Method, system and in-situ measuring device for automatic recognition of the angle of a fiber optic probe

CN121954437BActive Publication Date: 2026-06-09SHANGHAI CHEYITIAN TECH CO LTD

Patent Information

Authority / Receiving Office: CN · China
Patent Type: Patents(China)
Current Assignee / Owner: SHANGHAI CHEYITIAN TECH CO LTD
Filing Date: 2026-04-01
Publication Date: 2026-06-09

AI Technical Summary

Technical Problem

In the semiconductor manufacturing process, existing technologies make it difficult for fiber optic probes to accurately identify angle ratios under conditions of high temperature and strong background radiation, leading to decreased measurement accuracy and parameter mismatch.

Method used

By employing a beam adjustment component and a variable aperture module, the light intensity signal of the optical fiber probe's return light at different apertures of the variable aperture is acquired to form a raw dataset, which is then matched with a pre-built database to identify the target angle ratio.

Benefits of technology

It enables automatic identification of angle ratios without changing the hardware structure of the fiber optic probe, improving measurement accuracy and parameter consistency, reducing the risk of mismatch, and enhancing the universal adaptability of the device.

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Abstract

This application provides an automatic angle ratio identification method, system, and in-situ measurement device for fiber optic probes, relating to the field of semiconductor testing technology. This application utilizes a variable aperture of a beam adjustment component to sample the returned light from the fiber optic probe according to a preset aperture sequence, forming a raw dataset and extracting feature vectors. These vectors are then matched with a pre-calibrated standard feature set in a database to output the target angle ratio. Using this scheme, this application can achieve automatic angle ratio identification without changing the hardware structure of the fiber optic probe. Simultaneously, since the standard feature set is established under unified preset calibration conditions, the matching process has better robustness to individual probe differences, effectively reducing the risk of manual configuration and misconfiguration, improving parameter consistency and measurement accuracy under high-temperature and strong background radiation conditions, and enhancing the universal adaptability of the in-situ measurement device to different probes.

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