Self-locking adjustable folding track system for semiconductor manufacturing equipment, operating method

Abstract

This invention discloses a self-locking adjustable folding track system and its operating method for semiconductor manufacturing equipment. The system is installed on a mounting plane above the workshop and includes a fixed machine beam and a folding track assembly that can rotate horizontally on this plane via hinges. Its innovation lies in the following: after the folding track assembly is unfolded, it achieves high-precision rigid docking with the fixed track through a composite mechanism of electromagnetic self-locking and mechanical positioning at its ends. Simultaneously, the system is equipped with independently adjustable support columns to ensure track level and integrates a safety interlocking system that links the physical state of the track with the crane's operation control. This system is particularly suitable for high-end manufacturing cleanrooms such as those for semiconductors and LCD panels, which require frequent layout adjustments, enabling rapid, safe, and flexible expansion of the crane track range.

Description

Technical Field

[0001] This invention relates to the field of intelligent manufacturing and high-end equipment technology, specifically to a material handling system for cleanrooms or high-precision operating environments, particularly an adjustable folding track system mounted above the workshop with high-precision docking, self-locking, and safety interlocking functions; specifically, it relates to a self-locking adjustable folding track system and its operating method for semiconductor production equipment. Background Technology

[0002] In high-end intelligent manufacturing fields such as semiconductors and LCD panels, overhead cranes or suspended material handling systems (such as OHT) are commonly used in production workshops to move heavy equipment and precision materials. Cranes or handling equipment typically move on running tracks via wheels on their traveling mechanisms. These systems' running tracks are usually fixedly installed on a high-level mounting plane.

[0003] Existing technical solutions each have their limitations: some solutions, such as the patent with publication number CN117383455A, focus on transferring materials between tracks at different heights using a vertical lifting mechanism. However, the tracks themselves are fixed, failing to address the need for flexible track extension within the same horizontal plane. Other solutions, such as the patent with publication number CN113818348A, employ fixed cantilevered track beams, which are structurally rigid but completely non-adjustable, unable to meet the demands of rapid changes in production line layout.

[0004] Furthermore, although there are rail systems that apply electromagnetic technology in the field of rail transit, such as the patent with publication number CN116788054A, the fundamental purpose of its electromagnetic components, such as the stator of a linear motor, is to realize the levitation, traction, and guidance of vehicles. It is part of the power and levitation system. Its technical approach is to solve the problem of long-distance high-speed transportation. It is fundamentally different from the modular splicing and high-precision locking requirements of heavy rails in workshops in terms of technical purpose, working scenario, and implementation method.

[0005] Therefore, when semiconductor production lines need to adjust their layout, existing technologies cannot provide a track system that can flexibly expand horizontally at high levels, ensure the accuracy and rigidity of the track connections for the expansion sections, and ensure safe and convenient operation. This has become a key bottleneck restricting flexible production in smart factories. Summary of the Invention

[0006] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a self-locking adjustable folding track system for semiconductor manufacturing equipment. This system is specifically designed to solve the problems in semiconductor intelligent manufacturing workshops where high-position fixed tracks cannot be horizontally and flexibly extended, and where the extended track exhibits poor locking accuracy and insufficient rigidity. This invention creatively applies electromagnetic self-locking technology to the precision docking scenario at the ends of foldable tracks and integrates independent leveling and safety interlocking mechanisms. It aims to achieve rapid and reliable track expansion and folding in the horizontal plane, ensuring the stability and safety of heavy equipment operating on the extended track.

[0007] To achieve the above objectives, the technical solution of the present invention is to design a self-locking adjustable folding track system for semiconductor production equipment, including a fixed beam erected above the workshop, comprising columns and a fixed crossbeam, wherein the upper surface of the fixed crossbeam forms or is fixedly installed with a crane running track.

[0008] At least one set of folding track assemblies is rotatably connected to the column via hinge assemblies. The folding track assembly has a first state in which it is housed on the mounting plane, and a second working state in which it is horizontally rotated and unfolded about a vertical axis on the mounting plane to the side of the fixed crossbeam. The folding track assembly includes a frame and a movable track beam disposed on its top. When in the second working state, the extension direction of the movable track beam is aligned with the crane running track on the fixed crossbeam.

[0009] The self-locking track docking mechanism is respectively set at the docking ends of the movable track beam and the fixed crossbeam that are close to each other, and is used to realize the automatic adsorption locking and precise alignment of the movable track beam and the fixed crossbeam when the folding track assembly is unfolded to the working position.

[0010] A further technical solution is that the bottom of the frame of the folding track assembly is provided with casters for assisting movement on the high-mounted plane, and at least two support columns that can be independently finely adjusted in height; the support column includes a threaded sleeve connected to the frame, a screw threadedly engaged with the threaded sleeve, a base fixed to the bottom of the screw, and a knob for driving the threaded sleeve to rotate to adjust the height.

[0011] A further technical solution is to adjust the stroke of the support column to enable it to have a first state and a second state:

[0012] In the first state, the base contacts and bears the weight of the high-mounted mounting plane, while the casters are suspended in the air;

[0013] In the second state, the base is lifted off the mounting plane, and the casters contact the mounting plane and can roll.

[0014] A further technical solution is that the self-locking track docking mechanism includes:

[0015] Electromagnets respectively embedded at the joint ends of the movable track beam and the fixed crossbeam;

[0016] Mechanical positioning units, respectively located at the joint ends of the movable track beam and the fixed crossbeam, are used for guidance and coarse positioning before electromagnetic adsorption.

[0017] When the folding track assembly is unfolded to the working position and the mechanical positioning units cooperate with each other, the electromagnet is energized, causing the movable track beam and the fixed crossbeam to attract and lock each other.

[0018] A further technical solution includes a safety interlocking system, which comprises:

[0019] Logic controller;

[0020] A position sensor mounted on the folding track assembly is used to detect whether the folding track assembly is in the unfolded and locked working position;

[0021] The signal output terminal of the position sensor is communicatively connected to the first input terminal of the logic controller.

[0022] The electrical control circuit of the self-locking track docking mechanism is provided with a locking status feedback terminal, which is communicatively connected to the second input terminal of the logic controller;

[0023] The first output terminal of the logic controller is communicatively connected to the enable terminal of the electrical control circuit, and is used to control the power on and power off of the self-locking track docking mechanism;

[0024] The second output terminal of the logic controller is communicatively connected to the crane's operation control unit, and is used to control whether the crane is allowed to move in the direction of the folding track assembly;

[0025] Specifically, when the logic controller determines that the folding track assembly is not in a safe working position based on the signal from the position sensor and / or the locking state feedback terminal, it simultaneously outputs a prohibition signal through the first output terminal and the second output terminal.

[0026] The safety interlocking system operates as follows: Position sensors monitor in real time whether the folding track assembly has rotated to the horizontal unfolded position and aligned with the crossbeam track; the feedback unit of the electromagnet circuit provides real-time feedback on whether it is energized and generating effective attraction force. A logic controller (such as a PLC) continuously collects these two signals. Only when both "position ready" and "lock confirmation" signals are received simultaneously will the logic controller send a "track safe, passage permitted" signal to the crane's main control system and maintain the electromagnet power supply circuit connected. If either signal is invalid or lost, the logic controller will immediately cut off the electromagnet power supply to prevent damage caused by forced attraction when misaligned, and send a "track fault, passage prohibited" command to the crane's main control system. The crane control program will automatically prohibit any movement in the direction of the extended track.

[0027] A further technical solution is that the safety interlocking system also includes at least one support status sensor, which is installed on the support column and is used to detect whether the support column is in a ground-bearing working state and generate a corresponding status signal.

[0028] The signal output terminal of the supporting state sensor is communicatively connected to another input terminal of the logic controller.

[0029] The logic controller is configured to determine that the folding track assembly is in a safe working position only when it simultaneously receives a valid position sensor signal, a valid locking status feedback signal, and a valid support status signal; otherwise, it outputs a prohibition signal through the first output terminal and the second output terminal.

[0030] A further technical solution is that the side of the fixed crossbeam is provided with a support frame for supporting the crane running chain, and the side of the frame of the folding track assembly is provided with an extension plate. When the folding track assemblies are in the storage position, the pairs of folding track assemblies are fixed together by bolts connecting the extension plates.

[0031] A further technical solution is that an elastic buffer pad is provided at the connection between the extension plate and the frame, and the paired folding track assemblies are fixed together in the storage position by bolts connecting the extension plate.

[0032] The present invention also provides a method for operating the self-locking adjustable folding track system, comprising an unfolding step:

[0033] Release the storage fixation of the folding track assembly and unfold it outward on the high mounting plane via the hinge assembly;

[0034] The height of the operating support column is finely adjusted so that the movable track beam is flush with and aligned with the track surface of the fixed crossbeam;

[0035] The mechanical positioning units of the self-locking track docking mechanism cooperate with each other;

[0036] The electrical control circuit of the self-locking track docking mechanism is triggered, which energizes the electromagnet and completes the adsorption and locking.

[0037] Once the safety interlock system confirms successful locking, the crane's operation restrictions are lifted.

[0038] The advantages and beneficial effects of this invention are as follows:

[0039] It achieves horizontal flexible expansion and storage of the high-position track. Through the hinged folding design, the track can be flexibly unfolded and retracted in the horizontal plane, fundamentally solving the problem that fixed track or pure vertical lifting systems cannot cope with horizontal changes in production line layout.

[0040] This invention presents a precision docking solution for heavy-duty folding tracks. Unlike existing approaches that use electromagnetic technology for vehicle propulsion or levitation, this invention combines electromagnetic adsorption self-locking with mechanical positioning pins, specifically for rigid connections at the ends of track modules. This solution enables rapid, automated, millimeter-level high-precision docking, generating a uniform and powerful locking force to meet the high stability requirements of heavy equipment operation at track joints.

[0041] To address the unevenness of the high-level installation surface, independently adjustable support columns and locking casters were designed to meet the leveling and fixing requirements of the movable extension track, ensuring the horizontality of the extension track and solving the problem of high-altitude adaptive leveling of the extension track.

[0042] By directly linking the physical state of the track components (such as whether they are fully deployed and locked, and whether the support columns are under load) with the crane's control system through sensors, intelligent closed-loop management of status perception and operating permissions is achieved, resulting in a more advanced safety logic.

[0043] Instead of pursuing absolute precision alignment, a flexible transition section is incorporated at the interface of the two tracks. Even if steps or misalignments occur, the flexible transition section prevents equipment from experiencing bumps and vibrations during operation. This reduces manufacturing and installation difficulty, ensures the static and dynamic rigidity of the tracks under heavy loads and high-speed operation, and suppresses harmful vibrations. Furthermore, extending the transition section on both sides to cover the track surface meets the cleanroom requirements for dust-free, oil-free, corrosion-resistant, and low-emission properties. Shifting from pursuing absolute precision to utilizing flexible structures to absorb deviations effectively reduces costs. Adopting a reverse thinking approach, moving from requiring perfect alignment to allowing a certain degree of misalignment, ingeniously solves other problems. Attached Figure Description

[0044] Figure 1 This is a schematic diagram of the overall structure of the self-locking adjustable folding track system for semiconductor manufacturing equipment according to Embodiment 1 of the present invention when the folding track assembly is opened;

[0045] Figure 2 This is a schematic diagram of the overall structure of the present invention when the folding track assembly is closed;

[0046] Figure 3 yes Figure 1 A partial structural diagram of the large rectangular dashed box;

[0047] Figure 4 yes Figure 1 A partial structural diagram of a small to medium-sized rectangular dashed box;

[0048] Figure 5 yes Figure 2 A partial schematic diagram of the dashed rectangular frame;

[0049] Figure 6 This is a schematic diagram of Embodiment 2 of the present invention;

[0050] Figure 7 yes Figure 6 A magnified view of the upper left corner;

[0051] Figure 8 yes Figure 6 The left view;

[0052] Figure 9 yes Figure 8 A magnified view of the upper right corner;

[0053] Figure 10 yes Figure 9 Enlarged schematic diagram of the adaptive flexible bridging module;

[0054] Figure 11 yes Figure 8 A schematic diagram after removing the left-side column and the upper fixed beam;

[0055] Figure 12 yes Figure 11 A partially enlarged schematic diagram of the upper part.

[0056] In the diagram: 1. Column; 2. Fixed crossbeam; 3. Main beam; 401. Frame; 402. Support column; 403. Movable track beam; 404. Caster wheel; 405. Extension plate; 406. Hinge mounting plate; 4031. Base; 4032. Screw; 4033. Locking nut; 4034. Threaded sleeve; 4035. Knob; 4036. Anti-slip pad; 501. Fixed seat; 502. Hinge fixed seat; 503. Connecting rod; 504. Rotary hinge; 6. Support frame; 7. Folding track assembly; 8. Electromagnet; 9. Adaptive flexible bridging module; 90a. Horizontal part; 90b. Vertical part; 901. Dustproof edge protector; 902. Preload mechanism. Detailed Implementation

[0057] The specific embodiments of the present invention will be further described below with reference to the accompanying drawings and examples. The following examples are only used to more clearly illustrate the technical solutions of the present invention and should not be construed as limiting the scope of protection of the present invention.

[0058] Example 1: As Figures 1 to 5 As shown ( Figure 5 The image shows the electromagnet and the locating pin / hole; Figure 3 (Exhibition frame, support columns, casters, etc.), this invention is a self-locking adjustable folding track system for semiconductor manufacturing equipment, designed to solve the problem of high-position fixed tracks being unable to flexibly expand horizontally and lock quickly. For example... Figures 1 to 5 As shown, the present invention provides a self-locking adjustable folding track system. The system is erected on a steel structure platform or maintenance walkway above the workshop, which is collectively referred to herein as a high-level installation plane. The system mainly consists of a fixed part and a movable extension part, and is erected on the installation plane above the workshop (such as a steel structure platform, maintenance walkway, or dedicated installation base above the workshop).

[0059] The fixed part is the main steel structure of the crane, including the gantry frame fixed to the workshop structure (such as a floor slab or a specially designed bracket) by columns 1. Fixed crossbeams 2 are erected between the gantry frames, and main beams 3 can be installed above multiple sets of gantry frames. High-precision crane running rails are laid on the upper surface of the fixed crossbeams 2, and support frames 6 for supporting the drive chain are welded to their sides.

[0060] The movable extension section, namely the folding track assembly 7, is connected to the upper side of the column 1 via a set of hinge components (consisting of a fixed base 501, a connecting rod 503, a hinge fixed base 502, and a rotating hinge 504). The main body of the folding track assembly 7 is a rigid frame 401, with a movable track beam 403 fixed at its top, which is identical in specifications to the track of the fixed crossbeam 2. An electromagnet 8 and a positioning pin (or positioning hole) are embedded on the inner side of the end of the movable track beam 403. In its initial state, the folding track assembly 7 lies flat on the mounting plane and is held in a retracted state by a combined fixing mechanism (such as an extension plate 405 and bolts), typically placed parallel to or side-by-side against the workshop side wall. The fixed crossbeam 2 and the movable track beam 403 are identical in shape, each consisting of an I-beam and rectangular plates fixed at both ends along the length of the I-beam; a crane running track is fixedly mounted on the top surface of the I-beam.

[0061] Adjustable support and auxiliary movement mechanism: Polyurethane casters 404 with foot brakes are installed at the four corners of the bottom of frame 401, and two sets of fine-tunable support columns 402 are installed on both sides of the middle section. The casters 404 are used to roll on the elevated mounting plane or integrated elevated mounting plane (or maintenance walkway) where the track system is located, assisting in moving the heavy frame components during unfolding or folding, converting sliding friction into rolling friction. The adjustment mechanism of the support column 402 is as follows: rotating the knob 4035 drives the threaded sleeve 4034 to rotate. Since the screw 4032 is restricted from rotating by the base 4031, the threaded sleeve 4034 will move up and down along the screw 4032, thereby raising or lowering the frame 401. After adjustment, it can be locked with the locking nut 4033. In the working state, when the support column 402 is unscrewed, the anti-slip pad 4036 of its base 4031 compacts the load-bearing elevated mounting plane. At this time, the casters 404 should be suspended off the ground to ensure the rigidity of the track system. When in motion, the support column is rotated up, and the weight is borne by the casters.

[0062] Self-locking track docking mechanism, such as Figure 5 As shown, electromagnets 8 are embedded in the mating surfaces of the fixed crossbeam 2 and the movable track beam 403, and are encapsulated in epoxy resin insulating shells. One end face has a tapered positioning pin, and the other has a matching positioning hole. During mating, the height is first roughly adjusted using the support column 402, and then the folding track assembly 7 is pushed to allow the positioning pin to slide into the positioning hole, completing the initial alignment. At this point, the misalignment of the two track interfaces is controlled within a very small range. When the operator presses the control button, the DC24V safe voltage connects the electromagnet 8 circuit, and the powerful magnetic force instantly and tightly attracts the two end faces together, achieving a seamless rigid connection with millimeter-level or even higher precision.

[0063] Safety interlocking system: A non-contact position sensor (such as a proximity switch) is installed near the hinge on frame 401 to detect whether the folding track assembly 7 has rotated to the horizontal unfolded working position. The electrical control circuit of the self-locking track docking mechanism is equipped with a current detection or magnetic induction unit as a locking status feedback terminal to confirm whether the electromagnet 8 has been energized and generated an effective attraction force.

[0064] The signal output terminal and the locking status feedback terminal of the position sensor are both connected to a logic controller (such as a programmable logic controller PLC integrated in a crane system).

[0065] The logic controller operates as follows: it continuously acquires track position signals from position sensors and electromagnetic locking signals from the locking status feedback terminal. Only when it simultaneously receives a valid track position signal (indicating that the component has been deployed) and a valid electromagnetic locking signal (indicating that the docking point has been rigidly locked) will the logic controller determine that the folding track assembly 7 is in a safe operating position.

[0066] In this state, the logic controller performs two operations: First, its first output terminal continues to send an enable signal to the enable terminal of the electrical control circuit to maintain the adsorption state of the electromagnet 8; second, its second output terminal sends an interlock release signal of "track safe, passage permitted" to the crane's operation control unit.

[0067] Once the logic controller detects that either the track position signal or the electromagnetic locking signal is invalid or missing (i.e., it determines that the position is not in a safe working position), it will immediately cut off the power supply to the electromagnet through the first output terminal (implementing a power-off lockout) and send a "track fault, prohibit passage" command to the crane control system through the second output terminal. Based on this, the crane control program will automatically prohibit any drive mechanism from moving in the direction of the extended track, thereby achieving mandatory safety interlocking.

[0068] As a preferred implementation, to further enhance system safety, a pressure sensor or displacement sensor can be installed on the support column 402 to detect whether the support column has landed and is under load. This support load signal can also be connected to the logic controller. In this case, the logic controller needs to further verify the validity of the support load signal based on the validity of the track position and electromagnetic locking signal before finally determining that the system has entered a safe operating position.

[0069] Brief description of the operation method (expanded process):

[0070] Preparation and Deployment: The operator reaches the elevated installation surface of the track system via stairs or a platform. Loosen the bolts securing the extension plate 405, release the brakes on the casters 404, push the folding track assembly 7 away from the column, and rotate it around the hinge to the horizontally deployed position. Temporarily secure the casters by depressing their brakes.

[0071] Leveling and rough alignment: Using a level, adjust the knobs 4035 of the two support columns 402 sequentially until the track surface of the movable track beam 403 is level and aligned with the track surface of the fixed crossbeam 2. Continue to slowly push the assembly until the positioning pin is inserted into the positioning hole.

[0072] Precision locking and safety confirmation: Press the electromagnetic lock start button. Confirm that the electromagnet is firmly engaged (usually indicated by an indicator light or audible sound). At this point, the safety interlock system should detect that all conditions are met, and the permission indicator light will illuminate.

[0073] Storage and Reset: First, disconnect the power to release the electromagnetic lock. Rotate the support column 402 to bring the casters to the ground. Release the brake, push the assembly back to its original position next to the column, and use bolts to fix the extension plates 405 of the left and right assemblies together. The nitrile rubber buffer pads at the connection of the extension plates 405 can reduce impact and prevent loosening.

[0074] This embodiment achieves rapid, safe, and highly rigid expansion and retraction of the high-mounted crane track in the horizontal plane through the synergy of four core features: horizontal hinge folding, adjustable support column fine-tuning, electromagnetic-mechanical composite self-locking, and safety interlocking. It achieves effects that single, older technologies could not: high-altitude, horizontal, flexible, rapid, highly rigid, and safe track expansion.

[0075] Example 2: The difference from Example 1 is that, as shown in Example 2... Figures 6 to 12 As shown (for ease of illustration), Figure 6 (The adaptive flexible bridging module 9 is not shown.) Based on Embodiment 1, the self-locking track docking mechanism has been creatively improved. The difference lies in:

[0076] In this embodiment, the self-locking track docking mechanism retains the electromagnet 8 and the mechanical positioning unit (positioning pin / hole), and adds an adaptive flexible bridging module 9 to the docking end face of the fixed crossbeam 2 and the movable track beam 403.

[0077] The adaptive flexible bridging module 9 has an L-shaped enveloping structure. Its horizontal part 90a is used to cover and connect the crane running track end of the top of the fixed crossbeam 2 or the movable track beam 403, and its vertical part 90b is used to fix and connect to the rectangular plate of the fixed crossbeam 2 or the movable track beam 403 or the side of the crane running track.

[0078] Detailed shape of the adaptive flexible bridging module: Horizontal section 90a, made of reinforced polyurethane elastomer. Its top surface is a smooth, arched transition surface that rises centrally and slopes gently towards both ends along the direction of the crane's running track, designed for contact with the crane wheels. Its bottom surface is flat and fits against the top surface of the crane's running track. Dustproof edge protector 901, a thin-walled structure extending upwards from the two sides of the horizontal section 90a, partially covers the top and sides of the track after the adaptive flexible bridging module is docked, serving as a dustproof and chip-collecting function. Vertical section 90b, integrally formed with the horizontal section, extends downwards. It has mounting holes or integrated quick-release clips. Pre-compression mechanism 902, located on the mounting surface of the vertical section 90b of the adaptive flexible bridging module (i.e., the surface in contact with the rectangular plate or the side of the track). Specifically, it can be configured as an array of multiple butterfly springs fixed to the vertical section 90b, or an integral elastic pad (such as a silicone pad). When the adaptive flexible bridging module is fastened to the track beam by bolts or clips, the preload mechanism 902 is first compressed, thereby ensuring that the bottom surface of the horizontal part 90a of the adaptive flexible bridging module always applies a controllable and continuous clamping force to the top surface of the crane running track. This preload is the basis for the adaptive function of the adaptive flexible bridging module, eliminating gaps before track docking and providing buffering and following during docking.

[0079] The installation method involves placing the horizontal portion 90a of the adaptive flexible bridging module 9 on the top surface of the end of the crane running track, and attaching the vertical portion 90b to the rectangular plate (or the side of the crane running track) at the end of the I-beam. The adaptive flexible bridging module 9 is detachably fixed to the rectangular plate of the fixed crossbeam 2 (or the side of the movable track beam 403) or the side of the crane running track using bolts passing through the mounting holes on the vertical portion 90b, or by utilizing its integrated clips that engage with the slots on the rectangular plate. After installation, the transition surface of the horizontal portion of the adaptive flexible bridging module should smoothly align with the corresponding adaptive flexible bridging module on the movable track beam 403 (or the fixed crossbeam 2), forming a complete bridging channel.

[0080] The installation position and dimensions of the adaptive flexible bridging module 9 are designed to avoid the electromagnet 8 and mechanical positioning unit located at the docking end of the track beam, ensuring that their functions do not interfere with each other.

[0081] The core function of this adaptive flexible bridging module is to actively absorb and compensate for installation deviations between tracks (such as height differences and parallel misalignment) over a long range of travel, and to provide a smooth, shock-free transition for the wheels.

[0082] The two adaptive flexible bridging modules 9 are mirror-symmetric components. The vertical portion 90b of one adaptive flexible bridging module is located on one side of its horizontal portion 90a, while the vertical portion 90b of the other adaptive flexible bridging module is located on the opposite side of its horizontal portion 90a. When the two folding track assemblies 7 are folded together, the vertical portions 90b of the two adaptive flexible bridging modules face outwards from the assemblies, thus preventing them from contacting each other. This avoids interference between the vertical portions 90b of the two adaptive flexible bridging modules 9 when the paired folding track assemblies 7 are folded.

[0083] Due to the introduction of the adaptive flexible bridging module 9, the deployment and docking process in Embodiment 2 differs from that in Embodiment 1, and its fault tolerance in leveling and docking is significantly enhanced.

[0084] a. Coarse Adjustment and Flexible Pre-Contact: After completing the preparation and deployment steps, the operator adjusts the support column 402 to ensure that the movable track beam 403 and the fixed crossbeam 2 are roughly horizontal and aligned. Then, the folding track assembly 7 is pushed, causing the working surfaces of the adaptive flexible bridging modules 9 on both sides to first contact and compress against each other. During this process, the elastic deformation of the adaptive flexible bridging modules automatically absorbs deviations on the order of millimeters; the operator only experiences a gradual increase in resistance, eliminating the need for extremely precise initial alignment.

[0085] b. Electromagnetic locking and status confirmation: When the adaptive flexible bridging module 9 is observed to be compressed until its surface aligns with the docking reference mark, the electromagnetic lock is triggered. The electromagnet 8 is energized, generating a strong magnetic force. This magnetic force primarily acts to bring the fixed crossbeam 2 and the movable track beam 403 closer together. During this process, the working surfaces of the adaptive flexible bridging modules 9, fixed to the ends of both, come into contact with each other and are further compressed and deformed until the fixed crossbeam 2 and the movable track beam 403 reach the mechanically designed limit of proximity or the predetermined gap. At this point, the docking state is characterized by the electromagnetic lock providing the main rigid holding force; while the adaptive flexible bridging module 9, in its optimal compressed working state, fills all the microscopic gaps between the track end faces, forming a smooth and continuous travel surface.

[0086] c. Enhanced safety logic judgment: In the safety interlocking system of this embodiment, in addition to receiving track position and electromagnetic locking signals, the logic controller can also add a docking process monitoring signal originating from the electromagnet drive circuit. The controller makes a judgment by analyzing the current-time curve after the electromagnet is energized: if the current rises steadily to the preset value and remains stable, it indicates that the docking process is smooth and the adaptive flexible bridging module is working normally; if the current curve shows abnormal fluctuations or fails to reach the preset value, it may indicate the presence of a large obstacle or damage to the adaptive flexible bridging module. The controller will determine that the docking has failed and trigger an alarm, while simultaneously prohibiting the crane from passing.

[0087] Compared to Embodiment 1, Embodiment 2 achieves the following significant improvements by introducing an adaptive flexible bridging module 9:

[0088] Reduced reliance on precision: The required docking precision of the track is reduced from millimeter-level precision adjustment to centimeter-level coarse adjustment, which greatly reduces the difficulty and cost of installation and debugging.

[0089] Improved smoothness of operation: The buffering effect of the adaptive flexible bridging module can more effectively attenuate the impact and vibration when the wheel passes through the joint, which is especially suitable for high-speed or heavy-load operation scenarios.

[0090] Enhanced environmental adaptability: The dustproof edge guard 901 of the adaptive flexible bridging module effectively prevents contaminants from falling from the interface and collects wear debris, which is more in line with the requirements of high-level cleanrooms.

[0091] More preferably, condition monitoring redundancy is provided: by analyzing the operating current of the electromagnet, indirect monitoring of the docking process can be achieved, providing additional data reference for judging the safety status of the system.

[0092] Note: Other parts of Embodiment 2, such as the fixing part, the basic structure of the folding component, the support column and universal wheel mechanism, and the basic framework of the safety interlocking system, are the same as those in Embodiment 1, and will not be described again here.

[0093] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A self-locking adjustable folding track system for semiconductor manufacturing equipment, characterized in that, The system is erected on the installation plane above the workshop. The system includes a fixed beam, which is erected above the workshop and includes columns and fixed crossbeams. The upper surface of the fixed crossbeams forms or is fixedly installed with a crane running track. At least one set of folding track assemblies is rotatably connected to the column via hinge assemblies. The folding track assembly has a first state in which it is housed on the mounting plane, and a second working state in which it is horizontally rotated and unfolded about a vertical axis on the mounting plane to the side of the fixed crossbeam. The folding track assembly includes a frame and a movable track beam disposed on its top. When in the second working state, the extension direction of the movable track beam is aligned with the crane running track on the fixed crossbeam. The self-locking track docking mechanism is respectively set at the docking ends of the movable track beam and the fixed crossbeam that are close to each other, and is used to realize the automatic adsorption locking and precise alignment of the movable track beam and the fixed crossbeam when the folding track assembly is unfolded to the working position.

2. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 1, characterized in that, The frame bottom of the folding track assembly is provided with casters for assisting movement on the mounting plane, and at least two support columns with independently adjustable height; the support column includes a threaded sleeve connected to the frame, a screw threaded to the threaded sleeve, a base fixed to the bottom of the screw, and a knob for driving the threaded sleeve to rotate to adjust the height.

3. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 2, characterized in that, The adjustable stroke of the support column allows it to have a first state and a second state: In the first state, the base contacts and bears the weight of the mounting surface, while the casters are suspended in the air; In the second state, the base is lifted off the mounting plane, and the casters contact the mounting plane and can roll.

4. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 3, characterized in that, The self-locking track docking mechanism includes: Electromagnets respectively embedded at the joint ends of the movable track beam and the fixed crossbeam; Mechanical positioning units, respectively located at the joint ends of the movable track beam and the fixed crossbeam, are used for guidance and coarse positioning before electromagnetic adsorption. When the folding track assembly is unfolded to the working position and the mechanical positioning units cooperate with each other, the electromagnet is energized, causing the movable track beam and the fixed crossbeam to attract and lock each other.

5. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 4, characterized in that, It also includes a safety interlocking system, which comprises: Logic controller; A position sensor mounted on the folding track assembly is used to detect whether the folding track assembly is in the unfolded and locked working position; The signal output terminal of the position sensor is communicatively connected to the first input terminal of the logic controller. The electrical control circuit of the self-locking track docking mechanism is provided with a locking status feedback terminal, which is communicatively connected to the second input terminal of the logic controller; The first output terminal of the logic controller is communicatively connected to the enable terminal of the electrical control circuit, and is used to control the power on and power off of the self-locking track docking mechanism; The second output terminal of the logic controller is communicatively connected to the crane's operation control unit, and is used to control whether the crane is allowed to move in the direction of the folding track assembly; Specifically, when the logic controller determines that the folding track assembly is not in a safe working position based on the signal from the position sensor and / or the locking state feedback terminal, it simultaneously outputs a prohibition signal through the first output terminal and the second output terminal.

6. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 5, characterized in that, The safety interlocking system also includes at least one support status sensor, which is installed on the support column and is used to detect whether the support column is in a ground-bearing working state and generate a corresponding status signal. The signal output terminal of the supporting state sensor is communicatively connected to another input terminal of the logic controller. The logic controller is configured to determine that the folding track assembly is in a safe working position only when it simultaneously receives a valid position sensor signal, a valid locking status feedback signal, and a valid support status signal. Otherwise, an inhibit signal is output through the first and second output terminals.

7. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 6, characterized in that, The fixed crossbeam has a support frame on its side for supporting the crane running chain, and the frame of the folding track assembly has an extension plate on its side. When the folding track assemblies are in the storage position, the pairs of folding track assemblies are fixed together by bolts connecting the extension plates.

8. The self-locking adjustable folding track system for semiconductor manufacturing equipment according to claim 7, characterized in that, An elastic buffer pad is provided at the connection between the extension plate and the frame, and the paired folding track assemblies are fixed together in the storage position by bolts connecting the extension plate.

9. A method of operating a self-locking adjustable folding track system for semiconductor manufacturing equipment as described in any one of claims 1-8, characterized in that, Including the unfolding steps: Release the storage fixation of the folding track assembly and unfold it outward on the mounting plane via the hinge assembly; The height of the operating support column is finely adjusted to make the movable track beam flush with and aligned with the track surface of the fixed crossbeam. The mechanical positioning units of the self-locking track docking mechanism cooperate with each other; The electrical control circuit of the self-locking track docking mechanism is triggered to energize the electromagnet and complete the adsorption and locking process. Once the safety interlock system confirms successful locking, the crane's operation restrictions are lifted.

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