一种用于超导带材MgO膜层制备的IBAD设备
By integrating gradient control of the vacuum system, precise regulation of the conveyor belt system, modular design of the ion source, and online detection system, the problems of insufficient purity, disordered texture, and high defect rate of MgO film in existing IBAD equipment have been solved, achieving efficient and stable MgO film preparation and meeting the high-performance requirements of high-temperature superconducting tapes.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- ENERGY SINGULARITY ENERGY TECH (SHANGHAI) CO LTD
- Filing Date
- 2026-03-23
- Publication Date
- 2026-07-17
AI Technical Summary
Existing IBAD equipment suffers from insufficient purity, disordered texture, and high defect rate when preparing MgO films, making it difficult to meet the high-performance requirements of second-generation high-temperature superconducting tapes, and also has low production efficiency.
By employing gradient control of the vacuum system, precise regulation of the conveyor belt system, modular design of the ion source, online upgrade of the detection system, and innovative reciprocating coating structure, we can achieve efficient, high-precision, and highly stable preparation of MgO films.
The efficient preparation of MgO films was achieved, significantly improving the uniformity of film thickness and texture consistency, increasing detection efficiency by more than 5 times, reducing defect rate, and meeting the needs of mass production.
Smart Images
Figure CN121874718B_ABST