Large-scale mass production intelligent sampling method and system, terminal and medium

Abstract

The invention provides a large-scale mass production intelligent sampling method and system, a terminal and a medium, and the method comprises the steps: recording the process equipment and corresponding time of batches or wafers with defect data in each production step, and marking risk time labels for the process equipment of each batch or wafer; the label is the processing time when the process equipment has the defect data last time. And then, based on the time of each batch or wafer passing through the process equipment in each step and the risk time label of the corresponding process equipment, screening the batches or wafers for sampling detection, and updating the risk time label of the corresponding process equipment according to a detection result. According to the method, the load of process equipment can be reduced, the sampling efficiency is improved, the quality control in the production process is more accurate and efficient, and the production process is optimized while the product quality is guaranteed.

Images