axial dimension of the adjustment table, reduces the impact of posture error during turntable movement on measurement accuracy, and ensures the stability and accuracy of the measurement process. Furthermore, with the efficient data acquisition capability of the optical probe, the measuring instrument of this invention can meet the measurement requirements of high precision and high efficiency. It is not only suitable for measuring conventionally sized parts, but also for the high-precision measurement requirements of small parts, making it widely applicable. Attached Figure Description

[0017] Figure 1 The structural diagram of the high-precision nine-dimensional contour measuring instrument provided by the present invention; Figure 2 The structure of the adjustment platform in the high-precision nine-dimensional contour measuring instrument provided by the present invention Figure 1 ; Figure 3 The structure of the adjustment platform in the high-precision nine-dimensional contour measuring instrument provided by the present invention Figure 2 ; Figure 4 An exploded view of the adjustment platform in the high-precision nine-dimensional contour measuring instrument provided by this invention; Figure 5 A cross-sectional view of the adjustment platform in the high-precision nine-dimensional contour measuring instrument provided by the present invention; Figure 6 This is a structural diagram of the probe holder in the high-precision nine-dimensional contour measuring instrument provided by the present invention; Figure 7 This is a front view of the probe holder in the high-precision nine-dimensional contour measuring instrument provided by the present invention. Figure 8 This is a partial cross-sectional view of the probe holder in the high-precision nine-dimensional contour measuring instrument provided by the present invention. Figure 9 An exploded view of the probe holder in the high-precision nine-dimensional contour measuring instrument provided by this invention; Figure 10 A partial cross-sectional view of the adjuster in the high-precision nine-dimensional contour measuring instrument provided by the present invention; Figure 11 An exploded view of the regulator in the high-precision nine-dimensional contour measuring instrument provided by this invention.

[0018] Reference numerals: Frame 10, X-axis linear motion assembly 101, X-axis guide rail 1011, X-axis static pressure slide 1012, X-axis linear motor 1013, X-axis grating ruler 1014, Y-axis linear motion assembly 102, Y-axis static pressure slide 1021, Y-axis guide rail 1022, Y-axis linear motor 1023, Y-axis grating ruler 1024, Z-axis linear motion assembly 103, Z-axis guide rail 1031, Z-axis static pressure slide 1032, Z-axis linear motor 1033, counterweight 1034, Z-axis grating ruler 1035, pulley block 1036, wire rope 1037, column 104; Adjustment table 20, turntable 1, turntable surface 11, fixed base 12, limiting plate 13, hemispherical limiting groove 131, lower static pressure plate 14, hemispherical spindle 15, second drive device 16, second torque motor 161, second encoder 162, hemispherical throttle 17, first air inlet groove 171, plane throttle 18, second air inlet groove 181, XY axis self-aligning platform 2, first sub-base plate 21, spacer 211, second sub-base plate 22, Y axis slide 23, X axis motion driver 24, X axis motion damper 25, Y axis motion driver 26, Y axis motion damper 27, cross roller guide 28, leveling platform 3, worktable 31, ball joint 311, leveling base 32, arc-shaped limiting groove 321, base cylinder 322, pad 323, first angle adjustment driver 33, second angle adjustment driver 34, support damper 35, tension spring 36; Probe mount 30, bracket 4, non-interference zone 41, support foot 42, annular throttle 43, third air inlet slot 431, fourth air inlet slot 432, radial thrust air float 433, axial thrust air float 434, hollow tube 435, ring plate 436, rear end bracket 44, crossbeam bracket 45, front end bracket 46, spindle 5, short shaft 51, mounting part 52, through hole 521, side static pressure plate 53, support 54, optical probe 6, adjuster 61, adjusting shim 61 1. Mounting hole 6111, strip hole 6112, first connecting block 612, second connecting block 613, first locking screw 614, second locking screw 615, adjusting screw 616, clamping block 617, set screw 618, first drive device 7, first stator 71, first rotor 72, first encoder 8, braking device 9, translation assembly 91, brake ring 92, arc-shaped braking part 921, non-contact part 922, connecting piece 93, waist hole 931. Detailed Implementation

[0019] This invention provides a high-precision nine-dimensional contour measuring instrument. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention.

[0020] In the description of this invention, it should be understood that the terms "upper," "lower," "left," and "right," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or a specific orientational structure and operation. Therefore, they should not be construed as limitations on the invention. Furthermore, "first" and "second" are only for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "multiple" means two or more.

[0021] Please see Figures 1 to 11 As shown, the present invention provides a high-precision nine-dimensional contour measuring instrument, including: a frame 10, an adjustment table 20 disposed on the frame 10, and a probe seat 30 located above the adjustment table 20. The probe seat 30 can move relative to the adjustment table 20 along the X, Y or Z direction. The adjustment platform 20 includes a turntable 1, an XY-axis self-aligning platform 2, and a leveling platform 3. The turntable surface 11 of the turntable 1 is connected to the XY-axis self-aligning platform 2, which is used to drive the XY-axis self-aligning platform 2 and the leveling platform 3 to rotate 360° in the horizontal plane. The XY-axis self-aligning platform 2 is connected to the leveling platform 3, which is used to drive the leveling platform 3 to move along the X or Y direction of the turntable surface 11. The XY-axis self-aligning platform 2 has a ring structure, is sleeved outside the turntable 1, and is located below the turntable surface 11 to reduce the overall axial dimension. The leveling platform 3 includes a worktable 31 for fixing the part to be measured. The worktable 31 can swing around at least horizontal axis A and horizontal axis B, which are perpendicular to each other. The probe holder 30 includes a bracket 4, a spindle 5, an optical probe 6, a first drive device 7, a first encoder 8, and a braking device 9. The bracket 4 has an n-shaped structure, and a non-interference zone 41 is formed within the bracket 4. The spindle 5 is rotatably connected to one side of the bracket 4. The optical probe 6 is located in the middle of the spindle 5, and the optical axis of the optical probe 6 is perpendicular to the axis of the spindle 5. The first drive device 7 is located on the bracket 4 and is used to drive the spindle 5 to rotate around its axis. The first encoder 8 is connected to the spindle 5 and is used to detect the rotation angle of the spindle 5. The braking device 9 is installed on the bracket 4. In the braking state, the braking device 9 contacts the spindle 5 and generates friction to brake the spindle 5.

[0022] During measurement, the part to be measured is first fixed on the worktable 31 of the leveling platform 3. The leveling platform 3 is moved along the X or Y direction of the turntable 11 by the XY-axis centering platform 2. In conjunction with the swing of the worktable 31 around the horizontal axis A and B, the part is precisely centered and leveled. At the same time, the probe holder 30 can move relative to the adjustment table 20 along the X and Z directions, so that the optical axis of the optical probe 6 is coplanar with the generatrix of the part. Then the turntable 1 rotates 360°, and the optical probe 6 moves synchronously along the Z direction. The first drive device 7 drives the spindle 5 to rotate the optical probe 6 around itself. After the optical probe 6 is adjusted to the target angle, the braking device 9 precisely positions it to ensure that the optical axis of the optical probe 6 is perpendicular to the tangent plane of the measured point in real time. Repeating the above operation, the latitude contours of the inner and outer surfaces of the workpiece can be obtained in sequence. Finally, the latitude contour data can be input into the measurement and control system of the measuring instrument. After data processing, the point cloud fitting curves of the inner and outer surface contours of the part can be obtained, thus completing the wheel hub measurement work.

[0023] The non-interference zone 41 formed by the n-shaped structure of the bracket 4 can prevent the probe holder 30 from colliding with the part or the adjustment stage 20 during the measurement process. This allows the optical probe 6 to measure the outer contour of the part's outer surface and also to measure the inner contour of small parts. Combined with the efficient data acquisition capability of the optical probe 6, the inner and outer contours can be measured simultaneously. The ring structure design of the XY-axis self-aligning platform 2 can reduce the axial dimension of the adjustment stage 20 due to the height superposition, thereby reducing the impact of the axial error on the measurement accuracy during the rotation of the turntable 1. This is especially suitable for high-precision measurement of small sizes. At the same time, the multi-dimensional precise motion adjustment and angle positioning significantly reduce measurement errors, ensuring that the measurement accuracy meets the high-precision requirements and improving the overall measurement efficiency.

[0024] As mentioned above, the optical probe 6 can be a fiber optic sensor probe or a laser sensor probe. The two probe types can be flexibly selected according to actual measurement needs, which will not be elaborated here.

[0025] In a preferred embodiment, see [reference] Figure 1It also includes an X-axis linear motion component 101, a Y-axis linear motion component 102, and a Z-axis linear motion component 103. The X-axis linear motion component 101 is mounted on the frame 10, and the adjustment table 20 is located at the output end of the X-axis linear motion component 101. The frame 10 is provided with a column 104. The Z-axis linear motion component 103 is mounted on the column 104, the Y-axis linear motion component 102 is located at the output end of the Z-axis linear motion component 103, and the probe holder 30 is located at the output end of the Y-axis linear motion component 102. Driven by the X-axis linear motion component 101, the adjustment table 20 and the part to be measured fixed on it move along the X-axis. Driven by the Z-axis linear motion component 103 and the Y-axis linear motion component 102, the probe holder 30 moves along the Z-axis and Y-axis respectively, thereby realizing the position adjustment of the probe holder 30 relative to the adjustment table 20 in the three-dimensional space of the X-axis, Y-axis and Z-axis. At the same time, the column 104 and the X-axis linear motion component 101 are arranged diagonally on the frame 10, so that the overall center of gravity of the measuring instrument is as low as possible on the geometric center of the frame 10, ensuring the stability of the measuring instrument.

[0026] Preferably, see Figure 1 The X-axis linear motion assembly 101 includes an X-axis guide rail 1011 fixed on the frame 10, an X-axis hydrostatic slide 1012 slidably connected to the X-axis guide rail 1011, an X-axis linear motor 1013 for driving the X-axis hydrostatic slide 1012 to translate, and an X-axis grating ruler 1014 for detecting the position of the X-axis hydrostatic slide 1012. The adjustment table 20 is mounted on the X-axis hydrostatic slide 1012 by screws. The X-axis linear motor 1013 drives the X-axis hydrostatic slide 1012 to move the adjustment table 20 and parts along the X-axis guide rail 1011, and cooperates with the X-axis grating ruler 1014 to form a closed-loop drive system for X-axis displacement, so as to improve the movement accuracy of the adjustment table 20 in the X-axis.

[0027] Preferably, see Figure 1The Z-axis linear motion component 103 includes a Z-axis guide rail 1031 fixed on the column 104, a Z-axis static pressure slide 1032 slidably connected to the Z-axis guide rail 1031, a Z-axis linear motor 1033 for driving the Z-axis static pressure slide 1032 to rise and fall, a counterweight block 1034 slidably connected to the column 104 along the Z-axis, and a Z-axis grating ruler 1035 for detecting the position of the Z-axis static pressure slide 1032; a pulley group 1036 is rotatably connected to the top of the column 104, and the pulley group 1036 connects the Z-axis static pressure slide 1032 and the counterweight block 1034 through at least two steel wire ropes 1037. The Y-axis linear motion component 102 is mounted on the Z-axis hydrostatic slide 1032. The Z-axis linear motor 1033 drives the Z-axis hydrostatic slide 1032 to move the probe holder 30 along the Z-axis guide rail 1031. It cooperates with the Z-axis grating ruler 1035 to form a closed-loop drive system for Z-axis displacement, thereby improving the Z-axis movement accuracy of the optical probe 6. At the same time, a counterweight 1034 is set to balance the load weight of the Z-axis hydrostatic slide 1032, reduce the drive load of the Z-axis linear motor 1033, avoid the accuracy decay caused by long-term high-load operation of the motor, and counteract the downward tendency caused by the gravity of the Z-axis hydrostatic slide 1032 itself, ensuring that the Z-axis hydrostatic slide 1032 can remain stable at any height position, further improving the positioning accuracy.

[0028] Preferably, see Figure 1 The Y-axis linear motion assembly 102 includes a Y-axis static pressure slide 1021 fixed on a Z-axis static pressure slide 1032, a Y-axis guide rail 1022 slidably connected to the Y-axis static pressure slide 1021, a Y-axis linear motor 1023 for driving the Y-axis guide rail 1022 to translate, and a Y-axis grating ruler 1024 for detecting the position of the Y-axis guide rail 1022; one side of the support 4 of the measuring seat 30 is fixed to the end of the Y-axis guide rail 1022. The Y-axis linear motor 1023 drives the Y-axis guide rail 1022 to move the probe seat 30 along the Y-axis, and cooperates with the Y-axis grating ruler 1024 to form a closed-loop drive system for Y-axis displacement, so as to improve the movement accuracy of the optical probe 6 in the Y-axis.

[0029] In the above-mentioned configuration, the X-axis static pressure slide 1012, Y-axis static pressure slide 1021, and Z-axis static pressure slide 1032 are each equipped with a number of graphite throttling devices, and the arrangement of each graphite throttling device corresponds one-to-one with the four side surfaces of the corresponding guide rail. Each graphite throttling device has dense pores. When compressed gas enters the graphite throttling device and flows out through the dense pores, a uniform and stable gas film can be formed between the graphite throttling device and the side surface of the corresponding guide rail. This creates a non-contact, suspended fit between the slide and the guide rail, effectively improving the motion stability and positioning accuracy of each linear motion component, and providing a stable and reliable motion support foundation for the overall high-precision contour measurement of the measuring instrument.

[0030] In a preferred embodiment, see [reference] Figure 2 ,3 4. The XY-axis self-aligning platform 2 includes a first sub-base plate 21, a second sub-base plate 22, a Y-axis slide plate 23, an X-axis motion actuator 24, an X-axis motion damper 25, a Y-axis motion actuator 26, and a Y-axis motion damper 27. The first sub-base plate 21, the second sub-base plate 22, and the Y-axis slide plate 23 are all ring-shaped and are all sleeved on the outside of the turntable 1, arranged sequentially from bottom to top. Specifically, the XY-axis self-aligning platform 2 also includes a ring-shaped spacer 211, which is sleeved on the outer periphery of the turntable 1. The first sub-base plate 21 is fixedly connected to the turntable surface 11 through the spacer 211 so as to achieve 360° rotation with the turntable surface 11 under the drive of the turntable 1.

[0031] The second sub-base plate 22 is movably disposed on the first sub-base plate 21 along the X direction of the turntable surface 11. The X-direction motion driver 24 and the X-direction motion damper 25 are both disposed on the first sub-base plate 21, and the two cooperate to drive the second sub-base plate 22 to move horizontally along the X direction. The Y-direction slide plate 23 is movably disposed on the second sub-base plate 22 along the Y direction of the turntable surface 11. The Y-direction motion driver 26 and the Y-direction motion damper 27 are both disposed on the Y-direction slide plate 23, and the two cooperate to drive the Y-direction slide plate 23 to move horizontally along the Y direction.

[0032] In the above embodiment, the telescopic end of the X-axis motion actuator 24 extends to drive the second sub-base plate 22 to move horizontally in the positive X direction along the turntable surface 11. Since the X-axis motion damper 25 is arranged opposite to the X-axis motion actuator 24, the extended end of the X-axis motion damper 25 is retracted by force. When the extended end of the X-axis motion actuator 24 retracts, the extended end of the X-axis motion damper 25 is elastically reset and pushed out, driving the second sub-base plate 22 to move horizontally in the opposite X direction. Similarly, the telescopic end of the Y-axis motion actuator 26 extends to drive the Y-axis slide 23 to move horizontally in the positive Y direction along the turntable surface 11. Since the Y-axis motion damper 27 is arranged opposite to the Y-axis motion actuator 26, the extended end of the Y-axis motion damper 27 is retracted by force. When the telescopic end of the Y-axis motion actuator 26 retracts, the extended end of the Y-axis motion damper 27 is elastically reset and pushed out, driving the Y-axis slide 23 to move horizontally in the opposite Y direction.

[0033] In the above description, the X-axis motion actuator 24 and the Y-axis motion actuator 26 can be driven by piezoelectric actuators, linear servo modules, or other drive structures. Further details will not be provided here. Specifically, piezoelectric stack actuators, piezoelectric tube actuators, etc., can be used.

[0034] In the above, the X-axis motion damper 25 and the Y-axis motion damper 27 can be hydraulic dampers or magnetorheological dampers, etc., to achieve the reverse movement of the corresponding moving parts.

[0035] It should be noted that there is a horizontal clearance between the second sub-base plate 22, the Y-axis slide 23 and the outer wall of the turntable 1. In other words, there is the aforementioned clearance between the second sub-base plate 22 and the outer wall of the spacer 211, and between the Y-axis slide 23 and the outer wall of the spacer 211. This horizontal clearance allows the second sub-base plate 22 and the Y-axis slide 23 to move horizontally in the corresponding directions, so that at least one point of the axis of the part to be measured coincides with the axis of the turntable surface 11. In addition, the use of the annular structure significantly reduces the overall axial dimension, and the nested layout with the turntable 1 further improves the space utilization, thereby solving the motion interference problem that may exist during the self-alignment process.

[0036] The above structure not only achieves precise displacement control of the XY-axis self-aligning platform 2, but also effectively reduces the overall axial dimension, significantly improving the accuracy and reliability of the self-aligning process.

[0037] Preferably, see Figure 4 The first sub-substrate 21 and the second sub-substrate 22, as well as the second sub-substrate 22 and the Y-direction slide 23, are slidably connected by two cross roller guides 28 to improve the accuracy and stability of the translation of the second sub-substrate 22 and the Y-direction slide 23.

[0038] In a preferred embodiment, see [reference] Figure 4 , 5 The leveling platform 3 further includes a leveling base 32, a first angle adjustment driver 33, and a second angle adjustment driver 34. The leveling base 32 is located at the output end of the XY-direction self-aligning platform 2. Specifically, the leveling base 32 is fixed on the Y-direction slide 23 and can be translated along the X or Y direction under the drive of the XY-direction self-aligning platform 2. There is a vertical clearance between the leveling base 32 and the worktable 31 in the vertical direction. The vertical clearance refers to the vertical interval between the leveling base 32 and the worktable 31. The purpose is to provide sufficient space for the swing of the worktable 31, avoid mechanical interference, and ensure the smoothness and controllability of the swing process. Specifically, the leveling base 32 is provided with an arc-shaped limiting groove 321, and the bottom of the worktable 31 is fixed with a ball joint 311. The ball joint 311 is located in the arc-shaped limiting groove 321 to realize the universal rotation connection between the two.

[0039] In the above description, the arc-shaped limiting groove 321 refers to a groove-shaped structure with a specific curvature, which can be formed on the leveling base 32 by machining. Its purpose is to provide precise trajectory constraints for the movement of the ball joint 311. The ball joint 311 is a connecting part 93 that can realize multi-degree-of-freedom rotation. Its main function is to provide a rotation fulcrum and ensure the stability of the swing direction.

[0040] The first angle adjustment driver 33 is mounted on the leveling base 32. When the telescopic end of the first angle adjustment driver 33 extends, it can push the worktable 31, causing the worktable 31 to swing around the horizontal axis A. The second angle adjustment driver 34 is mounted on the leveling base 32. When the telescopic end of the second angle adjustment driver 34 extends, it can push the worktable 31, causing the worktable 31 to swing around the horizontal axis B. The horizontal lines connecting the first angle adjustment driver 33 and the axis of the worktable 31, and the horizontal lines connecting the second angle adjustment driver 34 and the axis of the worktable 31, are perpendicular to each other.

[0041] The first angle adjustment driver 33 and the second angle adjustment driver 34 can be vertically mounted electric actuators, etc. The precise guidance of the worktable 31's swing is achieved through the cooperation of the arc-shaped limiting groove 321 and the ball joint 311. When the first angle adjustment driver 33 acts on the worktable 31, the ball joint 311 swings directionally around horizontal axis A within the arc-shaped limiting groove 321, adjusting the angle of the worktable 31 around horizontal axis A. Similarly, when the second angle adjustment driver 34 acts on the worktable 31, the ball joint 311 swings directionally around horizontal axis B within the arc-shaped limiting groove 321, adjusting the angle of the worktable 31 around horizontal axis B, thus achieving the leveling of the part. The structure of the arc-shaped limiting groove 321 effectively limits the range of motion of the ball joint 311, avoiding possible offset during swing. Simultaneously, the presence of the ball joint 311 ensures that the force of the driver can be directly converted into precise swing along a specific axis, solving the problems of unstable swing direction and inaccurate angle control of the worktable 31, thereby significantly improving the accuracy of axis alignment.

[0042] Preferably, see Figure 4 , 5 The leveling base 32 includes a base cylinder 322 and a pad 323. The base cylinder 322 has a ring structure and is fitted onto the outside of the turntable 1. Only the pad 323 is located on the turntable surface 11, and the arc-shaped limiting groove 321 is located on the pad 323. The first angle adjustment driver 33 and the second angle adjustment driver 34 are both fixed to the base cylinder 322. Compared with directly fixing the leveling base 32 to the turntable surface 11, the axial dimension is further reduced. The pad 323, as the main support component, only supports the bottom of the worktable 31 and is provided with an arc-shaped limiting groove 321, which not only ensures the swing function of the worktable 31, but also minimizes the height occupied on the turntable surface 11.

[0043] Through the above-mentioned cooperation structure between the leveling base 32 and the turntable 1, the spatial layout is optimized, the overall axial dimension is reduced while ensuring the leveling function, thereby reducing the risk of amplification of the axis error of the turntable 1 and effectively improving the measurement accuracy of small parts.

[0044] Further, see Figure 4The leveling base 32 is fixed with a support damper 35, which protrudes from the upper surface of the leveling base 32. There are two support dampers 35 respectively, which are opposite to the first angle adjustment driver 33 and the second angle adjustment driver 34, and are used to abut against the bottom of the worktable 31. The leveling platform 3 also includes several tension springs 36. The upper end of the tension spring 36 is fixed to the worktable 31, and the lower end of the tension spring 36 is fixed to the output end of the XY direction self-aligning platform 2. Specifically, the lower end of the tension spring 36 is fixed to the Y direction slide 23.

[0045] The support damper 35, in conjunction with the angle adjustment actuator, enables the worktable 31 to swing around the corresponding horizontal axis. When the angle adjustment actuator lifts the worktable 31, the extended end of the support damper 35 retracts under force, causing the worktable 31 to swing forward around the corresponding horizontal axis. Similarly, when the extended end of the angle adjustment actuator retracts, the extended end of the support damper 35 elastically resets and pushes out again, causing the worktable 31 to swing in the opposite direction around the corresponding horizontal axis. The tension spring 36, as an elastic element, provides a stable restoring force to the worktable 31 through its own elastic force. The linkage between the support damper 35 and the angle adjustment actuator, combined with the flexible pulling effect of the tension spring 36, effectively controls the swing stroke and reset accuracy of the worktable 31, achieving high-precision attitude adjustment of the worktable 31 around horizontal axis A or horizontal axis B.

[0046] All the tension springs 36, all the support dampers 35, the first angle adjustment driver 33, and the second angle adjustment driver 34 are arranged in a circular array on the outer periphery of the leveling base 32. All the tension springs 36, all the support dampers 35, the first angle adjustment driver 33, and the second angle adjustment driver 34 provide eight evenly distributed support points for the worktable 31, which can achieve balanced force distribution, eliminate the risk of off-center loading, improve the overall structural stability, and optimize space utilization while maintaining a compact axial dimension.

[0047] In a preferred embodiment, see [reference] Figure 5 The turntable 1 also includes a fixed base 12, a limiting plate 13, a lower static pressure plate 14, a hemispherical spindle 15, and a second drive device 16; the limiting plate 13 is disposed on the fixed base 12; the turntable surface 11, the hemispherical spindle 15, and the lower static pressure plate 14 are arranged sequentially from top to bottom, and the second drive device 16 is disposed on the fixed base 12 for driving the hemispherical spindle 15 to drive the turntable surface 11 to rotate around its axis.

[0048] The lower static pressure plate 14 can be made of a high-rigidity material, and its flatness and parallelism are ensured through precision machining. The second drive device 16 includes a second torque motor 161, the second stator of which is mounted on the fixed base 12, and the second rotor of which is connected to the hemispherical spindle 15 for driving the turntable surface 11 to rotate 360°. A second encoder 162 is provided on the second rotor for detecting the rotation angle.

[0049] The limiting plate 13 is provided with a hemispherical limiting groove 131, and the hemispherical mandrel 15 is located in the hemispherical limiting groove 131 through the hemispherical throttle 17; a planar throttle 18 is provided between the lower static pressure plate 14 and the limiting plate 13; the limiting plate 13 is provided with a first airflow channel group, the side of the hemispherical throttle 17 away from the hemispherical mandrel 15 is provided with a first air inlet groove 171, and the side of the planar throttle 18 away from the lower static pressure plate 14 is provided with a second air inlet groove 181; both the planar throttle 18 and the hemispherical throttle 17 have dense air holes, and the first airflow channel group is connected to the first air inlet groove 171 and the second air inlet groove 181, for forming an air film between the hemispherical throttle 17 and the hemispherical mandrel 15, and between the planar throttle 18 and the lower static pressure plate 14. When compressed gas is introduced into the first air inlet slot 171 and the second air inlet slot 181 through the first airflow channel group and flows out through the dense air hole, a uniform and stable air film can be formed between the contact surfaces of the hemispherical throttle 17 and the hemispherical spindle 15, and between the contact surfaces of the planar throttle 18 and the lower static pressure plate 14. This ensures that the hemispherical spindle 15 and the limiting plate 13, and the lower static pressure plate 14 and the limiting plate 13 are in a non-contact floating engagement state, which greatly reduces the frictional resistance and wear during the rotation of the turntable 1 and effectively improves the rotational stability and positioning accuracy of the turntable 1.

[0050] At the same time, such as Figure 5 As shown, the turntable surface 11, hemispherical mandrel 15, and lower static pressure plate 14 are coaxially connected in the vertical direction, and their overall cross-section has an "I" shape. The hemispherical mandrel 15, in conjunction with the hemispherical throttle 17, simultaneously restricts the radial and axial movement of the turntable surface 11. The planar throttle 18, in conjunction with the lower static pressure plate 14, restricts the axial movement of the turntable surface 11. This effectively constrains the radial offset and axial movement of the turntable surface 11, ensuring that the turntable surface 11 maintains stable coaxiality and attitude accuracy during rotation, laying a reliable rotational motion foundation for the high-precision measurement of subsequent parts.

[0051] It should be noted that the specific arrangement of the first airflow channel group on the limiting plate 13 should be determined according to the actual situation. In a preferred embodiment, see [reference] Figure 6 , 78. The bracket 4 includes two parallel legs 42. Specifically, the bracket 4 also includes a rear support 44, a crossbeam support 45, and a front support 46 connected in sequence. The rear support 44, crossbeam support 45, and front support 46 enclose the non-interference zone 41. The combined assembly method facilitates the processing and assembly of the bracket 4 and ensures the structural strength of the bracket 4. The two parallel legs 42 are set on the front support 46. The two ends of the spindle 5 are rotatably connected to the two legs 42 respectively. By setting the two legs 42, a stable two-point support is provided for the spindle 5 to reduce the radial runout during the rotation of the spindle 5 and improve the stability of the spindle 5 rotation. At the same time, the first drive device 7 and the braking device 9 are both installed on one of the legs 42. The reading head of the first encoder 8 is installed on the other leg 42, and the scale ring of the first encoder 8 is installed on the end of the spindle 5 near the reading head. The first drive device 7, the braking device 9, and the first encoder 8 are distributed on the two legs 42, which can balance the load at both ends of the spindle 5 and avoid excessive force on one side causing the spindle 5 to be unbalanced. Preferably, the rear support 44, the crossbeam support 45 and the front support 46 are all provided with weight reduction holes to reduce the overall weight of the support 4, thereby reducing the load on the Y guide rail 1022 and improving the movement accuracy of the Y guide rail 1022.

[0052] The probe holder 30 also includes two symmetrically arranged annular throttles 43 respectively mounted on two support legs 42; the two annular throttles 43 together form an air bearing structure to achieve a high-precision rotational connection between the spindle 5 and the main body; the cross-section of the spindle 5 is "I" shaped, the annular throttle 43 has a third air inlet groove 431 on the outer wall away from the spindle 5, and a fourth air inlet groove 432 on the end face away from the spindle 5, and each support leg 42 is provided with a second airflow channel group; the annular throttle 43 is provided with dense air holes, and the second airflow channel group is connected to the third air inlet groove 431 and the fourth air inlet groove 432 to form an air film between the annular throttle 43 and the outer wall of the spindle 5, and between the annular throttle 43 and the end face of the spindle 5.

[0053] During operation, the second airflow channel group introduces high-pressure gas into the third air inlet slot 431 and the fourth air inlet slot 432. After the gas seeps out evenly through the dense air holes of the annular throttle 43, a radial thrust air floating surface 433 is formed on the inner wall of the annular throttle 43, and an axial thrust air floating surface 434 is formed on the end face of the annular throttle 43. The radial thrust air floating surface 433 and the axial thrust air floating surface 434 respectively form a uniformly thick air film with the mandrel 5, which can form a stable radial and axial suspension support for the mandrel 5 to limit the radial and axial displacement of the mandrel 5.

[0054] Specifically, see Figure 8 , 9The annular throttle 43 includes a hollow tube 435 and an annular plate 436 fixed to the end of the hollow tube 435; a third air inlet groove 431 is located on the outer wall of the hollow tube 435, and a fourth air inlet groove 432 is located on the end face of the annular plate 436 near the hollow tube 435; a side static pressure plate 53 is fixed to the spindle 5, and a support 54 is connected to its other end. The cross-section of the side static pressure plate 53, the spindle 5, and the support 54 forms an "I"-shaped structure. The first encoder 8 is mounted on the bracket 4. The two annular throttles 43 are symmetrically arranged between the side static pressure plate 53 and the support 54. An air film is formed between the inner wall of the hollow tube 435 and the outer peripheral wall of the spindle 5, and an air film is formed between the end face of the annular plate 436 and the side static pressure plate 53, and between the end face of the annular plate 436 and the support 54, realizing non-contact axial and radial bidirectional support for the spindle 5, effectively improving the axial and radial runout accuracy during the rotation of the spindle 5.

[0055] Meanwhile, the annular plate 436 of the annular throttle 43 and the hollow tube 435 are integrally formed by high-temperature sintering process. The third air inlet groove 431 and the fourth air inlet groove 432 can be directly processed as a whole on graphite material, so that a single annular throttle 43 can provide axial and radial support functions at the same time, effectively reducing the design size of the air bearing shaft system, thereby improving the compactness of the structure composed of the spindle 5, optical probe 6, first drive device 7, and braking device 9, and ensuring that the optical probe 6 can penetrate into the inner cavity of small-sized parts to carry out accurate measurements.

[0056] In another embodiment, the rotating connection structure between the spindle 5 and the support leg 42 can be replaced by a small-sized bearing structure such as an angular contact ball bearing, a small orifice throttle, or a hydrostatic throttle, in addition to the aforementioned annular throttle 43.

[0057] In a preferred embodiment, see [reference] Figure 8 , 9The first drive device 7 includes a first torque motor, a first stator 71 of which is fixed on the bracket 4, and a first rotor 72 of which is fixed on the spindle 5. The end of the spindle 5 has a short shaft 51 extending beyond the first rotor 72. The braking device 9 contacts the short shaft 51 to generate friction and achieve braking. Through this arrangement, the first torque motor, spindle 5, and first encoder 8 are directly connected, eliminating intermediate transmission links such as gears and couplings, completely eliminating angular errors caused by transmission backlash, and achieving high-precision, lag-free rotation control of the spindle 5. During operation, the first torque motor directly drives the spindle 5 to rotate, and the first encoder 8 synchronously collects and feeds back the real-time angle data of the spindle 5, forming a closed-loop control system to ensure that the optical probe 6 can accurately stop at the target measurement angle. Meanwhile, when the measuring device 9 is in the measuring state, it can quickly contact the short shaft 51 and generate a stable friction force to achieve precise fixation of the angle of the spindle 5. When the equipment experiences sudden situations such as loss of enable, the braking device 9 can immediately trigger the locking action to perform emergency braking on the spindle 5, avoiding damage to the probe or measurement deviation caused by the inertial rotation of the spindle 5, and further improving the safety and measurement stability of the equipment operation.

[0058] Further, see Figure 9 The braking device 9 includes a translation component 91 and a brake ring 92. The translation component 91 is mounted on the bracket 4. The output end of the translation component 91 is provided with a connector 93. The connector 93 has a waist hole 931 extending along its translation direction. The brake ring 92 is embedded in the waist hole 931. The brake ring 92 includes an arc-shaped braking part 921 that is adapted to the outer diameter of the short shaft 51, and two non-contact parts 922 that are respectively connected to the two ends of the arc-shaped braking part 921. The distance between the two non-contact parts 922 is greater than the outer diameter of the short shaft 51. When the first drive device 7 drives the spindle 5 to rotate, the translation component 91 moves the connecting piece 93, aligning the non-contact portion 922 of the brake ring 92 with the short shaft 51, ensuring that the brake ring 92 and the short shaft 51 do not contact each other. When braking is required, the translation component 91 pushes the connecting piece 93 to translate along the extension direction of the waist hole 931, causing the arc-shaped braking portion 921 to approach and grip the outer surface of the short shaft 51. The friction generated by the contact between the two locks the short shaft 51, thereby fixing the angular position of the spindle 5 and the optical probe 6. The above braking method has a compact structure and rapid response, enabling precise angle fixing during measurement and rapid triggering of locking when the equipment is disabled, ensuring the safety of the equipment and parts.

[0059] Preferably, the two arc-shaped braking parts 921 are arranged symmetrically, and the ends of the two non-contact parts 922 are respectively connected to the ends of the two arc-shaped braking parts 921, so that the braking ring 92 forms a symmetrical structure, thereby facilitating the assembly of the braking ring 92 into the waist hole 931.

[0060] In the above, the brake ring 9262 is made of a composite material with high wear resistance and high friction coefficient, which can maintain stable friction under frequent braking conditions.

[0061] In this embodiment, the translation component 91 is a miniature cylinder, whose extension rod is connected to the connector 93. The extension and retraction action is achieved by controlling the on and off of the air pressure. When the extension rod of the miniature cylinder extends, it pushes the connector 93 to move, so that the non-contact part 922 is aligned with the short shaft 51, thus releasing the brake. When the extension rod of the miniature cylinder retracts, the connector 93 moves in the opposite direction, so that the arc-shaped braking part 921 hugs the short shaft 51 to achieve braking.

[0062] In another embodiment, the translation component 91 may be a solenoid valve or a hydraulic cylinder to drive the connecting member 93 to reciprocate.

[0063] In a preferred embodiment, see [reference] Figure 10 , 11 The device also includes an adjuster 61. The spindle 5 has a mounting part 52 in the middle, and a through hole 521 is formed in the mounting part 52. The adjuster 61 includes an adjusting pad 611, a first connecting block 612, and a second connecting block 613. The first connecting block 612 and the second connecting block 613 are fixedly connected to the two sides of the mounting part 52, respectively. One end of the adjusting pad 611 is connected to the bottom of the first connecting block 612 by two first locking screws 614, and the other end of the adjusting pad 611 is connected to the bottom of the second connecting block 613 by a second locking screw 615. Two adjusting screws 616 with their ends abutting the bottom of the second connecting block 613 are screwed onto the adjusting pad 611. The two adjusting screws 616 are arranged along the axial direction of the spindle 5 and are symmetrically arranged on both sides of the second locking screw 615. The adjusting pad 611 has a mounting hole 6111 coaxial with the through hole 521. The optical probe 6 is assembled in the mounting hole 6111, and its upper end passes through the through hole 521.

[0064] When adjusting the verticality of the optical probe 6, i.e., calibrating the perpendicularity of the optical axis of the optical probe 6 and the axis of the spindle 5 in the same vertical plane, firstly, the optical probe 6 is assembled into the mounting hole 6111, and then the adjusting pad 611 is installed at the bottom of the first connecting block 612 and the second connecting block 613; then, the two first locking screws 614 and the second locking screw 615 are slightly tightened in sequence, so that the adjusting pad 611 is in a pre-tightened state, and its position is basically fixed while leaving a fine adjustment margin; then, the two adjusting screws 616 are screwed in respectively, and the pushing action of the adjusting screws 616 pushes one end of the adjusting pad 611 away from the second connecting block 613 to produce displacement; since the two adjusting screws 616 are symmetrically arranged on both sides of the second locking screw 615, by controlling the difference in their screwing lengths, the adjusting pad 611 can be driven to produce a small angle deflection around the direction perpendicular to the axis of the second locking screw 615, thereby driving the optical probe 6 to complete the attitude calibration synchronously. After the optical axis of the optical probe 6 is precisely perpendicular to the axis of the spindle 5, tighten the two first locking screws 614 and the second locking screw 615 to the standard torque to complete the perpendicularity adjustment operation. By adjusting the perpendicularity of the optical probe 6, measurement deviations caused by assembly errors can be effectively eliminated, thereby improving measurement accuracy.

[0065] Further, see Figure 11 The adjuster 61 further includes a clamping block 617 and a set screw 618. The adjusting pad 611 has a slot 6112 communicating with the mounting hole 6111. The clamping block 617 is disposed within the slot 6112. The set screw 618 is screwed to the adjusting pad 611, with the end of the set screw 618 abutting against the clamping block 617 to push the clamping block 617 to engage with the mounting hole 6111 and clamp the optical probe 6. With this configuration, tightening the set screw 618 can push the clamping block 617 to quickly lock or loosen the optical probe 6, effectively improving the efficiency of mounting and dismounting the optical probe 6 and facilitating subsequent maintenance and replacement. Meanwhile, the surface of the clamping block 617 facing the optical probe 6 and the inner wall of the mounting hole 6111 are adapted to the outer peripheral wall of the optical probe 6, which can form a uniform clamping force on the optical probe 6, effectively preventing the optical probe 6 from shifting or shaking due to uneven clamping force, thereby ensuring the installation stability during the measurement process. In addition, the integrated design of the mandrel 5 mounting part 52 and the adjuster 61 can hide most of the main structure of the optical probe 6 between the two legs 42, reducing the overall radial dimension of the measuring end, so that this measuring seat 30 can penetrate into small parts with an inner cavity diameter as low as 120mm to carry out high-precision measurements.

[0066] In summary, the optical probe 6 of this invention can move with high precision in three-dimensional space in the X, Y, and Z directions relative to the adjustment platform 20, providing a solid foundation for the accurate measurement of the inner and outer contours of parts. The turntable 1 of the adjustment platform 20 can drive the XY-direction self-aligning platform 2 and the leveling platform 3 to rotate 360° in the horizontal plane. The XY-direction self-aligning platform 2 adopts a ring structure, which is sleeved on the outer periphery of the turntable 1 and located below the turntable surface 11, realizing the self-aligning function of the part relative to the turntable surface 11 in the X and Y directions. The leveling platform 3 swings the part around the mutually perpendicular horizontal axis A and around the horizontal axis B to complete the precise leveling of the part. The base cylinder 322 of the leveling base 32 is also set below the turntable surface 11, with only the pad 323 located on the turntable surface 11, minimizing the axial space occupation. Meanwhile, the turntable 1 forms an air bearing structure through the hemispherical throttle 17 and the planar throttle 18. After compressed gas is introduced, an air film is formed to provide contactless rotation support. Combined with the "I"-shaped cross-section structure formed by the turntable surface 11, the hemispherical spindle 15 and the lower static pressure plate 14, the turntable 1 is dually limited in both radial and axial directions. This not only effectively reduces the axial dimension of the adjustment table 20 and reduces the impact of attitude error on measurement, thus achieving equipment miniaturization, but also further improves the measurement accuracy of small parts.

[0067] The measuring base 30 uses an n-shaped bracket 4 to form a non-interference zone 41, integrating core components such as the mandrel 5 and optical probe 6 on one side of the bracket 4. Two annular throttles 43 form an air bearing, enabling the mandrel 5 to rotate in a non-contact, suspended manner. The first torque motor, mandrel 5, and first encoder 8 are directly connected, eliminating transmission backlash and achieving high-precision positioning. Most of the optical probe 6's structure is hidden between the legs 42 of the bracket 4, optimizing space and allowing the measuring base 30 to measure small parts with internal diameters as low as 120mm. Combined with the efficient data acquisition capability of the optical probe 6, it can simultaneously complete internal and external contour measurements. This invention, through structural optimization and high-precision motion design, enables the measurement of both the internal and external contours of parts, while simultaneously meeting the requirements for high measurement accuracy and high measurement efficiency.

[0068] It is understood that those skilled in the art can make equivalent substitutions or modifications to the technical solution and inventive concept of the present invention, and all such substitutions or modifications should fall within the protection scope of the appended claims.

Claims

1. A high-precision nine-dimensional contour measuring instrument, characterized in that, include: The frame (10), the adjustment table (20) on the frame (10), and the probe holder (30) located above the adjustment table (20), the probe holder (30) being movable relative to the adjustment table (20) in the X, Y or Z direction; The adjustment platform (20) includes a turntable (1), an XY-axis self-aligning platform (2), and a leveling platform (3); the turntable surface (11) of the turntable (1) is connected to the XY-axis self-aligning platform (2) and is used to drive the XY-axis self-aligning platform (2) and the leveling platform (3) to rotate 360° in the horizontal plane; the XY-axis self-aligning platform (2) is connected to the leveling platform (3) and is used to drive the leveling platform (3) to move along the X or Y direction of the turntable surface (11); the XY-axis self-aligning platform (2) has a ring structure, is sleeved outside the turntable (1), and is located below the turntable surface (11) to reduce the overall axial dimension; the leveling platform (3) includes a worktable (31) for fixing the part to be measured, the worktable (31) can swing around at least the A horizontal axis and the B horizontal axis, the A horizontal axis and the B horizontal axis are perpendicular to each other; The probe holder (30) includes a bracket (4), a spindle (5), an optical probe (6), a first drive device (7), a first encoder (8), and a braking device (9); the bracket (4) has an n-shaped structure, and a non-interference zone (41) is formed within the bracket (4); the spindle (5) is rotatably connected to one side of the bracket (4), the optical probe (6) is located in the middle of the spindle (5), and the optical axis of the optical probe (6) is perpendicular to the axis of the spindle (5); the first drive device (7) is located on the bracket (4) and is used to drive the spindle (5) to rotate around its axis; The first encoder (8) is connected to the spindle (5) and is used to detect the rotation angle of the spindle (5); the braking device (9) is installed on the bracket (4). In the braking state, the braking device (9) contacts the spindle (5) and generates friction to brake the spindle (5); It also includes an X-axis linear motion component (101), a Y-axis linear motion component (102), and a Z-axis linear motion component (103). The X-axis linear motion component (101) is mounted on the frame (10), and the adjustment table (20) is mounted on the output end of the X-axis linear motion component (101). The frame (10) is provided with a column (104), and the column (104) and the X-axis linear motion component (101) are arranged diagonally opposite each other on the frame (10). The Z-axis linear motion component (103) is mounted on the column (104), the Y-axis linear motion component (102) is mounted on the output end of the Z-axis linear motion component (103), and the probe base (30) is mounted on the output end of the Y-axis linear motion component (102). The XY-direction self-aligning platform (2) includes a first sub-base plate (21), a second sub-base plate (22), a Y-direction slide plate (23), an X-direction motion actuator (24), an X-direction motion damper (25), a Y-direction motion actuator (26), and a Y-direction motion damper (27); the first sub-base plate (21), the second sub-base plate (22), and the Y-direction slide plate (23) are all in a ring structure and are all sleeved outside the turntable (1), arranged sequentially from bottom to top; The first sub-sub ... The Y-axis slide (23) is movably mounted on the second sub-base plate (22) along the Y direction of the turntable surface (11). The Y-axis motion driver (26) and the Y-axis motion damper (27) work together to drive the Y-axis slide (23) to move horizontally along the Y direction.

2. The high-precision nine-dimensional contour measuring instrument according to claim 1, characterized in that, The leveling platform (3) also includes: A leveling base (32) is provided at the output end of the XY-direction self-aligning platform (2); an arc-shaped limiting groove (321) is provided on the leveling base (32), and a ball joint (311) is fixed at the bottom of the worktable (31), with the ball joint (311) located in the arc-shaped limiting groove (321); The first angle adjustment driver (33) is set on the leveling base (32). When the telescopic end of the first angle adjustment driver (33) extends, it can push the worktable (31) so that the worktable (31) swings around the horizontal axis A. The second angle adjustment driver (34) is located on the leveling base (32). When the telescopic end of the second angle adjustment driver (34) extends, it can push the worktable (31) so that the worktable (31) swings around the horizontal axis B.

3. The high-precision nine-dimensional contour measuring instrument according to claim 2, characterized in that, A support damper (35) is fixed on the leveling base (32), and the support damper (35) protrudes from the upper surface of the leveling base (32). There are two support dampers (35) respectively set opposite to the first angle adjustment driver (33) and the second angle adjustment driver (34) to abut against the bottom of the worktable (31); The leveling platform (3) also includes several tension springs (36), the upper end of which is fixed on the worktable (31), and the lower end of which is fixed to the output end of the XY-axis self-aligning platform (2). All the tension springs (36), all the support dampers (35), the first angle adjustment driver (33), and the second angle adjustment driver (34) are arranged in a circular array on the outer periphery of the leveling base (32).

4. The high-precision nine-dimensional contour measuring instrument according to claim 1, characterized in that, The turntable (1) also includes a fixed base (12), a limiting plate (13), a lower static pressure plate (14), a hemispherical mandrel (15), and a second drive device (16). The limiting plate (13) is located on the fixed base (12); the turntable surface (11), the hemispherical spindle (15) and the lower static pressure plate (14) are arranged from top to bottom in sequence; the second driving device (16) is located on the fixed base (12) and is used to drive the hemispherical spindle (15) to drive the turntable surface (11) to rotate around its axis. The limiting plate (13) is provided with a hemispherical limiting groove (131), and the hemispherical spindle (15) is provided in the hemispherical limiting groove (131) through the hemispherical throttle (17); a planar throttle (18) is provided between the lower static pressure plate (14) and the limiting plate (13). The limiting plate (13) is provided with a first airflow channel group, the hemispherical throttle (17) is provided with a first air inlet groove (171) on the side away from the hemispherical spindle (15), and the planar throttle (18) is provided with a second air inlet groove (181) on the side away from the lower static pressure plate (14). Both the planar throttle (18) and the hemispherical throttle (17) have dense air holes. The first airflow channel group is connected to the first air inlet slot (171) and the second air inlet slot (181) to form an air film between the hemispherical throttle (17) and the hemispherical mandrel (15) and between the planar throttle (18) and the lower static pressure plate (14).

5. The high-precision nine-dimensional contour measuring instrument according to claim 1, characterized in that, The bracket (4) includes two parallel legs (42); the probe base (30) also includes two symmetrically arranged annular throttles (43) respectively installed on the two legs (42); the cross section of the spindle (5) is "I" shaped, the annular throttle (43) has a third air inlet groove (431) on the outer wall away from the spindle (5), and a fourth air inlet groove (432) on the end face away from the spindle (5), and a second airflow channel group is provided on each leg (42); The annular throttle (43) is provided with dense air holes. The second airflow channel group is connected to the third air inlet groove (431) and the fourth air inlet groove (432) to form an air film between the annular throttle (43) and the outer wall of the spindle (5) and between the annular throttle (43) and the end face of the spindle (5).

6. The high-precision nine-dimensional contour measuring instrument according to claim 1, characterized in that, The first drive device (7) includes a first torque motor, the first stator (71) of the first torque motor is fixed on the bracket (4), the first rotor (72) of the first torque motor is fixed on the spindle (5), and the end of the spindle (5) is provided with a short shaft (51) extending out of the first rotor (72); the braking device (9) contacts the short shaft (51) to generate friction to achieve braking.

7. The high-precision nine-dimensional contour measuring instrument according to claim 6, characterized in that, The braking device (9) includes a translation component (91) and a brake ring (92); the translation component (91) is mounted on the bracket (4), and the output end of the translation component (91) is provided with a connector (93), the connector (93) is provided with a waist hole (931) extending along its translation direction, and the brake ring (92) is embedded in the waist hole (931); the brake ring (92) includes an arc-shaped braking part (921) adapted to the outer diameter of the short shaft (51), and two non-contact parts (922) respectively connected to the two ends of the arc-shaped braking part (921), the distance between the two non-contact parts (922) is greater than the outer diameter of the short shaft (51).

8. The high-precision nine-dimensional contour measuring instrument according to claim 1, characterized in that, It also includes an adjuster (61), and the middle part of the spindle (5) is provided with a mounting part (52), and the mounting part (52) is provided with a through hole (521) that runs vertically through it. The regulator (61) includes an adjusting pad (611), a first connecting block (612), and a second connecting block (613). The first connecting block (612) and the second connecting block (613) are fixedly connected to both sides of the mounting part (52), respectively. One end of the adjusting pad (611) is connected to the bottom of the first connecting block (612) by two first locking screws (614), and the other end of the adjusting pad (611) is connected to the bottom of the second connecting block (613) by a second locking screw (615). The adjustment pad (611) is screwed with two adjusting screws (616) whose ends abut against the bottom of the second connecting block (613). The two adjusting screws (616) are arranged along the axis of the spindle (5) and are symmetrically arranged on both sides of the second locking screw (615). The adjustment pad (611) is provided with a mounting hole (6111) coaxial with the through hole (521). The optical probe (6) is assembled in the mounting hole (6111) and its upper end passes through the through hole (521).

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